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JPS5594474A - Ion plating apparatus for tube inside using laser beam - Google Patents

Ion plating apparatus for tube inside using laser beam

Info

Publication number
JPS5594474A
JPS5594474A JP239979A JP239979A JPS5594474A JP S5594474 A JPS5594474 A JP S5594474A JP 239979 A JP239979 A JP 239979A JP 239979 A JP239979 A JP 239979A JP S5594474 A JPS5594474 A JP S5594474A
Authority
JP
Japan
Prior art keywords
tube
plated
laser
condenser
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP239979A
Other languages
Japanese (ja)
Inventor
Torazo Uchiki
Munetaka Kuribayashi
Hisayoshi Okabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to JP239979A priority Critical patent/JPS5594474A/en
Publication of JPS5594474A publication Critical patent/JPS5594474A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To enable the inside of a long-size tube to be plated by attaching a laser generator to the tube provided with a condenser, gas exhaust and feed means, etc. and constituting them so that the tube inside can be plated. CONSTITUTION:Tube 12 to be plated is hermetically sealed with flange 10 and laser beam window 3, and vacuum pump 15, condenser 6 holder 7 which doubles as a gas feed pipe, etc. are attached to tube 12. High voltage cable 13 is connected to tube 12 and used as a cathode, and plating metal 8 as an anode is held in tube with holder 9. Laser beams from laser generator 1 are centered at metal 8 through window 2 and condenser 6, whereby metal 8 is melted, evaporated, and ionized by glow discharge to ion-plate the inside of tube 12. Since a heat source unit can be placed far away by making use of laser, the inside of long-size tube 12 is enabled to be ion- plated.
JP239979A 1979-01-12 1979-01-12 Ion plating apparatus for tube inside using laser beam Pending JPS5594474A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP239979A JPS5594474A (en) 1979-01-12 1979-01-12 Ion plating apparatus for tube inside using laser beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP239979A JPS5594474A (en) 1979-01-12 1979-01-12 Ion plating apparatus for tube inside using laser beam

Publications (1)

Publication Number Publication Date
JPS5594474A true JPS5594474A (en) 1980-07-17

Family

ID=11528155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP239979A Pending JPS5594474A (en) 1979-01-12 1979-01-12 Ion plating apparatus for tube inside using laser beam

Country Status (1)

Country Link
JP (1) JPS5594474A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739169A (en) * 1980-08-19 1982-03-04 Sekisui Chem Co Ltd Preparation of thin film vapor deposited object
JPS57198260A (en) * 1981-05-29 1982-12-04 Hitachi Ltd Method and device for metallic vapor deposition on inside surface of vacuum vessel
JPS6393858A (en) * 1986-10-06 1988-04-25 Ishikawajima Harima Heavy Ind Co Ltd Sputtering device
WO1995021948A1 (en) * 1994-02-09 1995-08-17 The Coca-Cola Company Hollow containers with inert or impermeable inner surface through plasma-assisted deposition of a primarily inorganic substance
GB2517436A (en) * 2013-08-19 2015-02-25 Pct Protective Coating Technologies Ltd Coating or sealing an internal surface of a workpiece

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739169A (en) * 1980-08-19 1982-03-04 Sekisui Chem Co Ltd Preparation of thin film vapor deposited object
JPS57198260A (en) * 1981-05-29 1982-12-04 Hitachi Ltd Method and device for metallic vapor deposition on inside surface of vacuum vessel
JPS6393858A (en) * 1986-10-06 1988-04-25 Ishikawajima Harima Heavy Ind Co Ltd Sputtering device
WO1995021948A1 (en) * 1994-02-09 1995-08-17 The Coca-Cola Company Hollow containers with inert or impermeable inner surface through plasma-assisted deposition of a primarily inorganic substance
US5565248A (en) * 1994-02-09 1996-10-15 The Coca-Cola Company Method and apparatus for coating hollow containers through plasma-assisted deposition of an inorganic substance
GB2517436A (en) * 2013-08-19 2015-02-25 Pct Protective Coating Technologies Ltd Coating or sealing an internal surface of a workpiece

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