JPH11183863A - Inspection device for substrate to be measured - Google Patents

Abstract

PROBLEM TO BE SOLVED: To lower the cost of an inspection device by providing an alignment means aligning a received substrate to be measured while selectively displacing the substrate to be measured in a horizontal state and in an inclined state to simplify the constitution of the device. SOLUTION: An air cylinder 96 is extended and a link stage 60 is rotated around the axial line of a shaft 94 and an alignment stage 54 is inclined in a state in which a substrate to be measured 12 is attracted to an attracting pad 70 and the state of the substrate 12 is changed from the horizontal state to the inclined state. In this state, the transferring of the substrate 12 to an alignment mechanism and a relay mechanism is performed. When the substrate 12 is transferred from the alignment mechanism to the relay mechanisms, the first movable body of one side of either of a first or a second relay mechanism is moved to a first position where a transfer with respect to a measuring stage is to be performed and the first movable body of the other side is moved to a second position where a transfer with respect to the alignment mechanism is to be performed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection apparatus for conducting a current test on a substrate to be measured such as a liquid crystal panel.
The present invention relates to an apparatus for measuring a substrate to be measured in an inclined state.

[0002]

2. Description of the Related Art As one of inspection apparatuses for measuring (inspection) a substrate to be measured such as a liquid crystal display panel (liquid crystal display panel) in an oblique state, the substrate to be measured is tilted from a horizontal state by a gripping / transporting mechanism. There is one that converts the state and vice versa (Japanese Patent No. 2549882).

In this inspection apparatus, an unmeasured (not inspected)
The substrate to be measured is taken out of the cassette horizontally by the take-out arm, then aligned by the alignment mechanism, then raised to a predetermined height position by the sub chuck, and then converted from the horizontal state to the inclined state by the gripping / transporting mechanism. Then, in that state, it is conveyed to a measuring unit (inspection unit) and measured by the measuring unit.

On the other hand, the measured substrate to be measured is received in a tilted state by the gripping / transporting mechanism in the measuring section, transported to the loader in that state, and then returned horizontally by the gripping / transporting mechanism in the loader. Next, it is lowered to a predetermined height by the sub chuck and then returned to the cassette by the take-out arm.

However, the above-described inspection apparatus requires various types of mechanisms such as a take-out arm, an alignment mechanism, a sub-chuck mechanism, a gripping / transporting mechanism, and an inspection stage, and has a complicated structure and is expensive.

[0006]

Therefore, it is important to make the structure simple and inexpensive.

[0007]

The inspection apparatus according to the present invention is an alignment means for transferring a substrate to be measured to first and second processing means, and a horizontal state for transferring the substrate to the first processing means. An alignment means is provided for selectively displacing the measured substrate in an inclined state for transfer to the second processing means and for aligning the received measured substrate.

If the alignment means has not only an alignment function but also a function of changing the substrate to be measured from a horizontal state to an inclined state or vice versa, the means for changing the posture of the substrate to be measured, the alignment means, Since the means for transferring the substrate to be measured between the two is not required as compared with the case where the
It will be cheaper.

The alignment means is a turntable for transferring the substrate to be measured to the first processing means in a horizontal state, and a first axis extending vertically to align the direction of the received substrate. Can be included around the turntable. Thereby, the longitudinal direction of the substrate to be measured can be changed by the alignment means, so that there is no need to provide a special means for aligning the direction of the substrate to be measured.

[0010] The alignment means further includes an alignment stage for transferring the substrate to be measured to the turntable and the first processing means, and selectively displacing the substrate to be measured into a horizontal state and an inclined state. A second extending the alignment stage horizontally.
And a positioning unit for positioning the substrate to be measured with respect to the alignment stage.

The positioning means is disposed on the alignment stage so as to press first and second stoppers disposed on the ment stage and a first edge of the substrate to be measured against the first stopper. The apparatus may include a first pusher and a second pusher disposed on the alignment stage so as to press a second edge of the substrate to be measured against the second stopper. This ensures that the substrate to be measured is positioned.

The driving means includes a link stage that is angularly rotated about the second axis, and a stage driving mechanism that selectively displaces the link stage between an inclined state and a horizontal state. The alignment stage can be supported by the link stage.

The driving means is a position adjusting mechanism supported by the link stage, the position adjusting mechanism adjusting the position of the alignment stage in a third axis direction orthogonal to the substrate to be measured received by the alignment stage. An adjustment mechanism can be included.

The alignment means can be obtained by further including a height changing mechanism for changing a height position of the driving means in the first direction. This ensures that the substrate to be measured is transferred to the transporting means.

[0015] The alignment means may further include one or more suction pads disposed on the alignment stage so as to releasably suction the substrate to be measured.
This ensures that the substrate to be measured is maintained in an inclined state.

[0016] The alignment means may further include one or more suction pads arranged on the turntable to releasably suction the substrate to be measured. Thereby, the direction of the substrate to be measured is surely aligned.

The first processing means may be a transport means or a member on the side of the transport means, and the second processing means may be a measurement stage or a member on the side of the measurement stage. .

[0018]

1 to 4, an inspection apparatus 10 is used as a visual lighting inspection apparatus using a rectangular liquid crystal panel as a substrate to be measured (substrate to be inspected) 12. FIG.

The inspection device 10 includes a main body having an upper front surface having an upwardly inclined surface. The main body is formed in a housing shape by a main body frame in which a plurality of channel members are assembled, and a plurality of panels detachably attached to the main body frame.

The center of the inclined surface of the main body is a measurement section (ie, an inspection section) 14 of the substrate to be measured, and each of the left and right sides of the measurement section is a relay section 16 for the substrate to be measured. The rear portion of the main body is a cassette installation section (that is, a cassette installation table) 18. A central portion in the front-rear direction of the main body is a loader section 20 for transporting the substrate to be measured between the relay section 16 and the cassette installation section 18.

The measurement probe unit 22 is of a known type in which a plurality of probe blocks are mounted on a rectangular substrate, and is arranged in the measurement section 14. The substrate of the probe unit 22 has a rectangular opening 24 for visually inspecting the measured substrate 12 disposed diagonally below. The measurement unit 14 further includes an operation panel 26 for controlling the operation of the inspection device 10 and an optical microscope 28 for observing the panel to be measured transported to the inspection unit 14.

The plurality of cassettes 30 are provided in the cassette installation section 1.
8. In the example shown in the figure, four cassette groups in which a plurality of cassettes 30 are stacked are installed. The substrate to be measured is accommodated in each cassette 30.

The transfer and transfer of the substrate to be measured are performed while the substrate to be measured is kept horizontal by the transfer robot 34 disposed in the loader section 20.

The transport robot 34 is movably supported by a pair of guide rails 36 extending in parallel to the loader section 20 in the left-right direction. The transport robot 34 includes a motor 38 and a lead screw 40 rotated by the motor. The substrate is moved to an appropriate position in the left-right direction by the mechanism, and transfers and transfers the substrate to be measured to the cassette 30 and an alignment mechanism 50 described later.

The transfer robot 34 moves the slider 48 along the guide rail 36, the drive mechanism 44 mounted on the slider, and is separately driven by the drive mechanism to transfer the substrate to be measured. A pair of robot arms 46 is provided. The substrate to be measured is transport robot 3
By 4, the wafer is conveyed horizontally in a state where the longitudinal direction matches the longitudinal direction of the robot arm 46, and is transferred.

In the transfer robot 34, the cassette 30
The transfer of the substrate to be measured is performed by transferring the substrate to be measured, which has been received by one of the robot arms, to a cassette of an appropriate cassette group, and transferring the unmeasured substrate to be measured in another cassette to the same robot arm or the other. Can be controlled to receive the robot arm.

The transfer of the substrate to be measured to the alignment mechanism 50 includes receiving the measured substrate to be measured by one of the robot arms, and transferring the unmeasured substrate to be received by the other robot arm to the same alignment mechanism 5.
It can be controlled to pass to zero.

The alignment mechanism 50 is disposed in each relay section 16 and on the side of the loader section 20, and is a pre-alignment mechanism in the illustrated example.

As shown in FIGS. 5 to 7, each alignment mechanism 50 includes a turntable 52 for transferring a substrate to be measured in a horizontal state with respect to the transfer robot 34, a turntable 52, and a relay mechanism 100 described later. , 10
2. An alignment stage 54 for transferring a substrate to be measured in a state of being inclined with respect to 2, a lifting base 56 having a rectangular plate shape, a table base 58 mounted on the lifting base 56, and a mounting on the lifting base 56. And a linked stage 60.

The turntable 52 includes a table base 5
8 has a plurality of suction pads 62 on the upper surface which are supported substantially horizontally so as to be rotatable about an axis extending in the vertical direction, and which vacuum-sucks the substrate to be measured in a releasable horizontal state.
The turntable 52 is rotated by an electric motor 64 about an axis extending in the vertical direction so as to adjust the direction of the substrate to be received. The electric motor 64 is attached to the table base 58.

The rotational position of the turntable 52 is determined by a pair of sensors 66 mounted on the table base 58,
It is sensed by the cooperative action with the sensed member 68 attached to the lower side of the turntable 52. The sensors 66 are separated by 90 degrees about the rotation axis of the electric motor 64. For this reason, the rotation range of the turntable 52 is limited to a range of 90 degrees. Thereby, the length of the substrate to be measured is changed from the front-back direction to the left-right direction or vice versa.

The alignment stage 54 is formed in a U-shape surrounding the turntable 52 by a plate material, and has a plurality of suction pads 70 on its upper surface for releasably vacuum-sucking the substrate to be measured.

The alignment stage 54 is supported by a link stage 60 by a linear shaft 72 and a lead screw 74 so as to be able to move up and down. Linear shaft 7
Numeral 2 penetrates a linear bush 76 attached to the link stage 60 in the up-down direction.
Reference numeral 4 is screwed with a nut of an electric motor 78 attached to the link stage 60. Therefore, the alignment stage 54 is moved in the direction of the axis perpendicular to the substrate to be measured received by the alignment stage 54 by the rotation of the electric motor 78.

Two sets of stoppers 80 and two sets of pushers 82 are attached to the alignment stage 54. The stopper 80 is provided at a position corresponding to two adjacent edges of the virtual rectangle, and the pusher 82 is provided at a position corresponding to another adjacent edge of the rectangle.

Each pusher 82 is rotated by an actuator 84 between a position shown by a dotted line and a position shown by a solid line in FIG. Specifically, when the pusher 82 transfers the substrate to be measured to the transfer robot 34, the pusher 82 is retracted as indicated by a dotted line, and after receiving the substrate to be measured, The substrate to be measured is rotated to the position shown by the solid line and presses the substrate to be measured against the stopper 80 facing the substrate. As a result, the edge of the substrate to be measured comes into contact with the stopper 80 so that the alignment stage 5
4 is aligned. Then, it is sucked by the suction pad 62.

The elevating base 56 is substantially horizontally attached to the lower ends of a plurality of shafts 88 slidably passing vertically through a pair of frames 86 connected to the apparatus main body. It is connected to the piston rods of the paired air cylinders 90. Both air cylinders 90 extend and contract in synchronization. For this reason, the height position of the elevating / lowering portion base 56 and various members supported by the same can be changed by the air cylinder 90.

The link stage 60 is composed of a pair of brackets 92 mounted on the elevating base 56 at intervals in the horizontal direction and a pair of brackets 9 using bearings (not shown).
2 with a shaft 94 rotatably assembled
It is mounted on a lifting base 56 so as to be able to rotate (axis movement) around an axis extending in the horizontal direction.

The link stage 60 is mounted on the air cylinder 9
6 is connected to the lifting base 56. The air cylinder 96 has a connection center connected to the lifting base 56 by a bracket 98 and is pivotally connected to the link stage 60 so as to be slightly above the axis of the shaft 94.

When the air cylinder 96 is extended from the contracted state shown in FIG. 7, the link stage 60 and various members supported by the link stage 60 are moved to the shaft 9 as shown in FIG.
The substrate 4 is rotated about the lifting base 56 with the fulcrum 4 as a fulcrum, thereby changing the substrate to be measured received by the alignment base 54 from a horizontal state to an inclined state.

First and second relay mechanisms 100 and 102
Are arranged in each relay section 16 so as to be inclined forward of the alignment mechanism 50.

As shown in FIGS. 8 to 11, each of the relay mechanisms 100 and 102 has the pair of bases 104 supported by the main body frame, and the first movable body 106 extends along an imaginary inclined surface obliquely upward. It is arranged on the base 104 so as to be movable up and down.

The two bases 104 are formed of long plate-like members. The left and right sides of the first movable body 106 are formed on the main body frame so as to extend in the vertical direction along the inclined surface in the vertical direction. Are linked.

The first movable body 106 is formed of a rectangular plate member having a rectangular opening 108 at the center which is larger than the substrate to be processed. First movable body 106
Are supported on both bases 104 by a linear shaft 110 and a lead screw 112.

The linear shaft 110 has one base 1
04 is supported by a pair of brackets 114,
Further, a linear bush 116 attached to one side of the first movable body 106 is slidably penetrated. The lead screw 112 is rotatably attached to the other base 104 by a pair of brackets 118, and is screwed to a lead nut 120 attached to the other side of the first movable body 106.

Each lead screw 112 is rotated by a reversible motor 122 to move the first movable body. The electric motor 122 is attached to the frame 104 by a bracket 124.

The first movable body 106 is selectively provided between a first position for transferring a substrate to be measured to a measurement stage 150 described later and a second position for transferring a substrate to be measured to the alignment mechanism 50. Be moved. FIG.
, The first position is the position of the first movable body 106 of the first relay mechanism 100, the second position is the position of the first movable body 106 of the second relay mechanism 102, Is above the second position. Regardless of whether the first movable body is in the first or second position, the first movable body 106
Is inclined.

First and second relay mechanisms 100 and 102
Are arranged so that one is on the obliquely upper side and the other is on the obliquely lower side, and that the moving path of both first movable bodies 106 is spaced in the direction orthogonal to the substrate to be received. I have. Thus, the movements of the first movable bodies 106 do not interfere with each other.

The first movable body 106 comprises a pair of elongated second
(That is, a sliding arm) 126 is supported so as to be movable in the moving direction of the first movable body 106. The second movable body 126 extends in the left-right direction in parallel with a gap in the moving direction of the first movable body 106.

Each of the second movable bodies 126 is supported at one end by a rail 128 on the first movable body 106, and at the other end by a pair of octagonal link arms 130. It is supported by 106. Accordingly, even if the second movable body 126 is supported by the first movable body 106 in a cantilever manner, the second movable body 126 can move with respect to the first movable body 106 by the rail 128 and the two link arms. 130 regulates correctly.

The second movable body 126 with respect to the rail 128
Can be changed by loosening the set screw 132 screwed to one end of the second movable body 126,
During the measurement, the set screw 132 is kept immovable by tightening the set screw 132.

One end of the link arm 130 is swingably connected to the second movable body 126 by a pivot pin 134, and the other end of the link arm 130 is extended in the longitudinal direction of the link arm 130 by an elongated hole 136 and a pivot pin 138. They are relatively movably connected. As a result, both the second movable bodies 126 are moved in parallel in the direction in which they move toward and away from each other.

A pair of holders 140 for receiving a substrate to be measured are arranged on each second movable body 126 so as to be movable in parallel in the direction of movement of the second movable body 126 by a slide guide 142. The holder 140 is spaced apart in the left-right direction, and has an air cylinder 144 and both holders 140.
Are simultaneously moved by the connecting arm 146 connecting the.

Each holder 140 has a U-shaped recess 148 for receiving the edge of the substrate to be measured (see FIGS. 12 and 13).
Having. Both holders 140 of one second movable body 126
And both holders 140 of the other second movable body 126,
The recesses 148 face each other. The holder 140 of each of the second movable bodies 126 is provided with the air cylinder 1 that is operated in synchronization.
Due to the movement of the substrate to be measured 12, the substrate 12 is moved in the direction in which the substrate to be measured is approached, and when the substrate to be measured is released, the substrate is moved in the direction in which the substrate 12 is released.

The measurement stage 150 is arranged at each relay section 16. As shown in FIGS. 3, 14 and 15,
Each of the measurement stages 150 includes a work table 152 for releasably adsorbing the substrate to be measured, a θ stage 154 for rotating the work table 152 angularly around an axis orthogonal to the substrate to be received, and a work table 152. Fifteen
2 is moved in the direction of an axis perpendicular to the substrate to be measured, and the work table 152 is moved obliquely up and down (Y direction) in a plane parallel to the substrate to be received. The stage includes a Y stage 158 and a stage base 160 that is moved in the horizontal direction (X direction) in a plane parallel to the substrate to be measured.

Work table 152, θ stage 15
4, the Z stage 156, and the Y stage 158 are supported by the θ stage 154, the Z stage 156, the Y stage 158, and the stage base 160, respectively.

The work table 152 has the shape of a rectangular parallelepiped box having a recess opening diagonally upward, and the receiving surface for receiving the substrate to be measured has a rectangular shape. In the recess of the work table 152, a backlight unit (not shown) for illuminating the substrate to be measured is provided.

The work table 152 has on its upper surface a plurality of suction grooves 162 for vacuum-sucking the substrate to be measured, and a plurality of receiving grooves 162 for receiving the holders 140 of the relay mechanisms 100 and 102 when the substrate to be measured is transferred to the relay mechanisms 100 and 102. A notch 164 is provided on the upper surface, and a pair of stoppers 166 are provided.
On each of two adjacent sides of the rectangle, and a pusher 168 on each of the other two adjacent sides of the rectangle.

Each pusher 168 is connected to the actuator 17
In FIG. 14, the stopper 16 is rotated between a position indicated by a dotted line and a position indicated by a solid line in FIG.
Press 6. Thereby, the substrate to be measured is also aligned on the measurement stage 150. Further, the substrate to be measured is precisely aligned by the stages 154 and 158 and the stage base 160 by using a technique of performing image processing of an output signal of a television camera (not shown) that captures an alignment mark formed on the substrate.

The measurement stage 150 includes a linear rail 172, one or more linear guides 174 slidably fitted on the linear rail, a slide rail 176, and a linear rail 172 so as to support the substrate to be measured in an inclined state. One or more slide guides 178 that slidably fit on slide rails
And is received by the frame 180.

Linear rail 170 and linear guide 17
Reference numeral 4 denotes a stator and a mover of the linear motor, respectively. The linear rail 172 and the slide rail 176 are
It is provided between the measurement unit 14 and the corresponding relay unit 16. The linear guide 174 and the slide guide 78 are provided on the stage base 160 of the corresponding measurement stage 150.

Since the measuring stage 150 and the frame 180 are inclined, the measuring stage 150 is provided with a slide guide rail 182 provided on the frame 180.
And a plurality of slide guides 184 which are slidably fitted to the slide rails, so that they are maintained in an inclined state and are prevented from rolling over. The slide guides 184 are attached to the corresponding side portions of the stage base 150.

The rails 172, 176 and 182 may be provided so as to be used in common by both measurement stages 150, or may be provided for each measurement stage 150. In any case, if a linear motor is used as the driving means of the measuring stage 150, compared to the case of using other driving means such as a lead screw, the vibration during the movement of the measuring stage is extremely small. Even when the other measurement stage is moved during the measurement of the upper substrate to be measured, the measurement of the substrate to be measured on one measurement stage is not affected by the movement of the other measurement stage.

In the inspection apparatus 10, when the unmeasured substrate is transferred from the transfer robot 34 to the turntable 52, the alignment base 6 of the alignment mechanism 50 is used.
0 is maintained in a horizontal state, and the lifting base 56 is lowered by the air cylinder 90. Therefore, various members supported by the elevating base 56 are also lowered.
The alignment stage 54 is lowered below the turntable 52 by an electric motor 78 as shown in FIG.

In the above state, first, the substrate to be measured 12 is transported above the turntable 52 by the arm 44 of the transport robot 34 with the longitudinal direction of the substrate 12 set in the front-back direction.

Next, as shown in FIG. 16, the arm 44 of the transfer robot 34 is lowered so that the substrate 12 to be measured is transferred to the turntable 52, and the turntable 5 is turned on.
The second suction pad 62 operates to suck the substrate to be measured 12. As a result, the measured substrate 12 is
Can be received. In this state, the arm 34 is retracted from the alignment mechanism 50.

Next, as shown in FIG. 17, the turntable 52 is rotated by the electric motor 64. The rotation amount of the turntable 52 is limited to 90 degrees by the sensor 66 and the sensed member 68. Thereby, the measured substrate 12
Is rotated so that its longitudinal direction is from the front-back direction to the left-right direction.

Next, the suction pad 62 is moved to the substrate 12 to be measured.
Is released, the alignment stage 54 is moved above the turntable 52 by the rotation of the electric motor 78, and the pusher 82 is rotated by the actuator 84 to push the substrate 12 to be measured against the stopper 80. As a result, as shown in FIG. 18, the measured substrate 12 is moved to the alignment stage 54, and the stopper 80 and the pusher 8 are moved.
2 and the alignment stage 54
Of the substrate 12 to be measured is performed.

Next, the lifting base 56 is connected to the air cylinder 9.
0, so that the relay mechanisms 100, 10
2, the height of the alignment mechanism 50 is adjusted.

Next, the air cylinder 96 is extended. As a result, as shown in FIG. 19, the link stage 60 is rotated around the axis of the shaft 94, so that the alignment stage 54 is tilted while the substrate to be measured 12 is attracted to the suction pad 70, and the substrate to be measured 12 Is changed from the horizontal state to the inclined state. In this state, the substrate to be measured 12 is transferred to the alignment mechanism 50 and the relay mechanism 100 or 102.

When the substrate 12 to be measured is transferred from the alignment mechanism 50 to the relay mechanism 100 (or 102), as shown in FIG. 20, the first movable mechanism of one of the first and second relay mechanisms 100 and 102 is used. The body 106 is the measurement stage 15
0 has been moved to the first position for delivery to the
Has been moved to a second position to deliver to.

FIG. 20 shows the first movable body 106 of the first relay mechanism 100 by a solid line, and the first movable body 106 of the second relay mechanism 102 by a dashed line. In the following description,
The movable body 106 of the first relay mechanism 100 has been moved to the second position. The substrate to be measured 12 is connected to the first relay mechanism 100.
To the movable body 106. However, the same operation is performed when the measured substrate 12 is transferred to the movable body 106 of the second relay mechanism 102.

First, when the alignment stage 54 is tilted, as shown in FIG.
Until 2 reaches the position of holder 140 in a direction perpendicular to this, alignment stage 54 is further protruded by electric motor 78, and in this state, holder 140 is moved by air cylinder 144 in the direction approaching. As a result, the holder 140 receives the edge of the substrate to be measured 12 into the recess 148 and grips the substrate to be measured 12, as indicated by the dotted lines in FIGS.

Next, the suction pad 70 is moved to the substrate 12 to be measured.
Is released, the alignment stage 54 is driven by the electric motor 78.
As a result, it is retracted from the position of the first movable body 106.

By the time the transfer of the unmeasured substrate 12 between the first relay mechanism 100 and the alignment stage 54 is completed, the corresponding measurement stage 150
Is moved from the measurement unit 14 to the corresponding relay unit 16,
The measured substrate to be measured has been transferred to the second repeater 102, and therefore the measurement stage 150 is waiting at the first position.

Therefore, the first relay mechanism 1
00, the first movable body 106 is moved to the first position, the first movable body 106 of the second relay mechanism 102 is moved to the second position, and the second relay mechanism 102 and the alignment mechanism are moved. The measured substrate to be measured is transferred between the first relay mechanism 100 and the corresponding measurement stage 150, and the unmeasured substrate 12 is transferred between the first relay mechanism 100 and the corresponding measurement stage 150.

The delivery of the measured substrate from the second relay mechanism 102 to the alignment mechanism 50 and the delivery of the measured substrate from the alignment mechanism 50 to the transport robot 34 are performed in the reverse manner.

When the first relay mechanism 100 is moved to the first position, the measurement stage 15 waiting at the first position
0, the work table 152 is raised by the Z stage 156, and the unmeasured measurement substrate is moved to the work table 152.
The unmeasured measurement substrate is received from the first relay mechanism 100 by being vacuum-sucked on the substrate, and then waits again in that state.

In one series, the transfer of the unmeasured substrate from the transfer robot 34 to the alignment mechanism 50 is performed, and the transfer of the unmeasured substrate from the alignment mechanism 50 to the measurement stage. During the measurement, the measurement of the substrate to be measured on the other series of measurement stages is performed.

When the measurement of the substrate to be measured on the measurement stage of the other series is completed, the measurement steak is moved to the relay unit 16 of the other series, and the measured substrate to be measured is transferred to the relay mechanism of the other series. After the transfer, the unmeasured substrate is received from the other series of relay mechanisms 102 or 100 and stands by at the other series of relay units 16. In addition, one of the series of measurement stages 150 is moved to the measurement section 14 in a state where an unmeasured substrate to be measured is gripped.

The measured substrate to be measured is placed on the measuring stage 15
When passing from 0 to the relay mechanism 100 or 102, the relay mechanism 100 or 102 performs the reverse operation from the above from the measurement stage 150.

When the substrate to be measured 12 is transferred from the alignment mechanism 50 to the relay mechanism 100 (or 102) and vice versa, the substrate to be measured 12 is sucked by the suction pad 70 and is moved by the stopper 80 and the pusher 82. Since it is grasped, it is prevented from dropping from the alignment stage 54, and is prevented from moving with respect to the alignment stage 54 to be positioned.

When receiving the substrate 12 to be measured from the transfer robot 34 or the relay mechanism 100 (or 102), the pusher 82 presses the substrate 12 to be measured against the stopper 80, and pushes the substrate 12 to be measured into the transfer robot 34 or the relay mechanism. After passing to 100 (or 102), it returns to the standby position.

The transfer robot 34 first transfers the measured substrate to be measured and the unmeasured substrate to one of the alignment mechanisms 50 of one system.
0, the measured substrate and the unmeasured substrate are transferred to the other series of alignment mechanisms 50, and then the measured substrate and the unmeasured substrate are transferred to the other alignment mechanism 50. The operation of transferring the measured substrate and the unmeasured substrate to and from each other is repeated. However, the transfer robot 34
May perform an operation other than the above operation.

As in the inspection apparatus 10, when two paths for transferring the substrate to be measured by the alignment mechanism, the relay mechanism, and the inspection stage are provided, and two relay mechanisms are provided for each series, even if the transfer robot and the probe unit are one, Transfer robots,
The waiting time of each device is significantly reduced as compared with a case where each device such as a delivery device, a measurement stage and a probe unit is provided one by one and a case where two measurement stages are provided,
The processing capacity per unit time is significantly increased.

The present invention is not limited to the above embodiment. For example, the relay mechanism need not be provided. Also, the present invention
The present invention can be applied not only to an apparatus having a plurality of transfer paths for a substrate to be measured, but also to an apparatus having one such transfer path. Further, the present invention can be applied not only to a visual inspection device but also to an automatic inspection device.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of an inspection device using an alignment device according to the present invention.

FIG. 2 is a plan view of the inspection device of FIG. 1 with an upper cover removed.

FIG. 3 is a longitudinal sectional view of the inspection device shown in FIG.

FIG. 4 is a sectional view taken along line 4-4 in FIG. 3;

FIG. 5 is a plan view showing an embodiment of the alignment mechanism according to the present invention.

FIG. 6 is a front view of the alignment mechanism shown in FIG.

FIG. 7 is a side view of the alignment mechanism shown in FIG.

FIG. 8 is a plan view showing one embodiment of two relay mechanisms.

9 is a cross-sectional view taken along line 9-9 in FIG.

FIG. 10 is an enlarged plan view showing one embodiment of one relay mechanism.

11 is a sectional view taken along line 11-11 in FIG.

FIG. 12 is a sectional view for explaining the operation of the holder.

FIG. 13 is another sectional view for explaining the operation of the holder.

FIG. 14 is a plan view showing one embodiment of a measurement stage.

15 is a left side view of the measurement stage shown in FIG.

FIG. 16 is a view for explaining the first step of the operation of the alignment mechanism.

FIG. 17 is a view for explaining a step subsequent to the step in FIG. 16 of the alignment mechanism.

FIG. 18 is a view for explaining a step subsequent to the step in FIG. 17 of the alignment mechanism.

FIG. 19 is a view for explaining a step subsequent to the step in FIG. 18 of the alignment mechanism.

FIG. 20 is a view for explaining a step subsequent to the step in FIG. 19 of the alignment mechanism.

FIG. 21 is a view for explaining a step subsequent to the step in FIG. 20 of the alignment mechanism.

FIG. 22 is a diagram for explaining a step subsequent to the step of FIG. 21 of the alignment mechanism.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Inspection apparatus 12 Substrate to be measured 14 Measurement part 16 Relay part 18 Cassette installation part 20 Loader part 22 Probe unit 34 Transport robot 44 Robot arm 50 Alignment mechanism 52 Turntable 54 Alignment stage 56 Elevating base 58 Stage base 60 Link stage 62, 70 Suction pad 64, 78 Electric motor 80 Stopper 82 Pusher 84 Actuator 86 Frame 88, 94 Shaft 90, 96 Air cylinder 100, 102 Relay mechanism 104 Base 106 First movable body 110 Linear shaft 112 Lead screw 116 Linear bush 120 Lead nut 122 Electric motor 126 Second movable body 128 Rail 130 Link arm 140 Holder 144 Air cylinder 150 Measurement stage 72,178 slide rail 174,180 slide guide 176 frames

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Kamito Oishi 2-6-8 Kichijoji Honcho, Musashino City, Tokyo Inside Nihon Micronics Co., Ltd.

Claims (9)

[Claims] 1. An alignment means for transferring a substrate to be measured to first and second processing means, wherein said alignment means is in a horizontal state in which said substrate is transferred to said first processing means, and said member is provided on a side of said second processing means. While selectively displacing the substrate to be measured in an inclined state for transfer, including alignment means for aligning the substrate to be received,
Inspection device for substrate to be measured. 2. The method according to claim 1, wherein the alignment unit is a turntable that transfers the substrate to be measured to the first processing unit in a horizontal state, and the first alignment unit extends vertically to align the received substrate to be measured. The inspection device according to claim 1, comprising a turntable rotated about an axis of the inspection table. 3. An alignment stage for transferring a substrate to be measured to and from the turntable and the second processing unit, wherein the alignment unit selectively displaces the substrate to be measured in a horizontal state and an inclined state. 3. The apparatus according to claim 2, further comprising: a driving unit configured to angularly rotate the alignment stage about a second axis extending in a horizontal direction, and a positioning unit configured to position the substrate to be measured with respect to the alignment stage. Inspection equipment. 4. The positioning means includes first and second stoppers arranged on the alignment stage, and arranged on the alignment stage so as to press a first edge of the substrate to be measured against the first stopper. The inspection apparatus according to claim 3, further comprising: a first pusher provided and a second pusher disposed on the alignment stage so as to press a second edge of the substrate to be measured against the second stopper. . 5. A link stage that is angularly rotated about the second axis, a stage driving mechanism that selectively displaces the link stage between an inclined state and a horizontal state. The alignment stage is supported by the link stage.
The inspection device according to item 1. 6. The driving unit is a position adjustment mechanism supported by the link stage, and adjusts the position of the alignment stage in a third axis direction orthogonal to the substrate to be measured received by the alignment stage. The inspection device according to claim 3, further comprising a position adjustment mechanism that performs the adjustment. 7. The inspection apparatus according to claim 3, wherein the alignment unit further includes a height changing mechanism that changes a height position of the driving unit in the first direction. 8. The alignment unit according to claim 3, further comprising one or more suction pads disposed on the alignment stage so as to releasably suction the substrate to be measured.
The inspection device according to 4, 5, 6, or 7. 9. The apparatus according to claim 3, wherein said alignment means further includes one or more suction pads arranged on said turntable so as to releasably suck the substrate to be measured.
The inspection apparatus according to 5, 6, 7, or 8.