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JPH02108219A - Magnetic recording medium - Google Patents

Magnetic recording medium

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Publication number
JPH02108219A
JPH02108219A JP26175988A JP26175988A JPH02108219A JP H02108219 A JPH02108219 A JP H02108219A JP 26175988 A JP26175988 A JP 26175988A JP 26175988 A JP26175988 A JP 26175988A JP H02108219 A JPH02108219 A JP H02108219A
Authority
JP
Japan
Prior art keywords
film
ferromagnetic metal
angstrom
magnetic recording
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26175988A
Other languages
Japanese (ja)
Inventor
Koichi Shinohara
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP26175988A priority Critical patent/JPH02108219A/en
Publication of JPH02108219A publication Critical patent/JPH02108219A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain such a medium that has durability against repetitive high-density digital recording by providing a first ferromagnetic metal film by oblique vapor deposition on a polymer film, dispersing numbers of resin particles at certain intervals thereon, and further vapor depositing second and third ferromagnetic metal films in such a manner that the deposition angles for the second and third films are almost symmetric each other to the normal of the film. CONSTITUTION:The first ferromagnetic film 6 is formed by oblique vapor deposition with the min, incident angle of 40 degrees and the oxygen partial pressure of 6 X10-<5> Torr to result in a Co-Ni film about 550 Angstrom thick, contg. 80wt.% Co content, on a polymer film 5 such as polyethylene terephthalate, 10mum thick, 30 Angstrom mean surface roughness and 60 Angstrom max. roughness. Then 150-Angstrom diameter polyimide particles 7 are dispersed on the film by distribution of 2 X 10<9>/cm. The second and third ferromagnetic metal films 8 and 9 having the same Co-Ni compsn, as the thin film 6 are then formed by oblique vapor deposition on the film 6 including the particles with the min. incident angle of 45 degrees and the oxygen partial pressure of 5 X 10-<5> Torr. The angles of deposition for two layers are symmetric each other. At last, the magnetic tape is obtained by applying hexaphenyl cyclotrisilazane on the top surface, while perfluoro arachic acid on the back surface.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、高密度磁気記録に適する強磁性金属薄膜を磁
気記録層とする磁気記録媒体に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium whose magnetic recording layer is a ferromagnetic metal thin film suitable for high-density magnetic recording.

従来の技術 最近の記録技術の進歩により単位面積当シはもとより単
位体積当シの記録密度が著しく向上し、磁気記録媒体は
、表面が極めて平滑で、高密度化に適した強磁性金属薄
膜を磁気記録層とする蒸着テープ等の実用化が強く望ま
れている。従って最近では摺動界面で起る摩擦、摩耗等
に対する理解を深めるトライポロジーに関する研究の重
要性が認識され各方面で開発が進められている〔テレビ
ジ、7学会誌 Vo440.A6.(1986)472
頁〕。第2図は従来の磁気記録媒体の拡大断面図である
。第2図に於て、1はポリエチレンテレフタレート、ポ
リイミド等の高分子フィルムで必要に応じて、微粒子化
した表面を付与したもの等〔特開昭159−20742
2号公報、特開昭69−121631号公号公報用いら
れる。2はC。
Conventional technology Recent advances in recording technology have significantly improved the recording density not only per unit area but also per unit volume. There is a strong desire for the practical application of vapor-deposited tapes and the like as magnetic recording layers. Therefore, the importance of research on tribology to deepen understanding of friction, wear, etc. that occurs at sliding interfaces has recently been recognized, and development is progressing in various fields [Television, 7 Academic Journals Vo440. A6. (1986) 472
page〕. FIG. 2 is an enlarged sectional view of a conventional magnetic recording medium. In Fig. 2, reference numeral 1 indicates a polymer film made of polyethylene terephthalate, polyimide, etc., to which a finely divided surface is applied if necessary [JP-A-159-20742
No. 2 and JP-A-69-121631 are used. 2 is C.

−Ni−0斜め蒸着膜、Co−Cr、Go−Cr−Nb
等の垂直磁化膜等の磁気記録層で、3は保護層で、4ハ
ハツクコ一ト層で、炭素粉末、炭化カルシウム粉末等の
粒子を含んだ樹脂層で主として走行性を改善するために
保護層だけで不十分な場合にはよく設けられている。
-Ni-0 obliquely deposited film, Co-Cr, Go-Cr-Nb
A magnetic recording layer such as a perpendicular magnetization film, etc., 3 is a protective layer, 4 is a single layer of squared black, and a resin layer containing particles such as carbon powder, calcium carbide powder, etc. is used as a protective layer mainly to improve running properties. It is often provided when this alone is not sufficient.

従来保護層は特開昭54−113303号公報に開示さ
れている脂肪酸金属塩の蒸着膜による耐摩耗性の改善、
特開昭57−116771号公報に開示されているイミ
ド基を有する高分子のスパツタ膜、ダイアモンド状硬質
炭素膜を用いる例(日本応用磁気学会、第46回研究会
資料)等が知られている。又潤滑目的の層として、蒸着
法。
Conventionally, the protective layer has been improved in wear resistance by a vapor-deposited film of a fatty acid metal salt disclosed in JP-A-54-113303;
Known examples include the sputtered film of a polymer having imide groups disclosed in JP-A-57-116771, and an example using a diamond-like hard carbon film (Japan Society of Applied Magnetics, 46th Research Meeting Materials). . Also, as a layer for lubricating purposes, vapor deposition method.

湿式塗布法等で脂肪酸、脂肪酸アミド等を被着するもの
(例えば特公昭56−30609号公報)は、数多く試
みられている。しかしながら上記した例では、使用環境
条件の拡大、合金系磁気ヘッドに対する実用性の要求の
高度化に対処しきれないことから、組み合わせによる改
善が検討されていて、脂肪酸金属塩の吸着層上にフルオ
ロカーボン系の潤滑層を設けたもの(特開昭61−12
0331号公報)、硬質カーボン層の上に含フツ素潤滑
油層を配したもの(fF開昭61−126827号公報
)、5t−N−0系薄膜上に潤滑層を形成したもの(特
開昭81−131231号公報)等があげられる。
Many attempts have been made to coat fatty acids, fatty acid amides, etc. by wet coating methods (for example, Japanese Patent Publication No. 56-30609). However, in the above example, it is not possible to fully cope with the expansion of usage environmental conditions and the sophistication of practical requirements for alloy-based magnetic heads, so improvements are being considered by combining fluorocarbons on the adsorption layer of fatty acid metal salts. system with a lubricating layer (Japanese Unexamined Patent Publication No. 1986-12)
0331 publication), a fluorine-containing lubricating oil layer arranged on a hard carbon layer (fF Publication No. 126827/1983), and a lubricant layer formed on a 5t-N-0 thin film (Japanese Patent Publication No. 81-131231), etc.

発明が解決しようとする課題 しかしながら上記した構成の磁気記録媒体を用いてディ
ジタル記録をよシ高密度化で行った場合、エラー率が増
大し実用可能な記録密度を十分太きくとれないといった
課題があり改善が望まれていた。本発明は上記した事情
に鑑みなされたもので、高密度ディジタル記録に於ける
エラー率を改善した磁気記録媒体を提供するものである
Problems to be Solved by the Invention However, when digital recording is performed at higher density using a magnetic recording medium having the above-mentioned configuration, there is a problem that the error rate increases and it is not possible to obtain a sufficiently large recording density for practical use. Improvement was desired. The present invention has been made in view of the above-mentioned circumstances, and it is an object of the present invention to provide a magnetic recording medium with improved error rate in high-density digital recording.

課題を解決するための手段 上記した課題を解決するため本発明の磁気記録媒体は、
高分子フィルム上に斜め蒸着により第1強磁性金属薄膜
を配し、その上に樹脂粒子を配し第2.第3強磁性金属
薄膜を蒸着方向を垂線に対し、はぼ対称的な条件で構成
したものである。
Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention comprises:
A first ferromagnetic metal thin film is placed on the polymer film by oblique vapor deposition, resin particles are placed on top of the first ferromagnetic metal thin film, and a second ferromagnetic metal thin film is placed on the polymer film. The third ferromagnetic metal thin film is constructed so that the deposition direction is almost symmetrical with respect to the perpendicular line.

作  用 本発明の磁気記録媒体は上記した構成により、樹脂粒子
により形成される強磁性金属薄膜の突起が、はぼ粒子の
真上に形成されることで、応力に対して強くでき、かつ
強磁性薄膜でサンドイッチされることでも変形に強くな
シ、耐久性を樹脂粒子でも改善でき、粒子が無機微粒子
の場合と違って、強磁性金属薄膜に局部的なダメージを
与えないのと、第2.第3強磁性金属薄膜で成長方向の
異方性が相殺されピークシフト量も極小にできることで
高密度ディジタル記録でのエラー率を改善できることに
なる。
Effect The magnetic recording medium of the present invention has the above-described structure, and the protrusions of the ferromagnetic metal thin film formed by the resin particles are formed directly above the grains, so that the magnetic recording medium can be made strong against stress. Being sandwiched between magnetic thin films makes it resistant to deformation, and resin particles can also improve durability, and unlike when the particles are inorganic fine particles, they do not cause local damage to the ferromagnetic metal thin film. .. The third ferromagnetic metal thin film cancels out the anisotropy in the growth direction and minimizes the amount of peak shift, making it possible to improve the error rate in high-density digital recording.

実施例 以下、図面を参照しながら本発明の一実施例について説
明する。第1図は本発明の一実施例の磁気記録媒体の拡
大断面図である。第1図で、5はポリエチレンテレフタ
レート、ポリエチレンナフタレート、ポリフェニレンサ
ルファイド、ポリエーテルエーテルケトン、ポリアミド
、ポリイミド等の高分子フィルムで、6はCo 、 G
o−Ni 、 Co −T i 、 Go−Cr 、 
Go −W 、 Co−0、Go −N i −0、C
Embodiment Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention. In Figure 1, 5 is a polymer film such as polyethylene terephthalate, polyethylene naphthalate, polyphenylene sulfide, polyether ether ketone, polyamide, polyimide, etc., and 6 is Co, G.
o-Ni, Co-Ti, Go-Cr,
Go-W, Co-0, Go-Ni-0, C
.

−Cr−Nb等の斜め蒸着法で形成した第1強磁性金属
薄膜で、膜厚は300人から1000人の範囲とするの
が好ましい。7はポリエステル、ポリクレタン、ポリエ
チレン、ポリアミド、ポリイミド。
The first ferromagnetic metal thin film, such as -Cr-Nb, is formed by an oblique evaporation method, and the film thickness is preferably in the range of 300 to 1000. 7 is polyester, polycretane, polyethylene, polyamide, polyimide.

ポリスルフォン、ポリエーテルスルフォン、ポリカーボ
ネート、ポリスチロール、ポリアクリレート、ポリビニ
ルブチラール、ポリフェニレンオキサイド、フェノキシ
樹脂等の樹脂粒子で、高さは60入から260人の範囲
となる構成が好ましい。
It is preferable to use resin particles such as polysulfone, polyethersulfone, polycarbonate, polystyrene, polyacrylate, polyvinyl butyral, polyphenylene oxide, and phenoxy resin, and to have a height ranging from 60 to 260 people.

60Å以下では耐久性に於て、250人以上ではスペー
シング損失から電磁変換特性に於て好ましくない点がで
る。8,9はCo−Ni 、Co−0、C。
If it is less than 60 Å, the durability will be poor, and if it is more than 250 people, the electromagnetic conversion characteristics will be unfavorable due to spacing loss. 8 and 9 are Co-Ni, Co-0, and C.

−N i −0、Co −Or−Nb等第1強磁性金属
薄膜と同じ群の中から選びかつ、8と9は斜め蒸着の方
向をフィルム面の垂線に対し略対称とする第2゜第3強
磁性金属薄膜で膜厚は等しいか或いは調整するとしても
、10〜30%ぐらいの差にするのが好ましい。
-N i -0, Co -Or-Nb, etc. are selected from the same group as the first ferromagnetic metal thin film, and 8 and 9 are the second ferromagnetic metal thin films whose direction of oblique deposition is approximately symmetrical with respect to the perpendicular to the film surface. The thicknesses of the three ferromagnetic metal thin films are preferably the same, or even if adjusted, the difference is preferably about 10 to 30%.

1oは保護潤滑層で、プラズマ重合膜、炭素膜。1o is a protective lubricant layer, which is a plasma polymerized film and a carbon film.

S 102膜等の保護膜と脂肪酸、脂肪酸アミド等の潤
滑剤を組み合わせたものでスペーシング損失に大きく影
響しない厚み範囲で構成する。
It is a combination of a protective film such as S102 film and a lubricant such as fatty acid or fatty acid amide, and is configured within a thickness range that does not significantly affect spacing loss.

11はバックコート層で樹脂とフィラー必要なら潤滑剤
を含ませた0、3μ〜1μmの塗布層である。
Reference numeral 11 denotes a back coat layer, which is a coating layer of 0.3 μm to 1 μm containing resin, filler, and if necessary, lubricant.

以下、更に具体的に、本発明の実施例を比較例との対比
で説明する。
Examples of the present invention will be described in more detail below in comparison with comparative examples.

〔実施例−1〕 厚み10μm平均粗さ30人、最大粗さ6oへのポリエ
チレンテレフタレートフィルム上に直径1mの円筒キャ
ンに沿わせて、最小入射角40度、酸素分圧el X 
10  (Torr)でCo −Ni (Co : 8
0 wt % )を650人電子ビーム蒸着しその上に
直径160人のポリイミド球を2X109個/d配し、
その上に最小入射角45度、酸素分圧6x 1o  (
Torr)でGo−Ni (Co : 80 wt %
 )を600人電子ビーム蒸着し、巻き直さず、巻取シ
軸から巻き出し軸に移して、入射方向が反対になるよう
にして同じく600人電子ビーム蒸着を行い、その上に
ヘキサフェニルシクロトリシラザンをモノマーゼストシ
てのプラズマ重合膜を80人、パーフルオロアラキン酸
を真空蒸着で60人配し、バックコート層を0.4μm
配し8ミリ幅の磁気テープとした。
[Example-1] A cylindrical can with a diameter of 1 m is placed on a polyethylene terephthalate film having a thickness of 10 μm, an average roughness of 30 people, and a maximum roughness of 6o, a minimum incident angle of 40 degrees, and an oxygen partial pressure of el
Co-Ni (Co: 8) at 10 (Torr)
0 wt %) was deposited by electron beam evaporation by 650 people, and 2×109 polyimide spheres with a diameter of 160 people were placed thereon.
On top of that, the minimum angle of incidence is 45 degrees, the oxygen partial pressure is 6x 1o (
Torr) and Go-Ni (Co: 80 wt%
) was then electron beam evaporated on 600 people, and without being re-wound, it was moved from the winding axis to the unwinding axis, and the same electron beam evaporation was performed on 600 people with the incident direction reversed. 80 people made a plasma polymerized film using silazane as a monomer and 60 people made a perfluoroarachidic acid film by vacuum evaporation, and the back coat layer was 0.4 μm thick.
The magnetic tape was arranged 8 mm wide.

〔実施例−2〕 実施例−1のポリイミド球の代υに、高さ100人、長
軸900人の扁平な楕円球(ポリメチルメタアクリレー
ト球)を2×108ケメ耐 配し、他は同じ構成で8ミ
リテープを試作した。
[Example-2] A flat elliptical sphere (polymethyl methacrylate sphere) with a height of 100 people and a long axis of 900 people was placed in place of the polyimide sphere of Example-1, and the other parts were I made a prototype of 8mm tape with the same configuration.

〔比較例−1〕 実施例−1で、第2.第3強磁性金属薄膜を蒸着方向を
第1と同一にした以外は同じ構成の8ミリテープを試作
した。
[Comparative Example-1] In Example-1, the second. An 8 mm tape having the same structure was produced as a prototype except that the third ferromagnetic metal thin film was deposited in the same direction as the first.

〔比較例−2〕 実施例−1で微粒子を直径150人のZ r02球に置
きかえた以外は同一の構成の8ミリテープを試作した。
[Comparative Example 2] An 8 mm tape having the same configuration as in Example 1 except that the fine particles were replaced with Zr02 balls with a diameter of 150 people was manufactured.

これらのテープを8ミリビデオを改造して、トラックピ
ッチ10μmで線記録密度135KBPIで記録再生を
くり返しエラー率を比較した。その結果を下表に示す。
These tapes were modified into 8mm video tapes and recorded and reproduced repeatedly at a track pitch of 10 μm and a linear recording density of 135 KBPI, and the error rates were compared. The results are shown in the table below.

発明の効果 以上のように本発明によれば、くシ返し高密度ディジタ
ル記録に耐える優れた磁気記録媒体が得られるといった
すぐれた効果がある。
Effects of the Invention As described above, the present invention has the excellent effect of providing an excellent magnetic recording medium that can withstand repeated high-density digital recording.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る一実施例の磁気記録媒体の拡大断
面図、第2図は従来の磁気記録媒体の拡大断面図である
。 5・・・・・・高分子フィルム、6・・・・第1強磁性
金属薄膜、7・・・・・・樹脂微粒子、8・・・・・・
第2強磁性金属薄膜、9・・・・・・第3強磁性金属薄
膜。
FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention, and FIG. 2 is an enlarged sectional view of a conventional magnetic recording medium. 5... Polymer film, 6... First ferromagnetic metal thin film, 7... Resin fine particles, 8...
second ferromagnetic metal thin film, 9... third ferromagnetic metal thin film;

Claims (1)

【特許請求の範囲】[Claims] 高分子フィルム上に斜め蒸着により第1強磁性金属薄膜
を配し、その上に樹脂粒子を配し、第2、第3強磁性金
属薄膜を配した磁気記録層を有する磁気記録媒体であっ
て、第2、第3強磁性金属薄膜の蒸着方向が、垂線に対
しほぼ対称的であることを特徴とする磁気記録媒体。
A magnetic recording medium having a magnetic recording layer in which a first ferromagnetic metal thin film is disposed on a polymer film by oblique vapor deposition, resin particles are disposed thereon, and second and third ferromagnetic metal thin films are disposed thereon. , a magnetic recording medium characterized in that the deposition directions of the second and third ferromagnetic metal thin films are substantially symmetrical with respect to a perpendicular line.
JP26175988A 1988-10-18 1988-10-18 Magnetic recording medium Pending JPH02108219A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26175988A JPH02108219A (en) 1988-10-18 1988-10-18 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26175988A JPH02108219A (en) 1988-10-18 1988-10-18 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH02108219A true JPH02108219A (en) 1990-04-20

Family

ID=17366304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26175988A Pending JPH02108219A (en) 1988-10-18 1988-10-18 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH02108219A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0456227A2 (en) * 1990-05-10 1991-11-13 TDK Corporation Magnetic recording medium
SG96659A1 (en) * 2001-11-08 2003-06-16 Inst Data Storage Laminated antiferromagnetically coupled media for data storage

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0456227A2 (en) * 1990-05-10 1991-11-13 TDK Corporation Magnetic recording medium
US5225234A (en) * 1990-05-10 1993-07-06 Tdk Corporation Magnetic recording medium comprising multiple thin film magnetic layers each formed within specified maximum and minimum incident angles
SG96659A1 (en) * 2001-11-08 2003-06-16 Inst Data Storage Laminated antiferromagnetically coupled media for data storage
US6794057B2 (en) 2001-11-08 2004-09-21 Data Storage Institute Laminated antiferromagnetically coupled media for data storage

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