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JPH0482011A - Magnetic recording medium - Google Patents

Magnetic recording medium

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Publication number
JPH0482011A
JPH0482011A JP19538990A JP19538990A JPH0482011A JP H0482011 A JPH0482011 A JP H0482011A JP 19538990 A JP19538990 A JP 19538990A JP 19538990 A JP19538990 A JP 19538990A JP H0482011 A JPH0482011 A JP H0482011A
Authority
JP
Japan
Prior art keywords
magnetic recording
film
recording medium
magnetic
atomic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19538990A
Other languages
Japanese (ja)
Inventor
Koichi Shinohara
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP19538990A priority Critical patent/JPH0482011A/en
Publication of JPH0482011A publication Critical patent/JPH0482011A/en
Pending legal-status Critical Current

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  • Compositions Of Macromolecular Compounds (AREA)
  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To obtain good output characteristics under a wide range of service conditions by forming a magnetic recording layer of a perpendicularly magnetized film consisting of Co-Pt-M-O, adopting any of Zn, Cd and Mg for M and specifying the atomic % of M and O. CONSTITUTION:The perpendicularly magnetized film 2 which consists of the Co-Pt-M-O and is provided atop a high-polymer film 1 is constituted of the thin film formed by a sputtering method using a Co-Pt-M alloy as a target and using a discharge gas, such as Ar+O2 or Ar+H2+O2, while moving the high-polymer film 1 along a cylindrical can. The M in the atomic % compsn. of the Co-Pt-M-O is 0.5 to 5atomic% and the O is 5 to 15atomic%. The Zn, Cd or Mg is used as the M. The adhesion of a composite head material of an alloy system and the magnetic recording medium in low-temp. environment is substantially prevented in this way and the higher output is obtd.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、高密度磁気記録に適する垂直磁気記録用の磁
気記録媒体に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium for perpendicular magnetic recording suitable for high-density magnetic recording.

従来の技術 従来の薄膜型磁気記録媒体は、Co−Ni−0斜め蒸着
膜が実用レベルとして最高の記録密度を達成し、今後−
層の進展が期待されている。これまで強磁性金属薄膜と
しては数多(の材料が主として耐食性、磁気特性の面か
ら提案されてきている。中でもいわゆる垂直磁化膜は高
密度化に有利で、Co−Cr、Co−0をはじめとして
提案がくり返されている[Journal  of  
the MagneticsSociety of J
apan vol、13611〜630(1989)参
照1゜特に最近発表されたCo−Pt−B−○系薄膜[
34th Annual Conference on
 Magnetism andMagnetic Ma
terials DC−12(1989)]は、Co−
Crをしのぐ出力特性や高分子フィルムとしてポリエス
テルの使用が可能となる点が注目されている。
Conventional technology In conventional thin film magnetic recording media, the Co-Ni-0 diagonally deposited film has achieved the highest recording density at a practical level, and in the future -
Further progress is expected. Until now, a number of materials have been proposed for ferromagnetic metal thin films, mainly from the viewpoints of corrosion resistance and magnetic properties. Among them, so-called perpendicular magnetization films are advantageous for high density, and include Co-Cr, Co-0, etc. [Journal of
the Magnetics Society of J.
apan vol, 13611-630 (1989) 1゜In particular, the recently announced Co-Pt-B-○ thin film [
34th Annual Conference on
Magnetism and Magnetic Ma
terials DC-12 (1989)] is Co-
It is attracting attention because of its output characteristics that surpass that of Cr and because it allows the use of polyester as a polymer film.

発明が解決しようとする課題 しかしながら、従来がら知られている材料系のものを最
近の複合材料を用いたリング磁気ヘッドにより記録再生
した時に低温、低湿の環境で磁気ヘッドとの相性が悪く
、短波長になる程短時間で出力が低下するといった課題
があり、改善が望まれていた。
Problems to be Solved by the Invention However, when recording and reproducing conventionally known materials using ring magnetic heads using recent composite materials, they are not compatible with magnetic heads in low temperature and low humidity environments, and short-term problems occur. There was a problem in that the output decreased in a short time as the wavelength increased, and improvements were desired.

本発明は上記課題を解決するもので、低温、低湿の環境
下においても常温常湿の場合と同様に優れた特性を示す
垂直磁化膜をもった磁気記録媒体を提供することを目的
とするものである。
The present invention solves the above-mentioned problems, and aims to provide a magnetic recording medium having a perpendicular magnetization film that exhibits excellent characteristics even in a low-temperature, low-humidity environment as in a normal temperature and humidity environment. It is.

課題を解決するための手段 上記目的を達成するために、本発明の磁気記録媒体は、
磁気記録層がCo−Pt−M−0膜でMが0.5〜5原
子%のZn、Cd、Mgのいずれかであり、○が5〜1
5原子%の組成となるようにした垂直磁化膜で構成した
ものである。
Means for Solving the Problems In order to achieve the above object, the magnetic recording medium of the present invention has the following features:
The magnetic recording layer is a Co-Pt-M-0 film made of Zn, Cd, or Mg with M of 0.5 to 5 at%, and ○ is 5 to 1.
It is composed of a perpendicularly magnetized film having a composition of 5 atomic %.

作用 したがって本発明の磁気記録媒体によれば、上記した構
成により、低湿環境下での合金系複合ヘッド材料と磁気
記録媒体との凝着が起こりにくくなり、凝着によるスペ
ーシング損失を改善できるととも(こ、Cd、Znまた
はMg自体もCoと同一の結晶構造を有しており、結晶
性の改善効果によって、より高出力化を図ることができ
る。
Function Therefore, according to the magnetic recording medium of the present invention, the above-described configuration makes it difficult for the alloy composite head material to adhere to the magnetic recording medium in a low-humidity environment, thereby improving spacing loss due to adhesion. Also, Cd, Zn, or Mg itself has the same crystal structure as Co, and by improving crystallinity, higher output can be achieved.

実施例 以下、図面を参照しながら本発明の実施例について説明
する。
Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(実施例1) 第1図は本発明の一実施例の磁気記録媒体の部分拡大断
面図であり、図において1はポリエチレンテレフタレー
ト、ポリエチレンナフタレート。
(Example 1) FIG. 1 is a partially enlarged sectional view of a magnetic recording medium according to an example of the present invention, and in the figure, numeral 1 represents polyethylene terephthalate and polyethylene naphthalate.

ポリフェニレンサルファイド、ポリエーテルエーテルケ
トン、ポリエーテルサルフオン、ポリイミド、アラミド
等の高分子フィルムであり、必要に応じてその上面に微
粒子塗布層、下地層、軟磁性層を設けたものを用いるこ
ともできる。2は、Co−Pt−M−〇の垂直磁化膜で
あり4、円筒キャンに高分子フィルム1を沿わせて移動
させながら、Co−Pt−M合金をターゲットにして、
Ar+02.Ar+82+02等の放電ガスを用いたス
パッタリング法で形成した0、05〜0.3μmの薄膜
より構成されている。Co−Pt−M−0の原子%組成
は、Mが0.5〜5原子%、Oが5〜15原子%、Pt
は5〜20原子%、残分がC。
Polymer film such as polyphenylene sulfide, polyether ether ketone, polyether sulfone, polyimide, aramid, etc., and if necessary, a fine particle coating layer, a base layer, and a soft magnetic layer can be provided on the top surface. . 2 is a perpendicular magnetization film of Co-Pt-M-〇; 4, while moving the polymer film 1 along the cylindrical can, targeting the Co-Pt-M alloy;
Ar+02. It is composed of a thin film of 0.05 to 0.3 μm formed by a sputtering method using a discharge gas such as Ar+82+02. The atomic % composition of Co-Pt-M-0 is 0.5 to 5 atomic % of M, 5 to 15 atomic % of O, Pt
is 5 to 20 atom%, with the remainder being C.

で構成される。上記実施例においてMか0.5原子%未
満では凝着を防止できない。また5原子%を超えると逆
に高湿環境下での摩擦特性が悪化する。またMとしてZ
n、CdまたはMgを使用することができる。なお、C
Oの代りにそのCOの15〜25原子%のNiを含むC
o−Niとすることもできる。3は保護潤滑層であり、
プラズマ重合膜、炭素膜、脂肪酸、脂肪酸アミド、パー
フルオロカルボン酸、パーフルオロポリエーテル等が用
いられ、スペーシング損失を考慮して適当な厚みとする
必要がある。高密度記録を達成するには、この配慮が不
可欠であり、そのために保護潤滑層の存在にもかかわら
ず、その下の磁気記録層の性質が摺動特性に影響を及ぼ
すことになり、本発明の有価値性が生まれてくるのであ
る。
Consists of. In the above examples, if M is less than 0.5 at %, adhesion cannot be prevented. On the other hand, if the content exceeds 5 at %, the frictional properties in a high humidity environment will deteriorate. Also, M as Z
n, Cd or Mg can be used. In addition, C
C containing 15 to 25 atom % of Ni in place of O to its CO
It can also be o-Ni. 3 is a protective lubricating layer;
Plasma polymerized membranes, carbon membranes, fatty acids, fatty acid amides, perfluorocarboxylic acids, perfluoropolyethers, etc. are used, and the thickness must be set to an appropriate thickness in consideration of spacing loss. This consideration is essential to achieve high-density recording, and therefore, despite the presence of a protective lubricant layer, the properties of the underlying magnetic recording layer will affect the sliding properties, and the present invention This gives rise to value.

以下、さらに実施例の詳細について、比較例と対比しな
がら説明する。
The details of the examples will be further explained below while comparing them with comparative examples.

厚み11μmのポリエチレンテレフタレートフィルムよ
りなる高分子フィルム1上に、直径150AのCr2O
3微粒子をポリエステル樹脂を用いて平均20ケ/μd
になるように分散固定し、直径50床の円筒キャン(キ
ャン温度30℃)に沿わせて移動しながら、CO−Pt
−Mターゲット(キャン表面から最短部で5備離した平
板カソード〉を用い、Ar+02またはAr+82+C
hのガス雰囲気中でそのガス圧力を0.02〜0.1T
orr。
Cr2O with a diameter of 150A is placed on a polymer film 1 made of a polyethylene terephthalate film with a thickness of 11 μm.
3 fine particles using polyester resin at an average of 20 particles/μd
The CO-Pt was dispersed and fixed so that the CO-Pt
- Using an M target (flat plate cathode spaced 5 times from the can surface at the shortest point), Ar+02 or Ar+82+C
h gas pressure in a gas atmosphere of 0.02 to 0.1T.
orr.

13.56MI(z、1.1〜2.4kWの範囲で各種
のCo−Pt−M−0垂直磁化膜を0.18μmの厚さ
に形成し、その上にグラファイトをターゲットにしてA
r+82のガス雰囲気中でそのガス圧力0.1Torr
、ArとH2の混合比が1:3.13.56M土、0.
8kWの条件下でダイヤモンド状硬質炭素膜を70A形
成した。つぎにその上にモンテジソン社製のフォンブリ
ンAM2001を15mg/−塗布し、0.4μmのカ
ーボンフィラー(直径0.08μ)とポリエステル樹脂
とを等置台むバックコート層(図示せず)を高分子フィ
ルム1の裏面に形成し、8閣幅の磁気テープを得た。比
較例として厚さ0.18μmのC。
Various types of Co-Pt-M-0 perpendicular magnetization films were formed to a thickness of 0.18 μm at 13.56 MI (z, 1.1 to 2.4 kW), and A
The gas pressure is 0.1 Torr in the r+82 gas atmosphere.
, Ar and H2 mixing ratio is 1:3.13.56M soil, 0.
A 70A diamond-like hard carbon film was formed under the condition of 8kW. Next, 15 mg/- of Fomblin AM2001 manufactured by Montegisson was applied on top of the coating, and a back coat layer (not shown) containing a 0.4 μm carbon filler (diameter 0.08 μm) and a polyester resin was formed using a polymer. It was formed on the back side of Film 1 to obtain a magnetic tape with a width of 8 cabinets. C with a thickness of 0.18 μm as a comparative example.

CrまたはCo−Pt−B−○垂直磁化膜を形成した8
m幅の磁気テープを用いた。以上のように作成したそれ
ぞれの磁気テープを8ミリビデオを用い、3種類の磁気
ヘッドを使用して、輝度信号出力を測定、比較した。磁
気ヘッドはメタルインギャップ型で。メタル部がCo−
Zr系アモルファススバッタ膜で構成されたものをタイ
プA、メタル部をセンダストスパッタ膜で構成したもの
をタイプB、Co−Zr系スパッタ膜とSiO2スパッ
タ膜を積層したタイプの積層型ヘッドをタイプCとして
用いた。磁気テープの使用環境条件と出力特性について
実施例と従来例を比較した結果を第1表に示す。
8 with Cr or Co-Pt-B-○ perpendicular magnetization film formed
A magnetic tape with a width of m was used. The luminance signal output of each of the magnetic tapes produced as described above was measured and compared using an 8 mm video camera and three types of magnetic heads. The magnetic head is a metal-in-gap type. The metal part is Co-
Type A is a head made of a Zr-based amorphous sputtered film, Type B is made of a sendust sputtered film for the metal part, and Type C is a laminated head made of a Co-Zr sputtered film and a SiO2 sputtered film. It was used as Table 1 shows the results of comparing the working example and the conventional example with respect to the usage environment conditions and output characteristics of the magnetic tape.

(以  下  余  白) (実施例2) 本発明の目的を達成するための他の手段は、高分子フィ
ルム上に形成した垂直磁化膜が、入射角10度から40
度のスパッタ膜で構成されたものであり、磁気ヘッドの
発生磁界によって磁化効率に方向性が生じ、出力の大き
い方向が磁気ヘッドとの高速摺動において掘りおこし摩
耗を起こしに<<、異種材料表面に段差が生じに(いこ
とから、高出力を維持できるものである。また磁化膜を
高充てん率とすることができることから磁気記録層の垂
直成分を含まなくても10度から40度の範囲にあれば
耐食性や、高出力化においては垂直成分で形成された磁
気記録層のものとそん色のない特性にすることができる
(Left below) (Example 2) Another means for achieving the object of the present invention is that a perpendicularly magnetized film formed on a polymer film is
The magnetization efficiency is directional due to the magnetic field generated by the magnetic head, and the direction of high output tends to cause digging and wear during high-speed sliding with the magnetic head. It is possible to maintain a high output because there is no step difference in the magnetic recording layer.Also, since the magnetization film can have a high filling rate, it is possible to maintain a high output even if the vertical component of the magnetic recording layer is not included. If this is the case, corrosion resistance and high output properties can be achieved that are comparable to those of a magnetic recording layer formed of vertical components.

以下、図面を参照しながら本実施例について説明する。The present embodiment will be described below with reference to the drawings.

第2図は本実施例の磁気記録媒体の部分拡大断面図であ
り、第1図と同一部分については同一番号を付しである
。図において、4は垂直磁化膜であり、入射角が40度
から10度の範囲でスパッタした膜からなり、柱状粒子
の界面がみえる場合をモデル的に示したものである。柱
状粒子5は高分子フィルム1面にたてた垂線に対して傾
斜しており、磁気ヘッドとの記録再生時の相対運動方向
は図面で示した矢印A方向となるようにして用いられる
ものである。
FIG. 2 is a partially enlarged sectional view of the magnetic recording medium of this embodiment, and the same parts as in FIG. 1 are given the same numbers. In the figure, 4 is a perpendicularly magnetized film, which is made of a film sputtered at an incident angle in the range of 40 degrees to 10 degrees, and is a model showing the case where the interfaces of columnar particles are visible. The columnar particles 5 are inclined with respect to a perpendicular line drawn on one surface of the polymer film, and are used so that the direction of relative movement with the magnetic head during recording and reproduction is in the direction of arrow A shown in the drawing. be.

本発明における垂直磁化膜4は、Co−Cr。The perpendicular magnetization film 4 in the present invention is Co-Cr.

Co−Ti、Co−Ta、Co−W、Co−Mo。Co-Ti, Co-Ta, Co-W, Co-Mo.

Co−0,Co−B−Pt−0およびCo−TiPt−
0のいずれでも使用することができ、入射角を限定する
マスクを用い、ターゲットと高分子フィルム1の配置関
係を変えて、スパッタリング時に、真空度を1O−2T
orr以上にならないようにしながら適当な条件下にお
いて実施することができる。
Co-0, Co-B-Pt-0 and Co-TiPt-
By using a mask that limits the incident angle and changing the positional relationship between the target and the polymer film 1, the degree of vacuum can be adjusted to 1O-2T during sputtering.
It can be carried out under appropriate conditions while ensuring that the temperature does not exceed orr.

以下、本実施例について比較例と対比しながら説明する
The present example will be described below while being compared with a comparative example.

厚み8μmのアラミドフィルムよりなる高分子フィルム
1上に、直径150AのTiO2微粒子をポリエステル
樹脂を用いて平均15ケ/μdになるよう分散固定し、
厚み30μmのチタン箔を回転支持体く直線部が501
となるように、直径20cmのキャンでテンションをか
けてエンドレス状に回転する機能をもつもの)とし、タ
ーゲットを傾斜させ、マスクを調整し、入射角を10度
から40度の範囲に限定し、垂直磁化膜を形成する。つ
ぎにその上に保護潤滑層3(モンテジソン社製のフォン
ブリンZ−25)を20w/j!布し、さらに高分子フ
ィルム1の裏面に0.4μmのバックコート層(図示せ
ず)を設け、8m幅の磁気テープを得た。
On a polymer film 1 made of an aramid film with a thickness of 8 μm, TiO2 fine particles with a diameter of 150 A were dispersed and fixed using a polyester resin at an average density of 15 particles/μd.
The straight part is 501 when the titanium foil with a thickness of 30 μm is used as a rotating support.
The target was tilted, the mask was adjusted, and the angle of incidence was limited to a range of 10 to 40 degrees. Form a perpendicular magnetization film. Next, on top of that, protective lubricant layer 3 (Fomblin Z-25 manufactured by Montegisson) is applied at 20w/j! A 0.4 μm back coat layer (not shown) was further provided on the back surface of the polymer film 1 to obtain a magnetic tape with a width of 8 m.

以上のように作成した磁気テープを用いて磁気テープの
使用環境条件と、緒特性について実施例と比較例を比較
した結果を第2表に示す。なお測定はヘッドCを用いて
実施した。
Table 2 shows the results of a comparison between Examples and Comparative Examples in terms of the environmental conditions in which the magnetic tapes were used and the magnetic tape characteristics using the magnetic tapes prepared as described above. Note that the measurement was carried out using head C.

(以  下  余  白) このように上記実施例によれば、低温低湿度または高温
高湿度において再生出力、スチル特性ともに従来より優
れた磁気特性が得られていることがわかる。
(See the margin below.) As described above, it can be seen that according to the above-mentioned examples, magnetic properties superior to those of the prior art can be obtained in terms of reproduction output and still properties at low temperatures and low humidity or at high temperatures and high humidity.

発明の効果 本発明は上記実施例より明らかなように、磁気記録層が
、MがZn、CdおよびMgのいずれかであるCo−P
t−M−0よりなる垂直磁化膜で構成されているために
極めて広範囲な、使用条件下においても磁気ヘッドの種
類に関係なく良好な出力特性を得ることができるといっ
たすぐれた効果がある。さらに垂直磁化膜を入射角10
度から40度でスパッタすることにより極めて優れたス
チル特性を得ることができる。
Effects of the Invention As is clear from the above embodiments, the present invention provides a magnetic recording layer made of Co-P in which M is any one of Zn, Cd and Mg.
Since it is composed of a perpendicularly magnetized film of t-M-0, it has an excellent effect in that good output characteristics can be obtained regardless of the type of magnetic head even under an extremely wide range of usage conditions. Furthermore, the perpendicularly magnetized film is attached at an incident angle of 10
Extremely excellent still characteristics can be obtained by sputtering at an angle of 40° to 40°.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例における磁気記録媒体の要部
断面図、第2図は他の実施例における磁気記録媒体の要
部断面図である。 1・・・・・・高分子フィルム、2.4・・・・・・垂
直磁化膜。 息′δ子フィlレム t 直 a  1m  l費 生 −16級 te  4贅
FIG. 1 is a sectional view of a main part of a magnetic recording medium in one embodiment of the present invention, and FIG. 2 is a sectional view of a main part of a magnetic recording medium in another embodiment. 1... Polymer film, 2.4... Perpendicular magnetization film. Son'δ child Philemt direct a 1m l fee student -16 grade te 4 luxury

Claims (2)

【特許請求の範囲】[Claims] (1)磁気記録層がCo−Pt−M−Oからなる垂直磁
化膜で、MがZn、CdおよびMgのいずれかであり、
Mが0.5〜5原子%、Oが5〜15原子%である磁気
記録媒体。
(1) The magnetic recording layer is a perpendicularly magnetized film made of Co-Pt-M-O, where M is either Zn, Cd or Mg,
A magnetic recording medium in which M is 0.5 to 5 atomic % and O is 5 to 15 atomic %.
(2)高分子フィルム上へ形成した垂直磁化膜が、入射
角10度から40度のスパッタ膜である磁気記録媒体。
(2) A magnetic recording medium in which the perpendicularly magnetized film formed on the polymer film is a sputtered film with an incident angle of 10 degrees to 40 degrees.
JP19538990A 1990-07-23 1990-07-23 Magnetic recording medium Pending JPH0482011A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19538990A JPH0482011A (en) 1990-07-23 1990-07-23 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19538990A JPH0482011A (en) 1990-07-23 1990-07-23 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH0482011A true JPH0482011A (en) 1992-03-16

Family

ID=16340344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19538990A Pending JPH0482011A (en) 1990-07-23 1990-07-23 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH0482011A (en)

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