JPH09326338A - Production management system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a management system which can provide users with information relating to a time required for manufacturing operations to facilitate management of production steps. SOLUTION: A master computer 1 integrally controls units such as a positioning control unit 21 as a lower-level unit having a relatively simple function of controlling sections of a manufacturing apparatus, a stage control unit 22 and a substrate transportation unit 23 to thereby control automatic manufacturing steps of a predetermined item. The management is carried out by one or ones of functions of the units 21, 22,... so that a process forming a part of the automatic manufacturing steps is measured by a built-in clock 12 with respect to its a time required for its execution, and then the measured time is recorded in a memory 15 in a predetermined recording format. The required recorded time is analyzed by a productivity analysis program 13 and its analysis result is displayed on a display unit 14.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing control apparatus, and more particularly to automatic manufacturing of a predetermined product by an integrated control of a relatively single-function lower-order execution unit that controls each section of the manufacturing apparatus. The present invention relates to a manufacturing control device whose process is controlled.

[0002]

2. Description of the Related Art Conventionally, in an exposure apparatus for manufacturing semiconductors and liquid crystals, an automatic manufacturing apparatus is known which controls a part or all of the manufacturing process by using a computer. In this type of equipment, the higher-level master computer, which is the main control unit, integrally controls the lower-order execution unit that realizes a relatively single function of controlling the motors and the like of each part of the manufacturing apparatus, and thus the entire automatic manufacturing process is performed. Is controlled.

[0003]

The conventional apparatus of this type does not have a function of recording the time required to manufacture a product, and therefore, in order to know the time required to manufacture the product, there is no choice but to actually measure it with a stopwatch or the like. Further, in order to know the time required for product production with a new product, a complicated work of actually producing the product and measuring the time is required.

Especially, the productivity of the apparatus is an important factor in the product manufacturing process, and it is an important concern for the user how long the current manufacturing process takes.

Further, in the conventional apparatus, since it was not possible to obtain past manufacturing time or statistical information related thereto, it is impossible to control various kinds of accuracy in manufacturing, and the manufacturing process is reassembled. I couldn't get any information about how long the new process would take, such as when it was needed.

That is, in the conventional configuration, there is a problem that the management work is complicated because it is not possible to obtain sufficient information on the manufacturing time necessary for managing the manufacturing process.

[0007] Therefore, an object of the present invention is to provide a manufacturing control device of this kind, which can provide the user with information concerning the time required for the manufacturing process and facilitate the management of the manufacturing process. is there.

[0008]

In order to solve the above-mentioned problems, according to the present invention, a main control unit integrally controls a relatively single-function lower-order execution unit that controls each unit of a manufacturing apparatus. Thus, in a manufacturing control device in which an automatic manufacturing process of a predetermined product is controlled, a time required for the execution of a process which is executed by a single function or a plurality of functions of the execution unit and forms a part of the automatic manufacturing process. A structure having a time measuring means for measuring the time and a recording means for recording the required time measured by the time measuring means based on a predetermined recording format is adopted.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. In the following, an exposure apparatus for manufacturing a semiconductor or liquid crystal will be exemplified.

FIG. 1 shows a block diagram of an apparatus according to a concrete implementation of the present invention.

Generally, in an exposure apparatus, a master computer including a personal computer and a mini computer controls and monitors the operation of the entire system.

In FIG. 1, a master computer 1 composed of a minicomputer is provided with an exposure device 26 via respective units 21, 22 ... As lower slave processors.
It controls the motors, solenoids, light sources, and other drive units of each unit.

Here, an alignment control unit 21, a stage control unit 22, a substrate transfer unit 23 and the like are shown as lower slave processors. Each unit 21, 22, ... Has a drive circuit that controls a motor, a solenoid, a light source, and other drive units of each unit of the exposure apparatus 26.
It is composed of sensors for monitoring their operations and for closed-loop control.

The master computer 1 has each unit 2
1, 22 ... Are connected via a predetermined interface means such as GP-IB, SCSI, RS232C, Ethernet, etc., and a command is transmitted to each unit 21, 22 ... Under the control of the device control program 11 of the master computer 1. Also, receiving the response to this command controls the entire manufacturing process.

Each process (process) includes each unit 21,
22 ... A single unit, or a combination of operations of a plurality of these units.

The start and end timing control of each process (process) constituting the manufacturing process is controlled by using the absolute time measured by the built-in clock 12 provided in the master computer 1.

Further, in the present embodiment, the storage device 15 is provided in order to store information on the time required for the manufacturing process in each process for each process. The storage device 15 stores, as a file, information relating to the time required for the manufacturing process obtained as described below. Storage device 15
Is implemented by computer memory, disk, etc.

The start time and end time of each manufacturing process controlled by each unit 21, 22, ... Are, for example, the command transmission timing to each unit 21, 22 ,. This can be detected by reading the absolute time from the built-in clock 12 at the timing when the response indicating the end of the process is received.

Further, the command is sent to each unit 21, 22 ...
In order to know the time required for execution, that is, the command execution required time, the time from the time when the command is sent to the time when the end information is received may be subtracted.

Further, in the case of the master computer 1 which does not have such a mechanism for clocking in absolute time, a clocking device is provided as one of the units, and command transmission / reception control similar to other units is performed. Thus, the absolute time may be obtained from this clock unit and stored in the storage device 15.

The required time is recorded by a method which will be described later by pairing the type of control of each device and the element time required for the control.
The time data recorded as a database in the storage device 15 is analyzed by the productivity analysis program 13 of the master computer 1 and is displayed on the display device 14 such as a CRT.
To display the result.

FIG. 2 shows a typical exposure operation.

In the example of FIG. 2, one process is
The exposure processing / post-processing is composed of three elements, and the exposure processing is repeated by the number of substrates to be exposed in the same process.

The "operation" column is a further subdivision of the "element" of the process, and is executed by a single unit or a combination of operations of a plurality of these units.

Here, Process 1 and Process 2 are illustrated, and the time required for Process 2 is the sum of the time required for the above-mentioned three elements of pre-preparation, exposure processing, and post-processing, as in Process 1.

Further, the process 1 and the process 2 in FIG.
The components are similarly defined by the three steps of pre-preparation, exposure processing, and post-processing, but the actual required time of each will of course change depending on the process.

Various modes are conceivable for recording the required time. First, as shown in FIG. 3, it is possible to record time data in a file for each process.

FIG. 3 shows the contents of the required time file recorded in the storage device 15.

In FIG. 3, the process time a, the lot processing start time b, the element type c, and the process time d are recorded in the process time file.

That is, recording of these data is started with the start of one process (corresponding to a manufacturing unit such as "1 lot" of a product), and the required time d of each of the elements of the process shown in FIG. It is recorded sequentially with the type c. When the process changes, the process number a is sequentially incremented and another file is allocated in the same format.

When recording data in the format of FIG. 3, one record (corresponding to one row in the table of FIG. 3) is generated for each element of the process.

Therefore, in this recording format, a large amount of data is generated, and if the system continues to operate, the file size will continue to expand. To avoid this problem, it is conceivable to allocate this file name cyclically, or to delete a file that has been appropriately generated at every predetermined period and re-record it, but in view of this point Figure 4
File formats such as are also conceivable.

That is, with regard to the three processes of pre-preparation, exposure processing, and post-processing, the elements (for example, "exposure type setting", "substrate exchange", and "exposure operation" in FIG.
And the time required for each) is t,

[0034]

[Equation 1]

Is calculated for three processes of pre-preparation, exposure process, and post-process, and recorded in a file.

In FIG. 4, the file is a process number a, the number of times of processing b, an element classification c, a sum d of the required times of the respective elements, a square sum e of the required times of the respective elements, and a required time of the respective elements (“operation”). Of the number of recordings f.

In the example of FIG. 4, the number of times of processing b indicates the number of times one entire process is executed.
Since the number of times f of pre-preparation and post-processing is equal to the number of times b of the pre-processing and post-processing, the exposure process is limited to one pre-preparation and post-processing. It is performed 10 times, and the value is 10 times the number of times of processing b.

By performing such recording, the three elements of pre-processing, exposure processing, and post-processing which constitute one process,

[0039]

[Equation 2]

It becomes possible to obtain This standard deviation is a statistical element that is routinely used when performing general statistical calculations.

In the recording method of FIG. 4, a record is not generated each time a process element is executed as in FIG. 3, so that the capacity of the storage device 15 is not pressed.

For example, if a record for the corresponding process exists in the file, then all that is required is to add the data to that record. In other words, there is an advantage that the number of records for each process is sufficient for the data for each process, and the number of records in the file does not increase even if the system continues to operate.

In the examples shown in FIGS. 3 and 4, it is not taken into consideration what kind of processing is performed in a certain process element.

Therefore, it is also possible to further subdivide the required time of the above-mentioned process elements into, and record each of them in a file together with data indicating the processing content.

For example, the process elements such as "substrate exchange" and "exposure" can be subdivided into detailed elements as shown in FIG.

In FIG. 5, for example, the "board exchange" element can be divided into a "board exchange execution operation" element and a "board alignment operation" element. Of these, the time required for the "substrate alignment" element depends on the number of marks on the substrate used for substrate alignment.

Similarly, in the case of FIG. 5, the "exposure operation" element is a continuous operation of the "stage movement" element and the "shutter opening / closing" element. The "stage movement" element depends on the moving distance of the stage, and the "shutter opening / closing" element depends on the exposure energy.

That is, the time required to execute a certain detailed element depends on the detailed element determining condition as a condition for controlling the execution.

For example, regarding the "stage movement" element, if the movement distance which is the detailed element determination condition is different, the time required for the "stage movement" element should be different, and the time required recorded later will be evaluated. At this time, meaningful evaluation is impossible unless the moving distance is taken into consideration as the detailed element determination condition.

Therefore, as shown in FIG. 6, it is extremely useful to record the required time of these detailed elements and the detailed element determination conditions as in the above-mentioned method.

In FIG. 6, required time a and parameters required for each operation of the detailed element are recorded. This "parameter" is a specific expression of the required time determining element described above, and is actually expressed by different numerical values according to the type of the detailed element as shown on the right side of FIG.

For example, for the "stage movement" element, the movement distance (mm) is recorded. In the case of FIG. 6, as in the case of FIG. 3, a record is added to the file for each operation of the detail element, so the file size increases.

Therefore, similarly to the case where the time data of FIG. 3 is modified so as to be recorded in the tabulated form as shown in FIG. 4, the data of FIG. 6 is tabulated for each detailed element as shown in FIG. It can also be recorded.

In FIG. 7, as the detailed elements, "preparation",
An example of a file obtained by focusing on the respective elements of “execution of substrate exchange”, “substrate alignment”, “stage movement”, “stage opening / closing”, and “post-processing” is shown.

Here, the sum a of the required times of each detailed element,
The sum of squares b and the number of times c are recorded.

However, in this case, the time data must be recorded in a form standardized by parameters for each detail element.

This is because, for example, when the "substrate alignment" element is performed, the required time increases proportionately as the number of marks to be aligned on the substrate increases. For the "registration" element, the sum a of the required times per mark to be aligned and the sum of squares b must be recorded.

For example, if it takes 20 seconds with two marks to execute a certain "substrate alignment" element, the standardized data is 20/2 = 10 (seconds). Add 10 (seconds), sum of squares of required time b
Is added to 100 (sec) which is the square of 10.

Similarly, for example, the "stage movement" element is the time per 200 mm of stage movement, "shutter opening / closing".
Performs addition to the sum a and the sum of squares b in units of the time required to irradiate the exposure energy of 40 [mJ].

Regarding the relationship between the recording formats of FIGS. 6 and 7, like the relationship between the data of FIG. 3 and the data of FIG. 4 described above, when the storage capacity is not sufficient, the recording format of FIG. Needless to say, it is more desirable.

Now, if the data is recorded as described above,
It is possible to calculate useful information regarding the productivity of the device. For example, by performing the data recording as described above, a database relating to the time required for the manufacturing process can be built in the master computer 1. For example, 1. production time by process (FIG. 8) 2. process by process Production time transition (Fig. 9) 3. Required time by detailed element (Fig. 10) 4. Required time transition by detailed element (Fig. 11) 5. Production time estimated value of new process It can be used for production control.

These analyzes are performed by the master computer 1.
This is done by processing each of the above data records with the productivity analysis program 13 in the display device 14
Is displayed in.

First, the production time by process is to output how much the processing time actually takes for each process. An example of display output by the display device 14 is shown in FIG.

This displays how much time is required in the three elements of pre-preparation, exposure processing, and post-processing for each of processes 1, 2, ...
Time data of three elements of pre-preparation, exposure processing, and post-processing is displayed in the form of a bar graph for each of processes 1, 2 ,. This time data may be any of the above-mentioned average values and standard deviations, but here the average required time of the process is output for each process.

The file on which the display of FIG. 8 is based is shown in FIG.
Any of the files shown in FIG. 4 may be used. Of course, in the file of Figure 4, the data itself in the file is the sum of the required time,
Needless to say, since only the output processing is performed, higher speed processing than that using the file in FIG. 3 is possible because it includes the data of and the number of times.

By simultaneously outputting a plurality of processes in this way, the production time required for each process can be understood at a glance. Then, by looking at this output example, it is possible to easily grasp how much production time is required for each process, the user can easily obtain important information in the production plan, and the actual measurement by the stopwatch as in the past can be performed. It is not necessary to carry out the process, and further, for example, when it is necessary to reassemble the manufacturing process, it is possible to easily make a trial calculation as to how long the new process will take.

Further, as an output example of the production time transition for each process, an example as shown in FIG. 9 can be considered. In FIG. 9, the change in the required time of the "exposure processing" element is displayed several times during a certain process. in this case,
It is needless to say that the file formats shown in FIGS. 3 and 6 are necessary because it is necessary to record the time required for the “exposure processing” element for a plurality of times during a certain process.

In FIG. 9, the required time is locally large at the location of x, but this indicates that a problem has occurred in the corresponding exposure processing, and may be useful for trouble shooting. There is.

FIG. 10 shows an output example of the required time for each element. In the example of FIG. 10, it can be created from the data recorded using the file format for each detailed element of FIGS. 6 and 7. In FIG. 10, the required average time of each detailed element is output. Here, of course, as in the case of FIG. 6 and FIG. 7, the value measured based on the unit determined according to the required time determining element of each detailed element is used.

This information can be mainly useful for the maintenance of the device. For example, the productivity performance of the apparatus can be grasped by comparing the predetermined temporal performance with the data for each element time, that is, the actual measurement value.

Further, by using the file formats shown in FIGS. 6 and 7, it is possible to output the required time transition of a certain detailed element as shown in FIG.

In FIG. 11, the transition of the required time of the “shutter opening / closing” element is displayed. In the case of the file formats shown in FIGS. 6 and 7, standardized time data in units of predetermined exposure light energy is displayed. Since it is recorded, it is possible to see the change over time in the time required for "shutter opening / closing" under the same exposure conditions.

It can be seen from FIG. 11 that the "shutter opening / closing" time, that is, the exposure light irradiation time gradually increases.

Normally, the light quantity of the exposure light is measured by a predetermined optical sensor or the like, and the "shutter opening / closing" is usually controlled in accordance with this light quantity, so that the "shutter opening / closing" for obtaining the same light quantity is performed. The increase in time means that a device factor such as deterioration of a light source such as a mercury lamp for exposure illumination is considered, which is extremely useful information for managing the device.

It is also possible to calculate the expected production time value of a new process. For example, if there is a new process that has not been executed, the time required for the process can be predicted from the data of the current device by inputting the content of the process.

Generally, the process contents can be held in the master computer in the form of a file, so that the sequence of the process can be easily analyzed. If the sequence to be used is known, then the expected value of the production time required for the entire process can be easily calculated by calculating from the past statistical information how much time it takes for each individual sequence and adding them.

For example, the relationship between the movement of the stage of the apparatus and the required time can be obtained from the time data recorded in the file format shown in FIGS. That is, the moving distance taken by the unimplemented process can be easily calculated from the process content.

By inputting the moving distance of the stage at this time, the required time can be obtained based on the data of "detailed element time data". Similarly, if the other elements are similarly calculated, the process is actually performed. It is possible to predict the required time based on sufficient results without carrying out the above.

Here, a concrete calculation method for calculating the contents described so far based on FIG. 2 is shown below. Three examples of the calculation target are: 1. total process time, 2. exposure time per substrate, and 3. average mask alignment time of the equipment.

Δt in FIG. 2 is the time required for each element time,
Below t, the first digit is the process number, the second digit is the element time type
(Type of operation) The third digit shows the substrate number within the same process. Therefore, according to the required time analysis program in FIG. 1, from these data, for example, the total required time T of the process 1, the required exposure time T * per substrate, and the average mask alignment time Tm of this apparatus are

[0081]

(Equation 3)

(N is the number of exposures, M is
Indicates the number of mask alignments).

The data recording and analysis described above may be performed by another computer instead of the master computer for controlling the apparatus. For example, as shown in FIG. 12, it is conceivable to connect an external host computer 40 to the master computer 1 via a network so that the host computer 40 can collectively record and process data.

In the case of FIG. 12, the host computer 40 is connected to the plurality of master computers 1 to acquire the statistical information of these and record it in the storage device 15. The master computer 1 has the same configuration as in FIG.
It communicates with the host computer 40 and sends individual statistical information to the host computer 40. Alternatively, it has at least the built-in clock 12 and measures the time information of each process element or detailed element, and the host computer 40 side performs the same processing as described above.

The host computer 40 is provided with the productivity analysis program 13 and the display device 14 for performing the same processing as described above. In this way, by using the host computer 40 that controls the plurality of master computers 1, such a layout allows the entire apparatus to be viewed in terms of production control work, which is convenient for production control.

As is clear from the above, according to the above embodiment, the required production time is automatically recorded, so that the man-hours can be reduced and the accurate recording can be performed.

Further, by analyzing the time required for the same process in a time series, it is possible to determine whether or not the device maintains the performance during the normal production time.

Further, since the required time is recorded by dividing it into more subdivided element times, for example, when the required time is deteriorated, it is possible to judge what is actually deteriorated and it is possible to contribute to the maintenance work of the apparatus.

Further, by assembling the recorded element times even for a process whose production required time is unknown, the required time supported by the actual results can be predicted, which facilitates the development of a new process.

It is to be noted that the data regarding the required time is measured and recorded only for the necessary processes, for example, only the processes constituting the manufacturing process of a certain fixed product, or only the processes executed during the predetermined period. You may Further, although the display means has been exemplified as the output means of the analysis result in the above, the output system is not limited to this, and the output to the printer is also the output processing to the other data processing device. It goes without saying that it is included in the result output processing.

[0091]

As is apparent from the above description, according to the present invention, the time required for the execution of a process which is executed by one or a plurality of functions of the execution unit and which forms a part of the automatic manufacturing process. A timekeeping means for timing
Based on a predetermined recording format, it employs a configuration that has a recording unit that records the time required by the time measuring unit, so that the time required for production is automatically recorded accurately and information regarding the time required for production is provided. It is possible to provide an excellent manufacturing control device that can be provided to the user and that facilitates management of the manufacturing process.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration of a manufacturing control apparatus adopting the present invention.

FIG. 2 is an explanatory diagram showing process elements and required time in the apparatus of FIG.

FIG. 3 is an explanatory diagram showing a file format in which a required time is recorded for each process element.

FIG. 4 is an explanatory diagram showing a file format in which required times are totaled and recorded for each process element.

5 is an explanatory diagram showing detailed elements of the process and required time in the apparatus of FIG. 1. FIG.

FIG. 6 is an explanatory diagram showing a file format in which a required time is recorded for each detailed element of a process.

FIG. 7 is an explanatory diagram showing a file format for collecting and recording required time for each detailed element of a process.

FIG. 8 is an explanatory diagram showing an output example of required (production) time for each process.

FIG. 9 is an explanatory diagram showing an output example of required (production) time transition for each process.

FIG. 10 is an explanatory diagram showing an output example of required (production) time for each detailed element of the process.

FIG. 11 is an explanatory diagram showing an output example of required (production) time transition for each detailed element of a process.

FIG. 12 is a block diagram showing a different device configuration.

[Explanation of symbols]

 1 Master Computer 12 Built-in Clock 13 Productivity Analysis Program 14 Display Device 15 Storage Device 21 Positioning Control Unit 22 Stage Control Unit 23 Substrate Transfer Unit 26 Exposure Device 40 Host Computer

Claims (6)

[Claims] 1. A manufacturing management apparatus in which an automatic manufacturing process of a predetermined product is controlled by a main control section integrally controlling a lower-order execution unit having a relatively single function for controlling each section of the manufacturing apparatus, wherein: A process performed by one or more functions of an execution unit and forming part of said automated manufacturing process,
A manufacturing control apparatus comprising: a time measuring means for measuring a time required for the execution, and a recording means for recording a time required by the time measuring means based on a predetermined recording format. 2. The manufacturing control apparatus according to claim 1, wherein the required time is measured and recorded for each of the further subdivided various operations constituting the process. 3. The required time recorded in the recording means,
The manufacturing control apparatus according to claim 1, further comprising: a means for analyzing based on a predetermined standard, and an output means for outputting an analysis result by the analyzing means. 4. The manufacturing control apparatus according to claim 1, wherein the production required time can be predicted for a newly created process immediately from the production required time data based on the recorded results. 5. The required time is measured for each of various further subdivided operations constituting the process, and the measurement result or the data obtained by a predetermined statistical operation on the measurement result is the recording means. 3. The manufacturing control apparatus according to claim 2, wherein the recording is additively recorded at the corresponding recording positions of. 6. The method according to claim 2, wherein the required time is measured in units standardized based on execution conditions of each operation, which is further subdivided to constitute the process. Manufacturing control equipment.