JPH08201789A - Substrate attraction table - Google Patents

Abstract

PURPOSE: To make it possible to sufficiently position a substrate and to hold its position even if this substrate is curved by constituting a vacuum attraction table in such a manner that this table is normally held higher than a supporting table and descends accompanied with energizing force to a substrate side by its pressing force at the time of placing the substrate thereon. CONSTITUTION: The vacuum attraction table 10 is inserted into a guide 12 formed in a base 11 by aligning their respective central axes. A coil spring 13 is included between this table and the base 11 in such a manner that the energizing force is generated in the moving direction to the base 11 side and the direction to the side opposite thereto in this movement. Further, the supporting table 14 is arranged around the vacuum attraction table 10 and the front surface of the supporting table 14, i.e., the surface to be pressed with a liquid crystal display substrate is formed lower than the surface of the vacuum attraction table 10 to which the liquid crystal display substrate is attracted. Then, the energizing force generated by the coil spring 13 acts on the vacuum attraction table l0, which in turn presses the liquid crystal display substrate when the vacuum attraction table 10 is pressed by the liquid crystal display substrate placed thereon, by which the vacuum attraction table 10 is surely pressed to the liquid crystal display substrate.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate suction mounting table,
For example, the present invention relates to a substrate suction mounting table for mounting the liquid crystal display substrate when the driving circuit substrate is pressure-bonded to the liquid crystal display substrate.

[0002]

2. Description of the Related Art As a matrix display type liquid crystal display device, a liquid crystal display substrate having electrodes drawn out from the display surface in the periphery excluding the display surface, and a driving device connected to the electrodes in the periphery of the liquid crystal display substrate. A circuit board and a circuit board are known.

In the case of manufacturing such a liquid crystal display device, a liquid crystal display substrate is placed on a substrate suction mounting table, and an electrode of the drive circuit substrate is displayed on the liquid crystal display substrate through an anisotropic conductive film. The electrodes are arranged so as to face the electrodes of the substrate, and the electrodes are pressure-bonded by pressing the heat tool from the driving circuit substrate side.

For this reason, in the substrate suction mounting table, a vacuum suction table is arranged in the central portion of the substrate so that the mounted liquid crystal display substrate can be held in a sufficient position after being mounted accurately, and the heat tool is also used. A support base for supporting the periphery of the liquid crystal display substrate against the pressure of is arranged.

Here, the vacuum suction base and the support base were formed at a height such that their contact surfaces with the liquid crystal display substrate were flush with each other.

[0006]

However, there is no particular problem with the substrate suction mounting table configured as described above when the liquid crystal display substrate is completely flat without slight curvature, but for example, in the upward direction. In the case where the liquid crystal display substrate was slightly warped, a gap was sometimes formed between the liquid crystal display substrate and the vacuum suction table, and it was often impossible to completely suck the liquid crystal display substrate onto the vacuum suction table.

In such a case, the positioning of the liquid crystal display substrate with respect to the substrate suction mounting table becomes insufficient, and eventually the positioning of the driving circuit board with respect to the liquid crystal display substrate becomes insufficient.

The present invention has been made under such circumstances, and an object thereof is to provide a substrate suction device capable of achieving sufficient positioning and position holding even if the substrate is curved.

[0009]

Of the inventions disclosed in the present application, a representative one will be briefly described below.
It is as follows.

That is, in a substrate suction mounting table provided with a vacuum suction table arranged at a position positioned in the center of the substrate to be mounted and a support table arranged at a position positioned at the periphery of the substrate, The vacuum suction table is arranged such that the substrate suction surface thereof is projected from the substrate contact surface of the support table, and the vacuum suction table is moved downward with an urging force to the substrate side by the pressing by the mounting of the substrate. It is characterized by being.

[0011]

[Operation] In the substrate suction mounting table configured as described above,
The vacuum suction table is formed to be higher than the support table in a normal state, and is moved downward by a pressing force by placing the substrate on the substrate side with an urging force.

Therefore, even if the substrate is warped in the upward direction, the vacuum suction table can be completely brought into contact with the liquid crystal display substrate without forming a gap between them.

Further, since the vacuum suction table can be lowered with the urging force to the substrate side by the pressing by the mounting of the substrate, it can completely come into contact with the liquid crystal display substrate regardless of the degree of warpage.

Therefore, the liquid crystal display substrate can be securely sucked onto the vacuum suction table, and the liquid crystal display substrate can be positioned and held sufficiently.

When the liquid crystal display substrate is warped downward, or when it is not warped at all, it is possible to achieve exactly the same purpose without any adverse effect due to the adoption of the above configuration. become able to.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a block diagram showing an embodiment of a substrate suction mounting table according to the present invention. This figure is a configuration diagram showing a liquid crystal display substrate suction mounting table when the drive circuit board is pressure-bonded.

In FIG. 1, a vacuum suction table 10 is arranged at the center of a region for mounting a liquid crystal display substrate (not shown).

The vacuum suction table 10 is inserted into a guide 12 formed on a base 11 so that the central axes of the vacuum suction table 10 are the same, so that the vacuum suction table 10 can move vertically with respect to the base 11.

The vacuum suction table 10 in the guide 12 is
The coil spring 13 is included between the base 11 and
As a result, when the base 11 moves, an urging force is generated in a direction opposite to the movement.

As shown in a plan view of FIG. 2, the vacuum suction table 10 has a vacuum suction hole 10A formed on the upper surface to be brought into contact with the liquid crystal display substrate. A vacuum exhaust pipe 10C attached to the vacuum suction table 10 through a vacuum exhaust passage 10B formed inside
Have been led to.

The vacuum exhaust pipe 10C is made of a flexible material and is connected to a vacuum pump (not shown).

In the figure, reference numeral 13 indicates the position where the coil spring 13 is arranged.

Further, as shown in FIG. 1, the vacuum suction table 1
A support 14 is arranged around 0. The support base 14 supports the peripheral portion of the liquid crystal display substrate when the liquid crystal display substrate (not shown) is placed, and the heat tool 15 is disposed above the peripheral portion.

The upper surface of the support base 14, that is, the surface to be brought into contact with the liquid crystal display substrate, is formed lower than the surface of the vacuum suction base 10 which adsorbs the liquid crystal display substrate by a height indicated by h in the figure. There is.

Next, a process for pressure-bonding the drive circuit board to the liquid crystal display board using the board suction mounting table having such a structure will be described with reference to FIG.

In the figure, the liquid crystal display substrate 20 is placed, but here it is assumed that the liquid crystal display substrate 20 is formed with an upward warp.

In this case, the vacuum suction table 10 is reliably brought into contact with the liquid crystal display substrate 20 when the periphery of the liquid crystal display substrate 20 is accurately positioned on the support table 14. This is because the vacuum suction table 10 is pressed by the mounted liquid crystal display device 20, and the urging force generated in the coil spring 13 at that time acts so that the vacuum suction table 10 presses the liquid crystal display substrate 20. From this, the coil spring 13
It is preferable that the elastic force of is so small as to easily contract with respect to the weight of the liquid crystal display substrate 20.

After that, the vacuum exhaust is performed through the vacuum exhaust pipe 10C, so that the reliable position can be maintained.

As described above, the position of the liquid crystal display substrate 20 can be accurately held with respect to the substrate suction mounting table, which means that the position of the drive circuit board 22 is surely held so as to be pressure-bonded to the liquid crystal display substrate 20. Means that you can.

That is, as shown in the plan view of FIG. 4, the driving circuit board 22 is a liquid crystal display substrate 20 composed of an upper glass substrate 20A and a lower glass substrate 20B with a liquid crystal (not shown) interposed. For example, it is arranged around the lower glass substrate 20B. In this case, the electrodes formed around the lower glass substrate 20B and the electrodes formed on the drive circuit board 22 are anisotropic. It is possible to perform thermocompression bonding while accurately facing each other via the conductive conductive film.

The drive circuit board 22 shown here has a structure in which the semiconductor chip 22A is mounted on a flexible board and the electrodes of the semiconductor chip 22A are drawn out to the periphery of the board via the wiring layer. is there.

In the thermocompression bonding step, as shown in FIG. 5, the liquid crystal display substrate 20 and the driving circuit board 22 are positioned so that their electrodes face each other through the anisotropic conductive film 25. This can be accomplished later by lowering and pressing the heat tool 15.

In the above-mentioned embodiment, the case where the liquid crystal display substrate is warped in the upward direction is explained. However, for example, when the warp is caused in the downward direction or there is no warp at all, It is clear that the same purpose can be achieved without any adverse effect due to the adoption of the above configuration.

Further, in the above-mentioned embodiment, the substrate suction mounting table used in the manufacture of the liquid crystal display substrate is described, but the substrate is not necessarily limited to the liquid crystal display substrate, and the substrate used for the same purpose. It goes without saying that it can also be applied to a suction table.

[0035]

As is apparent from the above description,
According to the substrate suction device of the present invention, sufficient positioning and position holding can be achieved even if the substrate is curved.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an embodiment of a substrate suction device according to the present invention.

FIG. 2 is a plan view showing an embodiment of a vacuum suction table provided in the substrate suction device according to the present invention.

FIG. 3 is an explanatory view showing the operation of the substrate suction device according to the present invention.

FIG. 4 is an explanatory diagram for explaining a liquid crystal display substrate mounted on the substrate suction device according to the present invention.

FIG. 5 is an explanatory view showing a step of manufacturing a liquid crystal display substrate using the device-plate adsorption device according to the present invention.

[Explanation of symbols]

10 ... Vacuum suction table, 12 ... Guide, 13 ... Coil spring,
14 ... Support stand, 15 ... Heat tool

Claims (1)

[Claims] 1. A substrate suction mounting table comprising a vacuum suction table arranged at a position positioned in the central part of the substrate to be mounted and a support table arranged at a position positioned around the substrate, The vacuum suction table is arranged such that the substrate suction surface thereof is projected from the substrate contact surface of the support table, and the vacuum suction table is moved downward with an urging force to the substrate side by the pressing by the mounting of the substrate. A substrate suction mounting table characterized by being provided.