JPH0619335Y2 - Output expansion mechanism of piezoelectric element - Google Patents
Output expansion mechanism of piezoelectric elementInfo
- Publication number
- JPH0619335Y2 JPH0619335Y2 JP1987072445U JP7244587U JPH0619335Y2 JP H0619335 Y2 JPH0619335 Y2 JP H0619335Y2 JP 1987072445 U JP1987072445 U JP 1987072445U JP 7244587 U JP7244587 U JP 7244587U JP H0619335 Y2 JPH0619335 Y2 JP H0619335Y2
- Authority
- JP
- Japan
- Prior art keywords
- leaf spring
- piezoelectric element
- frame
- displacement
- spring portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 description 14
- 239000000463 material Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000003466 welding Methods 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
Description
【考案の詳細な説明】 〈産業上の利用分野〉 本考案は、圧電素子の出力拡大機構に係り、特にその部
品点数を低減してコストの低減を図った圧電素子の出力
拡大機構に関する。DETAILED DESCRIPTION OF THE INVENTION <Industrial field of application> The present invention relates to an output enlarging mechanism for a piezoelectric element, and more particularly to an output enlarging mechanism for a piezoelectric element in which the number of parts is reduced to reduce cost.
〈従来技術〉 第２図は実願昭６０−１５６７７１号「圧電素子の出力
拡大機構」で提案されている従来の圧電素子の出力拡大
機構の構成を示す構成図である。（Ａ）は平面図、
（Ｂ）は側面図を示す。<Prior Art> FIG. 2 is a configuration diagram showing a configuration of a conventional piezoelectric element output enlarging mechanism proposed in Japanese Patent Application No. 60-156771, “Piezoelectric element output enlarging mechanism”. (A) is a plan view,
(B) shows a side view.
１，２は一対のバネ材で構成された可撓部材であり、一
端１０１、２０１側が両者の間隔を一定に保持するため
のスペーサ３を挟んでボルト４、４′により支持柱５に
固定されている。Numerals 1 and 2 are flexible members composed of a pair of spring members, and one end 101, 201 side is fixed to the support column 5 by bolts 4 and 4 ', with a spacer 3 for holding a constant distance therebetween sandwiched therebetween. ing.
可撓部材１、２の他端側には枠部１０２、２０２、中央
脚部１０３、２０３、及び中央脚部より外部に突出され
た変位取出部１０４、２０４が形成されている。Frame portions 102 and 202, central leg portions 103 and 203, and displacement take-out portions 104 and 204 protruding outward from the central leg portions are formed on the other ends of the flexible members 1 and 2.
中央脚部１０３、２０４の上には圧電素子６、７が接着
されて取り付けられており、これ等は電圧信号で差動的
に駆動される。これ等の圧電素子６、７は変位の発生源
として、さらに温度補償部材として作用する。Piezoelectric elements 6 and 7 are adhered and attached on the central legs 103 and 204, and these are driven differentially by a voltage signal. These piezoelectric elements 6 and 7 act as a displacement generation source and further as a temperature compensation member.
８、９は変位取出部１０４、２０４側にその一端がスポ
ット溶接で固定されて同一方向に平行して延長された変
位拡大用のバネ材である。１０はこれ等のバネ材の他端
部を含む一定長部分の間に介在してバネ材８、９の間隔
を一定に保持するための薄板材であり、バネ材８、９と
はスポット溶接で固定されている。Reference numerals 8 and 9 denote spring members for displacement enlargement, one end of which is fixed to the displacement extraction portions 104 and 204 by spot welding and extended in parallel in the same direction. Reference numeral 10 is a thin plate material that is interposed between fixed length portions including the other end portions of these spring members to keep the distance between the spring members 8 and 9 constant, and the spring members 8 and 9 are spot welded. It is fixed at.
この様な構成により、圧電素子６、７は電圧信号の印加
により数μの差動的変位を生じ、その変位が変位取出部
１０４、２０４を介して互いにイーデンの平行薄片を形
成するバネ材８、９、及び薄板材１０に伝達されて拡大
される。With such a configuration, the piezoelectric elements 6 and 7 undergo a differential displacement of several μ when a voltage signal is applied, and the displacement forms a parallel thin piece of Eden through the displacement extracting portions 104 and 204. , 9 and the thin plate member 10 are transmitted and enlarged.
同一特性の２個の圧電素子の差動的利用により、同一の
入力電圧信号に対する変位変換の感度を２倍にすること
ができると共に温度補償も同時に実現することができ
る。By differentially using two piezoelectric elements having the same characteristics, the sensitivity of displacement conversion for the same input voltage signal can be doubled and temperature compensation can be realized at the same time.
〈考案が解決しようとする問題点〉 しかしながら、この様な従来の圧電素子の出力拡大機構
は、部品点数が多く、コストが高くなる上に溶接歪みに
よる温度変動が生じるという問題点がある。<Problems to be Solved by the Invention> However, such a conventional output enlarging mechanism for a piezoelectric element has a problem that the number of parts is large, the cost is high, and the temperature changes due to welding distortion.
〈問題点を解決するための手段〉 この考案は、以上の問題点を解決するため、一対の積層
形の圧電素子の各一端をフレームの同一平面部に配置
し、その各他端をフレームに一体的に形成された薄肉の
板バネ部に固定してこの板バネ部の各他端からほぼ等し
い距離にある中央部に板バネ部に対してほぼ直角に張出
して板バネ部と一体的にフラッパ部を形成するようにし
たものである。<Means for Solving the Problems> In order to solve the above problems, the present invention arranges one end of each of a pair of laminated piezoelectric elements on the same plane portion of the frame and the other end of the piezoelectric element on the frame. It is fixed to an integrally formed thin leaf spring portion, and it is projected at a center portion at a substantially equal distance from each other end of the leaf spring portion at a substantially right angle to the leaf spring portion and integrally with the leaf spring portion. The flapper portion is formed.
〈実施例〉 以下、本考案の実施例について図面に基づき説明する。
第１図は本考案の１実施例を示す構成図である。<Embodiment> An embodiment of the present invention will be described below with reference to the drawings.
FIG. 1 is a block diagram showing an embodiment of the present invention.
１１はバネ材で出来ておりその中央が所定の形状に打ち
抜かれた外形が矩形状のフレームであり、その固定部１
２には支持体に固定する固定用の孔１３、１４が開けら
れている。フレーム１１は材料として例えば、弾性材料
であるＮｉスパンＣ（商品名）やバネ用のステンレス鋼
が採用され、その厚みは２mmの程度のものである。Reference numeral 11 denotes a frame made of a spring material, the center of which is stamped into a predetermined shape to have a rectangular outer shape.
2, fixing holes 13 and 14 for fixing to the support are opened. As the material of the frame 11, for example, Ni span C (trade name) which is an elastic material or stainless steel for spring is adopted, and its thickness is about 2 mm.
フレーム１１の側面には所定の幅で側部１５、１６が、
これ等の他端の間には幅の薄い板バネ部１７がそれぞれ
一体的にブリッジ状に形成されている。Sides 15 and 16 with a predetermined width are provided on the side surface of the frame 11,
A thin leaf spring portion 17 is integrally formed in a bridge shape between these other ends.
板バネ部１７の中央にはこの板バネ部１７に直角にフラ
ッパ部１８が所定の厚みで板バネ部１７と一体的に外側
に突き出して形成されている。A flapper portion 18 is formed at a center of the leaf spring portion 17 at a right angle to the leaf spring portion 17 so as to integrally project with the leaf spring portion 17 to the outside.
一方、板バネ部１７のフラッパ部１８に対して左右に若
干離れた内側には脚部１９、２０が板バネ部１７と一体
的に形成されている。また、固定部１２の内側にも脚部
１９、２０に対向して脚部２１、２２が若干内側に突き
出して形成されている。On the other hand, leg portions 19 and 20 are integrally formed with the leaf spring portion 17 on the inner side of the leaf spring portion 17 which is slightly left and right with respect to the flapper portion 18. Further, inside the fixed portion 12, leg portions 21 and 22 are formed so as to face the leg portions 19 and 20 and slightly protrude inward.
以上の各部は、例えばプレス等により一体的に打ち抜か
れて形成される。Each of the above parts is integrally punched by a press or the like.
脚部１９と２１との間、及び脚部２０と２２との間には
それぞれ積層形の圧電素子２３と２４が挿入されて例え
ば接着剤で固定されている。Laminated piezoelectric elements 23 and 24 are inserted between the leg portions 19 and 21 and between the leg portions 20 and 22, respectively, and are fixed by, for example, an adhesive.
フラッパ部１８の先端にはノズル２５が所定の間隔を持
って配置され、このノズル２５には配管２６を介して絞
り２７から空気圧Ｐが印加され、そのノズル背圧が圧電
素子２３、２４の変位に対応してＰｂとして得られる。A nozzle 25 is arranged at a predetermined interval at the tip of the flapper portion 18, and an air pressure P is applied to this nozzle 25 from a throttle 27 via a pipe 26, and the nozzle back pressure causes displacement of the piezoelectric elements 23, 24. Is obtained as P b .
以上の構成において、圧電素子２３、２４には電圧信号
がその変位が差動的になるように印加され、それぞれＦ
１、Ｆ２に示すようにわづかな変位、例えば数μｍ程度
の変位をする。In the above structure, voltage signals are applied to the piezoelectric elements 23 and 24 so that their displacements are differential, and
1 and F 2 , a slight displacement, for example, a displacement of several μm is performed.
この結果、フラッパ部１８の先端はＦ３に示すように拡
大された回転変位として取り出され、これによりノズル
２５とフラッパ部１８の先端の間隔が変更されてノズル
背圧Ｐｂが変化する。As a result, the tip end of the flapper portion 18 is taken out as an enlarged rotational displacement as shown by F 3 , whereby the distance between the nozzle 25 and the tip end of the flapper portion 18 is changed and the nozzle back pressure P b is changed.
この場合、温度が変化しても圧電素子２３と２４は同じ
様に変位するので、フラッパ部１８の先端は変位せず、
温度の影響は受けない。In this case, since the piezoelectric elements 23 and 24 are displaced in the same manner even if the temperature changes, the tip of the flapper portion 18 is not displaced,
Not affected by temperature.
〈考案の効果〉 以上、実施例と共に具体的に説明したように本考案によ
れば、フレームは固定部、側部、板バネ部、フラッパ部
及び脚部が一体的に形成できるようにフレームを構成し
て、これに圧電素子を挿入固定するようにしたので、
部品点数は実質的に１個フレームと２個の圧電素子の３
個で構成することができ、従来に比べて部品点数を低減
させることができ、大幅にコストの低減が出来ると共
に、フレームを構成する各部が一体的であるので、従
来のように溶接による歪みが生ぜず温度に対して安定な
変位拡大機構が実現できる。<Effects of the Invention> As described above in detail with the embodiments, according to the present invention, the frame is formed so that the fixing portion, the side portion, the leaf spring portion, the flapper portion and the leg portion can be integrally formed. Since it was configured and the piezoelectric element was inserted and fixed in this,
The number of parts is essentially 1 frame and 2 piezoelectric elements, 3
Since it can be composed of individual parts, the number of parts can be reduced compared to the conventional one, and the cost can be significantly reduced, and since each part that constitutes the frame is integrated, distortion due to welding as in the conventional A displacement magnifying mechanism that is stable with respect to temperature can be realized.
第１図は本考案の１実施例を示す構成図、第２図は従来
の圧電素子の出力拡大機構を示す構成図である。 １、２……可撓部材、３……スペーサ、６、７、２３、
２４……圧電素子、８、９……バネ材、１０……薄板
材、１１……フレーム、１２……固定部、１５、１６…
…側部、１７……板バネ部、１８……フラッパ部、１９
〜２２……脚部。FIG. 1 is a block diagram showing an embodiment of the present invention, and FIG. 2 is a block diagram showing a conventional output enlarging mechanism of a piezoelectric element. 1, 2 ... Flexible member, 3 ... Spacer, 6, 7, 23,
24 ... Piezoelectric element, 8, 9 ... Spring material, 10 ... Thin plate material, 11 ... Frame, 12 ... Fixed part, 15, 16 ...
… Side part, 17 …… Leaf spring part, 18 …… Flapper part, 19
~ 22 …… Legs.
Claims (1)
ムの同一平面部に配置し、その各他端を前記フレームに
一体的に形成された薄肉の板バネ部に固定してこの板バ
ネ部の前記各他端からほぼ等しい距離にある中央部に前
記板バネ部に対してほぼ直角に張出して前記板バネ部と
一体的にフラッパ部を形成したことを特徴とする圧電素
子の出力拡大機構。1. A pair of laminated piezoelectric elements each having one end arranged on the same plane of a frame and the other end fixed to a thin leaf spring integrally formed on the frame. Output of a piezoelectric element, characterized in that a flapper portion is formed integrally with the leaf spring portion so as to extend substantially at a right angle to the leaf spring portion in a central portion at a substantially equal distance from each of the other ends of the spring portion. Expansion mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987072445U JPH0619335Y2 (en) | 1987-05-15 | 1987-05-15 | Output expansion mechanism of piezoelectric element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987072445U JPH0619335Y2 (en) | 1987-05-15 | 1987-05-15 | Output expansion mechanism of piezoelectric element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63182694U JPS63182694U (en) | 1988-11-24 |
| JPH0619335Y2 true JPH0619335Y2 (en) | 1994-05-18 |
Family
ID=30915895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987072445U Expired - Lifetime JPH0619335Y2 (en) | 1987-05-15 | 1987-05-15 | Output expansion mechanism of piezoelectric element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0619335Y2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4793893B2 (en) * | 2001-02-23 | 2011-10-12 | Ｎｅｃトーキン株式会社 | Piezoelectric generator unit |
| JP4973811B2 (en) * | 2009-11-12 | 2012-07-11 | コニカミノルタホールディングス株式会社 | Translation mechanism, interferometer and spectrometer |
-
1987
- 1987-05-15 JP JP1987072445U patent/JPH0619335Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63182694U (en) | 1988-11-24 |
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