JP4793893B2 - Piezoelectric generator unit - Google Patents
Piezoelectric generator unit Download PDFInfo
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- JP4793893B2 JP4793893B2 JP2001049234A JP2001049234A JP4793893B2 JP 4793893 B2 JP4793893 B2 JP 4793893B2 JP 2001049234 A JP2001049234 A JP 2001049234A JP 2001049234 A JP2001049234 A JP 2001049234A JP 4793893 B2 JP4793893 B2 JP 4793893B2
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- Prior art keywords
- piezoelectric
- piezoelectric bimorph
- unimorph
- holding plate
- bimorph
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- 238000010248 power generation Methods 0.000 claims description 10
- 238000005452 bending Methods 0.000 claims description 8
- 238000004080 punching Methods 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000000452 restraining effect Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【０００１】
【本発明の利用分野】
本発明は、圧電バイモルフや圧電ユニモルフを振動させることで、その振動や衝撃を検出したり、あるいはその発生電力を利用して発光素子等を点灯させたり、二次電池等に充電し利用する等の圧電素子による発電装置に関する。
【０００２】
【従来技術と問題点】
従来この種の圧電素子による発電をする場合には、板状圧電セラミック素子の面積の最も広い対になる面に電極を形成し分極をしたものと薄い弾性体と張り合わせた圧電ユニモルフ素子、あるいは圧電セラミック素子同士を直接もしくは弾性体板を介して２枚貼り合わせたりして得られる圧電バイモルフ素子が用いられている。この場合、素子の支持方法としては一端を固定し、自由端に外力を加える方式や、あるいはセラミック素子の周辺に張り出した弾性体の周辺を固定して、金属球、セラミック球などの衝撃体をセラミック部に衝突させることで、圧電素子の圧電正効果によって発電する方法が用いられている。このようにして得られた電気エネルギーを発光体の発光に利用したり、２次電池に充電して取り出し利用したりされている。
【０００３】
特開平６−２０９８０７では、この発電装置を靴底に取り付けて、歩いたり走ったりする動きに合わせ、左右または上下の往復運動により組み込まれた衝撃体が圧電素子を打撃し電気を発生させ発光体を発光させる発明が開示されている。また、同種の発明として特開２０００−２８７４６４号には、自転車走行中の振動からガイド内の衝撃体が圧電素子に衝突して、歪みを発生させることで電気エネルギーを得て、このエネルギーで発光ダイオードを点灯させることで安全走行が可能な自転車に関する発明が開示されている。
【０００４】
前記の発明においては圧電素子の固定は外周の少なくとも２ヶ所を支持することで、衝撃を受けた場合に梁の曲げ状態を実現することで発電効率を高めている。しかしながら、圧電発電において発電効率への寄与は衝撃時の歪みのみでなく、その後の減衰振動時に発生する電気エネルギーも無視できない。従って、保持の条件としては長方形のバイモルフまたはユニモルフ振動子の場合、減衰振動ができる限り継続できる振動ノードでの２ヶ所支持が望ましい。
【０００５】
一方、衝撃を受ける振動子について、この２ヶ所の振動ノードを機械的に支持する事は比較的困難で衝撃体の衝撃で支持機構が破損しやすく、また支持機構が衝撃体の衝撃を受けて素子への衝撃を緩和して発電性能を低下させる問題があった。また、この支持構造のために、構成が複雑になり部品点数も増加するために量産性の低下や製造価格が拡大する問題があり、簡便で信頼性の高い支持構造の出現を望まれていた。
【０００６】
【発明の目的】
本発明はこの欠点を除去するために、圧電ユニモルフについては振動子接合弾性体部、また圧電バイモルフでは中間層の弾性体部、さらにこれらの素子については屈曲振動のノード部分を支持する為の支柱部、更に全体を固定するための枠部を一体の弾性体板を打ち抜いて形成した圧電ユニモルフユニットあるいは圧電バイモルフユニットを構成し、堅牢で衝撃体の衝撃を妨害しない、更に部品点数が少なく生産しやすい構造で、衝撃による歪みエネルギーを、電気エネルギーに効率的に変換する圧電発電装置を提供することを目的とする。
【０００７】
本発明はこの欠点を除去するために、圧電ユニモルフについては振動子接合弾性体部、また圧電バイモルフでは中間層の弾性体部、さらにこれらの素子について屈曲振動のノード部分を支持する為の支柱部、更に全体を固定するための枠部を一体の弾性体板を打ち抜いて形成した圧電ユニモルフユニットあるいは圧電バイモルフユニットを構成し、これを圧電発電装置に用いる。
すなわち、本発明によれば、圧電バイモルフ素子と、前記圧電バイモルフ素子を保持する保持板とから構成され、前記保持板は枠部と、前記枠部の内側に設けられ前記圧電バイモルフ素子の屈曲振動のノード部分を支持する為の支柱部と、前記支柱部の内側に設けられ前記圧電バイモルフ素子を固定する為の矩形部とを一体の弾性体板を打ち抜いて形成してなる圧電バイモルフユニットを備えたことを特徴とする圧電発電装置が得られる。
また、本発明によれば、圧電ユニモルフ素子と、前記圧電ユニモルフ素子を保持する保持板とから構成され、前記保持板は枠部と、前記枠部の内側に設けられ前記圧電ユニモルフ素子の屈曲振動のノード部分を支持する為の支柱部と、前記支柱部の内側に設けられ前記圧電ユニモルフ素子を固定する矩形部とを一体の弾性体板を打ち抜いて形成してなる圧電ユニモルフユニットを備えたことを特徴とする圧電発電装が得られる。
【０００８】
【実施例】
以下本発明を図示の実施例について説明する。
【０００９】
以下、圧電バイモルフについて説明してゆくが、接合する圧電セラミック板が片面のみで構成すると圧電ユニモルフになるのでユニモルフの説明は省略する。
【００１０】
図１及び図２は本発明について発明の一実施例を示す部品図及び組立図である。
【００１１】
図１は本発明の実施例の部品を示し、各構成は次の様な構成で出来上がっている。
【００１２】
１−１は圧電セラミック素子である。本実施例では圧電セラミックスとしてはジルコン−チタン酸鉛系の材料を使用したがチタン酸バリウム系の圧電セラミック材料でも良い。１−２は圧電セラミック素子と圧電セラミック素子を金属シートで挟み込む際に使用する保持板であり今回の実施例では０．２ｍｍのステンレス材をエッチング加工したものを使用している。この保持板についてはステンレスに限らず銅などの他の金属材料、さらにガラスエポキシ系等の有機系材料を使用しても可能である。
【００１３】
１−３は１−１同様の圧電セラミック素子である。図２は図１に示した部品を接着によって貼りあわせたバイモルフ構造を示している図１（部品図）及び図２（組立図）を用い本発明について詳しく説明する。
【００１４】
図１は本実施例を実現するための部品構成である。これによれば部品は２枚の圧電セラミック素子（１−１、１−３）と圧電バイモルフ構成にするための保持板（１−２）から構成されている。この接着の際、圧電セラミック素子の極性は保持板（１−２）に対して同じ極性の向きとなっている。また保持板については圧電セラミック素子を張り付け圧電バイモルフとして機能する部分（長さＬ１、幅Ｗ１）の部分とその周りを囲むように配置された部分（長さＬ２、幅Ｗ２）及びそれらをブリッジする（長さＬ３、幅Ｗ３）の部分から構成されている。このブリッジの位置（ａ）は長さＬ１に対して以下の計算式より求めた位置となっている。
【００１５】
ａ＝L１×０.２２４
【００１６】
この位置は圧電バイモルフの撓み１次振動のノード点であり圧電バイモルフの振動を拘束しない位置になっている。この拘束しない事により圧電バイモルフの衝撃後の減衰振動は長引き、圧電による電気エネルギーが効率良く取り出せる事となる。この事により、圧電バイモルフ部分の固定に当たってはブリッジの外周を囲む形の保持部分（長さL２、幅W２）を固定しても圧電バイモルフの振動を拘束することなく保持が可能となる。
【００１７】
図２に於いては、図１で示した構成部品をエポキシ樹脂あるいは嫌気性接着剤等で接着した組立図である。これによればこの組立部品の機能性要素は３つの部分に分かれる。１つは圧電バイモルフとして機能する部分（長さL１、幅W１）及び２つ目は固定機能としての囲むように配置された部分（長さL２、幅W２）及び３つ目はそれらをブリッジする（長さL３、幅W３）機能を持つ部分になる。
【００１８】
固定機能としての部分（長さL２、幅W２）を接着あるいはネジ止め等の固定方法で固定し圧電バイモルフ部分（長さL１、幅W１）に衝撃を与えることで圧電正効果により圧電バイモルフの両端の電気端子より電気エネルギーを取り出す事が可能になる。
【００１９】
この衝撃は圧電バイモルフの撓み振動を発生させ、圧電バイモルフから電気エネルギーが発生し両電極に接続した電線から電気エネルギーを取り出すことができる。ここで圧電バイモルフを支持しているのは圧電バイモルフの撓み振動のノード地点のブリッジ（長さL３、幅W３）の部分であり固定部分の影響で圧電バイモルフの発生電気エネルギーの量が低下することは極めて少ない。
【００２０】
以上説明の如く、圧電バイモルフからより効率的に電気エネルギーの発生を可能にし両電極端子から電線を経由し電気エネルギーを取り出すことができる。前記一連の構成は圧電バイモルフの固定方法による発生電気量の低下を防ぎ効率よく負荷へと電気エネルギーが供給できる事を示している。
【００２１】
ここから発生させられた電気エネルギーは負荷へとつながれ、仕事をする事となる。今回の実施例ではこの負荷は発光ダイオードになっており最終的には発光エネルギーに変換されるが、負荷については発光ダイオードに限らなくて良い。
【００２２】
実施例の発電ユニットはいずれも、交流電圧が発生するので、必要に応じて整流回路で整流し直流電流を取り出したり、コンデンサを負荷に対して並列に接続したりすることで発生電圧を平滑して利用することも可能である。
【００２３】
【発明の効果】
以上述べた如く本発明によれば、圧電バイモルフに使用される圧電素子とそれを保持する部分及び撓み振動のノード部分を固定するブリッジ機構にすることで圧電バイモルフに衝撃等の歪みを与えた場合これを効率良く電気エネルギーに変換することができると共にユニットとしての固定方法の種類が増え、設計の自由度を大きくすることができる。また、部品点数の削減は生産効率を高め、製造原価の低減にも寄与できる。さらに、堅牢な構成で、衝撃体を妨害することが少なく繰り返し衝撃への信頼性が向上し、高信頼性の高効率の発電ユニットが提供できる。
【図面の簡単な説明】
【図１】本発明の実施例１を示す側面図
１−１ 圧電素子
１−２ 保持板
１−３ 圧電素子
【図２】本発明の実施例１を示す前面図
２−１ 圧電素子
２−２ 保持板
２−３ 圧電素子[0001]
[Field of application of the present invention]
The present invention vibrates a piezoelectric bimorph or a piezoelectric unimorph, thereby detecting vibration or impact, or using the generated power to light a light emitting element or the like, charging a secondary battery, etc. It is related with the electric power generating apparatus by the piezoelectric element.
[0002]
[Prior art and problems]
Conventionally, when power is generated by this type of piezoelectric element, a piezoelectric unimorph element in which an electrode is formed on a pair of surfaces having the widest area of a plate-shaped piezoelectric ceramic element and polarized with a thin elastic body, or a piezoelectric element A piezoelectric bimorph element obtained by bonding two ceramic elements directly or via an elastic plate is used. In this case, the element is supported by fixing one end and applying an external force to the free end, or by fixing the periphery of an elastic body that protrudes around the ceramic element to attach an impact body such as a metal sphere or ceramic sphere. A method is used in which power is generated by the piezoelectric positive effect of a piezoelectric element by making it collide with a ceramic part. The electric energy obtained in this way is used for light emission of a light emitter, or is charged by using a secondary battery.
[0003]
In Japanese Patent Laid-Open No. 6-209807, the power generator is attached to a shoe sole, and an impact body incorporated by reciprocating left and right or up and down strikes a piezoelectric element in accordance with a movement of walking or running, and generates electricity by generating electricity. Has been disclosed. Also, as a similar invention, Japanese Patent Application Laid-Open No. 2000-287464 discloses that an impact body in a guide collides with a piezoelectric element from vibration during bicycle travel, and generates electric energy by generating distortion, and light is emitted with this energy. An invention relating to a bicycle that can be driven safely by turning on a diode is disclosed.
[0004]
In the above invention, the piezoelectric element is fixed by supporting at least two places on the outer periphery, and the power generation efficiency is improved by realizing the bending state of the beam when receiving an impact. However, in piezoelectric power generation, the contribution to power generation efficiency is not limited to not only distortion at the time of impact, but also electrical energy generated during subsequent damped vibration. Therefore, as a holding condition, in the case of a rectangular bimorph or unimorph vibrator, it is desirable to support two places at a vibration node that can continue damped vibration as much as possible.
[0005]
On the other hand, it is relatively difficult to mechanically support these two vibration nodes with respect to an impacted vibrator, and the support mechanism is easily damaged by the impact of the impact body, and the support mechanism receives the impact of the impact body. There has been a problem of reducing the power generation performance by relaxing the impact on the element. In addition, this support structure has a problem that the structure becomes complicated and the number of parts increases, resulting in a decrease in mass productivity and an increase in manufacturing price, and the appearance of a simple and reliable support structure has been desired. .
[0006]
OBJECT OF THE INVENTION
In order to eliminate this drawback, the present invention eliminates this drawback by providing a vibrator-bonded elastic part for a piezoelectric unimorph, an elastic part for an intermediate layer for a piezoelectric bimorph, and a column for supporting a bending vibration node part for these elements. This is a piezoelectric unimorph unit or a piezoelectric bimorph unit that is formed by punching a single elastic body plate and a frame for fixing the whole, and is robust and does not interfere with the impact of the impact body. An object of the present invention is to provide a piezoelectric power generation device that easily converts strain energy due to impact into electric energy with an easy structure.
[0007]
In order to eliminate this drawback, the present invention eliminates this defect by providing a vibrator-bonded elastic part for a piezoelectric unimorph, an elastic part for an intermediate layer for a piezoelectric bimorph, and a column part for supporting a bending vibration node part for these elements. Further, a piezoelectric unimorph unit or a piezoelectric bimorph unit in which a frame portion for fixing the whole is formed by punching an integral elastic plate is configured, and this is used for a piezoelectric power generation device.
That is, according to the present invention, the piezoelectric bimorph element and the holding plate that holds the piezoelectric bimorph element are configured, and the holding plate is provided inside the frame portion and the bending vibration of the piezoelectric bimorph element. The piezoelectric bimorph unit is formed by punching an elastic plate integrally formed with a column portion for supporting the node portion and a rectangular portion provided inside the column portion for fixing the piezoelectric bimorph element. A piezoelectric power generator characterized by the above can be obtained.
In addition, according to the present invention, the piezoelectric unimorph element and a holding plate that holds the piezoelectric unimorph element are configured. The holding plate is provided inside the frame portion and the bending vibration of the piezoelectric unimorph element. A piezoelectric unimorph unit is formed by punching an elastic plate integrally formed with a supporting column portion for supporting the node portion of this and a rectangular portion that is provided inside the supporting column portion and fixes the piezoelectric unimorph element. A piezoelectric power generator characterized by the above can be obtained.
[0008]
【Example】
The present invention will be described below with reference to illustrated embodiments.
[0009]
Hereinafter, the piezoelectric bimorph will be described. However, if the piezoelectric ceramic plate to be joined is composed of only one side, a piezoelectric unimorph is formed, so that the description of the unimorph is omitted.
[0010]
1 and 2 are a part view and an assembly view showing one embodiment of the present invention.
[0011]
FIG. 1 shows parts of an embodiment of the present invention, and each configuration is completed as follows.
[0012]
1 - 1 is a piezoelectric ceramic element. In this embodiment, a zircon-lead titanate-based material is used as the piezoelectric ceramic, but a barium titanate-based piezoelectric ceramic material may be used. 1 - 2 are used after etching the stainless steel material of 0.2mm in the holding plate and is in this embodiment for use in sandwich the piezoelectric ceramic element and the piezoelectric ceramic element in the metal sheet. The holding plate is not limited to stainless steel, and other metal materials such as copper, and organic materials such as glass epoxy can be used.
[0013]
1 - 3 1 - 1 same piezoelectric ceramic element. 2 will be described in detail the present invention referring to FIG. 1 (part view) and FIG. 2 (assembled view) showing the bimorph structure bonded by bonding the components shown in FIG.
[0014]
FIG. 1 shows a component configuration for realizing the present embodiment. According to this part of the two piezoelectric ceramic elements and a - (2 1) (1 - - 1,1 3) and the holding plate to the piezoelectric bimorph configuration. During this bonding, the polarity of the piezoelectric ceramic element holding plate - has a (1 2) the same polarity orientation relative. As for the holding plate, a portion (length L1, width W1) functioning as a piezoelectric bimorph is pasted with a piezoelectric ceramic element, a portion (length L2, width W2) arranged so as to surround the portion, and a bridge between them. It is comprised from the part of (length L3, width W3). The position (a) of the bridge is a position obtained from the following calculation formula with respect to the length L1.
[0015]
a = L1 × 0.224
[0016]
This position is a node point of the bending primary vibration of the piezoelectric bimorph and is a position that does not restrain the vibration of the piezoelectric bimorph. By not restraining, the damped vibration after impact of the piezoelectric bimorph is prolonged, and the electric energy by the piezoelectric can be taken out efficiently. As a result, when the piezoelectric bimorph portion is fixed, it is possible to hold the piezoelectric bimorph without restraining the vibration of the piezoelectric bimorph even if the holding portion (length L2, width W2) surrounding the outer periphery of the bridge is fixed.
[0017]
FIG. 2 is an assembly view in which the components shown in FIG. 1 are bonded with an epoxy resin or an anaerobic adhesive. According to this, the functional element of this assembly part is divided into three parts. One part functions as a piezoelectric bimorph (length L1, width W1), the second part is a surrounding part (length L2, width W2) as a fixed function, and the third bridges them (Length L3, width W3) This is a part having a function.
[0018]
The part (length L2, width W2) as a fixing function is fixed by fixing methods such as bonding or screwing, and impacts are applied to the piezoelectric bimorph part (length L1, width W1). It is possible to extract electrical energy from the electrical terminals.
[0019]
This impact generates a flexural vibration of the piezoelectric bimorph. Electric energy is generated from the piezoelectric bimorph, and the electric energy can be taken out from the electric wires connected to both electrodes. Here, the piezoelectric bimorph is supported by the bridge (length L3, width W3) of the node point of the flexural vibration of the piezoelectric bimorph, and the amount of electric energy generated by the piezoelectric bimorph decreases due to the influence of the fixed portion. Are very few.
[0020]
As described above, electric energy can be generated more efficiently from the piezoelectric bimorph, and electric energy can be extracted from both electrode terminals via the electric wires. The series of configurations show that electric energy can be efficiently supplied to a load by preventing a decrease in the amount of electricity generated by the piezoelectric bimorph fixing method.
[0021]
The electrical energy generated from this is connected to the load and will work. In this embodiment, this load is a light emitting diode and is finally converted into light emitting energy, but the load is not limited to the light emitting diode.
[0022]
Since all of the power generation units of the embodiments generate an AC voltage, the generated voltage is smoothed by rectifying with a rectifier circuit as necessary to extract a DC current, or by connecting a capacitor in parallel to the load. Can also be used.
[0023]
【The invention's effect】
As described above, according to the present invention, when the piezoelectric bimorph is subjected to distortion such as impact by adopting a bridge mechanism that fixes the piezoelectric element used in the piezoelectric bimorph, the holding portion thereof, and the node portion of the flexural vibration. This can be efficiently converted into electric energy, and the number of fixing methods as a unit can be increased, so that the degree of freedom in design can be increased. In addition, reducing the number of parts can increase production efficiency and contribute to a reduction in manufacturing costs. Furthermore, with a robust configuration, the impact body is not disturbed, and the reliability against repeated impact is improved, and a highly reliable and highly efficient power generation unit can be provided.
[Brief description of the drawings]
FIG. 1 is a side view showing Example 1 of the present invention 1-1. Piezoelectric element 1-2 Holding plate 1-3 Piezoelectric element FIG. 2 is a front view showing Example 1 of the present invention 2-1 Piezoelectric element 2- 2 Holding plate 2-3 Piezoelectric element
Claims (2)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001049234A JP4793893B2 (en) | 2001-02-23 | 2001-02-23 | Piezoelectric generator unit |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001049234A JP4793893B2 (en) | 2001-02-23 | 2001-02-23 | Piezoelectric generator unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002252989A JP2002252989A (en) | 2002-09-06 |
| JP4793893B2 true JP4793893B2 (en) | 2011-10-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001049234A Expired - Lifetime JP4793893B2 (en) | 2001-02-23 | 2001-02-23 | Piezoelectric generator unit |
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| JP (1) | JP4793893B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4497321B2 (en) * | 2003-12-26 | 2010-07-07 | 日本電気株式会社 | Piezoelectric actuator |
| EP2312740B1 (en) | 2008-07-14 | 2014-06-04 | Murata Manufacturing Co. Ltd. | Piezoelectric power generation device |
| KR101128103B1 (en) | 2011-06-16 | 2012-03-29 | 경기대학교 산학협력단 | Self power generator |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0619335Y2 (en) * | 1987-05-15 | 1994-05-18 | 横河電機株式会社 | Output expansion mechanism of piezoelectric element |
| JP2657617B2 (en) * | 1992-11-27 | 1997-09-24 | 鈴木総業株式会社 | Shoes with light emitting part |
| JP3355971B2 (en) * | 1996-12-12 | 2002-12-09 | 株式会社日本自動車部品総合研究所 | Piezoelectric conversion power supply and its piezoelectric transducer |
| JP2993459B2 (en) * | 1997-03-25 | 1999-12-20 | セイコーエプソン株式会社 | Generators and portable equipment |
| JPH11146663A (en) * | 1997-11-11 | 1999-05-28 | Sony Corp | Piezoelectric generator |
| JP4197196B2 (en) * | 1998-03-19 | 2008-12-17 | セイコーインスツル株式会社 | Stage using piezoelectric actuator or ultrasonic motor, and electronic device and printing apparatus using this stage |
| JP3719061B2 (en) * | 1999-03-15 | 2005-11-24 | セイコーエプソン株式会社 | Piezoelectric actuators, watches and portable devices |
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2001
- 2001-02-23 JP JP2001049234A patent/JP4793893B2/en not_active Expired - Lifetime
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| JP2002252989A (en) | 2002-09-06 |
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