JP6881486B2 - 搬送車 - Google Patents
搬送車 Download PDFInfo
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- JP6881486B2 JP6881486B2 JP2019033907A JP2019033907A JP6881486B2 JP 6881486 B2 JP6881486 B2 JP 6881486B2 JP 2019033907 A JP2019033907 A JP 2019033907A JP 2019033907 A JP2019033907 A JP 2019033907A JP 6881486 B2 JP6881486 B2 JP 6881486B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
- B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B12/00—Component parts, details or accessories not provided for in groups B61B7/00 - B61B11/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
- B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Transportation (AREA)
- Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
- Control And Safety Of Cranes (AREA)
- Seal Device For Vehicle (AREA)
- Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
Description
Claims (6)
- 搬送物を搬送する搬送車であって、
前記搬送物の下方に落下防止部材を進出させることによって前記搬送物の落下を防止する落下防止機構を備え、
前記落下防止機構は、
基端部が水平方向に沿う第1回動軸回りに回動自在に支持され、先端部に前記落下防止部材が設けられた第1回動部材と、
基端部が鉛直方向に沿う第2回動軸回りに回動自在に支持され、先端部に前記第1回動部材が取り付けられた第2回動部材と、を有する搬送車。 - 前記落下防止機構は、前記第2回動部材に設けられたストッパを有し、
前記第1回動部材は、第1状態と当該第1状態よりも前記第1回動部材の前記先端部が持ち上がる第2状態との間で回動し、
前記落下防止部材は、前記第2状態において前記搬送物の下方に進出し、
前記ストッパは、前記第2状態の前記第1回動部材に力が加わった場合に、当該第1回動部材の回転を規制する、請求項1に記載の搬送車。 - 前記第1回動部材は、前記第1回動軸の軸方向に沿った水平軸を有し、
前記第2回動部材の前記先端部は、鉛直軸と、前記鉛直軸に対して当該鉛直軸の軸方向に沿って摺動可能に取り付けられたスライド部材と、を有し、
前記スライド部材は、前記水平軸に対して当該水平軸の軸方向に沿って摺動可能に取り付けられている、請求項1又は2に記載の搬送車。 - 前記スライド部材は、鉛直方向を長手方向とする長孔を有する摺動プレート及び球面滑り軸受を介して、前記水平軸に取り付けられている、請求項3に記載の搬送車。
- 前記第1回動部材は、第1状態と当該第1状態よりも前記第1回動部材の前記先端部が持ち上がる第2状態との間で回動し、
前記第2回動部材は、前記第1回動部材が前記第1状態から前記第2状態まで回転された場合、前記第2回動部材の前記先端部が死点を過ぎた位置まで一方向に回転された状態にある、請求項1〜4の何れか一項に記載の搬送車。 - 前記第1回動部材は、第1状態と当該第1状態よりも前記第1回動部材の前記先端部が持ち上がる第2状態との間で回動し、
前記落下防止機構は、前記第1回動部材を前記第1状態から前記第2状態へ回転させる方向のモーメントを生じさせる弾性部材を有する、請求項1〜5の何れか一項に記載の搬送車。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019033907A JP6881486B2 (ja) | 2019-02-27 | 2019-02-27 | 搬送車 |
US16/774,121 US11276597B2 (en) | 2019-02-27 | 2020-01-28 | Transport vehicle |
CN202010084230.6A CN111620063B (zh) | 2019-02-27 | 2020-02-10 | 搬送车 |
TW109105244A TWI811526B (zh) | 2019-02-27 | 2020-02-19 | 搬送車 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019033907A JP6881486B2 (ja) | 2019-02-27 | 2019-02-27 | 搬送車 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020138820A JP2020138820A (ja) | 2020-09-03 |
JP6881486B2 true JP6881486B2 (ja) | 2021-06-02 |
Family
ID=72141443
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019033907A Active JP6881486B2 (ja) | 2019-02-27 | 2019-02-27 | 搬送車 |
Country Status (4)
Country | Link |
---|---|
US (1) | US11276597B2 (ja) |
JP (1) | JP6881486B2 (ja) |
CN (1) | CN111620063B (ja) |
TW (1) | TWI811526B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102655946B1 (ko) * | 2021-12-30 | 2024-04-11 | 세메스 주식회사 | 물품 반송 장치 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI85971C (fi) * | 1990-06-29 | 1992-06-25 | Kone Oy | Anordning foer daempning av ett lastningsorgans svaengning. |
JP2907077B2 (ja) * | 1995-09-08 | 1999-06-21 | 村田機械株式会社 | 天井走行車 |
JP2003165687A (ja) * | 2001-11-30 | 2003-06-10 | Murata Mach Ltd | 天井搬送車 |
JP3981885B2 (ja) * | 2003-05-20 | 2007-09-26 | 株式会社ダイフク | 搬送装置 |
JP2006298566A (ja) * | 2005-04-20 | 2006-11-02 | Murata Mach Ltd | 天井走行車とそのシステム |
JP4264840B2 (ja) * | 2006-10-20 | 2009-05-20 | 村田機械株式会社 | 天井走行車 |
JP2009113916A (ja) * | 2007-11-06 | 2009-05-28 | Murata Mach Ltd | 搬送車 |
CN102026858B (zh) * | 2008-05-22 | 2013-06-26 | 村田机械株式会社 | 天车 |
JP2010126278A (ja) * | 2008-11-26 | 2010-06-10 | Daifuku Co Ltd | 搬送装置 |
JP5273118B2 (ja) * | 2010-10-04 | 2013-08-28 | 村田機械株式会社 | 搬送車及び搬送システム |
JP5765549B2 (ja) * | 2010-10-04 | 2015-08-19 | 株式会社ダイフク | 物品搬送装置 |
JP5750926B2 (ja) * | 2011-02-15 | 2015-07-22 | 村田機械株式会社 | 天井搬送車 |
CN103534798B (zh) * | 2011-05-17 | 2016-01-06 | 村田机械株式会社 | 空中搬运车 |
JP6179406B2 (ja) * | 2014-01-10 | 2017-08-16 | 株式会社ダイフク | 搬送装置 |
JP6064940B2 (ja) * | 2014-04-07 | 2017-01-25 | 株式会社ダイフク | 物品搬送車 |
JP6327124B2 (ja) * | 2014-11-12 | 2018-05-23 | 株式会社ダイフク | 物品搬送車 |
JP2017088332A (ja) | 2015-11-11 | 2017-05-25 | 村田機械株式会社 | 天井搬送車 |
JP6414134B2 (ja) * | 2016-05-09 | 2018-10-31 | 村田機械株式会社 | 搬送装置 |
WO2018079146A1 (ja) * | 2016-10-25 | 2018-05-03 | 村田機械株式会社 | 天井搬送車 |
WO2018142811A1 (ja) * | 2017-02-06 | 2018-08-09 | 村田機械株式会社 | 天井搬送車 |
US11981356B2 (en) * | 2018-01-24 | 2024-05-14 | Murata Machinery, Ltd. | Transport vehicle |
WO2019146276A1 (ja) * | 2018-01-24 | 2019-08-01 | 村田機械株式会社 | 搬送車 |
CN108516275B (zh) * | 2018-05-28 | 2024-04-05 | 安徽音飞智能物流设备有限公司 | 一种转向货架组件 |
-
2019
- 2019-02-27 JP JP2019033907A patent/JP6881486B2/ja active Active
-
2020
- 2020-01-28 US US16/774,121 patent/US11276597B2/en active Active
- 2020-02-10 CN CN202010084230.6A patent/CN111620063B/zh active Active
- 2020-02-19 TW TW109105244A patent/TWI811526B/zh active
Also Published As
Publication number | Publication date |
---|---|
US11276597B2 (en) | 2022-03-15 |
TW202039354A (zh) | 2020-11-01 |
TWI811526B (zh) | 2023-08-11 |
CN111620063B (zh) | 2023-06-13 |
JP2020138820A (ja) | 2020-09-03 |
CN111620063A (zh) | 2020-09-04 |
US20200269882A1 (en) | 2020-08-27 |
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