JP6283929B2 - Inspection jig and method for manufacturing inspection jig - Google Patents

Description

  The present invention relates to an inspection jig used for inspecting a wiring pattern formed on a substrate.

  Conventionally, there has been known a substrate inspection apparatus for inspecting a wiring pattern of a substrate. The board inspection apparatus inspects the wiring pattern by bringing the inspection jig into contact with the inspection point of the board and measuring the resistance value between the wirings.

  Further, a four-terminal method is known as a method for measuring a resistance value between wirings. The 4-terminal method is a method in which two probes, a current supply probe and a voltage measurement probe, are brought into contact with an inspection point at the same time for inspection. By using the four-terminal method, the current flowing between the voltage measurement probe and the inspection point can be ignored, so that the voltage between the two inspection points can be accurately measured and an accurate resistance value can be obtained. .

  Conventionally, when the four-terminal method is used, an inspection jig in which a probe is attached to each of a pair of holes (two holes) formed side by side has been used. However, since the inspection points have become smaller due to the recent miniaturization of the wiring pattern, the space required for the hole for attaching the probe becomes very narrow, and this type of inspection jig is manufactured from the viewpoint of processing technology. It became difficult.

  In this regard, Patent Document 1 discloses an inspection jig that can use the four-terminal method even for such a small inspection point. The probe of this inspection jig includes a cylindrical first contact and a rod-shaped second contact inserted into the first contact. By using such a double-structured probe, it is possible to establish electrical continuity with two inspection points without forming narrow gap holes.

  The probe is connected to the electrode portion at the end opposite to the inspection point. The electrode portion includes a ring-shaped first electrode portion and a second electrode portion having a circular cross section disposed inside the first electrode portion. The first contact is in contact with the first electrode part, and the second contact is in contact with the second electrode part. The first electrode unit and the second electrode unit are connected to an inspection processing unit that performs an inspection process on the substrate.

  With this configuration, the four-terminal method can be used even for small inspection points.

JP 2012-154670 A

  However, since the inspection jig of Patent Document 1 has a very small probe and electrode portion, even if there is a slight dimensional error, the two are not properly connected and the electrical connectivity becomes unstable. . Therefore, since the inspection jig of Patent Document 1 requires high dimensional accuracy, the processing cost becomes high. In this respect, the inspection jig of Patent Document 1 leaves room for improvement.

  Moreover, in patent document 1, the 1st contactor and the 1st electrode part probe, and the 2nd contactor and the 2nd electrode part electrode part are each contacting only by end surfaces, respectively, and a position at the time of an assembly etc. It is conceivable that a deviation occurs and the electrical connectivity becomes unstable.

  The present invention has been made in view of the above circumstances, and its main purpose is an inspection jig for using the four-terminal method for a small inspection point, which is low in cost and has stable electrical connectivity. To provide a configuration.

Means and effects for solving the problems

  The problems to be solved by the present invention are as described above. Next, means for solving the problems and the effects thereof will be described.

According to a first aspect of the present invention, an inspection jig having the following configuration is provided. That is, the inspection jig includes a plurality of probes that electrically connect a plurality of probes that are in contact with an inspection point of the substrate, the probe, and an inspection processing unit that performs an inspection process on the wiring formed on the substrate. An electrode part. The probe includes a core probe and a cylindrical probe. The core probe is electrically connected to the inspection point. The cylindrical probe is disposed outside the core probe in a state insulated from the core probe, and is electrically connected to the inspection point. The cylindrical probe is formed with two springs that are elastically deformable in the longitudinal direction of the cylindrical probe arranged in the longitudinal direction, and the cylindrical probe and the core probe are connected in an insulated state. The connecting point is between the two springs. The electrode part includes an inner cylinder electrode part and an outer cylinder electrode part. The inner cylindrical electrode portion is electrically connected to the core probe by contacting the outer peripheral surface of the inserted core probe. The outer cylinder electrode part is disposed outside the inner cylinder electrode part in a state insulated from the inner cylinder electrode part, and is electrically connected to the cylindrical probe.

  Thereby, even if the position of the core probe or the inner cylinder electrode portion is shifted, the core probe is inserted (positioned) into the inner cylinder electrode portion, so that the core probe and the inner cylinder electrode portion are securely connected. Can be electrically connected. Furthermore, since the contact area between the inner cylindrical electrode portion and the core probe can be increased, the stability of electrical connection can be improved.

  In the inspection jig, it is preferable that a taper portion whose outer diameter becomes narrower toward the tip is formed at the end portion on the electrode portion side of the core probe.

  Thereby, even if the position of the core probe or the inner cylinder electrode portion is shifted, the core probe is inserted into the inner cylinder electrode portion while being guided by the taper portion. The stability of the electrical connection can be improved.

  In the inspection jig, it is preferable that the end surface on the probe side of the outer cylinder electrode portion is located closer to the probe side than the end surface on the probe side of the inner cylinder electrode portion.

  Thereby, since only the outer cylinder electrode part is located in the end surface at the probe side of an electrode part, the edge part of an electrode part can be opened largely. Therefore, the core probe can be more reliably guided to the inner cylinder probe.

  In the inspection jig, the cylindrical probe and the outer cylinder electrode are brought into contact with the end face on the electrode side of the cylindrical probe and the end face on the probe side of the outer cylinder electrode part. It is preferable that the part is electrically connected.

  As a result, the core probe is inserted into the inner cylindrical electrode portion until the end surfaces of the cylindrical probe and the outer cylindrical electrode portion come into contact with each other, so that the cylindrical probe and the outer cylindrical electrode portion are securely electrically connected. Can do.

The inspection jig preferably has the following configuration. In other words, the inspection jig includes an electrode portion insertion portion into which the electrode portion is inserted. The end of the probe side of the outer tubular electrode portion, the electrodes portion-side stopper are formed. The electrode part is held by the electrode part insertion part by the electrode part side stopper.

Thereby, the said electrode part can be hold | maintained only by inserting an electrode part in an electrode part insertion part .

  In the inspection jig, it is preferable that the inner cylinder electrode portion is covered with an insulator.

  Thereby, an inner cylinder electrode part and an outer cylinder electrode part can be insulated with a simple structure.

In the inspection jig of the said spring in a contracted state, the cylindrical probe and the outer tubular electrode portion and is are preferably connected.

  Thereby, since the contact pressure of a cylindrical probe and an outer cylinder electrode part can be enlarged, the stability of the electrical connection of a cylindrical probe and an outer cylinder electrode part can be improved.

  The inspection jig preferably has the following configuration. That is, the inspection jig includes a probe insertion portion and a probe fixing portion. The probe is inserted into the probe insertion portion. The probe fixing part fixes the probe to the probe insertion part. The cylindrical probe is formed with a probe-side stopper having an outer diameter larger than that of other portions. The probe is fixed to the probe insertion portion by contacting the probe side stopper and the probe fixing portion.

  Thereby, after inserting a probe in an electrode part, a probe can be fixed using a probe fixing | fixed part. Therefore, the probe and the electrode portion can be reliably electrically connected.

  In the inspection jig, it is preferable that the arrangement interval of the probes is 100 μm or less.

  Accordingly, the four-terminal method can be used even in a situation where it is difficult to arrange the probes side by side.

In the inspection jig, it is preferable that the spring has a configuration in which a spiral notch is formed in the cylindrical probe. In the inspection jig, the end portion on the probe side of the outer cylinder electrode portion preferably has a thickness and an outer diameter larger than those other than the end portion.

  According to the 4th viewpoint of this invention, in the manufacturing method of said test | inspection jig | tool, the method including the following processes is provided. That is, this manufacturing method includes a probe insertion step and a probe fixing step. In the probe insertion step, in a state where the electrode portion insertion portion into which the electrode portion is inserted and the probe insertion portion for inserting the probe are overlapped, the probe is inserted into the probe insertion portion, The probe and the electrode part are connected. In the probe fixing step, the probe inserted in the probe insertion step is fixed by attaching a probe fixing portion.

  Thereby, after inserting a probe in an electrode part, a probe can be fixed using a probe fixing | fixed part. Therefore, the probe and the electrode portion can be reliably electrically connected.

Explanatory drawing which shows the outline of a board | substrate inspection apparatus provided with the jig | tool for an inspection which concerns on one Embodiment of this invention. The side view and sectional drawing which show a probe and its component. The side view and sectional drawing which show the component of an electrode part. The side view of an electrode part. Explanatory drawing which shows the assembly method of the jig | tool for an inspection. Side surface sectional drawing which shows a mode that a probe and an electrode part are connected. The side view which shows a mode that an electrode part and a connector part are connected.

  Next, embodiments of the present invention will be described with reference to the drawings. First, an outline of the inspection jig 1 and the substrate inspection apparatus 100 will be described with reference to FIG.

  The substrate inspection apparatus 100 inspects a substrate to be inspected. Specifically, the substrate inspection apparatus 100 obtains a resistance value between predetermined inspection points of the substrate, and inspects the resistance value and the presence / absence of conduction. The board to be inspected includes not only a normal printed board but also a flexible board and a multilayer board.

  The substrate inspection apparatus 100 includes an inspection jig 1 and an inspection processing unit 2. In this embodiment, a four-terminal method is used, and the inspection jig 1 comes into contact at two locations for each inspection point of the substrate. As shown in FIG. 1, the inspection jig 1 includes a base portion 11, a support portion 12, an electrode portion insertion portion 13, a probe insertion portion 14, and a probe fixing plate (probe fixing portion) 15.

  The base portion 11 constitutes a base of the inspection jig 1, and the support portion 12 is connected to one side and the connector portion 40 is connected to the other side.

  The support portion 12 is a columnar member extending upward from the base portion 11. The inspection jig 1 includes, for example, four support portions 12. An electrode part insertion part 13 is connected to the upper side of the support part 12.

  The electrode part insertion part 13 is a rectangular parallelepiped member in which an infinite number of through holes are formed. The electrode part 30 is inserted into the through hole of the electrode part insertion part 13. In addition, the structure by which the electrode part 30 inserted in the electrode part insertion part 13 is hold | maintained is mentioned later. A probe insertion part 14 is connected to the upper side of the electrode part insertion part 13.

  The probe insertion part 14 is a rectangular parallelepiped member in which a through hole is formed at a position corresponding to the through hole formed in the electrode part insertion part 13. The probe 20 is inserted into the through hole of the probe insertion portion 14. Thereby, the probe 20 and the electrode part 30 are electrically connected. In addition, the electrode part insertion part 13 and the probe insertion part 14 may be configured by stacking a plurality of plate-like members instead of a rectangular parallelepiped.

  The probe fixing plate 15 is a plate-like member in which through holes are formed at positions corresponding to the through holes formed in the electrode portion insertion portion 13 and the probe insertion portion 14. The probe fixing plate 15 fixes the probe 20 inserted into the probe insertion portion 14 (details will be described later).

  As shown in FIG. 1, a part of the probe 20 is exposed from the probe fixing plate 15. The inspection jig 1 brings this exposed portion into contact with the inspection point of the substrate. An electrical signal obtained from the inspection point is transmitted to the electrode unit 30 via the probe 20. The electrode part 30 extends downward from the connection point with the probe 20 and is guided in one direction (left side in FIG. 1) in front of the base part 11. The electrode part 30 is electrically connected to a connector part 40 formed on the base part 11.

  The connector part 40 can be electrically connected to the electrode part 30 and has wiring formed therein. The connector unit 40 is connected to the inspection processing unit 2 via this wiring, an electric wire extending outside the connector unit 40, and the like.

  With the configuration described above, the inspection processing unit 2 is electrically connected to the substrate. The inspection processing unit 2 calculates a resistance value by measuring a voltage and a current between predetermined inspection points on the substrate. The inspection processing unit 2 determines whether or not the calculated result satisfies a predetermined specification.

  Next, the configuration and manufacturing method of the probe 20 will be described with reference to FIG. FIG. 2 is a side view and a cross-sectional view showing the probe 20 and its components. In the description of the probe 20, as shown in FIG. 2, the side in contact with the inspection point of the substrate is referred to as the substrate side, and the side connected to the electrode unit 30 is referred to as the electrode unit side.

  As shown in FIG. 2, the probe 20 includes a core probe 21 and a cylindrical probe 24. A core probe 21 shown in FIG. 2A is an elongated member having a circular cross section, and is made of a conductive material (for example, gold, copper, nickel, and so on). The core probe 21 is formed with an inspection contact portion 21a, an electrode connection portion 21b, and a taper portion 21c.

  The inspection contact portion 21a is a hemispherical portion formed at the end of the core probe 21 on the substrate side, and is a portion for connecting to an inspection point on the substrate. By making the inspection contact portion 21a hemispherical, the inspection contact portion 21a can be appropriately connected to the inspection point of the substrate. The electrode connecting portion 21 b is a portion formed in the vicinity of the end portion on the electrode portion side, and is a portion for connecting to the electrode portion 30. A tapered portion 21c is formed further on the electrode portion side (tip side) than the electrode connecting portion 21b. The taper portion 21c has an outer diameter that decreases toward the electrode portion side. In addition, the taper part 21c is not restricted to a linear taper, A curved taper may be sufficient.

  In addition, the core probe 21 is provided with an insulating covering portion 22 in a portion excluding the inspection contact portion 21a and the electrode connection portion 21b. The insulating coating part 22 can be formed by, for example, electrodeposition.

  A cylindrical probe 24 shown in FIG. 2B is a cylindrical conductive member. The cylindrical probe 24 is formed with an inspection contact portion 24a, an electrode contact portion 24b, an adhesive portion 24c, and a spring 24d. The inspection contact portion 24a is an end portion on the substrate side, and is a portion for connecting to the same inspection point as the inspection contact portion 21a. The electrode contact portion 24 b is a portion formed at the end portion on the electrode portion side, and is a portion for connecting to the electrode portion 30.

  The bonding portion 24 c is a portion formed at the center portion in the longitudinal direction of the cylindrical probe 24. Springs 24d are formed on both sides of the bonding portion 24c. The spring 24d is configured by cutting the cylindrical probe 24 into a spiral shape, and has elasticity in the longitudinal direction.

  The cylindrical probe 24 can be manufactured, for example, by the following method. That is, first, an electroformed layer such as nickel and a resist layer are formed on the outer periphery of an extremely fine core material. Next, this resist layer is spirally irradiated with a laser to remove the resist layer at the irradiated portion. Next, etching is performed to remove the electroformed layer of nickel or the like where the resist layer has been removed, and then the core material is removed.

  Further, in the vicinity of the end of the cylindrical probe 24 on the substrate side, an insulating probe side stopper 25 is formed by electrodeposition or the like. By forming the probe-side stopper 25, the outer diameter of the part becomes larger than that of the other part.

  As shown in FIG. 2C, the probe 20 has a core probe 21 inserted into a cylindrical probe 24, and the inside of the adhesive portion 24c and the outside of the insulating coating portion 22 are connected with an epoxy adhesive or the like. Manufactured by bonding. Since the insulation coating portion 22 is formed around the core probe 21, the core probe 21 and the cylindrical probe 24 are connected to each other in an insulated state.

  Since the cylindrical probe 24 has elasticity by the spring 24d, the cylindrical probe 24 is contracted by pressing the end portion on the substrate side of the probe 20, and as shown in FIG. The inspection contact portion 21a can be exposed. Thereby, the core probe 21 and the cylindrical probe 24 can be simultaneously brought into contact with the same inspection point. One of the core probe 21 and the cylindrical probe 24 is a probe for supplying current, and the other is a probe for measuring voltage.

  Next, the configuration and manufacturing method of the electrode unit 30 will be described with reference to FIG. FIG. 3 is a side view and a cross-sectional view showing components of the electrode unit 30. In the description of the electrode part 30, as shown in FIG. 3, the side connected to the probe 20 is referred to as the probe side, and the side connected to the connector part 40 is referred to as the connector side.

  The electrode part 30 is composed of an inner cylinder electrode part 31 and an outer cylinder electrode part 34.

  The inner cylinder electrode part 31 shown to Fig.3 (a) is a cylindrical member which has electroconductivity and flexibility. Similarly to the cylindrical probe 24, the inner cylinder electrode portion 31 is formed by forming a conductive member around the core material by electrodeposition and removing the core material. The inner cylinder electrode portion 31 is formed with a probe connection portion 31a and a connector connection portion 31b.

  The probe connection part 31a is a part formed at the end part on the probe side, and is electrically connected to the probe 20 (specifically, the core probe 21). The connector connecting portion 31 b is a portion formed at the end portion on the connector side, and is connected to the connector portion 40. Further, as shown in FIG. 3B, an insulating coating portion 32 is formed on the inner cylinder electrode portion 31 except for the connector connection portion 31b.

  The outer cylinder electrode part 34 shown in FIG.3 (c) is a cylindrical member which has electroconductivity and flexibility. The outer cylinder electrode part 34 is formed by forming a conductive member by electrodeposition around the core material and removing the core material, etc., like the cylindrical probe 24 and the like. The outer tube electrode part 34 is formed with a probe connection part 34a and a connector connection part 34b. The probe connecting portion 34a is a portion formed at the end portion on the probe side, and is electrically connected to the probe 20 (specifically, the cylindrical probe 24). The connector connecting portion 34 b is a portion formed at the end portion on the connector side, and is connected to the connector portion 40.

  Further, as shown in FIG. 3B, an electrode side stopper 34c having a thickness and an outer diameter larger than those of the other portions is formed at the probe side end of the outer cylinder electrode portion 34. The electrode portion side stopper 34c is formed by electrodeposition or the like. Further, as shown in FIG. 3C, an insulating coating portion 35 is formed on the portion of the outer cylinder electrode portion 34 excluding the connector connection portion 34b by electrodeposition or the like.

  The electrode portion 30 is fixed by inserting and fixing the inner cylindrical electrode portion 31 to the outer cylindrical electrode portion 34 (see FIG. 4A), and the exposed connector connection portion 31b and connector connection portion 34b are plated with gold or the like. This is manufactured (see FIG. 4B). At this time, in this embodiment, the end portion on the probe side of the outer cylinder electrode portion 34 is fixed so as to be positioned closer to the probe side than the end portion on the probe side of the inner cylinder electrode portion 31. 31 and the end portions on the probe side of the outer cylinder electrode portion 34 may be aligned and fixed. Moreover, since the insulation coating part 35 is formed outside the inner cylinder electrode part 31, the inner cylinder electrode part 31 and the insulation coating part 35 can be fixed in an insulated state. Note that plating other than gold may be performed, or the plating itself may be omitted.

  Next, a method for assembling the inspection jig 1 will be described with reference to FIGS. FIG. 5 is an explanatory view showing an assembling method of the inspection jig 1. FIG. 6 is a side cross-sectional view showing how the probe 20 and the electrode unit 30 are connected.

  In this embodiment, the electrode part 30 is previously inserted in the insertion hole 13a of the electrode part insertion part 13 (refer Fig.5 (a) and FIG.6 (a)). In this state, the electrode part 30 is held by the electrode part side stopper 34c so as not to come out of the electrode part insertion part 13.

  Then, the probe insertion part 14 is mounted on the upper part of the electrode part insertion part 13, and is fixed with a volt | bolt etc. (refer FIG.5 (b)). Next, the probe 20 is inserted into the insertion hole 14a of the probe insertion portion 14 (see FIG. 5C and FIG. 6A).

  By inserting the probe 20 into the insertion hole 14 a, the core probe 21 of the probe 20 is inserted into the electrode unit 30. In the present embodiment, since only the outer cylinder electrode part 34 is located at the end of the electrode part 30 on the probe side, the opening is large. Therefore, the core probe 21 can be reliably inserted into the electrode part 30. Even if the position is shifted, the probe 20 is guided to an appropriate position by the tapered portion 21c.

  Thereafter, by further inserting the probe 20, the core probe 21 (electrode connection portion 21b) is inserted into the inner cylindrical electrode portion 31 (probe connection portion 31a). Thereby, the core probe 21 and the inner cylinder electrode part 31 are electrically connected. In addition, since the taper part 21c is formed in the core-shaped probe 21, even if it is a case where the position of the core-shaped probe 21 or the inner cylinder electrode part 31 has shifted | deviated slightly, a core shape is corrected, correcting a positional relationship. The probe 21 can be inserted into the inner cylinder electrode part 31. Therefore, the stability of the electrical connectivity between the two can be improved.

  Further, by pushing the probe 20 further from the state of FIG. 6A, the end surface on the electrode portion side (electrode contact portion 24b) of the cylindrical probe 24 and the end surface on the probe side of the outer tube electrode portion 34 (probe connection portion). 34a) are in contact with each other. Thereby, the cylindrical probe 24 and the outer cylinder electrode part 34 are electrically connected. In addition, since the probe connection part 34a has a thickness and an outer diameter larger than another part, it is reliably electrically connected with the cylindrical probe 24. FIG. Furthermore, since the positional relationship between the core probe 21 and the inner cylindrical electrode portion 31 is corrected as described above, the positional relationship between the cylindrical probe 24 and the outer cylindrical electrode portion 34 is electrically connected in an appropriate state. Can do. Therefore, the stability of the electrical connectivity between the two can be improved.

  Next, the probe fixing plate 15 is attached to the upper part of the probe insertion portion 14. (See FIG. 5 (d) and FIG. 6 (b)). At this time, the probe-side stopper 25 is pressed by the step portion 15 a formed in the through hole of the probe fixing plate 15. As a result, the spring 24d is deformed so as to contract, and in this state, the probe fixing plate 15 is fixed to the probe insertion portion 14 with a bolt or the like. The cylindrical probe 24 is pressed toward the electrode portion side by the urging force generated by the contraction of the spring 24d. Thereby, the stability of the electrical connectivity between the cylindrical probe 24 and the outer cylinder electrode part 34 can be improved.

  Conventionally, there is a case where the probe insertion part is inserted into the electrode part insertion part and assembled while the probe is held in the probe insertion part. In this case, depending on the positional accuracy and assembly accuracy of the probe and the electrode portion, the probe and the electrode portion may not be partially connected. In this regard, the probe 20 can be reliably connected to the electrode unit 30 by inserting the probe 20 with the electrode unit 30 held by the electrode unit insertion unit 13 as in the present embodiment.

  Moreover, the inner cylinder electrode part 31 and the outer cylinder electrode part 34 are separately connected to the connector part 40 at the end of the electrode part 30 on the connector part side. In addition, as shown in FIG. 7, if the inner cylinder electrode part 31 and the outer cylinder electrode part 34 are insulated, it can also connect to the connector part 40 comprised with the same board | substrate. In FIG. 7, the connector connecting portion 31 b of the inner cylindrical electrode portion 31 is soldered to the connector portion 40, and the connector connecting portion 34 b of the outer cylindrical electrode portion 34 is soldered to the connector portion 40. The connector connection part 31b and the connector connection part 34b are separately connected to the inspection processing part 2 through a circuit, an electric wire, and the like formed inside the connector part 40.

  In this embodiment, the inspection of the substrate by the four-terminal method can be realized in this way. The configuration of the present embodiment can be realized when the distance between the probes 20 is, for example, about 20 or 30 μm or more and 100 μm or less.

  As described above, the inspection jig 1 of this embodiment includes the plurality of probes 20 and the plurality of electrode portions 30. The probe 20 includes a core probe 21 and a cylindrical probe 24. The core probe 21 is electrically connected to the inspection point. The cylindrical probe 24 is disposed outside the core probe 21 in an insulated state from the core probe 21 and is electrically connected to the same inspection point. The electrode part 30 includes an inner cylinder electrode part 31 and an outer cylinder electrode part 34. The inner cylindrical electrode portion 31 is electrically connected to the core probe 21 by contacting the outer peripheral surface of the inserted core probe 21. The outer cylinder electrode part 34 is disposed outside the inner cylinder electrode part 31 in a state insulated from the inner cylinder electrode part 31, and is electrically connected to the cylindrical probe 24.

  Thereby, even if the position of the core probe 21 or the inner cylinder electrode part 31 is shifted, the core probe 21 is inserted (positioned) into the inner cylinder electrode part 31, so that the core probe 21 and the inner cylinder The electrode part 31 can be reliably electrically connected. Furthermore, since the contact area between the inner cylinder electrode portion 31 and the core probe 21 can be increased, the stability of electrical connection can be improved.

  The preferred embodiment of the present invention has been described above, but the above configuration can be modified as follows, for example.

  If the core probe 21 enters the inner cylinder electrode part 31 and is electrically connected, the shapes of the probe 20 and the electrode part 30 can be changed.

  The probe 20 and the electrode unit 30 may be fixed without forming the probe side stopper 25 or the electrode unit side stopper 34c.

  In the above embodiment, the electrode portion 30 is guided to one side along the base portion 11, but the portion guided to the one side may be configured by a circuit formed on the substrate. In this case, the electrode portion 30 extends downward from the electrode portion insertion portion 13 and is connected to the substrate. And it connects to the inspection process part 2 by the circuit formed in this board | substrate.

DESCRIPTION OF SYMBOLS 1 Inspection jig | tool 2 Inspection processing part 20 Probe 21 Core probe 22 Insulation coating part 24 Cylindrical probe 25 Probe side stopper 30 Electrode part 31 Inner cylinder electrode part 32 Insulation coating part 34 Outer cylinder electrode part 35 Insulation coating part 100 Substrate Inspection device

Claims (12)

A plurality of probes in contact with the inspection points of the substrate;
A plurality of electrode portions for electrically connecting the probe and an inspection processing unit for inspecting a wiring formed on the substrate;
With
The probe is
A core probe electrically connected to the inspection point;
A cylindrical probe that is disposed outside the core probe in an insulated state from the core probe and is electrically connected to the inspection point;
With
The cylindrical probe is formed with two springs that are elastically deformable in the longitudinal direction of the cylindrical probe arranged in the longitudinal direction, and the cylindrical probe and the core probe are connected in an insulated state. The connection point is between the two springs,
The electrode part is
An inner cylindrical electrode portion that is electrically connected to the core probe by contacting the outer peripheral surface of the inserted core probe;
An outer cylinder electrode portion disposed outside the inner cylinder electrode portion in a state insulated from the inner cylinder electrode portion and electrically connected to the cylindrical probe;
An inspection jig comprising: The inspection jig according to claim 1,
An inspection jig characterized in that a taper portion whose outer diameter becomes narrower toward the tip is formed at an end of the core probe on the electrode portion side. The inspection jig according to claim 1 or 2,
An inspection jig, wherein an end surface on the probe side of the outer cylinder electrode portion is located closer to the probe side than an end surface on the probe side of the inner cylinder electrode portion. The inspection jig according to any one of claims 1 to 3, wherein
The cylindrical probe and the outer cylinder electrode part are electrically connected by contacting the end face on the electrode part side of the cylindrical probe and the end face on the probe side of the outer cylinder electrode part. Inspection jig characterized by this. The inspection jig according to any one of claims 1 to 4, wherein
An electrode part insertion part into which the electrode part is inserted,
The end of the probe side of the outer tubular electrode portion, the electrodes portion-side stopper is formed,
The inspection jig, wherein the electrode part is held by the electrode part insertion part by the electrode part side stopper. The inspection jig according to any one of claims 1 to 5,
An inspection jig, wherein the inner cylinder electrode part is covered with an insulator. The inspection jig according to any one of claims 1 to 6,
Said spring is in a contracted state, the inspection jig and the cylindrical probe and the outer tubular electrode portion, characterized in that it is connected. The inspection jig according to any one of claims 1 to 7,
A probe insertion part into which the probe is inserted;
A probe fixing portion for fixing the probe to the probe insertion portion;
With
The cylindrical probe is formed with a probe-side stopper having a larger outer diameter than other parts,
The inspection jig, wherein the probe is fixed to the probe insertion portion by contacting the probe-side stopper and the probe fixing portion. An inspection jig according to any one of claims 1 to 8,
An inspection jig, wherein an interval between the probes is 100 μm or less. The inspection jig according to any one of claims 1 to 9,
The inspection jig according to claim 1, wherein the spring has a configuration in which a spiral notch is formed in the cylindrical probe. The inspection jig according to any one of claims 1 to 10,
An inspection jig characterized in that an end portion on the probe side of the outer cylinder electrode portion has a thickness and an outer diameter larger than those other than the end portion. A core probe that is electrically connected to the inspection point of the substrate, and a cylindrical probe that is disposed outside the core probe in a state insulated from the core probe and is electrically connected to the inspection point A plurality of probes comprising:
An inner cylinder electrode portion that is electrically connected by being in contact with the outer peripheral surface of the core-shaped probe, and the outer cylinder electrode portion is disposed outside the inner cylinder electrode portion in a state of being insulated from the inner cylinder electrode portion. A plurality of electrode parts composed of an outer cylinder electrode part electrically connected to the probe,
Equipped with a,
The cylindrical probe is formed with two springs that are elastically deformable in the longitudinal direction of the cylindrical probe arranged in the longitudinal direction, and the cylindrical probe and the core probe are connected in an insulated state. In the method of manufacturing an inspection jig in which the connection point is between the two springs ,
In a state where the electrode portion insertion portion into which the electrode portion is inserted and the probe insertion portion for inserting the probe are overlapped, the probe is inserted into the probe insertion portion, and the probe, the electrode portion, A probe insertion step of connecting
A probe fixing step for fixing the probe inserted in the probe insertion step by attaching a probe fixing portion;
The manufacturing method of the jig | tool for inspection characterized by including.

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