JP2017054773A - Connection jig, substrate inspection device, and manufacturing method for connection jig - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a connection jig capable of reducing the movement of a connection terminal, occurring when bringing the connection terminal into contact with an object, and provide a substrate inspection device, and a manufacturing method for the connection jig.SOLUTION: A connection jig includes a rod-like probe Pr, and a support block 31 for supporting the probe Pr inserted into a through hole H formed therein. The probe Pr includes a cylindrical body Pa, and a rod-like conductive central conductor Pb inserted into the cylindrical body Pa. In at least a part pf the portion of the cylindrical body Pa located in the through hole H, the outer periphery of a cross section perpendicular to the axial direction has a substantially elliptical shape part Pc, and at least a part of the through hole H including the portion where the elliptical shape part Pc is located, is a substantially elliptical hole part Ha where the inner periphery of the cross section perpendicular to the through direction is elliptical, and the short diameter Lb of the inner periphery of the elliptical hole Ha is shorter than the long diameter La of the outer periphery of the elliptical shape part Pc.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a connection jig for bringing a connection terminal into contact with an object, a substrate inspection apparatus including the connection jig, and a method for manufacturing the connection jig.

  Conventionally, a connecting jig for electrically connecting a target point and a predetermined location by bringing a rod-shaped connection terminal into contact with the predetermined target point is known (for example, see Patent Document 1). The connecting jig described in Patent Document 1 includes a small-diameter conductive portion and a large-diameter cylindrical portion disposed so as to surround the conductive portion, and a tip portion of the small-diameter conductive portion is a large-diameter cylindrical portion. A connecting terminal is provided that protrudes from the tip and is joined to a part of a large-diameter cylindrical part.

  A spiral spring is formed on the cylindrical portion of the connection terminal. Therefore, when the connection terminal is pressed against the target point, the spring contracts. When the spring contracts, a force for turning the cylindrical portion is generated, and the conductive portion rotates together with the cylindrical portion. Here, it is described that when the object is a material that easily oxidizes, the tip of the connection terminal and the surface of the object rub against each other by this rotation, and the oxide film is removed, thereby obtaining good conduction. Yes.

JP 2013-53931 A

  By the way, there is a need to keep the tip of the connection terminal stationary when the connection terminal is pressed to contact an object such as an electrode without being limited to the inspection jig described above.

  An object of the present invention is to provide a connection jig, a substrate inspection apparatus, and a method for manufacturing the connection jig that can reduce the movement of the connection terminal that occurs when the connection terminal is brought into contact with an object.

  The connection jig according to the present invention includes a rod-shaped connection terminal having a front end and a rear end, a through hole into which the connection terminal can be inserted, and a support member that supports the connection terminal inserted through the through hole. And the connection terminal includes a cylindrical tubular body and a central conductor having a rod-like conductivity inserted into the tubular body of the tubular body, and the connection terminal is disposed in the through-hole of the tubular body. At least a part of the part located in the outer periphery of the cross section perpendicular to the axial direction is an elliptical part having a substantially elliptical shape, and at least part of the through hole includes a part where the elliptical part is located The inner circumference of the cross section perpendicular to the penetrating direction is an elliptical elliptical hole portion, and the minor axis of the inner circumference of the elliptical hole portion is shorter than the major axis of the outer circumference of the elliptical portion.

  According to this configuration, the elliptical part of the connection terminal interferes with the elliptical part of the through hole formed in the support member, and the rotational movement of the connection terminal is hindered. The resulting movement of the connection terminal can be reduced.

  Moreover, it is preferable that a spiral spring portion that extends and contracts in the axial direction is formed in a part of the cylindrical body.

  According to this configuration, an elastic biasing force can be generated by the spring portion, so that the connection terminal can be brought into elastic contact with the object. Furthermore, since it can prevent that a connection terminal rotates with the rotational force which arises with the expansion-contraction of a spring part, the movement of the connection terminal which arises when contacting a connection terminal with a target object can be reduced.

  Moreover, it is preferable that the said spring part is a part by which the said cylindrical body was made to expand-contract by the helical slit formed in the surrounding wall of the said cylindrical body.

  According to this structure, a spring part can be comprised integrally with a cylindrical body.

  The spring part includes a first spring part in which the spiral winding direction is a first direction and a second spring part in which the spiral winding direction is a second direction opposite to the first direction. It is preferable.

  According to this configuration, when the first and second spring portions expand and contract, the rotational force generated in the first spring portion and the rotational force generated in the second spring portion are in opposite directions, and the mutual rotational force is offset. Therefore, the movement of the connection terminal that occurs when the connection terminal is brought into contact with the object can be reduced.

  Moreover, it is preferable that the first spring portion and the second spring portion are formed so that the shapes thereof are point-symmetric with respect to each other.

  According to this configuration, when the first and second spring portions expand and contract, the magnitude of the rotational force generated in the first spring portion and the magnitude of the rotational force generated in the second spring portion are substantially the same. The accuracy to cancel the rotational force is improved.

  The first spring portion is formed at one or a plurality of locations, the second spring portion is formed at one or a plurality of locations, the total number of spiral turns of the one or more first spring portions, It is preferable that the total number of spiral turns of one or more second spring portions is equal.

  According to this configuration, the sum of the magnitudes of the rotational forces generated by the one or more first spring parts and the sum of the magnitudes of the torques generated by the one or more second spring parts are substantially the same. Even when a plurality of one or second spring portions are formed, the accuracy of canceling out the mutual rotational force is improved.

  Further, the elliptical portion is formed in the vicinity of the end portion on the distal end side of the cylindrical body, and the cylindrical conductor is protruded from the end portion on the distal end side of the cylindrical body. It is preferable that the body and the central conductor are fixed by the elliptical portion.

  According to this configuration, it is possible to apply the urging force generated at the spring portion of the cylindrical body to the central conductor, and to elastically contact the tip of the central conductor with the object.

  The central conductor has a cylindrical shape, and the through hole has a narrowed portion whose inner diameter is narrowed to a size that allows the cylindrical body to be inserted and the central conductor to be inserted on the distal end side. And the distal end of the central conductor from the opening on the distal end side of the through hole in a state where the end on the distal end side of the cylindrical body is in contact with the peripheral edge of the opening on the rear end side of the narrow portion Preferably protrudes.

  According to this configuration, the tip of the central conductor protrudes from the through hole of the support member so as to be able to contact the object, and the possibility that the connection terminal falls off the support member due to the cylindrical body interfering with the narrow portion can be reduced. .

  The cylindrical body is electrically conductive and is electrically connected to the central conductor at the fixed position, and the rear end of the cylindrical body is in contact with the opening on the rear end side of the through hole. An electrode part to be contacted is provided, and the rear end part of the central conductor is in contact with the peripheral edge of the opening part on the rear end side of the narrow part, and the rear end part of the central conductor is in contact with the cylinder It is preferable that it is located in the said front end side rather than the rear-end part of a shaped object.

  According to this configuration, the rear end portion of the cylindrical body can be electrically connected to the front end portion of the central conductor while allowing the central conductor to advance and retreat according to the expansion and contraction of the spring portion of the cylindrical body. As a result, it is possible to output or detect a signal from the rear end portion of the cylindrical body with respect to the front end portion of the central conductor in contact with the object.

  The elliptical portion is formed in the vicinity of the end portion on the tip side of the cylindrical body, and the cylindrical body has a cylindrical cylindrical tip portion on the tip side of the elliptical portion. It is preferable that the through hole has a narrow portion narrowed to a size such that an inner diameter thereof is smaller than a major axis of the elliptical portion on the distal end side and the cylindrical distal end portion can be inserted.

  According to this configuration, since the narrow portion can receive the cylindrical tip portion of the cylindrical body, the center conductor can be guided to the position closer to the object by the cylindrical tip portion. The accuracy of bringing the object into contact with the object can be improved.

  Further, the cylindrical tip portion may be longer than the narrow portion.

  According to this configuration, the cylindrical tip portion and the center conductor can be protruded from the narrow portion, so that the cylindrical tip portion and the center conductor can be brought into contact with the object. As a result, the connection terminal can be used in a so-called four-terminal measurement method by using the cylindrical tip and the central conductor as probes.

  Moreover, it is preferable that the said cylindrical body contains the cylindrical part whose outer periphery diameter is below the short diameter of the said inner periphery of the said elliptical hole part.

  According to this configuration, the bending strength of the cylindrical body can be improved as compared with the case where the entire cylindrical body is elliptical.

  In addition, a plurality of the through holes are formed, and the connection terminals are inserted through the through holes, respectively, and the plurality of through holes are arranged at the intersections of the grids, and in a direction corresponding to the bars of the grids. It is preferable that the major axis of the inner circumference of the elliptic hole is inclined and the major axis direction of the inner circumference of each of the elliptic holes is substantially the same.

  According to this configuration, it is easier to narrow the interval between adjacent through holes than when the entire through hole is cylindrical. As a result, the interval between the connection terminals can be reduced.

  The inclined angle is preferably about 45 degrees.

  According to this configuration, it is possible to narrow the adjacent interval in a well-balanced manner in two directions orthogonal to each other corresponding to the lattice bars.

  Further, the board inspection apparatus according to the present invention is configured to bring the connection jig and the connection terminal into contact with an inspection point provided on the board to be inspected, and to inspect the board based on an electrical signal obtained from the connection terminal. And an inspection unit for performing.

  According to this structure, about the connection terminal which obtains the electrical signal for performing an test | inspection, the movement of the connection terminal which arises when making a connection terminal contact an object can be reduced. As a result, the acquisition of the electric signal is stabilized, and the inspection accuracy can be improved.

  Moreover, the manufacturing method of the connection jig which concerns on this invention is a manufacturing method of the above-mentioned connection jig, Comprising: The process of forming the said elliptical hole part by laser processing is included.

  According to this configuration, it is possible to easily form an elliptical hole portion that is difficult to form with a drill by laser processing.

  The connection jig and the substrate inspection apparatus having such a configuration can reduce the movement of the connection terminal that occurs when the connection terminal is brought into contact with an object. And the manufacturing method of such a connection jig is suitable for manufacture of the connection jig which can reduce the motion of the connection terminal which arises when contacting a connection terminal with a target object.

It is a front view showing roughly the composition of the substrate inspection device provided with the connection jig concerning one embodiment of the present invention. It is a perspective view which shows an example of a structure of the inspection jig shown in FIG. It is a schematic diagram which shows an example of a structure of the support block and plate shown in FIG. It is a fragmentary sectional view which shows an example of a structure of the probe shown in FIG. FIG. 5 is a VV cross-sectional view showing a cross-sectional shape of the elliptical portion shown in FIG. 4. It is explanatory drawing for demonstrating an example of the formation method of an elliptical part. It is explanatory drawing which shows the state in which the probe was press-contacted to the test | inspection point of the board | substrate. It is VIII-VIII sectional drawing in FIG. It is IX-IX sectional drawing in FIG. It is explanatory drawing for demonstrating the effect of the shape and arrangement | positioning of an elliptical hole part shown in FIG. It is explanatory drawing for demonstrating the effect of the shape and arrangement | positioning of an elliptical hole part shown in FIG. It is explanatory drawing which shows another example of the support block shown in FIG.

  Embodiments according to the present invention will be described below with reference to the drawings. In addition, the structure which attached | subjected the same code | symbol in each figure shows that it is the same structure, The description is abbreviate | omitted. FIG. 1 is a front view schematically showing a configuration of a substrate inspection apparatus 1 including a connection jig according to an embodiment of the present invention. A substrate inspection apparatus 1 shown in FIG. 1 is an apparatus for inspecting a circuit pattern formed on a substrate 100 to be inspected.

  The substrate 100 may be various substrates such as a printed circuit board, a flexible substrate, a ceramic multilayer circuit board, an electrode plate for a liquid crystal display or a plasma display, a package substrate for a semiconductor package, or a film carrier.

  A board inspection apparatus 1 shown in FIG. 1 includes an inspection apparatus main body 2 and inspection jigs 3U and 3D (connection jigs). The inspection apparatus main body 2 mainly includes inspection units 4U and 4D, inspection unit moving mechanisms 5U and 5D, a substrate fixing device 6, and a housing 7 that accommodates these units. The substrate fixing device 6 is configured to fix the substrate 100 to be inspected at a predetermined position. The inspection unit moving mechanisms 5U and 5D appropriately move the inspection units 4U and 4D within the housing 7.

  The inspection unit 4U is located above the substrate 100 fixed to the substrate fixing device 6. The inspection unit 4D is located below the substrate 100 fixed to the substrate fixing device 6. The inspection units 4U and 4D are configured to be detachable from inspection jigs 3U and 3D for inspecting a circuit pattern formed on the substrate 100. The inspection units 4U and 4D include connectors 41 connected to the inspection jigs 3U and 3D, respectively. Hereinafter, the inspection units 4U and 4D are collectively referred to as an inspection unit 4.

  FIG. 2 is a perspective view showing an example of the configuration of the inspection jigs 3U and 3D shown in FIG. Each of the inspection jigs 3U and 3D includes a plurality of probes Pr (connection terminals), a support block 31 (support member), a pedestal 32, a base 33, and a plurality of wirings 34.

  The probe Pr has a rod shape. Details of the configuration of the probe Pr will be described later. A plurality of through holes that support the probe Pr are formed in the support block 31. Each through hole is arranged so as to correspond to the position of the inspection point set on the wiring pattern of the substrate 100 to be inspected. As a result, the tip of the probe Pr is brought into contact with the inspection point of the substrate 100. For example, the plurality of probes Pr are arranged so as to correspond to the intersection positions of the lattice. The direction corresponding to the crosspieces of the lattice is made to coincide with the X-axis direction and the Y-axis direction orthogonal to each other.

  The inspection jigs 3U and 3D are configured in the same manner except that the arrangement of the probes Pr is different and that the mounting directions to the inspection units 4U and 4D are upside down. Hereinafter, the inspection jigs 3U and 3D are collectively referred to as an inspection jig 3. The inspection jig 3 can be replaced according to the substrate 100 to be inspected.

  The pedestal 32 includes a plate 321 to which the support block 31 is attached, and, for example, four connecting rods 322 that connect the plate 321 to the base 33. The connecting rod 322 supports the plate 321 with a space between it and the base 33. As a result, a wiring space for wiring the wiring 34 is secured between the base 33 and the plate 321.

  The base 33 is, for example, a flat rectangular parallelepiped member. The base 33 is provided with a connector 35 detachably connected to the connector 41 of the inspection unit 4. The connector 35 includes a plurality of terminals 36 for electrically connecting the probe Pr to the inspection unit 4.

  The terminal 36 is, for example, a needle-like terminal that penetrates the base 33 in the thickness direction. The rear end portion of each terminal 36 is connected to each probe Pr on the first surface 33a side by a wiring 34, and the front end portion of each terminal 36 protrudes from the second surface 33b opposite to the first surface 33a. ing.

  When the connector 35 is connected to the connector 41, the tip of each terminal 36 is connected to an unillustrated inspection circuit provided in the inspection unit 4. Thereby, each probe Pr is connected to the inspection circuit via each wiring 34 and each terminal 36.

  The substrate inspection apparatus 1 brings the tip of each probe Pr into contact with each inspection point on the substrate 100. Thereby, each inspection point and the inspection circuit are electrically connected. In this state, the inspection circuit supplies a current or voltage for inspection to each inspection point of the substrate 100 via each probe Pr of the inspection jig 3, and based on the voltage signal or current signal obtained from each probe Pr. For example, an inspection of the substrate 100 such as disconnection or short circuit of the circuit pattern is performed.

  FIG. 3 is a schematic diagram showing an example of the configuration of the support block 31 and the plate 321 shown in FIG. The support block 31 shown in FIG. 3 is configured, for example, by laminating plate-like support plates 31a, 31b, and 31c. The support plate 31 c is on the front end side of the support block 31, and the support plate 31 a is on the rear end side of the support block 31. A plurality of through holes H are formed so as to penetrate the support plates 31a, 31b, 31c.

  The support plates 31a and 31b are formed with through holes whose inner periphery in a cross section perpendicular to the through direction is substantially elliptical, and the through holes of the support plates 31a and 31b are formed as elliptic hole portions Ha. The support plate 31c is formed with a through hole having a circular inner periphery in a cross section perpendicular to the penetration direction, and the through hole of the support plate 31c is a narrow portion Hb. And the elliptical hole part Ha and the narrow part Hb are connected, and the through-hole H is formed.

  The manufacturing method of the connection jig which concerns on one Embodiment of this invention is a laser processing process which forms the elliptical hole Ha by laser processing in the support plates 31a and 31b comprised, for example using resin, ceramic, glass, etc. including. Usually, when a through-hole is formed in a plate-shaped member, cutting with a drill is performed. However, in the cutting process using a drill, since the drill is rotated, it is difficult to form an elliptical hole. On the other hand, according to laser processing, it is easier to form the elliptical hole portion Ha than drill processing.

  In addition, the support block 31 which is an example of a support member is not restricted to the example comprised by laminating | stacking plate-shaped support plates 31a, 31b, and 31c. For example, the support member may be formed as a through hole H by forming an elliptical hole Ha and a narrowed portion Hb in an integral member. Moreover, it is not necessarily restricted to the example in which the narrow part Hb is formed, and the whole through-hole H may be made into the elliptical hole part Ha.

  Moreover, although the structure which the support plates 31a and 31b of the support member were laminated | stacked was shown, the structure supported by the support | pillar etc. in the state which the support plate 31a and the support plate 31b spaced apart may be sufficient.

  A plate 321 made of, for example, an insulating resin material is attached to the rear end side of the support plate 31a. The plate 321 closes the rear end opening Hc of the through hole H. A wiring 34 is attached so as to penetrate the plate 321 at a position of the plate 321 located substantially at the center of each rear end opening Hc. The surface of the plate 321 facing the support plate 31a and the end surface of the wiring 34 exposed on the surface are flush with each other. The end face is an electrode 34a.

  A probe Pr is inserted into each through hole H. The probe Pr includes a tubular body Pa, for example, and a central conductor Pb having a rod-like conductivity. The center conductor Pb has a substantially columnar shape and is inserted into the cylinder of the cylindrical body Pa. The cylindrical body Pa is formed with a first spring part SP1, a second spring part SP2, and an elliptical part Pc.

  FIG. 4 is a partial cross-sectional view showing an example of the configuration of the probe Pr shown in FIG. As the cylindrical body Pa, for example, a nickel or nickel alloy tube having an outer diameter of about 25 to 300 μm and an inner diameter of 10 to 250 μm can be used. For example, the cylindrical body Pa can have an outer diameter of about 70 μm, an inner diameter of about 50 μm, and a total length of about 20 mm. A plating layer such as gold plating is provided on the inner periphery of the cylindrical body Pa. The peripheral surface of the cylindrical body Pa may be insulated and coated as necessary except for the end surface of the rear end portion Pd.

  An elliptical part Pc is formed at a position in the vicinity of the distal end Pe of the cylindrical body Pa, for example, a position about 2 to 5 mm from the distal end Pe. The tip portion Pf of the center conductor Pb protrudes from the tip portion Pe of the cylindrical body Pa. Further, the rear end portion Pg of the central conductor Pb is located on the front end side of the rear end portion Pd of the cylindrical body Pa in a state where the first spring portion SP1 and the second spring portion SP2 are not compressed.

  FIG. 5 is a VV cross-sectional view showing a cross-sectional shape of the elliptical portion Pc shown in FIG. As shown in FIG. 5, the elliptical portion Pc has a substantially elliptical shape having a short diameter Lb shorter than the long diameter La. Further, the elliptical portion Pc (cylindrical body Pa) and the central conductor Pb are fixed at the short diameter Lb portion of the elliptical portion Pc and are electrically connected. The diameter of the center conductor Pb is Ld.

  FIG. 6 is an explanatory diagram for explaining an example of a method for forming the elliptical portion Pc. First, as shown in FIG. 6 (a), a pair of resistance welding members are installed at positions facing each other so that the cylindrical body Pa is sandwiched from both sides with the central conductor Pb inserted through the cylindrical cylindrical body Pa. The electrode 200 is disposed. In this state, as shown in FIG. 6 (b), the pair of electrodes 200 are moved in a direction approaching each other as indicated by arrows to sandwich the cylindrical body Pa from both sides, and the inner surface of the cylindrical body Pa is set as the central conductor. It is made to contact the outer peripheral surface of Pb.

  At this time, as shown in FIG. 6 (b), the cylindrical body Pa is sandwiched between the pair of electrodes 200 in the up and down direction in the figure, so that the peripheral walls on both sides approach each other. Move away to swell. As a result, the cross section of the elliptical portion Pc of the cylindrical body Pa is deformed from a circular shape to a substantially elliptical shape. As a result, the widened outer diameter in the left-right direction, that is, the long diameter La becomes larger than the outer diameter Lc of the cylindrical body Pa when the cross section is circular.

  Further, in this state, by passing a current for resistance welding between the pair of electrodes 200, the gold plating layer is melted at the portion where the cylindrical body Pa and the central conductor Pb are in contact with each other in the elliptical portion Pc. The body Pa and the central conductor Pb are welded. Accordingly, the cylindrical body Pa and the central conductor Pb can be firmly fixed at the elliptical portion Pc, and the cylindrical body Pa and the central conductor Pb can be reliably electrically connected.

  Note that the cylindrical body Pa and the center conductor Pb need only be fixed and electrically conductive, and need not necessarily be welded. Moreover, it is not restricted to the example in which a plating layer is formed in the inner periphery of the cylindrical body Pa.

  Returning to FIG. 3, the probe Pr configured in this way is inserted into the through hole H. Specifically, the tip portion Pf of the probe Pr is inserted through a narrow portion Hb that penetrates the support plate 31c. The inner diameter of the narrow portion Hb is smaller than the outer diameter Lc of the cylindrical body Pa and larger than the diameter Ld of the center conductor Pb. Moreover, the front-end | tip part Pf is longer than the thickness of the support plate 31c. Thereby, the cylindrical body Pa interferes with the periphery of the rear end opening portion of the narrow portion Hb, the center conductor Pb is inserted through the narrow portion Hb, and the front end portion Pf of the center conductor Pb opens to the front end side of the narrow portion Hb. It protrudes from the part.

  As described above, the provision of the narrow portion Hb prevents the probe Pr from falling off the support block 31.

  The total thickness of the support plates 31a and 31b, that is, the distance between the front end side surface of the plate 321 and the rear end side surface of the support plate 31c is slightly smaller than the natural length when the cylindrical body Pa is not loaded. Has been shortened. Thereby, the cylindrical body Pa inserted through the through hole H (the elliptical hole portion Ha) and sandwiched between the plate 321 and the support plate 31c is slightly compressed. As a result, due to the urging force of the first spring part SP1 and the second spring part SP2, the tip end Pe of the cylindrical body Pa contacts the support plate 31c, and the rear end Pd of the cylindrical body Pa contacts the electrode 34a. It is like that.

  Thereby, the cylindrical body Pa and the electrode 34a are electrically connected, and the cylindrical body Pa is electrically connected to the inspection circuit of the substrate inspection apparatus 1 via the wiring 34. Since the cylindrical body Pa and the central conductor Pb are electrically connected, the inspection point is inspected by bringing the distal end portion of the probe Pr, that is, the distal end portion Pf of the central conductor Pb into contact with the inspection point of the substrate 100 to be inspected. Can be electrically connected.

  FIG. 7 is an explanatory view showing a state in which the probe Pr is pressed against the inspection point 101 of the substrate 100. The inspection point 101 is, for example, a wiring pattern, a solder bump, a connection terminal, or the like. When the inspection unit 4 is positioned with respect to the substrate 100 and the inspection jig 3 is pressed against the substrate 100, the tip of the probe Pr is pressed against the inspection point 101. Then, the tip of the probe Pr is pressed, the first spring part SP1 and the second spring part SP2 are compressed, and the probe Pr is pushed into the through hole H. In this way, the tip of the probe Pr is elastically pressed against the inspection point 101 by the urging force of the first spring portion SP1 and the second spring portion SP2, so that the contact stability between the probe Pr and the inspection point 101 is improved. improves.

  8 is a cross-sectional view taken along the line VIII-VIII in FIG. As shown in FIG. 8, the short diameter Lb of the inner periphery of the elliptical hole portion Ha is shorter than the long diameter La of the outer periphery of the elliptical portion Pc. Further, the major axis Le of the inner circumference of the elliptical hole portion Ha is inclined with respect to the X-axis direction and the Y-axis direction, and the extending direction of the major axis Le of each elliptical hole portion Ha is substantially the same. The inclination angle of the major axis Le with respect to the X-axis direction and the Y-axis direction is preferably about 45 degrees.

  When the first spring part SP1 and the second spring part SP2 expand and contract, the first spring part SP1 and the second spring part SP2 try to turn around the axis along with the expansion and contraction. Therefore, when the probe Pr is pressed against or separated from the inspection point 101, the first spring part SP1 and the second spring part SP2 are compressed or expanded, so that the cylinders connected to the first spring part SP1 and the second spring part SP2 are compressed. A force is generated to rotate the body Pa around the axis.

  Here, 1st spring part SP1 and 2nd spring part SP2 are formed so that the shape may become a point symmetrical positional relationship mutually. As a result, the first spring part SP1 and the second spring part SP2 have the spiral winding direction opposite, the line width of the spring part (spiral part) is equal, and the number of turns is equal. Accordingly, the rotational force generated by the first spring portion SP1 and the rotational force generated by the second spring portion SP2 are opposite in rotation direction and substantially equal in magnitude. As a result, the rotational force generated by the first spring part SP1 and the rotational force generated by the second spring part SP2 are canceled out, and the rotation of the cylindrical body Pa, that is, the rotation of the probe Pr is suppressed.

  If a characteristic difference due to manufacturing variation or the like occurs between the first spring part SP1 and the second spring part SP2, a rotational force that attempts to rotate the cylindrical body Pa, that is, the probe Pr according to the characteristic difference. Occurs. However, as shown in FIG. 8, the short diameter Lb of the inner periphery of the elliptical hole Ha is shorter than the long diameter La of the outer periphery of the elliptical part Pc, so that if the cylindrical body Pa tries to rotate, the elliptical part Pc and the elliptical part The interference with the inner wall of the hole Ha prevents the rotation of the cylindrical body Pa, that is, the rotation of the probe Pr.

  In this way, the movement of the probe Pr that occurs when the probe Pr is brought into contact with the inspection point 101 can be reduced. As a result, since the inspection point 101 and the probe Pr can be stably contacted, variation in contact resistance between the inspection point 101 and the probe Pr is reduced, and as a result, inspection stability and inspection accuracy are improved. Is possible.

  Further, when the inspection point 101 is made of a material that is difficult to oxidize, such as aluminum, and the oxide film does not need to be removed by friction with the probe Pr, a probe generated when the probe Pr is brought into contact with the inspection point 101 By reducing the movement of Pr, the friction between the inspection point 101 and the probe Pr can be reduced, and the wear of the inspection point 101 and the probe Pr can be reduced.

  Note that the first spring portion SP1 may be formed dispersedly at a plurality of locations of the tubular body Pa, and the second spring portion SP2 may be formed dispersedly at a plurality of locations of the tubular body Pa. Good. The total number of spiral turns of the plurality of first spring portions SP1 may be equal to the total number of spiral turns of the plurality of second spring portions SP2. Even in this case, the same effect as that obtained when the first spring portion SP1 and the second spring portion SP2 are formed at one location can be obtained.

  Further, the first spring part SP1 and the second spring part SP2 do not necessarily have the same number of turns. Even if there is a difference between the number of turns of the first spring part SP1 and the number of turns of the second spring part SP2, the rotational force generated by the first spring part SP1 and the rotation generated by the second spring part SP2 Since the force is offset, an effect of reducing the rotation of the cylindrical body Pa, that is, the rotational force of the probe Pr can be obtained.

  Further, the spiral direction of the first spring portion SP1 and the second spring portion SP2 does not necessarily have to be opposite. Moreover, the structure by which only any one among 1st spring part SP1 and 2nd spring part SP2 is provided may be sufficient. According to the inspection jig structure shown in FIGS. 3 and 8, even if the rotational force generated by the first spring part SP1 and the rotational force generated by the second spring part SP2 are not offset, the elliptical part Pc And the inner wall of the elliptical hole Ha interfere with the rotation of the cylindrical body Pa, that is, the rotation of the probe Pr. Therefore, the movement of the probe Pr that occurs when the probe Pr is brought into contact with the inspection point 101 is prevented. Can be reduced.

  Moreover, the structure by which 1st spring part SP1 and 2nd spring part SP2 are not provided may be sufficient. Even when the first spring portion SP1 and the second spring portion SP2 are not provided, when the probe Pr is brought into contact with the inspection point 101, the force for rotating the probe Pr by the pressing force acting on the probe Pr is large. May work. However, according to the inspection jig structure shown in FIGS. 3 and 8, even when a rotational force acts on the probe Pr, the elliptical portion Pc and the inner wall of the elliptical hole portion Ha interfere with each other. Since the rotation of the cylindrical body Pa, that is, the rotation of the probe Pr is hindered, the movement of the probe Pr generated when the probe Pr is brought into contact with the inspection point 101 can be reduced.

  9 is a cross-sectional view taken along the line IX-IX in FIG. As shown in FIG. 9, the cylindrical body Pa is a cylindrical part having a cylindrical shape at a position different from the elliptical part Pc. In the cylindrical portion, the outer diameter Lc, which is the diameter of the outer periphery of the cylindrical body Pa, is a cylindrical portion having a short diameter Lb or less on the inner periphery of the elliptical hole Ha.

  The entire cylindrical body Pa may be elliptical in cross section perpendicular to the axial direction in accordance with the elliptical hole Ha. However, when the entire cylindrical body Pa is made to have an elliptical cross-sectional shape perpendicular to the axial direction, the bending strength of the probe Pr with respect to the minor axis direction of the ellipse decreases. On the other hand, the inspection jig structure shown in FIG. 9 is more preferable in that the probe Pr having a cylindrical portion having a higher strength than the elliptical cross section can be inserted into the elliptical hole Ha.

  Further, as shown in FIG. 8, the elliptical holes Ha are arranged so as to correspond to the intersections of the lattices whose interval in the X-axis direction is Px and whose interval in the Y-axis direction is Py. The major axis Le of the inner circumference of the elliptical hole Ha is inclined with respect to the X-axis direction and the Y-axis direction, and the direction in which the major axis Le of each elliptical hole Ha extends is substantially the same. Thereby, the distances Px and Py can be made smaller than when the elliptical hole Ha is cylindrical.

  FIG. 10 is an explanatory diagram for explaining that the distances Px and Py can be reduced by the shape and arrangement of the elliptic hole portion Ha shown in FIG. 8 compared to the case where the elliptic hole portion Ha is cylindrical. . A circle Hx shown in FIG. 10 indicates the size of a circle necessary to allow insertion of the elliptical portion Pc when the elliptical hole portion Ha is cylindrical, and more specifically, the elliptical hole portion. A circle whose diameter is the major axis Le of the inner circumference of Ha is shown.

  As is clear from FIG. 10, when the circle Hx is arranged at the same intervals Px and Py as the elliptic hole portion Ha, the shortest distance between the adjacent circles Hx is closer than the elliptic hole portion Ha. When the shortest distance between adjacent holes is shortened, the thickness of the wall surface forming each hole is reduced, and the strength of the support block 31 is reduced. That is, in order to ensure the same strength in the case where the elliptic hole portion Ha and the elliptic hole portion Ha are cylindrical, the elliptic hole portions Ha are adjacent to each other rather than the cylindrical holes. The intervals Px and Py of the portion Ha can be reduced. The fact that the intervals Px and Py can be reduced means that the adjacent interval between the probes Pr can be reduced, so that it is possible to inspect a fine inspection object having a small adjacent interval between the inspection points 101.

  For example, as shown by a broken line in FIG. 11, when the major axis Le of the inner periphery of the elliptical hole Ha is a direction along the X-axis direction or the Y-axis direction, the elliptical hole part Ha adjacent along the major axis direction. The shortest distance between each other is shorter than the case where the major axis Le is inclined with respect to the X axis and the Y axis as in the elliptical hole Ha shown in FIG. Therefore, when the major axis Le is a direction along the X-axis direction or the Y-axis direction, in order to ensure the same strength as that of the elliptical hole portion Ha shown in FIG. It is necessary to increase the distance between the adjacent portions Ha. That is, the elliptical hole Ha shown in FIG. 8 can shorten the intervals Px and Py by inclining the major axis Le with respect to the X axis and the Y axis.

  Further, by setting the inclination angle of the major axis Le to the X axis and the Y axis to be approximately 45 degrees, the intervals Px and Py can be shortened in a balanced manner with respect to both the X axis direction and the Y axis direction.

  For example, an electrical insulating layer may be formed between the cylindrical body Pa and the central conductor Pb, and the cylindrical body Pa and the central conductor Pb may be electrically insulated. Then, for example, as shown in FIG. 12, instead of the electrode 34a, a first electrode 341 that contacts the cylindrical body Pa and a second electrode 342 that contacts the central conductor Pb are formed on the plate 321. The configuration may be such that the 341 and the second electrode 342 are each connected to an inspection circuit by wiring.

  The cylindrical body Pa has a cylindrical cylindrical tip Ph that is longer than the thickness of the support plate 31c on the tip side of the elliptical portion Pc, and the narrow portion Hb has an inner diameter of the cylindrical tip Ph. The outer diameter may be larger than the major diameter La of the elliptical portion Pc.

  Thereby, the cylindrical tip portion Ph projects from the support plate 31c toward the inspection point 101, and the cylindrical tip portion Ph and the center conductor Pb can be brought into contact with the inspection point 101. As a result, the cylindrical body Pa and the central conductor Pb can be used as probes, respectively, so that the probe Pr can be used as a probe for a so-called four-terminal measurement method. Further, since the inner diameter of the narrow portion Hb is made smaller than the major axis La of the elliptical portion Pc, the elliptical portion Pc interferes with the narrow portion Hb. As a result, the probe Pr is prevented from falling off the support block 31.

  The cylindrical tip portion Ph may be shorter than the thickness of the support plate 31c, that is, shorter than the narrow portion Hb, and the cylindrical tip portion Ph may not be in contact with the inspection point 101. In this case, the cylindrical body Pa and the central conductor Pb may be electrically connected, for example, and the plate 321 may be provided with the electrode 34a illustrated in FIG. In this case, since the center conductor Pb is guided to the position closer to the inspection point 101 by the cylindrical tip Ph, it is easy to improve the accuracy with which the center conductor Pb contacts the inspection point 101.

  Moreover, although the inspection jig 3 used for a board | substrate inspection apparatus was illustrated as an example of a connection jig, the connection jig should just make a connection terminal contact an object, and is not necessarily restricted to an inspection jig. .

1 Substrate inspection device 2 Inspection device body 3, 3U, 3D Inspection jig (connection jig)
4, 4U, 4D Inspection unit 5U, 5D Inspection unit moving mechanism 6 Substrate fixing device 31 Support block (support member)
31a, 31b, 31c Support plate 34 Wiring 34a Electrode 100 Substrate 101 Inspection point 321 Plate 322 Connecting rod 341 First electrode 342 Second electrode H Through hole Ha Elliptical hole Hb Narrow part Hc Rear end side opening La Long diameter Lb Short diameter Lc Outer diameter Ld Diameter Le Long diameter Pa Cylindrical body Pb Center conductor Pc Elliptical part Pd Rear end part Pe Front end part Pf Front end part Pg Rear end part Ph Cylindrical front end part Pr Probe (connection terminal)
Px, Py interval SP1 First spring part SP2 Second spring part

Claims (16)

A rod-shaped connection terminal having a front end and a rear end;
A through hole through which the connection terminal can be inserted is formed, and a support member that supports the connection terminal inserted through the through hole, and
The connection terminal is
A tubular body,
Including a central conductor having a rod-like conductivity inserted into a cylinder of the cylindrical body,
At least a part of the portion of the cylindrical body located in the through-hole is an elliptical portion having a substantially elliptical outer periphery in a cross section perpendicular to the axial direction,
At least a part of the through-hole including a portion where the elliptical portion is located is an elliptical hole having a substantially elliptical inner periphery in a cross section perpendicular to the penetrating direction,
A connecting jig in which the inner diameter of the elliptical hole is shorter than the outer diameter of the elliptical part.   The connection jig according to claim 1, wherein a spiral spring portion that extends and contracts in the axial direction is formed on a part of the cylindrical body.   The connecting jig according to claim 2, wherein the spring part is a part of the cylindrical body that is made to be extendable and contractable by a spiral slit formed in a peripheral wall of the cylindrical body. The spring portion is
A first spring portion in which the spiral winding direction is a first direction;
The connection jig according to claim 2 or 3, including a second spring portion in which the spiral winding direction is a second direction opposite to the first direction.   The connection jig according to claim 4, wherein the first spring part and the second spring part are formed so that the shapes thereof are point-symmetric with respect to each other. The first spring part is formed at one or more places, the second spring part is formed at one or more places,
The connection jig according to claim 5, wherein a total number of spiral turns of the one or more first spring portions is equal to a total number of spiral turns of the one or more second spring portions. The elliptical part is formed in the vicinity of the end part on the tip side of the cylindrical body,
The cylindrical body and the central conductor are fixed to each other at the elliptical shape in a state where the central conductor protrudes from an end portion on the distal end side of the cylindrical body. The connection jig described in 1. The central conductor has a cylindrical shape;
The through hole has a narrowed portion whose inner diameter is narrowed to a size such that the inner diameter of the through hole interferes with the cylindrical body and the center conductor can be inserted;
The distal end of the central conductor projects from the distal end side opening of the through hole in a state where the distal end side end of the cylindrical body is in contact with the opening peripheral edge of the narrowed portion. The connection jig according to claim 7. The cylindrical body has electrical conductivity and is electrically connected to the central conductor at the fixing position,
The opening on the rear end side of the through hole is provided with an electrode portion with which the rear end portion of the cylindrical body abuts,
The rear end portion of the central conductor is more than the rear end portion of the cylindrical body in a state in which the end portion on the front end side of the cylindrical body is in contact with the peripheral edge of the opening on the rear end side of the narrow portion. The connection jig according to claim 8, which is located on a distal end side. The elliptical part is formed in the vicinity of the end part on the tip side of the cylindrical body,
The cylindrical body has a cylindrical cylindrical tip on the tip side of the elliptical part,
The through-hole has a narrow portion narrowed to a size such that an inner diameter thereof is smaller than a major axis of the elliptical portion on the distal end side and the cylindrical distal end portion can be inserted. The connection jig according to Item 1.   The connecting jig according to claim 10, wherein the cylindrical tip portion is longer than the narrow portion.   The connection jig according to any one of claims 1 to 11, wherein the cylindrical body includes a cylindrical portion having an outer diameter that is equal to or less than a minor axis of the inner circumference of the elliptical hole portion. A plurality of the through holes are formed, and the connection terminals are respectively inserted through the through holes.
The plurality of through-holes are arranged at intersections of the lattice, the major axis of the inner periphery of the elliptical hole portion is inclined with respect to the direction corresponding to the crosspieces of the lattice, and the inner periphery of each elliptical hole portion The connecting jig according to any one of claims 1 to 12, wherein the major axis directions of the two are substantially the same.   The connecting jig according to claim 13, wherein the inclined angle is approximately 45 degrees. The connection jig according to any one of claims 1 to 14,
A board inspection apparatus comprising: an inspection unit that brings the connection terminal into contact with an inspection point provided on a board to be inspected, and inspects the board based on an electrical signal obtained from the connection terminal. It is a manufacturing method of a connecting jig given in any 1 paragraph of Claims 1-15,
A method for manufacturing a connection jig, comprising a step of forming the elliptical hole by laser processing.

Images