JP5993509B2 - An optical scanning device, an image forming apparatus including the optical scanning device, and a method for adjusting the mass of a vibrating mirror portion of the optical scanning device. - Google Patents

Description

  The present invention relates to an optical scanning device, an image forming apparatus including the optical scanning device, and a mass adjustment method of a vibrating mirror portion of the optical scanning device.

  2. Description of the Related Art Conventionally, a resonance type optical scanning device including a vibrating mirror unit and a torsion bar unit that supports the vibrating mirror unit is known. In this optical scanning device, the mass of the oscillating mirror unit is often adjusted to adjust the resonance frequency. For example, in the optical scanning device disclosed in Patent Document 1, a part of the back surface (the side surface opposite to the reflecting surface) of the vibration mirror unit is removed by laser processing, thereby adjusting the mass of the vibration mirror unit.

  In the above resonance type optical scanning device, there is a case where the vibrating mirror unit is housed in a sealed casing in order to prevent the vibrating mirror unit from being contaminated. In this case, a method has been proposed in which the mass adjustment is performed in a state where the vibration mirror unit is housed in the housing (see, for example, Patent Document 2). In this method, on the surface of the oscillating mirror unit, a mass adjusting unit whose mass changes due to a chemical reaction with gas is formed, and the mass of the oscillating mirror unit is adjusted by adjusting the amount of this chemical reaction. Yes.

JP 2009-75538 A JP 2005-91544 A

  By the way, the resonance frequency for resonating the oscillating mirror part changes not only by the mass of the oscillating mirror part and the spring constant of the torsion bar part, but also by, for example, the rigidity of the casing housing the oscillating mirror part. Therefore, it is preferable to adjust the mass of the oscillating mirror (that is, adjust the resonance frequency) while the oscillating mirror is housed in the housing.

  However, in the optical scanning device shown in Patent Document 1, if the oscillating mirror unit is accommodated in the housing, the back surface of the oscillating mirror unit cannot be irradiated with laser light, and the mass of the oscillating mirror unit is adjusted. There is a problem that can not be.

  Therefore, as shown in Patent Document 2, it is conceivable to form a mass adjusting unit that chemically reacts with gas on the surface of the vibrating mirror unit. By doing so, it is possible to adjust the mass of the oscillating mirror part even when the oscillating mirror part is housed in the housing.

  However, in this case, there is a problem that a strong sealing structure for sealing the gas in the casing is required, which causes an increase in cost. Further, it is necessary to separately prepare a gas absorbent or a gas release agent as the mass adjusting unit and fix it to the surface of the vibrating mirror unit. For this reason, there is a problem that the structure of the entire apparatus becomes complicated, and as a result, costs increase.

  The present invention has been made in view of the above points, and an object of the present invention is to make it possible to easily adjust the mass of the oscillating mirror housed in the housing while realizing a simple device configuration. There is.

  An optical scanning device according to the present invention has a reflection mirror that reflects light emitted from a first light source and is formed to be long in a predetermined direction, and is connected to a longitudinal center of the vibration mirror. A torsion bar portion extending in a direction perpendicular to the longitudinal direction to support the vibrating mirror portion, a driving portion for twisting and vibrating the vibrating mirror portion around the torsion bar portion, the vibrating mirror portion, and the torsion bar And a housing that houses the drive unit.

  A mass adjusting unit configured to be able to remove mass by being irradiated with laser light is formed on a side surface of the vibrating mirror unit opposite to the reflecting surface, and is disposed outside the casing. 2 further includes an optical element unit that irradiates the mass adjusting unit by reflecting or transmitting the laser light emitted from the light source, and the mass adjusting unit includes both ends in the longitudinal direction on the opposite side surface of the vibrating mirror unit. The rib portion is formed in an intermediate portion which is a portion excluding the portion and extends in the longitudinal direction.

  According to this configuration, the laser light emitted from the second light source disposed outside the housing is reflected or transmitted by the optical element unit, and is thus irradiated on the mass adjusting unit of the vibrating mirror unit. . As a result, the mass of the portion irradiated with the laser light in the mass adjusting unit is removed by the ablation reaction. Therefore, the mass adjustment can be performed in a state where the vibration mirror unit is housed in the housing. Further, there is no need to separately prepare a gas absorbent or a gas releasing agent as the mass adjusting unit, or to reinforce the sealing structure of the casing in order to seal the gas in the casing. Therefore, the structure of the whole apparatus can be simplified.

  Also, by using the reinforcing rib part formed on the vibrating mirror part as a mass adjusting part, it is possible to adjust the mass of the vibrating mirror part while suppressing deformation of the vibrating mirror part due to the inertial force at the time of swinging. Can be easily performed.

  It is preferable that the optical element unit includes a reflection mirror unit that is provided in the housing and reflects the laser light emitted from the second light source.

  According to this configuration, the laser light emitted from the second light source is reflected by the reflection mirror unit (optical element unit) and applied to the mass adjustment unit of the vibration mirror unit. As described above, by adopting the reflection mirror portion as the optical element portion, the laser light emitted from the second light source is transmitted to the back side of the vibration mirror portion (opposite to the reflection surface) even when there is a space limitation. Side) and can be irradiated to the mass adjusting unit.

  It is preferable that the optical element portion includes a light transmission window portion that is formed on the wall portion of the casing and transmits the laser light emitted from the second light source.

  According to this configuration, the laser light emitted from the second light source is applied to the mass adjusting unit of the vibrating mirror unit through the light transmission window unit (optical element unit) formed on the wall of the housing. As described above, by adopting the light transmission window portion as the optical element portion, it is possible to easily guide the laser light emitted from the second light source to the back surface side of the vibration mirror portion and irradiate the mass adjusting portion.

  An image forming apparatus according to the present invention includes the optical scanning device.

  According to this configuration, by adopting the optical scanning device, it is possible to perform mass adjustment (resonance frequency adjustment) of the vibrating mirror part in consideration of the rigidity of the housing and the like. As a result, the light scanning characteristics of the optical scanning device can be improved. Therefore, the image quality of the printed image can be improved.

  In the method for adjusting the mass of the oscillating mirror according to the present invention, the laser light is emitted from the second light source arranged outside the casing, and the emitted laser light is reflected or transmitted by the optical element part. The mass adjustment process of irradiating the said mass adjustment part by this and removing the mass of this mass adjustment part is included. The mass adjusting portion is formed of a rib portion that is formed in an intermediate portion that is a portion excluding both ends in the longitudinal direction on the opposite side surface of the vibrating mirror portion and extends in the longitudinal direction.

  According to this method, it is possible to easily adjust the mass of the oscillating mirror housed in the housing while realizing a simple device configuration.

  In the mass adjustment step, when the vibrating mirror part is viewed from the side opposite to the reflecting surface, the mass adjustment part is configured such that the part from which the mass is removed in the mass adjustment part does not reach the periphery of the mass adjustment part. A step of irradiating the adjustment unit with laser light is preferable.

  According to this method, even if the irradiation position of the laser beam applied to the mass adjusting unit of the oscillating mirror unit varies, the laser beam does not protrude from the mass adjusting unit. Therefore, the laser light emitted from the second light source does not damage the reflection surface of the vibration mirror unit or a portion close to the reflection surface.

  ADVANTAGE OF THE INVENTION According to this invention, mass adjustment of the vibration mirror part accommodated in the housing | casing can be easily performed, implement | achieving a simple apparatus structure.

1 is a schematic cross-sectional view illustrating an image forming apparatus including an optical scanning device according to an embodiment. It is the top view seen from the front side which shows the optical scanning device in this embodiment. It is the top view seen from the back side which shows the optical scanning device in this embodiment. It is the IV-IV sectional view taken on the line of FIG. It is the VV sectional view taken on the line of FIG. FIG. 4 is a view corresponding to FIG. 3 showing a state after the mass adjustment. FIG. 5 is a view corresponding to FIG. It is a VIII direction arrow line view of FIG. FIG. 4 is a view corresponding to FIG. 3 showing another embodiment.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The present invention is not limited to the following embodiment.

Embodiment 1
<Laser printer>
FIG. 1 is a cross-sectional view showing a schematic configuration of a laser printer 1 as an image forming apparatus in the present embodiment.

  As shown in FIG. 1, the laser printer 1 includes a box-shaped printer main body 2, a manual paper feed unit 6, a cassette paper feed unit 7, an image forming unit 8, a fixing unit 9, and a paper discharge unit 10. It has. Thus, the laser printer 1 is configured to form an image on a sheet based on image data transmitted from a terminal (not shown) while conveying the sheet along the conveyance path L in the printer body 2. ing.

  The manual paper feed unit 6 includes a manual feed tray 4 that can be opened and closed on one side of the printer main body 2, and a manual paper feed roller 5 that is rotatably provided inside the printer main body 2. ing.

  The cassette paper feeding unit 7 is provided at the bottom of the printer main body 2. The cassette paper feed unit 7 separates the paper feed cassette 11 that stores a plurality of papers stacked on each other, a pick roller 12 that takes out the paper in the paper feed cassette 11 one by one, and the paper that is taken out one by one. The feed roller 13 and the retard roller 14 are fed to the transport path L.

  The image forming unit 8 is provided above the cassette paper feeding unit 7 in the printer main body 2. The image forming unit 8 includes a photosensitive drum 16 which is an image carrier rotatably provided in the printer main body 2, a charger 17 disposed around the photosensitive drum 16, a developing unit 18, a transfer roller 19, and A cleaning unit 20, an optical scanning device 30 disposed above the photosensitive drum 16, and a toner hopper 21 are provided. Thus, the image forming unit 8 forms an image on the sheet supplied from the manual sheet feeding unit 6 or the cassette sheet feeding unit 7.

  The transport path L is provided with a pair of registration rollers 15 that supply the fed sheet to the image forming unit 8 at a predetermined timing after temporarily waiting.

  The fixing unit 9 is disposed on the side of the image forming unit 8. The fixing unit 9 includes a fixing roller 22 and a pressure roller 23 that are pressed against each other and rotate. Thus, the fixing unit 9 is configured to fix the toner image transferred to the sheet by the image forming unit 8 on the sheet.

  The paper discharge unit 10 is provided above the fixing unit 9. The paper discharge unit 10 includes a paper discharge tray 3, a pair of paper discharge rollers 24 for conveying paper to the paper discharge tray 3, and a plurality of conveyance guide ribs 25 for guiding paper to the paper discharge roller pair 24. Yes. The paper discharge tray 3 is formed in a concave shape at the top of the printer body 2.

  When the laser printer 1 receives the image data, the photosensitive drum 16 is rotationally driven in the image forming unit 8, and the charger 17 charges the surface of the photosensitive drum 16.

  Then, the light is emitted from the optical scanning device 30 to the photosensitive drum 16 based on the image data. An electrostatic latent image is formed on the surface of the photosensitive drum 16 by irradiation with laser light. The electrostatic latent image formed on the photosensitive drum 16 is developed by the developing unit 18 to become a visible image as a toner image.

  Thereafter, the sheet is pressed against the surface of the photosensitive drum 16 by the transfer roller 19. As a result, the toner image on the photosensitive drum 16 is transferred to the paper. The sheet on which the toner image is transferred is heated and pressed by the fixing roller 23 and the pressure roller 24 in the fixing unit 9. As a result, the toner image is fixed on the paper.

-Optical scanning device 30-
As illustrated in FIGS. 2 to 5, the optical scanning device 30 includes a first light source 31 that emits light, a vibrating body 40, and a housing 50 that houses the vibrating body 40.

  The housing 50 is formed in a substantially rectangular parallelepiped shape as a whole. The casing 50 has a rectangular shape in which the length in the vertical direction (vertical direction in FIG. 2) is larger than the length in the horizontal direction (horizontal direction in FIG. 2) in plan view. The casing 50 includes a bottomed casing body 51 that opens on one side in the height direction (the front side in FIG. 2), and a lid 52 that closes the opening side of the casing body 51. Have. The housing body 51 is made of, for example, a resin material, and the lid 52 is made of a light-transmitting member, such as glass. The lid portion 52 is configured to transmit both light incident on a vibration mirror unit 41 described later from the first light source 31 and light reflected on the vibration mirror unit 41.

The vibrating body 40 is a so-called MEMS (Micro Electrode).
Mechanical System) device, which is formed by etching a silicon plate. Specifically, as shown in FIG. 3, the vibrating body 40 includes a vibrating mirror part 41, first and second torsion bar parts 42 and 43, first and second transverse beam parts 44 and 45, and a substantially rectangular shape. And a plate-like fixed frame portion 46. The vibration mirror unit 41 is formed in a thin plate shape that is substantially elliptical in plan view. The oscillating mirror portion 41 is disposed substantially at the center of the fixed frame portion 46. The major axis direction of the oscillating mirror unit 41 coincides with the lateral direction of the casing, and the minor axis direction of the oscillating mirror unit 41 coincides with the longitudinal direction of the casing. One side surface in the thickness direction of the oscillating mirror portion 41 (front side surface toward the paper surface of FIG. 2) is a reflection surface 41 a for reflecting the light emitted from the first light source 31. On the reflection surface 41a, a light reflection film is formed of, for example, aluminum or chromium in order to increase the light reflectance. The oscillating mirror unit 41 twists and vibrates around both the torsion bar units 42 and 43, thereby changing the reflection direction of light incident on the reflection surface 41a from the first light source 31 and reciprocatingly scanning the light in a predetermined direction. .

  A rectangular parallelepiped rib portion 41c extending in the longitudinal direction of the vibration mirror portion 41 is formed on a side surface 41b of the vibration mirror portion 41 opposite to the reflection surface 41a (see FIG. 3). The rib part 41c is formed in the intermediate part except the both ends of the longitudinal direction in the opposite side surface 41b of the vibration mirror part 41. As shown in FIG. Thus, by not forming the rib portions 41 c at both ends in the longitudinal direction of the vibration mirror portion 41, the moment of inertia around the swing axis of the vibration mirror portion 41 is reduced and the vibration mirror portion 41 is swung. The deformation | transformation in can be suppressed. The rib portion 41 c functions as a reinforcing portion of the vibration mirror portion 41 and also functions as a mass adjustment portion 70 of the vibration mirror portion 41 as will be described later.

  The first and second torsion bar portions 42 and 43 have a plate shape that is long in the longitudinal direction of the casing. Both torsion bar portions 42 and 43 are arranged on a straight line passing through the center of the vibrating mirror portion 41 (on the extended line of the short axis) in plan view. The first torsion bar portion 42 has one end connected to the central portion in the longitudinal direction of the vibrating mirror portion 41 and the other end connected to the longitudinal central portion of the first transverse beam portion 44. The second torsion bar portion 43 has one end connected to the central portion in the longitudinal direction of the vibrating mirror portion 41 and the other end connected to the central portion in the longitudinal direction of the second transverse beam portion 45.

  The first transverse beam portion and the second transverse beam portions 44 and 45 are arranged at intervals in the longitudinal direction of the casing. The vibration mirror unit 41 is disposed between both the cross beam portions 44 and 45. Both end portions of the first cross beam portion 44 and both end portions of the second cross beam portion 45 are connected to the fixed frame portion 46. The fixed frame portion 46 has a pair of vertical side portions 46a extending in the vertical direction of the casing and a pair of horizontal side portions 46b extending in the horizontal direction of the casing. The first and second transverse beam portions 44 and 45 are respectively disposed across both vertical side portions 46 a of the fixed frame portion 46. Two piezoelectric elements 47 (see FIGS. 2 and 4) are attached to each of the first and second cross beam portions 44 and 45 as drive units. Each piezoelectric element 47 is electrically connected to a drive circuit (not shown), and the piezoelectric element 47 expands and contracts when the applied voltage applied to each piezoelectric element 47 from the drive circuit varies at a predetermined frequency. It is supposed to be. The vibration frequency of the piezoelectric element 47 is set to coincide with the resonance frequency of the vibration mirror unit 41. This resonance frequency varies depending on various factors such as the mass of the vibrating mirror portion 41, the spring constants of the torsion bar portions 42 and 43, and the rigidity of the housing 50, for example. When the piezoelectric element 47 vibrates at the resonance frequency, the vibration mirror unit 41 resonates and twists and vibrates around the torsion bar portions 42 and 43.

  The fixed frame portion 46 is supported by a pair of pedestal portions 53 (see FIG. 5) formed in the housing main body portion 51. The pair of pedestal portions 53 includes stepped portions formed at both end portions in the lateral direction of the housing by denting the central portion in the lateral direction of the housing in the bottom wall portion 54 of the housing body 51. The pair of pedestal portions 53 are formed over the entire length of the casing main body 51. The fixed frame portion 46 is disposed across the pair of pedestal portions 53.

  A reflection mirror portion 55 is formed in a portion of the bottom wall portion 54 of the housing main body 51 located between the pair of pedestal portions 53. The reflection mirror portion 55 is formed of a reflection film such as aluminum or chromium. The reflection mirror unit 55 is disposed at a position shifted to one side in the longitudinal direction of the casing from the vibration mirror unit 41 in plan view. The reflection mirror unit 55 has a rectangular shape that is long in the lateral direction of the housing in plan view. The length of the reflection mirror part 55 in the longitudinal direction is smaller than the length of the rib part 41c in the longitudinal direction. The reflection mirror portion 55 is disposed between two imaginary lines 60 (see FIG. 2) passing through both ends in the longitudinal direction of the rib portion 41c and extending in the longitudinal direction of the housing in plan view.

  When the mass of the oscillating mirror 41 is adjusted, the reflecting mirror unit 55 reflects the laser light incident on the reflecting mirror unit 55 from the second light source 32 and the rib 41c (mass adjusting unit 70) of the oscillating mirror unit 41. ) To function as an optical element unit 80. The rib portion 41c causes an ablation reaction by receiving laser light irradiation. And the mass of the rib part 41c is removed by this ablation reaction, and the mass of the vibration mirror part 41 is adjusted. The mass adjustment of the oscillating mirror unit 41 is performed so that the resonance frequency becomes the target frequency.

  Hereinafter, a procedure for adjusting the mass of the vibration mirror unit 41 will be specifically described. First, the housing body 51 is set on the adjustment stand so that the open side is on the upper side. Next, the vibrating body 40 including the oscillating mirror 41 is fixed on the pedestal 53 in the housing main body 51, and the open side of the housing main body 51 is closed by the lid 52 after the fixing. Then, after the casing 50 is sealed, the second light source 32 provided outside the casing 50 is irradiated with laser light toward the reflection mirror portion 55 in the casing 50 at a predetermined incident angle θ. To do. The laser beam reflected by the reflection mirror unit 55 is irradiated on the lower surface of the rib portion 41c of the vibration mirror unit 41 to cause an ablation reaction (see FIG. 4). And a part of mass of the rib part 41c is removed by this ablation reaction. Thus, the mass of the vibration mirror unit 41 is adjusted to a predetermined mass. Here, although the portion of the rib portion 41c that has caused an ablation reaction is scattered as particles, the scattered particles fall downward due to gravity and adhere to the bottom wall portion 54 of the housing body 51. Therefore, the scattering surface does not contaminate the reflection surface 41a of the vibration mirror unit 41. The laser light is irradiated in a line along the longitudinal direction of the rib portion 41c. Thereby, the groove part 41f extended in the longitudinal direction by ablation reaction is formed in the lower surface of the rib part 41c (refer FIG. 6). Laser light is irradiated so that this groove part 41f (part from which mass was removed in the mass adjusting part 70) does not reach the peripheral edge of the rib part 41c in plan view. Thereby, even if the irradiation position of a laser beam varies, it can prevent that a laser beam protrudes from the rib part 41c. Therefore, it is possible to prevent the reflection surface 41a of the oscillating mirror portion 41 and the portion close to the reflection surface 41a from being damaged by the laser light.

  As described above, in the first embodiment, the mass adjustment can be easily performed in a state where the vibration mirror unit 41 is housed in the housing 50. Therefore, the resonance frequency of the vibration mirror unit 41 can be adjusted in consideration of the rigidity of the housing 50 and the like. In addition, it is not necessary to separately prepare a gas absorbent or a gas releasing agent as the mass adjusting unit 70 or to strengthen the sealing structure of the casing 50 in order to seal the gas in the casing 50, so that the entire apparatus 30 The configuration can be simplified.

<< Embodiment 2 >>
7 and 8 show the second embodiment. In the second embodiment, the configuration of the optical element unit 80 is different from that of the above embodiment. In the following description, the same parts as those in FIG. 4 are denoted by the same reference numerals, and detailed description thereof is omitted.

  That is, in the second embodiment, the optical element unit 80 includes the light transmission window unit 56 that transmits the laser light emitted from the second light source 32. The light transmission window portion 56 is formed by fitting a member (for example, glass) capable of transmitting laser light into a rectangular opening 54f formed in the bottom wall portion 54 of the housing. The light transmission window portion 56 is formed immediately below the vibration mirror portion 41. The laser light emitted from the second light source 32 is applied to the lower surface of the rib portion 41 c of the vibrating mirror portion 41 through the light transmission window portion 56. Thereby, the effect similar to the said Embodiment 1 can be acquired.

<< Other embodiments >>
In each of the above embodiments, the rib portion 41 c is formed so as to extend in the longitudinal direction of the vibration mirror portion 41, but is not limited thereto. That is, the rib part 41c may be formed on the extension line of both the torsion bar parts 42 and 43 by planar view, for example, as shown in FIG. Thereby, it is possible to reduce the moment of inertia around the swing axis of the vibration mirror unit 41 and to suppress the deformation of the vibration mirror unit 41 due to the inertial force at the time of swing.

  In each of the above embodiments, pressure adjustment or the like in the housing 50 is not performed, but the present invention is not limited to this. For example, the inside of the housing 50 may be evacuated. Thereby, the air resistance at the time of the rocking | fluctuation which acts on the vibration mirror part 41 can be reduced, and the vibration characteristic can be stabilized. In this case, after the inside of the housing 50 is evacuated, the mass of the vibrating mirror unit 41 may be adjusted.

  In each of the above-described embodiments, the vibration mirror unit 41 is vibrated by the piezoelectric element 47. However, the present invention is not limited to this. For example, as shown in JP-A-2005-91544 (Patent Document 2) You may make it vibrate using a driving force, and you may make it drive using the electromagnetic driving force by a magnet.

  In each of the above embodiments, the oscillating mirror portion 41 is formed in an elliptical shape in plan view, but is not limited thereto, and may be any shape such as a rectangular shape, a square shape, or a perfect circle shape, for example. It doesn't matter.

  As described above, the present invention is useful for an image forming apparatus such as a printer, a copier, or a fax machine equipped with an optical scanning device, or an optical scanning device such as a scanner, a projector, or a barcode reader. Useful for types of optical scanning devices.

1 Laser printer (image forming device)
30 Optical scanning device 31 1st light source 41 Vibration mirror part 41a Reflecting surface 41b Opposite side surface 41c Rib part (mass adjustment part)
42 Torsion bar
43 Torsion bar section 47 Piezoelectric element (drive section)
50 Housing 55 Reflection mirror (optical element)
56 Light transmission window (optical element)
70 Mass adjustment part 80 Optical element part

Claims (6)

A oscillating mirror portion having a reflecting surface for reflecting light emitted from the first light source and formed long in a predetermined direction, and a direction perpendicular to the longitudinal direction, coupled to the longitudinal central portion of the oscillating mirror portion A torsion bar portion that extends to support the vibration mirror portion, a drive portion that twists and vibrates the vibration mirror portion around the torsion bar portion, and a housing that houses the vibration mirror portion, the torsion bar portion, and the drive portion. An optical scanning device comprising a body,
On the side opposite to the reflecting surface in the vibrating mirror part, a mass adjusting part configured to be able to remove the mass by being irradiated with laser light is formed,
An optical element unit that irradiates the mass adjusting unit by reflecting or transmitting the laser light emitted from the second light source disposed outside the housing;
The optical scanning device, wherein the mass adjusting unit includes a rib portion that is formed in an intermediate portion that is a portion excluding both longitudinal end portions on the opposite side surface of the vibrating mirror portion and extends in the longitudinal direction. The optical scanning device according to claim 1,
The optical scanning device according to claim 1, wherein the optical element unit includes a reflection mirror unit that is provided in the housing and reflects the laser light emitted from the second light source. The optical scanning device according to claim 1,
The optical element unit is an optical scanning device including a light transmission window unit that is formed on a wall of the housing and transmits laser light emitted from the second light source.   An image forming apparatus comprising the optical scanning device according to claim 1. A oscillating mirror portion having a reflecting surface for reflecting light emitted from the first light source and formed long in a predetermined direction, and a direction perpendicular to the longitudinal direction, coupled to the longitudinal central portion of the oscillating mirror portion A torsion bar portion that extends to support the vibration mirror portion, a drive portion that twists and vibrates the vibration mirror portion around the torsion bar portion, and a housing that houses the vibration mirror portion, the torsion bar portion, and the drive portion. A mass adjusting method of the vibrating mirror part of an optical scanning device comprising a body,
On the side opposite to the reflecting surface in the vibrating mirror part, a mass adjusting part configured to be able to remove the mass by being irradiated with laser light is formed,
The mass adjusting portion is formed of a rib portion that is formed in an intermediate portion that is a portion excluding both end portions in the longitudinal direction on the opposite side surface of the vibrating mirror portion and extends in the longitudinal direction,
Laser light is emitted from a second light source arranged outside the casing, and the emitted laser light is reflected or transmitted by the optical element unit to irradiate the mass adjusting unit to adjust the mass. The mass adjustment method including the mass adjustment process which removes the mass of a part. In the mass adjustment method of the vibration mirror part of the optical scanning device according to claim 5,
In the mass adjustment step, when the vibrating mirror part is viewed from the side opposite to the reflecting surface, the mass adjustment part is configured such that the part from which the mass is removed in the mass adjustment part does not reach the periphery of the mass adjustment part. A mass adjustment method, which is a step of irradiating the adjustment unit with laser light.

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