JP5957575B1 - 3D measuring device - Google Patents

Abstract

Provided is a three-dimensional measurement apparatus capable of realizing highly accurate measurement in a shorter time when performing three-dimensional measurement using a phase shift method. A board inspection apparatus (1) includes an illuminating device (4) for irradiating a printed circuit board (2) with a striped light pattern, a camera (5) for imaging a portion irradiated with the light pattern on the printed circuit board (2). And a control device 6 that performs three-dimensional measurement based on image data. The control device 6 calculates the first height measurement value based on the image data obtained by irradiating the first light pattern of the first period at the first position, and calculates the gain and offset from the image data. Get the value. Further, based on the image data obtained by irradiating the second light pattern of the second period at the second position obliquely shifted by the half pixel pitch, the second high value is obtained using the gain and offset values. The measured value is calculated. And the height data specified from the 1st measured value and the 2nd measured value are acquired as true height data. [Selection] Figure 1

Description

  The present invention relates to a three-dimensional measurement apparatus that performs three-dimensional measurement using a phase shift method.

  Generally, when an electronic component is mounted on a printed circuit board, cream solder is first printed on a predetermined electrode pattern disposed on the printed circuit board. Next, an electronic component is temporarily fixed on the printed circuit board based on the viscosity of the cream solder. Thereafter, the printed circuit board is guided to a reflow furnace, and soldering is performed through a predetermined reflow process. In recent years, it is necessary to inspect the printed state of the cream solder in a stage before being led to the reflow furnace, and a three-dimensional measuring device is sometimes used for such inspection.

  In recent years, various so-called non-contact type three-dimensional measuring apparatuses using light have been proposed. For example, a technique related to a three-dimensional measuring apparatus using a phase shift method has been proposed.

  In the three-dimensional measuring device using the phase shift method, a combination of a light source that emits predetermined light and a grating that converts light from the light source into a light pattern having a sinusoidal (stripe) light intensity distribution. The light pattern is irradiated onto the object to be measured (in this case, cream solder printed on the printed circuit board) by the irradiation means. And it observes using the imaging means which has arrange | positioned the point on a board | substrate directly above. As the imaging means, a CCD camera or the like including a lens and an imaging element is used.

  Under the above configuration, the light intensity (luminance) I of each pixel on the image data picked up by the image pickup means is given by the following equation (R1).

I = f · sinφ + e (R1)
Where f: gain, e: offset, and φ: phase of the light pattern.

Here, by controlling the switching of the grating, the phase of the light pattern is changed in, for example, four stages (φ + 0, φ + 90 °, φ + 180 °, φ + 270 °), and intensity distributions I ₀ , I ₁ , I ₂ corresponding thereto. , I ₃ is taken in, f (gain) and e (offset) are canceled based on the following formula (R2), and the phase φ is obtained.

φ = tan ⁻¹ [(I ₁ −I ₃ ) / (I ₂ −I ₀ )] (R2)
Then, using this phase φ, the height (Z) at each coordinate (X, Y) on the object to be measured such as cream solder is obtained based on the principle of triangulation.

  In recent years, the first height data for each pixel is calculated based on the image data obtained by irradiating the first light pattern at the first position, and further, the first height data shifted by a half pixel pitch from there in a predetermined direction. A three-dimensional measurement apparatus that enables more accurate measurement by calculating second height data for each pixel based on image data obtained by irradiating the second light pattern at two positions is also proposed. (For example, refer to Patent Document 1).

JP 2010-169433 A

  However, as described above, in the three-dimensional measurement using the phase shift method, it is necessary to change the phase of the light pattern to be irradiated in four steps (or three steps) and capture four (or three) images. is there.

  Therefore, when measurement is performed at two different positions, first, the first light pattern is irradiated at the first position, the phase is changed in four steps (or three steps), and the four patterns ( (Third or three ways) After imaging, the positional relationship between the imaging means and the object to be measured is changed, the second light pattern is irradiated at the second position, and the phase is changed in four steps (or three steps). Under these conditions, four (or three) images are taken, and four (or three) times are required at each position, for a total of eight times (or six times). There was a risk that time would increase significantly.

  Further, when a large number of measurement target ranges are set on a single printed board, the time required for measurement of the single printed board further increases several times. Therefore, further shortening of the measurement time is required.

  Note that the above-described problem is not limited to the height measurement of cream solder or the like printed on a printed circuit board, but is inherent in the field of other three-dimensional measurement devices.

  The present invention has been made in view of the above circumstances, and an object thereof is to perform three-dimensional measurement capable of realizing higher-precision measurement in a shorter time when performing three-dimensional measurement using the phase shift method. To provide an apparatus.

  Hereinafter, each means suitable for solving the above-described problem will be described separately. In addition, the effect specific to the means to respond | corresponds as needed is added.

Means 1. An irradiating means capable of irradiating an object to be measured with a light pattern having at least a striped light intensity distribution;
Phase control means capable of changing the phase of the light pattern irradiated from the irradiation means in a plurality of ways;
Imaging means capable of imaging reflected light from the object to be measured irradiated with the light pattern;
Displacement means for relatively displacing a positional relationship between the imaging means and the measurement object;
Image processing means capable of performing three-dimensional measurement of the object to be measured by a phase shift method based on image data picked up by the image pickup means;
The image processing means includes
A first measurement value for each pixel is obtained based on the first predetermined number of image data captured by irradiating the first light pattern with a first predetermined number of phases at the first position. Measurement value acquisition means;
Gain offset acquisition means for acquiring a gain and / or offset value relating to each pixel based on the first predetermined number of image data imaged at the first position;
The second predetermined image captured by irradiating a second light pattern with a second predetermined number of phases less than the first predetermined number at a second position shifted from the first position by a half pixel pitch in a predetermined direction. Second measurement value acquisition means for acquiring a second measurement value relating to each pixel using the gain and / or offset value acquired by the gain offset acquisition means based on several types of image data;
Based on the first measurement value and the second measurement value, comprising height data acquisition means capable of acquiring height data relating to each pixel ,
The second measurement value acquisition means includes
A three-dimensional measurement apparatus using the average value of the gain and / or the average value of the offset in a peripheral part of the pixel when acquiring the second measurement value relating to a predetermined pixel .

  According to the means 1, the three-dimensional measurement is performed based on the image data obtained by irradiating the measurement object with the first light pattern at the first position, and the measurement value is acquired as the first measurement value. In addition, three-dimensional measurement is performed based on image data obtained by irradiating the measurement object with the second light pattern at the second position shifted by a half pixel pitch in the predetermined direction from the first position, and the measured value Is acquired as the second measurement value. And the height data specified from the 1st measurement value and the 2nd measurement value is acquired as true height data concerning each pixel.

  Thereby, it is possible to generate high-resolution image data (including image data after image processing such as measurement data in which height data is arranged for each pixel) exceeding the resolution of the imaging means (imaging device), and more Precise three-dimensional measurement can be performed.

  Furthermore, in this means, the measurement at the second position (second light pattern) is performed by using the gain or offset value obtained from the image data captured at the time of measurement at the first position (first light pattern). When performing, the number of images to be captured (number of times of imaging) may be smaller than the number of images to be captured at the first position.

  For example, the first light pattern is irradiated with four phases at the first position and four images are captured, and then the second light pattern is irradiated with one phase at the second position and one image is captured. In this case, the number of times of imaging is 5 times, and the imaging time is significantly reduced.

  Therefore, compared with the case where measurement is simply performed at two different positions, the total number of times of imaging can be reduced, and the imaging time can be shortened. As a result, the measurement time can be dramatically shortened.

Here, as an example of “a second position shifted from the first position by a half pixel pitch in a predetermined direction”, “a position shifted diagonally from the first position by a half pixel pitch” can be cited. According to this configuration, it is possible to obtain image data having a resolution that is four times the resolution of the image sensor by measurement at two locations, measurement at the first position and measurement at the second position. The half-pixel pitch obliquely displaced position is a position displaced by a half pixel in the diagonal direction (oblique direction with respect to the arrangement direction) of the rectangular pixels arranged in a grid pattern in the image data.
In addition, since the image data captured at the first position and the image data captured at the second position are obtained by capturing positions that are shifted from each other by a half pixel pitch, imaging included in both pixels The range (surface of the object to be measured) does not match completely. In addition, the gain and offset values associated with each pixel depend on the characteristics (reflectance, etc.) of the surface of the measurement object included in the range of the pixel. Therefore, there is a possibility that the gain and offset values related to the predetermined pixel acquired based on the image data captured at the first position are not optimal for acquiring the second measurement value related to the pixel.
On the other hand, according to the above-mentioned means 1, when acquiring the second measurement value relating to the predetermined pixel, the average value of the gain and offset in the peripheral part of the pixel is used. It is possible to acquire a second measured value.

Mean 2. The irradiation means is configured to be able to irradiate the object to be measured by switching a plurality of light patterns having different periods (stripe pitch).
Irradiating a first light pattern of a first period at the first position;
2. The three-dimensional measurement apparatus according to claim 1, wherein a second light pattern having a second period different from the first period is irradiated at the second position.

  Some actual measured objects are high and some are low. For example, when it comes to cream solder, there is a thin film type, and there are some that protrude in the shape of a truncated cone. And if the period (stripe pitch) of the light pattern to irradiate is widened according to the maximum height among these objects to be measured, the resolution becomes coarse and the measurement accuracy may be deteriorated. On the other hand, although the accuracy can be improved by narrowing the period of the light pattern, there is a risk that the measurement range in which the height can be measured will be insufficient (the fringe order will be different). .

  On the other hand, according to the means 2, the height data acquisition means obtains one measurement value (for example, the second measurement value) obtained by, for example, one light pattern having a long cycle (for example, the second light pattern). Based on the other measurement value (for example, the first measurement value) obtained by the other light pattern (for example, the first light pattern) having a short period, the other measurement value is By replacing with a value considering the fringe order (data replacement means), it is possible to obtain the true height data relating to each pixel.

  This makes it possible to increase the measurable height range, which is an advantage of using a light pattern with a long period, and to realize high-precision measurement with high resolution, which is an advantage of using an optical pattern with a short period. An effect can be obtained. As a result, high-resolution measurement can be performed in a wide measurement range, and more accurate measurement can be realized.

Means 3 . When the second predetermined number is 1, the second measurement value acquisition unit obtains the phase θ of the second light pattern that satisfies at least the relationship of the following formula (S1) when acquiring the second measurement value. The three-dimensional measuring apparatus according to means 1 or 2 , characterized by calculating.

V ₀ = Asinθ + B (S1)
However, V ₀ : Luminance value, A: Gain, B: Offset.

According to the means 3 , since the number of times of imaging at the second position is only one, the effect of the means 1 and the like is more effective.

  When the above formula (S1) is arranged with respect to “sin θ”, the following formula (S2) is obtained.

sin θ = (V ₀ −B) / A (S2)
Here, when the above equation (S2) is solved for the phase θ, the following equation (S3) can be derived.

θ = sin ⁻¹ {(V ₀ −B) / A} (S3)
Thus, the phase θ can be specified by the known luminance value V ₀ acquired by the second light pattern and the known gain A and offset B acquired by the first light pattern.

Means 4 . When the second predetermined number is 2, the second measurement value acquisition unit satisfies the relationship of at least the following formulas (T1) and (T2) when acquiring the second measurement value. The three-dimensional measuring device according to claim 1 or 2 , characterized in that the phase θ of is calculated.

V ₀ = Asinθ + B (T1)
V ₁ = Asin (θ + 90 °) + B (T2)
However, V ₀ , V ₁ : Two kinds of brightness values of image data, A: gain, B: offset.

  According to the means 5, since it is only necessary to perform imaging twice under the two second light patterns whose phases are different by 90 °, the operational effects of the means 1 and the like are more effective.

  The following formula (T3) is derived from the above formula (T2).

V ₁ = Asin (θ + 90 °) + B
= Acosθ + B (T3)
When the above equation (T3) is arranged with respect to “cos θ”, the following equation (T4) is obtained.

cos θ = (V ₁ −B) / A (T4)
Further, when the above formula (T1) is arranged with respect to “sin θ”, the following formula (T5) is obtained.

sin θ = (V ₀ −B) / A (T5)
Next, when the above formulas (T4) and (T5) are substituted into the following formula (T6), the following formula (T7) is derived.

tanθ = sinθ / cosθ (T6)
= {(V ₀ -B) / A} / {(V ₁ -B) / A}
= (V ₀ -B) / (V ₁ -B) (T7)
Here, when the above equation (T7) is solved for the phase θ, the following equation (T8) can be derived.

θ = tan ⁻¹ {(V ₀ −B) / (V ₁ −B)} (T8)
Thus, the phase θ can be specified by the known luminance values V ₀ and V ₁ acquired by the second light pattern and the known offset B acquired by the first light pattern.

Further, according to the above means 4 , since the phase θ can be obtained based on an arithmetic expression using “tan ⁻¹ ”, the height can be measured in the range of 360 ° from −180 ° to 180 °. The range can be increased.

Means 5 . The three-dimensional measuring apparatus according to any one of means 1 to 4 , wherein the object to be measured is cream solder printed on a printed circuit board or solder bumps formed on a wafer substrate.

  According to the means 5, the height of the cream solder printed on the printed circuit board or the solder bump formed on the wafer substrate can be measured. As a result, in the inspection of cream solder or solder bumps, the quality of cream solder or solder bumps can be determined based on the measured values. Therefore, in such an inspection, the effect of each means described above is exhibited, and the quality determination can be performed with high accuracy. As a result, it is possible to improve the inspection accuracy in the solder printing inspection apparatus or the solder bump inspection apparatus.

It is a schematic block diagram which shows a board | substrate inspection apparatus typically. It is a block diagram which shows the electric constitution of a board | substrate inspection apparatus. It is explanatory drawing which shows the resolution etc. by each light pattern. (A), (b) is a schematic diagram which shows the data arrangement | sequence of the measured height measurement value. It is a schematic diagram which shows the data arrangement | sequence of the 1st height measurement value and the 2nd height measurement value which were synthesize | combined. It is explanatory drawing which shows the specific example of a data replacement process. It is explanatory drawing which shows the specific example of a correction process. It is explanatory drawing which shows the specific example of an interpolation process. It is explanatory drawing which shows the precision of the various height data with respect to a true value. It is a schematic diagram which shows the data arrangement | sequence of the 1st-4th height measurement value synthesize | combined which concerns on 2nd Embodiment. It is explanatory drawing which shows the specific example of the data replacement process which concerns on 2nd Embodiment. It is explanatory drawing which shows the specific example of the correction process which concerns on 2nd Embodiment. It is explanatory drawing which shows the precision of the various height data with respect to the true value which concerns on 2nd Embodiment. In another embodiment, it is explanatory drawing for demonstrating the relationship between the pixel used as a measuring object, and the gain and offset utilized when calculating | requiring a measured value.

[First Embodiment]
Hereinafter, an embodiment will be described with reference to the drawings. FIG. 1 is a schematic configuration diagram schematically illustrating a substrate inspection apparatus 1 including a three-dimensional measurement apparatus according to the present embodiment. As shown in the figure, the substrate inspection apparatus 1 includes a mounting table 3 for mounting a printed circuit board 2 on which cream solder as an object to be measured is printed, and a predetermined angle from above on the surface of the printed circuit board 2. Illumination device 4 as an irradiating means for irradiating a light pattern, a camera 5 as an imaging means for imaging a portion irradiated with a light pattern on printed circuit board 2, and various controls and images in substrate inspection apparatus 1 And a control device 6 for performing processing and arithmetic processing.

  The mounting table 3 is provided with motors 15 and 16 as displacement means. The motors 15 and 16 are driven and controlled by the control device 6 (motor control means 23), so that the mounting table 3 is mounted on the mounting table 3. The printed board 2 is slid in any direction (X-axis direction and Y-axis direction).

  The illumination device 4 includes a light source 4a that emits predetermined light, and a liquid crystal lattice 4b that converts light from the light source 4a into a light pattern having a sinusoidal (stripe) light intensity distribution. On the other hand, it is possible to irradiate a striped light pattern whose phase changes in a plurality of ways from obliquely above.

  More specifically, the light emitted from the light source 4a is guided to a pair of condensing lenses by an optical fiber, and is converted into parallel light there. The parallel light is guided to the projection lens through the liquid crystal grating 4b. Then, a striped light pattern is irradiated onto the printed circuit board 2 from the projection lens.

  In the present embodiment, the light pattern is set to be irradiated along the X-axis direction in parallel with the pair of sides of the rectangular printed board 2. That is, the stripes of the light pattern are irradiated perpendicular to the X-axis direction and parallel to the Y-axis direction.

  The liquid crystal lattice 4b includes a liquid crystal layer formed between a pair of transparent substrates, a common electrode disposed on one transparent substrate, and a plurality of strips arranged in parallel on the other transparent substrate so as to face the common electrode. Each of the grids corresponding to each band electrode by controlling on and off the switching elements (thin film transistors, etc.) connected to each band electrode by a drive circuit and controlling the voltage applied to each band electrode. The light transmittance of the line is switched to form a striped lattice pattern composed of a “bright portion” having a high light transmittance and a “dark portion” having a low light transmittance. And the light irradiated on the printed circuit board 2 via the liquid crystal grating 4b becomes a light pattern having a sinusoidal light intensity distribution due to blur caused by diffraction action or the like.

  The illumination device 4 is configured to be able to irradiate by switching a plurality of types of light patterns having different periods (stripe pitch). In this embodiment, two types of light patterns, a first light pattern with a period of 10 μm (height resolution of 2 μm) and a second light pattern with a period of 20 μm (height resolution of 4 μm) are switched and irradiated. Here, “10 μm” corresponds to the “first period”, and “20 μm” corresponds to the “second period”.

  More specifically, the liquid crystal lattice 4b is controlled, for example, a sinusoidal wave shape having a width of four lattice lines (a “bright portion” of two lattice lines and a “dark portion” of two lattice lines) as one cycle. By generating the light pattern, it is possible to irradiate the first light pattern with a period of 10 μm.

  On the other hand, by generating a sinusoidal light pattern with a width of 8 lattice lines (a “bright portion” of 4 lattice lines and a “dark portion” of 4 lattice lines) as one cycle, a period of 20 μm is generated. The second light pattern can be irradiated.

  Accordingly, depending on the first light pattern, as shown in FIG. 3, for example, “0 ± 1 (μm)”, “2 ± 1 (μm)”, “4 ± 1 (μm)”, and so on. In addition, the height within the range of 0 μm to 10 μm (where 10 μm corresponds to 0 μm in the stripe order above one) is obtained with an accuracy of error range ± 1 (μm) in increments of “2 (μm)”. It can be measured. On the other hand, depending on the second light pattern, for example, “0 ± 2 (μm)”, “4 ± 2 (μm)”, “8 ± 2 (μm)”, etc., within the range of 0 μm to 20 μm. Can be measured with an accuracy of an error range of ± 2 (μm) in increments of “4 (μm)”.

  The camera 5 includes a lens, an image sensor, and the like. A CMOS sensor is used as the image sensor. Of course, the imaging device is not limited to this, and a CCD sensor or the like may be employed, for example. The camera 5 of the present embodiment generates an image having a resolution of, for example, 512 pixels in the X-axis direction and 480 pixels in the Y-axis direction. Of course, the horizontal resolution is not limited to this.

  Image data captured by the camera 5 is converted into a digital signal inside the camera 5 and then input to the control device 6 (image data storage means 24) in the form of a digital signal. Then, the control device 6 performs image processing, inspection processing, and the like, which will be described later, based on the image data. In this sense, the control device 6 constitutes image processing means.

  Next, the electrical configuration of the control device 6 will be described. As shown in FIG. 2, the control device 6 includes a camera control unit 21 that controls the imaging timing of the camera 5, an illumination control unit 22 that controls the illumination device 4, and a motor control unit 23 that controls the motors 15 and 16. Image data storage means 24 for storing image data (luminance data) picked up by the camera 5, and gain / offset storage means 25 for storing gain A and offset B values calculated later based on the image data. Three-dimensional measurement means 26 for performing three-dimensional measurement based on at least the image data, a measurement value storage means 27 for storing the measurement result of the three-dimensional measurement means 26, and the measurement value storage means 27. Height data acquisition means 28 for acquiring true height data (absolute height data) based on the measurement value, and based on the height data obtained by the height data acquisition means 28 And a determination unit 30 for checking the print status of the ream solder 4. The phase control means in this embodiment is constituted by the illumination control means 22 that controls the illumination device 4 (liquid crystal grating 4b).

  Although not shown in the drawings, the board inspection apparatus 1 includes an input unit composed of a keyboard and a touch panel, a display unit having a display screen such as a CRT or a liquid crystal, a storage unit for storing inspection results, and a solder printer. Output means for outputting inspection results and the like.

  Next, a procedure for inspecting the printed circuit board 2 by the substrate inspection apparatus 1 will be described in detail based on an inspection routine performed for each inspection area. This inspection routine is executed by the control device 6.

  The control device 6 (motor control means 23) first drives and controls the motors 15 and 16 to move the printed circuit board 2, and adjusts the field of view of the camera 5 to the first position of a predetermined inspection area on the printed circuit board 2. The inspection area is one area in which the surface of the printed circuit board 2 is divided in advance with the size of the field of view of the camera 5 as one unit.

  Subsequently, the control device 6 (illumination control means 22) switches and controls the liquid crystal grating 4b of the illumination device 4, and the mode of the grating formed in the liquid crystal grating 4b corresponds to the period (stripe pitch) of the first light pattern. In addition, the position of the grating is adjusted to a predetermined reference position (phase “0 °”).

  When the switching setting of the liquid crystal lattice 4b is completed, the control device 6 (illumination control means 22) causes the light source 4a of the illumination device 4 to emit light, starts irradiation of the first light pattern, and changes the phase of the first light pattern. The phase is sequentially shifted by 90 ° to four phases (phase “0 °”, phase “90 °”, phase “180 °”, phase “270 °”).

  The control device 6 (camera control means 21) drives and controls the camera 5 every time the phase of the first light pattern is sequentially shifted, and the inspection area portion (first position) irradiated with the first light pattern. ). Accordingly, four types of image data captured under the first light pattern with the phase shifted by 90 ° with respect to the first position of the predetermined inspection area are acquired. Here, the image data captured by the camera 5 is transferred to and stored in the image data storage device 24.

And the control apparatus 6 (three-dimensional measuring means 26) calculates phase (theta) ₁ of the 1st light pattern which concerns on each pixel from said 4 types of image data (luminance value) by a phase shift method.

Here, the luminance values V ₁₀ , V ₁₁ , V ₁₂ , and V ₁₃ relating to the respective pixels of the four types of image data are represented by the following formulas (H1), (H2), (H3), and (H4). it can.

When the above equations (H1), (H2), (H3), and (H4) are solved for the phase θ ₁ , the following equation (H5) can be derived.

Then, using the phase θ ₁ calculated as described above, a first height measurement value (first measurement value) for each pixel is calculated based on the principle of triangulation, and the first height is calculated. The measured value is stored in the measured value storage means 27. Accordingly, the series of processing functions constitute the first measurement value acquisition means in the present embodiment.

  Next, the gain A and the offset B relating to each pixel are specified from the above-described four types of image data captured under the first light pattern at the first position. Such processing functions constitute the gain offset acquisition means in the present embodiment. However, the gain A and offset B calculation processing is performed in parallel with the first height measurement value calculation processing after obtaining the four types of image data.

Here, the procedure for calculating the gain A and the offset B will be described in more detail. The relationship between the luminance values V ₁₀ , V ₁₁ , V ₁₂ , and V ₁₃ related to each pixel of the four types of image data, the gain A, and the offset B are as shown in the above equations (H1) to (H4).

Here, the luminance values V ₁₀ , V ₁₁ , V ₁₂ , and V ₁₃ of the four types of image data are added, and the above formulas (H1) to (H4) are arranged as shown in the following [Equation 3]. (H6) can be derived.

  Further, the following formula (H7) can be derived from the above formulas (H1) and (H3).

  Moreover, the following formula (H8) can be derived from the above formulas (H2) and (H4).

  Then, as shown in [Equation 6] below, when the above formulas (H7) and (H8) are substituted into the following formula (H9) and rearranged, the following formula (H10) can be derived.

  The gain A and the offset B relating to each pixel calculated in this way are stored in the gain / offset storage means 25.

  Then, after the end of a series of imaging processes related to the first light pattern, that is, while the calculation process of the first height measurement value and the calculation process of the gain A and the offset B are performed, the control device 6 (motor control means 23) drives and controls the motors 15 and 16 to move the printed circuit board 2 obliquely by a half pixel pitch from the first position, so that the field of view of the camera 5 is a predetermined inspection area on the printed circuit board 2. Set to the second position. Note that each pixel in the present embodiment has a square shape having sides parallel to the X-axis direction and the Y-axis direction. In other words, moving diagonally by half pixel pitch means moving the pixel by a half of the diagonal distance in the diagonal direction of the pixel.

  At the same time, the control device 6 (illumination control means 22) switches and controls the liquid crystal lattice 4b of the illumination device 4, and the form of the lattice formed in the liquid crystal lattice 4b corresponds to the period (stripe pitch) of the second light pattern. In addition, the position of the grating is set to a predetermined reference position (phase “0 °”).

  When the alignment of the printed circuit board 2 and the switching setting of the illumination device 4 are completed, the control device 6 starts an imaging process related to the second light pattern.

  More specifically, the control device 6 causes the light source 4a of the illumination device 4 to emit light by the illumination control means 22, starts irradiation of the second light pattern, and drives and controls the camera 5 by the camera control means 21, thereby The inspection area portion (second position) irradiated with the two light patterns is imaged. Here, the image data captured by the camera 5 is transferred to and stored in the image data storage device 24.

  Note that the imaging process related to the second light pattern in the present embodiment is performed only once under the second light pattern having the phase “0 °”. That is, in the present embodiment, only one type of image data captured under the second light pattern with the phase “0 °” is acquired for the second position of the predetermined inspection area.

Then, the control device 6 (three-dimensional measuring means 26) stores one set of image data (luminance value) imaged under the second light pattern at the second position and the gain / offset storage means 25. Based on the values of the gain A and the offset B, the phase θ ₂ of the second light pattern related to each pixel is calculated.

Here, the luminance value V ₂₀ relating to each pixel of the one type of image data can be expressed by the following equation (H11).

When the above equation (H11) is solved for the phase θ ₂ , the following equation (H12) can be derived.

  However, in this embodiment, the values of the gain A and the offset B acquired at the same coordinate position (same pixel) of the image sensor are used here.

Then, using the phase θ ₂ calculated as described above, a second height measurement value (second measurement value) for each pixel is calculated based on the principle of triangulation, and the second height is calculated. The measured value is stored in the measured value storage means 27. Therefore, the series of processing functions constitute the second measurement value acquisition unit in the present embodiment.

  Next, the control device 6 (height data acquisition means 28) acquires the true height data of the entire inspection area based on the first measurement value and the second measurement value stored in the measurement value storage means 27. To do.

  First, the control device 6 (height data acquisition means 28) obtains the measurement result (first height measurement value) obtained at the first position and the measurement result (second height measurement) obtained at the second position. Value) are combined, and image processing is performed to combine them as one measurement result of the inspection area. By this processing, a measurement result equivalent to that obtained by imaging with an imaging means having a resolution four times that of the camera 5 can be obtained. The image processing will be described in detail below.

Here, it is assumed that the resolution of the camera 5 is 4 × 4 pixels per imaging field of view. In this case, as the measurement result obtained at the first position, the first height measurement values N _{1 to} N ₁₆ for each pixel are stored as shown in FIG. Similarly, as the measurement result obtained at the second position, the second height measurement values M _{1 to} M ₁₆ for each pixel are stored as shown in FIG. 4B. 4A and 4B are diagrams schematically showing the data arrangement (the same applies to FIGS. 5 to 8).

In this case, in the synthesis process, first, as shown in FIG. 5, the first height measurement values N _{1 to} N ₁₆ and the second height measurement values M _{1 to} M ₁₆ are checked on the 8 × 8 squares. Create data arranged in a pattern. Note that the blank portion in FIG. 5 is a missing data portion at this stage. For the sake of clarity, FIG. 5 has a checkered pattern with a dotted pattern for convenience (the same applies to FIGS. 6 to 8).

Then, with respect to the first height measurement value N ₁ to N _16, performs data replacement processing for replacing the value of the first height measurement value N ₁ to N ₁₆ to a value based on the fringe order. This processing constitutes the function of the data replacement means in this embodiment.

More specifically, as shown in FIG. 6, for example, attention is paid to the first height measurement value N ₆ surrounded by a thick frame in the figure, and here, “4” obtained by the measurement at the first position is shown. The value is stored. Further, the four surrounding second height measurement values M ₆ , M ₇ , M ₁₀ , and M ₁₁ adjacent to the first height measurement value N ₆ are “16”, “12”, and “16”, respectively. "," 12 "are stored. Although only these values are described in FIG. 6, actually, various height measurement values are stored in other positions in the same manner as these (see FIGS. 7 and 8). The same).

  As is clear from the table of FIG. 3, when the value obtained as the first height measurement value is “4 (± 1) μm”, the true value of the cream solder (measured coordinates) depends on the stripe order. The height candidate is “4 (± 1) μm” or “14 (± 1) μm”. That is, if the fringe order is 1, the actual height is “4 (± 1) μm”, and if the fringe order is 2, the actual height is “14 (± 1) μm”. It is supposed to be. In the present embodiment, for convenience of explanation, it is assumed that there is no case where the height of the cream solder (measured coordinates) exceeds 20 μm.

When the data replacement process is performed among the candidate values “4” or “14”, the second height measurement values M ₆ and M ₇ around the first height measurement value N ₆ are used. , M ₁₀ , M ₁₁ average [(16 + 12 + 16 + 12) / 4 = 14] is adopted as the optimum value. That is, the fringe order of the phase shift method is specified. Then, the value of the first height measurement value N ₆ is replaced with a value “14” considering the fringe order. The above process is similarly performed for each of the first height measurement values N _{1 to} N ₁₆ .

Next, correction processing for correcting the second height measurement values M _{1 to} M ₁₆ is performed based on the _first height measurement values N _{1 to} N ₁₆ in consideration of the fringe order. This process constitutes the function of the correction means in this embodiment.

More specifically, as shown in FIG. 7, for example, attention is paid to the second height measurement value M ₁₁ surrounded by a thick frame in the figure, and here, “12” obtained by the measurement at the second position. The value is stored. The four first height measurement values N ₆ , N ₇ , N ₁₀ , and N ₁₁ adjacent to the second height measurement value M ₁₁ include the value “14”, “12”, “14”, and “12” are stored.

First, an average value [(14 + 12 + 14 + 12) / 4 = 13] of the four first height measurement values N ₆ , N ₇ , N ₁₀ , and N ₁₁ is calculated. Then, it is determined whether or not the value of the second height measurement value M ₁₁ is within an error range of “± 2” from the average value.

Here, when it is determined that it is within the error range of “± 2”, the cream solder (coordinate to be measured) corresponding to the second height measurement value M ₁₁ and the shape in the vicinity thereof are relatively gentle. The average value of the first height measurement values N ₆ , N ₇ , N ₁₀ , and N ₁₁ is adopted as the optimum value of the second height measurement value M _11. .

On the other hand, when it is determined that it is not within the error range of “± 2”, the cream solder (coordinate to be measured) corresponding to the second height measurement value M ₁₁ and the shape in the vicinity thereof are relatively uneven. estimate that a violent discontinuous shape, employing the value of the second height measurement value M ₁₁ is a measured data as it is to the optimum value.

  Next, a data interpolation process for interpolating the data of the data missing part (blank part in FIG. 5) is performed. This processing constitutes the function of the interpolation means in this embodiment.

In the data interpolation processing, for example, as shown in FIG. 8, the first height measurement values N _{1 to} N ₁₆ after the replacement processing arranged adjacent to the periphery of the predetermined data missing portion, or the first height after the correction processing. An average value is calculated based on each data of the height measurement values M _{1 to} B ₁₆ of 2, and is adopted as an interpolation value of the data missing portion.

  When the series of processes is completed, measurement data having the same accuracy as the measurement data obtained from the captured image data of 8 × 8 pixels is completed for the entire imaging field (inspection area).

  Then, the control device 6 (determination means 30) sets the cream solder printing range higher than the reference surface based on the measurement data (true height data relating to each pixel) of the inspection area thus obtained. By detecting and integrating the height of each part within this range, the amount of printed cream solder is calculated.

  Subsequently, the control device 6 (determination means 30) compares and determines the data such as the position, area, height or quantity of the cream solder thus obtained with reference data stored in advance, and the comparison result is acceptable. Whether the printed state of the cream solder in the inspection area is good or bad is determined depending on whether or not it is within the range.

  While such processing is being performed, the control device 6 drives and controls the motors 15 and 16 to move the printed circuit board 2 to the next inspection area. Thereafter, the above series of processing is performed in all inspection areas. By being repeatedly performed, the inspection of the entire printed circuit board 2 is completed.

  As described above in detail, according to the present embodiment, the three-dimensional measurement is performed based on the image data obtained by irradiating the printed circuit board 2 with the first light pattern having the first period (period 10 μm) at the first position. The measurement value is acquired as the first measurement value, and the second light pattern having the second period (cycle 20 μm) is printed at the second position obliquely shifted from the first position by a half pixel pitch. The three-dimensional measurement is performed based on the image data obtained by irradiating and the measurement value is acquired as the second measurement value. And the height data specified from the 1st measured value and the 2nd measured value are acquired as true height data. Thereby, image data (measurement data) having a resolution four times the resolution of the camera 5 can be generated, and more precise three-dimensional measurement can be performed.

  Furthermore, in the present embodiment, measurement is performed at the second position (second light pattern) by using gain and offset values obtained from image data captured at the time of measurement at the first position (first light pattern). When performing the above, the number of images to be captured (number of times of capturing) may be smaller than the number of images to be captured at the first position.

  Furthermore, in the present embodiment, the second light is used when measuring with the second light pattern by using the values of the gain A and the offset B obtained from the image data captured during the measurement with the first light pattern. The number of images to be imaged under the pattern (number of imaging times) may be smaller than the number of images to be imaged under the first light pattern.

  Specifically, the first light pattern is irradiated with four phases at the first position, four images are captured, and then the second light pattern is irradiated with one phase at the second position. When the above image is captured, the number of times of imaging is five times, and the imaging time is significantly reduced.

  Therefore, compared with the case where measurement is simply performed at two different positions, the total number of times of imaging can be reduced, and the imaging time can be shortened. As a result, the measurement time can be dramatically shortened.

  In addition, in this embodiment, based on the second height measurement value obtained by the second light pattern having a long cycle (cycle 20 μm), the first light pattern obtained by the first light pattern having a short cycle (cycle 10 μm). The fringe order of the height measurement value of 1 is specified. And the true height data concerning each pixel can be acquired by replacing the first height measurement value with an appropriate value in consideration of the fringe order.

  This makes it possible to increase the measurable height range, which is the merit of using the second light pattern with a long period, and realizes high-precision measurement with high resolution, which is the merit of using the first light pattern with a short period. Both effects can be obtained. As a result, as shown in FIG. 9, high-resolution measurement can be performed in a wide measurement range, and more accurate measurement can be realized.

  Further, in the present embodiment, based on each data of the first height measurement value after the replacement process and the second height measurement value after the correction process arranged adjacent to the periphery of the predetermined data missing part. In this configuration, an average value is calculated, and data interpolation processing is employed as an interpolation value for the data missing portion. For this reason, when the high-resolution data is created by synthesizing the first height measurement value and the second height measurement value, it is possible to prevent the occurrence of a defect such as a missing data portion.

  In the present embodiment, correction processing for correcting the second height measurement value is performed based on the first height measurement value with higher accuracy in consideration of the fringe order. Thereby, the value of the second height measurement value can be made closer to the true value.

[Second Embodiment]
Next, a second embodiment will be described. However, the description of the same parts as those in the first embodiment described above will be omitted by using the same member names and the same reference numerals, and the description below will focus on the parts that are different from the first embodiment. I decided to.

  In the three-dimensional measurement in the present embodiment, the control device 6 first drives and controls the motors 15 and 16 to move the printed circuit board 2 so that the field of view of the camera 5 is set to the first position of a predetermined inspection area on the printed circuit board 2. Match.

  Subsequently, the control device 6 switches and controls the liquid crystal lattice 4b of the illumination device 4, and sets the aspect of the lattice formed in the liquid crystal lattice 4b to correspond to the period (stripe pitch) of the first light pattern. The position of the grating is adjusted to a predetermined reference position (phase “0 °”).

  When the switching setting of the liquid crystal lattice 4b is completed, the control device 6 causes the light source 4a of the illumination device 4 to emit light, starts irradiation of the first light pattern, and sets the phase of the first light pattern by 90 ° in four ways. (Phase “0 °”, phase “90 °”, phase “180 °”, phase “270 °”).

  Then, each time the phase of the first light pattern is sequentially shifted, the control device 6 captures the inspection area portion (first position) irradiated with the first light pattern and acquires four types of image data. .

The control device 6 calculates the phase θ ₁ of the first light pattern relating to each pixel from the above four image data (luminance values) by the phase shift method.

Then, using the phase θ ₁ calculated as described above, a first height measurement value for each pixel is calculated based on the principle of triangulation, and the first height measurement value is measured value storage means. 27.

  At the same time, the gain A and the offset B relating to each pixel are specified from the above four image data, and stored in the gain / offset storage means 25.

  While such processing is being performed, the control device 6 drives and controls the motors 15 and 16 to move the printed circuit board 2 to a position shifted by a half pixel pitch in the X-axis direction from the first position. The visual field is adjusted to the second position of a predetermined inspection area on the printed circuit board 2.

  At the same time, the control device 6 switches and controls the liquid crystal lattice 4b of the illumination device 4, sets the aspect of the lattice formed in the liquid crystal lattice 4b to one corresponding to the period (stripe pitch) of the second light pattern, The position of the grating is adjusted to a predetermined reference position (phase “0 °”).

  When the alignment of the printed circuit board 2 and the switching setting of the illumination device 4 are completed, the control device 6 starts an imaging process related to the second light pattern.

  More specifically, the control device 6 causes the light source 4a of the illumination device 4 to emit light by the illumination control means 22, starts irradiation of the second light pattern, and drives and controls the camera 5 by the camera control means 21, thereby The inspection area portion (second position) irradiated with the two light patterns is imaged. Here, the image data captured by the camera 5 is transferred to and stored in the image data storage device 24.

  Note that the imaging process related to the second light pattern performed at the second position is only performed once under the second light pattern having the phase “0 °”. That is, in the present embodiment, only one type of image data captured under the second light pattern with the phase “0 °” is acquired for the second position of the predetermined inspection area.

Then, the control device 6 sets one set of image data (luminance value) captured under the second light pattern at the second position, and the values of the gain A and the offset B stored in the gain / offset storage unit 25. Is used to calculate the phase θ ₂ of the second light pattern for each pixel.

Subsequently, using the phase θ ₂ calculated as described above, a second height measurement value for each pixel is calculated based on the principle of triangulation, and the second height measurement value is stored as a measurement value. Store in the means 27.

  While this processing is being performed, the control device 6 controls the motors 15 and 16 to drive the printed circuit board 2 obliquely by a half pixel pitch from the first position (Y-axis direction from the second position). To the third position of the predetermined inspection area on the printed circuit board 2.

  At the same time, the control device 6 switches and controls the liquid crystal lattice 4b of the illumination device 4, sets the aspect of the lattice formed in the liquid crystal lattice 4b to one corresponding to the period (stripe pitch) of the first light pattern, The position of the grating is adjusted to a predetermined reference position (phase “0 °”).

  When the alignment of the printed circuit board 2 and the switching setting of the illumination device 4 are completed, the control device 6 starts an imaging process related to the first light pattern.

  More specifically, the control device 6 causes the light source 4a of the illumination device 4 to emit light by the illumination control means 22, starts the irradiation of the first light pattern, and drives and controls the camera 5 by the camera control means 21, thereby The inspection area portion (third position) irradiated with one light pattern is imaged. Here, the image data captured by the camera 5 is transferred to and stored in the image data storage device 24.

  Note that the imaging process related to the first light pattern performed at the third position is only performed once under the first light pattern having the phase “0 °”. That is, in the present embodiment, only one type of image data captured under the first light pattern with the phase “0 °” is acquired for the third position of the predetermined inspection area.

Then, the control device 6 sets one set of image data (luminance value) imaged under the first light pattern at the third position and the values of the gain A and the offset B stored in the gain / offset storage means 25. Is used to calculate the phase θ ₃ of the first light pattern for each pixel.

Subsequently, using the phase θ ₃ calculated as described above, a third height measurement value for each pixel is calculated based on the principle of triangulation, and the third height measurement value is measured value storage means 27. To remember.

  While this processing is being performed, the control device 6 controls the motors 15 and 16 to drive the printed circuit board 2 at a position shifted by a half pixel pitch in the Y-axis direction from the first position (X from the third position). The position of the camera 5 is adjusted to the fourth position of a predetermined inspection area on the printed circuit board 2.

  At the same time, the control device 6 switches and controls the liquid crystal lattice 4b of the illumination device 4, sets the aspect of the lattice formed in the liquid crystal lattice 4b to one corresponding to the period (stripe pitch) of the second light pattern, The position of the grating is adjusted to a predetermined reference position (phase “0 °”).

  When the alignment of the printed circuit board 2 and the switching setting of the illumination device 4 are completed, the control device 6 starts an imaging process related to the second light pattern.

  More specifically, the control device 6 causes the light source 4a of the illumination device 4 to emit light by the illumination control means 22, starts irradiation of the second light pattern, and drives and controls the camera 5 by the camera control means 21, thereby The inspection area portion (fourth position) irradiated with the two-light pattern is imaged. Here, the image data captured by the camera 5 is transferred to and stored in the image data storage device 24.

  Note that the imaging process related to the second light pattern performed at the fourth position is only performed once under the second light pattern having the phase “0 °”. That is, in the present embodiment, only one type of image data captured under the second light pattern with the phase “0 °” is acquired for the fourth position of the predetermined inspection area.

Then, the control device 6 sets one set of image data (luminance value) imaged under the second light pattern at the fourth position, and the values of the gain A and the offset B stored in the gain / offset storage unit 25. Is used to calculate the phase θ ₄ of the second light pattern for each pixel.

Subsequently, using the phase θ ₄ calculated as described above, a fourth height measurement value for each pixel is calculated based on the principle of triangulation, and the fourth height measurement value is stored in the measurement value storage unit 27. To remember.

  Next, the control device 6 determines the true height of the entire inspection area based on the first measurement value, the second measurement value, the third measurement value, and the fourth measurement value stored in the measurement value storage unit 27. Get the data.

  First, the control device 6 obtains the measurement result (first height measurement value) obtained at the first position, the measurement result (second height measurement value) obtained at the second position, and the third position. The obtained measurement result (third height measurement value) and the measurement result (fourth height measurement value) obtained at the fourth position are combined, and image processing is performed to combine them as one measurement result of the inspection area. By this processing, a measurement result equivalent to that obtained by imaging with an imaging means having a resolution four times that of the camera 5 can be obtained. The image processing will be described in detail below.

Here, it is assumed that the resolution of the camera 5 is 4 × 4 pixels per imaging field of view. In such a case, in the synthesis process, first, as shown in FIG. 10, the first height measurement values C _{1 to} C ₁₆ and the second height measurement for each pixel obtained at the first to fourth positions. Data in which the values D _{1 to} D ₁₆ , the third height measurement values E _{1 to} E ₁₆ , and the fourth height measurement values F _{1 to} F ₁₆ are arranged on the 8 × 8 square is created. For the sake of clarity, FIG. 10 has a checkered pattern with a dotted pattern for convenience (the same applies to FIGS. 11 and 12).

Subsequently, the first height measurement values C _{1 to} C ₁₆ and the third height measurement values E _{1 to} E _{16 are} related to the first height measurement values C _{1 to} C ₁₆ and the third height measurement. Data replacement processing is performed in which the values E _{1 to} E ₁₆ are replaced with values in consideration of the stripe order.

More specifically, as shown in FIG. 11, for example, attention is paid to the first height measurement value C ₆ surrounded by a thick frame in the figure, and here, “4” obtained by the measurement at the first position is shown. The value is stored. Further, the second height measurement values D ₅ and D ₆ and the fourth height measurement values F ₂ and F ₆ adjacent to the first height measurement value C ₆ are respectively “16” and “ “12”, “12”, and “16” are stored. Although only these values are described in FIG. 11, actually, various height measurement values are also stored at other positions in the same manner as these (the same applies to FIG. 12). .

  Similar to the above embodiment, when the value obtained as the first height measurement value is “4 (± 1) μm”, the candidate for the true height of the cream solder (coordinate to be measured) due to the difference in the stripe order is , “4 (± 1) μm” or “14 (± 1) μm”. That is, if the fringe order is 1, the actual height is “4 (± 1) μm”, and if the fringe order is 2, the actual height is “14 (± 1) μm”. It is supposed to be.

When the data replacement process is performed among the candidate values “4” or “14”, the second height measurement values D ₅ and D ₆ around the first height measurement value C ₆ are used. A value closer to the average [(16 + 12 + 12 + 16) / 4 = 14] of the fourth height measurement values F ₂ and F ₆ is adopted as the optimum value. That is, the fringe order of the phase shift method is specified. Then, the value of the first height measurement value C ₆ is replaced with a value “14” considering the fringe order. The above process is similarly performed for each of the first height measurement values C _{1 to} C ₁₆ and the third height measurement values E _{1 to} E ₁₆ .

Next, the second height measurement values D _{1 to} D are based on the first height measurement values C _{1 to} C ₁₆ and the third height measurement values E _{1 to} E ₁₆ in consideration of the fringe order. Correction processing for correcting ₁₆ and the fourth height measurement values F _{1 to} F ₁₆ is performed.

More specifically, as shown in FIG. 12, for example, attention is paid to the second height measurement value D ₆ surrounded by a thick frame in the figure, where “12” obtained by measurement at the second position is shown. The value is stored. Further, the surrounding first height measurement values C ₆ and C ₇ and the third height measurement values E ₂ and E ₆ adjacent to the second height measurement value D ₆ are respectively set to the values after the replacement process. Values “14”, “12”, “12”, “14” are stored.

First, an average value [(14 + 12 + 12 + 14) / 4 = 13] of four surrounding first height measurement values C ₆ and C ₇ and third height measurement values E ₂ and E ₆ is calculated. Then, it is determined whether or not the value of the second height measurement value D ₆ is within an error range of “± 2” from the average value.

If it is determined that the error is within the range of “± 2”, the first height measurement values C ₆ and C ₇ and the third height measurement value E are the same as in the first embodiment. The average value of ₂ and E ₆ is adopted as the optimum value of the second height measurement value D ₆ .

On the other hand, when it is determined that it is not within the error range of “± 2”, the value of the second height measurement value D ₆ that is actually measured data is directly adopted as the optimum value as in the first embodiment. .

  When the series of processes is completed, measurement data having the same accuracy as the measurement data obtained from the captured image data of 8 × 8 pixels is completed for the entire imaging field (inspection area).

  As described above in detail, according to this embodiment, the same operational effects as those of the first embodiment can be obtained. That is, as shown in FIG. 13, high-resolution measurement can be performed in a wide measurement range, and more accurate measurement can be realized.

  Further, in the present embodiment, there is no inconvenience that a missing portion of data occurs when synthesizing various height measurement values to create high-resolution data, so there is no need to perform data interpolation processing for interpolating data. As a result, measurement data closer to a true value can be obtained.

  In addition, it is not limited to the description content of the said embodiment, For example, you may implement as follows. Of course, other application examples and modification examples not illustrated below are also possible.

  (A) In each of the above embodiments, the three-dimensional measuring device is embodied as the substrate inspection device 1 that measures the height of the cream solder printed on the printed circuit board 2. You may embody in the structure which measures the height of other things, such as the printed solder bump and the electronic component mounted on the board | substrate.

  (B) In each of the above embodiments, the grating for converting the light from the light source 4a into a striped light pattern is constituted by the liquid crystal grating 4b, and the phase of the light pattern is shifted by controlling the switching. It is the composition which makes it. For example, the grating member may be transferred by a transfer unit such as a piezo actuator to shift the phase of the light pattern.

  (C) In each of the above embodiments, the positional relationship between the camera 5 and the printed circuit board 2 is relatively displaced by moving the printed circuit board 2 mounted on the mounting table 3. Alternatively, the camera 5 may be moved to relatively displace both.

  (D) In each of the above embodiments, when measuring at the first position, the height is obtained by the phase shift method based on the four types of image data captured under the four first light patterns whose phases are different by 90 °. Although it is configured to perform measurement, the present invention is not limited to this, for example, as a configuration that performs height measurement based on three types of image data captured under three types of first light patterns whose phases are different by 120 °. Also good. In other words, the “first predetermined number”, which is the number of times of imaging at the first position, may be a number at which height measurement can be performed at least by the phase shift method.

  (E) At the time of measurement at the second position in the first embodiment and at the time of measurement at the second to fourth positions in the second embodiment, the phase is not shifted and a predetermined phase of one phase is set. Based on a single image data obtained by irradiating the light pattern, the height is measured using the values of the known gain A and offset B. Not limited to this, for example, a configuration in which height measurement is performed using values of known gain A and / or offset B based on two types of image data captured under two types of light patterns having different phases It is good.

  That is, the “second predetermined number” that is the number of times of imaging at the second position in the first embodiment and the number of times of imaging at the second to fourth positions in the second embodiment is at least at the first position. The number may be smaller than the “first predetermined number” that is the number of times of imaging. For example, at the time of measurement at the first position, when the height measurement is performed based on four types of image data captured under four patterns of light patterns, the second position or the like is used. At the time of measurement, the height may be measured using the values of the known gain A and / or offset B based on the three types of image data captured under the light patterns of the three phases. Good. Even in such a case, the phase of the light pattern can be obtained based on a relatively simple arithmetic expression as compared with the conventional case, and the processing speed can be increased.

  (F) Using a known gain A and / or offset B value as a configuration for measuring the height based on two types of image data captured under two types of light patterns having different phases, For example, there is a configuration in which height measurement is performed based on two kinds of image data captured under two kinds of light patterns whose phases are different by 90 °.

According to this configuration, the known luminance values V ₂₀ and V ₂₁ at the respective pixels on the two types of image data acquired by the second light pattern at the second position and the like, and the first light pattern at the first position. The phase θ ₂ of the second light pattern can be specified by the known offset B acquired by [see the above formula (T8)]. Further, in such a configuration, since the phase θ ₂ can be obtained based on an arithmetic expression using “tan ⁻¹ ”, the height can be measured in the range of 360 ° from −180 ° to 180 °, and the measurement range is Can be larger.

  Of course, the configuration is not limited to the configuration in which the height measurement is performed using the values of the known gain A and / or offset B based on two types of image data captured under two types of light patterns whose phases are different by 90 °. For example, based on two types of image data captured under two types of light patterns whose phases are different by 180 °, the height is measured using the values of the known gain A and / or offset B. Also good.

  (G) In each of the above embodiments, a cream having a height of up to 20 μm by combining a first light pattern with a period of 10 μm (height resolution of 2 μm) and a second light pattern with a period of 20 μm (height resolution of 4 μm). Although the case of measuring solder is illustrated, of course, the period and measurement range of each light pattern are not limited to this.

  In each of the above embodiments, the gain A and / or offset B values are acquired based on the four types of image data captured under the first light pattern with a shorter period (period 10 μm). However, the present invention is not limited to this, and the gain A and / or offset B values may be acquired based on the image data captured under the second light pattern (cycle 20 μm) having a longer cycle.

  (H) In each of the above embodiments, the measurement range is expanded by irradiating two types of light patterns with different periods. However, the present invention is not limited to this, and the first light pattern and the second light pattern have the same period. It is good also as an optical pattern (for example, both are 10 micrometers in period).

  Moreover, in the said 2nd Embodiment, it is good also as a structure which expands a measurement range by irradiating 3 or more types of light patterns from which a period differs. For example, a light pattern with a period α is irradiated at a first position, a light pattern with a period β is irradiated at a second position, a light pattern with a period γ is irradiated at a third position, and a period σ is irradiated at a fourth position. It is good also as a structure which irradiates this light pattern.

(I) In each of the above embodiments, the height measurement value is stored in the measurement value storage unit 27 as the first measurement value and the second measurement value. The phase measurement values (phase θ ₁ , θ _2, etc.) may be stored as the measurement values and the second measurement values.

  (J) The procedure of the correction process of the height measurement value and the interpolation process of the data missing part is not limited to the above embodiments, and may be configured by other methods.

  (K) In each of the above embodiments, the height measurement value relating to a predetermined pixel is obtained based on a single image data imaged at the second position or the like using the value of the gain A and / or the offset B. Are acquired using the values of gain A and offset B acquired at the same coordinate position (same pixel) of the image sensor of the camera 5.

However, the present invention is not limited to this, and when obtaining a height measurement value relating to a predetermined pixel, an average value of gain A and / or an average value of offset B in a peripheral region of the pixel may be used. For example, as shown in FIG. 14, when acquiring the second height measurement value relating to the pixel Q _{1 of the} image data imaged at the second position (the range surrounded by a thick frame in the figure), Four pixels P ₁ , P ₂ , P ₃ , and P ₄ (in the drawing) that partially include the imaging range of the pixel Q ₁ out of the image data captured at the peripheral portion of the pixel Q ₁ , that is, the first position. In other words, the average value of gain A and / or the average value of offset B may be used.

Of course, the present invention is not limited to this, and the average value of the gain A and / or the average value of the offset B related to any two or three of the pixels P ₁ , P ₂ , P ₃ , P ₄ is used. Also good.

  DESCRIPTION OF SYMBOLS 1 ... Board | substrate inspection apparatus, 2 ... Printed circuit board, 4 ... Illumination device, 4a ... Light source, 4b ... Liquid crystal lattice, 5 ... Camera, 6 ... Control apparatus, 22 ... Illumination control means, 23 ... Motor control means, 24 ... Image data Storage means 25 ... Gain / offset storage means 26 ... 3D measurement means 27 ... Measurement value storage means 28 ... Height data acquisition means A ... Gain B ... Offset

Claims (5)

An irradiating means capable of irradiating an object to be measured with a light pattern having at least a striped light intensity distribution;
Phase control means capable of changing the phase of the light pattern irradiated from the irradiation means in a plurality of ways;
Imaging means capable of imaging reflected light from the object to be measured irradiated with the light pattern;
Displacement means for relatively displacing a positional relationship between the imaging means and the measurement object;
Image processing means capable of performing three-dimensional measurement of the object to be measured by a phase shift method based on image data picked up by the image pickup means;
The image processing means includes
A first measurement value for each pixel is obtained based on the first predetermined number of image data captured by irradiating the first light pattern with a first predetermined number of phases at the first position. Measurement value acquisition means;
Gain offset acquisition means for acquiring a gain and / or offset value relating to each pixel based on the first predetermined number of image data imaged at the first position;
The second predetermined image captured by irradiating a second light pattern with a second predetermined number of phases less than the first predetermined number at a second position shifted from the first position by a half pixel pitch in a predetermined direction. Second measurement value acquisition means for acquiring a second measurement value relating to each pixel using the gain and / or offset value acquired by the gain offset acquisition means based on several types of image data;
Based on the first measurement value and the second measurement value, comprising height data acquisition means capable of acquiring height data relating to each pixel ,
The second measurement value acquisition means includes
A three-dimensional measurement apparatus using the average value of the gain and / or the average value of the offset in a peripheral part of the pixel when acquiring the second measurement value relating to a predetermined pixel . The irradiation means is configured to be able to irradiate the object to be measured by switching a plurality of light patterns having different periods.
Irradiating a first light pattern of a first period at the first position;
2. The three-dimensional measurement apparatus according to claim 1, wherein a second light pattern having a second period different from the first period is irradiated at the second position. When the second predetermined number is 1, the second measurement value acquisition unit obtains the phase θ of the second light pattern that satisfies at least the relationship of the following formula (S1) when acquiring the second measurement value. three-dimensional measuring apparatus according to claim 1 or 2, characterized in that calculated.
V0 = Asinθ + B (S1)
However, V0: luminance value, A: gain, B: offset. When the second predetermined number is 2, the second measurement value acquisition unit satisfies the relationship of at least the following formulas (T1) and (T2) when acquiring the second measurement value. three-dimensional measuring apparatus according to claim 1 or 2, characterized in that calculating the phase θ of.
V0 = Asinθ + B (T1)
V1 = Asin (θ + 90 °) + B (T2)
However, V0, V1: Two kinds of brightness values of image data, A: gain, B: offset. The object to be measured is, the cream solder printed on a printed circuit board, or a three-dimensional measuring apparatus according to any one of claims 1 to 4, characterized in that a solder bump formed on the wafer substrate.

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