JP5520036B2 - 光学式変位計 - Google Patents
光学式変位計 Download PDFInfo
- Publication number
- JP5520036B2 JP5520036B2 JP2009289793A JP2009289793A JP5520036B2 JP 5520036 B2 JP5520036 B2 JP 5520036B2 JP 2009289793 A JP2009289793 A JP 2009289793A JP 2009289793 A JP2009289793 A JP 2009289793A JP 5520036 B2 JP5520036 B2 JP 5520036B2
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- JP
- Japan
- Prior art keywords
- light
- wavelength
- displacement meter
- optical
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000003287 optical effect Effects 0.000 title claims description 43
- 238000006073 displacement reaction Methods 0.000 title claims description 39
- 230000010287 polarization Effects 0.000 claims description 39
- 238000005259 measurement Methods 0.000 claims description 16
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- 238000000926 separation method Methods 0.000 claims description 10
- 230000004075 alteration Effects 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 5
- 230000000644 propagated effect Effects 0.000 claims description 2
- 230000003595 spectral effect Effects 0.000 claims description 2
- 230000004044 response Effects 0.000 description 25
- 230000008859 change Effects 0.000 description 22
- 239000013307 optical fiber Substances 0.000 description 13
- 238000001514 detection method Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 8
- 239000006185 dispersion Substances 0.000 description 5
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- 239000003086 colorant Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
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- 239000000463 material Substances 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0068—Optical details of the image generation arrangements using polarisation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Optical Distance (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
10…センサヘッド
12…対物レンズ
20…コンソール
22…白色(広帯域)光源
26…分光器
30…光ファイバ
52…偏光子
54…波長板
56…偏光分離素子
58A、58B…受光素子(PD)
60…アナログ演算回路
62A、62B…レンズ
64A、64B…凹面鏡
66A、66B…絞り板
Claims (4)
- 色収差を有する対物レンズに対し、測定対象と反対側の共焦点に広帯域光源を配置し、測定対象からの反射光が戻るときの共焦点位置に空間フィルタを設けて透過させることにより、測定対象にプローブの焦点が合焦した波長の被測定光を抽出し、分光して該被測定光の波長を特定することにより、測定対象の位置を測定するクロマティックコンフォーカル方式の光学式変位計において、
コリメートされて一方向に伝播される前記被測定光を、その伝播方向Zと直交する2方向X、Yの直線偏光に分ける偏光子と、
該2方向の直線偏光を通過させて、光波長に応じた位相差を持つ楕円偏光とする波長板と、
該楕円偏光を、XY間の2つの方向の偏光成分に分ける偏光分離素子と、
各偏光成分の光量を検出する受光素子と、
該受光素子で検出した光量信号A、Bを用いて、(A−B)/(A+B)の演算を行う演算回路とを備え、
対物レンズの色収差によるプローブの焦点位置の光波長特性と分光出力(A−B)/(A+B)の光波長特性を相殺して直線性を改善したことを特徴とする光学式変位計。 - 前記偏光分離素子の出側のコリメート光を、該コリメート光の光軸に垂直な断面積より小さな受光面を有する受光素子で受光することを特徴とする請求項1に記載の光学式変位計。
- 前記偏光分離素子の出側のコリメート光を絞る手段を更に備えたことを特徴とする請求項2に記載の光学式変位計。
- 前記コリメート光を絞る手段が集光手段であり、該集光手段の集光点に前記受光素子が配設されていることを特徴とする請求項3に記載の光学式変位計。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009289793A JP5520036B2 (ja) | 2009-07-16 | 2009-12-21 | 光学式変位計 |
US12/834,144 US8427644B2 (en) | 2009-07-16 | 2010-07-12 | Optical displacement meter |
EP10169462.8A EP2278268B1 (en) | 2009-07-16 | 2010-07-13 | Optical displacement meter |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009168197 | 2009-07-16 | ||
JP2009168197 | 2009-07-16 | ||
JP2009289793A JP5520036B2 (ja) | 2009-07-16 | 2009-12-21 | 光学式変位計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011039026A JP2011039026A (ja) | 2011-02-24 |
JP5520036B2 true JP5520036B2 (ja) | 2014-06-11 |
Family
ID=42989394
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009289793A Expired - Fee Related JP5520036B2 (ja) | 2009-07-16 | 2009-12-21 | 光学式変位計 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8427644B2 (ja) |
EP (1) | EP2278268B1 (ja) |
JP (1) | JP5520036B2 (ja) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5374392B2 (ja) * | 2010-01-08 | 2013-12-25 | 株式会社ミツトヨ | 光ファイバ型振動計 |
KR101819006B1 (ko) * | 2010-10-27 | 2018-01-17 | 삼성전자주식회사 | 광학 측정 장치 |
CN102147240B (zh) * | 2010-12-24 | 2012-08-22 | 北京理工大学 | 差动共焦干涉元件多参数测量方法与装置 |
JP5674050B2 (ja) * | 2012-08-28 | 2015-02-18 | 横河電機株式会社 | 光学式変位計 |
DE102013008582B4 (de) | 2013-05-08 | 2015-04-30 | Technische Universität Ilmenau | Verfahren und Vorrichtung zur chromatisch-konfokalen Mehrpunktmessung sowie deren Verwendung |
JP6333065B2 (ja) * | 2013-07-09 | 2018-05-30 | 東京エレクトロン株式会社 | 塗布装置 |
WO2015005075A1 (ja) * | 2013-07-11 | 2015-01-15 | 株式会社島津製作所 | ラマン分光分析装置 |
DE102014212412A1 (de) * | 2014-06-27 | 2015-12-31 | Siemens Aktiengesellschaft | Abstandsmessverfahren und Abstandsmesseinrichtung |
JP2016024009A (ja) * | 2014-07-18 | 2016-02-08 | 株式会社ミツトヨ | 厚さ測定装置及び厚さ測定方法 |
JP6367041B2 (ja) * | 2014-08-05 | 2018-08-01 | 株式会社ミツトヨ | 外形寸法測定装置及び外形寸法測定方法 |
WO2016092348A1 (fr) * | 2014-12-09 | 2016-06-16 | Asentys Sas | Dispositif optique integre de mesure sans contact d'altitudes et d'epaisseurs. |
JP6767753B2 (ja) * | 2015-03-02 | 2020-10-14 | 株式会社ミツトヨ | クロマティック共焦点センサ及び測定方法 |
US9541376B2 (en) | 2015-03-02 | 2017-01-10 | Mitutoyo Corporation | Chromatic confocal sensor and measurement method |
US9261351B1 (en) * | 2015-03-04 | 2016-02-16 | Mitutoyo Corporation | Chromatic range sensor including high sensitivity measurement mode |
US9829312B2 (en) * | 2015-07-09 | 2017-11-28 | Mituloyo Corporation | Chromatic confocal range sensor comprising a camera portion |
JP6779233B2 (ja) * | 2015-12-25 | 2020-11-04 | 株式会社キーエンス | 共焦点変位計 |
JP6692651B2 (ja) | 2016-02-05 | 2020-05-13 | 株式会社ミツトヨ | クロマティック共焦点センサ |
JP6493265B2 (ja) * | 2016-03-24 | 2019-04-03 | オムロン株式会社 | 光学計測装置 |
EP3222964B1 (en) * | 2016-03-25 | 2020-01-15 | Fogale Nanotech | Chromatic confocal device and method for 2d/3d inspection of an object such as a wafer |
JP6704831B2 (ja) * | 2016-10-20 | 2020-06-03 | 株式会社ミツトヨ | クロマティック共焦点センサ |
JP6788476B2 (ja) * | 2016-10-21 | 2020-11-25 | 株式会社ミツトヨ | クロマティック共焦点センサ及び測定方法 |
CN106443996A (zh) * | 2016-12-07 | 2017-02-22 | 深圳立仪科技有限公司 | 光谱共聚焦镜片组件 |
KR101899711B1 (ko) * | 2017-02-07 | 2018-09-17 | 한국광기술원 | 색수차 렌즈를 이용한 공초점 영상 구현 장치 |
CN110461203B (zh) * | 2017-03-24 | 2021-12-21 | 奥林巴斯株式会社 | 内窥镜系统 |
CN107179052B (zh) * | 2017-04-14 | 2020-02-14 | 中国科学院光电研究院 | 一种光谱共焦测量系统在线标定装置与方法 |
JP6971645B2 (ja) * | 2017-06-13 | 2021-11-24 | 株式会社キーエンス | 共焦点変位計 |
JP6971646B2 (ja) * | 2017-06-13 | 2021-11-24 | 株式会社キーエンス | 共焦点変位計 |
JP7408265B2 (ja) * | 2017-06-13 | 2024-01-05 | 株式会社キーエンス | 共焦点変位計 |
JP6743788B2 (ja) | 2017-09-14 | 2020-08-19 | 横河電機株式会社 | 変位センサ |
JP6919458B2 (ja) * | 2017-09-26 | 2021-08-18 | オムロン株式会社 | 変位計測装置、計測システム、および変位計測方法 |
JP6939360B2 (ja) * | 2017-10-02 | 2021-09-22 | オムロン株式会社 | 共焦点計測装置 |
JP7064167B2 (ja) * | 2018-01-18 | 2022-05-10 | オムロン株式会社 | 光学計測装置及び光学計測方法 |
DE102018114860A1 (de) * | 2018-06-20 | 2019-12-24 | Precitec Optronik Gmbh | Vorrichtung und Verfahren zur optischen Vermessung eines Messobjekts |
US10895448B2 (en) * | 2019-04-09 | 2021-01-19 | General Electric Company | System and method for collecting measurement data of shaped cooling holes of CMC components |
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DE102004059526B4 (de) | 2004-12-09 | 2012-03-08 | Sirona Dental Systems Gmbh | Vermessungseinrichtung und Verfahren nach dem Grundprinzip der konfokalen Mikroskopie |
DE102007005726B4 (de) | 2007-01-31 | 2010-05-12 | Sirona Dental Systems Gmbh | Vorrichtung und Verfahren zur optischen 3D-Vermessung |
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JP5106038B2 (ja) * | 2007-10-23 | 2012-12-26 | アンリツ株式会社 | 波長モニタ |
US8194251B2 (en) * | 2010-08-26 | 2012-06-05 | Mitutoyo Corporation | Method for operating a dual beam chromatic point sensor system for simultaneously measuring two surface regions |
-
2009
- 2009-12-21 JP JP2009289793A patent/JP5520036B2/ja not_active Expired - Fee Related
-
2010
- 2010-07-12 US US12/834,144 patent/US8427644B2/en active Active
- 2010-07-13 EP EP10169462.8A patent/EP2278268B1/en not_active Not-in-force
Also Published As
Publication number | Publication date |
---|---|
EP2278268A2 (en) | 2011-01-26 |
US8427644B2 (en) | 2013-04-23 |
EP2278268A3 (en) | 2012-08-15 |
EP2278268B1 (en) | 2013-09-25 |
US20110013186A1 (en) | 2011-01-20 |
JP2011039026A (ja) | 2011-02-24 |
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