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JP5302268B2 - Super finishing equipment - Google Patents

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JP5302268B2
JP5302268B2 JP2010146276A JP2010146276A JP5302268B2 JP 5302268 B2 JP5302268 B2 JP 5302268B2 JP 2010146276 A JP2010146276 A JP 2010146276A JP 2010146276 A JP2010146276 A JP 2010146276A JP 5302268 B2 JP5302268 B2 JP 5302268B2
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drive shaft
shaft
interlocking member
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balance
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儀三郎 近藤
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西部自動機器株式会社
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Description

本発明は、超仕上げ装置に関するものである。   The present invention relates to a superfinishing apparatus.

超仕上げ装置には、支持フレームに左右一対の左支持部と右支持部とを設け、この左右支持部に駆動シャフトとバランスシャフトとを水平状態に配置して、互いに平行でかつ左右方向の軸心に沿って左右移動自在に支持し、駆動シャフトとバランスシャフトとの間に前後軸心廻りに回転駆動されるカム部材を設け、駆動シャフトに固着されかつバランスシャフトにその軸心(左右)方向に相対移動自在に外嵌保持された駆動シャフト連動部材と、バランスシャフトに固着されかつ駆動シャフトにその軸心(左右)方向に相対移動自在に外嵌保持されたバランスシャフト連動部材とを、カム部材を左右に挟んで設け、前記両シャフト連動部材の一方をカム部材に向けて右方に付勢する左バネと、両シャフト連動部材の他方をカム部材に向けて左方に付勢する右バネとを設け、超仕上げ砥石を先端側に向けて押圧するように保持した砥石ホルダを駆動シャフトの左端部又は右端部に装着し、前記カム部材は互いに逆方向に偏心した第1偏心カムと第2偏心カムとを有し、駆動シャフト連動部材側が第1偏心カムに接当されると共にバランスシャフト連動部材側が第2偏心カムに接当されて、カム部材の回転により、駆動シャフトとバランスシャフトとを左右方向に互いに逆向きに往復移動させて、二次振動を除去しながら砥石ホルダを左右方向に高速で往復運動させるようにしたものがある(特許文献1)。   In the superfinishing device, a left and right pair of left and right support portions are provided on a support frame, and a drive shaft and a balance shaft are horizontally arranged on the left and right support portions so that they are parallel to each other and have left and right axes. A cam member is supported between the drive shaft and the balance shaft so that it can be moved left and right along the center. The cam member is rotationally driven around the front and rear axes, and is fixed to the drive shaft. A drive shaft interlocking member that is externally fitted and held so as to be relatively movable, and a balance shaft interlocking member that is fixedly attached to the balance shaft and is externally held so as to be relatively movable in the axial center (left and right) direction of the drive shaft. A left spring that biases one of the two shaft interlocking members toward the cam member, and a left spring facing the other of the shaft interlocking members toward the cam member. And a grindstone holder that holds the superfinishing grindstone so that it presses toward the tip side is mounted on the left end or right end of the drive shaft, and the cam members are eccentric in opposite directions. A first eccentric cam and a second eccentric cam, the drive shaft interlocking member side is in contact with the first eccentric cam and the balance shaft interlocking member side is in contact with the second eccentric cam; There is one in which the driving shaft and the balance shaft are reciprocated in opposite directions in the left-right direction so that the grindstone holder is reciprocated in the left-right direction at high speed while removing secondary vibration (Patent Document 1).

特開2002−11650号公報JP 2002-11650 A

この種の従来の超仕上げ装置では、例えばトルク・コンバーターの入出力軸の外周面を超仕上げ加工する場合、トルク・コンバーターの入出力軸をワークとして、それを上下方向に配置して上下方向の軸心廻りに回転させ、砥石ホルダを上下方向に往復移動させながら、ワークの外周面に超仕上げ砥石を押し当てて超仕上げ加工するのが、ワークを支持する上で便利である。   In this type of conventional superfinishing equipment, for example, when the outer peripheral surface of the input / output shaft of the torque converter is superfinished, the input / output shaft of the torque converter is used as a workpiece, and it is arranged in the vertical direction. It is convenient to support the workpiece by rotating around the shaft center and reciprocating the grindstone holder in the vertical direction while pressing the superfinishing grindstone against the outer peripheral surface of the workpiece.

このような場合、単に従来の超仕上げ装置を前後軸廻りに丁度90度回転して、駆動シャフトとバランスシャフトとを互いに平行でかつ上下方向の軸心に沿って上下動自在になるように配置し、砥石ホルダを上下に往復移動させるようにすることが考えられる。
しかし、このようにすると、駆動シャフトの重量に、砥石ホルダの重量及び駆動シャフト連動部材の重量がかかるため、駆動シャフト側とバランスシャフト側との重量バランスが悪くなる。また、左バネと右バネとが上下に配置され(上バネ、下バネとなり)、その結果、駆動シャフトの重量、砥石ホルダの重量及び駆動シャフト連動部材の重量が下バネに対して該下バネを縮小させる方向にかかり、バランスシャフト及びバランスシャフト連動部材の重量が上バネに対して該上バネを伸長させる方向にかかり、上下バネのバランスも悪くなり、砥石ホルダを高速でスムーズに上下方向に往復移動させることができなくなるという問題があった。
In such a case, simply rotate the conventional superfinishing device just 90 degrees around the front and rear axis, and arrange the drive shaft and balance shaft so that they can move up and down along the vertical axis. Then, it is conceivable to reciprocate the grindstone holder up and down.
However, if it does in this way, since the weight of a grindstone holder and the weight of a drive shaft interlocking member will be added to the weight of a drive shaft, the weight balance of the drive shaft side and the balance shaft side will worsen. In addition, the left spring and the right spring are arranged vertically (upper and lower springs). As a result, the weight of the drive shaft, the weight of the grindstone holder, and the weight of the drive shaft interlocking member are lower than the lower spring. The weight of the balance shaft and the balance shaft interlocking member is applied in the direction of extending the upper spring with respect to the upper spring, the balance of the upper and lower springs also deteriorates, and the grindstone holder is moved up and down smoothly at high speed. There was a problem that it could not be reciprocated.

本発明は上記問題点に鑑み、砥石ホルダを高速でスムーズに上下方向に往復移動させることができる超仕上げ装置を提供することを目的とする。   In view of the above problems, an object of the present invention is to provide a superfinishing apparatus capable of reciprocating a grindstone holder in a vertical direction at high speed.

この技術的課題を解決する本発明の技術的手段は、支持フレームに上支持部と下支持部とが設けられ、この上下支持部に駆動シャフトとバランスシャフトとが互いに平行でかつ上下方向の軸心に沿って移動自在に支持され、駆動シャフトとバランスシャフトとの間に両シャフト間を通る水平軸心廻りに回転駆動されるカム部材が設けられ、駆動シャフトに固着されかつバランスシャフトにその軸心方向に相対移動自在に外嵌保持された駆動シャフト連動部材と、バランスシャフトに固着されかつ駆動シャフトにその軸心方向に相対移動自在に外嵌保持されたバランスシャフト連動部材とが、カム部材を上下に挟んで設けられ、前記両シャフト連動部材の一方をカム部材に向けて上方に付勢する下バネと、両シャフト連動部材の他方をカム部材に向けて下方に付勢する上バネとが設けられ、前記下支持部に下バネの付勢力を調整する下バネ調整機構が設けられ、上支持部に上バネの付勢力を調整する上バネ調整機構が設けられ、超仕上げ砥石を先端側に向けて押圧するように保持した砥石ホルダが駆動シャフトの端部に装着され、
前記カム部材は互いに逆方向に偏心した第1偏心カムと第2偏心カムとを有し、駆動シャフト連動部材側が第1偏心カムに接当されると共にバランスシャフト連動部材側が第2偏心カムに接当されて、カム部材の回転により砥石ホルダを上下方向に往復運動させるようにした超仕上げ装置であって、
駆動シャフト及び砥石ホルダを加算した重量とバランスシャフトの重量とを均一化するように、駆動シャフトが中空とされると共にバランスシャフトが中実とされ、駆動シャフト連動部材の第1偏心カムへの押圧力とバランスシャフト連動部材の第2偏心カムへの押圧力が同等になるように、前記上バネの付勢力よりも下バネの付勢力が大に設定されている点にある。
The technical means of the present invention for solving this technical problem is that an upper support portion and a lower support portion are provided on a support frame, and a drive shaft and a balance shaft are parallel to each other and are vertically connected to the upper and lower support portions. A cam member that is supported so as to be movable along the center and is driven to rotate about a horizontal axis passing between both shafts is provided between the drive shaft and the balance shaft. A drive shaft interlocking member that is externally fitted and held so as to be relatively movable in the center direction, and a balance shaft interlocking member that is fixed to the balance shaft and is externally held so as to be relatively movable in the axial direction of the drive shaft. And a lower spring that urges one of the shaft interlocking members upward toward the cam member, and the other of the shaft interlocking members as a cam member. And an upper spring that adjusts the urging force of the lower spring to the lower support portion, and an upper spring adjustment that adjusts the urging force of the upper spring to the upper support portion. A mechanism is provided, and a grindstone holder that holds the superfinishing grindstone to be pressed toward the tip side is attached to the end of the drive shaft,
The cam member has a first eccentric cam and a second eccentric cam eccentric in opposite directions, the drive shaft interlocking member side is in contact with the first eccentric cam, and the balance shaft interlocking member side is in contact with the second eccentric cam. It is a super-finishing device that is adapted to reciprocate the grindstone holder in the vertical direction by rotating the cam member,
The drive shaft is hollow and the balance shaft is solid so that the sum of the weight of the drive shaft and the grindstone holder and the weight of the balance shaft are uniform, and the push shaft to the first eccentric cam is pushed. The biasing force of the lower spring is set larger than the biasing force of the upper spring so that the pressure and the pressing force of the balance shaft interlocking member to the second eccentric cam are equal.

また、本発明の他の技術的手段は、カム部材が低速回転から高速回転まで可変可能になっていて、カム部材の回転時に駆動シャフト連動部材側が第1偏心カムに対して接当状態を保持すると同時にバランスシャフト連動部材側が第2偏心カムに対して接当状態を保持するべく、カム部材の最大高速回転状態で上バネの付勢力と下バネの付勢力とが調整可能とされている点にある。   Further, according to another technical means of the present invention, the cam member can be varied from a low speed rotation to a high speed rotation, and the drive shaft interlocking member side keeps contact with the first eccentric cam when the cam member rotates. At the same time, the urging force of the upper spring and the urging force of the lower spring can be adjusted in the maximum high-speed rotation state of the cam member so that the balance shaft interlocking member side is kept in contact with the second eccentric cam. It is in.

また、本発明の他の技術的手段は、支持フレームにモータが取り付けられ、モータの出力軸に前記カム部材が外嵌固定されている点にある。
また、本発明の他の技術的手段は、駆動シャフトと上下支持部及びバランスシャフト連動部材との間並びにバランスシャフトと上下支持部及び駆動シャフト連動部材との間に、加圧流体を封入していて軸心が上下方向を向いた流体ベアリングがそれぞれ設けられている点にある。
Another technical means of the present invention is that a motor is attached to a support frame, and the cam member is fitted and fixed to an output shaft of the motor.
In another technical means of the present invention, pressurized fluid is sealed between the drive shaft and the upper and lower support portions and the balance shaft interlocking member, and between the balance shaft and the upper and lower support portions and the drive shaft interlocking member. In other words, fluid bearings each having an axial center in the vertical direction are provided.

本発明によれば、駆動シャフトが中空とされると共にバランスシャフトが中実とされているので、駆動シャフトとバランスシャフトとが上下方向の軸心に沿って移動自在に支持されているにも拘わらず、駆動シャフト及び砥石ホルダを加算した重量とバランスシャフトの重量とが均一化され、駆動シャフト側とバラスシャフト側との重量バランスが良くなり、カム部材の回転により、駆動シャフトとバランスシャフトとを上下方向に互いに逆向きに往復移動させて、二次振動を効果的に除去しながら砥石ホルダを上下方向に高速で往復運動させることができる。   According to the present invention, since the drive shaft is hollow and the balance shaft is solid, the drive shaft and the balance shaft are supported movably along the vertical axis. The weight of the drive shaft and the grinding wheel holder and the weight of the balance shaft are made uniform, the weight balance between the drive shaft side and the ballast shaft side is improved, and the drive shaft and the balance shaft are connected by the rotation of the cam member. The grindstone holder can be reciprocated in the vertical direction at high speed while reciprocating in the opposite directions in the vertical direction and effectively removing secondary vibrations.

また、駆動シャフト及びバランスシャフトが上下方向に配置されて、上下に駆動されるため、駆動シャフトの重量、砥石ホルダの重量及び駆動シャフト連動部材の重量が下バネに対して該下バネを縮小させる方向にかかり、バランスシャフト及びバランスシャフト連動部材の重量が上バネに対して該上バネを伸長させる方向にかかるが、駆動シャフト連動部材の第1偏心カムへの押圧力とバランスシャフト連動部材の第2偏心カムへの押圧力が同等になるように、前記上バネの付勢力よりも下バネの付勢力が大に設定されているので、上下バネのバランスも良くなり、この点からも砥石ホルダを高速でスムーズに上下方向に往復移動させることができる。   In addition, since the drive shaft and the balance shaft are arranged vertically and driven up and down, the weight of the drive shaft, the weight of the grindstone holder, and the weight of the drive shaft interlocking member reduce the lower spring with respect to the lower spring. The weight of the balance shaft and the balance shaft interlocking member is applied in the direction of extending the upper spring with respect to the upper spring, but the pressing force of the drive shaft interlocking member on the first eccentric cam and the balance shaft interlocking member first 2 Since the biasing force of the lower spring is set larger than the biasing force of the upper spring so that the pressing force to the eccentric cam is equal, the balance of the upper and lower springs is also improved. Can be reciprocated up and down smoothly at high speed.

本発明の一実施形態を示す超仕上げ装置の正面断面図である。It is front sectional drawing of the superfinishing apparatus which shows one Embodiment of this invention. 同超仕上げ装置の平面断面図である。It is a plane sectional view of the super finishing device. 同超仕上げ装置の側面図である。It is a side view of the superfinishing apparatus.

以下、本発明の実施の形態を図面に基づいて説明する。
図1〜図3において、超仕上げ装置1の支持フレーム2は側面視コの字状に形成されて、上支持部3と下支持部4とが設けられている。この上下支持部3,4に駆動シャフト7とバランスシャフト8とが互いに平行でかつ上下方向の軸心に沿って移動自在に支持されている。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 to 3, the support frame 2 of the superfinishing apparatus 1 is formed in a U shape when viewed from the side, and is provided with an upper support portion 3 and a lower support portion 4. The drive shaft 7 and the balance shaft 8 are supported by the vertical support portions 3 and 4 so as to be movable in parallel with each other and along the vertical axis.

駆動シャフト7とバランスシャフト8とは互いに左右に離間して上下方向に平行に配置されている。駆動シャフト7の上部とバランスシャフト8の上部とは上支持部3にそれぞれエアーベアリング10,11を介して上下移動自在に支持され、駆動シャフト7の下部とバランスシャフト8の下部とは下支持部4にそれぞれエアーベアリング12,13を介して上下移動自在に支持されている。   The drive shaft 7 and the balance shaft 8 are spaced apart from each other in the left-right direction and are arranged in parallel in the vertical direction. The upper part of the drive shaft 7 and the upper part of the balance shaft 8 are supported by the upper support part 3 through the air bearings 10 and 11 so as to be movable up and down. The lower part of the drive shaft 7 and the lower part of the balance shaft 8 are lower support parts. 4 are supported by air bearings 12 and 13 so as to be movable up and down.

駆動シャフト7とバランスシャフト8との間に両シャフト7,8間を通る前後方向の水平軸心廻りに回転駆動されるカム部材15が設けられている。カム部材15を上下に挟んで駆動シャフト連動部材17とバランスシャフト連動部材18とが設けられている。
駆動シャフト連動部材17は駆動シャフト7及びバランスシャフト8の下部側に配置され、駆動シャフト連動部材17の左右一端側は駆動シャフト7の下側中途部に外嵌固定され、駆動シャフト連動部材17の左右他端側はバランスシャフト8の下側中途部にエアーベアリング19を介して相対的に上下移動自在に外嵌されている。これにより、駆動シャフト連動部材17は駆動シャフト7に固着されかつバランスシャフト8にその軸心方向に相対移動自在に外嵌保持され、駆動シャフト7は駆動シャフト連動部材17と共に上下移動するようになっている。
A cam member 15 is provided between the drive shaft 7 and the balance shaft 8 so as to be rotationally driven around a horizontal axis in the front-rear direction passing between the shafts 7 and 8. A drive shaft interlocking member 17 and a balance shaft interlocking member 18 are provided with the cam member 15 interposed therebetween.
The drive shaft interlocking member 17 is disposed on the lower side of the drive shaft 7 and the balance shaft 8, and the left and right end sides of the drive shaft interlocking member 17 are externally fitted and fixed to the lower middle part of the drive shaft 7. The other ends of the left and right sides are fitted on the lower middle part of the balance shaft 8 via an air bearing 19 so as to be relatively movable up and down. As a result, the drive shaft interlocking member 17 is fixed to the drive shaft 7 and is externally fitted and held on the balance shaft 8 so as to be relatively movable in the axial direction. The drive shaft 7 moves up and down together with the drive shaft interlocking member 17. ing.

バランスシャフト連動部材18は駆動シャフト7及びバランスシャフト8の上部側に配置され、バランスシャフト連動部材18の左右一端側は駆動シャフト7の上側中途部にエアーベアリング20を介して相対的に上下移動自在に外嵌され、バランスシャフト連動部材18の左右他端側はバランスシャフト8の上側中途部に外嵌固定されている。これにより、バランスシャフト連動部材18はバランスシャフト8に固着されかつ駆動シャフト7にその軸心方向に相対移動自在に外嵌保持され、バランスシャフト8はバランスシャフト連動部材18と共に上下移動するようになっている。   The balance shaft interlocking member 18 is disposed on the upper side of the drive shaft 7 and the balance shaft 8, and the left and right end sides of the balance shaft interlocking member 18 are relatively movable up and down via an air bearing 20 in the middle part on the upper side of the drive shaft 7. The balance shaft interlocking member 18 is fitted and fixed to the upper halfway portion of the balance shaft 8 at the other left and right ends of the balance shaft interlocking member 18. As a result, the balance shaft interlocking member 18 is fixed to the balance shaft 8 and is externally held on the drive shaft 7 so as to be relatively movable in the axial direction, and the balance shaft 8 moves up and down together with the balance shaft interlocking member 18. ing.

而して、駆動シャフト7と上下支持部3,4及びバランスシャフト連動部材18との間並びにバランスシャフト8と上下支持部3,4及び駆動シャフト連動部材17との間に、加圧エアーを封入していて軸心が上下方向を向いたエアーベアリング10,11,12,13,19,20がそれぞれ設けられている。
駆動シャフト連動部材17の下方に下バネ23が設けられ、バランスシャフト連動部材18の上方に上バネ24が設けられている。下バネ23は駆動シャフト連動部材17をカム部材15に向けて上方に付勢し、上バネ24はバランスシャフト連動部材18をカム部材15に向けて下方に付勢している。
Thus, pressurized air is sealed between the drive shaft 7 and the upper and lower support portions 3 and 4 and the balance shaft interlocking member 18 and between the balance shaft 8 and the upper and lower support portions 3 and 4 and the drive shaft interlocking member 17. In addition, air bearings 10, 11, 12, 13, 19, and 20 are provided with the axial centers oriented in the vertical direction.
A lower spring 23 is provided below the drive shaft interlocking member 17, and an upper spring 24 is provided above the balance shaft interlocking member 18. The lower spring 23 biases the drive shaft interlocking member 17 upward toward the cam member 15, and the upper spring 24 biases the balance shaft interlocking member 18 downward toward the cam member 15.

下支持部4に下バネ23の付勢力を調整する下バネ調整機構25が設けられ、上支持部3に上バネ24の付勢力を調整する上バネ調整機構26が設けられている。
下バネ調整機構25は、下支持部4に上下移動自在に螺合された下ねじ軸29を有し、下ねじ軸29を回動操作することによって下ねじ軸29が下支持部4に対して上下に移動して、下バネ23の付勢力を調整できるように構成されている。
A lower spring adjustment mechanism 25 that adjusts the urging force of the lower spring 23 is provided on the lower support portion 4, and an upper spring adjustment mechanism 26 that adjusts the urging force of the upper spring 24 is provided on the upper support portion 3.
The lower spring adjustment mechanism 25 has a lower screw shaft 29 that is screwed to the lower support portion 4 so as to be movable up and down, and the lower screw shaft 29 is moved relative to the lower support portion 4 by rotating the lower screw shaft 29. The urging force of the lower spring 23 can be adjusted by moving up and down.

上バネ調整機構26は、上支持部3に上下移動自在に螺合された上ねじ軸30を有し、上ねじ軸30を回動操作することによって上ねじ軸30が上支持部3に対して上下に移動して、上バネ24の付勢力を調整できるように構成されている。
支持フレーム2の中央部に取付ブラケット32を介してモータ33が取り付けられている。モータ33の出力軸34の突出端部側に前記カム部材15が外嵌固定されている。モータ33の出力軸34の後部側はベアリング27によりモータ33のケースに回転軸心a廻りに回転自在に支持され、モータ33の出力軸34の前部側は取付ブラケット32の支持筒部35を介して支持フレーム2にベアリング36により回転軸心a廻りに回転自在に支持されている。
The upper spring adjusting mechanism 26 has an upper screw shaft 30 screwed to the upper support portion 3 so as to be movable up and down, and the upper screw shaft 30 is rotated with respect to the upper support portion 3 by rotating the upper screw shaft 30. Thus, the urging force of the upper spring 24 can be adjusted by moving up and down.
A motor 33 is attached to the center portion of the support frame 2 via an attachment bracket 32. The cam member 15 is externally fitted and fixed to the protruding end side of the output shaft 34 of the motor 33. The rear side of the output shaft 34 of the motor 33 is supported on the case of the motor 33 by a bearing 27 so as to be rotatable around the rotation axis a, and the front side of the output shaft 34 of the motor 33 is provided with a support cylinder portion 35 of the mounting bracket 32. The support frame 2 is supported by the bearing 36 so as to be rotatable around the rotation axis a.

前記カム部材15は互いに逆方向に偏心(周方向180°偏位)した第1偏心カム37と第2偏心カム38とを有している。第1偏心カム37と第2偏心カム38とは互いに前後にずれた位置にあって、第1偏心カム37は第2偏心カム38よりも前側にあり、第1偏心カム37と第2偏心カム38は、モータ33の出力軸34の回転軸心aに対して互いに逆方向に偏心した位置に軸心b、cを有している。第1偏心カム37に第1ベアリング39が外嵌装着され、第2偏心カム38に第2ベアリング40が外嵌装着されている。   The cam member 15 has a first eccentric cam 37 and a second eccentric cam 38 that are eccentric in opposite directions (deviation of 180 ° in the circumferential direction). The first eccentric cam 37 and the second eccentric cam 38 are in positions shifted from each other in the front-rear direction, and the first eccentric cam 37 is located on the front side of the second eccentric cam 38, and the first eccentric cam 37 and the second eccentric cam Reference numeral 38 has shaft centers b and c at positions eccentric to the rotation axis a of the output shaft 34 of the motor 33 in opposite directions. A first bearing 39 is fitted on the first eccentric cam 37 and a second bearing 40 is fitted on the second eccentric cam 38.

駆動シャフト連動部材17は下接当部材41を介して第1偏心カム37の第1ベアリング39に接当され、バランスシャフト連動部材18は上接当部材42を介して第2偏心カム38の第2ベアリング40に接当されており、モータ33の回転駆動によって、駆動シャフト連動部材17及び駆動シャフト7と、バランスシャフト連動部材18及びバランスシャフト8とが上下方向に互いに逆方向に往復移動するようになっている。   The drive shaft interlocking member 17 is brought into contact with the first bearing 39 of the first eccentric cam 37 through the lower contact member 41, and the balance shaft interlocking member 18 is in contact with the first eccentric cam 38 through the upper contact member 42. 2 is in contact with the bearing 40, and the drive shaft interlocking member 17 and the drive shaft 7, and the balance shaft interlocking member 18 and the balance shaft 8 are reciprocally moved in the opposite directions in the vertical direction by the rotational drive of the motor 33. It has become.

下接当部材41及び上接当部材42の接当面にはボロンコーティングがなされ、これにより摩擦抵抗の低減及び耐摩耗性を向上させている。
駆動シャフト7の下端部に砥石ホルダ43が装着されている。砥石ホルダ43の先端に、超仕上げ砥石44が外方突出状に保持されると共に、超仕上げ砥石44を先端側に向けて流体圧力(実施形態ではエアー圧力)にて押圧するシリンダ手段が組み込まれている。従って、モータ33の駆動によってカム部材15を回転させることにより砥石ホルダ43乃至超仕上げ砥石44を上下方向に往復運動させるように構成されている。
The contact surfaces of the lower contact member 41 and the upper contact member 42 are coated with boron, thereby reducing frictional resistance and improving wear resistance.
A grindstone holder 43 is attached to the lower end of the drive shaft 7. At the tip of the grindstone holder 43, the superfinishing grindstone 44 is held in an outward projecting shape, and cylinder means for pressing the superfinishing grindstone 44 toward the tip side with fluid pressure (air pressure in the embodiment) is incorporated. ing. Therefore, the cam member 15 is rotated by driving the motor 33 to reciprocate the grindstone holder 43 to the superfinishing grindstone 44 in the vertical direction.

超仕上げ砥石44を押し当てて超仕上げ加工するワークWは、例えばトルク・コンバーターの入出力軸とされ、ワークWは上下方向に配置されて上下方向の軸心廻りに回転駆動される。ワークWを上下方向の軸心廻りに回転駆動させつつ砥石ホルダ43を上下方向に往復移動させながら、ワークWの軸外周面に超仕上げ砥石44を押し当てて超仕上げ加工するようになっている。   The workpiece W to be superfinished by pressing the superfinishing grindstone 44 is used as, for example, an input / output shaft of a torque converter. The workpiece W is arranged in the vertical direction and is driven to rotate about the vertical axis. While the workpiece W is driven to rotate about the vertical axis, the grinding wheel holder 43 is reciprocated in the vertical direction, and the superfinishing grindstone 44 is pressed against the outer peripheral surface of the workpiece W to perform superfinishing. .

超仕上げ装置1は、前記取付ブラケット32により超仕上げ装置1をX方向(例えば前後方向)とY方向(例えば左右方向)とに移動させる図示省略の移動機構に取り付けられる。
前記駆動シャフト7が中空とされると共にバランスシャフト8が中実とされ、またバランスシャフト8の上端部にバランスウエイト45が固着されており、これらによって、駆動シャフト7及び砥石ホルダ43を加算した重量とバランスシャフト8及びバランスウエイト45の重量とを均一化するようにしている。
The superfinishing apparatus 1 is attached to a moving mechanism (not shown) that moves the superfinishing apparatus 1 in the X direction (for example, the front-rear direction) and the Y direction (for example, the left-right direction) by the mounting bracket 32.
The drive shaft 7 is hollow and the balance shaft 8 is solid, and a balance weight 45 is fixed to the upper end portion of the balance shaft 8, thereby adding the drive shaft 7 and the grindstone holder 43 to the weight. The balance shaft 8 and the balance weight 45 are made uniform in weight.

モータ33によってカム部材15は低速回転から高速回転まで可変可能になっていて、カム部材15の回転時に駆動シャフト連動部材17側が第1偏心カム37に対して接当状態を保持すると同時にバランスシャフト連動部材18側が第2偏心カム38に対して接当状態を保持するべく、カム部材15の最大高速回転状態で上バネ24の付勢力と下バネ23の付勢力とが調整可能とされている。   The motor 33 can change the cam member 15 from a low speed rotation to a high speed rotation by the motor 33, and at the same time the drive shaft interlocking member 17 side is in contact with the first eccentric cam 37 when the cam member 15 rotates, the balance shaft interlocks. The biasing force of the upper spring 24 and the biasing force of the lower spring 23 can be adjusted while the cam member 15 is in the maximum high-speed rotation state so that the member 18 side is kept in contact with the second eccentric cam 38.

例えば、砥石ホルダ43乃至超仕上げ砥石44の上下方向へ往復運動(オシレーション)の幅が1.5mmであれば、カム部材15の最大高速回転が2000rpm/minとされ、往復運動(オシレーション)の幅が0.5mmであれば、カム部材15の最大高速回転が4000rpm/minとされ、これら2000rpm/min又は4000rpm/minのカム部材15の最大高速回転状態で上バネ24の付勢力と下バネ23の付勢力とが下バネ調整機構25及び上バネ調整機構26によって調整される。この上バネ24の付勢力と下バネ23の付勢力との調整により、駆動シャフト7、駆動シャフト連動部材17、バランスシャフト8、バランスシャフト連動部材18、バランスウエイト45及び砥石ホルダ43の重量の、上バネ24への付勢力及び下バネ23への付勢力への影響を考慮して、駆動シャフト連動部材17の第1偏心カム37への押圧力とバランスシャフト連動部材18の第2偏心カム38への押圧力が同等になると共に、前記カム部材15の最大高速回転状態でも、駆動シャフト連動部材17側が第1偏心カム37に対して接当状態を保持すると同時にバランスシャフト連動部材18側が第2偏心カム38に対して接当状態を保持するように、上バネ24の付勢力よりも下バネ23の付勢力が大に設定されるのである。   For example, if the width of the reciprocating motion (oscillation) in the vertical direction of the grindstone holder 43 to the superfinishing grindstone 44 is 1.5 mm, the maximum high-speed rotation of the cam member 15 is 2000 rpm / min, and the reciprocating motion (oscillation). If the width of the cam member 15 is 0.5 mm, the maximum high-speed rotation of the cam member 15 is set to 4000 rpm / min, and the biasing force and lower force of the upper spring 24 in the maximum high-speed rotation state of the cam member 15 at 2000 rpm / min or 4000 rpm / min. The urging force of the spring 23 is adjusted by the lower spring adjustment mechanism 25 and the upper spring adjustment mechanism 26. By adjusting the biasing force of the upper spring 24 and the biasing force of the lower spring 23, the weights of the drive shaft 7, the drive shaft interlocking member 17, the balance shaft 8, the balance shaft interlocking member 18, the balance weight 45, and the grindstone holder 43 are In consideration of the urging force to the upper spring 24 and the urging force to the lower spring 23, the pressing force of the drive shaft interlocking member 17 to the first eccentric cam 37 and the second eccentric cam 38 of the balance shaft interlocking member 18. The driving shaft interlocking member 17 side is kept in contact with the first eccentric cam 37 even when the cam member 15 is rotated at the maximum high speed, and at the same time the balance shaft interlocking member 18 side is second. The urging force of the lower spring 23 is set larger than the urging force of the upper spring 24 so as to maintain the contact state with the eccentric cam 38.

なお、47は保護カバーで、駆動シャフト7、バランスシャフト8、駆動シャフト連動部材17及びバランスシャフト連動部材18等の前面を覆っている。48は、エアーベアリング10,11,12,13等に圧縮エアーを供給するための配管ブロックである。
上記実施形態によれば、ワークWを超仕上げ加工する場合、超仕上げ装置1をX軸方向及びY軸方向に移動して、砥石ホルダ43の超仕上げ砥石44をワークWに軸心方向に押し当て、ワークWを上下方向の軸心廻りに回転させながら、モータ33の回転駆動により、砥石ホルダ43を上下に往復移動させて、ワークWに対して超仕上げ加工をすればよい。
A protective cover 47 covers the front surfaces of the drive shaft 7, the balance shaft 8, the drive shaft interlocking member 17, the balance shaft interlocking member 18, and the like. Reference numeral 48 denotes a piping block for supplying compressed air to the air bearings 10, 11, 12, 13 and the like.
According to the above embodiment, when superfinishing the workpiece W, the superfinishing apparatus 1 is moved in the X-axis direction and the Y-axis direction, and the superfinishing grindstone 44 of the grindstone holder 43 is pushed toward the workpiece W in the axial direction. The workpiece W may be superfinished by rotating the grindstone holder 43 up and down by rotating the motor 33 while rotating the workpiece W about the vertical axis.

上記実施形態では、駆動シャフト7が中空とされると共にバランスシャフト8が中実とされ、バランスシャフト8の上端部にバランスウエイト45が固着されているので、駆動シャフト7とバランスシャフト8とが上下方向に配置されているにも拘わらず、駆動シャフト7及び砥石ホルダ43を加算した重量とバランスシャフト8の重量とが均一化され、駆動シャフト7側とバラスシャフト側との重量バランスが良くなり、カム部材15の回転により、駆動シャフト7とバランスシャフト8とを上下方向に互いに逆向きに往復移動させて、二次振動を効果的に除去しながら砥石ホルダ43を上下方向に高速で往復運動させることができる。   In the above embodiment, since the drive shaft 7 is hollow and the balance shaft 8 is solid, and the balance weight 45 is fixed to the upper end portion of the balance shaft 8, the drive shaft 7 and the balance shaft 8 are vertically moved. Despite being arranged in the direction, the weight added to the drive shaft 7 and the grindstone holder 43 and the weight of the balance shaft 8 are made uniform, and the weight balance between the drive shaft 7 side and the ballast shaft side is improved. The rotation of the cam member 15 causes the drive shaft 7 and the balance shaft 8 to reciprocate in the vertical direction opposite to each other, effectively reciprocating the grindstone holder 43 in the vertical direction while effectively removing secondary vibrations. be able to.

また、駆動シャフト7及びバランスシャフト8が上下方向に配置されて、上下に駆動されるため、駆動シャフト7の重量、砥石ホルダ43の重量及び駆動シャフト連動部材17の重量が下バネ23に対して該下バネ23を縮小させる方向にかかり、バランスシャフト8及びバランスシャフト連動部材18の重量が上バネ24に対して該上バネ24を伸長させる方向にかかるが、駆動シャフト連動部材17の第1偏心カム37への押圧力とバランスシャフト連動部材18の第2偏心カム38への押圧力が同等になるように、前記上バネ24の付勢力よりも下バネ23の付勢力が大に設定されているので、上下バネ23のバランスも良くなり、この点からも砥石ホルダ43を高速でスムーズに上下方向に往復移動させることができる。   Further, since the drive shaft 7 and the balance shaft 8 are arranged in the vertical direction and driven up and down, the weight of the drive shaft 7, the weight of the grindstone holder 43 and the weight of the drive shaft interlocking member 17 are relative to the lower spring 23. The lower spring 23 is applied in the direction of contraction, and the weight of the balance shaft 8 and the balance shaft interlocking member 18 is applied in the direction of extending the upper spring 24 with respect to the upper spring 24, but the first eccentricity of the drive shaft interlocking member 17. The biasing force of the lower spring 23 is set larger than the biasing force of the upper spring 24 so that the pressing force to the cam 37 and the pressing force to the second eccentric cam 38 of the balance shaft interlocking member 18 are equal. Therefore, the balance of the upper and lower springs 23 is improved, and also from this point, the grindstone holder 43 can be reciprocated in the vertical direction smoothly at high speed.

また、カム部材15が低速回転から高速回転まで可変可能になっていて、カム部材15の最大高速回転状態で上バネ24の付勢力と下バネ23の付勢力とが調整可能とされているので、カム部材15の最大高速回転状態で上バネ24の付勢力と下バネ23の付勢力との調整により、駆動シャフト7、駆動シャフト7、バランスシャフト8、バランスシャフト連動部材18、バランスウエイト45及び砥石ホルダ43の総重量による、上バネ24への付勢力及び下バネ23への付勢力への影響を考慮して、駆動シャフト連動部材17の第1偏心カム37への押圧力とバランスシャフト連動部材18の第2偏心カム38への押圧力とが同等になると共に、前記カム部材15の最大高速回転状態でも、駆動シャフト連動部材17側が第1偏心カム37に対して接当状態を保持すると同時にバランスシャフト連動部材18側が第2偏心カム38に対して接当状態を保持するように、上バネ24の付勢力よりも下バネ23の付勢力が大になるように簡単に設定することができる。   Further, the cam member 15 can be varied from a low speed rotation to a high speed rotation, and the urging force of the upper spring 24 and the urging force of the lower spring 23 can be adjusted in the maximum high speed rotation state of the cam member 15. By adjusting the urging force of the upper spring 24 and the urging force of the lower spring 23 in the maximum high-speed rotation state of the cam member 15, the drive shaft 7, the drive shaft 7, the balance shaft 8, the balance shaft interlocking member 18, the balance weight 45, and Considering the influence of the total weight of the grindstone holder 43 on the biasing force on the upper spring 24 and the biasing force on the lower spring 23, the pressing force of the drive shaft interlocking member 17 on the first eccentric cam 37 and the balance shaft interlocking The pressing force of the member 18 to the second eccentric cam 38 becomes equal, and even when the cam member 15 is in the maximum high-speed rotation state, the drive shaft interlocking member 17 side is on the first eccentric cam 3 side. The urging force of the lower spring 23 is larger than the urging force of the upper spring 24 so that the balance shaft interlocking member 18 side is kept in contact with the second eccentric cam 38 at the same time. It can be set easily.

また、支持フレーム2にモータ33が取り付けられ、モータ33の出力軸34に前記カム部材15が外嵌固定されているので、モータ33の出力軸34の回転で直接カム部材15を回転駆動することができて、カム部材15を簡単な構成で精度良く回転させることができ、超仕上げ装置1全体をコンパクトになし得る。
また、駆動シャフト7と上支持部3、下支持部4及びバランスシャフト連動部材18との間並びにバランスシャフト8と上支持部3、下支持部4及び駆動シャフト連動部材17との間に、加圧エアーを封入していて軸心が上下方向を向いたエアーベアリング10,11,12,13,19,20が設けられているので、上下方向を向いたエアーベアリング10,11,12,13,19,20に対して駆動シャフト7又はバランスシャフト8の重量が上下方向に作用するため、エアーベアリング10,11,12,13,19,20の軸心に対して駆動シャフト7又はバランスシャフト8の軸心がずれることが少なくなる。
Further, since the motor 33 is attached to the support frame 2 and the cam member 15 is externally fixed to the output shaft 34 of the motor 33, the cam member 15 is directly driven to rotate by the rotation of the output shaft 34 of the motor 33. Therefore, the cam member 15 can be rotated with a simple configuration with high accuracy, and the entire superfinishing apparatus 1 can be made compact.
Further, between the drive shaft 7 and the upper support portion 3, the lower support portion 4 and the balance shaft interlocking member 18, and between the balance shaft 8 and the upper support portion 3, the lower support portion 4 and the drive shaft interlocking member 17, Since the air bearings 10, 11, 12, 13, 19, and 20 are provided so that the pressurized air is sealed and the axis is directed in the vertical direction, the air bearings 10, 11, 12, 13, and 20 that are directed in the vertical direction are provided. Since the weight of the drive shaft 7 or the balance shaft 8 acts in the vertical direction with respect to 19, 20, the drive shaft 7 or the balance shaft 8 has an axial center of the air bearing 10, 11, 12, 13, 19, 20. The axis is less likely to shift.

即ち、従来のようにエアーベアリングが水平方向を向いて、駆動シャフト及びバランスシャフトが水平方向を向いている場合には、エアーベアリングに対して駆動シャフト又はバランスシャフトの重量がエアーベアリングの軸心方向と直交する方向にかかるため、エアーベアリングの軸心に対して駆動シャフト又はバランスシャフトの軸心がずれ易くなり、このため駆動シャフトの往復移動の精度が悪くなって超仕上げの加工精度も悪くなっていたが、上記実施形態の場合、エアーベアリング10,11,12,13,19,20の軸心に対して駆動シャフト7又はバランスシャフト8の軸心がずれることが少なくなり、駆動シャフト7の往復移動の精度を上げることができ、より高精度で超仕上げ加工を行うことができる。   That is, when the air bearing is oriented horizontally and the drive shaft and balance shaft are oriented horizontally as in the past, the weight of the drive shaft or balance shaft relative to the air bearing is the axial direction of the air bearing. Therefore, the axis of the drive shaft or balance shaft is likely to be displaced with respect to the axis of the air bearing, so that the accuracy of the reciprocating movement of the drive shaft is deteriorated and the machining accuracy of the superfinishing is also deteriorated. However, in the case of the above embodiment, the axis of the drive shaft 7 or the balance shaft 8 is less displaced with respect to the axis of the air bearings 10, 11, 12, 13, 19, and 20. The accuracy of reciprocation can be increased, and super-finishing can be performed with higher accuracy.

なお、前記実施の形態では、バランスシャフト8の上端部にバランスウエイト45が固着されているが、中実にしたバランスシャフト8の径を大きくし又は長くすることにより、バランスウエイト45を省略するようにしてもよい。
また、前記実施の形態では、エアーベアリング10,11,12,13,19,20が設けられているが、これに代え、油その他の加圧流体を封入していて軸心が上下方向を向いた流体ベアリングを設けるようにしてもよい。
In the above embodiment, the balance weight 45 is fixed to the upper end portion of the balance shaft 8. However, the balance weight 45 is omitted by increasing or decreasing the diameter of the solid balance shaft 8. May be.
In the above-described embodiment, the air bearings 10, 11, 12, 13, 19, and 20 are provided. Instead, oil and other pressurized fluids are enclosed, and the axis is directed vertically. An existing fluid bearing may be provided.

1 超仕上げ装置
2 支持フレーム
3 上支持部
4 下支持部
7 駆動シャフト
8 バランスシャフト
10 エアーベアリング
11 エアーベアリング
12 エアーベアリング
13 エアーベアリング
15 カム部材
17 駆動シャフト連動部材
18 バランスシャフト連動部材
19 エアーベアリング
20 エアーベアリング
23 下バネ
24 上バネ
25 下バネ調整機構
26 上バネ調整機構
33 モータ
34 出力軸
37 第1偏心カム
38 第2偏心カム
43 砥石ホルダ
44 超仕上げ砥石
DESCRIPTION OF SYMBOLS 1 Super finishing device 2 Support frame 3 Upper support part 4 Lower support part 7 Drive shaft 8 Balance shaft 10 Air bearing 11 Air bearing 12 Air bearing 13 Air bearing 15 Cam member 17 Drive shaft interlocking member 18 Balance shaft interlocking member 19 Air bearing 20 Air bearing 23 Lower spring 24 Upper spring 25 Lower spring adjustment mechanism 26 Upper spring adjustment mechanism 33 Motor 34 Output shaft 37 First eccentric cam 38 Second eccentric cam 43 Wheel holder 44 Superfinishing wheel

Claims (4)

支持フレーム(2)に上支持部(3)と下支持部(4)とが設けられ、この上下支持部(3,4)に駆動シャフト(7)とバランスシャフト(8)とが互いに平行でかつ上下方向の軸心に沿って移動自在に支持され、駆動シャフト(7)とバランスシャフト(8)との間に両シャフト(7,8)間を通る水平軸心廻りに回転駆動されるカム部材(15)が設けられ、駆動シャフト(7)に固着されかつバランスシャフト(8)にその軸心方向に相対移動自在に外嵌保持された駆動シャフト連動部材(17)と、バランスシャフト(8)に固着されかつ駆動シャフト(7)にその軸心方向に相対移動自在に外嵌保持されたバランスシャフト連動部材(18)とが、カム部材(15)を上下に挟んで設けられ、前記両シャフト連動部材(17,18)の一方をカム部材(15)に向けて上方に付勢する下バネ(23)と、両シャフト連動部材(17,18)の他方をカム部材(15)に向けて下方に付勢する上バネ(24)とが設けられ、前記下支持部(4)に下バネ(23)の付勢力を調整する下バネ調整機構(25)が設けられ、上支持部(3)に上バネ(24)の付勢力を調整する上バネ調整機構(26)が設けられ、超仕上げ砥石(44)を先端側に向けて押圧するように保持した砥石ホルダ(43)が駆動シャフト(7)の端部に装着されており、
前記カム部材(15)は互いに逆方向に偏心した第1偏心カム(37)と第2偏心カム(38)とを有し、駆動シャフト連動部材(17)側が第1偏心カム(37)に接当されると共にバランスシャフト連動部材(18)側が第2偏心カム(38)に接当されて、カム部材(15)の回転により砥石ホルダ(43)を上下方向に往復運動させるようにした超仕上げ装置であって、
駆動シャフト(7)及び砥石ホルダ(43)を加算した重量とバランスシャフト(8)の重量とを均一化するように、駆動シャフト(7)が中空とされると共にバランスシャフト(8)が中実とされ、駆動シャフト連動部材(17)の第1偏心カム(37)への押圧力とバランスシャフト連動部材(18)の第2偏心カム(38)への押圧力が同等になるように、前記上バネ(24)の付勢力よりも下バネ(23)の付勢力が大に設定されていることを特徴とする超仕上げ装置。
The support frame (2) is provided with an upper support portion (3) and a lower support portion (4), and the drive shaft (7) and the balance shaft (8) are parallel to each other on the upper and lower support portions (3, 4). A cam that is supported so as to be movable along the vertical axis and is driven to rotate about a horizontal axis passing between the shafts (7, 8) between the drive shaft (7) and the balance shaft (8). A drive shaft interlocking member (17) provided with a member (15), fixed to the drive shaft (7) and externally held by the balance shaft (8) so as to be relatively movable in the axial direction thereof, and a balance shaft (8 And a balance shaft interlocking member (18) fixedly attached to the drive shaft (7) so as to be relatively movable in the axial direction of the drive shaft (7). Shaft interlocking member (17,1 ) And a lower spring (23) for urging upward toward the cam member (15) and an upper portion for urging the other of the shaft interlocking members (17, 18) downward toward the cam member (15). A lower spring adjustment mechanism (25) for adjusting the urging force of the lower spring (23) is provided on the lower support portion (4), and an upper spring (24) is provided on the upper support portion (3). ) Is provided with an upper spring adjustment mechanism (26), and a grindstone holder (43) that holds the superfinishing grindstone (44) so as to press it toward the distal end is an end of the drive shaft (7). It is attached to
The cam member (15) has a first eccentric cam (37) and a second eccentric cam (38) eccentric in opposite directions, and the drive shaft interlocking member (17) side is in contact with the first eccentric cam (37). Superfinishing is made such that the balance shaft interlocking member (18) side is brought into contact with the second eccentric cam (38) and the grindstone holder (43) is reciprocated in the vertical direction by rotation of the cam member (15). A device,
The drive shaft (7) is hollow and the balance shaft (8) is solid so as to equalize the weight of the drive shaft (7) and the grindstone holder (43) and the weight of the balance shaft (8). The pressing force of the drive shaft interlocking member (17) to the first eccentric cam (37) is equal to the pressing force of the balance shaft interlocking member (18) to the second eccentric cam (38). The superfinishing apparatus, wherein the biasing force of the lower spring (23) is set larger than the biasing force of the upper spring (24).
カム部材(15)が低速回転から高速回転まで可変可能になっていて、カム部材(15)の回転時に駆動シャフト連動部材(17)側が第1偏心カム(37)に対して接当状態を保持すると同時にバランスシャフト連動部材(18)側が第2偏心カム(38)に対して接当状態を保持するべく、カム部材(15)の最大高速回転状態で上バネ(24)の付勢力と下バネ(23)の付勢力とが調整可能とされていることを特徴とする請求項1に記載の超仕上げ装置。   The cam member (15) is variable from a low speed rotation to a high speed rotation, and the drive shaft interlocking member (17) side keeps contact with the first eccentric cam (37) when the cam member (15) rotates. At the same time, the urging force of the upper spring (24) and the lower spring with the cam member (15) rotating at the maximum high speed so that the balance shaft interlocking member (18) side is kept in contact with the second eccentric cam (38). The super finishing device according to claim 1, wherein the urging force of (23) is adjustable. 支持フレーム(2)にモータ(33)が取り付けられ、モータ(33)の出力軸(34)に前記カム部材(15)が外嵌固定されていることを特徴とする請求項1又は2に記載の超仕上げ装置。   The motor (33) is attached to the support frame (2), and the cam member (15) is externally fixed to the output shaft (34) of the motor (33). Super finishing equipment. 駆動シャフト(7)と上下支持部(3,4)及びバランスシャフト連動部材(18)との間並びにバランスシャフト(8)と上下支持部(3,4)及び駆動シャフト連動部材(17)との間に、加圧流体を封入していて軸心が上下方向を向いた流体ベアリング(10,11,12,13,19,20)がそれぞれ設けられていることを特徴とする請求項1〜3のいずれかに記載の超仕上げ装置。   Between the drive shaft (7) and the upper and lower support portions (3, 4) and the balance shaft interlocking member (18) and between the balance shaft (8), the upper and lower support portions (3, 4) and the drive shaft interlocking member (17). 4. Fluid bearings (10, 11, 12, 13, 19, 20), each of which is provided with a pressurized fluid and whose axis is directed vertically, are provided. The super finishing apparatus according to any one of the above.
JP2010146276A 2010-06-28 2010-06-28 Super finishing equipment Active JP5302268B2 (en)

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CN109676514B (en) * 2018-10-19 2024-02-09 石家庄常德数控设备有限公司 Automatic ultra-precise double-row raceway equipment and method for hub bearing jacket one-time clamping
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JPS5525025B1 (en) * 1976-06-15 1980-07-03
JPS63191564A (en) * 1987-02-05 1988-08-09 Mazda Motor Corp Grinding wheel vibrating device for superfinishing machine
JPH03239466A (en) * 1990-02-14 1991-10-25 Nippon Seiko Kk Superfinishing machine vibrator and vibration damping method thereof
JP3493334B2 (en) * 2000-06-28 2004-02-03 西部自動機器株式会社 Super finishing equipment
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