JP5247777B2 - Imprint apparatus and device manufacturing method - Google Patents

Description

  The present invention relates to a transfer apparatus that transfers a pattern formed on a mold to a transfer object.

  As a microfabrication technique in a semiconductor process, a photolithography technique has been widely used. However, in photolithography, a projection exposure process and a development process are required to transfer a desired shape to a transfer object.

  On the other hand, a nanoimprint technique has been proposed in which a three-dimensional pattern is transferred without performing projection exposure or a development process by pressing a mold having a fine three-dimensional pattern against a transfer object (see Non-Patent Document 1). Furthermore, in this nanoimprint technology, a method of transferring a three-dimensional pattern without strongly pressing a mold against an object to be transferred is proposed in Patent Document 1 and the like.

  In this method, a liquid photocurable resin as a transfer object is applied onto a substrate, and a mold is brought into contact with the photocurable resin. Then, the photocurable resin is cured by irradiating light through the mold, and the three-dimensional pattern of the mold is transferred. In this case, since the mold needs to transmit light, for example, glass is used as a material constituting the mold.

  The advantage of this method is that it is not necessary to press the mold strongly against the transfer object, so that the risk of damaging the mold or transfer object is low and the time required for pattern transfer is relatively short. In this method, a pattern having a line width of several tens of nm can be transferred.

  Further, as an application of this method, a step-and-flash type transfer technique has been proposed in which the pattern transfer position is sequentially changed with respect to the transfer object.

JP 2000-194142 A (paragraphs 0012 to 0020, FIGS. 1 and 2 etc.)

Applied Physics Letters, vol. 67 (1995)

  When such a nanoimprint technique is used, it is necessary to keep the mold and the transferred object such as the substrate parallel. If pattern transfer is performed in a non-parallel state, the transfer pressure and transfer height may be non-uniform, or one end of the mold may come into contact with the substrate, causing a part of the mold to be damaged. There is.

  However, when the nanoimprint technique is used for manufacturing a semiconductor chip, the size of the mold is at least as large as that of one chip, that is, about several mm square to several cm square. It is very difficult to press the mold having such a size while keeping it exactly parallel to the transfer object.

  Further, in the manufacture of semiconductor chips and the like, it is usually essential to transfer a pattern a plurality of times, and it is natural that all these transfer patterns need to be accurately overlapped. Therefore, it is necessary to perform alignment between the mold and the substrate with high accuracy for each pattern transfer.

  In a conventional semiconductor exposure apparatus using light exposure, a photomask having a pattern is fixed at a predetermined position, and the position of a precision stage on which the transfer object is placed is controlled to increase the height of the photomask and transfer object. It was aligned with accuracy.

  However, in the nanoimprint technique, the mold and the transferred object come into contact with each other, and thus, for example, when pressing the mold against the transferred object, a force is applied to shift the position in the horizontal direction with respect to the pressing direction against the transferred object. In addition, even when the above-described piece contact occurs, the mold holding mechanism may be deformed, and the mold may be displaced.

  That is, even if the mold and the transferred object are aligned with high accuracy before pressing the mold against the transferred object, it can be said that the mold and the transferred object are in a positional relationship in the pressed state. Absent.

  An object of the present invention is to provide an imprint apparatus that is advantageous in terms of alignment accuracy between a mold and a substrate.

In order to achieve the above-mentioned object, the present invention as one side surface is a cured resin pattern in which a mold having a pattern surface including a three-dimensional pattern is brought into contact with an uncured resin on a substrate to cure the uncured resin. On the substrate, a mold chuck that holds and moves the mold, a substrate stage that holds and moves the substrate, and alignment between the mold and the substrate. Alignment means to perform, the alignment means, the first alignment means for performing alignment between the mold and the substrate in a state where the mold and the uncured resin are not in contact with each other, Second alignment means for performing alignment between the mold and the substrate in a state where the mold and the uncured resin are in contact with each other The first alignment means and the second alignment means have different configurations in the drive means for relatively moving the mold and the substrate, and the second alignment means The first alignment includes at least one of a drive unit that drives the mold stage connected to the mold chuck and a drive unit that drives the substrate stage, and an auxiliary actuator that supplements the at least one drive force as the drive unit. The means does not include the auxiliary actuator as the driving means, but includes at least one of the auxiliary actuators, and the auxiliary actuator has a driving force exceeding a frictional force in a state where the mold and the uncured resin are in contact with each other. As the driving means in the second alignment means occurs, Serial, characterized in that to compensate for at least one of the driving force.
In another aspect of the present invention, a mold having a pattern surface including a three-dimensional pattern is brought into contact with an uncured resin on a substrate to cure the uncured resin, and a cured resin pattern is formed on the substrate. An imprint apparatus that holds and moves the mold, a substrate stage that holds and moves the substrate, and alignment means that aligns the mold and the substrate. And the alignment means includes: first alignment means for performing alignment between the mold and the substrate in a state where the mold and the uncured resin are not in contact with each other; and the mold and the uncured Second alignment means for performing alignment between the mold and the substrate in a state where the resin is in contact with each other, and the first alignment means The lining means and the second alignment means have different configurations in the measuring means for measuring the relative position between the mold and the substrate, and the first alignment means serves as the measuring means on the mold. Including an alignment scope for measuring an alignment state between the formed alignment mark and the alignment mark formed on the substrate, and the second alignment unit does not include the alignment scope as the measurement unit, An interferometer for measuring the position of the mold relative to the substrate is included.

  According to the present invention, for example, it is possible to provide an imprint apparatus that is advantageous in terms of alignment accuracy between a mold and a substrate.

1 shows a schematic configuration of a nanoimprint lithography apparatus that is Embodiment 1 of the present invention. FIG. FIG. 3 is a detailed view around the mold stage in the first embodiment. FIG. 3 is a diagram for explaining an arrangement of transfer shot positions on a wafer in Embodiment 1. 5 is a flowchart for explaining a pattern transfer procedure according to the first embodiment. 5 is a flowchart for explaining a pattern transfer procedure according to the first embodiment. The figure explaining the pattern transfer procedure in the nanoimprint lithography apparatus which is Example 2 of this invention. FIG. 6 is a diagram illustrating a pattern transfer procedure in a nanoimprint lithography apparatus that is Embodiment 3 of the present invention. The figure explaining the relationship between the alignment mark distance in Example 2, 3, and alignment measurement error. 5 is a flowchart for explaining an outline of a pattern transfer procedure in the first embodiment. 9 is a flowchart for explaining an example of processing in step 4 of FIG. FIG. 9 is a flowchart for explaining another processing example in step 4 of FIG. 8. FIG. The flowchart explaining the outline | summary of global alignment. 9 is a flowchart showing a manufacturing process of a semiconductor device that is Embodiment 4 of the present invention.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 shows the configuration of a nanoimprint lithography apparatus (transfer apparatus) that is Embodiment 1 of the present invention.

  In FIG. 1, M is a mold having a fine three-dimensional pattern on its lower surface, and is held under the mold chuck MC by a method such as vacuum suction.

  The mold stage MS is supported by a frame (not shown) of the apparatus main body, and can be driven to rotate in the X, Y, Z axis directions and around the respective axes.

  The mold stage MS and the mold chuck MC are connected to each other via a low elastic joint ME formed of an elastic member. The low elastic joint part ME elastically absorbs displacement and deformation by acting as a spring member having a small stroke. When the mold M comes into contact with the wafer W, the non-elastic pressure applied to the mold M is reduced by the deformation of the low elastic joint ME.

  Since the stroke required for the low elastic joint ME is extremely small, it is difficult to achieve desired performance by controlling the shape like a coil spring or a leaf spring. Therefore, it is desirable that the material itself has a remarkably low elasticity as compared with the surrounding members, and therefore, it is desirable to elastically absorb the displacement and deformation without specially modifying the shape. As the member having such a property, for example, a beta-type titanium alloy containing niobium, tantalum, vanadium, zirconium, hafnium, oxygen, which is called rubber metal (trade name) or the like, and having a body-centered cubic structure can be used. .

  The mold stage MS, the low elastic joint ME, and the mold chuck MC have a hollow structure so that light can be introduced from above to the mold M.

  The wafer W is held on the wafer chuck WC by a method such as vacuum suction. The wafer stage WS is installed on the surface plate B and can be driven to rotate in the X, Y, Z axis directions and around the respective axes. The positioning accuracy of the wafer stage WS is sufficiently commensurate with the minimum pattern to be transferred.

  A wafer stage reference mark base WK is installed on the wafer stage WS. On the wafer stage reference mark base WK, a plurality of optical marks necessary for the initial positioning of the mold M are provided at substantially the same height as the wafer W. It is desirable that the height of the wafer stage reference mark base WK can be changed.

  The driving range of the wafer stage WS needs to be wide enough to make the wafer stage reference mark base WK face the mold M in addition to the range corresponding to the entire surface of the wafer W.

  T is a tank filled with an object to be transferred or a photocurable resin LP as a resist. An introduction path C is connected to the tank T via a valve V, and the opening of the introduction path C is located near the edge of the mold M.

  LU is a light source unit. The light source unit LU includes a lamp LM and a lens LS, and generates curing ultraviolet UV for curing the photocurable resin LP. The lamp LM can be turned on / off (lighted / extinguished). The mold M is made using a material such as quartz glass and transmits the ultraviolet ray UV for curing.

  BC is a bar code printed on the mold M, and MR1 is a reflecting mirror installed on the mold M. The barcode BC includes identification information for identifying the mold M. The barcode BC is read by a barcode reader BCR. The database DB stores mold specific data MDAT corresponding to the identification information of the mold M. The mold-specific data MDAT includes read-only data required for pattern transfer and data related to transfer history updated after pattern transfer. By installing such a barcode BC on the mold M, it is possible to easily manage information unique to the mold M.

  IF1 is an interferometer and generates interference measurement light L1. The interference measurement light L1 is reflected by the reflecting mirror MR1. FIG. 1 shows only the interferometer IF1 and the reflecting mirror MR1, but actually, a sufficient number (a plurality) of interferometers and reflecting mirrors for grasping the position and posture of the mold M are provided. is set up.

  The CTR is a controller, which includes a processor PRC and a database DB, and is connected to each part of the apparatus. The processor PRC incorporates software necessary for controlling the entire apparatus.

  AS is an alignment scope including a semiconductor laser and an observation optical system, and measures the positioning of the mold M relative to a predetermined position on the apparatus and the relative position between the mold M and each shot position on the wafer W. Used when measuring. The alignment scope AS is configured to be movable by a drive mechanism supported by a frame (not shown) of the apparatus main body.

  WH is a wafer height sensor including a plurality of capacitance sensors, and the height distribution of the wafer W is measured by scanning the entire surface of the wafer W.

  FIG. 2 is a diagram illustrating the mold M and its periphery in detail. As shown in FIG. 2, pressure sensors PS1 and PS2 are provided on the lower surface of the mold chuck MC, and the pressure applied when the mold M is pressed against the wafer W is monitored.

  Actually, since the photo-curable resin LP as the transfer object is disposed between the mold M and the wafer W as the substrate, the mold M and the wafer W are not in direct contact with each other. However, the fact that the mold M is pressed against the wafer W via the photocurable resin LP may be referred to as “the mold M is pressed against the wafer W” in this embodiment.

  A mold reference position mark MB and a mold alignment mark MK are formed on the pattern surface PT of the lower surface of the mold M together with the three-dimensional pattern PTR.

  The three-dimensional pattern PTR includes a pattern for transferring an alignment mark necessary for the next and subsequent transfer onto the photocurable resin LP on the wafer W.

  AC10 and AC11 are auxiliary actuators composed of piezoelectric elements. When the mold M is pressed against the wafer W and the mold stage MS is driven to drive the mold M in the XY direction, the AC 10 and AC 11 are driven by the frictional force between the mold M and the wafer W. It works to supplement the driving force to overcome it.

  FIG. 3 shows the wafer W in a state where a plurality of pattern transfer shots have been received by this apparatus. SH1 and SH2 on the wafer W are transfer shot positions formed in alignment by receiving a plurality of pattern transfer shots. Wafer alignment marks AM11 and AM12 are formed at positions adjacent to the respective transfer shot positions by pattern transfer by the previous nanoimprint or photolithography.

  When the mold M is mounted on the apparatus, the barcode BC is read by the barcode reader BCR, and the controller CTR extracts the mold specific data MDAT corresponding to the identification information of the mold M from the database DB. The mold specific data MDAT includes information on the three-dimensional pattern of the mold M. The controller CTR writes the identification information of this apparatus in the mold specific data MDAT.

  When the mold M is carried into the apparatus, it is held on the mold chuck MC. A reference alignment operation for aligning the optical mark on the wafer stage reference mark base WK shown in FIG. 1 and the mold reference position mark MB on the mold M is performed, and the mold M is positioned at a predetermined position on the apparatus. An alignment scope AS is used for this alignment operation.

  Further, the height distribution of the wafer W is measured in advance by the wafer height sensor WH, and the inclination of each part of the wafer W is estimated based on the result. In the pattern transfer operation performed thereafter, the inclination of the wafer W or the mold M is adjusted according to the estimated inclination.

  The adjustment requires data on the parallelism between the mounting surface PB of the mold M and the pattern surface PT, and the value is included in the mold specific data MDAT.

  Hereinafter, a pattern transfer procedure by the nanoimprint lithography apparatus of this embodiment will be described. First, an outline of pattern transfer will be described using the flowchart of FIG. The operation shown in the flowchart is controlled by the controller CTR according to the computer program.

  In step (abbreviated as S in the figure) 1, the wafer stage WS is driven so that the target shot position on the wafer W, that is, the vicinity of the next pattern transfer position, faces the mold M.

  Next, in step 2, the target shot position of the wafer W and the mold M are accurately opposed using the alignment scope AS as the first measuring means (first alignment operation).

  Next, in step 3, a photocurable resin LP is introduced between the wafer W and the mold M. The amount of the photocurable resin LP introduced is determined according to the area of the pattern surface PT of the mold M. The photocurable resin LP may be applied on the wafer W in advance (prior to step 2). Up to this point, as shown in FIGS. 4A (a) and 4 (b), the wafer W and the mold M are maintained at the first distance h1.

  Next, in step 4, the mold M is pressed so as to be in close contact with the wafer W. “Substantially” means that the thickness of the minimum portion of the photo-curable resin LP disposed between them does not become zero.

  In step 4, the position of the mold M in the XY direction (on the XY plane) with respect to the wafer W and the tilt with respect to the XY plane or the wafer W are measured using the interferometer IF1 as the second measuring means. In the following, in the present embodiment, these positions and inclinations are collectively referred to as “positions” with respect to the XY plane. Further, this measurement corresponds to the measurement related to the position of the mold M using the second measuring means. Based on the measurement result, the relative position and the parallelism between the mold M and the wafer W are corrected while driving the auxiliary actuators AC10 and AC11 if necessary (second alignment operation).

  In this embodiment, the case where the interferometer IF1 is used as the second measuring means will be described. However, in the present invention, other measuring means may be used. Moreover, you may use the alignment scope similar to a 1st measurement means. However, in this case, the relative position in the XY direction between the mold M and the wafer W and the inclination based on the XY plane can be measured.

  Next, in step 5, the light curable resin LP is irradiated with ultraviolet rays from the light source unit LU. Thereby, the photocurable resin LP is cured.

  Next, in step 6, the mold M is pulled away from the wafer W (cured photocurable resin LP).

  In step 7, it is confirmed whether or not the current transfer shot is the final shot. If it is the final shot, the process ends. If not, the process returns to step 1 to process the next transfer shot. .

  Hereinafter, the alignment method in the present embodiment will be described with reference to FIGS. 4A and 4B. FIG. 4 is a diagram showing a transfer procedure to the transfer shot position SH1, and the mold stage MS and the like are omitted.

  FIG. 4A (a) shows a first alignment operation (step). As shown in this figure, the wafer alignment mark AM12 and the mold alignment mark MK are observed using the alignment scope AS as the first measuring means in a state where the wafer W and the mold M are separated from each other by the first distance. . By this observation, measurement related to the position of the mold M, specifically measurement of the relative positional relationship between the mold M and the wafer W is performed, and the mold M is controlled by controlling the wafer stage WS so that these two marks overlap. And wafer W are aligned. The alignment scope AS, the wafer stage WS, and the controller CTR that controls the alignment scope AS constitute a first alignment means.

  Here, the mold alignment mark MK and the wafer alignment mark AM12 are designed so that the most accurate measurement can be performed when the distance between the mold alignment mark MK and the wafer alignment mark AM12 is the first distance h1. At this time, the photocurable resin LP is not yet introduced on the wafer W, and the mold M is naturally not in contact with the photocurable resin LP.

  Although not shown, in the actual first alignment operation, it is necessary to observe at least another set of wafer alignment marks and mold alignment marks to align the wafer W and the mold M.

  Information on the position of the mold alignment mark MK with respect to the mold reference position mark MB is necessary for the first alignment operation, and is included in the mold specific data MDAT.

  The procedure so far is the same as the alignment operation of the proximity type semiconductor exposure apparatus in which the photomask and the wafer are opposed to each other at a narrow interval.

  Here, the reference alignment operation for positioning the mold M to the predetermined position after carrying the mold M into the apparatus, and the first alignment operation for aligning the wafer alignment mark AM12 and the mold alignment mark MK will be supplemented.

  In these alignment operations, since it is necessary to perform high-precision alignment in a state where the two alignment marks are separated from each other in the vertical direction, it is desirable to use a diffraction grating as the alignment marks related to these alignment operations.

  A method of using a diffraction grating as an alignment mark has been mainly studied as an alignment method in proximity X-ray exposure, and is disclosed in Japanese Patent Application Laid-Open Nos. 62-261003, 11-150063, and 11-162835. Has been.

  First, in the reference alignment operation for positioning the mold M at a predetermined position on the apparatus, the alignment measurement light AL1 from the alignment scope AS travels through the mold M and passes through the mold reference position mark MB. Then, the light is reflected by a mark (not shown) formed at the predetermined position, passes through the mold reference position mark MB again, and returns to the alignment scope AS.

  Similarly, in alignment between the wafer alignment mark AM12 and the mold alignment mark MK, the alignment measurement light AL1 from the alignment scope AS travels through the mold M and passes through the mold alignment mark MK. Then, it is reflected by the wafer alignment mark AM12, passes through the mold alignment mark MK again, and returns to the alignment scope AS. Note that the position of the alignment scope AS is changed as necessary.

  In this embodiment, the alignment measurement light AL1 is incident on the alignment mark perpendicularly, but the alignment measurement light AL1 may be incident on the alignment mark obliquely to perform measurement.

  In this way, the wafer alignment mark AM12 and the mold alignment mark MK are observed by the alignment scope AS. Then, the interferometer IF1 is operated in a state where these two marks overlap each other, and the interference measurement light L1 is reflected by the reflecting mirror MR1 to measure the distance to the reflecting mirror MR1. Further, the position (position and inclination) of the mold M is obtained by using the result of the same measurement using another interferometer (not shown) and another reflecting mirror on the mold M, and the memory MRY in the controller CTR is obtained. (See FIG. 1).

  The position information of the reflecting mirror MR1 with reference to the mold reference position mark MB is necessary for these operations, and is included in the mold specific data MDAT.

  In addition, since the optimum distance between the mold M and the wafer W required for performing the alignment with the highest accuracy differs depending on the design of the alignment mark, data indicating the type of the mold alignment mark MK is necessary. It is included in the unique data MDAT.

  Next, as shown in FIG. 4A (b), the photocurable resin LP is introduced from the introduction path C between the wafer W and the mold M (step 3 in FIG. 8). Thereby, the mold M contacts the photocurable resin LP. However, the distance between the mold M and the wafer W remains the first distance h1.

  As described above, the photocurable resin LP may be dropped onto the wafer W (the current shot position) prior to the alignment between the wafer alignment mark AM12 and the mold alignment mark MK. However, in this case, the space between the wafer alignment mark AM12 and the mold alignment mark MK is filled with the photocurable resin LP instead of air. Therefore, it is necessary to design both the alignment mark and the alignment scope AS in consideration of the refractive index of the photocurable resin LP.

  Next, the mold M is pressed against the wafer W as shown in FIG. Actually, the distance between the mold M and the wafer W is set to a second distance h2 that is shorter than the first distance h1. In this state, the outputs of the pressure sensors PS1 and PS2 provided in the mold chuck MC are observed, and the pressing operation is terminated when the pressure reaches a predetermined pressure.

  The “predetermined pressure” here is determined from the material of the mold M, the size of the pattern surface PT, and the height of the three-dimensional pattern PTR from the viewpoint of preventing the mold M from being damaged. These data are included in the mold specific data MDAT. It is.

  At the time of pressing, the mold stage MS may be driven toward the wafer W, or the wafer stage WS may be driven toward the mold M.

  Here, even if the mold M is pressed against the wafer W in a tilted state, the low elastic joint portion ME disperses the pressure caused by one piece, so that the mold M is prevented from being damaged.

  Then, the second alignment operation (step) is performed in the state shown in FIG. 4A (c). Here, the interferometer IF1 as the second measuring means and another interferometer (not shown) are operated to determine the current position of the mold M, and before pressing (photocurable resin LP shown in FIG. 4A). Compared with the measured and memorized position before the introduction). If there is a positional shift in the XY directions, the position is corrected by driving the mold stage MS and moving the mold M in a direction to eliminate the positional shift. The interferometer IF1 (+ reflecting mirror MR1), the mold stage MS, and the controller CTR for controlling the mold stage constitute second alignment means.

  In the second alignment operation, equivalent correction is possible even if the wafer stage WS is driven instead of or together with the mold stage MS.

  At this time, if the driving force of the mold stage MS is insufficient, the auxiliary actuators AC10 and AC11 may be driven.

  Here, a supplementary description will be given of the above-described pressing and position correction processing. These pressing and position correction processes are performed in step 4 of the flowchart of FIG. 8, and the contents of the process in step 4 are described in detail in the flowchart of FIG.

  In step 11 of FIG. 9, it is determined whether or not the pressing pressure of the mold M has reached a predetermined pressure. If the pressure has reached the predetermined pressure, the process proceeds to step 13, and if not, the process proceeds to step 12.

  In step 12, the mold stage MS is driven in the Z direction. As a result, the mold M is brought closer to the position of the second distance h2 from the position of the first distance h1 with respect to the wafer W. And it returns to step 11 again.

  In step 13, as described above, the current position of the mold M measured by the interferometer IF1 or the like is compared with the position measured before pressing and stored in the memory MRY, and the mold M is pressed to a predetermined position, that is, pressed. Determine if it is in the previous position. If it is at the predetermined position, the process is terminated.

  In step 14, the mold stage MS is driven to correct the position of the mold M, and the process returns to step 13.

  In the present embodiment, the case where the position of the mold M is corrected after the mold M is pressed against the wafer W has been described. However, during the pressing operation, that is, during the movement from the position of the first distance h1 to the position of the second distance h2, the measurement by the interferometer IF1 or the like is continuously performed, and the position of the mold M is performed while performing the pressing operation. Correction may be performed. This is because when the position correction is performed after the mold M is pressed against the wafer W, the mold alignment mark MK and the wafer alignment mark AM12 are far away from each other if the positional deviation of the mold M accompanying the pressing is large. In such a case, the position correction operation may not be performed sufficiently. However, such a problem can be prevented by performing the position correction while performing the pressing operation.

  The pressing and position correction processing in this case will be supplemented using the flowchart of FIG. These pressing and position correction processes are also performed in step 4 of the flowchart of FIG.

  When the process is started, the process first branches from step 20 to step 21 and step 23, and the processes in these steps are performed almost simultaneously in parallel.

  In step 21, it is determined whether or not the pressing pressure of the mold M has reached a predetermined pressure. If the pressure has reached the predetermined pressure, the process proceeds to step 29. If not, the process proceeds to step 22.

  In step 22, the mold stage MS is driven in the Z direction, and the mold M is brought close to the wafer W. Then, the process returns to step 21.

  On the other hand, in step 23, the mold M compares the current position of the mold M measured by the interferometer IF1 as described above with the position measured before pressing and stored in the memory MRY. Then, it is determined whether or not the mold M is at a predetermined position, that is, a position before pressing. If it is at the predetermined position, the process is terminated, and the process proceeds to step 25. If not, the process proceeds to step 24.

  In step 25, it is determined whether the pressing process being performed in parallel has been completed. If completed, the process proceeds to step 29. If not completed, the process returns to step 23.

  In step 24, the mold stage MS is driven to correct the position of the mold M, and the process returns to step 23.

  In step 29, it is confirmed that the two branched processes have been completed, and the entire process is terminated.

  When the second alignment operation in the state shown in FIG. 4A (c) is thus completed, as shown in FIG. 4B (d), the curing ultraviolet ray UV from the light source unit LU (see FIG. 1) is irradiated for a predetermined time. Then, the photocurable resin LP is cured. LPS is a cured photocurable resin.

  The determination of the “predetermined time” described above requires the light transmittance of the mold M, and the value is included in the mold specific data MDAT. The “predetermined time” may be obtained from the material and thickness of the mold M. In this case, the value of the thickness of the mold M is included in the mold specific data MDAT.

  Next, as shown in FIG. 4B (e), the mold M is separated from the wafer W (cured photocurable resin LPS), and 1 is added to the value of the number of times the mold M is used in the mold specific data MDAT. The pattern transfer operation at the shot position SH1 is completed.

  By repeating the above operation for all transfer shots, the pattern PTR of the mold M can be transferred to almost the entire surface of the wafer W.

  In FIG. 4B (e), an unnecessary layer of the cured photocurable resin LPS remains on the wafer W from which the mold M has been separated. After the pattern transfer to all transfer shots is completed, the entire surface of the wafer W is etched to remove the remaining unnecessary photocurable resin layer. As a result, as shown in FIG. 4B (f), a photo-setting resin pattern LPS1 having only necessary portions can be obtained.

  Using the photo-setting resin pattern LPS1 thus obtained as a resist layer, a circuit pattern is formed on the wafer W by performing a process such as etching on the wafer W as in the conventional semiconductor manufacturing process. . As the width (line width) of this circuit pattern, a level of 100 nm or less, and even a 10 nm level can be realized.

  Further, as described above, since the alignment mark necessary for the next and subsequent pattern transfer can be transferred by the mold M, it is possible to carry out the overlay exposure of a plurality of patterns indispensable for semiconductor manufacturing. Therefore, the nanoimprint lithography apparatus of this embodiment can be used for semiconductor manufacturing.

  In the above description, it is detected that the alignment marks formed on both the mold M and the wafer W match for each transfer shot. This method is known as die-by-die alignment, and it is difficult to increase the transfer throughput while reliably obtaining high accuracy.

  Recently, an alignment method called a global alignment method is often used in a reduction projection type or proximity type semiconductor exposure apparatus. Also in the nanoimprint lithography apparatus of this embodiment, the throughput can be increased by adopting this method.

  Hereinafter, an alignment method using the global alignment method in the nanoimprint lithography apparatus of the present embodiment will be described.

  In this method, first, it is assumed that predetermined ideal transfer shot position and wafer alignment mark position information is stored in the database DB. Prior to actual transfer, the alignment measurement described with reference to FIG. 4A is performed on several transfer shots on the wafer W. The actual transfer shot position information obtained by these measurements is compared with predetermined ideal transfer shot position information, and the actual positions of all transfer shots are estimated.

  Here, the global alignment method will be supplemented using the flowchart of FIG. First, in step 51, several transfer shot positions (sample shot positions) to be measured are selected. It is also possible to determine the transfer shot position to be measured in advance and store the number in the database DB.

  In step 52, the wafer stage WS is driven to move the mold M to the vicinity of one position among the plurality of sample shot positions.

  In step 53, the mold alignment mark MK and the wafer alignment mark AM12 are matched. The sample shot position is obtained from the positions of the mold stage MS and the wafer stage WS at that time, and stored in the memory MRY in the controller CTR.

  In the alignment measurement using the diffraction grating described above, it is possible to know the absolute amount of deviation between alignment targets. Therefore, even if the mold alignment mark MK and the wafer alignment mark AM12 do not coincide with each other, the sample shot position can be obtained by measuring the shift amount between them.

  In step 54, it is determined whether measurement of all sample shots has been completed. If completed, the process proceeds to step 55. If not completed, the process returns to step 52 to measure the next sample shot position.

  In step 55, all the transfer shot positions are estimated from the stored information of all the sample shot positions and the information of the ideal transfer shot position determined in advance, and the process is terminated.

  It moves directly to the position of each transfer shot estimated in this way. Further, at each transfer shot position, as described above, processing such as interference measurement by the reflecting mirror MR1 and the interferometer IF1, introduction of the photocurable resin LP, and irradiation of the curing ultraviolet ray UV is performed. Then, the three-dimensional pattern PTR can be transferred with high throughput.

  In the first embodiment, the nanoimprint lithography apparatus using the interferometer using the reflection mirror provided in the mold M as the second measuring unit has been described. In this embodiment, a nanoimprint lithography apparatus using a step other than an interferometer as the step as the second measuring means will be described with reference to FIG.

  FIG. 5 shows a pattern transfer procedure that is almost the same as the pattern transfer procedure shown in FIGS. 4A and 4B in the first embodiment, except that an interferometer does not exist and a mold M is provided with a reflecting mirror. This is different from the first embodiment.

  In FIG. 5, the mold alignment mark MK and the wafer alignment mark AM12 are formed of diffraction gratings as in the first embodiment. However, the alignment marks MK and AM12 are designed so that the alignment measurement can be performed with the highest accuracy when the molds M are almost in close contact with each other, in other words, the mold M is pressed against the wafer W through the photocurable resin LP. Has been.

  FIG. 7A shows the relationship between the alignment measurement error due to the combination of the mold alignment mark MK and the wafer alignment mark AM12 in this embodiment and the distance between the alignment marks in the Z direction (vertical direction). Here, the value of the alignment measurement error must be less than or equal to a predetermined tolerance TE in a whole range of distances that can be taken by both alignment marks MK and AM12. Here, as shown in FIG. 5C, the second distance h2 is a distance between the alignment marks MK and AM12 when the mold M and the wafer W are substantially in close contact with each other. The first distance h1 is a distance between the alignment marks MK and AM12 when alignment is performed before the mold M is pressed against the wafer W, as shown in FIG. As shown in FIG. 7A, when the distance between the alignment marks MK and AM12 is the second distance h2, the value of the alignment measurement error is minimum.

  First, as shown in FIG. 5A, with the mold M held at the first distance h1 from the wafer W, the alignment measurement light from the alignment scope AS to the mold alignment mark MK and the wafer alignment mark AM12. Irradiate AL1. Then, the alignment state is observed (measured). Thereafter, the mold stage MS or the wafer stage WS is driven so that the mold alignment mark MK and the wafer alignment mark AM12 overlap and match.

  Next, as shown in FIG. 5B, a photocurable resin LP is introduced between the mold M and the wafer W in the same manner as in the first embodiment.

  Then, as shown in FIG. 5C, the mold M or the wafer W is moved vertically, and the mold M is pressed against the wafer W with a predetermined pressure.

  Further, the alignment state is measured so that the mold alignment mark MK and the wafer alignment mark AM12 coincide with each other while irradiating the alignment measurement light AL1 from the alignment scope AS. Then, the mold stage MS or the wafer stage WS is driven (and the auxiliary actuators AC10 and AC11 are also driven if necessary) to align the mold M with a predetermined position on the wafer W.

  As described above, in this embodiment, the alignment marks MK and AM12 are designed so that the most accurate measurement can be performed when the alignment marks MK and AM12 are in close contact with each other. Therefore, the alignment measurement in the state of FIG. 5C has higher accuracy than the alignment measurement in the state of FIG. 5A, and a desired alignment accuracy can be obtained.

  In this example, the procedure of irradiating the curing ultraviolet ray UV to cure the photocurable resin LP is the same as the procedure described in Example 1 with reference to FIG. 4B.

  Further, in the present embodiment, as described in the first embodiment, the global alignment method can be applied to the alignment operation in the state where the mold M and the wafer W are separated from each other by the first distance h1. .

  Further, in the present embodiment, as in the first embodiment, the alignment of the mold alignment mark MK (mold M) and the wafer alignment mark AM12 (wafer W) may be performed in the process of pressing the mold M against the wafer W. Is possible.

  According to the present embodiment described above, highly accurate pattern transfer can be realized with a simpler configuration than in the first embodiment.

  FIG. 6 shows a pattern transfer procedure in the nanoimprint lithography apparatus that is Embodiment 3 of the present invention. This pattern transfer procedure is substantially the same pattern transfer procedure as the pattern transfer procedure shown in FIG. 5 in the second embodiment, except that alignment marks are added on the mold M and the wafer W. Different from the second embodiment.

  In FIG. 6, the mold alignment marks MK1 and MK2 and the wafer alignment marks AM13 and AM14 are formed of diffraction gratings as in the first and second embodiments. However, the mold alignment mark MK1 and the wafer alignment mark AM13 corresponding to the mold alignment mark MK1 are designed so that measurement can be performed with the highest accuracy when the distance between them is a first distance h1.

  On the other hand, the mold alignment mark MK2 and the wafer alignment mark AM14 corresponding to the mold alignment mark MK2 are designed so that measurement can be performed with the highest accuracy when they are in close contact with each other, that is, when they are separated by the second distance h2. Yes. This state is shown in FIGS. 7B and 7C.

  FIG. 7B shows the relationship between the alignment measurement error due to the combination of the mold alignment mark MK1 and the wafer alignment mark AM13, and the distance between the alignment and the marks MK1 and AM13 in the Z direction (vertical direction). Similarly, FIG. 7C shows the relationship between the alignment measurement error due to the combination of the mold alignment mark MK2 and the wafer alignment mark AM14, and the distance between both alignments and the marks MK2 and AM14 in the Z direction.

  The measurement accuracy by the combination of the mold alignment mark MK1 and the wafer alignment mark AM13 and the combination of the mold alignment mark MK2 and the wafer alignment mark AM14 is different from that of the second embodiment described with reference to FIG. This is because it is only necessary to obtain a high accuracy only in the vicinity of the distance between the alignment marks to be used (in other words, other distances may not be within the allowable error range).

  First, as shown in FIG. 6A, with the mold M kept at the position of the first distance h1 from the wafer W, the alignment measurement light from the alignment scope AS to the mold alignment mark MK1 and the wafer alignment mark AM13. Irradiate AL1. Then, the alignment state is measured. Then, the mold stage MS or the wafer stage WS is driven so that the mold alignment mark MK1 and the wafer alignment mark AM12 overlap and match.

  Next, as shown in FIG. 6B, a photocurable resin LP is introduced between the mold M and the wafer W in the same manner as in the first and second embodiments.

  Next, as shown in FIG. 6C, the mold M or the wafer W is moved vertically, and the mold M is pressed against the wafer W with a predetermined pressure.

  Then, the alignment scope AS is moved to the mold alignment mark MK2 side, and the alignment measurement light AL1 is irradiated. Thereby, the alignment state can be measured so that the mold alignment mark MK2 and the wafer alignment mark AM14 overlap and match. Then, the mold stage MS or the wafer stage WS is driven (and the auxiliary actuators AC10 and AC11 are also driven if necessary) to align the mold M with a predetermined position on the wafer W.

  Hereinafter, the procedure of irradiating the curing ultraviolet ray to cure the photocurable resin LP is the same as that described with reference to FIG. 4B in the first embodiment.

  Also in the present embodiment, as in the first embodiment, the global alignment method can be applied to the alignment operation in a state where the mold M and the wafer W are separated from each other by the first distance h1.

  Further, in the present embodiment, as in the first embodiment, the alignment of the mold alignment mark MK2 (mold M) and the wafer alignment mark AM14 (wafer W) may be performed in the process of pressing the mold M against the wafer W. Is possible.

  According to the present embodiment described above, highly accurate pattern transfer can be realized with a simpler configuration than in the first embodiment. However, in this case, since alignment is performed while changing the distance between the mold M and the wafer W, it is necessary to design the alignment mark so as to obtain high measurement accuracy over a wide distance range.

  According to the present embodiment described above, high-precision alignment can be performed with a relatively simple configuration by changing the alignment mark to be used according to the distance between the mold M and the wafer W. .

  Further, in the nanoimprint lithography apparatus described in the first embodiment, the mold specific data MDAT is held in the database DB. However, the present invention is not limited to this, and a nanoimprint lithography apparatus similar to that of the first embodiment can be configured using other storage means. For example, it is a nanoimprint lithography apparatus in which a wireless tag attached to the mold M holds mold-specific data, and a transceiver that reads and writes data on the wireless tag in a non-contact manner is controlled by a controller CTR.

  In this case, it is more preferable to include mold identification information in the mold specific data MDAT because the mold can be easily identified.

  The transceiver does not necessarily need to be controlled by the controller CTR. For example, the transceiver may be controlled by a host computer or the like coupled via a network, and the mold specific data MDAT may be exchanged via the network. it can.

  In all of the embodiments described so far, since the photocurable resin is used as an object to be transferred, the mold M has optical transparency, but the present invention is not limited to this. For example, in a nanoimprint lithography apparatus of a type in which a mold made of a material having strength higher than that of glass such as metal is pressed against a processing target such as a material softened by heating a thermoplastic resin, and the processing target is plastically deformed. The invention can be applied.

  In this case, for example, by attaching a transparent member to the side surface of the mold and providing the transparent member with an alignment mark, alignment can be performed in the same procedure as in the above-described embodiments. Moreover, it can comprise by the procedure similar to each Example demonstrated previously also by comprising with a transparent member so that a part of mold may penetrate up and down, and providing this transparent member with an alignment mark.

  Next, a semiconductor device manufacturing process using the nanoimprint lithography apparatus of each embodiment described above will be described with reference to the flowchart of FIG. In step 101 (circuit design), a semiconductor device circuit is designed. In step 102 (mold creation), a necessary number of molds are created based on the circuit designed in step 101. On the other hand, in step 103 (wafer manufacture), a wafer is manufactured using a material such as silicon.

  The next step 104 (wafer process) is called a pre-process, and an actual circuit is created on the wafer by using the mold and the wafer and using the nanoimprint lithography apparatus of each of the above embodiments. Note that step 104 is repeated as many times as necessary by replacing the mold as necessary. In addition, a lithography apparatus of a system other than the nanoimprint lithography system such as a reduction projection exposure apparatus can be used as a part of this repetition.

  The next step 105 (assembly) is called a post-process, and is a process for converting the wafer processed in step 104 into a semiconductor chip. This post-process includes assembly processes such as an assembly process (dicing and bonding) and a packaging process (chip encapsulation).

  In the next step 106 (inspection), inspections such as an operation confirmation test and a durability test of the semiconductor device created in step 105 are performed. A semiconductor device is completed through these processes, and is shipped in Step 107.

  The wafer process in step 104 includes any of the following steps. That is, an oxidation step for oxidizing the surface of the wafer. Alternatively, a CVD step for forming an insulating film on the wafer surface. Alternatively, an electrode forming step of forming electrodes on the wafer by vapor deposition. Also, an ion implantation step for implanting ions into the wafer. Alternatively, a resist processing step of applying a photocurable resin to the wafer. Alternatively, a transfer step of transferring the circuit pattern to the wafer after the resist processing step by the nanoimprint lithography apparatus. Alternatively, an etching step of removing a portion of the photocurable resin other than the transfer pattern from the wafer processed in the transfer step. Alternatively, it is one of the resist stripping steps excluding the photocurable resin that is no longer necessary. By repeating these steps, multiple circuit patterns are formed on the wafer.

  As described above, according to the first to third embodiments, it is possible to make it difficult to damage a precise mold. Further, by correcting the positional deviation that occurs when the mold is pressed against the substrate through the transfer object, the alignment between the mold and the substrate can be performed with high accuracy.

M mold MS mold stage MC mold chuck ME low elastic joint W wafer WC wafer chuck WK wafer stage reference mark stand MB mold reference position mark MK, MK1, MK2 mold alignment mark AM12, AM13, AM14 Wafer alignment mark AS alignment scope MR1 reflection Mirror AC10, AC11 Auxiliary actuator PS1, PS2 Pressure sensor LP Photo-curing resin C Introduction path UV UV IF1 interferometer WH Wafer height sensor CTR controller PT Pattern surface

Claims (4)

An imprint apparatus for bringing a mold having a pattern surface including a three-dimensional pattern into contact with an uncured resin on a substrate to cure the uncured resin and forming a cured resin pattern on the substrate,
A mold chuck that holds and moves the mold; and
A substrate stage that holds and moves the substrate;
Alignment means for performing alignment between the mold and the substrate ,
The alignment means includes a first alignment means for performing alignment between the mold and the substrate in a state where the mold and the uncured resin are not in contact with each other, and the mold and the uncured resin. Second alignment means for aligning the mold and the substrate in contact with each other, wherein the first alignment means and the second alignment means are the mold and the substrate. The second alignment means drives the drive stage for driving the mold stage connected to the mold chuck and the substrate stage as the drive means. Including at least one of driving means for assisting, and an auxiliary actuator for supplementing the driving force of at least one of the driving means. The first alignment means does not include the auxiliary actuator as the driving means but includes the at least one, and the auxiliary actuator includes a frictional force in a state where the mold and the uncured resin are in contact with each other. The imprint apparatus supplements at least one of the driving forces so that the driving means in the second alignment means generates a driving force exceeding . The imprint apparatus according to claim 1, wherein the auxiliary actuator applies a force to the mold. An imprint apparatus for bringing a mold having a pattern surface including a three-dimensional pattern into contact with an uncured resin on a substrate to cure the uncured resin and forming a cured resin pattern on the substrate,
A mold chuck that holds and moves the mold; and
A substrate stage that holds and moves the substrate;
Alignment means for performing alignment between the mold and the substrate,
The alignment means includes a first alignment means for performing alignment between the mold and the substrate in a state where the mold and the uncured resin are not in contact with each other, and the mold and the uncured resin. Second alignment means for aligning the mold and the substrate in contact with each other, wherein the first alignment means and the second alignment means include the mold, the substrate, and the second alignment means. The measurement means for measuring the relative position of the first alignment means has a configuration different from each other, and the first alignment means serves as the measurement means between an alignment mark formed on the mold and an alignment mark formed on the substrate. An alignment scope for measuring an alignment state; and the second alignment means includes the meter As means, said free of alignment scope, the comprises an interferometer for measuring the position relative to the substrate of the mold, the imprint apparatus characterized by. Forming a resin pattern on a substrate using the imprint apparatus according to any one of claims 1 to 3 ;
And a step of processing the substrate on which the pattern is formed in the step.