JP3638514B2 - Transfer device, transfer cartridge, and transfer method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a transfer device, a transfer cartridge, and a transfer method, and more particularly, to a transfer device, a transfer cartridge, and a transfer method capable of transferring a fine structure and magnetic information with nanometer level accuracy.
[0002]
[Prior art]
A method of using near-field light is known as a method of using so-called super-resolution to achieve fine lithography beyond the diffraction limit of light. This includes a method using a probe having a minute opening (Japanese Patent Laid-Open No. 7-106229), a method of placing a mask at a very close distance to a resist (Japanese Patent Laid-Open No. 8-179493), and a method of closely contacting with each other in order to increase throughput. is there. On the other hand, a method called nanoimprinting rather than lithography using light or an electron beam has been proposed as a new nanoprocessing technique. This is a method of processing by pressing an uneven master at a nano level against a resist on a substrate.
[0003]
On the other hand, a hard disk drive (HDD) is a magnetic recording device in which a disk, which is a recording medium, is fixed inside the drive, and data is recorded on and reproduced from this disk. The HDD performs control to position the magnetic head at a target position (target track) on the disk based on servo information recorded in advance on the disk. In general, servo information is recorded in a servo area (servo sector) arranged at a predetermined interval in the circumferential direction on the disk. The servo area is provided in the radial direction with respect to all tracks on the disk.
[0004]
In a manufacturing process for manufacturing such an HDD, usually, after a disk and a head are incorporated in a housing of a drive body, servo information is recorded on the disk by a servo writing device called a servo writer. Here, the disk is fixedly attached to the spindle mechanism. The head is mounted on a head actuator driven by a voice coil motor.
[0005]
The method of writing servo information using a conventional servo writer is to control the movement of the head and sequentially record the servo information in each servo area of all tracks set on the disk. This is one of the necessary processes. Therefore, reducing the time required for the servo information writing process is effective for improving the efficiency of the HDD manufacturing process.
[0006]
As a method for solving this problem, there has been proposed a method using a magnetic transfer method in which a master disk on which servo information is recorded in advance is prepared and the servo information is copied to a substrate for incorporation into a drive. (For example, see JP-A-7-78337). In this magnetic transfer method, the master disk and the substrate are brought into close contact with each other, and a bias magnetic field is applied from outside to transfer the magnetization information of the master disk to the substrate.
[0007]
The disadvantage of the method of processing a substrate by nanoimprinting using the above master is that alignment of the master and the substrate is difficult, and since the press is generally processed at a high temperature, the master and substrate are heated or cooled. There was a drawback that it took time to do. Moreover, it is difficult to peel off the master and the substrate.
[0008]
[Problems to be solved by the invention]
As described above, in nanoimprinting, it is difficult to align the master and the substrate, and generally, since the press machine is processed at a high temperature, it takes time to heat and cool the master and the substrate. It was. Moreover, it is difficult to peel off the master and the substrate.
[0009]
The present invention has been made in view of the above circumstances, the alignment of the master and the substrate is easy, the master and the substrate can be heated and cooled in a short time, and the substrate and the master can be easily peeled off, A transfer cartridge and a transfer method are provided.
[0010]
[Means for Solving the Problems]
(Constitution)
In order to solve the above-described problem, the first aspect of the present invention is a master holding means for holding a master having a pattern corresponding to information, a substrate holding means for holding a substrate to which the pattern of the master is transferred, A fixing means for fixing between the master and the substrate; and a pressure applying means for applying a pressure between the master and the substrate, wherein the master holding means, the substrate holding means and the fixing means are integrated. Provided is a transfer device configured to be detachable from the pressure applying means.
[0011]
In the first aspect of the present invention, it is preferable to have the following configuration.
[0012]
(1) Provided with conveying means for conveying the master holding means, the substrate holding means, and the fixing means integrated between the pressure applying means and the outside thereof.
[0013]
(2) Temperature control means for controlling temperature of at least one of the master and the substrate is provided in at least one of the master holding means and the substrate holding means.
[0014]
(3) In-plane position control means for controlling the relative position between the master and the substrate in an in-plane direction.
[0015]
A second aspect of the present invention is a master holding means for holding a master having a pattern corresponding to information, a substrate holding means for holding a substrate to which the pattern of the master is transferred, and between the master and the substrate. There is provided a transfer cartridge comprising a fixing means for fixing, and configured to be able to convey the master holding means, the substrate holding means, and the fixing means integrally.
[0016]
In the second aspect of the present invention, it is preferable to have the following configuration.
[0017]
(1) Temperature control means for controlling the temperature of at least one of the master and the substrate is provided on at least one of the master and the substrate holding means.
[0018]
(2) Provided with an elastic body that is interposed between the master holding means and the substrate holding means and is disposed around the master and the substrate, and generates an elastic force in a direction to separate the master and the substrate.
[0019]
The third aspect of the present invention is a master holding step for holding a master having a pattern corresponding to information, a substrate holding step for holding a substrate to which the pattern of the master is transferred, and between the master and the substrate. A fixing step of fixing, a first transfer step of transferring the master holding unit, the substrate holding unit, and the fixing unit integrally to the pressure applying unit; and a pressure between the master and the substrate in the pressure applying unit. And a second transporting step for transporting the master disk holding unit, the substrate holding unit, and the fixing unit integrally from the pressure application unit to the outside. Provide a method.
[0020]
In 3rd of this invention, it is preferable to provide the following structures.
[0021]
(1) After the second transporting step, a step of separating the master and the substrate fixed by the fixing step, and a step of taking out the substrate from the substrate holding means.
[0022]
(2) A temperature control process for controlling the temperature of at least one of the master and the substrate is provided.
[0023]
(3) An in-plane position control process for controlling a relative position between the master and the substrate in an in-plane direction is provided.
[0024]
(Function)
According to the present invention, since the master holding means, the substrate holding means, and the fixing means are integrally configured to be detachable from the pressure applying means, the master and the substrate can be easily aligned. Can be heated and cooled in a short time, and the substrate and the master can be easily separated.
[0025]
As a means for pressing, a method using hydraulic pressure is generally preferable because high pressure can be applied. However, the alignment between the master and the substrate is integrated with the press device when optical and electrical means are used to measure the position. It is difficult to make it. Therefore, the means for holding the master, the means for holding the substrate, the means for fixing the relative position of the master and the substrate in the parallel direction (in-plane direction), and the relative position of the master and the substrate in the parallel direction are detected. If the control means is separated from the pressing means, a means for accurately determining the relative position of the master and the substrate in the parallel direction can be easily used.
[0026]
Further, the heat capacity of the press stand of the press machine is large, while on the other hand, generally, a press time of about 1 minute is sufficient. Therefore, in the present invention, heating and cooling can be performed in a short time by using a master / substrate holder having a small heat capacity. In addition, rapid heating and cooling on only one side is possible, and the master and the substrate can be easily separated using the difference in thermal expansion coefficient.
[0027]
As a means for holding the master and the substrate, a vacuum chuck system is preferable. Moreover, in order to hold | maintain an original disk and a board | substrate, it is preferable to hold | maintain via an elastic body. The pressure is uniformly applied to the disk through the elastic body, which is more preferable for uniform magnetic transfer. Rubber is preferable as the elastic body, and a transparent silicon rubber film is preferable from the standpoint of alignment, although it varies depending on the applied pressure. It is also possible to give the rubber film an action as a suction cup for holding the disk. Alternatively, an appropriate minute hole may be formed in the rubber film, and the disk may be adsorbed by vacuum.
[0028]
As a means for detecting the relative position between the master and the substrate, an optical microscope, a capacitance sensor, an optical interference position sensor, and the like are particularly preferable. Also, in order to automatically control the relative position of the substrate and the master, a concave part is formed on one surface of the master or the substrate, and a convex part that fits exactly on one surface is formed on the surface to control the position in three dimensions. A hydrophilic pattern is formed, and it is preferable to have means for controlling the position in terms of affinity energy through a liquid such as water, and these may be combined. In addition, the above-described concave portion or convex portion may be formed in a means for holding the master disc or the substrate even if it is not formed on the master disc or the substrate. In the latter case, it is necessary to accurately position and install the master and the substrate on the holding means. For this purpose, it is preferable that a convex part, a concave part, or a hole is formed in the holding holder, and a hole, a concave part, or a convex part that fits in the holding holder is attached to the master or the substrate.
[0029]
As a means for fixing the relative position of the master and the substrate in the parallel direction, a method of reducing the pressure between the master and the substrate and substantially adhering them using atmospheric pressure is most preferable. It is also preferable that the means for holding the master and the means for holding the substrate are fixed with an outer frame or stopped with a clamp.
[0030]
The means for applying pressure to the master and the substrate is most preferably a hydraulic pump. In the method using the hydraulic pump, it is possible to correct the distortion and deflection of the flat surface of the master and the substrate, and to transfer with high accuracy.
[0031]
The transfer apparatus of the present invention may be characterized in that the means for holding the master and the means for holding the substrate can be integrated, and has means for conveying the integrated means to the press means. . By adopting a cartridge type that can be integrated, it is possible to prevent slight misalignment when the relative position between the master and the substrate is aligned with high accuracy in another place and then conveyed to the press means.
[0032]
The transfer device of the present invention may be characterized by having an elastic body between the means for holding the master and the means for pressing, or between the means for holding the substrate and the means for pressing. By having an elastic body, it becomes possible to apply a uniform load, and it is possible to perform uniform transfer and prolong the life of the apparatus.
[0033]
The transfer apparatus of the present invention may include a means for holding the master, a means for heating and a means for cooling the means for holding the substrate. Thereby, heating and cooling can be performed in a short time, and a temperature difference can be provided between the master and the substrate to facilitate peeling.
[0034]
The transfer device of the present invention may be characterized in that the fine information pattern of the master is a concavo-convex structure or magnetic information. When the fine information pattern of the master has a concavo-convex structure, the concavo-convex structure is transferred to the substrate if a soft material is selected for the substrate to be transferred than the concavo-convex structure of the master. In this case, the stress concentration is relatively relaxed, but peeling becomes difficult because the master and the substrate are in close contact with each other through the concavo-convex structure. Therefore, it is preferable to place a fluorine resin or silicone resin release material between the master and the substrate.
[0035]
In the case of magnetic information transfer, the purpose is to transfer a servo signal to a substrate (HDD disk). With recent increases in recording density, disks used in HDDs are required to have a mirror finish with a surface roughness of 20 nm or less (glide height). In general, in order to achieve high recording density, it is necessary to reduce the spacing between the head and the disk surface. For this reason, the disk surface is required to have a high degree of specularity. Therefore, it is necessary to avoid as much as possible that the substrate is damaged during transfer or peeling. Therefore, in magnetic transfer, the master is preferably flattened as disclosed in JP-A-11-273070.
[0036]
Further, in the case of magnetic transfer, it is preferable that there is a means for applying a magnetic field, and it is preferable that both a DC magnetic field and an AC magnetic field can be applied. The direction of the applied magnetic field differs depending on whether the magnetic signal to be transferred is the longitudinal direction or the vertical direction of the track.
[0037]
The transfer method of the present invention includes a master holding process for holding a master having a pattern corresponding to information, a substrate holding process for holding a substrate to which the pattern of the master is transferred, and fixing between the master and the substrate. A fixing process, a first transport process for transporting the master holding means, the substrate holding means, and the fixing means together to the pressure applying unit, and applying pressure between the master and the substrate in the pressure applying unit. And a second transporting step of transporting the master disk holding unit, the substrate holding unit, and the fixing unit integrally from the pressure application unit to the outside.
[0038]
By having such a process, it is possible to precisely control the relative position of the substrate and the master as described above, it is possible to press while maintaining that position, and heating and cooling can be performed in a short time. it can.
[0039]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0040]
(First embodiment)
FIG. 1 shows the configuration of the master holder and the substrate holder 1 in the present embodiment. FIG. 2 shows the configuration of the transfer apparatus shown in this embodiment. Reference numeral 10 denotes a master holder for holding a 2.5-inch diameter nickel master 11 under vacuum, reference numeral 12 denotes a substrate holder for holding a 2.5-inch diameter glass substrate 13 under vacuum, and 14 An actuator for precisely driving the substrate holder in the X and Y directions, 15 is a CCD for positioning, 16 is an introduction path for reducing the pressure between the master and the substrate, and for introducing high-pressure gas, 17 is a seal , 18 is a heating wire for heating the substrate, 19 is a heating wire for heating the master, 20 is a water introduction passage for cooling the substrate, 21 is a water introduction passage for cooling the master, and 22 is A decompression introduction path for fixing the master or the substrate, 23 a spring for restraining the substrate holder, 24 a monitor, 25 a transport device, 26 a hydraulic stamp base for applying pressure, and 27 an elastic body.
[0041]
Here, the master 11 and the glass substrate 13 coated with the polymethyl methacrylate film 28 having a thickness of 50 nm were placed on the master holder 10 and the substrate holder 12, respectively. As shown in the master 11, an uneven pattern having a minimum pattern of 20 nm and a height of 40 nm is provided. A mark 29 for positioning at the center is provided (not shown).
[0042]
On the positioning table 30, the holders 11 and 12 were set to 110 ° C. using heating wires 18 and 19, respectively. The horizontal relative positions of the master 11 and the substrate 13 were adjusted using the XY control mechanism of the actuator 14 so that the mark 29 on the master and the mark 31 at the center of the substrate were aligned while observing on the monitor 24 using the CCD 15. Next, the distance between the substrate 13 and the master 11 was brought into close contact with the Z control mechanism of the actuator, and then the relative position was fixed by reducing the pressure between the substrate 13 and the master 11 using the introduction path 22. Next, it conveyed to the hydraulic stamp stand 26 using the conveying apparatus 25, and applied the pressure of 10 tons of total pressure for 30 seconds.
[0043]
Next, after releasing the hydraulic pressure, it was conveyed to the peeling table 32 and the cooling water was allowed to flow through the water introduction path 20 for 1 minute. Compressed air of 3 atm was introduced through the introduction path 16, and the master and the substrate were peeled off.
[0044]
When measured with an atomic force microscope (AFM), it was found that the unevenness corresponding to the uneven pattern of the master was uniformly formed on the substrate with a positional accuracy of 1 micron from the center.
[0045]
(Second Embodiment)
First, magnetic transfer will be briefly described with reference to FIG. A magnetization pattern corresponding to the pattern shape is recorded on the magnetic layer 43 on the glass substrate 42 by a recording magnetic field generated by the ferromagnetic material patterned in the magnetic transfer master 41 which is magnetized in one direction and is flattened. That is, a patterned perpendicular magnetization ferromagnetic material corresponding to a tracking servo signal, an address information signal, a reproduction clock signal, and the like is formed on the master 41, and a residual magnetization 44 in one direction is given in advance. An initial residual magnetization 46 in one direction is also given to the perpendicular magnetic layer 43 on the substrate 42. The excitation magnetic field 45 is applied in the same direction as the magnetization residual 44 and in the opposite direction to the residual magnetization 46, and the strength of the excitation magnetic field 45 is adjusted so that the magnetization 46 in the portion in contact with 44 is reversed to 47. . As a result, the magnetic information of the master is transferred to the substrate and preformatted. Although FIG. 3 shows the magnetization in the vertical direction of the track, the same applies to the magnetic transfer in the longitudinal direction of the track.
[0046]
Hereinafter, the transfer apparatus according to this embodiment of the present invention will be described with reference to FIGS. FIG. 4 is a schematic cross-sectional view showing the configuration of the magnetic master 50 in the present embodiment. FIG. 5 is a schematic diagram showing the configuration of the master and the substrate holder part of the transfer apparatus according to this embodiment. FIG. 6 is a schematic diagram showing the configuration of the transfer apparatus according to this embodiment. As shown in FIG. 4, the pattern of the ferromagnetic material 52 corresponding to the information pattern is formed on the surface of the substrate 51 made of glass with the central hole 51a opened. Is formed in the silicon oxide film 53. A hard film 54 is formed on the surface. In this figure, 61a is provided in a part of a master holder 61, which will be described later, and is a central axis for holding the master 50 in its central hole 51a.
[0047]
The master 50 is formed, for example, through the process disclosed in JP-A-11-273070. Ferromagnetic materials include Ni-Fe, Fe-Al-Si and other crystalline materials, Co-Zr-Nb and other Co-based amorphous materials, Fe-Ta-N and other Fe-based microcrystalline materials, Fe, Co, Fe—Co Co—Cr, Co—Ni, Ba ferrite and the like are preferable. As a method for forming the magnetic thin film, there are a vacuum deposition method, an ion beam sputtering method, and an opposed target sputtering method.
[0048]
FIG. 5 shows the configuration of the cartridge-type master and the substrate holder 60 of the transfer apparatus shown in this embodiment. Reference numeral 61 denotes a master holder with an introduction path 64 for holding the master 50 in a vacuum. 62 denotes a glass substrate 63 in which a hole 63a is formed in the center and a magnetic layer is formed on the surface. A substrate holder with an introduction path 65, 66 is a seal portion, 67 is a connecting portion that can open and close the master holder 61 and the substrate holder 62, and 68 is for reducing the pressure between the master and the substrate, or for introducing high-pressure gas. , 69 is a conveying device, and 70 is a hydraulic stamp system for applying pressure. 71 is a hydraulic control system, 72 is a pressure gauge, and 73 is a stamp stand. Reference numeral 74 denotes an electromagnet.
[0049]
The master 50 was placed on the master holder 61 and the substrate 63 was placed on the substrate holder 62. The magnetic medium layer on the substrate 63 may be a single layer or a two-layer medium having a lower magnetic layer for servo signals. In the case of a double-layer medium for servo signals, the lower layer medium may be any medium as long as it has a lower coercive force than the upper layer medium. The master holder 61 and the substrate holder 62 face each other. The relative position of the master 50 and the substrate 63 in the horizontal direction was controlled by engaging the projection 75 of the master holder 61 and the recess 76 dug in the substrate holder 62. Next, the relative position was fixed by reducing the pressure between the master and the substrate via the introducing portion 68. Next, it conveyed to the hydraulic stamp stand 73 using the conveying apparatus 69, and applied the pressure of 10 tons of total pressure for 30 seconds.
[0050]
Next, after releasing the hydraulic pressure, it was transferred to the electromagnet 74, and magnetic transfer was performed by applying a magnetic field in a direction perpendicular to the substrate and the master. Compressed air of 3 atm was introduced through the introduction path 68, and a wedge was inserted between the master and the substrate to peel off. When measured with an MFM (Magnetic force microscope), a magnetic pattern corresponding to the magnetic pattern of the master was formed on the magnetic layer on the substrate with a positional accuracy of 2 microns from the center.
[0051]
The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.
[0052]
【The invention's effect】
According to the present invention, there is provided a transfer device, a transfer cartridge, and a transfer method, in which alignment of a master and a substrate is easy, the master and the substrate can be heated and cooled in a short time, and separation of the substrate and the master is easy. It is possible to provide.
[Brief description of the drawings]
FIG. 1 is a schematic diagram illustrating a configuration of a master and a substrate holder part of a transfer device according to a first embodiment.
FIG. 2 is a schematic diagram illustrating a configuration of a transfer device according to the first embodiment.
FIG. 3 is a schematic view showing the principle of magnetic transfer in the second embodiment.
FIG. 4 is a schematic sectional view of a master in a second embodiment.
FIG. 5 is a schematic diagram illustrating a configuration of a master and a substrate holder of a transfer device according to a second embodiment.
FIG. 6 is a schematic diagram illustrating a configuration of a transfer device according to a second embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Master disc holder and board | substrate holder part 10 ... Master disc holder 11 ... Nickel master disc 12 ... Substrate holder 13 ... Glass substrate 14 ... XY actuator 15 ... CCD
16 ... Introduction path for reducing the pressure between the master and the substrate, or for introducing high-pressure gas,
DESCRIPTION OF SYMBOLS 17 ... Sealing part 18 ... Heating wire 19 for heating a substrate ... Heating wire 20 for heating a master disc ... Water introduction channel 21 for cooling a substrate ... Water introduction channel 22 for cooling the master disc ... Master disc or Decompression introduction path 23 for fixing the substrate ... Spring 24 for suppressing the substrate holder ... Monitor 25 ... Conveying device 26 ... Hydraulic stamp base 27 for applying pressure ... Elastic body 28 ... Polymethylmethacrylate film 29 ... Mark 30 ... positioning table 31 ... mark 32 ... peeling table 41 ... magnetic transfer master 42 ... glass substrate 43 ... magnetic layer 44 ... residual magnetization 45 ... excitation magnetic field,
46 ... Initial residual magnetization 47 ... Transferred magnetization 50 ... Magnetic transfer master 51 ... Glass substrate 52 ... Ferromagnetic material 53 ... Silicon oxide film 54 ... Hard film 60 ... Master and substrate holder 61 ... Master holder 62 ... Substrate holder 63 ... Substrate 64 ... Introduction path 65 for holding the master 50 under vacuum ... Introduction path 66 for holding the glass substrate 63 under vacuum ... Seal part 67 ... Connecting part 68 ... Pressure reduction between the master and the substrate Introducing path 69 for introducing a high-pressure gas ... Conveying device 70 ... Hydraulic stamp drive system 71 ... Hydraulic control system 72 ... Pressure gauge 73 ... Stamp stand 74 ... Electromagnet 75 ... Convex portion 76 ... Concave portion

Claims (8)

A master holding means for holding a master having a pattern corresponding to information, a substrate holding means for holding a substrate to which the pattern of the master is transferred, a fixing means for fixing between the master and the substrate, and the master; Pressure applying means for applying pressure between the substrates, and the master holding means, the substrate holding means, and the fixing means are configured to be detachable from the pressure applying means integrally. Characteristic transfer device. 2. The transfer apparatus according to claim 1, further comprising conveying means for conveying the integrated master holding means, the substrate holding means, and the fixing means between the pressure applying means and the outside thereof. 3. The transfer apparatus according to claim 1, wherein temperature control means for controlling temperature of at least one of the master and the substrate is provided on at least one of the master and the substrate holding means. The transfer apparatus according to claim 1, further comprising an in-plane position control unit that controls a relative position between the master and the substrate in an in-plane direction. A master holding means for holding a master having a pattern corresponding to information, a substrate holding means for holding a substrate to which the pattern of the master is transferred, and a fixing means for fixing between the master and the substrate, A transfer cartridge, wherein the master holding means, the substrate holding means, and the fixing means are configured to be transported as a unit. 6. The transfer cartridge according to claim 5, wherein at least one of said master holding means and said substrate holding means is provided with temperature control means for controlling the temperature of at least one of said master and said substrate. An elastic body that is interposed between the master holding means and the substrate holding means and is disposed around the master and the substrate and that generates an elastic force in a direction in which the master and the substrate are separated from each other is provided. Item 7. The transfer cartridge according to Item 5 or 6. A master holding process for holding a master having a pattern corresponding to information, a substrate holding process for holding a substrate to which the pattern of the master is transferred, a fixing process for fixing a gap between the master and the board, and the master holding A first conveying step of conveying the means, the substrate holding unit, and the fixing unit integrally to the pressure applying unit, a pressure applying step of applying pressure between the master and the substrate in the pressure applying unit, A transfer method comprising: a second transporting step of transporting the master disk holding unit, the substrate holding unit, and the fixing unit together from the pressure application unit.

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