JP4948386B2 - Liquid substance dropping device and liquid substance dropping method - Google Patents

Description

The present invention relates to a liquid substance dropping device such as liquid crystal and a liquid substance dropping method .

  For example, in a substrate laminating process in which two glass substrates are bonded together with liquid crystal interposed therebetween, a required amount of liquid crystal is used on one glass substrate by using a liquid crystal dropping device in the pre-bonding stage. Is dropped.

  The conventional liquid crystal dropping device has a container for storing liquid crystal, which is a liquid substance, a nozzle communicated with the container and controlled to open and close the flow path by a needle valve, and a pressurizing device for pressurizing the inside of the container. Thus, by opening the needle valve, the liquid crystal in the container is discharged from the tip of the nozzle and dropped onto the substrate (for example, see Patent Document 1).

JP-A-8-106101 (paragraph 0048, FIG. 2)

  In the conventional liquid crystal dropping device, the time required for dropping one liquid crystal is long, and in order to improve productivity, it is necessary to increase the number of liquid crystal dropping devices used, resulting in an increase in production cost. .

  An object of the present invention is to increase the productivity by increasing the speed of a dropping operation of a liquid substance.

The invention described in claim 1 is a liquid substance dropping device for dropping a liquid substance in a dotted manner at a plurality of dropping positions on a substrate by a liquid substance supply means.
Moving means for relatively moving the liquid substance supply means and the substrate;
Means for detecting a positional relationship of the liquid substance supply means with respect to the substrate;
Based on the position information of each dropping position of the liquid substance to a pre taught the substrate and detected the positional relationship with respect to each dropping position of the substrate during relative movement between said substrate said liquid material supply means Control means for controlling the discharge timing of the liquid material by the liquid material supply means at each dropping position so as to drop the liquid material.

The invention according to claim 2 is a liquid substance dropping method in which a liquid substance is dropped into a plurality of dropping positions on a substrate by a liquid substance supply means in a dotted manner.
A moving step of relatively moving the liquid substance supply means and the substrate;
Detecting the positional relationship of the liquid substance supply means with respect to the substrate during the moving step;
Based on the position information of each dropping position of the liquid substance to a pre taught the substrate and the positional relationship detected in the step of this detection, the liquid material with respect to the dropping position of the substrate during said moving step A determination step of determining a discharge timing of the liquid substance by the liquid substance supply means for each dropping position so as to drop ;
Wherein the Ru and a discharge step of discharging the liquid material from said liquid material supply means at a timing determined by the determination step ..

According to the invention of claim 1 has the effect of following a.

a. Even during the period in which the liquid substance supply means and the substrate are relatively moved, the liquid substance can be stably dropped on the substrate, so that productivity can be further improved.

  According to the present invention, the speed of the dropping operation of the liquid substance can be increased, and the productivity can be improved.

  1 is a schematic diagram showing a liquid material dropping device and a substrate laminating device, FIG. 2 is a schematic diagram showing a dropping pattern on a substrate, FIG. 3 is a schematic diagram showing a liquid material supplying device, and FIG. It is a schematic diagram which shows a modification.

  In FIG. 1, 1 is a lower substrate, 2 is an upper substrate, 10 is a liquid material dropping device to the lower substrate 1, and 100 is a substrate laminating device for the lower substrate 1 and the upper substrate 2.

  The liquid material dropping device 10 includes a substrate transport stage 11 on which the lower substrate 1 is mounted, and a liquid material supply device that drops and supplies a predetermined amount of liquid material (L) such as liquid crystal to a dropping position determined on the lower substrate 1. 20.

  The substrate transfer stage 11 has a moving device 12 including an X-axis drive unit, a Y-axis drive unit, and a θ-axis drive unit, and moves the lower substrate 1 in each of the X direction and the Y direction and rotates in the θ direction. can do. Each drive part of the moving apparatus 12 can be comprised with a servomotor.

  The liquid crystal substance supply device 20 includes a container 40 and a moving device 50 incidentally. The container 40 stores a liquid substance.

  The moving device 50 includes an X-axis drive unit, a Y-axis drive unit, and a Z-axis drive unit, and moves the liquid material supply device 20 in each of the X direction, the Y direction, and the Z direction. Each drive unit of the moving device 50 can be constituted by a servo motor. The moving device 12 and / or the moving device 50 moves the liquid material supply device 20 relative to the lower substrate 1 on the substrate transfer stage 11.

  The liquid substance supply device 20 includes a take-out port 21 that constitutes a means for taking out a liquid substance in an amount corresponding to the dropping amount from the container 40, a storage chamber 22 that constitutes a means for temporarily storing the taken-out liquid substance, And a discharge port 23 constituting means for discharging the stored liquid substance.

  Specifically, as shown in FIG. 3, the liquid material supply device 20 includes a fixed portion 24 and a rotating portion 27 provided on a rotating shaft 26 driven by a servo motor 25. The take-out port 21 and the discharge port 23 are provided one by one at opposite positions on the same radius centered on the axis of the rotary shaft 26 and sandwiching the rotary shaft 26. Is provided at a position where the other storage chamber 22 faces the discharge port 23 when one storage chamber 22 faces the take-out port 21. The rotating portion 27 is in fluid-tight sliding contact with the fixed portion 24, and the two storage chambers 22 pass through the take-out port 21 and the discharge port 23 in order by the rotation of the rotating portion 27.

  The liquid substance supply device 20 includes a plurality of guides provided on a rotating plate 29 in which a cam 28 facing the rotating portion 27 is fixedly disposed around the rotating shaft 26 and fixed between the rotating portion 27 and the cam 28 on the rotating shaft 26. The same number of plungers 30 as the storage chambers 22 are held in the holes so as to be movable up and down, and the lower ends of the plungers 30 are fitted into the storage chambers 22 so as to be able to reciprocate inside the storage chambers 22. The cam follower 30 </ b> A) is brought into contact with the cam surface of the cam 28 by a spring 31. The spring 31 is interposed between a flange 30 </ b> B provided at an intermediate portion of the plunger 30 and the rotary plate 29.

  Here, the shape of the cam 28 will be described in detail with reference to FIG. FIG. 3B is a cam development view taken along arrow A in FIG.

  In the figure, when the stock chamber 22 of the rotating portion 27 passes over the take-out port 21 of the fixed portion 24, the cam 28 is taken out at the leading end of the plunger 30 in the traveling direction (arrow R direction). Ascending starts at the timing when it passes over the left end of the port 21, and reaches the upper limit at the timing when the end of the storage chamber 22 on the rear side in the traveling direction passes over the right end of the take-out port 21 and stops. The shape of the cam surface is set. The upper limit position of the plunger 30 is such that the inside of the storage chamber 22 in a state where the plunger 30 is positioned at the upper limit has a volume that can accommodate the same amount of liquid substance as that required for one dropping. And is defined by the cam 28.

  On the other hand, on the discharge port 23 side, opposite to the take-out port 21 side, the plunger 30 passes the end portion on the front side in the traveling direction in the storage chamber 22 over the end portion on the near side in the rotation direction of the rotation portion 27 in the discharge port 23 The cam 28 is started so that the lower end reaches the lowering limit and stops at the timing when the end of the storage chamber 22 on the rear side in the traveling direction passes over the front end of the rotation portion 27 of the discharge port 23. The shape of the cam surface is set. When the plunger 30 reaches the lowering limit, all the liquid substance in the storage chamber 22 is discharged through the discharge port 23 and dropped onto the lower substrate 1.

  In FIG. 3 (A), for convenience, when the storage chamber 22 is positioned directly above the take-out port 21, the plunger 30 in the storage chamber 22 is positioned at the lower limit position, and the storage chamber 22 is connected to the discharge port 23. Although the plunger 30 in the storage chamber 22 is shown as if it is located at the upper limit position when it is positioned directly above the storage chamber 22, as shown in FIG. The plunger 30 in the storage chamber 22 is positioned between the upper limit position and the lower limit position when the storage chamber 22 is directly above the position 23 (a position where the storage chamber 22 completely overlaps the take-out port 21 or the discharge port 23).

  The liquid substance supply device 20 performs a pumping action as follows by the rotation of the rotating unit 27 by the servo motor 25.

(A) Extraction action When the storage chamber 22 of the rotating part 27 passes through the extraction port 21 of the fixed part 24, the plunger 30 moves inside the storage chamber 22 from the lower limit to the upper limit (FIG. 3 (B)), and the container 40 The liquid substance is taken out and sucked into the storage room 22 via the port 21. That is, in the present embodiment, the take-out port 21, the plunger 30, and the cam 28 function as a means for taking out the liquid substance.

(B) Discharge action When the storage chamber 22 of the rotating portion 27 passes through the discharge port 23 of the fixed portion 24, the plunger 30 moves from the upper limit to the lower limit in the storage chamber 22, and the liquid substance stored in the storage chamber 22 is stored. It is discharged via the discharge port 23 and dropped onto the lower substrate 1 as a drop of liquid material. That is, in the present embodiment, the discharge port 23, the plunger 30, and the cam 28 function as means for discharging a liquid substance.

  Since the liquid substance supply device 20 includes the two storage chambers 22, a step of taking out the liquid substance corresponding to the dropping amount from the container 40 and taking it out to the storage chamber 22 via the port 21 between the respective storage chambers 22. And the process of discharging the liquid substance temporarily stored from the storage chamber 22 via the discharge port 23 is performed in parallel.

  The liquid substance dropping device 10 includes a detection device (not shown) that detects a relative position between the liquid material supply device 20 and the lower substrate 1 on the substrate transfer stage 11, and a liquid material supply based on the detection result of the detection device. A control device (not shown) that activates the device 20 and controls the moving device 12 is provided. Here, as the detection device, for example, an encoder provided in a servo motor constituting each drive unit of the moving device 12 and an encoder provided in a servo motor constituting each drive unit of the moving device 50 are used, and these encoders are used. The position information of the substrate transport stage 11 and the position information of the liquid material supply device 20 are obtained on the basis of the output values from these, and the relative position between the discharge port 23 of the liquid material supply device 20 and the lower substrate 1 is obtained from these position information. The correct position.

  Now, the dropping pattern of the liquid material onto the lower substrate 1 (3A, 3B... Is the dropping position, 3A is the dropping start position, 3Z is the dropping end position, and 4 is the sealing material) as shown in FIG. The movement path (dropping path) of the discharge port 23 of the liquid material supply device 20 with respect to the lower substrate 1 when the liquid material is dropped in such a pattern is, for example, an arrow. Suppose that a path that folds back and forth alternately at the left and right ends is formed. In such a case, the control device can detect the detection device at the intermediate dropping position except for the both-end dropping position of each linear path in which the discharge port 23 of the liquid crystal substance supply device 20 moves relative to the lower substrate 1 on the substrate transfer stage 11. Based on the detection result (relative positional relationship between the liquid material supply device 20 and the lower substrate 1), discharge from the discharge port 23 to each dropping position without stopping the relative movement between the liquid material supply device 20 and the lower substrate 1 And the relative movement between the liquid material supply device 20 and the lower substrate 1 based on the detection result of the detection device (relative positional relationship between the liquid material supply device 20 and the lower substrate 1) at the both-end dropping position of each linear path. Is stopped, and discharge from the discharge port 23 to each dropping position is performed.

  That is, the control device reads the position information of the substrate transport stage 11 from the output value of the encoder of the servo motor that constitutes each drive unit of the moving device 12, and in the X and Y directions of the discharge port 23 of the liquid material supply device 20. Is read from the output values of the encoders of the servo motors constituting the X-axis drive unit and the Y-axis drive unit. For example, the position information of each drop position 3A, 3B,. Based on the above, a function of outputting a discharge command to the liquid substance supply device 20 at a timing when a predetermined dropping position passes through the discharge port 23 is provided. The liquid substance supply device 20 controls the number of discharges and the discharge timing by the servo motor 25 under the control of the control device, and the liquid stored in the storage chamber 22 by the take-out action described above in one discharge operation. All the substance is discharged from the discharge port 23. At this time, since the volume in the storage chamber 22 is the same as the amount of dripping required for one dripping, if the liquid substance in the stocking chamber 22 is completely discharged, the amount of dripping required is can get. That is, since it is not necessary to adjust the amount of liquid at the stage of discharging the liquid substance, stable dripping can be performed at high speed. Thereby, it is possible to discharge a required amount of the liquid material every time the dropping position is reached based on the position coordinates of the substrate transport stage 11 without stopping the substrate transport stage 11, thereby greatly reducing the time required for the dropping process. can do.

  The substrate bonding apparatus 100 includes a lower substrate stage 102 and an upper substrate stage 103 inside a vacuum chamber 101, and includes a lower moving device 104 on the lower substrate stage 102 and an upper moving device 105 on the upper substrate stage 103. The lower moving device 104 includes an X-axis drive unit, a Y-axis drive unit, and a θ-axis drive unit, and moves the lower substrate 1 held on the lower substrate stage 102 in each of the X direction and the Y direction and rotates in the θ direction. To do. The upper moving device 105 includes a Z-axis drive unit, and moves the upper substrate 2 held on the upper substrate stage 103 in the Z direction. The lower substrate 1 on which the liquid material is dropped by the liquid material supply device 20 and the upper substrate 2 are bonded together inside the vacuum chamber 101.

  The liquid substance dropping device 10 and the substrate laminating device 100 operate as follows.

  (1) The discharge port 23 of the liquid substance supply device 20 is moved to the dropping start position by the moving device 50.

  (2) The lower substrate 1 on which the sealing material 4 is applied in a closed loop shape is mounted on the substrate transfer stage 11. The positioning mark of the lower substrate 1 is recognized, and the position shift state of the lower substrate 1 on the substrate transfer stage 11 is detected.

  (3) The moving device 12 is moved in consideration of the position shift state of the lower substrate 1 detected in the above (2), and the dropping start position 3A (FIG. 2) on the lower substrate 1 is dropped in the above (1). The lower substrate 1 is positioned so as to be directly below the discharge port 23 positioned at the start position.

  (4) The moving device 12 moves the lower substrate 1 on the substrate transfer stage 11 relative to the discharge port 23 of the liquid material supply device 20 along the above-described dropping path, and moves the liquid material from the discharge port 23 onto the lower substrate 1. Drop each drop position as described above. The control device detects the dropping position based on an encoder signal of a servo motor that constitutes each drive unit of the moving devices 12 and 50.

  (5) The upper substrate 2 is supplied to the upper substrate stage 103 of the substrate bonding apparatus 100.

  (6) The lower substrate 1 that has been dropped according to the above (4) is supplied to the lower substrate stage 102 of the substrate bonding apparatus 100.

  (7) The vacuum chamber 101 is evacuated, the lower substrate 1 and the upper substrate 2 are aligned in a vacuum, and the lower substrate 1 and the upper substrate 2 are overlapped and bonded together. After the vacuum chamber 101 is opened to the atmosphere, UV (ultraviolet) irradiation for temporary curing of the sealing material 4 is performed. This UV irradiation apparatus is built in, for example, the substrate transfer stage 11.

  (8) The bonded substrates 1 and 2 are discharged.

  Note that (1) and (3) described above may be switched in order. That is, when the liquid material supply device 20 is moved to the dropping start position before the lower substrate 1 is supplied (1), the liquid material supply device 20 is generated when the drive shaft constituting the moving device 50 of the liquid material supply device 20 is operated. Although it is intended to prevent the dust from dropping onto the lower substrate 1, the liquid material supply device 20 may be moved after the lower substrate 1 is supplied when measures are taken against dust on the drive shaft. .

  In the above (2), the lower substrate 1 on which the sealing material 4 is applied in a closed loop shape is supplied, but the liquid material is dropped on the lower substrate 1 on which the sealing material is not applied, and the substrate bonding apparatus 100 is applied. Then, the lower substrate 1 on which the liquid substance is dropped and the upper substrate 2 on which the sealing material 4 is applied may be bonded together.

  The liquid material dropping device 10 is not limited to the above-described liquid material supply device 20 but includes a plurality of liquid material supply devices 20 and switches the liquid material supply device 20 to be used for each dropping position. May be. A plurality of liquid substance supply devices 20 may be used simultaneously. In the case where a plurality of liquid substance supply devices are provided, for example, the volume of the storage chamber 22 of each device is made different so that the amount of liquid material dropped per time is different for each liquid material supply device 20. By doing so, it is easy to divide the area surrounded by the sealing material 4 shown in FIG. 2 into a plurality of areas and to drop different amounts of liquid substances in each divided area. be able to. And the liquid substance which is easy to occur when bonding the upper and lower substrates 1 and 2 is set by setting the dropping amount of the surrounding region close to the sealing material 4 in the lower substrate 1 to be small compared to the central region. It is possible to prevent the phenomenon of overcoming the seal material 4.

  Further, in the case where a plurality of liquid substance supply devices 20 are provided, if each liquid material supply device 20 is configured to be individually movable in the X and Y directions, the dropping positions of the liquid material supply devices can be reduced. The interval can be easily adjusted, which is preferable.

  According to the present embodiment, there are the following operations.

  a. The liquid material of the same amount as the dropping amount per time is taken out and stored in the storage chamber 22 in advance, and at the time of discharge, all the liquid material stored in the storage chamber 22 is discharged, and the required amount of liquid material is discharged. Since dripping can be performed, the dripping operation | movement of the dripping amount required can be performed rapidly. Thereby, the speed of the dropping operation of the liquid substance can be increased, and the productivity can be improved.

  b. Due to the above-described a, the liquid material supply device 20 and the lower substrate 1 are relatively moved without relatively stopping the liquid material supply device 20 and the lower substrate 1 each time the liquid material is dropped. Even inside, the liquid substance can be stably dropped at the dropping position on the lower substrate 1, and the productivity can be further improved.

  c. The above-described a makes it easy to control the amount of dripping, can prevent uneven spreading of the liquid material due to variation in the amount of dripping, and enclose the liquid material between the upper and lower substrates 1 and 2 in an appropriate amount. Product quality can be improved.

  d. By performing the liquid substance take-out process and the discharge process in parallel, the liquid substance dropping operation can be speeded up, and the productivity can also be improved.

  e. By controlling the discharge timing of the liquid substance based on the dropping position information on the lower substrate 1 and the relative positional relationship between the liquid substance supply device 20 and the lower substrate 1, the number of dropping points and the dropping position on the lower substrate 1 are controlled. Can be dealt with easily only by changing the dropping position information. Therefore, it is possible to easily obtain an optimum dropping pattern for obtaining a uniform spread of the liquid substance in the bonding process of the lower substrate 1.

  f. Since the storage chamber 22 moves around with the rotation of the rotating portion 27, vibration or the like hardly occurs, and the storage chamber 22 can move between the take-out port 21 and the discharge port 23 smoothly and at a high speed. Can be stably performed.

  g. Since the liquid material is once taken into the storage chamber 22 and the amount of the liquid material taken in is discharged, the liquid material corresponding to the volume of the storage chamber 22 is dropped without being affected by the fluctuation of the viscosity of the liquid material. Can do.

  In the liquid material dropping device 10, instead of discharging the liquid material based on the relative positional relationship between the liquid material supply device 20 and the lower substrate 1, dropping positions (3A, 3B,... (3Z) The relative movement speed of the liquid substance supply device 20 and the lower substrate 1 and the discharge time interval of the liquid substance are determined based on the arrangement interval of 3Z), that is, the dropping position interval, and the determined relative movement speed. The liquid material supply device 20 and the lower substrate 1 may be moved relative to each other so that the liquid material is discharged from the liquid material supply device 20 at a determined discharge time interval.

  Specific examples are as follows. For example, when the relative moving speed between the liquid material supply device 20 and the lower substrate 1 is constant, if the liquid material dropping position interval is increased, the liquid material discharge time interval is set to be larger, If the substance dropping position interval is to be reduced, the liquid material discharge time interval is set to be small. Further, when the liquid material discharge time interval is constant, if the liquid material dropping position interval is to be increased, the relative movement speed between the liquid material dropping device 20 and the lower substrate 1 is set to be faster. In order to reduce the substance dropping position interval, the relative movement speed between the liquid substance supply device 20 and the lower substrate 1 is set to be slow. Of course, a desired drop position interval may be obtained by adjusting both the relative moving speed of the liquid material supply device 20 and the lower substrate 1 and the discharge time interval of the liquid material. The relationship between the dropping position interval, the relative movement speed between the liquid material supply device 20 and the lower substrate 1 and the discharge time interval is as follows: dropping position interval = relative movement speed between the liquid material supply device 20 and the lower substrate 1. X It can be easily determined from the relationship of the discharge time interval.

  According to the above, after determining the relative positional relationship between the liquid material supply device 20 and the lower substrate 1 at the time of starting the dropping operation, the relative positional relationship between the liquid material supply device 20 and the lower substrate 1 is detected. Even if the liquid material dropping device 10 is controlled only at the set relative movement speed and the discharge time interval, the liquid material can be dropped onto the lower substrate 1 at a desired dropping position interval, and the substrates are bonded together. An optimum dropping pattern for obtaining a uniform spread of the liquid substance in the process can be easily obtained.

  In the above embodiment, the plunger 30 is moved up and down by the cam 28. However, each plunger is provided with a cylinder device, and each plunger is moved up and down by this cylinder device. You may make it comprise.

  The liquid substance supply device 20 of FIG. 4 includes a plunger upper limit stopper 35 that constitutes a control unit that regulates the upper limit position of the vertical stroke of the plunger 30 and controls the discharge amount of the liquid substance per time. The stopper 35 is clamped by upper and lower rollers 38, 38 provided on an elevating block 37 that is screwed into a feed screw of a servo motor 36 driven by a control device and controlled to elevate to an appropriate position. The stopper 39A is provided in the hole 39 through which the cam follower 30A of each plunger 30 can be inserted. The plunger 39 is provided with a stopper 39A. The upper limit position of the plunger 30 is regulated by abutting the flange 30B of the 30 with the stopper portion 39A, and the amount of liquid substance taken out from the storage chamber 22 corresponding to the plunger 30 and the discharge amount from the storage chamber 22 are changed. Make it possible.

  In this way, by adjusting the vertical position of the plunger upper limit stopper 35 and changing the volume (amount) of the liquid material in the storage chamber 22 that can be taken in, the amount of liquid material dropped per time is immediately changed to an appropriate value. Therefore, in combination with increasing the number of dropping points on the substrate, a more optimal dropping pattern for obtaining a uniform spread of the liquid substance can be easily obtained in the bonding process of the lower substrate 1.

  Further, in the region surrounded by the sealing material 4 shown in FIG. 2, it is possible to drop the liquid substance with a different dropping amount for each divided region, and the degree of freedom of the dropping pattern can be further expanded. .

  In FIG. 4, the plunger upper limit stopper 35 is controlled to move up and down to adjust the upper limit position of the plunger 30 to adjust the amount of liquid substance that can be stored in the storage chamber 22. Is fixedly arranged in the ascending / descending direction, and the cam 28 is provided so as to be controlled to be raised / lowered. By positioning the cam 28 at an appropriate position, the lower limit position of the plunger 30 is adjusted, and the liquid substance discharged from the storage chamber 22 The amount may be changed.

  In such a configuration, in the action of taking out the liquid material, a constant amount of liquid material is always generated based on the upper limit position regulated by the fixedly arranged plunger upper limit stopper 35 regardless of the amount of liquid material to be discharged. Although it is taken into the storage chamber 22, in the discharge action, the amount of the liquid substance stored in the storage chamber 22 is lowered from the upper limit position of the plunger 30 that is lowered to the lower limit position based on the set position of the cam 28. The liquid material is discharged. Also with this configuration, the amount of liquid material dropped can be changed, and an optimal dripping pattern for obtaining a uniform spread of the liquid material in the bonding process of the lower substrate 1 can be easily obtained. . In this case, the amount of the liquid material stored in the storage chamber 22 is preferably set to the maximum amount of the liquid material scheduled to be discharged.

  Although the embodiment of the present invention has been described in detail with reference to the drawings, the specific configuration of the present invention is not limited to this embodiment, and there are design changes and the like without departing from the gist of the present invention. Is included in the present invention. For example, the relative movement of the liquid material supply device and the substrate is not limited to that by the substrate movement device, but may be by the movement device of the liquid material supply device, or both movement devices may be used together. Further, the liquid substance supply device is not limited to a plunger type pump, and may be based on another pump.

  In addition, the number of times the liquid material is dropped per dropping position is not limited to one, but may be a plurality of times. According to the embodiment described above, the storage chamber 22 passes over the discharge port 23 a set number of times during the period when the discharge port 23 of the liquid material supply device 20 passes through one dropping position on the lower substrate 1. This can be implemented by controlling the drive of the servo motor 25.

  Moreover, although both the moving apparatus 12 and the moving apparatus 50 demonstrated with the example which has an X-axis drive part and a Y-axis drive part, the X-axis drive part and the Y-axis drive part are at least one of the moving apparatuses 12 and 50 together. If each of them is provided, the liquid substance can be dropped onto the lower substrate 1.

  Furthermore, the number of storage rooms 22 is not limited to two and may be more.

FIG. 1 is a schematic view showing a liquid substance dropping device and a substrate laminating device. FIG. 2 is a schematic diagram showing a dropping pattern on the substrate. FIG. 3 is a schematic view showing a liquid material supply apparatus. FIG. 4 is a schematic view showing a modification of the liquid substance supply apparatus.

Explanation of symbols

1 Lower substrate (substrate)
3A, 3B, 3Z Dropping position 10 Liquid substance dropping device 11 Substrate transfer stage 12 Moving device

Claims (2)

In the liquid substance dropping device for dropping the liquid substance in a dotted manner at a plurality of dropping positions on the substrate by the liquid substance supply means,
Moving means for relatively moving the liquid substance supply means and the substrate;
Means for detecting a positional relationship of the liquid substance supply means with respect to the substrate;
Based on the position information of each dropping position of the liquid substance to a pre taught the substrate and detected the positional relationship with respect to each dropping position of the substrate during relative movement between said substrate said liquid material supply means And a control means for controlling the discharge timing of the liquid substance by the liquid substance supply means for each dropping position so as to drop the liquid substance. In a liquid substance dropping method in which a liquid substance is dropped in a dot shape at a plurality of dropping positions on a substrate by a liquid substance supply means,
A moving step of relatively moving the liquid substance supply means and the substrate;
Detecting the positional relationship of the liquid substance supply means with respect to the substrate during the moving step;
Based on the position information of each dropping position of the liquid substance to a pre taught the substrate and the positional relationship detected in the step of this detection, the liquid material with respect to the dropping position of the substrate during said moving step A determination step of determining a discharge timing of the liquid substance by the liquid substance supply means for each dropping position so as to drop ;
Liquid material dropping method characterized by Ru and a discharge step of discharging the liquid material from said liquid material supply means at a timing determined by the determining step.

Images