JP4084653B2 - 2D measuring machine - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a two-dimensional measuring machine used for inspecting a glass substrate or the like used in an LCD or the like.
[0002]
[Prior art]
In recent years, LCDs (Liquid Crystal Display) such as TFT liquid crystal displays, which have been widely used in mobile terminals such as notebook personal computers, sandwich the liquid crystal between two glass substrates and apply voltage to the liquid crystal to transmit light. The point on the display is blinked by controlling. On this glass substrate, a part that does not transmit light such as a transistor and a wiring for controlling the voltage applied to the liquid crystal and a part that transmits light such as an electrode and a color filter are arranged, and the shape and dimensions thereof are It is made with an accuracy of several tens of μm to several μm.
[0003]
In order to measure and inspect the various dimensions on the glass substrate, a two-dimensional measuring machine equipped with a measurement table is used. In this two-dimensional measuring machine, a glass substrate is placed on a glass plate of a measurement table, irradiated with light toward the glass substrate, and a glass substrate by a camera provided with a microscope as an optical unit above the glass substrate. The light transmitted through the light is magnified and received, and its shape and dimensions are measured with an accuracy of μm.
[0004]
In order to measure various dimensions on the glass substrate with such accuracy, the unevenness and waviness (hereinafter referred to as flatness) on the upper surface of the glass plate on which the glass substrate is placed should be suppressed to within several tens of μm. Is required.
Therefore, the glass plate upper surface is polished, and a plurality of rods supporting the glass plate are finely adjusted in the vertical direction to suppress the flatness of the glass plate upper surface to within several tens of μm (for example, patents). Reference 1).
[0005]
[Patent Document 1]
JP-A-9-33207 (page 3-5, FIGS. 2 and 3)
[0006]
[Problems to be solved by the invention]
By the way, in the above two-dimensional measuring machine, the glass plate holding the object to be inspected is a single glass plate. However, in recent years, LCDs have become larger, and a two-dimensional measuring machine capable of inspecting an object to be inspected having a large area has been demanded. In order to satisfy the requirement, it is necessary to use a glass plate having a large area for holding a large inspected object.
Even if the object to be inspected becomes large, the accuracy required for measurement of the object to be inspected is still a few μm, so the flatness of the surface of the glass plate that holds the object to be inspected should be kept within tens of μm. Is required. However, for example, when the glass plate has a size of 2 m × 2 m, there are unevenness and undulation of several hundred μm if the material is left as it is. Obtained flatness within.
However, since there are few polishing machines that can polish a glass plate having a large area and it is technically difficult, there is a problem that the production is expensive.
[0007]
Further, when the flatness of a glass plate having a large area is corrected using a rod, there is a problem that a large stress (stress) is applied to the glass plate and the glass plate may be damaged.
Even when a part of the glass plate is broken, it is necessary to replace the glass having a large area with high cost, and there is a problem in that maintenance and repair are costly.
[0008]
The present invention has been made in view of such circumstances, and an object thereof is to provide a two-dimensional measuring machine capable of measuring an object to be inspected such as a glass substrate having a large area at low cost.
[0009]
[Means for Solving the Problems]
The two-dimensional measuring machine of the present invention employs the following means in order to solve the above problems.
The invention according to claim 1 includes a base, a table disposed on the base, a beam disposed above the table, and an optical inspection apparatus for measuring an object to be inspected disposed on the beam. And the table is configured to include a support member and a plate body that is supported on the upper surface side of the support member and holds an object to be inspected, and the table and the optical inspection device are In a two-dimensional measuring machine that is movable with respect to each other, the plate body is divided into a plurality of pieces, and the plurality of the plate bodies are provided on the support member so as to be screwed to each other so that they form the same plane. It is supported by the member so that it can move up and down.
[0010]
According to the two-dimensional measuring machine concerning this invention, the said to-be-inspected object can be hold | maintained with the said several plate body with the small area divided | segmented. Therefore, by using the plate body that is easy to polish and has a small area, it is possible to reduce the cost for manufacturing the plate and to maintain high flatness.
[0011]
Since the plate having a small area is used, the flatness of the plate can be maintained high by the support member as compared with the case where one large plate is used. Further, when adjusting the flatness, the area is smaller than that of a single large plate, so that the adjustment amount is small. For this reason, it is possible to reduce the place where the flatness of the plate body is adjusted by the support member, and it is possible to reduce the amount to be adjusted, thereby reducing the stress applied to the plate body, The risk of the plate body being damaged is reduced.
[0012]
Further, even if a part of the plate body is damaged, it is only necessary to replace the damaged plate body among the plurality of divided plate bodies, and the area of the plate body to be replaced is small. The price is relatively low and maintenance costs can be reduced.
[0014]
Furthermore, according to the two-dimensional measuring machine according to the present invention, the plurality of divided plates are supported by a plurality of locking members that are respectively screwed to the support member so as to be vertically movable. Therefore, each plate can be adjusted individually. Therefore, the flatness can be adjusted with high accuracy for each plate, and high flatness can be obtained as a whole.
[0015]
The invention according to claim 2, in a two-dimensional measuring machine according to claim 1, wherein the support member, characterized in that it comprises an edge support for supporting the edges of the divided plate member to said plurality respectively.
[0016]
According to the two-dimensional measuring machine according to the present invention, since the support member includes the edge support portions that respectively support the edges of the plurality of divided plates, each plate has high rigidity at the edge portion. Supported.
[0017]
According to a third aspect of the present invention, in the two-dimensional measuring machine according to the first or second aspect, a light source for irradiating light upward is disposed below the plate body and the support member, and the plate body The support member is made of a transparent or translucent material.
[0018]
According to the two-dimensional measuring machine according to the present invention, since the plate body and the support member are made of a transparent or translucent material, light from the light source from below passes through these members and is on the table. The object can be irradiated.
[0019]
DETAILED DESCRIPTION OF THE INVENTION
A first embodiment according to the present invention will be described below with reference to FIGS.
1 and 2, a two-dimensional measuring machine 10 includes a base 11, a pair of lower guides 12 arranged in parallel on the base 11, a table 13 that moves along the lower guide 12, and a base 11. A pair of support posts 14 erected above, an upper guide (beam) 15 supported by these support posts 14 so as to be orthogonal to the lower guide 12, and an upper guide 15 A supporting table 16 that moves along, a CCD camera (optical inspection apparatus) 17 that is arranged on the side surface of the supporting table 16 and measures a glass substrate (inspected object) P, and a glass substrate P as an optical part of the CCD camera 17 is measured. And a microscope 18 for enlarging the point.
[0020]
As shown in FIG. 3, the table 13 includes a casing 21 that forms an outer periphery of the table 13, two glass plates (plate bodies) 22 and 22 on which the glass substrate P is placed, and a glass plate 22. A cross-girder-shaped base (supporting member) 24 supported via a (locking member) 23 and a light source 25 arranged below the cross-girder-shaped base 24 and irradiating the glass substrate P are provided.
[0021]
As shown in FIGS. 3 and 4, the top 23 is formed with a flange portion 26 that supports the glass plate 22 at an intermediate portion thereof, a screw portion 27 a is provided below the flange portion 26, and a The screw part 27b is also provided. A groove 28 that is used when the top 23 is rotated by a driver is provided on the top surface of the top 23.
[0022]
The cross-shaped base 24 is provided with a plate-like edge support portion 24a that supports the edge of the glass plate 22 and a plate-like partition portion 24b that supports the middle portion of the glass plate 22 in the longitudinal direction. It is made into a shape. Furthermore, the cross-shaped base 24 includes a screw portion of the top 23 at positions corresponding to the four corners of the glass plate 22, positions corresponding to the centers of the respective sides of the glass plate 22, and positions corresponding to the center of the glass plate 22. A screw hole 29 is provided for screwing with 27a.
The glass plate 22 is provided with holes 30 through which the screw portions 27b of the frame 23 are inserted at the center, the four corners, and the centers of the respective sides, and counterbore portions 31 are provided around the holes 30. It has been.
[0023]
Between the upper surface of the flange portion 26 of the top 23 and the glass plate 22, a washer 32 for lowering the coefficient of friction with Teflon (registered trademark) or the like and improving slipping is disposed, and a nut 33 is provided. Between the washer 32 and the counterbore part 31, the screw part 27b is screwed.
[0024]
Next, a method of using the two-dimensional measuring machine 10 having the above configuration will be described. First, before measuring the glass substrate P, the flatness of the glass plate 22 is adjusted, and the upper surfaces of the two glass plates 22 are adjusted to the same plane.
[0025]
The frame 23 is used for these adjustments. That is, as shown in FIGS. 3 and 4, by inserting a screwdriver into the groove 28 of the frame 23 and rotating the frame 23, the frame 23 is moved in the vertical direction with respect to the cross-shaped base 24. As the frame 23 moves up and down, the glass plate 22 supported by the frame 23 moves up and down.
Therefore, in order to correct unevenness and deflection of the upper surface of the glass plate 22, the top 23 of the convex bent portion is lowered and the top 23 of the concave bent portion is raised.
To match the height of the upper surface of the two glass plates 22, the plurality of frames 23 provided on the single glass plate 22 are moved up and down as a whole, and to adjust the inclination, the higher side Lower the frame 23 and raise the lower frame 23 to match. The glass plate 22 is provided with a suction port (not shown) for adsorbing the glass substrate P, and a suction blower or a pump is attached to the suction port.
[0026]
After adjusting the flatness of the glass plate 22, the glass substrate P is measured. When measuring the glass substrate P, as shown in FIGS. 1 to 3, the glass substrate P is held on the glass plate 22, and the irradiation light from the light source 25 passes through the inside of the cross-shaped base 24 and the glass plate 22. Is transmitted, and the glass substrate P is irradiated.
And the some measurement point provided in the glass substrate P is measured. A plurality of measurement points are measured to determine whether the relative position of each measurement point is within the design value range.
[0027]
Specifically, the table 13 and the support base 16 are driven by a linear motor (not shown), the microscope 18 and the CCD camera 17 are moved onto the reference first measurement point, and the first measurement point is transmitted. The taken light is taken into the CCD camera 17 through the microscope 18. Then, the distance (dX1, dY1) from the center of the captured image to the center of the measurement point is obtained by counting the CCD pixels.
Then, the table 13 and the support base 16 are driven by a linear motor (not shown), the microscope 18 and the CCD camera 17 are moved onto the next second measurement point, and the light transmitted through the second measurement point is transmitted. The image is taken into the CCD camera 17 through the microscope 18.
At this time, the moving distance (X) of the table 13 and the moving distance (Y) of the support base 16 are measured by a laser interferometer, and as in the case of the first measurement point, The distance (dX2, dY2) between the center of the captured image) and the center of the second measurement point is obtained.
[0028]
From the above measurement results, the relative distance between the first measurement point and the second measurement point is the distance (X and Y) between the table 13 and the support 16 and the distance from the center of the visual field of the CCD camera 17 to the center of each measurement point. It is obtained by adding or subtracting (dX1, dY1) (dX2, dY2).
That is, when the center of the second measurement point exists between the center of the visual field of the CCD camera 17 when the second measurement point is captured and the center of the first measurement point, the moving distance (X And (Y) subtract (dX2, dY2). Conversely, when the center of the second measurement point is not between the center of the field of view of the CCD camera 17 when the second measurement point is captured and the center of the first measurement point, the movement distance (X and (DX2, dY2) is added to Y).
[0029]
In addition, explanation will be given when the glass plate 22 is broken or when the glass substrate 22 is replaced for maintenance or the like.
To replace the glass plate 22, as shown in FIGS. 3 and 4, first, all nuts 33 holding the glass plate 22 from above are removed from the screw portions 27b of the top 23, and the glass plate 22 is moved upward. Pull up to remove. The new glass plate 22 is lowered from above so that the screw portion 27b of the top 23 is inserted into the hole 30, and the nut 33 is screwed into the screw portion 27b to press the glass plate 22 from above.
[0030]
According to said structure, since the glass substrate P can be hold | maintained with the several divided glass plate 22 with a small area, it can manufacture by using the glass plate 22 with a small area easy to grind | polish. Such costs can be suppressed and high flatness can be maintained.
[0031]
Since the glass plate 22 having a small area is used, the flatness of the glass plate 22 can be maintained high by the top 23 as compared with the case where one large glass plate is used. Further, when adjusting the flatness, the area is smaller than that of a single large glass plate, so that the adjustment amount is small. For this reason, the location where the flatness of the glass plate 22 is adjusted by the top 23 can be reduced, and the amount to be adjusted can be reduced, so that the stress applied to the glass plate 22 can be reduced. The risk of breakage of the plate 22 is reduced.
[0032]
Moreover, even if a part of the glass plate 22 is broken, it is only necessary to replace the broken glass plate 22 among the divided glass plates 22, and the area of the glass plate 22 to be replaced is small. The price is relatively low and maintenance costs can be reduced.
[0033]
Since the glass plate 22 divided into a plurality of parts is supported by a plurality of pieces 23 that can be screwed to the cross-girder-shaped base 24 so as to be vertically movable, the glass plates 22 and 22 can be individually adjusted. is there. Therefore, the flatness can be adjusted with high accuracy for each glass plate 22, 22, and high flatness can be obtained as a whole.
[0034]
Since the cross-shaped base 24 is provided with the edge support part 24a which supports the edge of the glass plate 22 divided | segmented into plurality, each glass plate 22 and 22 is supported by the rigidity of the edge part.
[0035]
Next, a second embodiment according to the present invention will be described with reference to FIGS. In addition, the same code | symbol is attached | subjected to the component same as 1st embodiment, and the description is abbreviate | omitted.
As shown in FIGS. 5 to 7, the table 51 of the two-dimensional measuring machine 50 has a glass base (support member) 53 that supports two glass plates 22, 22 holding the glass substrate P via a frame 23. Is provided.
On the upper surface of the glass base 53, bush holes 54a are formed at positions corresponding to the four corners of the glass plate 22, positions corresponding to approximately the center of the four sides, and positions corresponding to the approximately center. A bush 54 with a female thread that is screwed into the threaded portion 27a is provided therein.
[0036]
When measuring the glass substrate P with the two-dimensional measuring machine 50 having the above-described configuration, the glass substrate P is held on the glass plates 22 and 22 of the table 51 and irradiated from the light source 25 as shown in FIGS. Light is transmitted through the glass base 53 and the glass plate 22 to irradiate the glass substrate P. Since the subsequent measurement method is the same as that of the first embodiment, the description thereof is omitted.
In addition, the adjustment of the flatness of the glass plate and the replacement of the glass plate can be performed only by replacing the cross-girder-shaped base 24 with the glass base 53 and the screw hole 29 with the female-threaded bush 54. Since it is the same as an Example, the description is abbreviate | omitted.
[0037]
According to said structure, since the glass base 53 can permeate | transmit light substantially on the whole surface, there are few parts which block | interrupt irradiation light and it is less likely to make the shadow of irradiation light. Therefore, the shadow hardly falls on the glass substrate P, the shadow portion is located at the measurement point, and the light transmitted through the measurement point cannot be taken into the CCD camera 17 and the position is difficult to measure. Less is.
[0038]
The technical scope of the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.
In particular, in each of the above-described embodiments, the description has been made by adapting to the case where the glass plate 22 is composed of two sheets. However, the present invention is not limited to the case where the glass plate 22 is composed of two sheets. The present invention can be applied to a structure composed of a plurality of other glass plates 22 such as a structure composed of a single sheet.
[0039]
【The invention's effect】
As described above, according to the first aspect of the present invention, the plate body is divided into a plurality of pieces, and the plurality of plate bodies are supported so as to form the same plane. As well as being able to maintain high flatness, it is possible to measure a large test object at low cost.
[0040]
Further, since the number of places where the flatness of the plate body is adjusted by the support member can be reduced, and the amount to be adjusted can be reduced, the stress applied to the plate body can be reduced, The risk of breakage of the plate is reduced. For this reason, it is possible to reduce the frequency of exchanging the plate, and it is possible to measure a large test object at low cost.
[0041]
Furthermore, even if a part of the plate body is damaged, it is only necessary to replace the damaged plate body among the plurality of divided plate bodies, and the area of the plate body to be replaced is small. The price is relatively low, the maintenance cost can be reduced, and a large test object can be measured at a low cost.
[0042]
Moreover, since each plate can be adjusted individually, the flatness of each plate can be adjusted with high accuracy, and the effect that high flatness can be obtained as a whole is achieved.
[0043]
According to the invention which concerns on Claim 2 , since a support member is provided with the edge support part which each supports the edge of the board divided | segmented into plurality, it says that each board is supported by the part of an edge with high rigidity. There is an effect.
[0044]
According to the invention of claim 3 , since the light from the light source from below can pass through these members and irradiate the object to be inspected on the table, the light transmitted through the object to be inspected by the optical measuring device This makes it easy to capture the position and to easily measure the position.
[Brief description of the drawings]
FIG. 1 is a top view showing a first embodiment of a two-dimensional measuring machine according to the present invention.
FIG. 2 is a front view showing a first embodiment of a two-dimensional measuring machine according to the present invention.
FIG. 3 is an exploded perspective view showing a table in the first embodiment of the coordinate measuring machine according to the present invention.
4 is a cross-sectional view taken along line AA in FIG.
FIG. 5 is a top view showing a second embodiment of the two-dimensional measuring machine according to the present invention.
FIG. 6 is a perspective view of a main part showing a second embodiment of a two-dimensional measuring machine according to the present invention.
7 is a cross-sectional view taken along line BB in FIG.
[Explanation of symbols]
10, 50 Coordinate measuring machine 11 Base 13, 51 Table 15 Upper guide (beam)
17 CCD camera (optical inspection equipment)
22 Glass plate (plate)
23 frames (locking members)
24 Cross-shaped base (support member)
24a Edge support portion 53 Glass base (support member)
P glass substrate (inspected object)

Claims (3)

A base, a table disposed on the base, a beam disposed above the table, and an optical inspection device that is disposed on the beam and measures an object to be inspected.
The table is configured to include a support member, and a plate body that is supported on the upper surface side of the support member and holds an object to be inspected.
In the two-dimensional measuring machine in which the table and the optical inspection device are movable relative to each other,
The plate body is divided into a plurality of pieces, and the plurality of plate bodies are supported by a plurality of locking members provided so as to be screwable to the support member so as to be vertically movable, so as to form the same plane. A two-dimensional measuring machine characterized by that. The two-dimensional measuring machine according to claim 1 ,
The two-dimensional measuring machine, wherein the support member includes an edge support portion that supports the edges of the plurality of divided plates. The two-dimensional measuring machine according to claim 1 or 2 ,
A light source for irradiating light upward is disposed below the plate and the support member, and the plate and the support member are made of a transparent or translucent material. Machine.

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