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JP3421591B2 - Manufacturing method of hybrid integrated circuit device - Google Patents

Manufacturing method of hybrid integrated circuit device

Info

Publication number
JP3421591B2
JP3421591B2 JP27353098A JP27353098A JP3421591B2 JP 3421591 B2 JP3421591 B2 JP 3421591B2 JP 27353098 A JP27353098 A JP 27353098A JP 27353098 A JP27353098 A JP 27353098A JP 3421591 B2 JP3421591 B2 JP 3421591B2
Authority
JP
Japan
Prior art keywords
integrated circuit
hybrid integrated
resin
circuit board
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP27353098A
Other languages
Japanese (ja)
Other versions
JP2000106375A (en
Inventor
昌巳 茂木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP27353098A priority Critical patent/JP3421591B2/en
Publication of JP2000106375A publication Critical patent/JP2000106375A/en
Application granted granted Critical
Publication of JP3421591B2 publication Critical patent/JP3421591B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701Low temperature co-fired ceramic [LTCC]

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、混成集積回路装置
の製造方法であり、特にケース材を不要とし、且つ封止
された樹脂表面のフラット性を維持できる混成集積回路
装置の製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a hybrid integrated circuit device, and more particularly to a method of manufacturing a hybrid integrated circuit device which does not require a case material and can maintain the flatness of the surface of a sealed resin. Is.

【0002】[0002]

【従来の技術】まず一般に図5の様な混成集積回路装置
があり、これは例えば特公昭61−55247号が詳し
い。
2. Description of the Prior Art Generally, there is a hybrid integrated circuit device as shown in FIG. 5, which is detailed in, for example, Japanese Patent Publication No. 61-55247.

【0003】つまり混成集積回路装置は、金属基板1
と、この表面に絶縁材料2が被覆され、この上に接着さ
れたCuよりなる導電パターン3、4と、この導電パタ
ーン3、4と電気的に接続された半導体素子等の回路素
子5と、この導電パターンの一部であるパッド3と半田
を介して固着された外部リード6と、この外部リード6
と前記回路素子5とを電気的に接続する金属細線7およ
びこれらをモールドする樹脂8とを有している。
That is, the hybrid integrated circuit device has a metal substrate 1
A conductive pattern 3 or 4 made of Cu adhered to the surface of the insulating material 2 and a circuit element 5 such as a semiconductor element electrically connected to the conductive patterns 3 and 4; External lead 6 fixed to pad 3 which is a part of the conductive pattern via solder, and external lead 6
And a metal thin wire 7 for electrically connecting the circuit element 5 and a resin 8 for molding them.

【0004】つまり放熱性が考慮されて基板1の裏面が
露出されているものである。
That is, the back surface of the substrate 1 is exposed in consideration of heat dissipation.

【0005】製造方法として色々あるが、第1の製造方
法は、まず図4に示すように回路素子3、4および外部
リード6が取り付けられた金属基板を用意し、図5に示
すケース材9を貼り付け、ケース材9と金属基板1で成
る空間に樹脂を塗布していた。
Although there are various manufacturing methods, in the first manufacturing method, first, as shown in FIG. 4, a metal substrate to which the circuit elements 3 and 4 and the external leads 6 are attached is prepared, and the case material 9 shown in FIG. And the resin was applied to the space formed by the case material 9 and the metal substrate 1.

【0006】また第2の製造方法は、図4の混成集積回
路基板を用意し、これを金型にセットし、金属基板1と
金型で成る空間に樹脂を注入して形成していた。
In the second manufacturing method, the hybrid integrated circuit board shown in FIG. 4 is prepared, set in a mold, and resin is injected into the space formed by the metal substrate 1 and the mold.

【0007】更に第3の製造方法は、図4の金属基板1
上に樹脂を塗布するか、または液状の樹脂の中にディッ
プして封止していた。
Further, the third manufacturing method is the metal substrate 1 of FIG.
The resin was applied on the top or was dipped in a liquid resin for sealing.

【0008】[0008]

【発明が解決しようとする課題】第1の製造方法は、ケ
ース材9を貼り合わせ、樹脂を注入できる空間を用意し
なければ成らず、作業性が悪く、価格も高価になる問題
があった。
In the first manufacturing method, the case material 9 has to be adhered and a space for injecting the resin has to be prepared, resulting in poor workability and high cost. .

【0009】第2の製造方法は、リード形状により金型
を色々用意しなければならす、これも価格を上昇させる
問題があった。
In the second manufacturing method, various molds must be prepared depending on the lead shape, which also raises a problem of increasing the price.

【0010】更に第3の製造方法は、第1、第2の製造
方法と比べ、手間もかからず価格的にも下げられるが、
金属基板1上に実装された回路素子の高低で、樹脂表面
に凸凹が形成され、機種名の印刷性が悪い問題があっ
た。また吸引機構の自動機でプリント基板等に実装する
場合、樹脂表面の凹凸で混成集積回路装置が吸引できな
い問題があった。
Further, the third manufacturing method requires less labor and is less expensive than the first and second manufacturing methods.
There is a problem in that the printability of the model name is poor due to the unevenness formed on the resin surface due to the height of the circuit element mounted on the metal substrate 1. Further, when mounting on a printed circuit board or the like by an automatic machine having a suction mechanism, there is a problem that the hybrid integrated circuit device cannot be sucked due to the unevenness of the resin surface.

【0011】[0011]

【課題を解決するための手段】本発明は、前述の課題に
鑑みて成され、混成集積回路基板を用意し、熱硬化前の
粉末樹脂が一体化され、表面に補強用シートが設けられ
たペレットを前記混成集積回路基板に載せ、前記ペレッ
トを構成する粉末樹脂を溶融硬化し、前記混成集積回路
基板の実質全域を封止し、前記補強用シートの上に機種
名を印刷することで解決するものである。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems. A hybrid integrated circuit board is prepared, powder resin before thermosetting is integrated, and a reinforcing sheet is provided on the surface. Solving by placing pellets on the hybrid integrated circuit board, melting and curing the powder resin forming the pellets, sealing substantially the entire area of the hybrid integrated circuit board, and printing the model name on the reinforcing sheet. To do.

【0012】また補強用シートの表面を吸引面として活
用する事で解決するものである。
Further, the problem is solved by utilizing the surface of the reinforcing sheet as a suction surface.

【0013】ペレットは、補強用シートの上に、熱硬化
前の粉末樹脂が一体化されたものであり、溶融すると、
樹脂は、混成集積回路基板の全面を覆うように軟化流動
する。しかし表面には、補強シートがあるため、平坦性
を維持しながら硬化できる。従って製造工程が簡略化で
き、コストの低価格化が実現できると共に、印刷性や吸
引性も維持できる。
Pellets are obtained by integrating powder resin before thermosetting on a reinforcing sheet, and when melted,
The resin softens and flows so as to cover the entire surface of the hybrid integrated circuit board. However, since there is a reinforcing sheet on the surface, it can be cured while maintaining flatness. Therefore, the manufacturing process can be simplified, the cost can be reduced, and the printability and suction ability can be maintained.

【0014】またペレットが溶融した際に、混成集積回
路基板の周辺に向かうダレ部で前記外部リードを補強す
ることで解決するものである。
Further, when the pellet is melted, the external lead is reinforced by the sagging portion extending toward the periphery of the hybrid integrated circuit board.

【0015】上方に向かい外部リードが有ると、本来ペ
レットは、この上にも載置しなければならない。すると
外部リードと回路素子のサイズが極端に異なるため、基
板上に溶融された樹脂厚は、大幅に異なってしまう。し
かし溶融時に補強シートから融けて発生するダレ部を有
効に使い、ここの部分で外部リードを補強できる。
If there is an external lead pointing upwards, the pellet should essentially be placed on this as well. Then, since the size of the external lead and the size of the circuit element are extremely different, the thickness of the resin melted on the substrate is significantly different. However, the sagging portion generated by melting from the reinforcing sheet during melting can be effectively used, and the external lead can be reinforced at this portion.

【0016】更に、前記打ち抜き面に発生する突起部を
活用して前記樹脂の流れを抑制しながら前記樹脂を硬化
することで解決するものである。
Further, the problem is solved by hardening the resin while suppressing the flow of the resin by utilizing the protrusions generated on the punched surface.

【0017】電子部品を、混成集積回路基板の打ち抜き
面と対向する面に設けて、打ち抜きに生ずる突起部で樹
脂の流れを止める事ができる。
The electronic component can be provided on the surface of the hybrid integrated circuit substrate that faces the punching surface, and the flow of the resin can be stopped by the protrusions generated in the punching.

【0018】[0018]

【発明の実施の形態】以下に本発明の実施の形態を図1
を参照しながら説明する。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to FIG.
Will be described with reference to.

【0019】まず例えばプレスにより打ち抜かれた金属
性の混成集積回路基板1がある。この混成集積回路基板
1は、Al、CuやFe等が考えられる。
First, there is a metallic hybrid integrated circuit board 1 punched by, for example, a press. The hybrid integrated circuit board 1 may be made of Al, Cu, Fe or the like.

【0020】これらの混成集積回路基板1は、紙面に対
して下側からプレスで上に打ち抜かれており、混成集積
回路基板1底面の周辺にある角部11は、アールを有し
ている。また混成集積回路基板1上面の周辺にある角部
12は、実質全周辺に渡り突起部13が設けられ、混成
集積回路基板1の側面には、下側にせん断面、上側には
破断面が全周に渡り設けられている。
These hybrid integrated circuit boards 1 are punched upward from the bottom with respect to the plane of the drawing by a press, and the corners 11 around the bottom surface of the hybrid integrated circuit board 1 have a radius. In addition, the corners 12 around the upper surface of the hybrid integrated circuit board 1 are provided with protrusions 13 over substantially the entire periphery thereof, and the side surface of the hybrid integrated circuit board 1 has a shear surface on the lower side and a fracture surface on the upper side. It is provided all around.

【0021】この混成集積回路基板1としてAlを採用
した場合、その表面は、陽極酸化により酸化物が形成さ
れてもよい。
When Al is adopted as the hybrid integrated circuit substrate 1, an oxide may be formed on its surface by anodic oxidation.

【0022】また混成集積回路基板1は、導電性を有す
るため、この上に設けられる導電路3、4との短絡を考
慮し全面に絶縁性樹脂2が被着されている。
Further, since the hybrid integrated circuit board 1 has conductivity, the insulating resin 2 is applied to the entire surface in consideration of a short circuit with the conductive paths 3 and 4 provided thereon.

【0023】また導電パターン3、4は、例えばCuよ
り成るもので、配線、ランド、ボンデイング用のパッ
ド、外部リード用の固着パッド等として設けられ、導電
ランドにはベアの半導体ICやトランジスタ等のチップ
(半導体素子)が設けられる。また配線間はチップコン
デンサ、チップ抵抗および印刷抵抗等の回路素子14が
半田や銀ペースト等を介して電気的に固着され、あるい
は印刷抵抗がスクリーン印刷等で形成されている。更に
は前記チップと配線を電気的に接続するため、チップ上
の電極とボンディング用のパッドとの間には金属細線7
が電気的に接続され、外部リード用の固着パッド20に
は半田を介して外部リード24が電気的に接続されてい
る。
The conductive patterns 3 and 4 are made of Cu, for example, and are provided as wirings, lands, pads for bonding, fixed pads for external leads, and the like, and the conductive lands include bare semiconductor ICs and transistors. A chip (semiconductor element) is provided. Circuit elements 14 such as a chip capacitor, a chip resistor and a printing resistor are electrically fixed between the wirings via solder, silver paste or the like, or the printing resistor is formed by screen printing or the like. Further, in order to electrically connect the chip and the wiring, a thin metal wire 7 is provided between the electrode on the chip and the bonding pad.
Are electrically connected, and the external leads 24 are electrically connected to the fixing pads 20 for external leads via solder.

【0024】またこれらCuのパターンは、絶縁性のフ
レキシブルシートに貼り合わされ、このフレキシブルシ
ートが混成集積回路基板に貼り合わされても良い。
Further, these Cu patterns may be bonded to an insulating flexible sheet, and this flexible sheet may be bonded to the hybrid integrated circuit board.

【0025】そして、混成集積回路基板1およびこの上
に実装された実装部品を封止するために、本発明のポイ
ントとなる封止用の樹脂20が設けられている。
Then, in order to seal the hybrid integrated circuit board 1 and the mounting components mounted thereon, a sealing resin 20 which is a feature of the present invention is provided.

【0026】続いて製造方法を説明する。まずここまで
の説明からも明らかなように、図4の如き混成集積回路
基板1を用意する。
Next, the manufacturing method will be described. First, as is apparent from the above description, the hybrid integrated circuit board 1 as shown in FIG. 4 is prepared.

【0027】次に、図2のようにペレット21を混成集
積回路基板の上に配置する。ここでペレット21は、補
強用シート22に熱硬化前の粉末状の樹脂23が一体化
されたものである。
Next, the pellet 21 is placed on the hybrid integrated circuit board as shown in FIG. Here, the pellet 21 is obtained by integrating the reinforcing sheet 22 and the powdery resin 23 before thermosetting.

【0028】補強用シート22は、樹脂23が熱硬化後
もフラット性を保持する材質が好ましく、エポキシ含浸
のガラス繊維等が好ましい。また薄いガラス基板等でも
良い。
The reinforcing sheet 22 is preferably made of a material that retains flatness even after the resin 23 is thermoset, and is preferably epoxy impregnated glass fiber or the like. Alternatively, a thin glass substrate or the like may be used.

【0029】この状態で、例えばヒーターの上に載置
し、150度程度にして樹脂23を溶融し、その後熱硬
化される。
In this state, for example, it is placed on a heater, the resin 23 is melted at about 150 degrees, and then it is thermally cured.

【0030】この完成図が、図1である。前述した溶融
樹脂は、自分自身の自重や補強シートの自重により沈み
込み、同時に補強シートの端部T1、T2から混成集積
回路基板1の突起部13まで流れ出て、ダレ部24、2
5を形成する。
This completed drawing is shown in FIG. The above-mentioned molten resin sinks due to its own weight or the weight of the reinforcing sheet, and at the same time flows out from the end portions T1 and T2 of the reinforcing sheet to the protrusion portion 13 of the hybrid integrated circuit board 1 and the sagging portions 24, 2
5 is formed.

【0031】右側のダレ部25は、突起部13まで流れ
るため、自然に混成集積回路基板1から上方に延在され
る上向きリード部26は、自然と封止され補強される。
Since the sagging portion 25 on the right side flows to the projection portion 13, the upward lead portion 26 that naturally extends upward from the hybrid integrated circuit board 1 is naturally sealed and reinforced.

【0032】また上向きリード部26の上方まで封止す
るためには、図2に於いて、ペレット21の側面と上向
きリード部26とを当接させた方がよい。つまり補強シ
ート22の端部T2に近づくにつれてその厚さが増すた
めである。
Further, in order to seal the upper side of the upward lead portion 26, it is better to bring the side surface of the pellet 21 into contact with the upward lead portion 26 in FIG. That is, the thickness increases as the end portion T2 of the reinforcing sheet 22 is approached.

【0033】以上の説明で完成された混成集積回路装置
を図3に示す。補強シート22がフラット性を有するた
め、図示の如く印刷性が向上し、機種名等を載せること
ができる。しかもフラット性を有することから、補強シ
ートに自動機の吸引部を当てて、吸引が可能となり、例
えばプリント基板等に自動実装が可能となる。
The hybrid integrated circuit device completed by the above description is shown in FIG. Since the reinforcing sheet 22 has flatness, the printability is improved as shown in the drawing, and the model name or the like can be put on it. Moreover, since it has flatness, it is possible to apply suction to the reinforcing sheet by applying the suction part of an automatic machine, and for example, it is possible to automatically mount it on a printed circuit board or the like.

【0034】また以上の説明では、基板1として金属基
板で説明したが、セラミック基板、ガラス基板、プリン
ト基板およびフレキシブル基板等でも良い。
In the above description, the metal substrate is used as the substrate 1, but a ceramic substrate, a glass substrate, a printed circuit board, a flexible substrate or the like may be used.

【0035】[0035]

【発明の効果】以上の説明から明らかなように、表面に
補強用シートが設けられたペレットを前記混成集積回路
基板に載せ、前記ペレットを溶融硬化するだけで、簡単
に封止する事ができる。
As is apparent from the above description, the pellet having the reinforcing sheet on its surface is placed on the hybrid integrated circuit board, and the pellet can be simply melted and cured for sealing. .

【0036】しかも補強シートがフラット性を有するた
め、補強用シートの上に機種名を印刷することが可能と
なる。また補強用シートの表面を吸引面として活用する
事ができる。
Moreover, since the reinforcing sheet has flatness, the model name can be printed on the reinforcing sheet. Further, the surface of the reinforcing sheet can be used as a suction surface.

【0037】またペレットが溶融した際に、混成集積回
路基板の周辺に向かうダレ部が形成されるため、外部リ
ードを補強することができる。
Further, when the pellets are melted, a sagging portion is formed toward the periphery of the hybrid integrated circuit board, so that the external leads can be reinforced.

【0038】更には、前記打ち抜き面に発生する突起部
が活用できるため、溶融時の樹脂の流れを抑制しながら
前記樹脂を硬化することができる。
Furthermore, since the protrusions generated on the punched surface can be utilized, the resin can be cured while suppressing the flow of the resin during melting.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施の形態である混成集積回路装置の
断面図である。
FIG. 1 is a sectional view of a hybrid integrated circuit device according to an embodiment of the present invention.

【図2】図1の混成集積回路装置の製造方法を説明する
断面図である。
FIG. 2 is a cross-sectional view illustrating a method of manufacturing the hybrid integrated circuit device of FIG.

【図3】図1の混成集積回路装置の斜視図である。FIG. 3 is a perspective view of the hybrid integrated circuit device of FIG.

【図4】従来の混成集積回路装置の製造方法を説明する
断面図である。
FIG. 4 is a cross-sectional view illustrating a method of manufacturing a conventional hybrid integrated circuit device.

【図5】従来の混成集積回路装置の製造方法を説明する
断面図である。
FIG. 5 is a cross-sectional view illustrating a method of manufacturing a conventional hybrid integrated circuit device.

【符号の説明】[Explanation of symbols]

1 混成集積回路基板 13 突起部 22 補強用シート 23 樹脂 24 外部リード 1 Hybrid integrated circuit board 13 Projection 22 Reinforcing sheet 23 Resin 24 External lead

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H01L 21/56 H01L 23/28 ─────────────────────────────────────────────────── ─── Continuation of front page (58) Fields surveyed (Int.Cl. 7 , DB name) H01L 21/56 H01L 23/28

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 複数の電子部品が実装され、一側辺に設
けられたパッドと固着されたリードとを有する打ち抜き
により形成された混成集積回路基板を用意し、前記電子
部品は前記混成集積回路基板の打ち抜き面と対向する面
に設けられ、熱硬化前の粉末樹脂が一体化され、表面に
補強用シートが設けられたペレットを前記混成集積回路
基板の前記対向する面に載せ、前記ペレットを構成する
粉末樹脂を溶融し、前記混成集積回路基板の周辺に発生
する突起部を用いて前記樹脂の流れを抑制しながら前記
樹脂を硬化し、前記混成集積回路基板の実質全域を封止
し、フラットな前記補強用シートの上に機種名を印刷す
ることを特徴とした混成集積回路装置の製造方法。
1. A hybrid integrated circuit board is provided which has a plurality of electronic components mounted thereon, and which is formed by punching and has pads provided on one side and fixed leads. The electronic components are the hybrid integrated circuits. A pellet provided on the surface opposite to the punched surface of the substrate, the powder resin before thermosetting is integrated, and a reinforcing sheet provided on the surface is placed on the opposite surface of the hybrid integrated circuit substrate, and the pellet is attached. Melting the powdered resin constituting the resin, curing the resin while suppressing the flow of the resin by using the protrusions generated around the hybrid integrated circuit board, and sealing the substantially entire area of the hybrid integrated circuit board, A method for manufacturing a hybrid integrated circuit device, comprising printing a model name on the flat reinforcing sheet.
【請求項2】 前記リードの前記パッドから上方に延在
する部分を前記ペレットが溶融した際に前記混成集積回
路基板の周辺の前記突起部に向かうダレ部で前記リード
を補強することを特徴とする請求項1に記載の混成集積
回路装置の製造方法。
2. The lead is reinforced by a sag portion that extends toward the protrusion around the hybrid integrated circuit board when the pellet is melted in a portion of the lead that extends upward from the pad. The method for manufacturing the hybrid integrated circuit device according to claim 1.
JP27353098A 1998-09-28 1998-09-28 Manufacturing method of hybrid integrated circuit device Expired - Fee Related JP3421591B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27353098A JP3421591B2 (en) 1998-09-28 1998-09-28 Manufacturing method of hybrid integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27353098A JP3421591B2 (en) 1998-09-28 1998-09-28 Manufacturing method of hybrid integrated circuit device

Publications (2)

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JP2000106375A JP2000106375A (en) 2000-04-11
JP3421591B2 true JP3421591B2 (en) 2003-06-30

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JP (1) JP3421591B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6589820B1 (en) 2000-06-16 2003-07-08 Micron Technology, Inc. Method and apparatus for packaging a microelectronic die
US6483044B1 (en) 2000-08-23 2002-11-19 Micron Technology, Inc. Interconnecting substrates for electrical coupling of microelectronic components

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