JP2935492B2 - Solid-state image sensor and optical signal detection method using solid-state image sensor - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid-state image pickup device and an optical signal detection method using the solid-state image pickup device, and more particularly, to a threshold voltage modulation used in a video camera, an electronic camera, an image input camera, a scanner, a facsimile or the like. 1. Field of the Invention The present invention relates to a MOS-type solid-state imaging device of a system and an optical signal detection method using the solid-state imaging device.

[0002]

2. Description of the Related Art Since semiconductor image sensors are excellent in mass productivity, they have been applied to most image input device devices with the development of finer pattern technology. Above all, CCDs (Charge Coupled Devices) have high light sensitivity and low noise levels, and thus are widely used in typical imaging devices such as video cameras and facsimile machines.

However, CCDs (Charge Coupled Devices) have the following problems, and it is desired to develop a technology that can solve these problems. That is, unlike semiconductor devices such as CMOS devices, which have high power consumption and high operating voltage, they require complicated manufacturing technology, and therefore have high production costs. Since the manufacturing technology is different from semiconductor devices such as CMOS devices, CCDs are required. It is difficult to create complicated peripheral circuits inside.

In addition to such a situation, in recent years, the application market of solid-state imaging devices has been expanding, and MOS-type solid-state imaging devices have been reviewed. In addition, it has become possible to fabricate sub-micron or smaller devices using semiconductor miniaturization technology. On the other hand, regarding the characteristics of the image sensor body, MOS type image sensors and CCD
The performance difference from the image sensor is large. In particular, the improvement of the random noise characteristic and the fixed noise characteristic is required in the MOS image sensor, and a fundamental improvement in performance has been desired.

On the other hand, with the advancement of the microlens technology, the photoelectric conversion portion can be localized, and the miniaturization technology makes it possible to integrate an amplifier circuit consisting of two or three transistors for each pixel, thereby improving the sensitivity. Was completed. For this reason, thermal noise (kTC noise) generated in one of the two MOS switches, X and Y, and fixed pattern noise generated due to element variation can be reduced to some extent in a circuit.

From such a point, a so-called active CMOS image sensor, in which a fine transistor amplifier circuit based on CMOS technology is formed in a pixel of a light receiving device, has attracted attention. Since the active CMOS image sensor does not require any special manufacturing technology other than the normal CMOS technology, the CMOS peripheral circuit can be easily integrated on the same chip as the light receiving portion, and can be manufactured at low cost. Further, it has features of low power consumption and low operating voltage.

[0007] For this reason, there is a great expectation for the realization of a one-chip camera equipped with a complicated signal processing circuit in the future. The following specific examples are given as improved types of the active CMOS image sensor element. That is, CMD (Ch
An arge Modulation Device (charge modulation device) type solid-state imaging device is disclosed in Japanese Patent Application Laid-Open Nos.
06063, JP-A-6-120473 and the like. This element is a photoelectric conversion element structure with CCD
In addition, the gate electrode of the MOS transistor has a photogate electrode structure in order to improve the aperture ratio. The electric charge generated by the photoexcitation is accumulated at the interface between the gate oxide film under the photogate electrode of the MOS transistor and the Si layer to control the current. Since the charge is discharged in the completely depleted mode, the thermal noise characteristics of the transistor can be improved.

Further, BCMD (Bulk Charge Modulated)
A device type solid-state imaging device is disclosed in, for example, JP-A-64-14959. As shown in FIG. 13A, this device also has a photogate electrode structure for the gate electrode 7 of the MOS transistor in order to improve the aperture ratio, and the photogenerated charge storage layer 3 is formed on the N layer 2 under the photogate electrode 7. Is provided. In this case, the photo-generated charge accumulation layer 3 is provided on the substrate 1 side of the channel region immediately below the photo-gate electrode 7 so that the photo-generated charge is located at the interface of the gate oxide film 6 in contact with the N layer 9 below the photo-gate electrode 7 Trapping is suppressed, and noise caused by the trapping is suppressed. FIG. 13 (a)
Reference numeral 2 denotes an N layer, 4 denotes a source diffusion region, 5 denotes a drain diffusion region, and 8 denotes a constant current power supply.

Further, a solid-state image pickup device using a threshold voltage modulation method has been disclosed in Japanese Patent Application Laid-Open No. Hei 2-304973. This device has a ring gate electrode structure, a source diffusion region is formed in the center of the ring gate electrode structure, and a drain diffusion region is formed so as to surround the ring gate electrode. In this case, the drain diffusion region also serves as the high-concentration impurity diffusion layer of the buried photodiode.
The light receiving portion is provided outside the transistor region, and a portion having a low potential with respect to signal charges from the source diffusion region to the drain diffusion region is formed in a well region below a part of the channel width region in the channel width direction. It is characterized by having been provided.

In this device, the embedded photodiode is irradiated with light to generate charges, and the threshold is controlled by utilizing the substrate bias effect by accumulating the light-generated charges in the embedded photodiode. This is particularly effective when the light intensity is low and the number of photo-generated electric charges is small. Is being controlled.

[0011]

However, the CMD
In the solid-state imaging device, there is a problem that a random noise component due to charge trapping or scattering on the surface cannot be completely removed because charges used for photoelectric conversion exist near the semiconductor surface. In the BCMD type solid-state imaging device, as shown in FIG. 13A, since the charge storage layer 3 exists in the entire channel region below the photogate electrode 7, it is difficult to sufficiently saturate the transistor. ), The current-voltage characteristic becomes a triode region characteristic. For this reason, there is a problem that sufficient linearity cannot be obtained when the photo-generated charges are converted into a voltage by the source follower.

Further, the carrier distribution in the charge storage layer 3 is scattered throughout the channel region below the photogate electrode 7, and the entire channel region contributes to current modulation. Therefore, the linearity of the potential modulation with respect to the injected charge is poor. In addition, since the charge detection capacity is relatively large, the conversion efficiency is poor. Further, the CMD type and BCMD type solid-state imaging devices have a common photogate electrode structure, and there is a problem of deterioration of spectral sensitivity characteristics due to multiple interference of incident light inherent to the MOS structure of the light receiving unit.

Furthermore, the photogate electrode structure requires a special and complicated manufacturing process, such as the necessity of forming a photogate electrode made of a thin translucent polysilicon film in the manufacturing process. is there. In a solid-state imaging device in which one portion having a low potential for signal charge is provided in a well below a part of the channel width region, the low potential portion is formed in a well region below a part of the channel width region. The current-voltage characteristic becomes that of a triode region because it is provided from the source diffusion region to the drain diffusion region, and there is a problem that sufficient linearity cannot be obtained when the photo-generated charge is converted into a voltage by the source follower. is there.

The present invention has been made in view of the above circumstances, and reduces noise due to surface capture or scattering of photo-generated charges, improves spectral sensitivity characteristics and conversion efficiency, and improves linearity. An object of the present invention is to provide a solid-state imaging device and a light detection method using the solid-state imaging device, which can obtain excellent photoelectric conversion characteristics and can form a light receiving section using the same manufacturing technology as that of CMOS. I do.

[0015]

According to one aspect of the present invention, there is provided a solid-state imaging device, comprising a plurality of unit pixels each having a light receiving diode and an insulated gate field effect transistor for detecting an optical signal. In the arrayed solid-state imaging devices, the light-receiving diode includes a well region of one conductivity type formed in a semiconductor layer of the opposite conductivity type on a semiconductor substrate of one conductivity type, and an opposite conductivity type formed in a surface layer of the well region. An insulated gate field effect transistor, wherein the insulated gate field effect transistor has an opposite conductivity type drain diffusion region formed integrally with the impurity diffusion region on a surface layer of the well region; and a surface layer of the well region. A source diffusion region of the opposite conductivity type formed at a distance from the drain diffusion region, and a well region between the drain diffusion region and the source diffusion region. A gate electrode formed via a gate insulating film, a channel region having an impurity layer of the opposite conductivity type in which a current carrier in a surface layer of the well region below the gate electrode moves, and a well region below the channel region And a high concentration buried layer of one conductivity type having a higher impurity concentration than the well region in the vicinity of the source diffusion region.

According to a second aspect of the present invention, there is provided the solid-state imaging device according to the first aspect, wherein the high-concentration buried layer is formed over the entire area in the channel width direction. The invention according to claim 3 relates to the solid-state imaging device according to claim 1 or 2, wherein the vicinity of the source diffusion region is a partial region in a channel length direction from the drain diffusion region to the source diffusion region. , On the source diffusion region side.

According to a fourth aspect of the present invention, there is provided the solid-state imaging device according to any one of the first to third aspects, wherein the gate electrode has a ring shape, and the source diffusion region is provided at a central portion of the gate electrode. The drain diffusion region is formed in the surface layer of the well region, the drain diffusion region is formed in the surface layer of the well region so as to surround the gate electrode, and the high concentration buried layer is formed in the well region so as to surround the source diffusion region. It is characterized in that it is formed in the region.

According to a fifth aspect of the present invention, there is provided the solid-state imaging device according to any one of the first to fourth aspects, wherein the gate electrode of the insulated gate field effect transistor and its periphery are shielded from light. . The invention according to claim 6 relates to the solid-state imaging device according to any one of claims 1 to 5,
A load circuit is connected to a source diffusion region of the insulated gate field effect transistor to form a source follower circuit.

According to a seventh aspect of the present invention, there is provided the solid-state imaging device according to the sixth aspect, wherein a source output of the source follower circuit is connected to a video signal output. The invention of claim 8 relates to the solid-state imaging device according to any one of claims 1 to 7, wherein the unit pixels are arranged in a row direction and a column direction. According to a ninth aspect of the present invention, in the solid-state imaging device according to the eighth aspect, the drain diffusion regions of the insulated gate type field effect transistors of the unit pixels arranged in the row direction are connected together, and the drain voltage is set for each row. A drain voltage supply line, a gate electrode of the insulated gate field effect transistor of each of the unit pixels arranged in the row direction, and a vertical scanning signal supply line for transmitting a vertical scanning signal for each row; A plurality of vertical output lines provided for each column, to which the source diffusion regions of the insulated gate field effect transistors of the unit pixels arranged in the direction are connected together; and a photodetector connected to each of the vertical output lines. A switch having a signal input terminal, a light detection signal output terminal, and a horizontal scanning signal input terminal, provided for each of the columns, and a light detection signal output terminal of each of the switches A common horizontal output line connected together, a horizontal scanning signal supply line for transmitting a horizontal scanning signal for selecting one of the plurality of vertical output lines to a horizontal scanning signal input terminal of the switch, and the drain voltage A drain voltage driving scanning circuit connected to a supply line and selectively supplying a drain voltage for each row, and a vertical scanning signal driving circuit connected to the vertical scanning signal supply line and selectively supplying a vertical scanning signal for each row A scanning circuit connected to the horizontal scanning signal supply line, a horizontal scanning signal driving scanning circuit for selectively supplying a horizontal scanning signal for each column, and a horizontal scanning signal driving scanning circuit connected to the horizontal output line and selected by the driving scanning circuit; Having a load circuit forming a source follower with one of the insulated gate field effect transistors, and a video signal output connected to a source output of the source follower. It is a symptom.

According to a tenth aspect of the present invention, there is provided the solid-state imaging device according to any one of the first to ninth aspects, wherein the solid-state imaging device is formed on one semiconductor substrate. The invention according to claim 11 relates to an optical signal detection method using a solid-state imaging device, wherein the photo-generated holes are formed in the well region among the electrons and holes generated in the p-type well region by light irradiation. A p-type high-concentration buried layer having a higher concentration than the well region, which is buried in the vicinity of the n-type source diffusion region of the gate type field effect transistor, and is accumulated. And changes the threshold value of the insulated gate field effect transistor, and detects the amount of change in the threshold value as the amount of received light.

According to a twelfth aspect of the present invention, there is provided a method for detecting an optical signal by a solid-state image sensor, wherein the photo-generated electrons of the electrons and holes generated in the n-type well region by light irradiation are formed in the well region. The insulated gate field effect transistor is guided to an n-type high-concentration buried layer embedded near the p-type source diffusion region having a higher concentration than the well region and accumulated therein. The threshold value of the insulated gate field effect transistor is changed according to the amount, and the amount of change in the threshold value is detected as the amount of received light.

According to a thirteenth aspect of the present invention, there is provided a method for detecting an optical signal using a solid-state image sensor, wherein the semiconductor substrate, the well region, and the light source are detected by the solid-state image sensor according to any one of the first to tenth aspects. The high concentration buried layer is p-type, the semiconductor layer, the impurity diffusion region, the drain diffusion region and the source diffusion region are n-type, and the impurity diffusion region, the drain diffusion region, the gate electrode and A voltage higher than an operating voltage is applied to the source diffusion region, holes in the well region and the high-concentration buried layer are transferred to the semiconductor substrate, electrons are transferred to the impurity diffusion region,
The pixel is initialized by being discharged and depleted to the drain diffusion region and the source diffusion region, and holes and electrons are generated in the well region of the light receiving diode by light irradiation, and the impurity diffusion region and Applying an operating voltage to the drain diffusion region, and applying a voltage to the gate electrode so that the potential of the gate region of the insulated gate field effect transistor is lower than the potential of the light receiving diode; Is moved in the well region to accumulate the photo-generated holes in the high-concentration buried layer, an operating voltage is applied to the drain diffusion region and the gate electrode, and the photo-generated holes are accumulated. A low electric field inversion region is formed in the channel length direction on the concentration buried layer, and the channel is formed in the channel region except on the high concentration buried layer. A high electric field region is formed in the length direction of the transistor, and an operating voltage is applied to the drain diffusion region and the gate electrode so that the insulated gate field effect transistor operates in a saturated state. The change in the threshold voltage of the insulated gate field effect transistor due to the formation of the follower and the accumulation of the photogenerated holes in the high concentration buried layer changes the potential of the source diffusion region of the insulated gate field effect transistor. It is characterized by detecting a signal by changing to a change.

According to a fourteenth aspect of the present invention, there is provided a method for detecting an optical signal by using a solid-state imaging device. In the method for detecting an optical signal using a solid-state imaging device according to any one of claims 1 to 10, the semiconductor substrate, the well region and The high concentration buried layer is n-type, the semiconductor layer, the impurity diffusion region, the drain diffusion region and the source diffusion region are p-type, and the impurity diffusion region, the drain diffusion region, the gate electrode and A voltage higher on the negative side than the operating voltage is applied to the source diffusion region, electrons in the well region and the high-concentration buried layer are applied to the semiconductor layer, holes are formed in the impurity diffusion region, the drain diffusion region and the Each pixel is initialized by being discharged to the source diffusion region and depleted, and holes and electrons are generated in the well region of the light receiving diode by light irradiation. Applying an operating voltage to the impurity diffusion region and the drain diffusion region, and applying a voltage to the gate electrode such that the potential of the gate region of the insulated gate field effect transistor is higher than the potential of the light receiving diode. Moving the photo-generated electrons in the well region to accumulate the photo-generated electrons in the high-concentration buried layer, applying an operating voltage to the drain diffusion region and the gate electrode, and accumulating the photo-generated electrons. Forming a low electric field inversion region on the high concentration buried layer, forming a high electric field region in a channel region except on the high concentration buried layer, and forming the insulated gate in the drain diffusion region and the gate electrode. An operating voltage is applied so that the field-effect transistor operates in a saturated state, and the insulated gate field-effect transistor is source-fed. The change in the threshold voltage of the insulated gate field effect transistor due to the formation of the lower photogenerated electrons in the high concentration buried layer is caused by the change in the potential of the source diffusion region of the insulated gate field effect transistor. The characteristic is that the signal is detected by changing to.

In the present invention, a part of the source diffusion region in the channel length direction from the drain diffusion region to the source diffusion region, for example, in the well region below the channel region and near the source diffusion region. A high-concentration buried layer (carrier pocket) having the same conductivity type as the well region and having a higher impurity concentration than the well region is provided on the side and partially or entirely in the width direction of the channel region. Provided.

For example, when a ring-shaped gate electrode is used, a source diffusion region is formed on the surface of the well region at the center of the gate electrode, and a drain diffusion region is formed on the surface of the well region so as to surround the gate electrode. A high concentration buried layer is formed in the well region so as to surround the source diffusion region. In such a configuration, in the case of the p-type high-concentration buried layer in the p-type well region, the potential is lowest for holes at the p-type high-concentration buried layer. Alternatively, in the case of the n-type high-concentration buried layer in the n-type well region, the potential is highest for electrons at the n-type high-concentration buried layer.

Further, the well region is common to the light receiving diode and the field effect transistor, and the impurity diffusion region of the light receiving diode and the drain diffusion region of the field effect transistor are formed integrally. The high-concentration buried layer is provided near the source diffusion region. Since the high-concentration buried layer is arranged near the source diffusion region, it is easy to collect photo-generated charges generated in the well region of the light-receiving diode portion in the high-concentration buried layer.

That is, when a p-type well region is used and the detection transistor is an nMOS, holes in the photo-generated charges are used, and the potential of the source diffusion region is set lower than that of the drain diffusion region. Alternatively, when an n-type well region is used and the detection transistor is a pMOS, the potential of the source diffusion region is set higher than that of the drain diffusion region by using electrons of the photo-generated charges. For example, when a positive or negative operating voltage VDD is applied to the drain diffusion region and a low voltage is applied to the gate electrode, light is emitted from the drain diffusion region of the field effect transistor, that is, from the impurity diffusion region of the light receiving diode to the source diffusion region. An electric field is generated such that the generated charges are directed.

Therefore, after the photo-generated electric charges after reading and the residual electric charges such as holes neutralizing the acceptors and the like in the well region are discharged from the semiconductor substrate by the initialization, the voltage is increased as described above. When applied, the photo-generated charges generated in the well region of the light receiving diode part move toward the high concentration buried layer and are accumulated in the high concentration buried layer. Once the photo-generated charges accumulate in the high-concentration buried layer, they cannot be easily escaped due to the low potential.Therefore, the diffusion of the photo-generated charges in the well region can be prevented. Photo-generated charges can be efficiently accumulated.

The photo-generated charges accumulated in the high-concentration buried layer can be eliminated by applying a voltage higher than the operating voltage to the gate electrode, the drain diffusion region and the source diffusion region to increase the electric field. . When the photo-generated charges are accumulated in the high-concentration buried layer, the Fermi level changes in accordance with the accumulated amount, and the space charge decreases, resulting in a decrease in the threshold voltage of the transistor. At the same time, an inversion region is formed on the high-concentration buried layer according to the law of conservation of charge, and carriers of the opposite conductivity type to the photo-generated charges accumulated in the high-concentration buried layer increase in the inversion region, and the channel conductance increases. Increases.

On the other hand, since regions other than the high-concentration buried layer have a high potential and do not accumulate photo-generated charges, no inversion region is formed on the surface of the well region other than on the high-concentration buried layer, and a high electric field region is generated. become. As described above, the inversion region and the high electric field region are generated in one channel region, so that the transistor operates in a saturated state. Therefore,
When a gate voltage at which the transistor can operate is applied to the gate voltage, the transistor connected as a source follower changes the source potential following the threshold voltage.

Moreover, since the transistor operates in a saturated state, the current is determined only by the potential difference between the gate and the source. For this reason, the change in the source potential is determined only by the amount of accumulated photo-generated charges. Therefore, by outputting this source potential as a video signal, it is possible to perform photoelectric conversion with good linearity.

Further, since the amount of accumulated photo-generated charges and the amount of increase / decrease of the charges in the inversion region are balanced, the accumulated amount of photo-generated charges is equivalent to the amount of charge to the gate insulating film capacitance, and the change in the threshold voltage. The minute is output. Here, since the charging to the gate insulating film capacitance is limited to the gate insulating film capacitance on the high concentration buried layer as a carrier pocket, the detection sensitivity depends on the oxide film thickness, the area and the depth of the high concentration buried layer. Can be determined. In addition, since this detection capacitor can be regarded as almost a fixed capacitor, highly sensitive detection with extremely excellent linearity of the transfer characteristic of the charge-voltage conversion becomes possible.

Further, when the surface of the transistor is depleted, a barrier exists for holes. At this time, in the photogate electrode structure used in other methods, since the surface is filled with photo-generated charges, the surface is equilibrated, and dark current generation due to thermal excitation and potential modulation due to parasitic hole accumulation are problems. Becomes

On the other hand, in the present invention, the depletion state of the channel region of the transistor is maintained after the residual charge is swept (initialized). In addition, since the transistor region is shielded from light, an excessive carrier layer is not formed. Therefore, even if the carriers trapped on the surface do not cross the barrier and become dark current, noise components can be suppressed from the surface.

As described above, the photo-generated charges whose current is to be controlled are injected into the well region under the isolated channel region which does not interact with any semiconductor layer surface portion, thereby changing the potential barrier near the source diffusion region. ing. In other words, by forming a structure in which the threshold voltage of the transistor is controlled by collecting the photo-generated charges near the source diffusion region, it has no noise component, has good linearity, and is ideal for high-sensitivity detection. A threshold voltage modulation type CMOS image sensor element can be provided.

[0036]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view showing an element layout in a unit pixel of a CMOS image sensor according to an embodiment of the present invention. As shown in FIG. 1, a light receiving diode 111 and an optical signal detecting MOS transistor 112 are provided adjacent to each other in a unit pixel 101. These share one well region 15. That is, the well region 1 of the light receiving diode 111
Reference numeral 5 denotes a region where charges are generated by light irradiation, and the well region 15 of the MOS transistor 112 for detecting an optical signal forms a gate region.

The impurity diffusion region 1 of the light receiving diode 111
7 and the drain diffusion region 17a of the optical signal detection MOS transistor 112 are integrally formed on the surface layer of the well region 15. The drain diffusion region 17 a is formed so as to surround the outer periphery of the ring-shaped gate electrode 19, and the source diffusion region 16 is formed at the center of the ring-shaped gate electrode 19. In the well region 15 below the gate electrode 19 and around the source diffusion region 16, a carrier pocket (high concentration buried layer) 25 is formed so as to surround the source diffusion region 16.

It should be noted that the optical signal detecting MOS transistor 1
An n-type impurity layer (an opposite conductivity type impurity) doped with an n-type impurity is formed in the channel region so that the channel region on the surface of the well region 15 under the gate electrode 19 maintains the inversion state or the depletion state during the operation of the gate electrode 12. Layer) is formed. The drain diffusion region 17a has a drain voltage (VDD)
The gate electrode 19 is connected to a vertical scanning signal (VSCAN) supply line 21, and the source diffusion region 16 is connected to a vertical output line 20.

The light receiving window 24 of the light receiving diode 111
The other area is shielded from light by the metal layer (light shielding film) 23. Next, a device structure of the CMOS image sensor according to the embodiment of the present invention will be described with reference to a cross-sectional view. FIG.
1 is a cross-sectional view showing a device structure of the CMOS image sensor according to the embodiment of the present invention, which corresponds to a cross-sectional view taken along line AA of FIG. The lower diagram of FIG. 2 is a potential diagram along the surface of the semiconductor substrate.

The upper part of FIG. 3 is a sectional view showing in detail the vicinity of the carrier pocket 25 in the well region 15 below the channel region. 3 is a potential diagram along the plane parallel to the surface of the semiconductor substrate including the carrier pocket 25, that is, the line FF in the figure, when the photogenerating holes are accumulated in the carrier pocket 25. It is. However, the distribution of electrons in the inversion region of the channel region on the carrier pocket 25 is shown in the same figure.

FIG. 4 is a sectional view taken along line BB of FIG.
FIG. 2 is a sectional view taken along line CC of FIG. 1. As shown in the upper part of FIG. 2, n-type silicon is epitaxially grown on a substrate 11 made of p-type silicon, and an epitaxial layer (n-type layer) is formed.
12 is formed. The above constitutes the semiconductor substrate. This n
A p-type well region 15 is formed in the mold layer 12. Note that a field insulating film 14 and an element isolation diffusion region 13 thereunder are formed so as to separate each unit pixel between adjacent unit pixels.

Next, details of the light receiving diode 111 will be described with reference to FIGS. That is, the well region 15
And an impurity diffusion region 17 formed in the surface layer of the n-type layer 12 such that most of the region extends over the well region 15. That is, it has a buried structure for holes. The impurity diffusion region 17 has a drain voltage (V
DD) Connected to the supply line 22 and biased to a positive potential. As a result, holes generated by the incident light are present in the well region 15 below the impurity diffusion region 17, so that noise can be reduced without being affected by the surface of the semiconductor layer having many interface trap levels. it can.

Next, details of the optical signal detecting MOS transistor (nMOS) 112 will be described with reference to FIGS. That is, it has a structure in which the ring-shaped gate electrode 19 is surrounded by the n ⁺ -type drain diffusion region 17a formed integrally with the n ⁺ -type impurity diffusion region 17. An n ⁺ type source diffusion region 16 is formed at the center of the ring-shaped gate electrode 19. Then, the drain diffusion region 1
A gate electrode 19 is formed on the well region 15 between the source region 7a and the source diffusion region 16 with a gate insulating film 18 interposed therebetween. The surface layer of the well region 15 below the gate electrode 19 becomes a channel region.

The well region 15 below the channel region
Inside, a p ⁺ -type carrier pocket 25 is formed so as to surround a part of the region in the channel length direction, that is, the periphery of the source diffusion region 16 and surround the source diffusion region 16.
The p ⁺ type carrier pocket 25 can be formed by, for example, an ion implantation method. Carrier pocket 2
5 is formed in a well region 15 below a channel region formed on the surface. It is desirable that the carrier pocket 25 be formed so as not to cover the channel region. Further, in order to keep the channel region in an inversion state or a depletion state at a normal operating voltage, an appropriate concentration of n-type impurity is introduced into the channel region to form the n-type impurity layer 15.
It is necessary to form a.

Since the potential of the p ⁺ -type carrier pocket 25 among the photo-generated charges with respect to the photo-generated hole becomes low, when a high voltage is applied to the drain diffusion region 17a, the photo-generated hole becomes the carrier pocket 25.
Gather in The figure shows a state in which light generation holes are accumulated in the carrier pocket 25. The lower diagram of FIG. 2 shows a potential diagram in a state where light generation holes are accumulated in the carrier pocket 25 and electrons are induced in the channel region to generate an inversion region. FIG. 3 shows details of a cross section of the element structure near the carrier pocket 25 in the well region 15 below the channel region and a potential diagram.

Next, with reference to FIGS. 6A and 6B, the overall configuration of a CMOS image sensor using the unit pixels having the above structure will be described. FIG. 6A shows a circuit configuration diagram of the CMOS image sensor according to the embodiment of the present invention. As shown in FIG. 6A, this CMOS image sensor employs a two-dimensional array sensor configuration.
The unit pixels having the above structure are arranged in a matrix in the column direction and the row direction.

A drive scanning circuit 102 for the vertical scanning signal (VSCAN) and a drive scanning circuit 103 for the drain voltage (VDD) are arranged on the left and right sides of the pixel region. MOs in all unit pixels 101 arranged in the row direction for each row
The drain voltage (V
DD), the drain voltage supply lines 22a and 22b, one for each row, are connected from the drive scanning circuit 103. Further, the gates of the MOS transistors 112 in all the unit pixels 101 arranged in the row direction for each row are connected to the vertical scanning signal supply lines 21a, one for each row, from the drive scanning circuit 102 for the vertical scanning signal (VSCAN). , 21b
Are connected respectively.

The sources of the MOS transistors 112 in all the unit pixels 101 arranged in the column direction for each column are connected to different vertical output lines 20a and 20b for each column. Each of the vertical output lines 20a and 20b is connected one by one to drains (photodetection signal input terminals) 28a and 29a of MOS transistors 105a and 105b as switches different for each column. Gates (horizontal scanning signal input terminals) 28b and 29b of the switches 105a and 105b are connected to a driving scanning circuit 104 for horizontal scanning signals (HSCAN).

The sources (light detection signal output terminals) 28c and 29c of the switches 105a and 105b are connected to a video signal output 107 through a common constant current source 106. That is, the source of the MOS transistor 112 in each unit pixel 101 is connected to the constant current source 106, forming a source follower circuit for each pixel. Therefore, the potential difference between the gate and the source and the potential difference between the bulk and the source of each MOS transistor 112 are determined by the connected constant current source (load circuit) 106.

The vertical scanning signal (VSCAN) and the horizontal scanning signal (HSCAN) are used to sequentially turn on the MOS of each unit pixel.
By driving the transistor 112, a video signal (Vout) proportional to the amount of incident light is read out. As described above, since the unit pixel 101 includes the light receiving diode 111 and the MOS transistor 112, the pixel portion can be formed by using the CMOS technology. Therefore, the pixel portion, the drive scanning circuits 102 to 104 and the constant current source 106
All peripheral circuits can be formed on the same semiconductor substrate.

FIG. 6B is a timing chart of each input / output signal for operating the CMOS image sensor according to the present invention. This is applied when the p-type well region 15 is used and the optical signal detection transistor 112 is an nMOS. The element operation is repeatedly performed in the order of a sweeping period (initialization), an accumulation period, a reading period, a sweeping period (initialization), and so on.

At this time, how the potential in the well region 15 of the unit pixel 101 changes with the operation of the solid-state imaging device will be described simultaneously with reference to the potential diagrams of FIGS. 7, 8, and 9. . Further, the current-voltage characteristics of the optical signal detection MOS transistor 112 in the unit pixel 101 will be described simultaneously with reference to the graph shown in FIG.

7 to 9, the vertical axis represents potential, and the horizontal axis represents depth from the substrate surface. FIGS. 7 (a), 8 (a), and 9 (a) show D-D of FIG. 4 during the sweeping period (initialization), the accumulation period, and the reading period, respectively.
5 shows a potential distribution in a cross section along line D. Further, FIG.
(B), FIG. 8 (b), and FIG. 9 (b) show the EE of FIG. 5 in the sweeping period (initialization), the accumulation period, and the reading period, respectively.
This represents the potential distribution in the line section.

First, during the sweep period, the photo-generated charges (holes)
Before accumulating light, the photo-generated charges that have been read out, the acceptors and donors are neutralized, or the residual charges before reading the optical signal, such as holes and electrons trapped in the surface states, are stored in the semiconductor. It is a period to discharge from. In other words, this operation is called a substrate discharging operation (initialization operation) of the photo-generated charges,
It is done line by line.

The reason why the initialization operation is performed is to empty the carrier pocket 25 and store new photo-generated charges in the next storage period. That is, it is for taking out only the accumulated photo-generated electric charges as a video signal and preventing noise due to residual electric charges. In this case, a voltage higher than a normal operation voltage is applied to the drain diffusion region 17a, the gate electrode 19, and the source diffusion region 16. That is, the VDD supply line 22
A voltage of about +5 V is supplied to the drain electrodes 17 a and 22 b and applied to the drain diffusion region 17 a, and a voltage of about +5 V is supplied to the VSCAN supply lines 21 a and 21 b and applied to the gate electrode 19.
When a voltage of about +5 V is applied to the gate electrode 19, the channel region becomes conductive, so that a voltage of about +5 V applied to the drain diffusion region 17 a is directly applied to the source diffusion region 16.

This voltage application reversely biases the pn junction as shown in FIGS. 7A and 7B, and the electric field in the well region 15 is directed toward the p ⁺ type substrate 11 through the N region and the P region. Face it. Thereby, the well region 15 and other holes remaining in the semiconductor are discharged to the p ⁺ -type substrate 11, and the electrons are transferred to the source diffusion region 16 and the drain diffusion region 1.
It is discharged from 7. In particular, when the photo-generated charges are accumulated in the carrier pocket 25, the photo-generated charges cannot be discharged from the carrier pocket 25 at a gate voltage and a drain voltage at which the transistor can operate in a saturated state, but are higher than about 5V. By applying a gate voltage and a drain voltage, photo-generated charges can be discharged from the carrier pocket 25.

After the residual charges are discharged, the well region 1
5 is in a depleted state. Initialization as described above,
Since no residual charge is generated, thermal noise (kTC noise) due to thermal fluctuation of the carrier does not occur, which is ideal.
In this initialization operation, since there is no current path, the booster circuit mounted on the chip can be used easily.

Next, the accumulation period is a period in which photo-generated charges are generated by light irradiation and the photo-generated charges are stored in the carrier pocket 25 in the well region 15 below the channel region. In this accumulation period, an electronic shutter operation in units of horizontal scanning time is also possible. In this case, before the light irradiation, through the VDD supply lines 22a and 22b, the drain transistors 17 of the MOS transistors 112 in all of the unit pixels 101 are approximately +2 at which the MOS transistors can operate.
A voltage of about 3 V is applied, and a low voltage is applied to the gate of the MOS transistor 112 for each column through the VSCAN supply lines 21a and 21b so that the MOS transistor maintains a cutoff state. Thus, the accumulation of the photo-generated charges is performed for each sensor row arranged on each horizontal scanning signal line.

By applying a voltage to the drain diffusion region 17a, majority carriers (holes) in the p-type well region 15 are swept out to the p ⁺ -type substrate 11 side.
5 is depleted, and a negative space charge layer composed of an acceptor exists. When the pixel region is irradiated with light in this state, electron-hole pairs are generated in the well region 15 of the light receiving diode 111.

Here, since the gate voltage of the MOS transistor 112 is set low, of the photo-generated charges,
The photo-generated electrons are supplied to the drain diffusion region 17 by the drain voltage.
Is discharged from On the other hand, the light-generating holes are attracted to the low potential of the source diffusion region 16 and move toward the source diffusion region 16, and the carrier pocket 25 having the lowest potential is formed.
Is accumulated in This state is shown in FIGS. 8 (a) and 8 (b).

Since the movement of the light-generating hole during the accumulation period is performed only in the p-type well region 15, the movement of the light-generating hole is not affected by the semiconductor surface, and no noise component is generated. By the way, when the surface of the transistor is depleted, a barrier exists for holes.

In a photogate electrode structure used in another method, as shown in FIG. 11C, the surface is filled with photo-generated charges, so that the surface is equilibrated and dark current due to thermal excitation is generated. Potential modulation due to generation and accumulation of parasitic holes poses a problem. On the other hand, in this embodiment, the channel region of the transistor is kept in a depleted state after initialization, as shown in FIG. Moreover,
As shown in FIG. 11B, since the gate of the transistor and its periphery are shielded from light, an excessive carrier layer is not formed. Therefore, even if the carriers trapped on the surface do not cross the barrier and become a dark current, the noise component from the surface can be suppressed.

The readout period is a period for reading out a video signal (Vout) based on the accumulated photo-generated charges. The optical signal detecting MOS transistor 112 is operated as a source follower circuit to output a video signal (Vout). In this case, the VDD supply lines 22a and 22b provide an MO for each row so that the MOS transistor 112 operates in a saturated state.
A voltage of about +2 to 3 V is applied to the drain of the S transistor 112, and the VSCAN supply line 21a,
By 21b, a voltage of about +2 to 3 V is applied to the gate of the MOS transistor 112 for each column. Furthermore, the constant current source 106 is connected to the source of the optical signal detection MOS transistor 112 so that a constant current flows.

By the way, the photo-generated charges are accumulated in the carrier pocket 25 in the accumulation period immediately before the readout period. When the photo-generated charges are accumulated in the carrier pocket 25, the Fermi level changes in accordance with the accumulated amount, and the space charge decreases, resulting in a decrease in the threshold voltage of the transistor. At the same time, an inversion region is formed on the carrier pocket 25 according to the law of conservation of charge, and the same amount of electrons as the amount of photogenerated holes accumulated in the carrier pocket 25 increases in the inversion region, thereby increasing the channel conductance.

In this case, the surface potential on the carrier pocket 25 has a substantially constant value in the gate length direction, and electrons as carriers are distributed at a uniform density in the inversion region. On the other hand, since the space charge density is low on the drain diffusion region 17a side, no inversion region is generated on the surface, and a high electric field region is generated. As described above, since the inversion region is generated in a part of the channel region and the high electric field region is generated in the other part, the MOS transistor 112 for detecting an optical signal can operate in a saturated state as shown in FIG. Becomes

Accordingly, when a normal operating voltage is applied to each electrode of the MOS transistor 112 for detecting an optical signal, the transistor 112 operates in a saturated state. At this time, since the transistor 112 forms a source follower circuit by a constant current operation, the transistor 11
As shown in FIGS. 9A and 9B, in order to reduce the potential difference between the gate and the source so that a constant current flows in
The source potential increases. The change in the source potential is output to the video signal output 107.

The above read operation may be understood as follows. That is, as shown in FIG.
Since the OS transistor 112 operates in the saturation region, the potential difference between the drain and the source is determined by the potential below the gate electrode 19, and an electric field in the direction of the source diffusion region 16 exists in the p-type well region 15 due to the potential difference. .

Therefore, the light generation hole is located in the source diffusion region 1
The Fermi potential near 6 changes in the positive direction, but since the current value is determined by the constant current source 106, the potential barrier height on the source side is preserved. Therefore, as shown in FIGS. 9A and 9B, the source potential (V
In S), a change in the potential difference of the space charge layer neutralized by the injection of the photogenerating holes appears. That is, it is possible to change the source potential follower output by changing the bulk potential according to the amount of light generation holes.

As a result, a video signal (Vout) proportional to the amount of light irradiation can be obtained. In this case, since the increase and decrease of the charge in the light generation hole and the inversion region are balanced, the amount of charge due to the light generation hole is equivalent to the amount of charge to the capacitance of the gate insulating film 18, and the change in the threshold voltage is output. You. Here, as shown in FIGS. 12A and 12B, charging to the capacity of the gate insulating film 18 is limited to the capacity of the gate insulating film 18 on the carrier pocket 25. The detection sensitivity can be determined by the area and the depth of 25. In addition, since light generation holes are accumulated in a limited area such as the carrier pocket 25, the conversion efficiency is good.

Moreover, since this detection capacitor can be regarded as almost a fixed capacitor, high-sensitivity detection with extremely excellent linearity of the transfer characteristic of the charge-voltage conversion becomes possible. Next, FIG.
According to (b), a series of light detection operations of the solid-state imaging device will be briefly described. That is, the charge remaining in the well region and other semiconductor layers due to the initialization operation is discharged.

Next, a low gate voltage is applied to the gate electrode 19 of the transistor, and a voltage (VDD) of about 2-3 V required for the operation of the transistor is applied to the drain diffusion region 17a.
Is applied. At this time, the well region 15 is depleted, and an electric field is generated from the drain diffusion region 17a to the source diffusion region 16. When an electron-hole pair (photo-generated charge) is generated by light irradiation, a photo-generated hole of the photo-generated charge is injected into the gate region and accumulated in the carrier pocket 25 by the electric field. This limits the width of the depletion layer extending from the channel region to the substrate 11 side,
The potential near the source diffusion region 16 is modulated, and the threshold voltage of the MOS transistor 112 fluctuates.

Here, a gate voltage of about 2 to 3 V at which the MOS transistor 112 can operate in a saturated state is applied to the gate electrode 19, and a voltage VDD of about 2 to 3 V at which the MOS transistor 112 can operate at the drain diffusion region 17a. Is applied. Thus, a low electric field inversion region is formed in a part of the channel region, and a high electric field region is formed in the remaining part.

Further, the constant current source 106 is connected to the source diffusion region 16 of the MOS transistor 112 so that a constant current flows. As a result, the MOS transistor 112 forms a source follower circuit, so that the source potential changes following the change in the threshold voltage of the MOS transistor due to the light-generating hole, resulting in a change in the output voltage. As a result, a video signal (Vout) proportional to the light irradiation amount can be obtained.

As described above, according to the embodiment of the present invention, when the light generating holes move in a series of processes of the sweeping operation (initialization), the storage operation, and the reading operation, An ideal photoelectric conversion mechanism that does not interact with a noise source in the region can be realized. Further, since the carrier pocket 25 is provided in a partial region below the channel region, a part of the channel region can be an inversion region and the remaining portion can be a high electric field region. This allows the transistor to operate in a saturated state as shown in FIG. In addition, since the source follower circuit is formed, a change in the threshold voltage due to the photo-generated charges can be detected as a change in the source potential. Therefore, photoelectric conversion with good linearity can be performed.

The conventional BCM shown in FIG.
In the case of a D-type solid-state imaging device, the current-voltage characteristics are triode characteristics, and it is difficult to operate in a saturated state. Therefore, it can be said that it is difficult to perform photoelectric conversion with good linearity. further,
Since the light receiving diode 111 and the optical signal detecting MOS transistor 112 are separately provided, it is possible to prevent deterioration of spectral sensitivity characteristics due to multiple interference such as light irradiation on a photogate electrode.

The element configuration is such that the light receiving diode 111
And the MOS transistor 112 for light signal detection can be achieved by a simple combination, so that the aperture ratio can be improved. Furthermore, the fixed pattern noise can be suppressed by utilizing the characteristic that the gate voltage is changed and the gain and source capacitance of the source follower can be adjusted. In the above embodiment, p
A p ⁺ -type carrier pocket 25 is provided in the p-type well region 15 to accumulate holes, and an optical signal is detected by an nMOS transistor (optical signal detection MOS transistor) 112. The n-type well region is used. An n ⁺ -type carrier pocket may be provided to accumulate electrons and an optical signal may be detected by a pMOS transistor (optical signal detection MOS transistor).

In FIG. 6A showing the entire configuration of the solid-state imaging device, in the sweeping period, about +
The channel region is made conductive by applying a voltage of 5 V, and the voltage of about +5 V applied to the drain diffusion region 17 a is applied to the source diffusion region 16 as it is. However, a power source that supplies a voltage of about +5 V to the source diffusion region 16 only during the sweeping period via the switching means may be separately connected to the source diffusion region 16.

Further, in FIG. 6A showing the overall configuration of the solid-state imaging device, a constant current source is used as a load circuit, but a capacitive load may be used. In this case, when the source potential of the optical signal detection transistor 112 changes due to accumulation of the photo-generated charges, the capacitor is charged by the change, so that the charging voltage can be extracted as a video signal. In addition to the constant current source and the capacitive load, other load circuits having a high impedance and forming a source follower can be used.

[0079]

As described above, the solid-state imaging device of the threshold voltage modulation type according to the present invention includes the light receiving diode sharing the well region and the insulated gate type field effect transistor, and is provided below the channel region of the transistor. A high concentration buried layer (carrier pocket) is provided near the source diffusion region in the well region.

For this reason, the photo-generated charges generated in the light receiving diode portion can be moved inside the semiconductor and accumulated in the high concentration buried layer, and the threshold voltage of the transistor can be changed. Therefore, thermal noise (kTC noise), semiconductor surface capture noise, and the like can be suppressed until the residual charge is swept (initialized), photoelectrically converted, accumulated, and converted into a voltage. This allows
A low-noise solid-state imaging device can be provided, and the performance of a MOS image sensor can be improved over that of a CCD image sensor.

Further, since the high-concentration buried layer is provided in a partial region below the channel region, a part of the channel region can be an inversion region and the remaining portion can be a high electric field region.
Thus, the transistor can be operated in a saturated state. In addition, since a source follower circuit is formed by connecting a high impedance load circuit typified by constant current driving, a change in threshold voltage due to photo-generated charges can be detected as a change in source potential. For this reason,
Photoelectric conversion with good linearity can be performed.

Further, since the element configuration can be realized by a simple combination of the light receiving diode and the MOS transistor for detecting an optical signal, the aperture ratio can be improved. Further, the fixed pattern noise can be suppressed by utilizing the characteristic that the gate voltage is changed and the gain and the source capacitance of the source follower can be adjusted. Further, since the light receiving section can be manufactured by the existing CMOS process technology, the peripheral circuit can be formed on the same substrate at extremely low cost.

[Brief description of the drawings]

FIG. 1 is a plan view showing an element layout in a unit pixel of a solid-state imaging device according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view taken along line AA of FIG. 1, showing a structure of a device in a unit pixel of the solid-state imaging device according to the embodiment of the present invention;

FIG. 3 is a cross-sectional view illustrating details of a carrier pocket in a unit pixel of the solid-state imaging device according to the embodiment of the present invention and a peripheral portion thereof;

FIG. 4 is a cross-sectional view taken along the line BB of FIG. 1, illustrating a structure of a light receiving diode in a unit pixel of the solid-state imaging device according to the embodiment of the present invention;

FIG. 5 is a cross-sectional view taken along the line CC of FIG. 1, illustrating a structure of a MOS transistor for detecting an optical signal in a unit pixel of the solid-state imaging device according to the embodiment of the present invention;

FIG. 6A is a diagram illustrating an overall circuit configuration of a solid-state imaging device according to an embodiment of the present invention. FIG. 6 (b)
7 is a timing chart when the solid-state imaging device of FIG. 6A is operated.

FIG. 7A is a diagram illustrating a state in which a solid-state imaging device according to an embodiment of the present invention has a sweeping period during operation;
FIG. 4 is a diagram showing a potential distribution in a cross section taken along line DD of FIG.
FIG. 7B is a diagram illustrating a state where there is a sweep period during the operation of the solid-state imaging device according to the embodiment of the present invention.
It is a figure showing the potential distribution in the line section.

FIG. 8A is a diagram illustrating a state in which there is an accumulation period during operation of the solid-state imaging device according to the embodiment of the present invention;
FIG. 4 is a diagram showing a potential distribution in a cross section taken along line DD of FIG.
FIG. 8B is a diagram illustrating a state where there is an accumulation period during operation of the solid-state imaging device according to the embodiment of the present invention.
It is a figure showing the potential distribution in the line section.

FIG. 9A is a diagram illustrating a state in which there is a readout period during operation of the solid-state imaging device according to the embodiment of the present invention;
FIG. 4 is a diagram showing a potential distribution in a cross section taken along line DD of FIG.
FIG. 9B is a diagram illustrating a state where there is a readout period during operation of the solid-state imaging device according to the embodiment of the present invention.
It is a figure showing the potential distribution in the line section.

FIG. 10 is a graph showing a current-voltage characteristic of an optical signal detecting MOS transistor in a unit pixel of the solid-state imaging device according to the embodiment of the present invention.

FIG. 11A is a diagram showing a state of a channel layer surface after charge reset of the solid-state imaging device;
FIG. 11B is a diagram showing a state of a channel layer surface of the solid-state imaging device according to the embodiment of the present invention, and FIG.
FIG. 11 is a diagram illustrating a state of a channel layer surface of a solid-state imaging device having a photogate structure according to a conventional example.

FIG. 12A is a diagram illustrating a charge distribution state from an accumulation period to a readout period during operation of the solid-state imaging device according to the embodiment of the present invention; FIG. 12B is a cross-sectional view of the carrier pocket and the vicinity thereof for explaining FIG. 12A.

FIG. 13A is a cross-sectional view showing a structure of a solid-state imaging device having a BCMD structure according to a conventional example. FIG.
FIG. 3B is a graph showing a current-voltage characteristic of a solid-state imaging device having a BCMD structure according to a conventional example.

[Explanation of symbols]

15 well region, 15a n-type impurity layer (opposite conductivity type impurity layer), 16, 16a source diffusion region, 17 impurity diffusion region, 17a drain diffusion region, 19 gate electrode, 20, 20a, 20b vertical output line, 21, 21a, 21b vertical scan signal (VSCAN) supply line, 22, 22a, 22b drain voltage (VDD) supply line, 25 carrier pocket (high concentration buried layer), 26 horizontal output line, 27a, 27b horizontal scan signal (HSCAN) Supply line, 28a, 29a light detection signal input terminal, 28b, 29b horizontal scan signal input terminal, 28c, 29c light detection signal output terminal, 101 unit pixel, 102 vertical scan signal (VSCAN) drive scan circuit, 103 drain voltage (VDD) ) Driving scanning circuit; 104 horizontal scanning signal (HSCAN) driving scanning circuit; 05a, 105b switch, 106 a constant current source (load circuit), 111 photodiode, 112, 112a optical signal detection MOS transistor.

Claims (14)

(57) [Claims] 1. A solid-state imaging device in which a plurality of unit pixels each including a light-receiving diode and an insulated gate field-effect transistor for detecting an optical signal are arranged, wherein the light-receiving diode is an opposite conductive type on a semiconductor substrate of one conductivity type. A well region of one conductivity type formed in a semiconductor layer of a negative conductivity type, and an impurity diffusion region of an opposite conductivity type formed in a surface layer of the well region. A drain diffusion region of the opposite conductivity type formed integrally with the impurity diffusion region on the surface layer; a source diffusion region of the opposite conductivity type formed at a distance from the drain diffusion region on the surface layer of the well region; A gate electrode formed on a well region between the drain diffusion region and the source diffusion region via a gate insulating film, and a well region below the gate electrode; A channel region having an impurity layer of the opposite conductivity type in which the current carrier of the layer is moved, and one conductivity type having a higher impurity concentration than the well region in the vicinity of the source diffusion region in the well region below the channel region. A solid-state imaging device having a high concentration buried layer. 2. The solid-state imaging device according to claim 1, wherein the high-concentration buried layer is formed over an entire region in a channel width direction. 3. The vicinity of the source diffusion region is a partial region in a channel length direction from the drain diffusion region to the source diffusion region, and is near the source diffusion region. Or the solid-state imaging device according to 2. 4. The gate electrode has a ring shape, the source diffusion region is formed on the surface of the well region at the center of the gate electrode, and the drain diffusion region surrounds the gate electrode. 4. The semiconductor device according to claim 1, wherein the high-concentration buried layer is formed in a surface layer of the well region, and is formed in the well region so as to surround the source diffusion region. 5. Solid-state imaging device. 5. The solid-state imaging device according to claim 1, wherein a gate electrode of the insulated gate field effect transistor and its periphery are shielded from light. 6. A source follower circuit comprising a load circuit connected to a source diffusion region of the insulated gate field effect transistor.
The solid-state imaging device according to any one of the above. 7. The solid-state imaging device according to claim 6, wherein a source output of the source follower circuit is connected to a video signal output. 8. The solid-state imaging device according to claim 1, wherein the unit pixels are arranged in a row direction and a column direction. 9. A drain voltage supply line for connecting a drain diffusion region of the insulated gate field effect transistor of each of the unit pixels arranged in the row direction and transmitting a drain voltage for each row, A gate electrode of an insulated gate field effect transistor of each unit pixel is connected together, and a vertical scanning signal supply line for transmitting a vertical scanning signal for each row, and an insulated gate field effect transistor of each unit pixel arranged in the column direction Source diffusion regions are connected together,
A plurality of vertical output lines provided for each column, a photodetection signal input terminal to which each of the vertical output lines is connected, a photodetection signal output terminal, and a horizontal scanning signal input terminal; A switch provided for each of the switches, a common horizontal output line to which a light detection signal output terminal of each of the switches is connected, and a horizontal scanning signal for selecting one of the plurality of vertical output lines. A horizontal scanning signal supply line for transmitting to a horizontal scanning signal input terminal, the drain voltage supply line is connected, and a drain voltage drive scanning circuit that selectively supplies a drain voltage for each row, and the vertical scanning signal supply line is connected. A vertical scanning signal driving scanning circuit for selectively supplying a vertical scanning signal for each row; and a horizontal scanning signal driving scanning circuit for connecting the horizontal scanning signal supply line and selectively supplying a horizontal scanning signal for each column. A load circuit connected to the horizontal output line and forming a source follower with one of the insulated gate field effect transistors selected by the drive scanning circuit; connected to a source output of the source follower The solid-state imaging device according to claim 8, further comprising a video signal output. 10. The semiconductor device according to claim 1, wherein the solid-state imaging device is formed on one semiconductor substrate.
The solid-state imaging device according to any one of the above. 11. An n-type source diffusion region of an insulated gate field effect transistor in which, among the electrons and holes generated in a p-type well region by light irradiation, the photo-generated holes are formed in the well region. A p-type high-concentration buried layer having a higher concentration than the well region, which is buried in the vicinity, is guided to accumulate, and the threshold value of the insulated gate field-effect transistor is changed by the amount of the accumulated photogenerated holes. And detecting the amount of change in the threshold value as the amount of received light. 12. The p-type source diffusion region of an insulated gate field effect transistor in which the photo-generated electrons of the electrons and holes generated in the n-type well region by light irradiation are formed in the well region. Embedded in the n-type high-concentration buried layer having a higher concentration than the well region, and accumulates the same; changing the threshold value of the insulated gate field-effect transistor according to the amount of the accumulated photogenerated electrons; An optical signal detection method using a solid-state imaging device, wherein a change amount of a threshold value is detected as an amount of received light. 13. The optical signal detection method using the solid-state imaging device according to claim 1, wherein the semiconductor substrate, the well region, and the high-concentration buried layer are p-type, and the semiconductor layer, The impurity diffusion region, the drain diffusion region and the source diffusion region are n-type, a voltage higher than an operating voltage is applied to the impurity diffusion region, the drain diffusion region, the gate electrode and the source diffusion region, Holes in the well region and the high concentration buried layer to the semiconductor substrate, electrons to the impurity diffusion region,
The pixel is initialized by being discharged to the drain diffusion region and the source diffusion region and depleted, respectively, to initialize the pixels, and to generate holes and electrons in the well region of the light receiving diode by light irradiation. Applying an operating voltage to the drain diffusion region, and applying a voltage to the gate electrode so that the potential of the gate region of the insulated gate field effect transistor is lower than the potential of the light receiving diode; Is moved in the well region to accumulate the photo-generated holes in the high-concentration buried layer, and an operating voltage is applied to the drain diffusion region and the gate electrode, whereby the photo-generated holes are accumulated. A low electric field inversion region is formed in the channel length direction on the concentration buried layer, and the channel is formed in the channel region except on the high concentration buried layer. A high electric field region is formed in the tunnel length direction, an operating voltage is applied to the drain diffusion region and the gate electrode so that the insulated gate field effect transistor operates in a saturated state, and the source of the insulated gate field effect transistor is turned on. The change in the threshold voltage of the insulated gate field effect transistor due to the formation of the follower and the accumulation of the photogenerated holes in the high concentration buried layer changes the potential of the source diffusion region of the insulated gate field effect transistor. An optical signal detection method using a solid-state imaging device, wherein a signal is detected by changing the change. 14. The optical signal detection method according to claim 1, wherein the semiconductor substrate, the well region, and the high-concentration buried layer are n-type. The impurity diffusion region, the drain diffusion region, and the source diffusion region are p-type, and a voltage higher than the operating voltage is applied to the impurity diffusion region, the drain diffusion region, the gate electrode, and the source diffusion region on the negative side. Then, electrons in the well region and the high-concentration buried layer are discharged to the semiconductor layer, and holes are discharged to the impurity diffusion region, the drain diffusion region, and the source diffusion region to deplete the pixel. And irradiates light to generate holes and electrons in the well region of the light-receiving diode, and an operating voltage is applied to the impurity diffusion region and the drain diffusion region. And applying a voltage to the gate electrode so that the potential of the gate region of the insulated gate field-effect transistor is higher than the potential of the light-receiving diode to move the photogenerated electrons in the well region. Storing the photo-generated electrons in the high-concentration buried layer, applying an operating voltage to the drain diffusion region and the gate electrode, and inverting a low electric field on the high-concentration buried layer in which the photo-generated electrons are stored. Forming an area, and forming a high electric field region in a channel region except on the high concentration buried layer, wherein the insulated gate field effect transistor operates in a saturated state in the drain diffusion region and the gate electrode. A voltage is applied to form the insulated gate field effect transistor in a source follower so that the photogenerated electrons accumulate in the high concentration buried layer. A signal is detected by changing a change in a threshold voltage of the insulated gate field effect transistor due to a change in a potential of a source diffusion region of the insulated gate field effect transistor. Signal detection method.