JP2790014B2 - Mesh member for ultrasonic inhaler and method of manufacturing the same - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mesh member having a large number of fine holes for use in an ultrasonic inhaler and a method for producing the same.

[0002]

2. Description of the Related Art A mesh member having a large number of fine holes is generally used for an ultrasonic inhaler as shown in FIG. The inhaler shown here is a bottle 70 in which a liquid (drug) L is put.
And the lower end 71 and the bottle 7 located in the bottle 70
A pipe (shaft) 74 having a through-hole (water-absorbing hole) 73 for sucking up liquid which is open at an upper end 72 located outside of the pipe 72 in the axial direction.
And an ultrasonic pump (double horn vibrator) 77 to which two annular vibrators 75 and 76 are attached. The mesh member 80 is in contact with the pipe upper end 72 by an elastic member (not shown) such as a coil spring.

In such an inhaler, when a high-frequency voltage generated by an oscillator 78 is applied to vibrators 75 and 76, the ultrasonic vibration of the vibrators 75 and 76 causes the pipe 74 to vibrate up and down. Along with this, the liquid medicine L in the bottle 70 is sucked up from the lower end 71 of the pipe 74 through the water absorption hole 73 and exits from the opening of the upper end 72. Then, the liquid medicine L is sprayed and dispersed by the mesh member 80 abutting on the upper end 72.

In the inhaler of the type in which a chemical solution is atomized by using a mesh member, the chemical solution is collected in fine holes of the mesh member, and pressure is applied to eject the liquid in a mist from the fine holes. As shown in FIG. 5, the fine holes 81 and 82 of the mesh member 80 are known to be formed in a tapered cross section in which the surface A in contact with the double horn vibrator is wide and the atomization surface B is narrow. .

In addition, due to the nature of the inhaler, the diameter of the fine holes of the mesh member must be formed with high accuracy in the order of several microns. At present, Ni (nickel) is mainly formed by electroforming or excimer laser processing. Produces a mesh member.

[0006]

However, since the mesh member is generally in contact with the upper end of the double horn vibrator made of hard metal such as stainless steel, the ultrasonic vibration energy of the double horn vibrator is directly applied to the mesh member. In addition, in particular, when the mesh member is made of a flexible material such as resin, the contact surface side of the mesh member 80 is shaved by the impact of the vibrator in FIG. 12, and the shavings 90 are easily clogged in the fine holes 81 of the mesh member 80. This causes problems such as deterioration of atomization ability. Further, when the mesh member is made of nickel, there is a problem that the mesh member is corroded depending on a chemical solution used.

In order to solve such problems, for example, as shown in FIG. 11, a metal such as Au, Pt, or Ti is plated or sputtered on the entire surface of a mesh member 80 'made of metal or resin. Alternatively, the above metal may be ion-implanted into the entire surface of the resin-made mesh member 80 'to form a coating layer 83 to improve the surface strength and corrosion resistance.

However, the mesh member provided with the coating layer 83 is expensive due to the coating material, and the coating layer with micropores is particularly easily removed by ultrasonic vibration. In addition, when forming the coating layer, pinholes are easily generated, and it is technically very difficult to prevent the pinholes. Further, in addition to clogging of the mesh member itself with shavings, if relatively large dust is present in the chemical solution, the micropores are clogged with the dust, or if the chemical solution is left attached to the micropores, the chemical solution is removed. It may dry crystallize, and the pores may be clogged with these crystals. When the micropores are clogged, it is necessary to sufficiently clean the mesh member, and if clogging occurs frequently, there is also a problem that maintenance becomes complicated. In particular, a mesh member made of a flexible material such as a resin requires a thickness several times as large as a mesh member made of a metal such as Ni in order to secure sufficient rigidity. It becomes easy to clog the micropores.

Accordingly, the present invention has been made in view of the above-mentioned various problems, and the double horn vibrator has good durability against ultrasonic vibrations and corrosion resistance against chemicals and the like, and has a low maintenance frequency. It is an object of the present invention to provide a mesh member for an ultrasonic inhaler, which has a small amount, and a method for manufacturing the same.

[0010]

In order to achieve the above object, a mesh member for an ultrasonic inhaler according to claim 1 is provided.
It is made of ceramics such as alumina (Al ₂ O ₃ ) and zirconia (ZrO ₂ ). The manufacturing method according to claim 2 is a method for manufacturing a ceramic mesh member, wherein a flat plate member made of ceramic is irradiated with an excimer laser while gradually reducing the irradiation diameter, and a large number of tapered or stepped cross sections are formed. It is characterized by forming micropores.

The mesh member according to a fourth aspect of the present invention is characterized in that the fine holes are tapered in cross section or stepped from both sides of the mesh member toward the center of the thickness.

[0012]

In the mesh member according to the first aspect, ceramic is used for the material of the mesh member, and since the ceramic is generally high in hardness, even if it is directly subjected to the ultrasonic vibration impact of a double horn vibrator made of a hard material, Shape breakage such as abrasion of the contact surface of the mesh member is extremely unlikely to occur, and deterioration of atomization ability due to clogging of fine holes due to shavings hardly occurs. In addition, since ceramics are chemically stable, they have high corrosion resistance to various chemical solutions. Therefore, a mesh member having extremely high mechanical and chemical durability can be provided.

Further, clogging of the micropores is more likely to occur as the thickness of the mesh member is thicker, that is, as the micropores are longer. However, since the mesh member is made of ceramic, the rigidity of the ceramic itself is high, so that the ceramic member is hard. The atomization ability equivalent to that of the metal mesh member can be obtained with the same thickness as that of the metal mesh member, and clogging by foreign matters such as dust and crystals hardly occurs. As a result, the frequency of maintenance such as cleaning of the mesh member is greatly reduced.

According to the manufacturing method of the present invention, tapered or stepped fine holes can be formed with high accuracy in a unit of several microns in a flat plate member made of ceramic. Can be easily manufactured. In the mesh member according to the fourth aspect, since the fine holes have a tapered cross section or a stepped shape from both sides of the mesh member toward the center of the thickness, any surface of both surfaces of the mesh member is a contact surface or It can be used as an atomizing surface, and even if foreign matter is clogged in the fine pores, if the mesh member is used upside down, the foreign matter may become tapered or sprayed.
Is blown off from the stepped hole, so that clogging of the mesh member can be easily eliminated, and the maintenance member is almost maintenance-free. In addition, since there is no front and back of the mesh member, assembly of the inhaler and management of the mesh member are simplified.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a mesh member and a manufacturing method according to the present invention will be described based on embodiments. FIG. 1 shows a partially enlarged sectional view of a mesh member 1 according to one embodiment. This mesh member 1 is made of a ceramic such as alumina or zirconia,
The contact surface side of the double horn vibrator is A side, and the atomization surface side is B
Side. Further, the mesh member 1 has a large number of fine holes 2 having a tapered cross section from the contact surface side to the atomization surface side, like the conventional resin or metal materials. Has a conical shape as a whole. As can be seen from FIG.
The shape of the mesh member 1 is not different from the conventional one.

Next, a method for manufacturing such a mesh member 1 will be described. For this purpose, as shown in FIG. 2, a processing mask 5 having circular windows a ₁ ,..., A ₅ having diameters obtained by dividing the tapered diameter of the fine holes into several steps (here, five steps).
0 is used. However, for ease of explanation, here, 1
Although five windows are shown in one mask 50, in practice, five masks in which each window is separately provided are prepared,
The mask is manufactured by sequentially replacing the mask.

Of the windows a ₁ ,..., A ₅ , the window a ₁ is on the contact surface side A of the fine hole, the window a ₅ is on the atomization surface side B, and the windows a ₂ ,
a ₃ and a ₄ correspond to the middle part. First, the ceramic plate-shaped member 40 having a predetermined thickness and size, an excimer laser is irradiated by using the window a ₁ of the first processing mask 50. Laser because it has squeezed the irradiation diameter by window a _1, the hole b ₁ of the same diameter as the window a ₁ is the member 40 is formed.
Laser irradiation is continued until the hole b ₁ becomes a predetermined depth.

[0018] After that, in turn irradiated with excimer laser from the window a _2, to form a deep hole b ₂ than the hole b _1. Similarly, an excimer laser is irradiated using windows a ₃ and a ₄ ,
Open holes b ₃ and b ₄ respectively. Then, a hole b ₅ is irradiated with excimer laser from the window a _5, a hole penetrating the atomizing surface side from the contact surface of the member 40. Accordingly, a small step-<br/> shaped micropores of stepwise diameter are formed in accordance with the hole b ₅ from the hole b _1.

Here, as an example of the dimensions of the processing, the thickness of the flat member 40 is 50 μm, and the diameter of the hole b ₁ is 70 to 90 μm.
m, the diameter of the holes b ₅ is 5 [mu] m. According to such a manufacturing method, a ceramic mesh member having accurate fine holes can be easily provided. In this manufacturing method, the fine holes are divided into five stages, but the number of stages may be larger or smaller than this, and may be appropriately selected.
In addition, various cross-sectional tapered or stepped fine holes can be formed depending on the diameter and the number of windows of the processing mask.

The ceramic mesh member manufactured as described above has high durability against double vibration of the double horn vibrator and high corrosion resistance against chemicals due to the properties of ceramic. In addition, atomization performance equivalent to that of a metal mesh member can be obtained with a thickness equivalent to that of a metal mesh member, so that clogging by foreign matters such as dust and crystals is unlikely to occur, and maintenance does not need to be performed much.

As an example of changing the tapered cross section or the stepped fine hole, a fine hole 3 having a cross sectional shape as shown in FIG. 3 may be used. The micropores 3, only the atomization surface side also tapered section
In other words , the other portions are rectangular in cross section. In the fine holes 3 having this shape, the foreign matter is easily blown off from the atomized surface side by the atomizing action, and clogging by the foreign matter is further less likely to occur. Moreover, even when clogging occurs, the cleaning liquid easily enters the micropores during cleaning, and sufficient cleaning can be easily performed.

Next, micropores tapered such tapered section if each toward the center portion of the thickness from the contact surface side and the atomization surface
FIGS. 4 and 5 show examples of mesh members having a stepped shape. Each of these mesh members 5, 7 may be made of metal or resin, or ceramic, as in the prior art. In the mesh member 5 of FIG. 4, tapered holes 6a and 6b extending from both sides of the member 5 toward the center of the thickness.
, A fine hole is formed, and the cross-sectional taper shape is linear. On the other hand, in the mesh member 7 of FIG. 5, fine holes are formed by the curved tapered holes 8a and 8b.

The operation of such a mesh member will be described with reference to the mesh member 5 of FIG. 4. First, in FIG. 6, the tapered hole 6a is used with the contact surface side, and foreign matter 10 such as dust or crystals is used in the hole 6a. Upon entry, the narrow path between the holes 6a and 6b is closed by the foreign matter 10. However, as shown in FIG. 7, when the front and back of the mesh member 5 are reversed, that is, when the tapered hole 6b is set on the contact surface side, the foreign material 10 clogged in the hole 6a is moved outside the hole 6a by ultrasonic vibration. It is released and clogging is easily eliminated.

The above-described operation and effect are the same for the mesh member 7 shown in FIG. In addition, since there is no front and back of the mesh member, either side may be a contact surface or an atomizing surface, and it is not necessary to check the front and back of the mesh member when assembling the inhaler. Not only is it easy to install the mesh members, but also the management of the mesh members is easy.

[0025]

The mesh member and the manufacturing method of the present invention are as follows.
The configuration described above has the following effects. (1) In the mesh member according to the first aspect, since the mesh member is made of a ceramic such as alumina or zirconia, it is difficult for the double horn vibrator to break down due to the ultrasonic vibration impact of the mesh member or the like, and is clogged with shavings. In addition, the atomization ability hardly deteriorates, and the liquid (chemical solution) used does not corrode the mesh member.
Therefore, a mesh member having extremely high mechanical and chemical durability can be provided.

Further, even when the thickness of the mesh member is set to the same thickness as that of the metal mesh member, it is possible to obtain the same atomization performance as that, and it is possible to further suppress the occurrence of clogging by reducing the thickness. is there. (2) According to the manufacturing method of the second aspect, the fine holes can be formed with high accuracy in units of several microns, and the ceramic mesh member can be easily manufactured. (3) In the mesh member according to the fourth aspect, since the fine holes have a tapered cross section or a stepped shape from both sides of the mesh member toward the center of the thickness, the clogging of the member can be caused even if foreign materials are clogged. If the surface is sprayed in the opposite direction, foreign matter is easily blown off from the tapered or stepped hole, so that clogging can be easily eliminated and maintenance can be facilitated.

Further, since there is no front and back of the mesh member, either surface may be a contact surface or an atomized surface, and the incorporation of the mesh member into the inhaler is simplified, and the management of the mesh member is facilitated.

[Brief description of the drawings]

FIG. 1 is a partially enlarged sectional view of a mesh member according to one embodiment.

FIG. 2 is a view for explaining a method of manufacturing a ceramic mesh member of the present invention having a tapered cross section or a stepwise fine hole.

FIG. 3 is a partially enlarged cross-sectional view of a mesh member showing a modified example of a tapered cross section or a step- like fine hole.

FIG. 4 is a partially enlarged cross-sectional view showing an example of a mesh member having fine holes having tapered or stepped cross sections on both sides.

FIG. 5 is a partially enlarged cross-sectional view showing another example of a mesh member having fine holes with tapered or stepped cross sections on both sides.

6 is a partially enlarged cross-sectional view showing a clogged state in the mesh member shown in FIG.

FIG. 7 is a partially enlarged cross-sectional view for explaining an operation of eliminating clogging in the mesh member shown in FIG.

FIG. 8 is a schematic configuration diagram of a general ultrasonic inhaler.

FIG. 9 is a partially enlarged sectional view of a mesh member according to a conventional example.

FIG. 10 is a partially enlarged sectional view of a mesh member according to another conventional example.

FIG. 11 is a partially enlarged cross-sectional view of a mesh member according to a conventional example in which a coating layer is provided on the entire surface.

FIG. 12 is a partially enlarged sectional view showing a clogged state in the mesh member shown in FIG. 9;

[Explanation of symbols]

 1,5,7 Mesh member 2,3 Micro hole 6a, 6b Micro hole 8a, 8b Micro hole 10 Foreign matter A Contact surface side B Atomization surface side

────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Shigeru Makida 24th Yamanouchi Yamanoshitamachi, Ukyo-ku, Kyoto Omron Life Science Research Institute, Inc. (56) References JP-A-4-34961 (JP, A) Hei 3-15674 (JP, U) Japanese Utility Model Hei 5-88661 (JP, U) Japanese Utility Model Showa 58-43262 (JP, U) (58) Fields investigated (Int. Cl. ⁶ , DB name) B05B 17 / 06 A61M 11/00 B06B 1/02-3/04

Claims (4)

(57) [Claims] 1. A mesh member for an ultrasonic inhaler, comprising: a mesh member having a large number of fine holes used in an ultrasonic inhaler, wherein the mesh member is made of ceramic. 2. An ultrasonic inhaler characterized in that a flat plate member made of ceramic is irradiated with an excimer laser while gradually decreasing the irradiation diameter to form a large number of tapered or step- shaped fine holes in cross section. A method for manufacturing a mesh member. 3. The ceramic according to claim 1, wherein the ceramic is alumina (Al).
_{2. The} mesh member for an ultrasonic inhaler according to claim 1, wherein the mesh member is ₂ O ₃ ) or zirconia (ZrO ₂ ). 4. A mesh member having a large number of fine holes used in an ultrasonic inhaler, wherein the fine holes of the mesh member are tapered in cross section from both sides of the mesh member toward the center of the thickness. Alternatively , a mesh member for an ultrasonic inhaler, wherein the mesh member has a step shape.