JP2766942B2 - Display screen reading method of display element - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection method for a display element such as a liquid crystal display and a plasma display.
More specifically, the screen displayed by the display element is read,
It is concerned with a method for inspecting the quality.

[0002]

2. Description of the Related Art Display elements are arranged in x and y directions orthogonal to each other.
Has a two-dimensional arrangement in which a plurality of pixels are arranged.
For example, in a display element called a well-known VGA, an x-direction
6 40 pixels countercurrent, an array of 480 pixels in the y-direction 640
It is composed of × 480 pixels. Display element with such a configuration
In the inspection, not only the presence or absence of defective pixels, but also the location of defects
Need to be specified in Two-dimensional CCD camera
(Hereinafter referred to as CCD camera)
is there.

A CCD as a light receiving element of this CCD camera
The device also has a plurality of pixels arranged in two directions orthogonal to each other.
It has a two-dimensional array configuration. For example, x direction
Approximately 1300 pixels and about 1000 pixels in the y direction
Using a CCD camera with 1300 x 1000 pixels
ing.

A display element is provided on the light receiving surface of such a CCD camera.
The image of the pixel is formed at the position where the image of the pixel of the display element is formed.
It is necessary to associate the pixels of the light receiving element of the corresponding CCD camera.
The inspection is carried out by

[0005] Hereinafter, unless otherwise specified, a display pixel is a display pixel.
Sensor pixels refer to the pixels of the device.
Refers to the pixels of the CCD element of the camera. Also, the pixels of the display element
Is referred to as a pixel image. In general, the arrangement direction of the display pixels is substantially matched with the arrangement direction of the sensor pixels, that is, the row direction or the column direction of the sensor pixels is substantially matched with the row direction of the display pixels.

In such an inspection method for a display element, the number of sensor pixels overlapping each pixel image is generally sufficiently large, and the detected luminous intensity of the sensor pixel near the peak position of the luminous intensity distribution characteristic of the pixel image is used. Inspect as the luminosity of the display pixel , or check for multiple areas overlapping the pixel image.
Of the display pixel by adding the detected luminosity of the sensor pixel
Inspect as

More specifically, the detection is performed by comparing the detected luminous intensity of the surrounding sensor pixels and searching for a local maximum value in the vicinity thereof. That is, the luminous intensity of the display pixel is detected by peak detection.

For example, 3 × 3 9 pixels in one pixel image
Of sensor pixels and detects the highest luminosity among them
The detected value of the sensor pixel obtained as the peak is
It will be luminous intensity. Also, detection of multiple sensor pixels
When adding luminous intensity, the sensor pixel for which peak was detected is
It will be added as the center.

In order to reduce noise , a measure is taken to invalidate the detected luminous intensity below a certain level even if it is a peak. Accordingly, low defect pixels having intensity level is continuously
In such a case, a non-signal state occurs in which no detection signal is generated over a relatively long section.

[0010]

As described above, the conventional inspection
No signal condition occurs in the presence of a defective pixel in査方expression, absence
If there is a falling pixel, the sensor pixel that detected the peak
It is necessary to determine the address by interpolating the display pixels based on the jump number.
Because there is a need for several consecutive sections with no signal and no signal
Error occurs in the determination whether corresponding to示画element, a pixel position of a defect, there is a problem that the number of defects can not be specific.

To take this prominent example, the first of the display elements
If the display pixels in the row are all defective line defects, and the second row is normal from the next row, the second row is erroneously determined as the first row, and thereafter, the row is shifted by one row and erroneously determined. Situations occur.

Also, when inspecting the correctness of the light-off state ,
If there is a pixel that is turned on due to a defect, the surrounding normal display pixels are all turned off, and
Since the signal state continues, it is impossible to specify the position of a defective pixel, such as to identify the position in measures such as try to lit estimate the pixel position in the vicinity thereof, a complicated position detection There are drawbacks.

[0013] inability particular is a pixel location of these defects, even approach a defect based on the detected defect position repair
It is widely used and is fatal in this case. Furthermore, one display screen is divided into a plurality of areas, each of which is
When the inspection is performed by the sensor camera for each of the regions , the boundary has to be determined based on the number of pixels from the edge of the display screen, and there is a disadvantage that the boundary determination becomes extremely complicated.

As described above, in the conventional inspection method, each display
Since the sensor pixel corresponding to the element is not defined,
The position of the display pixel based on the number detected as
Is the basis, so that the peaks
If the detection is not repeated, the error
There was a point.

An object of the present invention is to solve the conventional such drawbacks, the presence or absence of the defective pixel, irrespective of the size of the defective area, there the position of each pixel to provide a means capable of specific.

[0016]

SUMMARY OF THE INVENTION According to the present invention, there is provided an apparatus for inspecting
The relationship between the display pixel and the sensor pixel corresponding to each display pixel
Is created and held in advance as correspondence information, and
Detects the luminosity of each display pixel based on related information
Configure. That is, the display screen of the display element is referred to as the inspection screen.
Display element inspection method for inspecting the quality
And the positional relationship between the display element and the sensor camera is set to the reference position.
Set the reference display element in a positional relationship corresponding to the reference position
Valid information to the display element of the sensor pixel extracted from the
From the corresponding address information of the display pixel corresponding to the sensor pixel
Of the corresponding sensor pixel based on the corresponding relationship information
The luminosity of the display pixel is extracted from the luminosity,
The related information is separated into valid information and corresponding address information.
This information is stored in different storage locations, and the sensor pixel information
Address storage locations according to output order.

In addition, the reference display element has already been inspected.
Display element can be used, said reference display
The positional relationship between the element and the sensor camera is displayed from the reference position.
The reference display is shifted by an integer multiple of the pixel pitch.
It is possible to extract the correspondence information of the non-lighted display pixels of the element.
It can be so.

[0018]

Since the present invention is configured as described above, it is possible to specify the sensor pixel corresponding to each display pixel of the display element on the display screen based on the correspondence information and detect the luminous intensity. As a method, the defect that the signal from the sensor pixel at the defective pixel position is lost and the position of the defective display pixel cannot be specified is solved, the position of the defective display pixel can be correctly specified, and more than one sensor camera can be used. When used, it is possible to obtain a display element inspection method that makes it easy to determine the boundary of the inspection target area of each sensor camera.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings.
In the embodiment, a liquid crystal display is used as a display element and a two-dimensional CCD camera is used as a sensor unless otherwise specified. In this specification, the intensity of light emitted from a pixel is represented by a term called luminous intensity. The luminous intensity is an arbitrary unit, and the light intensity per unit area emitted by the pixel, the light intensity integrated over the entire area of the pixel, and the light intensity per unit area of the pixel image formed on the light receiving surface of the sensor are also determined. In addition, the light intensity integrated over a certain area of the pixel image expresses all of them as luminous intensity.

FIG. 2 is a basic block configuration diagram of the inspection system according to the present invention. 1 is a display element to be inspected, 2 is
2-dimensional CCD camera of the sensor camera, the moving stage 3, the fourth processing circuit section, by moving the moving stage 3, position relationship between the display element 1 and the two-dimensional CCD camera 2 to the reference position, two-dimensional CCD An image of the display screen is formed on the effective light receiving area of the CCD sensor of the camera 2, and the luminous intensity of the display element is read by the CCD sensor of the two-dimensional CCD camera 2 and processed by the processing circuit unit 4 to detect the luminous intensity of the display element 1. I do. The alignment with the reference position is controlled by reading an alignment mark of the display element 1 with a sensor camera (not shown) for alignment. These alignment controls are well known and a detailed description is omitted.

Before describing the embodiments of the present invention, it will be understood that
The basic concepts of the present invention and the meaning of terms to facilitate
Will be described. The display element has many display pixels
And arranged in both x and y directions orthogonal to each other.
And has a two-dimensional spread. Screen of this display element
The sensor pixel of the two-dimensional CCD camera for inputting
Requires more sensor pixels than display elements,
Normally, the sensor pixel is in both x and y directions compared to the display pixel.
The test is performed twice or more, that is, four times or more 2 × 2.
Therefore, a display element composed of about 310,000 pixels of 640 × 480
At least about 1.2 million sensor pixels to inspect children
A two-dimensional CCD camera is required.

With such a large number of display pixels and sensor pixels,
In the inspection system, sensor pixels corresponding to each display pixel are reserved.
Efficient and accurate inspection by detecting and storing
What you want to do. Here, the cell corresponding to the display pixel is
The sensor pixel is a sensor pixel related to the pixel image, and
A sensor pixel that can best represent the luminosity of a display pixel.
You. For example, the most sensitive detection of the amount of light emitted by the display pixel
And the like.

Further , the luminous intensity of the display pixel is detected as much as possible.
For example, a plurality of, for example, 2 × 2, overlapping the pixel image,
Of the display pixels by adding the detection luminosity of the sensor pixels
If it is a degree, the sensor at the specific position to be added
In some cases, pixels are assigned. Addresses are assigned to display pixels, and
The address is also assigned to the sensor pixel independently, and the address n is displayed.
When a sensor pixel at address k corresponds to a pixel, a pair of nk
The correspondence is called correspondence information, and this correspondence information is stored.
The memory to be stored is referred to as a correspondence information storage memory.

The nk correspondence is stored in a correspondence information storage memo.
The method of storing in the memory depends on the memory configuration and memory number.
The address n and the address k are stored in the storage field of the location and each word.
It depends on how to deal with. less than
The first embodiment to be described stores correspondence information in a single memory.
A storage method is shown, and in the second embodiment, two memories are used.
An example of the configuration will be shown.

FIG. 3 shows a first embodiment of the processing circuit section 4. In FIG. 3, reference numeral 10 denotes an A / D conversion circuit, and reference numeral 20 denotes a signal detected by a sensor pixel.
The luminous intensity of the display pixel as the luminous intensity of the display pixel, that is,
Display element image memory for storing information, 30 is a correspondence information storage memory, 31 is an address counter for generating an address of the correspondence information storage memory, 32 is a read register for storing information read from the correspondence information storage memory, 100 Is a clock signal line, 101 is a valid information signal line, and 102 is a corresponding address information signal line.

The output of the sensor camera 2 is an A / D conversion circuit 1
The signal is converted from an analog signal to a digital signal via 0, and is connected to each other so as to be write data of a display element image memory. The display element image memory 20 has addresses corresponding to the display pixels, and each address has the number of bits sufficient to store the detected light intensity information. The correspondence information storage memory 30 has addresses corresponding to the sensor pixels of the two-dimensional CCD camera 2. That is, there is an address n in the correspondence information storage memory corresponding to the address n of the pixel of the CCD. The addresses n are numbered in ascending order from address 0 in the order output from the two-dimensional CCD camera 2 as sensor pixel information.
The memory for storing the correspondence information is an address counter 3
The connection is made so that the address based on the content of No. 1 can be accessed.

The clock signal line 100 is a signal line for operating each circuit block in synchronization. Each word in the correspondence information storage memory 30 is one bit of an effective information field for storing whether a corresponding CCD pixel corresponds to a display pixel and address information of a corresponding display pixel, that is, a pair.
It comprised in the corresponding address information field of q bits in total (q + 1) bits for storing 応番place information. Fig. 4
This shows the word structure of

Next, the operation will be described. cell of the n address
First set the contents of the address counter 31 to n before the signal from the capacitors pixel is output, storing valid information from the address n correspondence information storage memory 30 in correspondence address information reads the register 32. Note that V shown in the read register 32 in the figure indicates a valid information field.

[0029] When the light intensity signal of the address n pixels C C D is output, the display device image memory checks enabled or disabled through the corresponding information signal line 101, if the information is "1", ie The sensor pixel corresponds to the display pixel.
In this case, the corresponding address information is received via the corresponding address information signal line 102, and the detected luminous intensity information of the CCD output is stored in the corresponding address of the display element image memory. If the corresponding information is "0", the read information from the CCD is ignored because the display pixels do not correspond .

With the above operation as the basic operation, the basic operation is repeated while incrementing the contents of the address counter 31 by +1 to store the inspection data of the sensor pixels in the display element image memory as the luminosity of the display pixels. Word number correspondence information storage memory 30 in this first embodiment is Se
And the memory configuration is N words × (q +
1) Bits of sensor pixels that do not correspond to display pixels
The word also has q bits of corresponding address information. That is, the storage capacity of the memory for storing the correspondence information requires N × (q + 1) bits.

FIG. 1 shows a second embodiment of the processing circuit section 4 shown in FIG. In the second embodiment, the correspondence information stored in the correspondence information storage memory 30 in the first embodiment is separated into valid information and corresponding address information, and each is stored in a different memory. .

[0032] figure 40 is valid information storage memory for storing valid information, 41 corresponding address information storage memory for storing the correspondence address information, 42 is a valid information register stores valid information from the effective information storage memory . 43 is a corresponding address information register which is read from the corresponding address information storage memory.
The corresponding address information is stored. An address counter 44 generates an address of the effective information storage memory, and an address counter 45 generates an address of the corresponding address information storage memory.

The valid information storage memory 40 has addresses corresponding to individual sensor pixels of the two-dimensional CCD camera. That is, there is an address n of the effective information storage memory corresponding to the address n of the sensor pixel, and each word has a 1-bit configuration. The Yes
The address n of the effect information storage memory is from the two-dimensional CCD camera.
The numbers are assigned in ascending order from address 0 according to the output order of the sensor pixels.

The valid information storage memory 40 is connected to the address counter 44 so that an address based on the contents of the address counter 44 can be accessed. The contents of the address counter 44 are incremented by +1 each time the luminous intensity information of the sensor pixel is output from the two-dimensional CCD camera by the clock signal transmitted on the clock signal line 100. Corresponding address information storage memory 41 has a number of words corresponding to the pixels of the display device,
It is connected to the address counter 45 so that an address based on the contents of the address counter 45 can be accessed. The contents of the address counter 45 are incremented by +1 each time the contents of the valid information register 42, that is, the valid information becomes "1".

Next, the operation will be described. First, secondary
The first, ie, address 0, sensor from the original CCD camera
After resetting the contents of the address counter 44 and address counter 45 to zero before the information sub pixel is output, Yes
The read operation of the effective information storage memory 40 and the corresponding address information storage memory 41 is executed, and the contents of the address 0 are set in the read register 42 and the read register 43, respectively.

The above operation is performed by the address counters 44 and 4
5. Initial setting operation of the read registers 42 and 43.
When a signal from the (n + 1) -th sensor pixel at address n is output, the display element image memory becomes available.
In the read register 42 via the validity information signal line 101
The valid information is confirmed. If the information is "1", the corresponding address information in the read register 43 is received via the corresponding address information signal line 102, and the detected luminous intensity information of the sensor pixel output is stored in the display element image memory. When the effective information is “0”, the information read from the sensor pixel is ignored.

Next, the contents of the address counter 44 are incremented by one, and if the valid information in the read register 42 is "1", the contents of the address counter 45 are incremented by one, and then the effective information memory 40 and the corresponding address are read. By performing a read operation of the information storage memory 41 and setting valid information and corresponding address information in the read register 42 and the read register 43, information for preparing for output of luminous intensity information from the next sensor pixel is set. . When the validity information is "0", only the content of the address counter 44 is incremented by +1 and the content of the address counter 45 is stored as it is.

As is apparent from the above description, in this second embodiment are divided into the correspondence between information and effective information and corresponding address information, and stores the separate valid information memory to the corresponding address information storage memory ing. Moreover, the effective information memories are assigned addresses in ascending order according to the output order of the pixel luminous intensity information detected by the CCD. Further, the corresponding address information storage memory is also assigned addresses in ascending order so as to be incremented by +1 each time the valid information becomes "1". Therefore, the
It is simple to determine whether a sensor pixel corresponds to a display pixel and to obtain address information of the pixel of the corresponding display element.
It can be executed by a step operation.

These ascending addresses may be assigned in descending order. In this case, the same effect can be obtained by setting the increment of the address counter to -1. By such systematic addressing , acquisition of effective information and corresponding address information for the sensor pixel information to be output next is automatically facilitated. Here, assuming that the number of sensor pixels is N and the number of display pixels is M, the word configurations of the effective information storage memory and the corresponding address information storage memory are N words × 1 bit and M words × q bit, respectively. Therefore, the storage capacity of the memory for storing the correspondence information is (M · q + N). In general, M <N,
In the second embodiment, the storage capacity can be reduced as compared with the first embodiment.

Next, a method of generating correspondence information will be described. A non-defective display element that has been inspected in advance is placed on a moving stage as a reference display element, and the image on the display screen is a two-dimensional CCD.
It will fit in the effective light receiving area of the camera CCD sensor, and,
The arrangement direction of the sensor pixels and the pixel image is adjusted to be substantially parallel, and the z direction, which is the distance between the display screen and the two-dimensional CCD camera, is adjusted to a predetermined image magnification. The positional relationship between the reference display element and the two-dimensional CCD camera in this state
Is the reference position, which is related to the camera focus.
The x and y directions orthogonal to this, as well as the continuous z direction
Is included.

In the subsequent inspection, the display element as a specimen is set at this reference position and the inspection is performed. Therefore, the alignment mark of the reference display element is read by the alignment sensor camera and the position is stored. Next, the pixels of the reference display element are turned on in a state where the reference display element is set at the reference position,
By detecting the peak of the detected luminous intensity of the sensor pixel ,
The sensor pixel corresponding to the display pixel is specified, and the correspondence information is extracted. For peak detection of two-dimensionally arranged information
The method is well-known, and the description is omitted here.

In the operation of extracting the correspondence information, all the
It is common to turn on the display pixels at once, but all
When the display pixels are lit, light from neighboring display pixels may overlap.
When the luminous intensity distribution is flattened and peak detection is difficult
Is every other pixel in one or both row and column directions, and
Lights up every few pixels and shifts the lighting position
The correspondence information may be extracted and combined.

[0043] With general terms the correspondence information obtained in these operations, a corresponding address A _m of the sensor pixels to addresses A _n of the display pixel. Applying this correspondence information when the stored and held by assigning individual address 1 of the sensor pixels, the word configuration corresponds as shown in FIG. 4
Stores information ( valid information) as to whether or not there is a display pixel
It consists of one bit of a valid information field and a field for storing address information (corresponding address information) of a pixel corresponding to the valid information .

The number q of bits in the address information field is determined by the number of display pixels to be inspected. FIG. 1 shows that the valid information and the corresponding address information are stored in different memories.
This is the second embodiment shown in FIG. When the information is stored in the separate memory, it is necessary to associate the two information with each other. In the second embodiment, the correspondence is assigned at the address of the memory. that's all,
Although the description has been made on the assumption that all the reference display elements are pixels having no defect, the reference display element may include a defective pixel. Hereinafter, extraction of the correspondence information from the reference display element including the defect will be described.

First, the first method will be described. Regardless of the display pixel at any address, a set of display elements in which there is at least one non-defective display element is defined as a set of reference display elements, and a correspondence relationship is established based on the non-defective pixels of each reference display element. By extracting information and integrating them, the correspondence information as a whole is synthesized. That is,
By taking an OR condition under the condition of masking a defective display pixel in each reference display element, the correspondence information as a whole is synthesized.

Next, the second method will be described. In order to extract the correspondence information of defective pixels, the reference display element and
The positional relationship of the two-dimensional CCD camera is shifted by the pitch of one display pixel, and information on the relationship between defective pixels is extracted using the adjacent good display pixels. The extraction method is, of good to substitute
The display pixels are turned on, and the information is extracted in the same manner as in the case of extracting the correspondence information of other non-defective display pixels.

[0047] In general, the display pixel to substitute the good of the adjacent
It is not necessary to limit the display pixel to a certain display pixel. For example, when several pixels are collectively defective , the display pixels are shifted by a pitch corresponding to several pixels, and a nearby good display pixel is brought to the position . Response information can also be extracted. Picture element from the reference position to position relationship between the reference display device as a two-dimensional CCD camera
By shifting by a positive integer multiple of the pitch, the corresponding display information can be extracted by equivalently replacing defective display pixels of the reference display element with non-defective display pixels.

As is clear from the above description, the inspected non-defective display element used as the reference display element does not mean a display element having no defect, but includes a display pixel having a defect whose defect address is clear. display device also acceptable as the reference display element. Further, the first method and the second method described above can be used in combination.

The method of shifting the positional relationship between the reference display element and the two-dimensional CCD camera from the reference position has been described in the concept of extracting the correspondence information of defective display pixels. The corresponding positional relationship between display pixels and sensor pixels is extracted with high resolution. For this purpose, a method of shifting from the reference position can also be applied to a case where the correspondence information is extracted by turning on the light every several pixels and turning off the other pixels to turn off the light. Therefore, the display pixels of the display image <br/> iodine and defects is turned off in this case is a pixel of the same type, the non-lighting display image <br/> referred iodine and call. As is clear from the above description, the inspected non-defective display element used as the reference display element does not mean a display element having no defect, and a display element including a defective pixel whose defect address is clear is also displayed on the reference display element. Allowed as an element.

As described above, the case where the inspected non-defective display element, that is, the display element of the same kind as the display element serving as the specimen is used as the reference display element, but a special reference display element may be used. For example, when the sample is a transmissive liquid crystal display, the reference display element may be a substrate having an aperture for transmitting light corresponding to the pixel position of the liquid crystal display as the reference display element. In this case, it is not always necessary to arrange the apertures at all pixel positions of the sample. There is also a method of extracting the correspondence information while shifting the pixel pitch by a pixel pitch, using a substrate on which an opening is arranged only at a position corresponding to every few pixels in one or both of the rows and columns of the array pixels of the specimen as a reference display element. Can be taken.

Even when a special reference display element is used as described above, or when a non-defective display element that has been inspected is used as a reference display element, it is possible to extract correspondence information in a state corresponding to the actual state of inspection. Correspondence information can be easily extracted in consideration of the distortion of the image on the display screen due to the aberration of the camera lens. Above, two-dimensional CC for sensor camera
Although the present invention has been described in detail by taking a case where a D camera is used as an example, the present invention can be widely applied to a sensor camera using a general two-dimensional sensor. Furthermore, even when a one-dimensional sensor camera using a one-dimensional sensor is applied and the inspection is performed line by line while shifting the position of the sample and the camera, the same configuration is set by setting the reference position in the inspection of each line. Can be taken.

Further, even when a plurality of sensor cameras are installed and a single display screen is divided and inspected, the same can be applied by setting the correspondence information for each sensor camera.
There are more excellent effects such as the clarification of the sharing boundary. In addition, the present invention can be widely applied to display elements such as a liquid crystal display and a plasma display as a specimen.

[0053]

According to the present invention, the positional relationship between the display element and the sensor camera is set to a reference position, and the corresponding sensor pixel is extracted based on the positional relationship information extracted from the positional relationship corresponding to the reference position. The inspection method of the display element for extracting the luminous intensity of the display pixel based on the detected luminous intensity of the display pixel is such that the correspondence between the display pixel and the sensor pixel corresponding to the display pixel is determined in advance regardless of the state of the defect on the display screen. Since it is clear, the address of the defective pixel can be specified, and the position of the defect and the number of the defects can be clarified. Furthermore, when the display screen is divided and shared by a plurality of sensor cameras for inspection, the shared area of each sensor camera can be clarified, and there is an effect that boundary determination becomes easy.

According to the present invention, the correspondence information is separated into valid information and corresponding address information, each information is stored in a different storage location, and the storage location is determined according to the output order of the sensor pixel information. since as it puts the address in accordance with the output order from the sensor camera sensor <br/> Sa pixel information
The address of the effective information memory may be incremented by +1, and the address of the corresponding address information memory may be incremented by +1 each time the corresponding information from the corresponding information memory becomes "1". This is advantageous in that the storage capacity of the memory for storing the correspondence information can be reduced easily.

[0055] The present invention constructed as in Claim 3, since it is configured to use the tested display element based display device for using the elements of the display elements of the same type <br/> inspected, the inspection situation It is possible to extract the corresponding relationship information in an appropriate manner, and since there is no need for a special reference display element, there is an effect that the cost is excellent. Further, according to the present invention, the positional relationship between the reference display element and the sensor camera is shifted from the reference position by a positive integer multiple of the pixel pitch to extract the correspondence information of the non-lit display pixels of the reference display element. since the way for an acceptable defect criteria display device, the effect of selection of the reference display element is facilitated. Further rows, row display pixels arranged in columns, and a lighting state every several pixels in one or both directions of the column, the other display pixel unlit, it is possible to extract a correspondence relationship information, the position of the display pixel The effect that the resolution can be improved can be expected .

[Brief description of the drawings]

FIG. 1 is an explanatory diagram illustrating a configuration of a second embodiment of the processing circuit unit illustrated in FIG. 2;

FIG. 2 is an explanatory diagram of a basic block of an inspection system according to the present invention.

FIG. 3 is an explanatory diagram of a configuration of a first embodiment of a processing circuit unit.

FIG. 4 is an explanatory diagram of a word configuration of a correspondence information storage memory that stores correspondence information.

[Explanation of symbols]

Reference Signs List 1 display element 2 two-dimensional CCD camera 3 moving stage 4 processing circuit section 10 A / D conversion circuit 20 display element image memory 30 correspondence relation information storage memory 31 address counter 32 read register 40 effective information storage memory 41 corresponding address information storage memory 42 Valid information register 43 Corresponding address information register 44 Address counter 45 Address counter 100 Clock signal line 101 Valid information signal line 102 Corresponding address information signal line

Claims (2)

(57) [Claims] The display screen of a display element is used as an inspection screen.
Reading the display screen of the display element to check the quality of the display screen
In the method, the display element (1) to be inspected is mounted and horizontally moved.
A moving stage (3) having moving means , and the display element at a predetermined position above the moving stage (3).
The image of the display screen provided opposite to the display screen of (1).
Two-dimensional sensor camera with sensor pixels for inputting surface information
(2) and an alignment mark of the display element (1),
A position for setting the two-dimensional sensor camera (2) at a predetermined position
Alignment means , and the display in the effective light receiving area of the two-dimensional sensor camera (2).
Read the luminous intensity of the display element (1) by forming an image on the screen
The luminosity detected by the sensor pixels as the luminosity of the display screen.
The signal converted through the A / D conversion circuit (10)
Display element image memory for storing as write data
(20) , the sensor pixel of the two-dimensional sensor camera (2) corresponds to the display pixel.
Corresponding to the sensor pixel and valid information indicating whether or not
Memo for storing the correspondence information that stores the address information of the displayed pixels
(30) and an address for generating an address of the correspondence information storage memory (30).
Address counter (31) and the validity read from the correspondence information storage memory (30).
Information and the address information of the display pixel corresponding to the sensor pixel.
A read register (32) for storing
Clock signal line (100) for supplying clock signal
Original sensor camera (2) and corresponding relationship information storage memory (3
0) and the address counter (31), and
Line (101) and the corresponding address information signal line (102).
Read-out register (32) and display element image memory
(20) and a processing circuit section (4) connected thereto.
A method for reading a display screen of a display element, characterized by being performed . 2. The method according to claim 1 , wherein a display screen of the display element is used as an inspection screen.
Reading the display screen of the display element to check the quality of the display screen
In the method, the display element (1) to be inspected is mounted and horizontally moved.
A moving stage (3) having moving means , and the display element at a predetermined position above the moving stage (3).
The image of the display screen provided opposite to the display screen of (1).
Two-dimensional sensor camera with sensor pixels for inputting surface information
(2) and an alignment mark of the display element (1),
A position for setting the two-dimensional sensor camera (2) at a predetermined position
Alignment means , and the display in the effective light receiving area of the two-dimensional sensor camera (2).
Read the luminous intensity of the display element (1) by forming an image on the screen
The luminosity detected by the sensor pixel is used as the luminosity of the display pixel.
The signal converted through the A / D conversion circuit (10)
Display element image memory for storing as write data
(20) , the sensor pixel of the two-dimensional sensor camera (2) corresponds to the display pixel.
Valid information storage method to store valid information indicating whether
Mori and (40), for generating an address of a valid information storage memory (40) address
From the counter (44) and the valid information storage memory (40)
A valid information register (4) for storing the read valid information
0) and the address information of the display pixel corresponding to the sensor pixel.
A corresponding address information storage memory (41) , and an address for generating an address of the corresponding address information storage memory (41).
A dress counter (45) and a corresponding address read from the corresponding address information storage memory (41).
Stores address information of a display pixel corresponding to the sensor pixel
A clock signal line (100) having a corresponding address information register (43) for supplying a clock signal;
2D sensor camera (2) and valid information register (4
2) and connect the valid information register (42) to the corresponding address information.
Address counter that generates the address of the information storage memory (41)
(45), and the corresponding address information register (43)
Address information signal corresponding to display element image memory (20)
Composed of a processing circuit section (4) connected by a line (102)
A method for reading a display screen of a display element, characterized by being performed .