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JP2615913B2 - Infrared optical device - Google Patents

Infrared optical device

Info

Publication number
JP2615913B2
JP2615913B2 JP63241948A JP24194888A JP2615913B2 JP 2615913 B2 JP2615913 B2 JP 2615913B2 JP 63241948 A JP63241948 A JP 63241948A JP 24194888 A JP24194888 A JP 24194888A JP 2615913 B2 JP2615913 B2 JP 2615913B2
Authority
JP
Japan
Prior art keywords
infrared
aperture
optical device
infrared rays
black body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP63241948A
Other languages
Japanese (ja)
Other versions
JPH0288929A (en
Inventor
正二 土肥
雄一郎 伊藤
勲 東福
健司 粟本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP63241948A priority Critical patent/JP2615913B2/en
Publication of JPH0288929A publication Critical patent/JPH0288929A/en
Application granted granted Critical
Publication of JP2615913B2 publication Critical patent/JP2615913B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0831Masks; Aperture plates; Spatial light modulators
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/06Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/061Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/06Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0808Convex mirrors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0813Planar mirrors; Parallel phase plates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/084Adjustable or slidable
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0856Slit arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Description

【発明の詳細な説明】 〔概 要〕 赤外線撮像装置に用いる光学装置に関し、 広い測温範囲の対象物体を精度良く測定できるように
することを目的とし、 構成要素として、赤外線を集光するレンズと、レンズ
を透過した赤外線の光量を変化させる絞りと、周囲に黒
体を配設された検知素子を内蔵した赤外線検知器とを備
え、前記検知素子には前記絞りを通過した赤外線と前記
黒体から放射され前記絞りの検知素子側の表面で反射さ
れた赤外線のみが入射するように、前記各要素を共通の
光軸上に順次配置して構成する。
DETAILED DESCRIPTION OF THE INVENTION [Summary] An optical device used in an infrared imaging device, which aims to accurately measure a target object in a wide temperature measuring range, and has a lens for condensing infrared light as a component. An aperture for changing the amount of infrared light transmitted through the lens, and an infrared detector having a built-in detection element having a black body disposed therearound, wherein the detection element includes the infrared ray passing through the aperture and the black light. The components are sequentially arranged on a common optical axis so that only infrared rays radiated from the body and reflected on the surface of the diaphragm on the sensing element side are incident.

〔産業上の利用分野〕[Industrial applications]

本発明は赤外線撮像装置に用いる光学装置に関する。 The present invention relates to an optical device used for an infrared imaging device.

赤外線を利用した非接触,リアルタイムの測温機能を
有する赤外線撮像装置においては汎用性と高精度化が要
求されており、その光学系においてもその対策が望まれ
ている。
Infrared imaging devices having a non-contact, real-time temperature measurement function using infrared rays are required to be versatile and highly accurate, and measures are also required for the optical system.

〔従来の技術〕 第3図は従来の赤外線光学装置を示し、1はレンズ,2
は赤外線検知器,21は検知素子,22は二重管からなる容
器,23は窓,24はコールドアパーチャで、容器22の中は液
体窒素(LN2)で満たされて、赤外線検知器2は零下190
℃程度に冷却させてある。
[Prior Art] FIG. 3 shows a conventional infrared optical device, wherein 1 is a lens, 2
Is an infrared detector, 21 is a detection element, 22 is a double tube container, 23 is a window, 24 is a cold door aperture, the container 22 is filled with liquid nitrogen (LN 2 ), and the infrared detector 2 is Below zero 190
It has been cooled to about ° C.

ところで、赤外線光学装置の測定精度を向上するため
には対象物体の測定温度範囲(測温範囲)に合致したレ
ンズのF値が設定でき、且つ、レンズ外から入つてくる
無効な背景の赤外線光量を減らしてノイズを減少させる
必要がある。なお、F値とは口径比の逆数のことで、口
径比とはレンズ径と焦点距離との比であり、F値が小さ
い程多くの光を集めて明るく、F値が大きくなるとその
逆になる指数である。
By the way, in order to improve the measurement accuracy of the infrared optical device, it is possible to set the F value of the lens that matches the measurement temperature range (temperature measurement range) of the target object, and to set the amount of invalid background infrared light that enters from outside the lens. Needs to be reduced to reduce noise. The F value is the reciprocal of the aperture ratio, and the aperture ratio is the ratio between the lens diameter and the focal length. The smaller the F value, the more light is collected and brighter, and the larger the F value, the opposite. Is an exponent.

〔発明が解決しようとする課題〕[Problems to be solved by the invention]

しかし、赤外線検知器2の視野角度は検知素子および
コールドアパーチャによつて決められ、それに合つたF
値を有するレンズと一体的に赤外線光学装置を構成し、
ある限定された測温範囲の対象物体のみを検出してい
る。従って、広い測温範囲の対象物体を検出するために
は、異なる測温範囲をもつた多くの赤外線光学装置を必
要としていた。そうしなければ、背景光量が加わつてノ
イズが増大するなど、対象物体の正確な測定温度が得ら
れないからである。
However, the viewing angle of the infrared detector 2 is determined by the detection element and the cold aperture, and the F angle corresponding thereto is determined.
Constituting an infrared optical device integrally with a lens having a value,
Only a target object within a certain limited temperature measurement range is detected. Therefore, in order to detect a target object having a wide temperature measurement range, many infrared optical devices having different temperature measurement ranges have been required. Otherwise, an accurate measured temperature of the target object cannot be obtained, such as an increase in noise due to the addition of the background light amount.

また、測定の対象とする赤外線光量が非常に大きいと
き、通常の絞り(可視光用の黒塗り絞り)を通してF値
を大きくして測定する方法が用いられているが、そのよ
うな可視光の絞りは対象物体外の有効な赤外線を放射ま
たは反射するので、この絞りからの放射または反射光を
受光すると、ノイズが増大して感度の低下を招く欠点が
ある。
Further, when the amount of infrared light to be measured is very large, a method of measuring by increasing the F value through a normal diaphragm (blackened diaphragm for visible light) is used. Since the diaphragm emits or reflects effective infrared light outside the target object, there is a disadvantage in that when radiation or reflected light from the diaphragm is received, noise increases and sensitivity decreases.

本発明はそのような問題点を解消させて、絞りにより
レンズのF値を変化させても無効な赤外線を検知素子に
入射させないようにすることで、広い測温範囲の対象物
体を精度良く測定できることを目的とした赤外線光学装
置を提案するものである。
The present invention solves such a problem and prevents an invalid infrared ray from being incident on the detecting element even when the F-number of the lens is changed by the aperture, thereby accurately measuring a target object in a wide temperature measuring range. It is an object of the present invention to propose an infrared optical device for the purpose.

〔課題を解決するための手段〕[Means for solving the problem]

その課題は、第1図に示すように、構成要素として、
赤外線を集光するレンズ1と、レンズを透過した赤外線
の光量を変化させる絞り3と、周囲に黒体4を配設され
た検知素子21を内蔵した赤外線検知器2とを備え、前記
検知素子21には前記絞り3を通過した赤外線と前記黒体
4から放射され前記絞り3の検知素子21側の表面で反射
された赤外線のみが入射するように、前記各要素を共通
の光軸上に順次配置して構成し赤外線光学装置によって
解決される。
The problem is, as shown in FIG.
A lens 1 for condensing infrared light, a diaphragm 3 for changing the amount of infrared light transmitted through the lens, and an infrared detector 2 having a built-in detection element 21 having a black body 4 disposed therearound. Each element is placed on a common optical axis so that only infrared rays passing through the aperture 3 and infrared rays emitted from the black body 4 and reflected by the surface of the aperture 3 on the sensing element 21 side enter the aperture 21. This is solved by an infrared optical device which is arranged and arranged sequentially.

〔作 用〕(Operation)

即ち、本発明は絞り3に設けた通過孔のみを通つてき
た対象物体の赤外線光量のみを検知素子21で検知し、無
効な背景の赤外線光量は冷却した黒体4で吸収し、ま
た、絞り3の表面で略100%反射させて検知素子21に入
射しないように構成する。即ち、検知素子21は絞り3の
表面反射で黒体4を見るように位置させてあるから、冷
却した黒体4からは赤外線が検知素子に入射せず、ま
た、他から絞り3の表面に入射した赤外線は他に略100
%反射して検知素子に入射せず、対象物体の赤外線光量
のみを検知素子で検知できる構成にする。かくして、絞
り3によつてF値を変えると無効な背景の赤外線光量が
影響せずに、広い測温範囲の対象物体を検知する赤外線
光学装置が得られる。
That is, according to the present invention, only the infrared light amount of the target object which has passed through only the through hole provided in the aperture 3 is detected by the detection element 21, and the infrared light amount of the invalid background is absorbed by the cooled black body 4. The surface 3 is so configured that it is reflected almost 100% and does not enter the detection element 21. That is, since the detecting element 21 is positioned so as to see the black body 4 by the surface reflection of the stop 3, infrared light does not enter the detecting element from the cooled black body 4, and the infrared light enters the surface of the stop 3 from other places. Approximately 100 other infrared rays
The configuration is such that only the amount of infrared light of the target object can be detected by the detection element without being reflected by% and entering the detection element. Thus, when the F-number is changed by the aperture 3, an infrared optical device for detecting a target object in a wide temperature measuring range without influence of an ineffective background infrared light amount can be obtained.

〔実施例〕〔Example〕

以下、図面を参照して実施例によつて詳細に説明す
る。
Hereinafter, embodiments will be described in detail with reference to the drawings.

第1図は本発明にかかる赤外線光学装置であり、1は
レンズ,2は赤外線検知器,21は検知素子,22は容器,23は
窓,3は絞り,4は黒体である。従来の装置と同じく窓23は
赤外線を透過するゲルマニウムまたはシリコンで作成さ
れており、容器22の中は液体窒素で満たされ、本発明に
かかる構成の一つである検知素子21を取り囲んだ‘すり
ばち’形の黒体4(例えば、炭素で作成する)も同温度
に冷却されており、冷却黒体は輻射率が大きくて入射し
た赤外線を全部吸収してしまう。一方、絞り3は赤外線
を全反射する表面をもつており、輻射率が零で、入射し
た赤外線は略100%反射する。また、絞り3の孔径の変
化は可視光絞りと同様の可変構造にする。
FIG. 1 shows an infrared optical device according to the present invention, wherein 1 is a lens, 2 is an infrared detector, 21 is a detecting element, 22 is a container, 23 is a window, 3 is an aperture, and 4 is a black body. As in the conventional device, the window 23 is made of germanium or silicon that transmits infrared light, the inside of the container 22 is filled with liquid nitrogen, and the 'slipper' surrounding the sensing element 21 which is one of the constitutions according to the present invention. The '-shaped black body 4 (made of carbon, for example) is also cooled to the same temperature, and the cooled black body has a large emissivity and absorbs all the incident infrared rays. On the other hand, the stop 3 has a surface that totally reflects infrared rays, has an emissivity of zero, and reflects approximately 100% of incident infrared rays. Further, the change in the hole diameter of the stop 3 is made to have the same variable structure as that of the visible light stop.

第2図は検知素子21と黒体4と絞り3との位置関係を
図示しており、絞り3の通過孔3Hから検出しようとする
対象物体の赤外線が検知素子21に照射される。冷却黒体
4は無効な背景の赤外線を全部吸収して、これに対向し
た絞り赤外線を全反射する表面をもち、検知素子21が絞
り3の表面反射で黒体4が見えるように絞り3と黒体4
とを位置させてあり、照射光,反射光を矢印で記入して
ある。従って、無効な背景の赤外線は遮断され、対象物
体の赤外線光量のみが検知素子を照射する。そうすれ
ば、絞り3に設けた通過孔3Hの孔径を変化させてF値を
変え、広い測温範囲の対象物体の温度を精度良く検知で
きる。
FIG. 2 illustrates the positional relationship between the detection element 21, the black body 4, and the stop 3. The detection element 21 is irradiated with infrared rays of a target object to be detected from the passage hole 3H of the stop 3. The cooled black body 4 has a surface that absorbs all the infrared rays of the ineffective background and totally reflects the aperture infrared rays facing the inactive infrared rays. Black body 4
And irradiation light and reflected light are indicated by arrows. Therefore, the infrared rays of the invalid background are blocked, and only the amount of infrared rays of the target object irradiates the detecting element. Then, by changing the diameter of the passage hole 3H provided in the diaphragm 3, the F value is changed, and the temperature of the target object in a wide temperature measurement range can be accurately detected.

なお、このように絞りを設けた光学系で、絞りの孔径
を変化させた場合、当然検知素子へ入射する光量が変化
する。このため、赤外線放射計や赤外線映像装置などの
光電変換信号を増幅・処理するところの検出系のダイナ
ミックレンジ内に信号をおさめるため、必要に応じて増
幅度を適性値に調整する手段を備えるものとする。
When the aperture diameter of the aperture is changed in the optical system provided with the aperture as described above, the amount of light incident on the detection element naturally changes. For this reason, a device equipped with a means for adjusting the amplification degree to an appropriate value as necessary to keep the signal within the dynamic range of the detection system that amplifies and processes the photoelectric conversion signal such as an infrared radiometer or infrared imaging device And

〔発明の効果〕〔The invention's effect〕

上記の説明から明らかなように、本発明にかかる赤外
線光学装置は広い測温範囲をもつた対象物体に対応でき
て汎用性が富み、しかも、高精度に測定できる効果の大
きいものである。
As is clear from the above description, the infrared optical device according to the present invention is applicable to a target object having a wide temperature measurement range, is versatile, and has a large effect of being able to measure with high accuracy.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明にかかる赤外線光学装置、 第2図は検知素子と黒体と絞りとの位置関係図、 第3図は従来の赤外線光学装置である。 図において、 1はレンズ、2は赤外線検知器、 3は絞り、4は黒体、 3Hは絞り3の通過孔、 21は検知素子、22は容器、 23は窓、24はコールドアパーチャ を示している。 FIG. 1 is an infrared optical device according to the present invention, FIG. 2 is a diagram showing a positional relationship between a detecting element, a black body, and an aperture, and FIG. 3 is a conventional infrared optical device. In the figure, 1 is a lens, 2 is an infrared detector, 3 is an aperture, 4 is a black body, 3H is a passage hole of the aperture 3, 21 is a detection element, 22 is a container, 23 is a window, and 24 is a cold aperture. I have.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 粟本 健司 神奈川県川崎市中原区上小田中1015番地 富士通株式会社内 ──────────────────────────────────────────────────続 き Continued from the front page (72) Inventor Kenji Awamoto 1015 Kamiodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture Inside Fujitsu Limited

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】赤外線を集光するレンズと当該赤外線を受
光するための検知素子を備えた検知器とからなる赤外線
光学装置において、 中心にレンズからの赤外線を通過させる通過孔を有し、
且つ検知器側の表面に反射面を形成した絞りを前記レン
ズと検知器との間に配置すると共に、前記検知器内の検
知素子周囲に黒体を配設して成り、前記検知素子には前
記絞りを通過した赤外線と前記黒体から放射され前記絞
りの検知素子側の表面で反射された赤外線のみが入射す
るように構成したことを特徴とする赤外線光学装置。
1. An infrared optical device comprising: a lens for condensing infrared rays; and a detector having a detecting element for receiving the infrared rays.
A stop having a reflecting surface formed on the surface on the detector side is disposed between the lens and the detector, and a black body is disposed around the detecting element in the detector. An infrared optical device, wherein only infrared rays that have passed through the aperture and infrared rays emitted from the black body and reflected by a surface of the aperture on the detection element side are incident.
JP63241948A 1988-09-26 1988-09-26 Infrared optical device Expired - Fee Related JP2615913B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63241948A JP2615913B2 (en) 1988-09-26 1988-09-26 Infrared optical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63241948A JP2615913B2 (en) 1988-09-26 1988-09-26 Infrared optical device

Publications (2)

Publication Number Publication Date
JPH0288929A JPH0288929A (en) 1990-03-29
JP2615913B2 true JP2615913B2 (en) 1997-06-04

Family

ID=17081952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63241948A Expired - Fee Related JP2615913B2 (en) 1988-09-26 1988-09-26 Infrared optical device

Country Status (1)

Country Link
JP (1) JP2615913B2 (en)

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JP2009204423A (en) * 2008-02-27 2009-09-10 Fujitsu Ltd Infrared imaging device
JP6000546B2 (en) * 2011-06-30 2016-09-28 浜松ホトニクス株式会社 Optical device for microscopic observation
JP6208478B2 (en) 2013-06-25 2017-10-04 株式会社小糸製作所 Production method
JP6462991B2 (en) * 2014-03-28 2019-01-30 旭化成エレクトロニクス株式会社 Infrared detector and method of manufacturing field-limiting unit

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