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JP2015036183A - Horizontally articulated robot and method for manufacturing horizontally articulated robot - Google Patents

Horizontally articulated robot and method for manufacturing horizontally articulated robot Download PDF

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JP2015036183A
JP2015036183A JP2013247026A JP2013247026A JP2015036183A JP 2015036183 A JP2015036183 A JP 2015036183A JP 2013247026 A JP2013247026 A JP 2013247026A JP 2013247026 A JP2013247026 A JP 2013247026A JP 2015036183 A JP2015036183 A JP 2015036183A
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arm
hand
articulated robot
level
respect
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JP6374156B2 (en
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康行 北原
Yasuyuki Kitahara
康行 北原
俊道 風間
Toshimichi Kazama
俊道 風間
保 栗林
Tamotsu Kuribayashi
保 栗林
正義 齋地
Masayoshi Saichi
正義 齋地
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Nidec Instruments Corp
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Nidec Sankyo Corp
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Priority to US14/899,410 priority Critical patent/US10195743B2/en
Priority to CN201480040746.3A priority patent/CN105408068B/en
Priority to KR1020167002891A priority patent/KR102294107B1/en
Priority to PCT/JP2014/070736 priority patent/WO2015020089A1/en
Publication of JP2015036183A publication Critical patent/JP2015036183A/en
Priority to US15/854,487 priority patent/US20190001500A1/en
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Publication of JP6374156B2 publication Critical patent/JP6374156B2/en
Priority to US16/580,276 priority patent/US10780586B2/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/044—Cylindrical coordinate type comprising an articulated arm with forearm providing vertical linear movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/902—Devices for picking-up and depositing articles or materials provided with drive systems incorporating rotary and rectilinear movements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/14—Arm movement, spatial
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/14—Arm movement, spatial
    • Y10S901/17—Cylindrical

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a horizontally articulated robot having an arm movable horizontally in which a hand can be so provided in a relatively short time and easily as to move horizontally with a good accuracy.SOLUTION: A horizontally articulated robot 1, of which an arm 6 moves horizontally, comprises: hands 4, 5 onto which a transportation object is mounted; an arm 6 having at least two arm parts comprising a hand side arm part 18 to a tip side of which the hands 4, 5 are rotatably connected, and a second hand side arm part 17 to a tip side of which a base end side of the hand side arm part 18 is rotatably connected; a body part 7 to which a base end side of the arm 6 is rotatably connected; and a spiral level 23 which is attached to the body part 7. The spiral level 23 is attached to the body part 7, after at least inclination in a vertical direction of a rotation central axis of the hand side arm part 18 with respect to the second hand side arm part 17 is adjusted.

Description

本発明は、水平方向にアームが動作する水平多関節ロボット、および、水平多関節ロボットの製造方法に関する。   The present invention relates to a horizontal articulated robot in which an arm moves in a horizontal direction, and a method for manufacturing the horizontal articulated robot.

従来、ＥＦＥＭ（Ｅｑｕｉｐｍｅｎｔ Ｆｒｏｎｔ Ｅｎｄ Ｍｏｄｕｌｅ）の一部を構成するとともにＦＯＵＰ（Ｆｒｏｎｔ Ｏｐｅｎ Ｕｎｉｆｉｅｄ Ｐｏｄ）と半導体ウエハ処理装置との間で半導体ウエハを搬送する水平多関節ロボットが知られている（たとえば、特許文献１参照）。特許文献１に記載の水平多関節ロボットは、半導体ウエハが搭載される２個のハンドと、２個のハンドが先端側に回動可能に連結されるアームと、アームの基端側が回動可能に連結される本体部とを備えている。アームは、本体部にその基端側が回動可能に連結される第１アームと、第１アームの先端側にその基端側が回動可能に連結される第２アームと、第２アームの先端側にその基端側が回動可能に連結されるとともにその先端側にハンドが回動可能に連結される第３アームとから構成されている。本体部の内部には、第１アームを昇降させるアーム昇降機構が収容されている。   2. Description of the Related Art Conventionally, a horizontal articulated robot that forms part of an EFEM (Equipment Front End Module) and transports a semiconductor wafer between a FOUP (Front Open Unified Pod) and a semiconductor wafer processing apparatus is known (for example, a patent) Reference 1). The horizontal articulated robot described in Patent Document 1 includes two hands on which semiconductor wafers are mounted, an arm that is coupled to the two hands so as to be pivotable to the tip side, and a base end side of the arm that is pivotable. And a main body connected to the main body. The arm includes a first arm whose base end side is rotatably connected to the main body, a second arm whose base end side is rotatably connected to the tip end side of the first arm, and a tip end of the second arm. The base end side is rotatably connected to the side, and the hand is rotatably connected to the distal end side. An arm elevating mechanism that elevates and lowers the first arm is housed inside the main body.

また、従来、垂直多関節ロボットとして、ベースと、ベースに固定される胴体と、胴体に回動可能に連結される第１アームと、第１アームに回動可能に連結される第２アームと、第２アームに回動可能に連結される手首アームと、手首アームに回動可能に連結される手先アームとを備える垂直多関節ロボットが知られている（たとえば、特許文献２参照）。特許文献２に記載の垂直多関節ロボットでは、第１アームおよび手先アームに原点位置調整用の水準器が取り付けられている。   Conventionally, as a vertical articulated robot, a base, a body fixed to the base, a first arm rotatably connected to the body, and a second arm rotatably connected to the first arm A vertical articulated robot is known that includes a wrist arm that is rotatably connected to a second arm and a hand arm that is rotatably connected to the wrist arm (see, for example, Patent Document 2). In the vertical articulated robot described in Patent Document 2, a spirit level for adjusting the origin position is attached to the first arm and the hand arm.

特開２０１１−２３０２５６号公報JP 2011-230256 A 実開昭６３−１４７７０４号公報Japanese Utility Model Publication No. 63-147704

ＦＯＵＰは、ＳＥＭＩ（Ｓｅｍｉｃｏｎｄｕｃｔｏｒ Ｅｑｕｉｐｍｅｎｔ ａｎｄ Ｍａｔｅｒｉａｌｓ Ｉｎｓｔｉｔｕｔｅ）規格に基づいて製造されており、ＦＯＵＰには、複数枚の半導体ウエハが一定のピッチで上下方向に重なるように収容されている。ＦＯＵＰに収容される複数の半導体ウエハの間には隙間が形成されているが、この隙間は比較的狭くなっている。ＦＯＵＰと半導体ウエハ処理装置との間で半導体ウエハを搬送する水平多関節ロボットは、ＦＯＵＰに収容される複数枚の半導体ウエハの間の狭い隙間にハンドを入れてからハンドに半導体ウエハを搭載して取り出さなければならない。そのため、この水平多関節ロボットは、水平方向へハンドが精度良く動作するように精度良く設置されている必要がある。   The FOUP is manufactured based on the SEMI (Semiconductor Equipment and Materials Institute) standard, and a plurality of semiconductor wafers are accommodated in the FOUP so as to overlap each other at a constant pitch. A gap is formed between the plurality of semiconductor wafers accommodated in the FOUP, but this gap is relatively narrow. A horizontal articulated robot that transports a semiconductor wafer between a FOUP and a semiconductor wafer processing apparatus places a hand in a narrow gap between a plurality of semiconductor wafers accommodated in the FOUP and then mounts the semiconductor wafer on the hand. Must be taken out. Therefore, this horizontal articulated robot needs to be installed with high precision so that the hand can operate with high precision in the horizontal direction.

水平多関節ロボットを精度良く設置するために、一般には、水平多関節ロボットの設置時に、アームがある方向へ伸びている状態、アームが他の方向へ伸びている状態およびアームが縮んでいる状態等の様々な状態に水平多関節ロボットの状態を変えながら、水準器を用いて各状態でのハンドの傾き等を調べ、水平方向へハンドが最適な動作を行うことができるように、水平多関節ロボットを設置している。そのため、半導体ウエハを搬送する水平多関節ロボットの設置には時間がかかる。また、この水平多関節ロボットが設置されるＥＦＥＭの筺体の内部はそれほど広くないため、水平多関節ロボットの設置作業も困難である。   In order to install a horizontal articulated robot with high accuracy, in general, when installing a horizontal articulated robot, the arm is extended in one direction, the arm is extended in the other direction, and the arm is contracted While changing the state of the horizontal articulated robot to various states, etc., use a level to check the tilt of the hand in each state, so that the hand can perform optimal movement in the horizontal direction. A joint robot is installed. Therefore, it takes time to install the horizontal articulated robot that transports the semiconductor wafer. Further, since the inside of the EFEM housing where the horizontal articulated robot is installed is not so wide, it is difficult to install the horizontal articulated robot.

そこで、本発明の課題は、水平方向にアームが動作する水平多関節ロボットにおいて、比較的短時間で容易に、かつ、水平方向へハンドが精度良く動作するように設置することが可能な水平多関節ロボットを提供することにある。また、本発明の課題は、水平方向にアームが動作する水平多関節ロボットの製造方法において、比較的短時間で容易に、かつ、水平方向へハンドが精度良く動作するように設置することが可能となる水平多関節ロボットの製造方法を提供することにある。   Accordingly, an object of the present invention is to provide a horizontal multi-joint robot in which an arm operates in a horizontal direction, which can be installed so that a hand can operate with high precision in a horizontal direction easily in a relatively short time. It is to provide a joint robot. Another object of the present invention is to provide a horizontal articulated robot manufacturing method in which the arm moves in the horizontal direction, and can be installed so that the hand can move in the horizontal direction with high accuracy in a relatively short time. It is to provide a method for manufacturing a horizontal articulated robot.

上記の課題を解決するため、本発明の水平多関節ロボットは、水平方向にアームが動作する水平多関節ロボットにおいて、搬送対象物が搭載されるハンドと、ハンドがその先端側に回動可能に連結されるハンド側アーム部とハンド側アーム部の基端側がその先端側に回動可能に連結される第２ハンド側アーム部との少なくとも２個のアーム部を有するアームと、アームの基端側が回動可能に連結される本体部とを備えるとともに、少なくとも第２ハンド側アーム部に対するハンド側アーム部の回動中心軸の鉛直方向に対する傾きが調整された後に、ハンド、アームまたは本体部に取り付けられた水準器を備えることを特徴とする。   In order to solve the above-described problems, the horizontal articulated robot according to the present invention is a horizontal articulated robot in which an arm operates in a horizontal direction. An arm having at least two arm portions, a hand-side arm portion to be connected and a second hand-side arm portion in which a proximal end side of the hand-side arm portion is rotatably connected to a distal end side thereof; And a hand, an arm, or a main body after the inclination of the rotation center axis of the hand side arm with respect to the second hand side arm is adjusted relative to the vertical direction. It is provided with an attached spirit level.

また、上記の課題を解決するため、本発明の水平多関節ロボットの製造方法は、搬送対象物が搭載されるハンドと、ハンドがその先端側に回動可能に連結されるハンド側アーム部とハンド側アーム部の基端側がその先端側に回動可能に連結される第２ハンド側アーム部との少なくとも２個のアーム部を有するアームと、アームの基端側が回動可能に連結される本体部と、ハンド、アームまたは本体部に取り付けられる水準器とを備え、水平方向にアームが動作する水平多関節ロボットの製造方法であって、少なくとも第２ハンド側アーム部に対するハンド側アーム部の回動中心軸の鉛直方向に対する傾きを調整した後に、水準器を取り付けることを特徴とする。   Moreover, in order to solve said subject, the manufacturing method of the horizontal articulated robot of this invention is the hand in which a conveyance target object is mounted, and the hand side arm part to which a hand is rotatably connected with the front end side. An arm having at least two arm parts, a second hand side arm part that is pivotally connected to a distal end side of the base side of the hand side arm part, and a base end side of the arm are rotatably connected. A horizontal articulated robot manufacturing method comprising a main body part and a hand, an arm or a level attached to the main body part, wherein the arm moves in a horizontal direction, wherein at least the hand side arm part with respect to the second hand side arm part is provided. A level is attached after adjusting the inclination of the rotation center axis with respect to the vertical direction.

本発明の水平多関節ロボットは、搬送対象物が搭載されるハンドと、ハンドが回動可能に連結されるハンド側アーム部と、ハンド側アーム部が回動可能に連結される第２ハンド側アーム部とを備えるとともに、少なくとも第２ハンド側アーム部に対するハンド側アーム部の回動中心軸の鉛直方向に対する傾きが調整された後に、ハンド、アームまたは本体部に取り付けられた水準器を備えている。また、本発明の水平多関節ロボットの製造方法では、少なくとも第２ハンド側アーム部に対するハンド側アーム部の回動中心軸の鉛直方向に対する傾きを調整した後に、ハンド、アームまたは本体部に水準器を取り付けている。   The horizontal articulated robot of the present invention includes a hand on which an object to be transported is mounted, a hand side arm part to which the hand is rotatably connected, and a second hand side to which the hand side arm part is rotatably connected. And at least a level attached to the hand, arm or main body after the inclination of the rotation center axis of the hand side arm with respect to the second hand side arm is adjusted relative to the vertical direction. Yes. In the method for manufacturing a horizontal articulated robot according to the present invention, at least after adjusting the inclination of the rotation central axis of the hand side arm portion with respect to the second hand side arm portion with respect to the vertical direction, Is attached.

そのため、本発明では、水平多関節ロボットを設置する際に、水平多関節ロボットに取り付けられた水準器が所定の状態を示すように水平多関節ロボットを設置することで、ハンドが回動可能に連結されるハンド側アーム部の、第２ハンド側アーム部に対する回動中心軸の鉛直方向に対する傾きが適切な傾きとなって、水平方向に対するハンドの傾きが適切な傾きとなるように、水平多関節ロボットを設置することが可能になる。したがって、本発明では、上述した従来の水平多関節ロボットの設置方法と比較して、比較的短時間で容易に、かつ、水平方向へハンドが精度良く動作するように水平多関節ロボットを設置することが可能になる。   Therefore, in the present invention, when the horizontal articulated robot is installed, the hand can be rotated by installing the horizontal articulated robot so that the level attached to the horizontal articulated robot shows a predetermined state. In order for the hand-side arm portion to be connected to the second hand-side arm portion to have an appropriate inclination with respect to the vertical direction of the rotation center axis, the horizontal inclination of the hand relative to the horizontal direction becomes an appropriate inclination. It becomes possible to install a joint robot. Therefore, in the present invention, the horizontal articulated robot is installed so that the hand can be operated in the horizontal direction with high accuracy in a relatively short time as compared with the conventional horizontal articulated robot installation method described above. It becomes possible.

本発明において、ハンドには、搬送対象物が搭載される搭載面が形成され、水準器は、水平方向に対する搭載面の傾きが調整された後に取り付けられていることが好ましい。このように構成すると、水平多関節ロボットに取り付けられた水準器が所定の状態を示すように水平多関節ロボットを設置することで、水平方向へハンドがより精度良く動作するように水平多関節ロボットを設置することが可能になる。   In the present invention, the hand is preferably provided with a mounting surface on which the object to be transported is mounted, and the level is attached after the inclination of the mounting surface with respect to the horizontal direction is adjusted. With this configuration, the horizontal articulated robot is set so that the hand moves more accurately in the horizontal direction by installing the horizontal articulated robot so that the level attached to the horizontal articulated robot shows a predetermined state. Can be installed.

本発明において、たとえば、水準器は、気泡管を有する気泡管水準器であり、少なくとも第２ハンド側アーム部に対するハンド側アーム部の回動中心軸の鉛直方向に対する傾きが調整された後に、気泡管内の気泡が気泡管に印された基準線の中に収まるように取り付けられている。この場合には、水平多関節ロボットを設置する際に、水準器の気泡管の中の気泡が基準線の中に収まるように水平多関節ロボットを設置することで、第２ハンド側アーム部に対するハンド側アーム部の回動中心軸の鉛直方向に対する傾きが適切な傾きとなって、水平方向に対するハンドの傾きが適切な傾きとなるように、水平多関節ロボットを設置することが可能になる。   In the present invention, for example, the level is a bubble level having a bubble tube, and at least after the inclination of the rotation center axis of the hand side arm portion with respect to the second hand side arm portion with respect to the vertical direction is adjusted, It is attached so that the bubbles in the tube fall within the reference line marked on the bubble tube. In this case, when installing the horizontal articulated robot, the horizontal articulated robot is installed so that the bubbles in the bubble tube of the spirit level are within the reference line. It is possible to install the horizontal articulated robot so that the inclination of the hand-side arm portion with respect to the vertical direction of the rotation center axis becomes an appropriate inclination and the inclination of the hand with respect to the horizontal direction becomes an appropriate inclination.

本発明において、水準器は、本体部に取り付けられていることが好ましい。アームやハンドに水準器が取り付けられていると、たとえば、水準器が気泡管水準器である場合、アームの伸縮状態に応じて、気泡管の中の気泡の位置が変動しやすくなるため、気泡が基準線の中に収まるように水平多関節ロボットを設置しても、設置時のアームの伸縮状態によっては、水平方向に対するハンドの傾きが適切な傾きとなるように、水平多関節ロボットを設置することができないおそれがある。これに対して、水準器が本体部に取り付けられていると、アームの伸縮状態が変わっても、気泡管の中の気泡の位置が変動しにくくなるため、気泡が基準線の中に収まるように水平多関節ロボットを設置することで、設置時のアームの伸縮状態にかかわらず、水平方向に対するハンドの傾きが適切な傾きとなるように、水平多関節ロボットを設置することが可能になる。   In the present invention, the spirit level is preferably attached to the main body. If a spirit level is attached to the arm or hand, for example, if the spirit level is a bubble tube level, the position of the bubbles in the bubble tube is likely to fluctuate depending on the expansion / contraction state of the arm. Even if the horizontal articulated robot is installed so that the distance is within the reference line, the horizontal articulated robot is installed so that the hand is tilted appropriately with respect to the horizontal direction, depending on the expansion and contraction of the arm during installation. There is a risk that it cannot be done. On the other hand, if the spirit level is attached to the main body, the position of the bubbles in the bubble tube is less likely to fluctuate even if the arm expands and contracts, so that the bubbles fit within the reference line. By installing the horizontal articulated robot in the horizontal direction, it becomes possible to install the horizontal articulated robot so that the inclination of the hand with respect to the horizontal direction becomes an appropriate inclination regardless of the extension / contraction state of the arm at the time of installation.

以上のように、本発明の水平多関節ロボットでは、比較的短時間で容易に、かつ、水平方向へハンドが精度良く動作するように水平多関節ロボットを設置することが可能になる。また、本発明の水平多関節ロボットの製造方法で製造された水平多関節ロボットでは、比較的短時間で容易に、かつ、水平方向へハンドが精度良く動作するように水平多関節ロボットを設置することが可能になる。   As described above, in the horizontal articulated robot of the present invention, it is possible to install the horizontal articulated robot so that the hand can operate with high accuracy in the horizontal direction in a relatively short time. Further, in the horizontal articulated robot manufactured by the method for manufacturing a horizontal articulated robot of the present invention, the horizontal articulated robot is installed so that the hand can move with high precision in the horizontal direction easily in a relatively short time. It becomes possible.

本発明の実施の形態にかかる水平多関節ロボットの斜視図である。1 is a perspective view of a horizontal articulated robot according to an embodiment of the present invention. 図１に示す水平多関節ロボットの、アームが上昇するとともに伸びている状態の斜視図である。FIG. 2 is a perspective view of the horizontal articulated robot shown in FIG. 1 in a state where the arm is lifted and extended. 図１に示す水平多関節ロボットが使用される半導体製造システムの概略平面図である。FIG. 2 is a schematic plan view of a semiconductor manufacturing system in which the horizontal articulated robot shown in FIG. 1 is used. 図１に示す水平多関節ロボットの側面図である。It is a side view of the horizontal articulated robot shown in FIG.

以下、図面を参照しながら、本発明の実施の形態を説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

（水平多関節ロボットの構成）
図１は、本発明の実施の形態にかかる水平多関節ロボット１の斜視図である。図２は、図１に示す水平多関節ロボット１の、アーム６が上昇するとともに伸びている状態の斜視図である。図３は、図１に示す水平多関節ロボット１が使用される半導体製造システム９の概略平面図である。図４は、図１に示す水平多関節ロボット１の側面図である。 (Configuration of horizontal articulated robot)
FIG. 1 is a perspective view of a horizontal articulated robot 1 according to an embodiment of the present invention. FIG. 2 is a perspective view of the horizontal articulated robot 1 shown in FIG. 1 in a state where the arm 6 is lifted and extended. FIG. 3 is a schematic plan view of a semiconductor manufacturing system 9 in which the horizontal articulated robot 1 shown in FIG. 1 is used. FIG. 4 is a side view of the horizontal articulated robot 1 shown in FIG.

本形態の水平多関節ロボット１は、搬送体対象物である半導体ウエハ２（図３参照）を搬送するためのロボットである。この水平多関節ロボット１は、半導体ウエハ２が搭載される２個のハンド４、５と、ハンド４、５が先端側に回動可能に連結されるとともに水平方向に動作するアーム６と、アーム６の基端側が回動可能に連結される本体部７とを備えている。以下の説明では、水平多関節ロボット１を「ロボット１」とし、半導体ウエハ２を「ウエハ２」とする。また、以下の説明では、上下方向に直交する図１等のＸ方向を「左右方向」とし、上下方向および左右方向に直交するＹ方向を「前後方向」とするとともに、Ｘ１方向側を「右」側、Ｘ２方向側を「左」側、Ｙ１方向側を「前」側、Ｙ２方向側を「後（後ろ）」側とする。   The horizontal articulated robot 1 of this embodiment is a robot for transporting a semiconductor wafer 2 (see FIG. 3) that is a transport object. The horizontal articulated robot 1 includes two hands 4 and 5 on which a semiconductor wafer 2 is mounted, arms 4 and 5 that are rotatably connected to the distal end side, and move in a horizontal direction. 6 is provided with a main body 7 to which the base end side of 6 is rotatably connected. In the following description, the horizontal articulated robot 1 is referred to as “robot 1”, and the semiconductor wafer 2 is referred to as “wafer 2”. Further, in the following description, the X direction in FIG. 1 or the like orthogonal to the vertical direction is referred to as “left-right direction”, the Y direction orthogonal to the vertical direction and the left-right direction is referred to as “front-rear direction”, and the X1 direction side is referred to as “right ”Side, the X2 direction side is the“ left ”side, the Y1 direction side is the“ front ”side, and the Y2 direction side is the“ rear (back) ”side.

図３に示すように、ロボット１は、半導体製造システム９に組み込まれて使用される。この半導体製造システム９は、ＥＦＥＭ１０と、ウエハ２に対して所定の処理を行う半導体ウエハ処理装置１１とを備えている。ＥＦＥＭ１０は、半導体ウエハ処理装置１１の前側に配置されている。ロボット１は、ＥＦＥＭ１０の一部を構成している。また、ＥＦＥＭ１０は、ＦＯＵＰ１２を開閉する複数のロードポート１３と、ロボット１が収容される筺体１４とを備えている。筺体１４は、左右方向に細長い直方体の箱状に形成されている。筺体１４の内部は、清浄空間となっている。すなわち、ＥＦＥＭ１０の内部は、清浄空間となっており、ＥＦＥＭ１０の内部では所定のクリーン度が確保されている。   As shown in FIG. 3, the robot 1 is used by being incorporated in a semiconductor manufacturing system 9. The semiconductor manufacturing system 9 includes an EFEM 10 and a semiconductor wafer processing apparatus 11 that performs predetermined processing on the wafer 2. The EFEM 10 is disposed on the front side of the semiconductor wafer processing apparatus 11. The robot 1 constitutes a part of the EFEM 10. The EFEM 10 includes a plurality of load ports 13 that open and close the FOUP 12 and a housing 14 in which the robot 1 is accommodated. The housing 14 is formed in a rectangular parallelepiped box shape elongated in the left-right direction. The inside of the housing 14 is a clean space. That is, the inside of the EFEM 10 is a clean space, and a predetermined cleanliness is secured inside the EFEM 10.

ＦＯＵＰ１２は、ＳＥＭＩ規格に基づいて製造されており、ＦＯＵＰ１２には、２５枚または１３枚のウエハ２が上下方向に重なった状態で収容可能となっている。ロードポート１３は、筺体１４の前側に配置されている。本形態のＥＦＥＭ１０は、左右方向に所定のピッチで配列される４個のロードポート１３を備えており、ＥＦＥＭ１０では、４個のＦＯＵＰ１２が左右方向に所定のピッチで配列される。ロボット１は、４個のＦＯＵＰ１２と半導体ウエハ処理装置１１との間でウエハ２を搬送する。   The FOUP 12 is manufactured based on the SEMI standard, and 25 or 13 wafers 2 can be accommodated in the FOUP 12 in a state where they are overlapped in the vertical direction. The load port 13 is disposed on the front side of the housing 14. The EFEM 10 of this embodiment includes four load ports 13 arranged at a predetermined pitch in the left-right direction. In the EFEM 10, four FOUPs 12 are arranged at a predetermined pitch in the left-right direction. The robot 1 transports the wafer 2 between the four FOUPs 12 and the semiconductor wafer processing apparatus 11.

アーム６は、その基端側が本体部７に回動可能に連結される第１アーム部１６と、第１アーム部１６の先端側にその基端側が回動可能に連結される第２アーム部１７と、第２アーム部１７の先端側にその基端側が回動可能に連結される第３アーム部１８とから構成されている。すなわち、アーム６は、互いに相対回動可能に連結される３個のアーム部を備えている。第１アーム部１６、第２アーム部１７および第３アーム部１８は、中空状に形成されている。また、本形態では、第１アーム部１６の長さと、第２アーム部１７の長さと、第３アーム部１８の長さとが等しくなっている。本体部７と第１アーム部１６と第２アーム部１７と第３アーム部１８とは、上下方向において、下側からこの順番で配置されている。本形態の第３アーム部１８は、ハンド側アーム部であり、第２アーム部１７は、第２ハンド側アーム部である。   The arm 6 has a first arm part 16 whose base end side is rotatably connected to the main body part 7 and a second arm part whose base end side is rotatably connected to the distal end side of the first arm part 16. 17 and a third arm portion 18 whose base end side is rotatably connected to the distal end side of the second arm portion 17. That is, the arm 6 includes three arm portions that are connected to each other so as to be relatively rotatable. The first arm part 16, the second arm part 17, and the third arm part 18 are formed in a hollow shape. In this embodiment, the length of the first arm portion 16, the length of the second arm portion 17, and the length of the third arm portion 18 are equal. The main body part 7, the first arm part 16, the second arm part 17, and the third arm part 18 are arranged in this order from the lower side in the vertical direction. The 3rd arm part 18 of this form is a hand side arm part, and the 2nd arm part 17 is a 2nd hand side arm part.

ハンド４、５は、上下方向から見たときの形状が略Ｙ形状となるように形成されており、第３アーム部１８に連結される連結部１９と、ウエハ２が搭載されるウエハ搭載部２０とから構成されている。ハンド４、５は、上下方向で重なるように配置されている。具体的には、ハンド４が上側に配置され、ハンド５が下側に配置されている。また、ハンド４、５は、第３アーム部１８よりも上側に配置されている。   The hands 4 and 5 are formed so as to have a substantially Y shape when viewed in the vertical direction, and a connecting portion 19 connected to the third arm portion 18 and a wafer mounting portion on which the wafer 2 is mounted. 20. The hands 4 and 5 are arranged so as to overlap in the vertical direction. Specifically, the hand 4 is disposed on the upper side and the hand 5 is disposed on the lower side. Further, the hands 4 and 5 are disposed above the third arm portion 18.

連結部１９は、ハンド４、５の基端側部分を構成しており、第３アーム部１８の先端側に回動可能に連結されている。ウエハ搭載部２０は、ハンド４、５の先端側部分を構成しており、二股状に形成されている。ウエハ搭載部２０の上面は、ウエハ２が搭載される搭載面２０ａとなっている。すなわち、ハンド４、５には、搭載面２０ａが形成されている。連結部１９と第３アーム部１８との連結箇所には、水平方向に対する搭載面２０ａの傾きを微調整するための調整用ボルト（図示省略）が取り付けられている。また、連結部１９と第３アーム部１８との連結箇所には、調整用ボルトが螺合するネジ孔が形成されており、調整用ボルトのネジ孔へのネジ込み量によって、水平方向に対する搭載面２０ａの傾きが調整される。   The connecting portion 19 constitutes a base end side portion of the hands 4 and 5, and is rotatably connected to the distal end side of the third arm portion 18. The wafer mounting portion 20 constitutes the tip side portion of the hands 4 and 5 and is formed in a bifurcated shape. The upper surface of the wafer mounting unit 20 is a mounting surface 20a on which the wafer 2 is mounted. That is, the mounting surfaces 20 a are formed on the hands 4 and 5. An adjustment bolt (not shown) for finely adjusting the inclination of the mounting surface 20a with respect to the horizontal direction is attached to a connection portion between the connection portion 19 and the third arm portion 18. In addition, a screw hole into which the adjustment bolt is screwed is formed at a connection portion between the connection portion 19 and the third arm portion 18, and mounting in the horizontal direction is performed depending on the screwing amount of the adjustment bolt into the screw hole. The inclination of the surface 20a is adjusted.

なお、図３では、ハンド５の図示を省略している。また、本形態のロボット１の動作時には、ハンド４とハンド５とが上下方向で重なる場合もあるが、ほとんどの場合、ハンド４とハンド５とは、上下方向で重なっていない。たとえば、図３の二点鎖線で示すように、ハンド４がＦＯＵＰ１２の中へ入り込んでいるときには、ハンド５は、本体部７側へ回転しており、ＦＯＵＰ１２の中に入っていない。このときのハンド４に対するハンド５の回転角度は、たとえば、１２０°〜１５０°である。   In addition, illustration of the hand 5 is abbreviate | omitted in FIG. Further, during the operation of the robot 1 of this embodiment, the hand 4 and the hand 5 may overlap in the vertical direction, but in most cases, the hand 4 and the hand 5 do not overlap in the vertical direction. For example, as indicated by a two-dot chain line in FIG. 3, when the hand 4 enters the FOUP 12, the hand 5 rotates to the main body 7 side and does not enter the FOUP 12. The rotation angle of the hand 5 with respect to the hand 4 at this time is, for example, 120 ° to 150 °.

本体部７は、筺体２１と、第１アーム部１６の基端側が回動可能に連結される柱状部材２２（図２参照）とを備えている。筺体２１は、上下方向に細長い略直方体状に形成されており、上下方向から見たときの筺体２１の形状は、略長方形状または略正方形状となっている。また、筺体２１の前面および後面は、上下方向と左右方向とから構成される平面に略平行になっており、筺体２１の左右の両側面は、上下方向と前後方向とから構成される平面に略平行になっている。また、筺体２１の底面は、上下方向に略直交する平面状に形成されている。   The main body portion 7 includes a housing 21 and a columnar member 22 (see FIG. 2) to which the proximal end side of the first arm portion 16 is rotatably connected. The housing 21 is formed in a substantially rectangular parallelepiped shape elongated in the vertical direction, and the shape of the housing 21 when viewed from the vertical direction is a substantially rectangular shape or a substantially square shape. Further, the front surface and the rear surface of the housing 21 are substantially parallel to a plane composed of the up-down direction and the left-right direction, and the left and right side surfaces of the housing 21 are planar surfaces composed of the up-down direction and the front-back direction. It is almost parallel. The bottom surface of the housing 21 is formed in a planar shape that is substantially orthogonal to the vertical direction.

柱状部材２２は、上下方向の細長い柱状に形成されている。第１アーム部１６の基端側は、柱状部材２２の上端に回動可能に連結されている。筺体２１の内部には、柱状部材２２を昇降させるアーム昇降機構（図示省略）が収納されている。すなわち、筺体２１の内部には、本体部７に対して第１アーム部１６を昇降させる（すなわち、アーム６を昇降させる）アーム昇降機構が収納されている。このアーム昇降機構は、たとえば、上下方向を軸方向として配置されるボールネジ、このボールネジに係合するナット部材、および、ボールネジを回転させるモータ等によって構成されている。アーム昇降機構は、図１に示すように、柱状部材２２が筺体２１に収容される位置と、図２に示すように、柱状部材２２が筺体２１から上側に突出する位置との間で、アーム６および柱状部材２２を昇降させる。   The columnar member 22 is formed in a vertically elongated column shape. The base end side of the first arm portion 16 is rotatably connected to the upper end of the columnar member 22. An arm elevating mechanism (not shown) for elevating the columnar member 22 is accommodated in the housing 21. That is, an arm elevating mechanism for elevating and lowering the first arm portion 16 relative to the main body portion 7 (that is, elevating and lowering the arm 6) is housed in the housing 21. The arm elevating mechanism includes, for example, a ball screw arranged with the vertical direction as an axial direction, a nut member that engages with the ball screw, a motor that rotates the ball screw, and the like. As shown in FIG. 1, the arm elevating mechanism has an arm between a position where the columnar member 22 is accommodated in the housing 21 and a position where the columnar member 22 protrudes upward from the housing 21 as shown in FIG. 6 and the columnar member 22 are moved up and down.

柱状部材２２は、筺体２１の前端側に配置されている。また、左右方向において、柱状部材２２は、筺体２１の中心位置に配置されている。筺体２１の上端側には、上側に突出する突出部２１ａが形成されている。突出部２１ａは、柱状部材２２の左右両側および後ろ側を囲むように形成されている。突出部２１ａの上面は、上下方向に直交する平面状に形成されている。また、筺体２１の下端の四隅には、水平方向に対するロボット１全体の傾きを微調整するための調整用ボルト（図示省略）が取り付けられるボルト取付部２１ｂが形成されている。ボルト取付部２１ｂには、調整用ボルトが螺合するネジ孔が上下方向に貫通するように形成されており、調整用ボルトのネジ孔へのネジ込み量によって、水平方向に対するロボット１の傾きが調整される。   The columnar member 22 is disposed on the front end side of the housing 21. The columnar member 22 is disposed at the center position of the housing 21 in the left-right direction. On the upper end side of the housing 21, a protruding portion 21 a that protrudes upward is formed. The protruding portion 21 a is formed so as to surround the left and right sides and the rear side of the columnar member 22. The upper surface of the protruding portion 21a is formed in a planar shape orthogonal to the vertical direction. In addition, bolt attachment portions 21 b to which adjustment bolts (not shown) for finely adjusting the inclination of the entire robot 1 with respect to the horizontal direction are formed at the four corners at the lower end of the housing 21. A screw hole into which the adjustment bolt is screwed is formed in the bolt mounting portion 21b so as to penetrate in the vertical direction. The inclination of the robot 1 with respect to the horizontal direction depends on the screwing amount of the adjustment bolt into the screw hole. Adjusted.

突出部２１ａの上面側には、図１、図２に示すように、水準器２３が取り付けられている。すなわち、本体部７には、水準器２３が取り付けられている。本形態の水準器２３は、気泡管を有する気泡管水準器である。具体的には、水準器２３は、上下方向から見たときの気泡管の形状が円形状となっているいわゆる目玉水準器（目玉水平器、全方向水準器）であり、上下方向から見たときの気泡管の中心に円形状の基準線が印されている。なお、水準器２３は、水平方向の一方向（たとえば、左右方向）の傾きを確認できる１軸型の気泡管水準器と、水平方向の一方向に直交する方向（たとえば、前後方向）の傾きを確認できる１軸型の気泡管水準器とが組み合わされた２軸型水準器等の目玉水準器以外の気泡管水準器であっても良い。   As shown in FIGS. 1 and 2, a level 23 is attached to the upper surface side of the protruding portion 21a. That is, a level 23 is attached to the main body 7. The level 23 in this embodiment is a bubble tube level having a bubble tube. Specifically, the level 23 is a so-called eyeball level (eyeball level, omnidirectional level) in which the shape of the bubble tube is circular when viewed from above and below, and viewed from above and below. A circular reference line is marked at the center of the bubble tube. The level 23 is a uniaxial bubble tube level that can confirm the inclination in one horizontal direction (for example, the left-right direction), and the inclination in a direction (for example, the front-rear direction) orthogonal to the one horizontal direction. It may be a bubble tube level other than the eye level, such as a two-axis level in combination with a single-axis type bubble level that can be confirmed.

また、ロボット１は、第１アーム部１６および第２アーム部１７を回動させて第１アーム部１６と第２アーム部１７とからなるアーム６の一部を伸縮させるアーム部駆動機構と、第３アーム部１８を回転駆動する第３アーム駆動機構と、ハンド４を回転駆動する第１ハンド駆動機構と、ハンド５を回転駆動する第２ハンド駆動機構とを備えている。   In addition, the robot 1 rotates the first arm unit 16 and the second arm unit 17 to extend and contract a part of the arm 6 composed of the first arm unit 16 and the second arm unit 17; A third arm drive mechanism that rotationally drives the third arm portion 18, a first hand drive mechanism that rotationally drives the hand 4, and a second hand drive mechanism that rotationally drives the hand 5 are provided.

アーム部駆動機構は、図４に示すように、駆動源となるモータ２５と、モータ２５の動力を減速して第１アーム部１６に伝達するための減速機２６と、モータ２５の動力を減速して第２アーム部１７に伝達するための減速機２７とを備えている。モータ２５は、筺体２１の内部に配置されている。減速機２６は、本体部７と第１アーム部１６とを繋ぐ関節部を構成している。減速機２７は、第１アーム部１６と第２アーム部１７とを繋ぐ関節部を構成している。減速機２６、２７は、たとえば、波動歯車装置であるハーモニックドライブ（登録商標）である。上述の特許文献１に記載された水平多関節ロボットと同様に、モータ２５と減速機２６とは、図示を省略するプーリおよびベルトを介して連結され、モータ２５と減速機２７とは、図示を省略するプーリおよびベルトを介して連結されている。   As shown in FIG. 4, the arm unit drive mechanism includes a motor 25 serving as a drive source, a speed reducer 26 for decelerating and transmitting the power of the motor 25 to the first arm unit 16, and decelerating the power of the motor 25. And a speed reducer 27 for transmission to the second arm portion 17. The motor 25 is disposed inside the housing 21. The reduction gear 26 constitutes a joint portion that connects the main body portion 7 and the first arm portion 16. The reduction gear 27 constitutes a joint portion that connects the first arm portion 16 and the second arm portion 17. The reduction gears 26 and 27 are, for example, harmonic drive (registered trademark) which is a wave gear device. Similar to the horizontal articulated robot described in Patent Document 1 described above, the motor 25 and the speed reducer 26 are connected via a pulley and a belt (not shown), and the motor 25 and the speed reducer 27 are not shown. It is connected via an omitted pulley and belt.

第３アーム部駆動機構は、図４に示すように、駆動源となるモータ２８と、モータ２８の動力を減速して第３アーム部１８に伝達するための減速機２９とを備えている。モータ２８は、第２アーム部１７の先端側の内部に配置されている。減速機２９は、第２アーム部１７と第３アーム部１８とを繋ぐ関節部を構成している。減速機２９は、たとえば、ハーモニックドライブ（登録商標）である。モータ２８と減速機２９とは、たとえば、図示を省略する歯車列を介して連結されている。   As shown in FIG. 4, the third arm unit drive mechanism includes a motor 28 serving as a drive source, and a speed reducer 29 for decelerating and transmitting the power of the motor 28 to the third arm unit 18. The motor 28 is disposed inside the distal end side of the second arm portion 17. The speed reducer 29 constitutes a joint portion that connects the second arm portion 17 and the third arm portion 18. The reducer 29 is, for example, a harmonic drive (registered trademark). For example, the motor 28 and the speed reducer 29 are connected via a gear train (not shown).

第１ハンド駆動機構は、図４に示すように、駆動源となるモータ３０と、モータ３０の動力を減速してハンド４に伝達するための減速機３１とを備えている。第２ハンド駆動機構は、第１ハンド駆動機構と同様に、駆動源となるモータ３２と、モータ３２の動力を減速してハンド５に伝達するための減速機３３とを備えている。モータ３０、３２および減速機３１、３３は、第３アーム部１８の内部に配置されている。減速機３１、３３は、たとえば、ハーモニックドライブ（登録商標）である。上述の特許文献１に記載された水平多関節ロボットと同様に、減速機３１は、モータ３０の出力軸に取り付けられ、減速機３３は、モータ３２の出力軸に取り付けられている。また、ハンド４の連結部１９と減速機３１とは、図示を省略するプーリおよびベルトを介して連結され、ハンド５の連結部１９と減速機３３とは、図示を省略するプーリおよびベルトを介して連結されている。   As shown in FIG. 4, the first hand drive mechanism includes a motor 30 as a drive source and a speed reducer 31 for decelerating the power of the motor 30 and transmitting it to the hand 4. Similar to the first hand drive mechanism, the second hand drive mechanism includes a motor 32 as a drive source and a speed reducer 33 for decelerating and transmitting the power of the motor 32 to the hand 5. The motors 30 and 32 and the speed reducers 31 and 33 are disposed inside the third arm portion 18. The reducers 31 and 33 are, for example, harmonic drives (registered trademark). Similar to the horizontal articulated robot described in Patent Document 1 described above, the speed reducer 31 is attached to the output shaft of the motor 30, and the speed reducer 33 is attached to the output shaft of the motor 32. The connecting part 19 of the hand 4 and the speed reducer 31 are connected via a pulley and a belt (not shown), and the connecting part 19 and the speed reducer 33 of the hand 5 are connected via a pulley and a belt (not shown). Are connected.

ロボット１の製造工程では、ハンド４、５とアーム６と本体部７とが連結されてロボット１が動作可能な状態になると、平面度が確保された所定の基準面上にロボット１が設置される。この状態では、水準器２３は、本体部７に取り付けられていない。その後、第２アーム部１７に対する第３アーム部１８の回動中心軸の上下方向（鉛直方向）に対する傾きが調整される。また、水平方向に対するハンド４、５の搭載面２０ａの傾きが調整される。   In the manufacturing process of the robot 1, when the hands 4, 5, the arm 6, and the main body 7 are connected and the robot 1 is in an operable state, the robot 1 is installed on a predetermined reference surface that ensures flatness. The In this state, the level 23 is not attached to the main body portion 7. Thereafter, the inclination of the rotation center axis of the third arm portion 18 with respect to the second arm portion 17 with respect to the vertical direction (vertical direction) is adjusted. Further, the inclination of the mounting surface 20a of the hands 4, 5 with respect to the horizontal direction is adjusted.

具体的には、アーム６がある方向へ伸びている状態、アーム６が他の方向へ伸びている状態、および、アーム６が縮んでいる状態等の様々な状態にロボット１の状態を変えながら、どの状態においても、第２アーム部１７に対する第３アーム部１８の回動中心軸が鉛直方向に対して所定の角度以上傾くことがないように、筺体２１のボルト取付部２１ｂに取り付けられた調整用ボルトによってロボット１全体の傾きを調整することで、第２アーム部１７に対する第３アーム部１８の回動中心軸の鉛直方向に対する傾きが調整される。   Specifically, while changing the state of the robot 1 to various states such as a state where the arm 6 extends in one direction, a state where the arm 6 extends in the other direction, and a state where the arm 6 is contracted. In any state, the rotation center axis of the third arm portion 18 with respect to the second arm portion 17 is attached to the bolt attachment portion 21b of the casing 21 so as not to be inclined more than a predetermined angle with respect to the vertical direction. By adjusting the tilt of the entire robot 1 with the adjusting bolt, the tilt of the rotation center axis of the third arm portion 18 with respect to the second arm portion 17 with respect to the vertical direction is adjusted.

また、様々な状態にロボット１の状態を変えながら、どの状態においても、水平方向に対する搭載面２０ａの傾きが水平方向に対して所定の角度以上傾くことがないように、連結部１９と第３アーム部１８との連結箇所に取り付けられた調整用ボルトによって、水平方向に対する搭載面２０ａの傾きが調整される。なお、上下方向におけるハンド４とハンド５との間隔も調整される。   Further, while changing the state of the robot 1 to various states, in any state, the connecting portion 19 and the third portion are arranged so that the mounting surface 20a is not inclined more than a predetermined angle with respect to the horizontal direction. The inclination of the mounting surface 20a with respect to the horizontal direction is adjusted by an adjusting bolt attached to a connection portion with the arm portion 18. Note that the distance between the hand 4 and the hand 5 in the vertical direction is also adjusted.

これらの調整が終了すると、水準器２３が本体部７に取り付けられる。具体的には、水準器２３の気泡管内の気泡が気泡管に印された基準線の中に収まるように、水準器２３が本体部７に固定される。   When these adjustments are completed, the level 23 is attached to the main body 7. Specifically, the level 23 is fixed to the main body portion 7 so that the bubbles in the bubble tube of the level 23 are within the reference line marked on the bubble tube.

（本形態の主な効果）
以上説明したように、本形態では、第２アーム部１７に対する第３アーム部１８の回動中心軸の鉛直方向に対する傾き、および、水平方向に対するハンド４、５の搭載面２０ａの傾きが調整された後に、水準器２３の気泡管内の気泡が気泡管に印された基準線の中に収まるように、本体部７に水準器２３が取り付けられている。そのため、本形態では、ＥＦＥＭ１０の筺体１４にロボット１を設置する際に、水準器２３の気泡管の中の気泡が基準線の中に収まるようにロボット１を設置することで、ハンド４、５が回動可能に連結される第３アーム部１８の第２アーム部１７に対する回動中心軸の鉛直方向に対する傾きが適切な傾きとなり、かつ、水平方向に対する搭載面２０ａの傾きが適切な傾きとなるように、ロボット１を設置することが可能になる。したがって、本形態では、比較的短時間で容易に、かつ、水平方向へハンド４、５が精度良く動作するようにロボット１を筺体１４に設置することが可能になる。 (Main effects of this form)
As described above, in this embodiment, the inclination of the rotation center axis of the third arm portion 18 with respect to the second arm portion 17 with respect to the vertical direction and the inclination of the mounting surface 20a of the hands 4 and 5 with respect to the horizontal direction are adjusted. After that, the level 23 is attached to the main body portion 7 so that the bubbles in the bubble tube of the level 23 are within the reference line marked on the bubble tube. Therefore, in this embodiment, when the robot 1 is installed on the housing 14 of the EFEM 10, the robot 4 is installed so that the bubbles in the bubble tube of the level 23 are within the reference line. The third arm portion 18 that is rotatably connected to the second arm portion 17 has an appropriate inclination with respect to the vertical direction of the rotation center axis, and the inclination of the mounting surface 20a with respect to the horizontal direction is an appropriate inclination. Thus, the robot 1 can be installed. Therefore, in this embodiment, it is possible to install the robot 1 on the housing 14 so that the hands 4 and 5 can move with high precision in the horizontal direction easily in a relatively short time.

ここで、ハンド４、５やアーム６に水準器２３が取り付けられている場合には、アーム６の伸縮状態に応じて、水準器２３の気泡管の中の気泡の位置が変動しやすくなるため、気泡が基準線の中に収まるようにロボット１を筺体１４に設置しても、設置時のアーム６の伸縮状態によっては、水平方向へハンド４、５が精度良く動作するようにロボット１を筺体１４に設置することができないおそれがある。これに対して、本形態では、水準器２３が本体部７に取り付けられているため、アーム６の伸縮状態が変わっても、水準器２３の気泡管の中の気泡の位置が変動しにくくなる。したがって、本形態では、水準器２３の気泡が基準線の中に収まるようにロボット１を筺体１４に設置することで、設置時のアーム６の伸縮状態にかかわらず、水平方向へハンド４、５が精度良く動作するようにロボット１を筺体１４に設置することが可能になる。   Here, when the level 23 is attached to the hands 4, 5 and the arm 6, the position of the bubbles in the bubble tube of the level 23 tends to fluctuate according to the expansion / contraction state of the arm 6. Even if the robot 1 is installed on the housing 14 so that the bubbles are within the reference line, depending on the extension / contraction state of the arm 6 at the time of installation, the robot 1 can be moved so that the hands 4 and 5 can move in the horizontal direction with high accuracy. There is a possibility that it cannot be installed on the housing 14. On the other hand, in this embodiment, since the level 23 is attached to the main body 7, even if the expansion / contraction state of the arm 6 is changed, the position of the bubbles in the bubble tube of the level 23 is not easily changed. . Therefore, in this embodiment, the robot 1 is installed on the housing 14 so that the bubbles of the level 23 are within the reference line, so that the hands 4, 5 can be moved horizontally regardless of the extension / contraction state of the arm 6 at the time of installation. It is possible to install the robot 1 on the housing 14 so as to operate with high accuracy.

（他の実施の形態）
上述した形態は、本発明の好適な形態の一例ではあるが、これに限定されるものではなく本発明の要旨を変更しない範囲において種々変形実施が可能である。 (Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.

上述した形態では、第２アーム部１７に対する第３アーム部１８の回動中心軸の鉛直方向に対する傾き、および、水平方向に対するハンド４、５の搭載面２０ａの傾きが調整された後に、水準器２３の気泡管内の気泡が気泡管に印された基準線の中に収まるように、本体部７に水準器２３が取り付けられている。この他にもたとえば、第２アーム部１７に対する第３アーム部１８の回動中心軸の鉛直方向に対する傾きが調整された後であって、かつ、水平方向に対する搭載面２０ａの傾きが調整されていない状態で、水準器２３の気泡管内の気泡が気泡管に印された基準線の中に収まるように、本体部７に水準器２３が取り付けられても良い。第２アーム部１７に対する第３アーム部１８の回動中心軸の鉛直方向に対する傾きが調整されていれば、水平方向に対するハンド４、５の傾きを抑制することが可能になるため、この場合であっても、水準器２３の気泡管の中の気泡が基準線の中に収まるようにロボット１を筺体１４に設置することで、水平方向へハンド４、５が精度良く動作するようにロボット１を筺体１４に設置することが可能になる。   In the embodiment described above, after the inclination of the rotation center axis of the third arm portion 18 with respect to the second arm portion 17 with respect to the vertical direction and the inclination of the mounting surface 20a of the hands 4 and 5 with respect to the horizontal direction are adjusted, A level 23 is attached to the main body portion 7 so that the bubbles in the bubble tube 23 fall within the reference line marked on the bubble tube. In addition to this, for example, the inclination of the rotation center axis of the third arm portion 18 with respect to the second arm portion 17 with respect to the vertical direction is adjusted, and the inclination of the mounting surface 20a with respect to the horizontal direction is adjusted. The level 23 may be attached to the main body unit 7 so that the bubbles in the bubble tube of the level 23 are within the reference line marked on the bubble tube in the absence of the level. If the inclination of the rotation center axis of the third arm part 18 with respect to the second arm part 17 with respect to the vertical direction is adjusted, the inclination of the hands 4 and 5 with respect to the horizontal direction can be suppressed. Even if the robot 1 is installed on the housing 14 so that the bubbles in the bubble tube of the level 23 are within the reference line, the robot 1 can move the hands 4 and 5 accurately in the horizontal direction. Can be installed in the housing 14.

上述した形態では、水準器２３は、本体部７に取り付けられている。この他にもたとえば、水準器２３は、アーム６に取り付けられても良いし、ハンド４またはハンド５に取り付けられても良い。また、上述した形態では、水準器２３は、気泡管水準器であるが、水準器２３は、たとえば、レーザ水準器やデジタル水準器等の気泡管水準器以外の水準器であっても良い。   In the form described above, the level 23 is attached to the main body 7. In addition, for example, the level 23 may be attached to the arm 6 or may be attached to the hand 4 or the hand 5. In the above-described form, the level 23 is a bubble tube level, but the level 23 may be a level other than the bubble level, such as a laser level or a digital level.

上述した形態では、本体部７は、上下方向に細長い略直方体状に形成されているが、本体部７は、略円柱状に形成されても良いし、上下方向から見たときの形状が略六角形状や略八角形状となる多角柱状に形成されても良い。また、上述した形態では、第３アーム部１８の先端側に２個のハンド４、５が取り付けられているが、第３アーム部１８の先端側に１個のハンドが取り付けられても良い。また、上述した形態では、アーム６は、第１アーム部１６、第２アーム部１７および第３アーム部１８の３個のアーム部によって構成されているが、アーム６は、２個のアーム部によって構成されても良いし、４個以上のアーム部によって構成されても良い。   In the embodiment described above, the main body portion 7 is formed in a substantially rectangular parallelepiped shape that is elongated in the vertical direction. However, the main body portion 7 may be formed in a substantially cylindrical shape, and the shape when viewed from the vertical direction is approximately. You may form in the polygonal column shape used as a hexagon shape or a substantially octagon shape. In the embodiment described above, the two hands 4 and 5 are attached to the distal end side of the third arm portion 18, but one hand may be attached to the distal end side of the third arm portion 18. Further, in the above-described form, the arm 6 is constituted by the three arm portions of the first arm portion 16, the second arm portion 17, and the third arm portion 18. However, the arm 6 has two arm portions. It may be comprised by 4 or more arm parts.

上述した形態では、半導体製造システム９において、半導体ウエハ処理装置１１は、ＥＦＥＭ１０の後ろ側に配置されている。この他にもたとえば、半導体ウエハ処理装置１１は、ＥＦＥＭ１０の右側、左側または左右の両側に配置されても良い。たとえば、図３の二点鎖線で示すように、ＥＦＥＭ１０の右側に半導体ウエハ処理装置１１が配置されても良い。また、上述した形態では、ロボット１は、ウエハ２を搬送するためのロボットであるが、ロボット１は、液晶用のガラス基板等の他の搬送対象物を搬送するロボットであっても良い。   In the embodiment described above, in the semiconductor manufacturing system 9, the semiconductor wafer processing apparatus 11 is disposed behind the EFEM 10. In addition, for example, the semiconductor wafer processing apparatus 11 may be disposed on the right side, the left side, or the left and right sides of the EFEM 10. For example, the semiconductor wafer processing apparatus 11 may be disposed on the right side of the EFEM 10 as indicated by a two-dot chain line in FIG. In the embodiment described above, the robot 1 is a robot for transporting the wafer 2, but the robot 1 may be a robot for transporting other transport objects such as a glass substrate for liquid crystal.

１ ロボット（水平多関節ロボット）
２ ウエハ（半導体ウエハ、搬送対象物）
４、５ ハンド
６ アーム
７ 本体部
１７ 第２アーム部（第２ハンド側アーム部）
１８ 第３アーム部（ハンド側アーム部）
２０ａ 搭載面
２３ 水準器 1 Robot (Horizontal articulated robot)
2 Wafer (semiconductor wafer, transfer object)
4, 5 hand 6 arm 7 body part 17 second arm part (second hand side arm part)
18 Third arm (hand side arm)
20a Mounting surface 23 Level

Claims (5)

水平方向にアームが動作する水平多関節ロボットにおいて、
搬送対象物が搭載されるハンドと、前記ハンドがその先端側に回動可能に連結されるハンド側アーム部と前記ハンド側アーム部の基端側がその先端側に回動可能に連結される第２ハンド側アーム部との少なくとも２個のアーム部を有する前記アームと、前記アームの基端側が回動可能に連結される本体部とを備えるとともに、
少なくとも前記第２ハンド側アーム部に対する前記ハンド側アーム部の回動中心軸の鉛直方向に対する傾きが調整された後に、前記ハンド、前記アームまたは前記本体部に取り付けられた水準器を備えることを特徴とする水平多関節ロボット。 In a horizontal articulated robot whose arm moves in the horizontal direction,
A hand on which the object to be transported is mounted, a hand side arm part to which the hand is rotatably connected to the tip side thereof, and a base end side of the hand side arm part to which the base end side is rotatably connected to the tip side. The arm having at least two arm portions with a two-hand side arm portion, and a main body portion to which a base end side of the arm is rotatably connected,
And a level attached to the hand, the arm, or the main body after at least an inclination of a rotation central axis of the hand side arm with respect to the second hand side arm is adjusted relative to a vertical direction. A horizontal articulated robot. 前記ハンドには、前記搬送対象物が搭載される搭載面が形成され、
前記水準器は、水平方向に対する前記搭載面の傾きが調整された後に取り付けられていることを特徴とする請求項１記載の水平多関節ロボット。 A mounting surface on which the transport object is mounted is formed on the hand,
The horizontal articulated robot according to claim 1, wherein the level is attached after an inclination of the mounting surface with respect to a horizontal direction is adjusted. 前記水準器は、気泡管を有する気泡管水準器であり、少なくとも前記第２ハンド側アーム部に対する前記ハンド側アーム部の回動中心軸の鉛直方向に対する傾きが調整された後に、前記気泡管内の気泡が前記気泡管に印された基準線の中に収まるように取り付けられていることを特徴とする請求項１または２記載の水平多関節ロボット。   The bubble level is a bubble tube level having a bubble tube, and at least after the inclination of the rotation center axis of the hand side arm portion with respect to the second hand side arm portion with respect to the vertical direction is adjusted, The horizontal articulated robot according to claim 1 or 2, wherein bubbles are attached so as to be within a reference line marked on the bubble tube. 前記水準器は、前記本体部に取り付けられていることを特徴とする請求項１から３のいずれか記載の水平多関節ロボット。   The horizontal articulated robot according to any one of claims 1 to 3, wherein the level is attached to the main body. 搬送対象物が搭載されるハンドと、前記ハンドがその先端側に回動可能に連結されるハンド側アーム部と前記ハンド側アーム部の基端側がその先端側に回動可能に連結される第２ハンド側アーム部との少なくとも２個のアーム部を有するアームと、前記アームの基端側が回動可能に連結される本体部と、前記ハンド、前記アームまたは前記本体部に取り付けられる水準器とを備え、水平方向に前記アームが動作する水平多関節ロボットの製造方法であって、
少なくとも前記第２ハンド側アーム部に対する前記ハンド側アーム部の回動中心軸の鉛直方向に対する傾きを調整した後に、前記水準器を取り付けることを特徴とする水平多関節ロボットの製造方法。 A hand on which the object to be transported is mounted, a hand side arm part to which the hand is rotatably connected to the tip side thereof, and a base end side of the hand side arm part to which the base end side is rotatably connected to the tip side. An arm having at least two arm parts with a two-hand side arm part, a main body part rotatably connected to a proximal end side of the arm, and a level attached to the hand, the arm or the main body part A method for manufacturing a horizontal articulated robot in which the arm moves in a horizontal direction,
A method for manufacturing a horizontal articulated robot, comprising: attaching the level after adjusting an inclination of a rotation center axis of the hand side arm portion with respect to a vertical direction at least with respect to the second hand side arm portion.
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