JP2015020256A - Manufacturing method of component and polishing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical element and a polishing device that can achieve shape accuracy with high accuracy with an inexpensive configuration.SOLUTION: A work piece 9 is held so that a sphere core of a processed surface 9a of the work piece 9 is positioned on a supporting member 6; and with the sphere core of the processed surface 9a on a supporting member being positioned at a sphere core O of a processing surface of a polishing tool 8, the supporting member 6 is moved so that the work piece 9 moves on the polishing tool 8 to polish the work piece 9.

Description

  The present invention relates to a method for manufacturing a part such as a spherical lens used in an optical apparatus or the like, and a polishing apparatus.

Polishing a spherical lens, which is an optical element used in optical equipment, supplies polishing slurry to a polishing tool having a spherical working surface equivalent to the spherical surface, and pressurizes and rotates the workpiece to the polishing tool. And by swinging motion. The rocking motion is performed by matching the center of curvature of the workpiece surface and the center of curvature of the polishing tool surface, and by this motion, the surface shape of the polishing tool is transferred to the optical element to obtain the desired optical element shape. be able to.
As a polishing apparatus for polishing a spherical lens, Patent Document 1 describes a polishing apparatus that polishes a polishing dish by swinging the polishing dish so that the pressing direction is directed toward the spherical core of the polishing dish. Patent Document 2 includes a linear motion shaft using a linear guide. By controlling each shaft, the center of curvature of the workpiece surface and the center of curvature of the polishing tool surface are made to coincide with each other. A device for realizing movement is described.

Japanese Examined Patent Publication No. 6-65460 Japanese Patent No. 4347374

  Each of the polishing apparatuses described in Patent Document 1 and Patent Document 2 swings a polishing dish and has a large distance from the spherical core. For this reason, the swing range is large, and in order to realize a highly accurate swing motion, the device rigidity and motion accuracy must be improved, resulting in an increase in device cost. When trying to reduce the polishing equipment cost, the spherical core error increases due to the reduction in equipment rigidity and motion accuracy, the contact pressure distribution between the workpiece surface and the polishing tool surface becomes non-uniform, and the desired shape accuracy is obtained. There is no problem.

  A method for manufacturing a component according to the present invention is a method for manufacturing a component in which a workpiece is moved with respect to a polishing tool to polish the workpiece and the component is manufactured. The support member is held in a state where the workpiece is held such that the spherical core is positioned on the support member, and the spherical core of the processing surface on the support member is positioned on the spherical core of the processing surface of the polishing tool. Is attached to an articulated arm having a plurality of joints formed by connecting the arms, and by driving the joint, the support member is moved so that the workpiece moves on the polishing tool. The workpiece is polished.

  Further, the polishing apparatus of the present invention is a polishing apparatus that polishes the workpiece by moving the workpiece with respect to a polishing tool, the holding member for holding the workpiece, and the holding member A support member that comes into contact with the arm, and a multi-joint arm having a plurality of joints formed by connecting the arms to move the support member, and driving the plurality of joints of the multi-joint arm, respectively. It is characterized by moving.

  According to the present invention, the workpiece and the polishing tool can be moved (swinged) with relatively high accuracy, so that high-precision processing is possible, the swinging range can be reduced, and the apparatus cost can be reduced. be able to.

It is a figure which shows 1st embodiment and 2nd embodiment of this invention. It is a figure which shows 1st embodiment of this invention. It is a figure which shows 3rd embodiment of this invention. It is a figure which shows the shape error in Example 1 of this invention. It is a figure which shows the shape error in Example 2 of this invention. It is a figure explaining Example 3 of this invention.

(First embodiment)
A first embodiment, which is an embodiment relating to a method for manufacturing a component of the present invention, will be described. FIG. 1 is a diagram showing a first embodiment. FIG. 1 shows a schematic view of a polishing apparatus in the first embodiment. The polishing apparatus used in the component manufacturing method of the present embodiment includes a polishing tool part A, a workpiece holding part B, and a moving mechanism part C. In FIG. 1 (a),
The polishing tool part A may include a polishing tool 8, and the polishing tool 8 may be rotatable around the tool center axis S by a tool rotation mechanism (not shown). As the polishing tool, a polishing tool known in this field can be used. For example, a laminate of urethane sheets, a pitch, or the like can be used.

  The workpiece holding unit B includes a holding member 7 for holding the workpiece 9 and a support member 6. The holding member 7 holds the workpiece 9 such that the optical axis passing through the spherical core O of the processing surface 9 a of the workpiece 9 is positioned on the central axis of the holding member 7. The spherical core of the workpiece 1 may be the spherical core of the workpiece 1 before polishing, or may be a spherical core in a shape (target shape) to be obtained by polishing. It is preferable that it is a spherical core in the shape (target shape) to be obtained.

The moving mechanism C is a moving mechanism for moving the support member,
The support member is moved so that the workpiece moves on the polishing tool in a state where the spherical core of the processing surface on the support member is positioned on the spherical core of the processing surface of the polishing tool.

Specifically, the movement of the support member
[1] Positioning the support member 6 of the workpiece holding portion B so that the spherical core of the processed surface 9a of the workpiece 9 is positioned on the spherical core O of the processed surface 8a of the polishing tool 8.

    [2] The workpiece 1 is moved on the polishing tool 8 with the support member as the swing axis and the work surface 9a of the work 9 and the spherical core O of the work surface 8a of the polishing tool 8 as the center of swing. (Oscillating motion). (For example, the workpiece 9 is reciprocated in the radial direction of the polishing tool 8 (R direction (oscillating direction)).

  Is to do. In the present embodiment, an example in which a multi-joint arm is used as the movement mechanism unit will be described. That is, the support member is attached to the articulated arm. A multi-joint arm connects a plurality of arms, has a plurality of connected portions (joints), and moves each support member by driving each joint. In FIG. 1A, the arm 2 is attached to a frame or the like via the arm joint 1. The arm 4 is connected to the arm 2 via the arm joint 3, and the support member 6 is connected to the arm 4 via the arm joint 5. The arm joint 1, the arm joint 3, and the arm joint 5 are driven by a known technique such as a harmonic drive (registered trademark) and a stepping motor, for example. By controlling the movements of the arm joint 1, the arm joint 3, and the arm joint 5, the spherical core (curvature radius) of the work surface 9a of the workpiece 9 and the spherical core (curvature radius) of the work surface 8a of the polishing tool 8 are controlled. The support member can be moved (oscillated) in a state in which the two are matched. Using a multi-joint arm allows the workpiece to be rocked in a compact manner while positioning the spherical core of the work surface with the spherical core of the work surface of the polishing tool regardless of the unevenness of the work piece or the radius of curvature. Is possible. Further, since the three-joint arm can be composed of three motors, three harmonic drives (registered trademark), and three arms, the cost of the polishing apparatus can be reduced.

  However, a slight sphere core error always occurs in the swing motion. (Spherical core error refers to the distance between the center of curvature of the workpiece surface and the center of curvature of the polishing tool surface during rocking motion.) The contact pressure between the workpiece surface and the polishing tool surface due to this spherical core error. In some cases, the distribution is non-uniform (a piece of contact where pressure is concentrated on a part occurs), and a desired shape accuracy may not be obtained. One-sided contact due to this spherical core error is prevented by making the connecting portion of the holding member 7 and the support member 6 tiltable. Thereby, even when the spherical core error is large, the difference in pressure applied from the polishing tool to the workpiece can be reduced, and desired shape accuracy can be obtained.

  Next, the connecting portion between the holding member 7 and the support member 6 will be described in detail. FIG.1 (b) shows the schematic about an example of a connection part.

  In FIG. 1B, reference numeral 7 denotes a holding member for holding the workpiece, and holds the workpiece 9 via the elastic sheet 10. The workpiece before processing is a lens material that becomes an optical member by processing, a mirror material, a resin or metal blank that becomes a mold for forming an optical member such as a lens or mirror by processing, or an optical member that is processed by processing. A blank serving as a master is preferable. The part that is the workpiece after processing is preferably an optical member such as a lens or a mirror, a mold for forming an optical member such as a lens or a mirror, or a master of the optical member.

  In order to suppress slippage between the workpiece 9 and the elastic sheet 10, it is preferable to use the elastic sheet 10 having a large surface friction coefficient. Further, in order to suppress slippage between the workpiece 9 and the elastic sheet 10, the workpiece 9 may be vacuum-sucked to the holding member. Reference numeral 16 denotes a connecting portion of the support member 6, which may be the same member as the support member 6 or a separate member. The distal end portion of the connecting portion 16 has a concave spherical surface portion 161 formed of a concave spherical surface.

  Further, when the work piece 9 is vacuum-adsorbed to the holding member 7, an exhaust passage 162 may be formed in the connecting portion 16.

  The holding member 7 is connected to the support member 6 via the connecting portion 16. Moreover, the convex part 17 is formed in the center part of the holding member 7, and the sliding member 14 is arrange | positioned so that the convex part may be enclosed. The sliding member 14 abuts on the concave spherical surface portion 161 of the connecting portion 16, and the holding member 7 is connected to the support member 6. For the sliding member 14, for example, synthetic resin, rubber, or the like can be used.

  Further, when the workpiece 9 is vacuum-adsorbed to the holding member 7, an exhaust passage 172 may be formed on the holding member 7. An outer cylinder 11 is attached to the outer periphery of the holding member 7. By accommodating the workpiece 9 inside the outer cylinder 11, the workpiece 9 can be supported at an appropriate position of the holding member 7 without the workpiece 9 jumping out of the holding member. Moreover, it can restrain with respect to a rocking | fluctuation direction (R direction).

  As described above, by controlling the arm joint 1, the arm joint 3, and the arm joint 5 shown in FIG. 1A, the spherical core (curvature radius) of the work surface 9a of the work 9 and the polishing tool 8 are controlled. The support member 6 is swung in a state in which the spherical core (curvature radius) of the processed surface 8a is matched. The swinging here means that the support member 6 is moved in a state where the spherical core (curvature radius) of the work surface 9a of the workpiece 9 and the spherical core (curvature radius) of the work surface 8a of the polishing tool 8 are matched. (Reciprocating motion with O being the center of oscillation). And it means reciprocating the workpiece in the radial direction (R direction) of the polishing tool. If there is no spherical core error, the center axis of the holding member 7 and the center axis T of the support member 6 are oscillated. The sliding member 14 has a mechanism that slides on the spherical surface of the concave spherical portion 161 of the connecting portion 16, and the central axis of the holding member 7 (workpiece 9) is the center of curvature P 1 of the concave spherical portion 161 of the connecting portion 16. It can be tilted with respect to the central axis of the support member 6 as a fulcrum. Further, the holding member 7 is rotatable with respect to the support member 6. For this reason, when a ball center error occurs during the swinging motion, the central axis of the holding member 7 freely tilts from the central axis T of the support member 6. Further, the holding member 7 rotates freely with respect to the support member 6. Thereby, it becomes possible to follow the processing surface of the polishing tool 8 without causing uneven pressure on the surface of the workpiece 1. Further, it is possible to reduce the spherical core error (change in the distance between the center of curvature of the workpiece surface and the center of curvature of the polishing tool surface during the swinging motion). Further, the angle θ formed by the center of curvature P1 of the concave spherical surface portion 161 of the connecting portion 16, the line segment SP1 connecting the sliding member 14 and the contact point S of the connecting portion 16, and the optical axis (center axis) of the workpiece 9 is It is desirable to satisfy the following formula (1).

  Here, μ is a dynamic friction coefficient between the workpiece 9 and the polishing tool 8 during the polishing process. Further, when Expression (1) is represented by the diameter d of the sliding member 14 and the radius of curvature r of the concave spherical surface portion 161 of the connecting portion 16, the following Expression (2) is obtained.

  Θ, R, or d that satisfies Expression (1) or Expression (2) is determined, and the holding member 7, the connecting portion 16, and the sliding member 14 are produced. Thus, stable polishing can be performed without the sliding member 14 falling off from the concave spherical surface portion 161 of the connecting portion 16 due to the frictional force generated between the workpiece 9 and the polishing tool 8 during the polishing.

  With such a configuration, when there is no spherical core error, the center axis of the holding member (the optical axis (center axis) of the workpiece 9) is arranged so as to be coaxial with the center axis T of the support member 6. Even when a spherical core error occurs, the center axis of the holding member freely tilts with respect to the center axis T of the support member, and the holding member rotates freely with respect to the support member. The machining can be performed with almost no generation. Therefore, desired shape accuracy can be obtained. Here, “per piece” means that the force that the workpiece 9 receives from the polishing tool 8 during processing is not uniform, that is, the force received from the polishing tool 8 concentrates on a part of the workpiece.

It is desirable that the distance D ₁ between the center of curvature P ₁ of the concave spherical surface portion 161 of the connecting portion 16 and the center of the workpiece surface 9 a of the workpiece 9 is small. If D ₁ is large, biased frictional force generated between the workpiece 9 and the polishing tool 8 occurs during polishing. The moment of the retaining member 7 which occurs around the center of curvature P ₁ of the concave spherical portion 161 of the connecting portion 16 becomes large, would occur is partial contact the workpiece 9 can not perform high-precision processing. However, since the distance D ₁ between the center of curvature P ₁ of the concave spherical surface portion 161 of the connecting portion 16 and the center of the workpiece 9 can be further reduced by adopting the configuration of the present embodiment, Even if the center wall thickness is large, high-precision processing can be performed.

The holding member 7 may be rotated by rotating the support member 6 around the central axis T by the work rotation mechanism 61. In this case, as shown in FIG. 2, the support member 6 has a rotation transmission member 62 and a workpiece rotation mechanism 61 on the outer peripheral portion, and one end of the rotation transmission member 62 is connected to the workpiece rotation mechanism 61. . Also, the other end is connected to the holding member 7. Thereby, the rotation by the work rotation mechanism 61 is transmitted to the holding member 7. The rotation transmitting member 62 and the work rotating mechanism 61 are preferably provided between the holding member 7 and the arm joint 5 in FIG. For the rotation transmitting member 62, for example, an elastic body can be used. The material of the elastic body is preferably a rubber material or a foamed urethane material. The shape is preferably a columnar shape, a cylindrical shape, or a bellows shape, but may be a coil-like or bellows-like metal material such as a coil spring. The moment rigidity (load Nmm necessary for tilting ₁ deg) generated around the center of curvature P1 of the concave spherical surface portion 161 of the connecting portion 16 is preferably 15 [Nmm / deg] or less. In order to make the moment rigidity 15 [Nmm / deg] or less, it is necessary to examine the shape or physical properties of the rotation transmitting member 62. Since the rotation transmission member 62 is a member that transmits torque from the workpiece rotation mechanism 61 to the holding member 7, the shape or physical property is changed within a range in which the rotation transmission member 62 is not broken by a stress caused by a torsional moment.

  By using an elastic body for the rotation transmitting member 62, the moment stiffness about any axis that intersects the rotation axis of the workpiece 9 can be reduced. Therefore, even when the spherical center error of the polishing apparatus is relatively large, the force with which the workpiece 9 tries to become the polishing tool 8 is not hindered. Therefore, the pressure applied from the polishing tool to the workpiece surface is uniform, and excellent shape accuracy can be obtained. In addition, since the rotation speed of the workpiece 9 is mechanically controlled by the rotation transmission member 62, it is possible to control the relative speed of the surface of the workpiece 9 with respect to the surface of the polishing tool 8, and more excellent shape accuracy is achieved. can get. In addition, since the rotation speed of the workpiece 9 is mechanically controlled by the rotation transmission member 62, it is possible to control the relative speed of the surface of the workpiece 9 with respect to the surface of the polishing tool 8, and more excellent shape accuracy is achieved. can get. A change in the relative speed of the workpiece surface with respect to the polishing tool surface due to wear of the polishing tool surface or wear of the connecting portion of the holding member 7 and the support member 6 does not occur over time. Therefore, the removal speed of the surface of the workpiece is stabilized, and the processed part can have high shape accuracy.

  Further, the polishing tool 8 may be rotated by a tool rotating mechanism (not shown). In order to make the relative speed of the workpiece surface relative to the polishing tool surface uniform, it is desirable to set the rotation speed of the workpiece to be the same as the rotation speed of the polishing tool.

  Furthermore, a pressing mechanism that presses (presses) the workpiece 9 against the polishing tool 8 by moving the support member 6 in a direction parallel to the central axis T may be provided.

(Second embodiment)
Next, a second embodiment of the present invention will be described. The holding member 7 and the connecting portion 16 that are different from the first embodiment will be described. FIG. 1C shows a second embodiment of the holding member 7 and the connecting portion 16.

The holding member 7 has a concave portion 19 at the center, and the tip of the connecting portion 16 is a convex spherical portion 162. The concave portion 19 of the holding member 7 is supported by the convex spherical portion 162 of the connecting portion 16. The concave spherical surface portion 19 of the holding member 7 and the convex spherical surface portion 162 of the connecting portion 16 can be freely tilted. Further, the workpiece 9 is rotatable center of curvature P ₂ of the convex spherical surface portion 162 of the connecting portion 16 as a fulcrum. Therefore, even when a spherical core error occurs during the swinging motion, it becomes possible to follow the polishing tool without causing a bias in the applied pressure on the surface of the workpiece 1.

  As shown in FIG. 1 (c), the concave shape of the holding member 7 in contact with the convex spherical portion of the connecting portion 16 may be a spherical shape.

  Moreover, as shown in FIG.1 (d), the concave shape of the holding member 7 which contact | connects the convex spherical surface part of the connection part 16 may be a taper shape.

Furthermore, it is desirable that the distance D ₂ between the center of curvature P ₂ of the convex spherical portion 162 of the connecting portion 16 and the center of the surface of the workpiece 9 is small. The spherical surface portion of the connecting portion 16 is more concave than the convex spherical surface portion (this embodiment) in the concave spherical surface portion (first embodiment) and on the surface of the workpiece 1 and the center of curvature P of the spherical surface portion of the connecting portion 16. The distance D from the center can be reduced. Therefore, it is more preferable to use a concave spherical surface portion (configuration of the first embodiment) as the spherical surface portion of the connecting portion 16 particularly when the workpiece 1 is thick in shape.

(Third embodiment)
Next, a third embodiment of the present invention will be described. The third embodiment relates to the conveyance of a workpiece. FIG. 3 is a diagram for explaining the third embodiment. Parts having the same configurations as those in FIG. 1 and FIG. In FIG. 3A, reference numeral 23 denotes a spring, which is connected to the other end different from the concave spherical surface formed at the end of the support member 6. The support member 6 is configured to be movable in a direction parallel to the central axis (linear movement direction) using the bearing 22 as a guide. The spring 23 is given a displacement in the compression direction of ΔL with respect to the natural length L ₀ . Here, ΔL needs to be set smaller than ΔL ′ described later. The first member 20 fixed to the holding member 7 is pressed against the second member 21 by the elastic force of the compressed spring 23, and the normal force N that the first member 20 receives from the second member 21. And the elastic force F of the spring 23 is balanced. Therefore, the tilting movement of the holding member 7 using the center of curvature of the spherical surface portion of the support member 6 as a fulcrum is restrained, and the posture of the holding member 7 is stabilized, so that the workpiece can be stably and automatically conveyed. Further, at the time of polishing, as shown in FIG. 3B, the polishing tool 8 pushes the workpiece 9 ΔL ′ in the compression direction of the spring 23, so that the workpiece 9 is desired by the elastic force F ′ of the spring 23. It is the structure which gives the applied pressure F '. Therefore, at the time of polishing, the first member 20 is not in contact with the second member 21, and the holding member 7 can be tilted with the center of curvature of the spherical surface of the support member 6 as a fulcrum.

  By the polishing method described above, the desired workpiece shape accuracy can be obtained even when the spherical core error is large during polishing, and the posture of the workpiece (part) holder is stabilized during automatic conveyance. The workpiece (parts) can be conveyed stably.

  In addition, when the first member 20 and the second member 21 are in a non-contact state, a mechanism for transmitting the rotation of the second member 21 to the first member 20 (for example, a well-known technique such as providing a groove). It is provided on the first member 20 or the second member 21. And it is also possible to process the workpiece 9 while rotating the holding member 7 by rotating the second member 21 by the work rotation mechanism.

  In Example 1, the optical member was processed using the first embodiment. The optical member was a general optical glass having an outer diameter of Φ25 [mm], a curvature radius R = 28 [mm] convex shape, and a center thickness = 2 [mm].

In the polishing process, the arm joint 1, the arm joint 3 and the arm joint 5 in FIG. 1A are controlled so that the curvature radius of the surface of the workpiece 9 and the curvature radius of the surface of the polishing tool 8 coincide with each other. We carried out by doing exercise. The oscillating motion was performed in a period of one reciprocation 8 [s] in the range where the inclination angle of the central axis of the workpiece 9 with respect to the central axis of the polishing tool 8 was 20 to 28 [deg]. In addition, the spherical core error at the time of the rocking motion in the polishing process of this example was 180 [μm]. The material of the parts constituting the holding portion in FIG. 1B is an elastic body in which the elastic sheet 10 has a rubber hardness Asker A scale 30 or so. Further, the outer cylinder 11 is made of synthetic resin, the holding member 7 is made of stainless steel, the sliding member 14 is made of synthetic resin, and the support member 6 is made of stainless steel. Mechanical grease was applied to the contact portion between the sliding member 14 and the supporting member 6 for the purpose of improving sliding properties and wear resistance. In FIG. 1B, a line segment connecting the center of curvature P ₁ of the spherical surface portion of the support member 6, the contact point S of the sliding member 14 and the support member 6 is SP _1, and the angle θ formed by the central axis of the workpiece 9 is It was set to 41.8 [deg]. In addition, the diameter d of the sliding member 14 is 8 [mm], and the spherical surface portion 161 of the support member 6 is r = 6 [mm], so that the expressions (1) and (2) are satisfied. Here, the coefficient of dynamic friction during polishing was assumed to be μ = 0.9. Further, in FIG. 1B, the distance D ₁ = 2.3 [mm] between the center of curvature P ₁ of the spherical portion 161 of the support member 6 and the center of the surface of the workpiece 9 is set. As the polishing tool 8 in FIG. 1A, a tool base having a foamed polyurethane attached thereto was used. As the polishing liquid, a slurry in which a cerium oxide abrasive was added to water was used. In the polishing process, the rotational speed of the polishing tool 8 was 1800 [rpm], the rotational speed of the workpiece 9 was 1800 [rpm], and the processing surface pressure was 26 [kPa].

  FIG. 4 shows the shape error of a part (workpiece after processing) when polishing is performed with the above configuration and conditions. The PV of the shape error was 100 [nm] or less, and the desired shape accuracy was obtained. As described above, according to the polishing method of the present invention, even when the sphere core error is relatively large, the contact pressure distribution between the workpiece surface and the polishing tool surface is uniform, and a desired part shape accuracy is obtained.

  In Example 2, the optical member was processed using the second embodiment. The optical member was a general optical glass having an outer diameter of Φ18 [mm], a radius of curvature R = 16 [mm], and a central thickness = 1 [mm].

In the polishing process, similarly to the first embodiment, by controlling the arm joint 1, the arm joint 3, and the arm joint 5 in FIG. 1A, the curvature radius of the surface of the workpiece 9 and the curvature radius of the surface of the polishing tool 8 are set. It was carried out by performing a rocking motion in a matched state. The oscillating motion was performed in a cycle of one reciprocation 8 [s] in the range where the inclination angle of the workpiece 9 rotation axis is 27 to 37 [deg] with respect to the rotation axis of the polishing tool 8. In addition, the spherical core error at the time of the rocking motion in the polishing process of this example was 150 [μm]. The material of the parts constituting the holding portion in FIG. 1C is such that the elastic sheet 10 is about a rubber hardness Asker A scale 30, the outer cylinder 11 is a synthetic resin, and the holding member 7 and the supporting member 6 are stainless steel. The spherical portion of the support member 6 was tempered and tempered to improve wear resistance. Mechanical grease was applied to the contact portion between the holding member 7 and the support member 6 for the purpose of improving slidability and wear resistance. Further, the distance D ₂ = 8.5 [mm] between the center of curvature P ₂ of the convex spherical surface portion of the support member 6 and the center of the surface of the workpiece 9 was set. The polishing tool 8 in FIG. 1A has the same configuration as that of Example 1. A polishing liquid having the same structure as in Example 1 was used. In the polishing process, the rotational speed of the polishing tool 8 was 2400 [rpm], the rotational speed of the workpiece 9 was 2400 [rpm], and the processing surface pressure was 26 [kPa].

  FIG. 5 shows the shape error of a part (workpiece after processing) when polishing is performed with the above configuration and conditions. The PV of the shape error was 100 [nm] or less, and the desired shape accuracy was obtained. As described above, according to the polishing method of the present invention, even when the spherical core error is relatively large, the contact pressure distribution between the workpiece surface and the polishing tool surface becomes uniform, and a desired part shape accuracy can be obtained.

In Example 3, the same processing as in Example 2 was performed, and the automatic conveyance shown in the third embodiment was performed. As shown in FIG. 6A, the automatic conveyance is performed by raising the workpiece 9 on the mounting table 25 by the cylinder 24 and inserting and sucking the workpiece 9 on the outer cylinder 11 of the holding member 7. Carried. At this time, the holding member 7 uses the configuration shown in FIG. 3A, and the spring 23 uses a coil spring having a spring constant k = 1.77 [N / mm] and a natural length L ₀ = 35 [mm]. A configuration in which a displacement in the compression direction of ΔL = 2 [mm] was given. Since the first member 20 is pressed against the second member 21 by the force of the elastic force F = 3.54 [N] of the spring 23, the holding member 7 has a center of curvature of the spherical surface of the support member 6 as a fulcrum. Tilt was restrained. As a result, the posture of the holding member 7 is stabilized, and the workpiece 9 can be automatically and stably conveyed.

Next, the workpiece 9 held by the holding member 7 in FIG. 6A was transported by the arm portion and pressed against the polishing tool 8 to perform polishing as shown in FIG. 6B. The processing conditions in the polishing were the same as in Example 2. Further, in order to obtain a processing surface pressure of 26 [kPa], the displacement in the compression direction ΔL ′ = 3.9 [mm] with respect to the natural length L ₀ of the spring 23 in FIG. At the time of polishing, as shown in FIG. 3B, the first member 20 is not in contact with the second member 21, and the holding member 7 can be tilted with the center of curvature of the spherical surface of the support member 6 as a fulcrum. became. As a result of carrying out automatic conveyance and polishing processing of 50 workpieces with the above configuration, conveyance without defective conveyance was realized and desired shape accuracy was obtained.

1 Arm joint 1
2 Arm 1
3 Arm joint 2
4 Arm 2
5 Arm joint 3
6 Support Member 7 Holding Member 8 Polishing Tool 9 Workpiece 10 Elastic Sheet 11 Outer Tube 12 Holding Part 13 Support Member 14 Sliding Member

Claims (14)

A method of manufacturing a component for manufacturing a component by moving the workpiece with respect to a polishing tool and polishing the workpiece,
The workpiece is held so that the spherical core of the workpiece surface of the workpiece is positioned on the support member, and the spherical core of the workpiece surface on the support member is used as the spherical core of the machining surface of the polishing tool. In this state, the support member is attached to a multi-joint arm having a plurality of joints formed by connecting the arms to each other, and the workpiece is moved on the polishing tool by driving the joint. A method of manufacturing a part, wherein the workpiece is polished by moving the support member.   The workpiece is brought into contact with a concave spherical surface formed at the tip of the support member and a sliding member at the center of the holding member that holds the workpiece, and the holding member is brought into contact with the supporting member. 2. The method of manufacturing a component according to claim 1, wherein the component is held in a tiltable manner.   The workpiece is brought into contact with a convex spherical portion formed at the tip of the support member and a concave portion at the center of the holding member that holds the workpiece, and the holding member is moved to the support member. 2. The method of manufacturing a component according to claim 1, wherein the component is held in a tiltable manner.   The method for manufacturing a component according to claim 3, wherein the concave portion has a spherical shape.   The method for manufacturing a component according to claim 3, wherein the concave portion has a tapered shape.   The rotation transmission member is connected to the holding member, and the workpiece is rotated by transmitting rotation from a workpiece rotation mechanism to the holding member by the rotation transmission member. A method for manufacturing a component according to item 1.   The first member is connected to the holding member, and the second member is brought into contact with the first member, thereby restraining the inclination of the holding member with respect to the support member. The manufacturing method of the components of any one of thru | or 6.   The rotation transmission member is connected to the second member, and the workpiece is rotated by transmitting rotation from a workpiece rotation mechanism to the holding member by the rotation transmission member. A manufacturing method for parts.   9. The method of manufacturing a component according to claim 1, wherein the component manufactured by polishing is an optical member, a mold for forming the optical member, or a master of the optical member. A polishing apparatus for polishing a workpiece by moving the workpiece relative to a polishing tool,
A holding member for holding the workpiece;
A support member in contact with the holding member;
An articulated arm having a plurality of joints formed by connecting the arm and the arm for moving the support member;
A polishing apparatus, wherein each of the plurality of joints of the multi-joint arm is driven to move the support member.   11. The polishing apparatus according to claim 10, wherein the holding member and the support member are brought into contact with each other by a sliding member at a center portion of the holding member and a concave spherical surface portion at a distal end portion of the support member.   11. The polishing according to claim 10, wherein the contact between the holding member and the support member is performed by a concave shape portion at a center portion of the holding member and a convex spherical portion formed at a tip end of the support member. apparatus.   The polishing apparatus according to claim 12, wherein the concave portion has a spherical shape.   The polishing apparatus according to claim 12, wherein the concave portion has a tapered shape.

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