JP2014178286A - Water vapor amount-measuring device, and water vapor amount-measuring method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a water vapor amount-measuring device and a water vapor amount-measuring method, in which mounting and replacing of a measuring unit (humidity sensing portion) is easy and a water vapor amount can be inexpensively and easily measured with sufficient accuracy under a high temperature environment and even under an environment where a dirt, an adhesion of a droplet, and dew condensation of water vapor to the measuring unit (humidity sensing portion) may occur.SOLUTION: A water vapor amount-measuring device includes: a columnar humidity sensing portion 1 composed of porous materials; a fixing part 2 for fixing one end 1a in a longitudinal direction of the humidity sensing portion 1 to a wall surface 20 of a processing chamber that defines a space of a measuring object; a supply part 3 for supplying water to the one end 1a of the humidity sensing part 1; and a first sensor (temperature sensor 4) mounted on the another end 1b in the longitudinal direction of the humidity sensing portion 1. In the humidity sensing portion 1, water supplied by the supply part 3 circulates from the one end 1a to the another end 1b.

Description

  The present invention relates to a steam amount measuring device and a steam amount measuring method, and particularly in a high temperature environment exceeding 200 ° C., or in an environment where dirt, water droplets, or water vapor condensation occurs on the measuring device (humidity sensitive part). The present invention also relates to a steam measuring device and a steam amount measuring method that can measure the amount of water vapor and can be easily replaced with a measuring device (humidity sensitive part).

  A conventional steam amount measuring apparatus using the principle of a moisture meter uses a wet bulb thermometer having a structure in which a temperature measuring part of a thermometer is covered with gauze (wick), and wets the gauze to obtain a wet bulb temperature. It is common to measure. However, when the temperature of the space to be measured (dry bulb temperature) is high, gauze is easy to dry because it is difficult to maintain a wet state. In addition, in an environment where dirt, water droplets, or water vapor condensation occurs on the measuring device (humidity sensitive part), the gauze may be denatured due to dirt or the like. In such a case, it has been difficult to maintain the gauze in a wet state with the structure of a conventional general moisture sensor.

  Japanese Patent Application Laid-Open No. 61-120050 discloses a wet bulb temperature based on the principle of a humidity sensor provided with a porous body provided with a temperature sensing element in the vicinity of the surface and a water passage for supplying water to the porous body. A measuring device is described. According to this, water can be constantly supplied to the porous body through the water passage even in a high temperature environment, so that the porous body can be moistened.

JP 61-121050 A

  However, since the wet bulb temperature measuring device disclosed in Japanese Patent Application Laid-Open No. 61-120050 does not consider the replacement of the porous body (humidity sensitive portion), the porous body must be replaced when the porous body needs to be replaced. Body attachment and replacement are not easy. For example, a ceramic porous body made by an injection molding method can easily form a water passage, a sensor fixing structure, a porous body mounting structure, etc., and can be easily replaced because of its high accuracy.

  The present invention has been made to solve the above-described problems. The main object of the present invention is that the measuring device (moisture sensitive part) can be easily attached or replaced, and that the high temperature environment, dirt, water droplets, or water vapor condensation occurs on the measuring device (moisture sensitive part). An object of the present invention is to provide an apparatus and a measuring method that can measure the amount of steam easily and accurately at low cost even in an environment.

  A vapor amount measuring apparatus according to the present invention includes a columnar moisture-sensitive part made of a porous material, a fixing part that fixes one end in the longitudinal direction of the moisture-sensitive part to a wall surface of a processing chamber that defines a space to be measured, A supply unit that supplies water to one end of the humidity sensing unit and a first sensor installed at the other end in the longitudinal direction of the humidity sensing unit are provided. In the inside of the moisture sensitive part, the water supplied by the supply part flows from one end to the other end.

  According to the present invention, it is easy to attach or replace the measuring device (humidity sensitive part), and in a high temperature environment, an environment in which dirt or water droplets adhere to the measuring device (humidity sensitive part) or water vapor condensation occurs. Under such circumstances, it is possible to provide a steam amount measuring apparatus and a steam amount measuring method which are easy to measure the wet bulb temperature and have high accuracy.

3 is a cross-sectional view of a wet bulb thermometer in the vapor amount measuring apparatus according to Embodiment 1. FIG. 3 is a flowchart of a steam amount measurement method according to the first embodiment. It is a figure which shows the modification of the moisture sensitive part which concerns on Embodiment 1. FIG. It is a figure which shows the other modification of the moisture sensitivity part which concerns on Embodiment 1. FIG. It is a figure which shows the further another modification of the moisture sensitive part which concerns on Embodiment 1. FIG. FIG. 6 is a cross-sectional view of a wet bulb thermometer in the vapor amount measuring apparatus according to Embodiment 2. It is sectional drawing which shows the modification of the wet bulb thermometer in the vapor | steam amount measuring apparatus which concerns on Embodiment 2. FIG. (A) It is a figure which shows the other modification of the wet bulb thermometer in the vapor | steam amount measuring apparatus which concerns on Embodiment 2. FIG. (B) It is a figure which shows the other modification of the wet bulb thermometer in the vapor | steam amount measuring apparatus which concerns on Embodiment 2. FIG. It is sectional drawing which follows the IX-IX line | wire in Fig.8 (a). FIG. 6 is a cross-sectional view of a wet bulb thermometer in a vapor amount measuring apparatus according to Embodiment 3.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following drawings, the same or corresponding parts are denoted by the same reference numerals, and the description thereof will not be repeated.

(Embodiment 1)
Hereinafter, Embodiment 1 of the present invention will be described with reference to the drawings. The vapor amount measuring apparatus according to the present embodiment includes a wet bulb thermometer 100, and the wet bulb thermometer 100 fixes a moisture sensitive portion 1 made of a porous material and one end 1a in the longitudinal direction of the moisture sensitive portion 1. And a supply unit 3 for supplying water to one end 1a of the moisture sensitive unit 1, and a temperature sensor 4 installed at the other end 1b in the longitudinal direction of the moisture sensitive unit 1.

  The moisture sensitive part 1 is comprised with the thermally stable porous material, for example, consists of a ceramic porous body. The porous material constituting the moisture sensitive portion 1 is molded by an injection molding method. The porous material constituting the moisture sensitive portion 1 has a large number of pores having a diameter of about 0.1 μm to 200 μm. Preferably, it has many pores of about 0.5 μm or more and 50 μm or less. Moreover, in a region (internal region) other than the surface of the moisture-sensitive part 1, pores having a diameter of about several hundreds of μm or less may be formed. The porosity is about 40% to 75%. By setting the porosity of the porous material to 40% or more, the water permeability and water retention of the moisture sensitive portion 1 can be improved. In addition, when the porosity of the porous material exceeds 75%, there is a concern that the mechanical strength of the moisture-sensitive part 1 is greatly reduced, and thus the workability at the time of attaching or replacing the moisture-sensitive part 1 is impaired. From the viewpoint of the absence, the porosity of the porous material is preferably 75% or less.

  The moisture sensitive part 1 has a cylindrical shape with a hollow central axis. The one end 1a and the other end 1b in the longitudinal direction (axial direction) of the moisture sensitive portion 1 have a diameter of about 4 mm to 30 mm, more preferably about 6 mm to 15 mm. The length of the moisture sensitive portion 1 in the longitudinal direction is 30 mm. It is about 300 mm or less, more preferably about 60 mm or more and 200 mm or less. A hole 1H extending in the longitudinal direction from one end 1a to the other end 1b is provided in the central axis portion of the moisture sensitive portion 1. The center axis of the hole 1H is the same as the center axis of the moisture sensitive portion 1, and has a cylindrical shape with a diameter of about 1.5 mm to 20 mm, more preferably about 2 mm to 8 mm. That is, the thickness of the moisture sensitive portion 1 between the surface of the hole 1H (the inner peripheral surface of the moisture sensitive portion 1) and the outer peripheral surface of the moisture sensitive portion 1 is about 1.25 mm to 5 mm, more preferably 1. It is about 5 mm or more and 3 mm or less, and is equal in the circumferential direction of the moisture sensitive portion 1. The dimension of the moisture sensitive part 1 can be changed as appropriate. For example, when the diameter of the pores formed in the porous material constituting the moisture sensitive portion 1 is uniformly 50 μm or less, the thickness of the moisture sensitive portion 1 may be smaller than 2.5 mm. However, when there is a distribution in the diameters of the pores, it is preferable that the thickness is about 2.5 mm or more. This is because, for example, when pores having a large diameter are formed, water concentrates from the pores and flows out to the surface, so that the uniformity of the amount of moisture on the surface of the moisture sensitive portion 1 is reduced.

  The hole 1H is closed on the other end 1b side by a stopper 5 having high water retention and air permeability. The plug 5 has a length of about 2 mm in the direction in which the hole 1H extends (longitudinal direction of the moisture sensitive portion 1). Although the material which comprises the stopper 5 can be made into arbitrary materials with high water retention and air permeability, it is good also as gauze, for example. The hole 1H has an end portion closer to the one end 1a than the stopper 5, and the inside of the hole 1H does not flow into the porous material out of the water supplied from the one end 1a side to the other end 1b side. A drain pipe 15 is provided for draining the water remaining at 1H to the outside of the moisture sensing unit (a supply unit 3 and the like described later). The drain pipe 15 is made of, for example, a stainless steel tube. The arrangement position of the end portion of the drain pipe 15 in the hole 1H can be arbitrarily selected as long as it has an end portion closer to the one end 1a than the plug 5, for example, with respect to the plug 5 What is necessary is just to set it as the one end 1a side about 2 mm.

  The fixing unit 2 is attached to the wall surface 20 of the processing chamber that defines the space to be measured, and is provided so that the one end 1 a of the moisture sensitive unit 1 can be fixed to the wall surface 20. Specifically, the wall surface 20 is provided with a wall hole 20 h, and the fixing portion 2 is fitted in the wall hole 20 h and installed on the wall surface 20. The fixing portion 2 is provided with a fixing hole 2h that connects the inside and outside of the space to be measured defined by the wall surface 20. The diameter of the fixing hole 2h is approximately the same as the diameter of the one end 1a of the moisture-sensitive part 1, and the fixing hole 2h is a part of the moisture-sensitive part 1 in the longitudinal direction including the one end 1a directly or an O-ring or the like. It is provided so that it can be fitted through a seal member. When the fixing part 2 is fitted in the fixing hole 2h with a part in the longitudinal direction including the one end 1a of the moisture sensing part 1, the other end 1b of the moisture sensing part 1 is measured with respect to the wall surface 20 on the space side to be measured. As shown in FIG. The material which comprises the fixing | fixed part 2 can be made into the arbitrary materials which have heat resistance.

  The supply unit 3 is arranged outside the space to be measured defined by the wall surface 20 or in a state of being fixed to the fixed unit 2, and includes a pipe 13 that is fixed in connection with the fixed unit 2. . As described above, in a state where the one end 1 a of the moisture sensitive unit 1 is fixed to the fixed unit 2, the supply unit 3 is connected to the one end 1 a of the moisture sensitive unit 1. In this state, the supply unit 3 can supply water to the one end 1 a of the moisture sensitive unit 1. In this case, the water supplied to the one end 1a of the moisture sensitive unit 1 by the supply unit 3 flows into the hole 1H. The hole 1H serves as an inner flow path extending in the longitudinal direction of the moisture sensitive portion 1, and is formed on the surface of the moisture sensitive portion 1 arranged inside the space to be measured by capillary action from the pores communicating with the hole 1H. To reach. Thereby, the supply part 3 can wet the whole surface from the one end 1a of the moisture sensitive part 1 to the other end 1b by supplying water to the one end 1a of the moisture sensitive part 1. The part connected to the moisture sensitive part 1 and the fixing part 2 in the supply part 3 is made of any material having heat resistance, and preferably made of a material having heat insulation.

  The temperature sensor 4 is installed at the other end 1 b of the humidity sensing unit 1. Specifically, the temperature sensor 4 is installed inside the other end 1b of the moisture sensitive portion 1 and in the vicinity of the surface of about 2 mm or less from the surface. In other words, the temperature sensor 4 is installed in an area where the distance from the other end 1b of the moisture sensitive portion 1 is 2 mm or less inside the end portion of the hole 1H on the other end 1b side. The temperature sensor 4 can be an arbitrary thermometer that can be installed in the vicinity of the surface of the moisture sensitive unit 1, and can be, for example, a thermocouple or a resistance thermometer. As described above, in a state where the one end 1a of the moisture sensitive unit 1 is fixed to the fixed unit 2, the temperature sensor 4 is disposed in the space to be measured. At this time, when the surface of the other end 1b of the moisture sensitive part 1 is wet and the moisture is evaporated, the temperature measured by the temperature sensor 4 is the wet bulb temperature of the space to be measured or an approximation thereof. Can be regarded as a value.

  The moisture sensitive part can be cooled by supplying water to the moisture sensitive part in excess of the amount of water that evaporates and discharging the excess from the drain pipe 15. In this case, condensation of water vapor in the measurement target space occurs on the surface of the moisture sensitive portion, and the surface can be kept moist. In this case, the temperature measured by the temperature sensor 4 can be regarded as the dew point temperature of the space to be measured or its approximate value. From this, the temperature measured by the temperature sensor 4 can determine the water vapor amount by calculation as the dew point temperature. Alternatively, the wet bulb temperature and the dew point temperature coincide with each other as the amount of water vapor increases. Therefore, in the case of a high water vapor amount, the water vapor amount can be obtained as an approximate value of the wet bulb temperature.

  The wiring 14 connected to the temperature sensor 4 connects the temperature sensor 4 and the calculation unit 7. The wiring 14 is laid on the fixing portion 2, and is routed from the fixing portion 2 from one end 1 a of the moisture sensitive portion 1 to the connection portion with the temperature sensor 4 through the hole 1 </ b> H.

  Further, the steam amount measuring device includes a thermometer (not shown) that measures the dry bulb temperature of the space to be measured, and a pressure gauge (not shown) that measures the pressure in the space. The said thermometer and pressure gauge can be comprised from a well-known thing according to a measuring object.

  The calculation unit 7 derives the water vapor amount in the measurement space from the measurement data of the pressure gauge and the thermometer and the wet bulb temperature measured by the temperature sensor 4. Alternatively, when there is no measured value, a standard value such as atmospheric pressure or an estimated value may be used approximately.

  In the present embodiment, the moisture sensitive part 1 is provided so as to be exchangeable with respect to the fixed part 2 fixed to the wall surface 20. At this time, when the temperature sensor 4 is provided in advance in the moisture-sensing unit 1 and the moisture-sensing unit 1 is disposed on the fixed unit 2, the wiring 14 provided on the other end 1b of the moisture-sensing unit 1 is connected. May be provided. Alternatively, when the temperature sensor 4 and the wiring 14 are fixed or laid on the fixed portion 2, electrical connection is not necessary when the moisture sensitive portion 1 is disposed on the fixed portion 2.

  Next, the operation of the vapor amount measuring apparatus according to the present embodiment will be described. The steam amount measuring device measures and outputs the wet bulb temperature of the space to be measured by the temperature sensor 4 provided in the vicinity of the surface of the other end 1b of the moisture sensitive unit 1, or the measured temperature and the measurement target. This is an apparatus for calculating the amount of water vapor and the water vapor concentration (for example, water vapor mole fraction) in the space to be measured from the dry bulb temperature and pressure in the space.

  The moisture sensitive part 1 has one end 1 a fixed to the fixing part 2 with the other end 1 b protruding from the wall surface 20 into the space to be measured. Since the hole 1H provided in the moisture sensitive portion 1 functions as a flow path of the water supplied to the one end 1a, a sufficient amount of water is supplied to the other end 1b in the longitudinal direction of the moisture sensitive portion 1 in a short time. be able to. Furthermore, the moisture sensitive part 1 consists of a porous material, and the thickness between the surface of the hole 1H and the surface of the moisture sensitive part 1 is about 1.25-5 mm, and the permeability | transmittance and water retention of water are high. Therefore, the water supplied to the one end 1a by the supply unit 3 flows through the hole 1H, and then passes through the pores formed in the porous material from the inner peripheral surface of the hole 1H to the surface of the moisture sensitive unit 1 To reach. At this time, if the pores formed near the surface of the moisture sensitive portion 1 have a diameter of about 50 μm or less, the water that has reached the surface of the moisture sensitive portion 1 is sufficiently retained in the vicinity of the surface of the moisture sensitive portion 1. . As a result, the moisture sensitive part 1 can be sufficiently wet from the inside to the surface. If the pores formed in the vicinity of the surface of the moisture sensitive part 1 are larger than about 50 μm, the water that has flowed into the pores flows out due to a small pressure difference from the outside or due to gravity. It is difficult to maintain the wet state (water content) of the surface of the wet part 1. Here, the phrase “the surface of the moisture sensitive portion 1 is wet” means that the entire surface of the moisture sensitive portion 1 is ideally covered with a water film. Here, the wet state (moisture content) of the surface means the amount of water (water content) present in the void inside the surface of the moisture sensitive portion, and the water film and water droplets attached to the outside of the moisture sensitive portion.

  At this time, if the amount of water vapor in the space to be measured is less than the amount of saturated water vapor at the surface temperature of the moisture sensitive portion 1, the water that wets the vicinity of the surface of the moisture sensitive portion 1 is measured on the surface of the moisture sensitive portion 1. By contacting the airflow in the target space, it evaporates into the space. The temperature sensor 4 measures the temperature in the vicinity of the surface of the other end 1b of the moisture sensitive part 1 when the water that wets the vicinity of the surface of the moisture sensitive part 1 is evaporated from the surface of the moisture sensitive part 1. Can do. As a result, the water supplied to the moisture sensitive part 1 by the supply part 3 reaches the vicinity of the temperature sensor 4 by capillary action after reaching the other end 1b of the moisture sensitive part 1 through the inner flow path of the hole 1H. When the subsequent water temperature is equal to the temperature in the vicinity of the surface, the temperature sensor 4 can measure the wet bulb temperature in the space to be measured. In addition, even when the water temperature before being supplied to the moisture sensitive unit 1 by the supply unit 3 is lower or higher than the temperature in the vicinity of the surface, the length of the portion of the moisture sensitive unit 1 protruding into the space to be measured Since the length in the direction is about 30 to 300 mm, the temperature of the water supplied to one end 1a of the moisture sensitive unit 1 reaches the vicinity of the surface of the other end 1b of the moisture sensitive unit 1 until the humidity of the space to be measured. Can approach the sphere temperature. That is, in the vicinity of the other end 1b of the moisture sensitive portion 1, the temperature of the water existing on the surface and inside of the moisture sensitive portion 1 (including the inside of the hole 1H) is substantially uniform. Therefore, it is possible to reduce an error due to an influence on the measurement value of the temperature sensor 4 due to the supply of water from the outside.

  Alternatively, if the amount of water vapor in the space to be measured is greater than the amount of saturated water vapor at the surface temperature of the moisture sensitive portion 1, the water vapor in the space is condensed by contacting the air flow in the space to be measured on the surface of the moisture sensitive portion 1. To do. At this time, the water temperature supplied to the moisture sensitive unit 1 by the supply unit 3 needs to be lower than the dew point temperature in the space to be measured, but if it is approximately equal to the surface temperature, the temperature sensor 4 The dew point temperature of the space to be measured can be measured.

  It is possible to improve the measurement accuracy of the water vapor amount by correcting based on the predicted value or measured value of the water temperature together with the temperature measured by the temperature sensor 4 and obtaining a more accurate surface temperature.

  The vapor amount measuring apparatus according to the present embodiment works effectively even if the temperature of the space to be measured (dry bulb temperature) is a high temperature of 200 ° C. or higher. Generally, when the temperature of the space to be measured (dry bulb temperature) is high, the wet bulb thermometer is also heated to a high temperature. Also in the steam amount measuring apparatus according to the present embodiment, the water supplied to the moisture sensing unit 1 to wet the surface of the moisture sensing unit 1 flows through the pipe 13 connected to the fixed unit 2 heated to a high temperature. In some cases, after being heated, it is supplied to one end 1a of the moisture sensitive portion 1. Therefore, there is a possibility that the water supplied to the moisture sensitive unit 1 is heated inside the fixed unit 2 and boils. In this case, the flow of the supply water becomes unstable, or the temperature of the water greatly deviates from the actual wet bulb temperature in the space to be measured, and the measurement accuracy of the wet bulb temperature may deteriorate. In addition, since the water does not reach the surface of the moisture sensitive part 1 stably and sufficiently by boiling, and it is difficult to wet the surface of the moisture sensitive part 1, the measurement accuracy of the wet bulb temperature is It may get worse. For this, by increasing the amount of water supplied to the moisture sensitive unit 1 by the supply unit 3, it is possible to suppress an increase in water temperature due to heating by the fixing unit 2, and to boil the water Can be suppressed. In this case, the amount of water discharged from the moisture sensitive unit 1 may be increased.

  Further, in this case, the temperature in the fixing unit 2 of the water supplied to the one end 1a of the moisture sensitive unit 1 is lower or higher than the wet bulb temperature of the space to be measured, and the temperature relative to the wet bulb temperature. Have a difference. However, in the vapor amount measuring apparatus according to the present embodiment, the length in the longitudinal direction protruding into the space to be measured of the moisture sensitive portion 1 is 30 mm or more, and the temperature sensor 4 is provided at the other end 1b. Therefore, the temperature of the water supplied to the one end 1a of the moisture sensitive unit 1 can sufficiently approach the wet bulb temperature of the space to be measured before reaching the surface of the other end 1b of the moisture sensitive unit 1. As a result, the influence of the temperature of the water supplied to the humidity sensing unit 1 on the measurement accuracy of the wet bulb temperature can be suppressed to be small, and the decrease in the measurement accuracy of the wet bulb temperature can be suppressed even in a high temperature environment. it can.

  Next, with reference to FIG. 1 and FIG. 2, the vapor | steam amount measuring method which concerns on this Embodiment is demonstrated. The vapor amount measuring method according to the present embodiment includes a step (S10) of preparing the moisture sensitive part 1 made of a porous material, and a process for defining one end 1a in the longitudinal direction of the moisture sensitive part 1 to define a space to be measured. A step of fixing to the wall surface 20 of the chamber (S20), a step of supplying water to one end 1a of the moisture sensitive portion 1 (S30), and a step of measuring the temperature of the other end 1b in the longitudinal direction of the moisture sensitive portion 1 ( S40).

  First, in the step (S10), the moisture sensitive part 1 is prepared. The moisture sensitive part 1 is made of a porous material. The porous material has many pores having a diameter of about 0.1 μm or more and 200 μm or less, preferably many pores of about 0.5 μm or more and 50 μm or less, and a porosity of 40% or more. It is about 75% or less. The porous material can be produced by any method. For example, a ceramic porous body produced by an injection molding method or an extrusion molding method is prepared. By using the injection molding method, it is possible to accurately form the outer shape of the moisture-sensitive part 1, and it is also possible to prepare a large amount of the moisture-sensitive part 1. For example, a ceramic porous body made by an injection molding method can easily form a water passage, a sensor fixing structure, a porous body mounting structure, etc., and can be easily replaced because of its high accuracy. Moreover, the stick-shaped moisture sensitive part 1 and the moisture sensitive part 1 which has a linear pore can be easily formed by using an extrusion method. When the extrusion molding method is used, the groove of the O-ring formed in the moisture sensitive portion 1 may be processed after molding.

  Next, in the step (S20), the moisture sensitive portion 1 prepared in the previous step (S10) is fixed to the wall surface 20 of the processing chamber that defines the space to be measured. At this time, the wall surface 20 is previously provided with a wall hole 20h and a fixing portion 2 that is fitted in the wall hole 20h and installed on the wall surface 20. The moisture-sensing part 1 is fixed to the wall surface 20 with the other end 1b protruding into the space to be measured by fitting a part of the longitudinal direction including the one end 1a into the fixing hole 2h provided in the fixing part 2. Is done.

  Next, in a process (S30), water is supplied to the one end 1a of the moisture sensitive part 1 by the supply part 3 through the fixed part 2. In this step (S30), water is supplied to the moisture sensitive unit 1 by the supply unit 3 until the surface of the other end 1b of the moisture sensitive unit 1 is wet.

  Next, at a process (S40), the temperature of the other end 1b of the moisture sensitive part 1 is measured by the temperature sensor 4 installed at the other end 1b of the moisture sensitive part 1. Since the surface of the other end 1b is wet by the previous step (S30), the temperature measured by the temperature sensor 4 in this step (S40) can be regarded as the wet bulb temperature of the space to be measured. As a result, the amount of steam in the measurement target space can be derived from the wet bulb temperature measured in this step (S40) and the measured values of the pressure and dry bulb temperature in the same measurement target space.

  When continuously measuring the wet bulb temperature, for example, the sensitivity by the supply unit 3 during the step (S40) is maintained so that the other end 1b of the moisture sensitive unit 1 is kept wet by the step (S30). The supply of water to the wet part 1 only needs to be controlled.

  As described above, according to the vapor amount measuring apparatus and the vapor amount measuring method according to the present embodiment, the water supplied to one end 1a of the moisture sensitive portion 1 made of a porous material is the other end of the moisture sensitive portion 1. Since it reaches the surface of 1b and evaporates on the surface, the temperature measured by the temperature sensor installed at the other end 1b of the moisture sensitive part 1 can be regarded as the wet bulb temperature. Further, even when the temperature of the space to be measured is high, boiling of the water can be suppressed by appropriately setting the flow rate and the liquid temperature of the water supplied to the moisture sensitive unit 1. At this time, the temperature of the water supplied to the one end 1a of the moisture sensitive portion 1 is lower than the wet bulb temperature of the space to be measured, but the length of the moisture sensitive portion 1 in the longitudinal direction is about 30 to 300 mm. Since the temperature sensor 4 is provided at the other end 1b, the temperature of the water supplied to the one end 1a of the moisture sensitive unit 1 is a measurement target until it reaches the vicinity of the surface of the other end 1b of the moisture sensitive unit 1 It is possible to sufficiently approach the wet bulb temperature in the space. As a result, the influence of the temperature of the water supplied to the humidity sensing unit 1 on the measurement accuracy of the wet bulb temperature can be kept low, and the decrease in the measurement accuracy of the wet bulb temperature can be suppressed even in a high temperature environment. it can. Further, according to the steam amount measuring apparatus and the steam amount measuring method according to the present embodiment, since the dew point temperature can also be measured, an optical measurement mechanism is provided to determine that the conventional condensation has occurred. Compared with a dew point meter, the dew point temperature can be measured easily at a low cost.

  Further, in the vapor amount measuring apparatus according to the present invention, the moisture sensitive portion 1 is fixed to the fixed portion 2 only at one end 1a, and the one end 1a of the moisture sensitive portion 1 is removed from the fixing hole 2h of the fixed portion 2. Thus, it is possible to easily attach or replace the moisture sensitive unit 1 to the fixed unit 2.

  Although the moisture sensitive part 1 which concerns on this Embodiment consists of a column shape, and the thickness of the moisture sensitive part 1 from the surface of the hole 1H to the surface of the moisture sensitive part 1 was provided equally in the circumferential direction of the moisture sensitive part 1. However, it is not limited to this. For example, with reference to FIG. 3 and FIG. 4, the thickness of the moisture sensitive part 1 from the surface of the hole 1 </ b> H to the surface of the moisture sensitive part 1 may be different in the circumferential direction of the moisture sensitive part 1. Further, the shape of the cross section perpendicular to the longitudinal direction of the moisture sensitive portion 1 may be a polygon. Referring to FIG. 5, a plurality of second holes 1 </ b> K are provided in a region between the surface (inner surface) of hole 1 </ b> H having the same central axis as moisture-sensitive portion 1 and the surface of moisture-sensitive portion 1. It may be. The plurality of second holes 1K may be provided at equal intervals in the circumferential direction of the hole 1H. Further, the plurality of second holes 1K may be provided at equal intervals with respect to the hole 1H. In these cases, the second hole 1 </ b> K can also serve as a flow path for the water supplied to the moisture sensitive unit 1. Further, for example, a drain pipe may be provided in the second hole 1K. Alternatively, the second hole 1K may be a flow path for draining the water supplied to the moisture sensitive unit 1. In this way, when more water is supplied than is necessary to wet the surface of the moisture sensitive part 1, when the moisture sensitive part is cooled and water vapor is condensed on the surface to measure the dew point temperature, Alternatively, even when the amount of water supplied to the hole 1H is increased in order to suppress boiling of the water supplied to the moisture sensitive unit 1, the excess is drained from the second hole 1K to the outside of the moisture sensitive unit 1. Can do. In addition, the flow of water in the moisture-sensing unit 1 can be made smooth, and the water pressure inside the moisture-sensing unit 1 and the water pressure outside the moisture-sensing unit 1 (for example, inside the pipe 13) can be made equal. Excessive overflow of water from the surface of the wet part 1 can be suppressed. In addition, these second holes may be holes for attaching the fourth sensor or wiring, and function not only as a water flow path but also as a water retaining space (a part of the pores of the porous material). It can also be made.

  Moreover, in this Embodiment, although the hole 1H of the moisture sensitive part 1 was obstruct | occluded with the stopper 5 in the other end 1b, it is not restricted to this. For example, referring to FIG. 6, the hole 1H provided in the moisture sensitive portion 1 does not penetrate from the one end 1a to the other end 1b in the longitudinal direction, and is formed to the inside away from the other end 1b by a certain distance. May be. For example, the hole 1H may be formed from the other end 1b to about 2 to 4 mm inside. If it does in this way, hole 1H will be plugged up with porous material in the other end 1b. As a result, the water supplied to the hole 1H can reach the surface of the other end 1b by capillary action from the end of the hole 1H on the other end 1b side. Moreover, the moisture sensitive part 1 which has such a shape can also be easily produced by using an injection molding method or an extrusion molding method.

  Further, in the case of such a configuration, when the wet bulb temperature is measured periodically, the previous step (S30) is performed immediately before the present step (S40) is performed, so that the moisture sensitive unit 1 The supply of water to the moisture sensitive part 1 by the supply part 3 may be controlled so that the other end 1b of the liquid becomes wet again.

  In addition, as shown in FIG. 1, when the stopper 5 is provided in the moisture-sensitive part 1, the porous material which comprises the moisture-sensitive part 1, and the material which comprises the stopper 5 when placed under a temperature and humidity cycle The moisture sensitive part 1 may be deformed due to a difference in thermal expansion coefficient. Further, when the plug 5 is completely dried in a high temperature environment, the plug 5 may be denatured. In this case, since the surrounding state of the temperature sensor 4 at the other end 1b changes, the measurement accuracy of the temperature sensor 4 may be deteriorated. Therefore, if the moisture sensitive part 1 is configured without using the stopper 5 as described above, the moisture sensitive part 1 made of a porous material is deformed or modified even under a temperature / humidity cycle or once completely dried. Therefore, it is possible to suppress a decrease in measurement accuracy.

  In the previous step (S20), when the other end 1b of the moisture sensitive unit 1 is fixed upward in the vertical direction from the one end 1a, the amount of evaporation from the surface of the moisture sensitive unit 1 to the measurement space is larger. The amount of water may be supplied to the moisture-sensing unit 1 so that the water overflows from the surface of the moisture-sensing unit 1. In this case, for example, a drainage recovery mechanism that recovers the water overflowing from the surface of the moisture-sensing unit 1 may be provided in the fixed unit 2, and the recovered water may be circulated and used. In this way, when the temperature of the space to be measured (dry bulb temperature) is high and the fixing part 2 is also heated to a high temperature, the amount of water supplied to the moisture sensitive part 1 can be increased, so that the fixed part 2 is fixed. It can suppress that the water supplied to the moisture sensitive part 1 by the part 2 is remarkably heated to a high temperature, and boils. Further, in this case, a pressure sensor (not shown) may be provided in a pipe connecting the drainage recovery mechanism and the supply unit 3 to be used for measuring the static pressure (pressure) in the steam amount measuring device.

(Embodiment 2)
Hereinafter, a second embodiment of the present invention will be described with reference to FIG. The steam amount measuring device and the steam amount measuring method according to the present embodiment have basically the same configuration as the steam amount measuring device and the steam amount measuring method according to the first embodiment. A second sensor 8 that measures the amount of water, and a water amount control unit 9 that controls the amount of water that the supply unit 3 supplies to one end 1a of the moisture sensing unit 1 based on the measurement value of the second sensor. Furthermore, it differs in the point provided.

  The second sensor 8 is disposed on the surface of the moisture sensitive portion 1 so as to extend from one end 1 a to the other end 1 b in the longitudinal direction of the moisture sensitive portion 1. Specifically, the second sensor 8 includes three pairs of electrodes, 8a-8b, 8c-8d, and 8e-8f, and a measurement circuit that is connected to them via the fixing unit 2. .

  The electrodes 8a and 8b are arranged in parallel to each other along the surface of the moisture sensitive portion 1 from one end 1a to the other end 1b in the longitudinal direction of the moisture sensitive portion 1. Further, the electrodes 8a and 8b are placed on the surface of the moisture sensitive part 1 up to the region perpendicular to the longitudinal direction (end face) at the other end 1b and overlapping with the temperature sensor 4 when viewed from the longitudinal direction of the moisture sensitive part 1. Are arranged parallel to each other. The electrodes 8c and 8d are arranged from one end 1a to the other end 1b of the moisture sensitive portion 1 so that the line-to-line distance increases along the surface of the moisture sensitive portion 1, and the moisture sensitive portion from the other end 1b, respectively. 1 is installed from the other end 1b side to the one end 1a side so as to be parallel to each other in the longitudinal direction of the moisture sensitive portion 1 after entering the space inside the hole 1H. The electrodes 8e and 8f are arranged from one end 1a to the other end 1b of the moisture sensitive portion 1 so that the line-to-line distance increases along the surface of the moisture sensitive portion 1. They are arranged in the surface space so as to be parallel to each other in the longitudinal direction. The electrodes 8c and 8d and the electrodes 8e and 8f may be disposed in a space close to the surface of the moisture sensitive portion 1 from one end 1a to the other end 1b of the moisture sensitive portion 1.

  The capacitance between the electrodes 8a and 8b changes according to the wet state (moisture content) of the surface from one end 1a to the other end 1b of the moisture sensitive portion 1. Strictly speaking, in a space where the electrodes 8a and 8b are arranged with a small distance between the lines, the capacitance between the electrodes 8a and 8b changes according to the amount of a substance having a high dielectric constant existing between the lines in the section. . Water has a significantly higher dielectric constant than air, water vapor, and ceramics. Further, since the moisture amount is distributed on the surface of the moisture sensitive portion 1 with the central axis of the moisture sensitive portion 1 being symmetrical, the capacitance between the electrodes 8a and 8b is the wet state (moisture amount) of the surface of the moisture sensitive portion 1. It changes according to. Specifically, the capacitance between the electrodes 8a and 8b increases when the amount of moisture on the surface of the moisture sensitive portion 1 is large, and the capacitance between the electrodes 8a and 8b increases when the amount of moisture on the surface of the moisture sensitive portion 1 is small. Capacity decreases. Therefore, if the relationship between the moisture content on the surface of the moisture sensitive portion 1 and the capacitance between the electrodes 8a and 8b is confirmed in advance, it is arranged along the surface of the moisture sensitive portion 1 from one end 1a to the other end 1b. By measuring the capacitance between the two electrodes 8a and 8b provided, the wet state (moisture content) of the surface of the moisture sensitive portion 1 can be obtained. Further, if the relationship between the wet state (moisture content) of the other end 1b of the moisture sensitive portion 1 and the moisture content on the surface of the moisture sensitive portion 1 is confirmed in advance, the capacitance between the two electrodes 8a and 8b is measured. By doing so, the wet state (moisture content) of the other end 1b of the moisture sensitive part 1 can be obtained. Further, based on the capacitance measured by the second sensor 8, it is also possible to determine whether the moisture amount on the surface of the moisture sensitive portion 1 is excessive or insufficient with respect to the state where the other end 1b of the moisture sensitive portion 1 is wet. it can. The capacitance between the electrodes 8c and 8d changes according to the water level inside the hole 1H of the moisture sensitive portion 1. Specifically, the capacitance changes at the tip portions of the two electrodes 8c and 8d arranged so as to be parallel to each other according to the length of contact with water. When the water level supplied from the supply unit 3 through the hole 1H is low, the capacitance between the electrodes 8c and 8d decreases. Therefore, if the relationship between the water level in the hole 1H of the moisture sensitive part 1 and the capacitance between the electrodes 8c and 8d is confirmed in advance, the capacitance between the electrodes 8c and 8d is measured. The water level inside the hole 1H of the moisture sensitive part 1 can be obtained. Furthermore, if the relationship between the wet state (moisture amount) of the other end 1b of the moisture sensitive portion 1 and the water level inside the hole 1H of the moisture sensitive portion 1 is confirmed in advance, the capacitance between the electrodes 8c and 8d is measured. By doing so, the wet state (moisture content) of the other end 1b of the moisture sensitive part 1 can be obtained. The capacitance between the electrodes 8e and 8f changes according to the size of the water droplets on the surface of the other end 1b of the moisture sensitive portion 1. Specifically, the capacitance changes at the tip portions of the two electrodes 8e and 8f arranged so as to be parallel to each other according to the length of contact with water. When the water droplet on the surface of the other end 1b of the moisture sensitive portion 1 is small, the capacitance between the electrodes 8e and 8f decreases. Therefore, if the relationship between the size of the water droplet on the surface of the other end 1b of the moisture sensitive portion 1 and the capacitance between the electrodes 8e and 8f is confirmed in advance, the capacitance between the electrodes 8e and 8f is measured. Thus, the size of water droplets on the surface of the other end 1b of the moisture sensitive part 1 can be obtained. Furthermore, if the relationship between the wet state (moisture content) of the other end 1b of the moisture sensitive portion 1 and the size of water droplets on the surface of the other end 1b is confirmed in advance, the capacitance between the electrodes 8e and 8f is measured. Thus, the wet state (moisture content) of the other end of the moisture sensitive part 1 can also be obtained. In addition, the drop of the suspended droplet can be detected by monitoring the capacitance for a long time and detecting a steep change. Note that the measurement parameter between the electrodes 8a and 8b, between the electrodes 8c and 8d, and between the electrodes 8e and 8f is not limited to the capacitance, and may be measured as a dielectric constant.

  The water amount control unit 9 is connected to the supply unit 3 and the second sensor 8. When the measurement value of the second sensor 8 is input, the water amount control unit 9 controls the amount of water supplied to the moisture sensitive unit 1 by the supply unit 3 based on the measurement value. Specifically, in the step of supplying water (S30), a step (S31) of confirming the moisture content of the moisture sensitive unit 1 when the other end 1b of the moisture sensitive unit 1 is wet may be performed. For example, the capacitance when the other end 1b of the moisture sensitive portion 1 is wet is measured by the second sensor 8, and this is set as a reference value. Furthermore, in the step (S40) of measuring the temperature, the step (S41) of measuring the wet state (moisture content) of the other end 1b of the moisture sensitive unit 1 and the other end of the moisture sensitive unit 1 in the step of confirming (S31). Comparison between the wet state (moisture content) of the other end 1b of the moisture sensitive portion 1 confirmed when 1b is wet and the wet state (water content) of the other end 1b of the moisture sensitive portion 1 measured in the measuring step And a step (S43) of adjusting the amount of water supplied to the one end 1a of the moisture sensitive unit 1 based on the result of the comparing step (S42). If the capacitance measured by the second sensor 8 in the step (S41) is lower than the reference value determined in the step (S31), one of the moisture sensitive parts 1 is controlled by the water amount control unit 9 in the step (S43). The supply unit 3 is controlled to increase the amount of water supplied to the end 1a. By doing in this way, in the process (S40), the surface of the moisture sensitive part 1 can be moistened, and the measurement accuracy of the wet bulb temperature measured by the temperature sensor 4 can be improved.

  Further, in the step (S31), the relationship between the capacitance measured by the second sensor 8 and the wet state (moisture content) of the other end 1b of the moisture sensitive portion 1 and the other end 1b of the moisture sensitive portion 1 are determined. The relationship between the wet state (moisture amount) and the appropriate amount of water supplied to the one end 1a of the moisture sensitive unit 1 may be confirmed. In the step (S43), the water amount control unit 9 may perform control based on these relationships.

  When the moisture state of the surface of the moisture sensitive part 1 is controlled by the water amount control part 9, it can affect the movement of water inside the porous material due to capillary action, but the thickness of the water film on the surface is remarkably increased. It is difficult to increase. In addition, when the movement of water due to capillary action is less than the evaporation rate, it is difficult to keep the surface wet. In that case, a clamp or a valve may be provided in the water discharge mechanism and controlled by the control unit 9. For example, by closing the valve, the pressure in the hole 1H (in the moisture sensitive portion 1) can be increased by increasing the flow resistance. If it does in this way, water can be forced out to the surface of moisture sensing part 1 by the pressure difference of the inside of moisture sensing part 1 and measurement space not only with a capillary phenomenon.

  Further, in the step (S41), the amount of water supplied to the one end 1a of the moisture sensitive unit 1 is increased by the water amount control unit 9 or the pressure in the moisture sensitive unit 1 is not increased by the valve or the like. When an increase in the amount of moisture at the other end 1b of the moisture sensitive portion 1 is observed, it can be determined that water vapor in the measurement space is condensed on the surface of the moisture sensitive portion 1. This is the amount of water that reaches the surface of the moisture sensitive part 1 from the hole 1H due to capillary action in a state where the amount or the water pressure supplied to the one end 1a of the moisture sensitive part 1 is not controlled. It is because it is thought that it does not increase. In this case, the amount of water vapor can be obtained by estimating the temperature in the vicinity of the surface of the moisture sensitive portion 1 based on the temperature measured by the temperature sensor 4 and calculating the temperature as the dew point temperature.

  Referring to FIG. 7, the second sensor 8 may be configured by three electrodes 8a, 8b, 8f and a measurement circuit connected to the electrodes 8a, 8b, 8f. The electrodes 8a and 8b are disposed in parallel with each other along the surface from one end 1a to the other end 1b of the moisture sensitive portion 1. On the other hand, the electrodes 8a and 8f are parallel to each other along the longitudinal direction in a region located on the surface of the other end 1b of the moisture sensitive portion 1 and coaxially in the longitudinal direction of the temperature sensor 4 and the moisture sensitive portion 1. It is arranged. In FIG. 7, it should be noted that the electrode 8e is not provided because the electrode 8e described above can be substituted by the electrode 8a. At this time, the capacitance between the electrodes 8a and 8f changes according to the amount of water droplets generated on the surface of the other end 1b of the moisture sensitive portion 1. For example, when the other end 1b of the moisture sensitive portion 1 is disposed below the one end 1a in the vertical direction, water droplets are formed on the surface of the other end 1b so as to hang downward in the vertical direction.

  In this case, the amount of water supplied to one end 1a of the moisture sensitive unit 1 may be controlled by the water amount control unit 9 in accordance with the capacitance between the electrodes 8a and 8f. Specifically, for example, when a certain amount or more of water is supplied to the one end 1a by the supply unit 3 to the moisture sensitive unit 1 installed in the space to be measured, the capacitance between the electrodes 8a and 8f increases. It starts to decline. At this time, a drop of water has occurred on the surface of the other end 1b of the moisture sensitive portion 1. Therefore, the maximum value and the minimum value of the capacitance before and after the capacitance between the electrodes 8a and 8f changes from rising to lowering are obtained in advance, and the capacitance between the electrodes 8a and 8f is within the range. In step (S <b> 43), the amount of water supplied to the one end 1 a of the moisture sensitive unit 1 may be controlled by the water amount controller 9 in the step (S <b> 43). Even if it does in this way, the effect similar to this Embodiment can be acquired.

  Even in this case, when an increase in water droplets or a drop of water droplets exceeding the amount of water supplied to the one end 1a of the moisture sensitive unit 1 by the supply unit 3 is observed, it is more accurate to calculate the water vapor amount as the dew point temperature. Sometimes it can be sought. In the case where condensation occurs by cooling the moisture-sensitive part 1 with the supply water in the vicinity of the fixed part 2 or the fixed part 2, the condensed water (condensed water) is brought to the vicinity of the surface of the other end 1b, such as capillary action or gravity. It can be moved with. Thereby, the amount of water supplied to the other end 1b can be reduced, and the wet bulb temperature can be measured with high accuracy. With regard to the distribution state of the condensed water, the water vapor amount can be measured with higher accuracy by controlling the supply unit 3 and the valve of the drainage mechanism based on the measured values between the electrodes 8a, 8b, and 8f.

  The electrodes 8a to 8f will be described with reference to FIGS. 8A, 8B, and 9. FIG. In FIG. 9, the electrodes 8 a and 8 b constituting the second sensor 8 are regions located between the hole 1 </ b> H and the other end 1 b at the other end 1 b of the humidity sensing unit 1, and the temperature sensor 4 is installed. It may be buried in parallel in the vicinity of the region. For example, two holes extending in a direction perpendicular to the longitudinal direction of the moisture sensitive portion 1 at the other end 1b may be formed so as to sandwich the temperature sensor 4 and the wiring 14. In this way, since the wet state (moisture amount) of the moisture-sensing unit 1 at a position closer to the temperature sensor 4 can be grasped, the measurement accuracy of the wet bulb temperature measured by the temperature sensor 4 is improved. Can do. Further, the electrodes 8c and 8d are disposed so as to enter the inside at the other end 1b of the moisture sensitive portion 1 and to be parallel to the inside of the hole 1H. When the stopper 5 is not provided, as shown in FIG. 8 (b), it is disposed in a space close to the surface of the moisture sensitive portion 1 until it reaches the other end 1b of the moisture sensitive portion 1, and enters from the end of the hole 1H to the inside. It arrange | positions so that it may become. The electrodes 8e and 8f are disposed along or near the surface of the moisture sensitive portion 1 until reaching the other end 1b of the moisture sensitive portion 1, and are perpendicular to the surface of the other end 1b. Arrange in parallel. At this time, the position where water droplets are generated by the influence of the earth's gravity and the shape of the moisture sensitive portion 1 is confirmed in advance, and the parallel portions of the tip portions of the electrodes 8e and 8f are arranged in accordance with the positions.

  In addition, although the 2nd sensor 8 was attached via the fixing | fixed part 2, it is not restricted to this. For example, the fixing unit 2 may be disposed as described above with respect to the moisture sensitive unit 1 using a fixing tool (not shown) separate from the fixing unit 2. Even in this way, the wet state (moisture content) of the other end 1b of the moisture sensitive part 1 can be measured.

  As described above, the water supply to the vicinity of the surface of the other end 1b of the moisture sensitive unit 1 can use condensed water (condensed water). The adjustment may be controlled by a valve provided in the drainage mechanism using a pump or a water head pressure.

(Embodiment 3)
Hereinafter, Embodiment 3 of the present invention will be described with reference to FIG. The steam amount measuring apparatus and the steam amount measuring method according to the present embodiment basically have the same configuration as that of the first and second embodiments, but measure the temperature of the water supplied to the moisture sensitive unit 1. The third sensor 10 is different from the third sensor 10 in that it includes a water temperature control unit 11 that controls the temperature of the water supplied to the one end 1a of the humidity sensing unit 1 based on the measurement value of the third sensor 10. .

  The third sensor 10 is provided in the pipe 13 of the supply unit 3 connected and fixed to the fixed unit 2, and one end 1 a of the moisture sensitive unit 1 in the step (S 30) and / or the step (S 40). Measure the temperature of the water supplied to the. For example, in the step of measuring temperature (S40), the step of controlling the water temperature of water supplied to one end 1a of the moisture sensitive unit 1 (S44) may be performed. In this case, for example, since the temperature of the space to be measured (dry bulb temperature) is high, the fixing unit 2 is heated to a high temperature, and is supplied to the moisture sensitive unit 1 by the third sensor 10. The water temperature control unit 11 is controlled so that the amount of water supplied to the moisture sensitive unit 1 and the amount of water discharged from the drain pipe 15 are increased when it is confirmed that the water to be heated is boiling by the fixing unit 2 Can do.

  In the present embodiment, by controlling the temperature of the water supplied to the moisture sensitive unit 1 by the water temperature control unit 11 based on the measurement value of the third sensor 10, the moisture sensitive unit 1 for the measurement accuracy of the wet bulb temperature. Although the influence of the temperature of the water supplied to is reduced, it is not limited to this. For example, the flow rate of water supplied to the moisture sensitive unit 1 may be controlled by the water amount control unit 9 based on the measurement value of the third sensor 10. By doing in this way, for example, even when the temperature of the space to be measured (dry bulb temperature) is high and the fixing part 2 is heated to high temperature, it is supplied to one end 1a of the moisture sensitive part 1. Since an appropriate amount of water can be supplied while suppressing the boiling of water, the influence of the temperature of the water supplied to the moisture sensitive unit 1 on the measurement accuracy of the wet bulb temperature can be reduced.

  Moreover, in this Embodiment, although the 3rd sensor 10 was provided in the piping 13 of the supply part 3 connected and fixed to the fixing | fixed part 2, it is not restricted to this. The third sensor 10 may be provided in the pipe 13 of the supply unit 3 that is not connected to the fixed unit 2. In this case, by obtaining in advance a water temperature rise from the pipe 13 provided with the third sensor 10 to the one end 1a of the moisture sensing unit 1, the moisture sensing unit 1 with respect to the measurement accuracy of the wet bulb temperature is obtained. The influence of the temperature of the water supplied to can be reduced.

  In addition, the third sensor 10 may be provided inside the moisture sensitive portion 1 such as the inside of the hole 1H (or the second hole 1K with reference to FIG. 5). In this way, it is possible to confirm the degree of the influence on the measurement accuracy of the wet bulb temperature by the temperature of the water supplied to the humidity sensing unit 1 from the temperature measured by the third sensor 10 and the temperature sensor 4. it can. When calculating the water vapor amount using the wet bulb temperature, the calculation error of the water vapor amount can be reduced by taking the influence into consideration. Similarly, when calculating the amount of water vapor using the dew point temperature, the temperature near the surface of the other end 1b of the moisture sensitive portion 1 is predicted based on the temperature measured by the third sensor 10 and the temperature sensor 4. Thus, a more accurate water vapor amount can be obtained.

  In the second embodiment and the third embodiment, another example of a method of controlling the amount of water supplied from the supply unit 3 to the moisture sensitive unit 1 by the water amount control unit 9 will be described. The reference value of the wet state (moisture content) of the other end 1b of the moisture sensitive part 1 is x, and the measured value of the wet state (water content) of the other end 1b of the moisture sensitive part 1 is y (t). t represents time. The water amount control unit 9 first predicts how many seconds y (t) will reach the reference value x by looking at the change in y (t). Let T be the predicted time. If the predicted time T is longer than the preset control reference time TT, the supply unit 3 is controlled so that T becomes small, and the amount of water supplied to the moisture sensitive unit 1 is increased. On the contrary, if the predicted time T is shorter than the preset control reference time TT, the water supply amount is decreased by controlling the supply unit 3 so that T becomes larger. This control is performed for any of the capacitances of the three pairs of electrodes, that is, the capacitance between the electrodes 8a and 8b, the capacitance between the electrodes 8c and 8d, and the capacitance between the electrodes 8e and 8f. May be. Further, this control may be performed on a vector value obtained by combining the capacitances of the three pairs of electrodes.

  In the first to third embodiments, the shape of the other end 1b of the moisture sensitive unit 1 can be arbitrarily selected. Specifically, in the example of FIG. 1 and FIGS. 3 to 7, the shape of the other end 1 b of the moisture sensitive portion 1 is a circular shape formed perpendicular to the longitudinal direction of the moisture sensitive portion 1. It is not limited to this. In the example of FIGS. 8 and 9, the other end 1b of the moisture sensitive portion 1 is configured in a hemispherical shape, and the end portion on the other end 1b side of the hole 1H is also configured in a hemispherical shape. It is not limited to. For example, the other end 1 b of the moisture-sensitive part 1 may have a region in which a curved surface that is convex outward is formed in the longitudinal direction of the moisture-sensitive part 1. Alternatively, the shape of the other end 1b of the moisture sensitive portion 1 may be hemispherical. At this time, as shown in FIG. 8B, the hole 1H may penetrate from the one end 1a to the other end 1b. Moreover, the hole 1H does not need to penetrate, and in this case, as shown in FIG. 8A, the shape of the end on the other end 1b side may be hemispherical. Moreover, you may have the area | region in which the curved surface which is concave shape was formed inside in the other end 1b in the longitudinal direction. In this case, as will be described later, when the other end 1b is disposed above the one end 1a in the vertical direction, the concave region can serve as a water retaining tray. Further, at this time, the second sensor 8 may be disposed up to the inside of the concave shape as a water retaining tray. As a result, the other end 1b can be easily prevented from being dried, and the wet state can be easily maintained. In any of these cases, the temperature sensor 4 only needs to be disposed near the surface of the other end 1b. Even if it does in this way, there can exist an effect similar to this Embodiment.

  Moreover, in this Embodiment, as long as the moisture sensitivity part 1 is arrange | positioned so that the other end 1b may protrude in measurement space, it can be arbitrarily arrange | positioned with respect to measurement space. For example, the other end 1b may be disposed above the one end 1a in the vertical direction, and the other end 1b may be disposed below the one end 1a in the vertical direction.

  In the steam amount measuring apparatus according to the first to third embodiments, the wiring 14 is laid on the fixed portion 2, and when the moisture sensitive portion 1 is disposed on the fixed portion 2, the other end 1 b of the moisture sensitive portion 1 is connected. Although provided so that the provided temperature sensor 4 and the wiring 14 may be connected, it is not restricted to this. For example, a portion of the wiring 14 that is routed in the hole 1H of the moisture-sensitive portion 1 may be provided in the moisture-sensitive portion 1 so as to be interchangeable in advance. In this case, a portion of the wiring 14 that is provided integrally with the moisture sensitive portion 1 and a portion that is laid on the fixed portion 2 are connected, for example, inside the fixed portion 2. Even if it does in this way, the wiring 14 connected to the temperature sensor 4 provided in the other end 1b of the moisture-sensing part 1 can be easily routed. As a result, the operation of replacing the moisture sensitive unit 1 can be easily performed.

  Further, in the steam amount measuring apparatus according to the first to third embodiments, a guide for positioning the one end 1a of the moisture sensitive unit 1 in the longitudinal direction of the moisture sensitive unit 1 is formed in the fixed hole 2h of the fixed unit 2. It may be. In this way, the moisture sensitive part 1 can be attached to the fixed part 2 more easily.

  Here, although there is a part which overlaps with embodiment mentioned above, the characteristic structure of this invention is enumerated.

  The vapor amount measuring apparatus according to the present invention includes a columnar moisture-sensitive portion 1 made of a porous material, a fixing portion 2 that fixes one end 1a in the longitudinal direction of the moisture-sensitive portion 1, and one end 1a of the moisture-sensitive portion 1. And a first sensor (temperature sensor 4) installed at the other end 1b in the longitudinal direction of the moisture sensitive unit 1. In the moisture sensitive part 1, the water supplied by the supply part 3 flows from one end 1a to the other end 1b.

  As a result, the water supplied to one end 1a of the moisture sensitive portion 1 made of a porous material reaches the surface of the other end 1b of the moisture sensitive portion 1 and evaporates on the surface. The temperature measured by the temperature sensor 4 installed in can be regarded as the wet bulb temperature. Further, depending on the measurement environment, the fixing unit 2 fixed to the wall surface 20 of the processing chamber that defines the space to be measured heats one end 1a of the moisture sensing unit 1 as a heating body, and is supplied to the moisture sensing unit 1. Water may be heated and boil. However, since the water supplied to the moisture sensitive part 1 flows through the one end 1a of the moisture sensitive part 1 connected to the fixed part 2 as a heating body to the other end 1b, the flow rate and liquid temperature of the water are reduced. By appropriately setting, boiling of the water can be suppressed. At this time, the temperature of the water supplied to the one end 1a of the moisture sensitive unit 1 is lower than the wet bulb temperature of the measurement target space, but the length in the longitudinal direction protruding into the measurement target space of the moisture sensitive unit 1 is long. Since the temperature is about 30 to 300 mm and the temperature sensor 4 is provided at the other end 1b, the temperature of the water supplied to the one end 1a of the moisture sensitive portion 1 is the surface of the other end 1b of the moisture sensitive portion 1. By reaching the vicinity, the wet bulb temperature in the space to be measured can be sufficiently approached. As a result, the influence of the temperature of the water supplied to the humidity sensing unit 1 on the measurement accuracy of the wet bulb temperature can be kept low, and the decrease in the measurement accuracy of the wet bulb temperature can be suppressed even in a high temperature environment. it can.

  In the vapor amount measuring device, the supply unit 3 is connected to one end of the moisture sensitive unit 1 based on the second sensor 8 that measures the moisture content on the surface of the moisture sensitive unit 1 and the measurement value of the second sensor 8. You may further provide the water quantity control part 9 which controls the quantity of the water supplied to 1a.

  If it does in this way, the water quantity control part 9 can control the water quantity supplied to the moisture sensitive part 1 based on the measured value of the 2nd sensor 8 so that the surface of the moisture sensitive part 1 may get wet. . Therefore, the surface of the moisture sensitive part 1 can always be sufficiently wet when the wet bulb temperature is measured by the temperature sensor 4. In addition, when it is determined by the second sensor 8 that water vapor condensation has occurred, a more accurate value can be obtained by obtaining the water vapor amount from the dew point temperature based on the measurement value obtained by the temperature sensor 4. .

  The second sensor 8 may be disposed on the surface of the moisture-sensitive part 1 so as to extend from one end 1a to the other end 1b in the longitudinal direction.

  Thereby, since the 2nd sensor 8 can measure the moisture content of the whole surface from the one end 1a to the other end 1b in the longitudinal direction of the moisture sensitive part 1, it means that the whole surface is wet. By measuring the wet bulb temperature with the temperature sensor 4 after confirmation, a highly accurate measured value of the wet bulb temperature can be obtained. Furthermore, when the water amount control unit 9 is provided, the amount of water supplied to the moisture sensitive unit 1 can be controlled based on the measurement value of the second sensor 8 so that the entire surface is wet. As a result, a highly accurate wet bulb temperature measurement value can be obtained.

  The supply unit 3 includes a third sensor 10 that measures the temperature of water supplied to the moisture sensing unit 1, and the supply unit 3 is based on the measured value of the third sensor 10. And a water temperature control unit 11 for controlling the temperature of the water supplied to the water.

  Thereby, for example, when the temperature of the space to be measured (dry bulb temperature) is high, the fixing unit 2 is heated to a high temperature, and the water supplied to the moisture sensitive unit 1 by the third sensor 10 is obtained. When it is confirmed that the temperature is heated by the fixing unit 2 and boiling, the water temperature control unit 11 can be controlled so as to increase the amount of water supplied to the moisture sensing unit 1. As a result, since the boiling of the water supplied to the one end 1a of the moisture sensing unit 1 can be suppressed, the influence of the temperature of the water supplied to the moisture sensing unit 1 on the measurement accuracy of the wet bulb temperature can be reduced.

  A hole 1H extending in the longitudinal direction from one end 1a is provided in the inside of the moisture sensitive portion 1, and is arranged so as to extend from the first sensor (temperature sensor 4) to the one end 1a through the hole 1H. The wiring 14 may be further provided.

  Thereby, the wiring 14 connected to the temperature sensor 4 provided at the other end 1b of the moisture sensitive unit 1 can be easily routed. As a result, the operation of replacing the moisture sensitive unit 1 can be easily performed.

  The moisture sensitive part 1 may be made of a porous material formed by an injection molding method or an extrusion molding method. By using the injection molding method, the moisture sensitive part 1 having the above shape can be formed easily and accurately. Moreover, the stick-shaped moisture sensitive part 1 and the moisture sensitive part 1 which has a linear pore can be easily formed by using an extrusion method. When the extrusion molding method is used, the groove of the O-ring formed in the moisture sensitive portion 1 may be processed after molding.

  The method for measuring the amount of vapor according to the present invention is a method for measuring the amount of water vapor by measuring the temperature in the vicinity of the surface, the step of preparing the moisture sensitive part 1 made of a porous material (S10), A step (S20) of fixing one end 1a in the longitudinal direction of the wet part 1 to the wall surface 20 of the processing chamber defining the space to be measured; and a step of supplying water to the one end 1a of the moisture sensitive part 1 (S30); And a step (S40) of measuring the temperature of the other end 1b in the longitudinal direction of the moisture sensitive portion 1. In the step of supplying water (S30), water is supplied until the other end 1b in the longitudinal direction of the moisture sensitive portion 1 is wet. In the step of measuring temperature (S40), the temperature is measured by the first sensor (temperature sensor 4) installed at the other end 1b in a state where the other end 1b of the moisture sensitive unit 1 is wet.

  Thereby, after moistening the other end 1b in the step (S30) with respect to the moisture sensitive part 1 fixed so that the other end 1b protrudes into the space to be measured in the step (S20), the step (S40) ), The temperature measured by the temperature sensor 4 installed at the other end 1b can be regarded as the wet bulb temperature of the space to be measured.

  The step of supplying water (S30) may include a step of confirming the amount of water on the surface of the moisture sensitive portion 1 when the other end 1b of the moisture sensitive portion 1 is wetted (S31). The step (S40) of measuring the temperature includes the step (S41) of measuring the wet state (moisture content) of the other end 1b of the moisture sensitive portion 1 and the other end 1b of the moisture sensitive portion 1 in the confirming step (S31). A step of comparing the moisture content of the surface of the moisture-sensitive portion 1 confirmed when the moisture is wet and the wet state (moisture content) of the other end 1b of the moisture-sensitive portion 1 measured in the measuring step (S41) (S42). ) And a step (S43) of adjusting the amount of water at the one end 1a of the moisture sensitive portion 1 based on the result of the comparing step.

  If it does in this way, a moisture content of the surface of moisture sensing part 1 when the other end 1b of moisture sensing part 1 checked beforehand in a process (S31) is moistened is made into a standard value, and process (S40). In step S42, it is possible to compare and determine whether the moisture amount on the surface of the moisture sensitive portion 1 when the temperature is measured by the temperature sensor 4 is excessive or insufficient. Thereby, the temperature can be measured by the temperature sensor 4 after confirming that the other end 1b of the moisture sensitive portion 1 is wet. Further, based on the result of comparison, the amount of water supplied to the moisture sensitive unit 1 is adjusted in the step (S43), so that the other end 1b of the moisture sensitive unit 1 is reliably moistened and the temperature is adjusted by the temperature sensor 4. Can be measured. As a result, the temperature measured by the temperature sensor 4 in the step (S40) can indicate the wet bulb temperature with higher accuracy. Further, in the step (S41) of measuring the wet state (moisture amount) of the other end 1b of the moisture sensitive unit 1, when it is determined that the number of water droplets exceeds the amount of water supplied to the one end 1a of the moisture sensitive unit 1 is determined. The temperature in the vicinity of the surface of the other end 1b of the moisture sensitive portion 1 may be measured as the dew point temperature. In this case, when condensation occurs by cooling the fixed part 2 or the moisture sensitive part 1 in the vicinity of the fixed part 2 with the supply water, one end of the moisture sensitive part 1 is determined while judging the movement and distribution state of the condensed water. You may control the amount of water supplied to 1a, and the pressure in the moisture-sensitive part 1. FIG. By doing so, it is possible to measure the amount of water vapor with higher accuracy.

  The step (S40) of measuring the temperature may include a step (S44) of controlling the temperature of the water supplied to the one end 1a of the moisture sensitive unit 1.

  Thereby, the temperature of the water supplied to the one end 1a of the moisture sensitive part 1 can be made to be the same as the wet bulb temperature of the space to be measured. As a result, a highly accurate wet bulb temperature measurement value can be obtained.

  In the step of measuring the temperature (S <b> 40), the moisture content on the surface of the moisture-sensitive part 1 may be measured as the dielectric constant of the surface of the moisture-sensitive part 1.

  If it does in this way, the moisture content of the surface of moisture sensing part 1 can be measured correctly. Therefore, it is possible to measure the wet bulb temperature with high accuracy after confirming that the other end 1b of the moisture sensitive portion 1 is wet as described above, and the structure related to the moisture sensitive portion 1 is simple. Therefore, for example, handling is easy even in replacement work or the like.

  In the step (S01) of preparing the moisture sensitive portion 1, the moisture sensitive portion 1 may be prepared using a porous material formed by an injection molding method or an extrusion molding method. By using the injection molding method, the moisture sensitive part 1 having the above shape can be formed easily and accurately. A ceramic porous body made by injection molding can easily form a water passage, a sensor fixing structure, a porous body mounting structure, etc., and can be easily replaced because of its high accuracy. Moreover, the stick-shaped moisture sensitive part 1 and the moisture sensitive part 1 which has a linear pore can be easily formed by using an extrusion method. When the extrusion molding method is used, the groove of the O-ring formed in the moisture sensitive portion 1 may be processed after molding.

  Although the embodiment of the present invention has been described above, the above-described embodiment can be variously modified. The scope of the present invention is not limited to the above-described embodiment. The scope of the present invention is defined by the terms of the claims, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  The present invention provides a simple and inexpensive method for measuring the amount of water vapor in a high temperature environment exceeding 200 ° C., or in an environment where dirt, water droplets, or water vapor condensation occurs on a measuring device (humidity sensitive part). The present invention is particularly advantageously applied as a measuring device and a vapor amount measuring method.

  DESCRIPTION OF SYMBOLS 1 Moisture sensitive part, 1a one end, 1b other end, 1H hole, 1K 2nd hole, 2 fixing part, 2h fixing hole, 3 supply part, 4 temperature sensor, 5 plug, 7 calculating part, 8 2nd sensor 8a, 8b, 8c, 8d, 8e, 8f Electrode, 9 Water volume control unit, 10 Third sensor, 11 Water temperature control unit, 13 Piping, 14 Wiring, 15 Drain pipe, 20 Wall surface, 20h Wall hole, 100 Steam volume measuring device.

Claims (11)

A column-shaped moisture-sensitive part made of a porous material,
A fixing part for fixing one end in the longitudinal direction of the moisture sensitive part to a wall surface of a processing chamber defining a space to be measured;
A supply unit for supplying water to the one end of the moisture sensing unit through the fixing unit;
A first sensor installed at the other end in the longitudinal direction of the moisture sensitive part,
A steam amount measuring device in which the water supplied by the supply unit flows from the one end to the other end inside the humidity sensing unit. A second sensor for measuring the moisture content on the surface of the moisture sensitive part;
The steam amount measurement according to claim 1, further comprising: a water amount control unit that controls the amount of water supplied from the supply unit to the one end of the moisture sensing unit based on a measurement value of the second sensor. apparatus.   The said 2nd sensor is a vapor | steam amount measuring apparatus of Claim 2 arrange | positioned so that it may extend from the said one end in the said longitudinal direction to the said other end on the said surface of the said moisture sensitive part. The supply unit includes a third sensor that measures a temperature of water supplied to the moisture sensing unit,
The water temperature control part which controls the water temperature of the water which the said supply part supplies to the said one end of the said moisture sensitive part based on the measured value of a said 3rd sensor further, The any one of Claims 1-3 The steam quantity measuring device according to item. A hole extending in the longitudinal direction from the one end is provided in the moisture-sensitive part,
The vapor amount measuring device according to claim 1, further comprising a wiring arranged to extend from the first sensor to the one end through the inside of the hole.   The said moisture sensitive part is a vapor | steam amount measuring apparatus of any one of Claims 1-5 consisting of the porous material formed of the injection molding method or the extrusion molding method. A method for measuring the amount of water vapor by measuring the amount of water vapor by measuring the temperature near the surface,
Preparing a moisture sensitive part made of a porous material;
Fixing one end in the longitudinal direction of the moisture sensitive part to the wall surface of the processing chamber defining the space to be measured;
Supplying water to the one end of the moisture sensitive part;
Measuring the temperature of the other end in the longitudinal direction of the moisture sensitive part,
In the step of supplying water, the water is supplied until the other end in the longitudinal direction of the moisture-sensitive part is wetted,
In the step of measuring the temperature, a method of measuring a vapor amount, wherein the temperature is measured by a first sensor installed at the other end in a state where the other end of the moisture sensitive portion is wet. The step of supplying water includes the step of confirming the amount of water on the surface of the moisture sensitive portion when the other end of the moisture sensitive portion is wetted,
The step of measuring the temperature includes
Measuring the moisture content of the surface of the moisture sensitive part;
The amount of moisture on the surface of the moisture sensitive portion confirmed when the other end of the moisture sensitive portion is wet in the step of confirming, and the amount of moisture on the surface of the moisture sensitive portion measured in the step of measuring. A step of comparing;
The method for measuring the amount of steam according to claim 7, further comprising a step of adjusting an amount of water supplied to the one end of the moisture-sensitive part based on a result of the comparing step.   The method for measuring the amount of steam according to claim 7, wherein the step of measuring the temperature includes a step of controlling a water temperature of water supplied to the one end of the moisture sensitive unit.   The method for measuring a vapor amount according to claim 8 or 9, wherein, in the step of measuring the temperature, the moisture content on the surface of the moisture sensitive portion is measured as a dielectric constant of the surface of the moisture sensitive portion. The amount of steam according to any one of claims 7 to 10, wherein the step of preparing the moisture-sensitive part prepares the moisture-sensitive part using a porous material formed by an injection molding method or an extrusion molding method. Measuring method.

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