JP2014031293A - Scribing method of brittle material substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a scribing method capable of preventing a chip at an intersection point while using a grooved cutter wheel when a cross scribing is performed to a brittle material substrate.SOLUTION: A scribing method, in which a first scribe line S1 is formed on a brittle material substrate M and then a second scribe line S2 crossing the first scribe line S1 is formed by using a grooved cutter wheel 2 having continuous concave and convex portions 2b on a cutting edge ridge line part 2a, includes: supplying oil onto a surface of the brittle material substrate M at least in a process of forming the second scribe line S2; and rolling the grooved cutter wheel 2 to be moved while pressing it along a predetermined scribe line L to which the oil is supplied.

Description

  The present invention relates to a scribing method for a brittle material substrate such as a glass substrate, and more particularly to a scribing method for forming vertical and horizontal scribing lines (cut grooves) on a substrate along a planned division line.

In general, in the process of dividing a large area brittle material substrate, first a step of forming a scribe line of finite depth on the substrate surface, and then pressing with a break bar or break roller along the scribe line from the back side of the substrate The method which consists of the process of breaking by this is used (refer patent document 1 and patent document 2).
Specifically, as shown in FIG. 4, a scribe line S1 in the X direction is formed on the surface of the brittle material substrate M with a cutter wheel (also referred to as a scribing wheel), and then in the Y direction intersecting the X direction. A scribe line S2 is formed. After forming a plurality of scribe lines intersecting in the XY direction in this way, the substrate M is sent to the breaking device, and is divided into unit substrates M1 by applying an external force along the scribe lines.

  As a cutter wheel for processing a scribe line, a cutter wheel 1 (hereinafter referred to as “normal cutter wheel”) having no irregularities on a blade edge portion 1a as shown in FIG. 5 and a blade edge portion 2a as shown in FIG. There is a cutter wheel 2 (hereinafter referred to as a “grooved cutter wheel”) having an uneven surface 2b. Specific examples of the latter grooved cutter wheel include Penette (registered trademark) cutter wheel and Apio (APIO) cutter wheel manufactured by Samsung Diamond Industrial Co., Ltd.

  When scribing with the normal cutter wheel 1, there is an advantage that the strength of the sectional surface can be kept high. On the other hand, since the biting force on the substrate is small, there is a problem that it is difficult to start scribing and the cutter wheel slips and good scribing cannot be performed.

  Compared with the normal cutter wheel 1 described above, the grooved cutter wheel 2 has a larger frictional force and biting force on the substrate, and can penetrate the crack deeply into the substrate due to the impact on the substrate surface by the convex portion. It has the advantage of being able to.

  When cross-scribing in the XY direction is performed on the brittle material substrate M using the normal cutter wheel 1, as shown in FIG. 4, the intersection point P through which the normal cutter 1 passes through the initially formed X-direction scribe line S1. In this case, a phenomenon that the scribe line S2 in the Y direction is not partially formed, that is, a phenomenon called “intersection jump” may occur. This phenomenon of “intersection jump” is the intersection where stress remains on both sides of the X-direction scribe line S1 formed first, and when the next Y-direction scribe line S2 is formed. In this case, it is considered that the pressing force for generating the vertical crack is scraped off.

  On the other hand, when cross scribing is performed with the grooved cutter wheel 2, the impact point is applied to the substrate M by the convex part 2b of the cutting edge, so that the grooved cutter wheel 2 passes through the remaining portion of the stress. Sometimes the pressing force is less likely to be removed. For this reason, in the grooved cutter wheel, the phenomenon of “intersection jump” is less likely to occur, and a high penetration vertical crack can be obtained.

Japanese Patent No. 3074143 JP 2004-359502 A

  As described above, when cross scribing is performed with a grooved cutter wheel, the phenomenon of “intersection jump” can be suppressed, but at the intersection P of the vertical and horizontal scribe lines intersecting each other, it is called “brick”. Defects sometimes occurred.

As shown in FIG. 7, “bake” refers to the process of forming the vertical scribe line S1 first and then pressing and rolling the cutter wheel 2 to process the horizontal scribe line S2 in the substrate M. The substrate on which the pressure contact force of the cutter wheel 2 is loaded (the substrate on the left side in FIG. 7) sinks as shown by the arrow from the substrate on which the pressure is not applied (the substrate on the right side in FIG. 7). This refers to a fine chip (indicated by β in the figure) that occurs when the scribe line S1 is crossed over the right substrate.
Such “bitter” naturally deteriorates the quality of the product after division, and has been a major cause of reducing the yield of the product.

  Therefore, the present invention has been made in view of such a conventional problem, and when cross-scribing a brittle material substrate, while using a grooved cutter wheel in which “intersection jump” is unlikely to occur, An object of the present invention is to provide a scribing method that can prevent the above-described problem.

  In order to achieve the above object, the present invention takes the following technical means. That is, in the scribing method of the present invention, a first scribe line is formed on the brittle material substrate using a grooved cutter wheel having concavities and convexities that are continuous with the edge of the cutting edge, and then the second scribe intersects with the first scribe line. A scribing method for forming a line, wherein at least in the step of forming the second scribe line, oil is supplied to the surface of the brittle material substrate, and a grooved cutter wheel is provided along the scribe line to which the oil is supplied. It was made to roll while pressing.

According to the scribing method of the present invention, when the second scribing is performed, the oil is supplied onto the planned scribing line prior to rolling of the grooved cutter wheel. Here, kerosene, spindle oil, machine oil, grease, or the like can be used as the “oil”. Although liquid oil is preferable from the viewpoint of ease of application, it is not particularly limited.
The applied oil exerts an effect as a cushion that covers the substrate surface and alleviates the impact at impact of the grooved cutter wheel. As a result, it is possible to suppress the phenomenon of “scratching” that occurs where the grooved cutter wheel exceeds the existing scribe line at the intersection of the scribe lines that intersect each other. The supplied oil also acts as a lubricant to promote smooth rolling of the grooved cutter wheel, and helps to extend the life of the grooved cutter wheel.

In the above invention, the oil supply nozzle is attached to the scribe head that holds the grooved cutter wheel, and the oil is supplied from the oil supply nozzle to the forward portion in the traveling direction as the grooved cutter wheel moves. It should be configured.
Thereby, it can supply efficiently along the scribe plan line which should be processed with a movement of a cutter wheel with a groove | channel, without scattering oil to an excess part.

Moreover, in the said invention, after forming a scribe line with the said cutter wheel with a groove | channel, it is good to set it as the structure which wash | cleans and removes the oil which remains on a board | substrate with a washing | cleaning liquid.
As a result, it is possible to obtain a unit substrate with good quality by removing oil components on the substrate, chips generated during scribing, and the like.

The front view which shows an example of the scribing apparatus used for the scribing method of this invention. The top view explaining the scribing method. The front view which shows another Example of the scribing apparatus of FIG. The top view explaining the scribing method of the conventional glass substrate. The front view (a) and side view (b) which show a general normal cutter wheel. The front view (a) and side view (b) which show a general grooved cutter wheel. Sectional drawing explaining the phenomenon of the "debris" in a cross scribe line intersection.

Details of the scribing method according to the present invention will be described below in detail with reference to the drawings.
FIG. 1 is a schematic front view showing an example of a scribing device used for forming a scribe line on a brittle material substrate (hereinafter simply referred to as “substrate”) made of a brittle material.

  The scribing apparatus A includes a table 3 on which a substrate M is placed. The table 3 includes a holding mechanism so that the substrate M placed thereon can be held at a fixed position. In the present embodiment, as the holding mechanism, the substrate is sucked and held through a large number of small air suction holes (not shown) opened on the surface of the table 3. The table 3 can be moved along the horizontal rail 4 in the Y direction (direction perpendicular to the paper surface of FIG. 1), and is driven by a screw shaft 5 that is rotated by a motor (not shown). Further, the table 3 can be rotated in a horizontal plane by a rotation driving unit 6 incorporating a motor.

A bridge 9 provided with support columns 7 and 7 on both sides of the table 3 and a beam (horizontal beam) 8 extending horizontally in the X direction is provided so as to straddle the table 3.
The beam 8 is provided with a guide 10 extending horizontally in the X direction. A scribe head 11 is attached to the guide 10 so that the motor 14 can move along the beam 8 in the X direction. A grooved cutter wheel 2 is attached to the scribe head 11 via a cutter holder 12.

  The grooved cutter wheel 2 has concavities and convexities that are continuous with the edge of the cutting edge as described above. Specifically, as shown in FIG. 6, for example, the diameter is 2 mm to 6 mm and the thickness is about 0.6 mm to 1.5 mm. A ridge line 2a serving as a cutting edge is formed at an angle α (about 100 degrees to 140 degrees) on the outer peripheral portion of the disc disk 2c made of cemented carbide, and a concavity and convexity 2b continuous with the cutting edge ridge line section 2a is formed.

Further, an oil supply nozzle 15 is attached to the scribe head 11 on the front side in the traveling direction of the grooved cutter wheel 2. The oil supply nozzle 15 is connected to an oil supply pump via a pipe (not shown), and when the grooved cutter wheel 2 is scribed, the oil supply nozzle 15 moves together with the grooved cutter wheel 2 to scribe the substrate M. Supply oil on the line.
The oil used should have a viscosity that can form a thin film on the surface of the substrate, and can exert an effect as a cushion to relieve impact on the substrate surface of the cutting edge convex portion. Specifically, spindle oil, Kerosene is used.

Next, a method for performing a cross scribing on the substrate M in the XY direction using this scribing apparatus will be described.
First, the grooved cutter wheel 2 is lowered and rolled while pressing the upper surface of the substrate M along the planned scribe line L as shown in FIG. By this scribing, a scribe line S1 in the X direction is formed as shown in FIG. By repeating the same operation, all the X-direction scribe lines S1 are formed as shown in FIG. This X-direction scribe is referred to as a first scribe.

After performing the first scribe, the table 4 is rotated 90 degrees in the horizontal direction to form a scribe line S2 in the Y direction orthogonal to the X direction by the same means as shown in FIG. 2 (d). . At this time, oil is supplied from the oil supply nozzle 15 onto the scheduled scribe line on the front side in the traveling direction of the grooved cutter wheel 2. By repeating the same operation, all the Y-direction scribe lines S2 are formed as shown in FIG. This Y-direction scribe is called second scribe.
In this way, the scribe lines S1 and S2 that cross each other are processed.

  As described above, when the second scribe is performed, the oil is supplied onto the scribe line before the grooved cutter wheel 2 rolls, so that the oil covers the substrate surface and the grooved cutter wheel. 2 demonstrates the effect as a cushion to relieve impact at impact. As a result, it is possible to suppress the phenomenon of “debris” that occurs where the grooved cutter wheel 2 exceeds the existing scribe line S1 at the intersection P of the scribe lines in the XY direction. The supplied oil also acts as a lubricant for the grooved cutter wheel 2, enabling smooth rolling of the grooved cutter wheel and extending its life.

  In this manner, after processing all the scribe lines S1 and S2 crossing in the XY direction, the surface of the substrate M is cleaned with the cleaning liquid to remove oil components and chips generated during the scribing. This cleaning is preferably performed by moving the substrate M to a different stage (not shown), but it is also possible to perform this cleaning with the scribing apparatus A after installing facilities such as waste liquid treatment. The cleaning liquid used is preferably a neutral detergent or an organic detergent suitable for removing the oil component, but an appropriate one is selected depending on the type of oil used.

  In the above embodiment, an example in which the oil supply nozzle 15 is attached to the scribe head 11 of the grooved cutter wheel 2 has been shown. However, as shown in FIG. 3, the oil supply nozzle 15 is separated from the scribe head 11 along the guide 10 of the beam 8. You may make it attach to the holder 16 which moves.

  In the above embodiment, the oil is supplied only when the second scribe is performed. However, the oil may be supplied on the scheduled scribe line also when the first scribe is performed.

(Example)
The inventors conducted an experiment to verify the number of intersection jumps when oil was supplied and cross cut was performed.
The grooved cutter wheel (M-Penett, manufactured by Samsung Diamond Industrial Co., Ltd.) having a diameter of 2 mm and a cutting edge angle α of 115 degrees was used. The glass substrate was 0.7 mm thick, and the pressing load was 0.1 MPa.
As a result, the crosscut was performed 100 times, but no jumping at the intersection occurred, and separation at all the intersections became possible, and the result was good.

  Although typical examples of the present invention have been described above, the present invention is not necessarily limited to the above-described embodiments, and the object of the present invention is achieved and appropriately modified within the scope of the claims. It is possible to change.

  The scribing method of the present invention can be suitably used when cross-scribing a brittle material substrate such as glass.

A scribe device M brittle material substrate β chip S1 X-direction scribe line S2 Y-direction scribe line 1 normal cutter wheel 2 grooved cutter wheel 2a ridgeline portion 2b unevenness 3 table 8 beam 10 guide 11 scribe head 15 oil supply nozzle

Claims (3)

A scribing method is to form a first scribe line on a brittle material substrate using a grooved cutter wheel having concavities and convexities that are continuous at the edge of the cutting edge, and then form a second scribe line that intersects the first scribe line. ,
At least in the step of forming the second scribe line, supplying oil to the surface of the brittle material substrate,
A method for scribing a brittle material substrate in which a grooved cutter wheel is rolled while being pressed along a scribe line to which oil is supplied.   An oil supply nozzle for supplying oil is attached to a scribe head that holds the grooved cutter wheel, and the oil is supplied from the oil supply nozzle to the forward portion in the traveling direction as the grooved cutter wheel moves. The brittle material substrate scribing method according to claim 1.   3. The method of scribing a brittle material substrate according to claim 1, further comprising a step of cleaning and removing oil remaining on the brittle material substrate with a cleaning liquid after forming a scribe line by the grooved cutter wheel.

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