JP2011203150A - Displacement measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a displacement measuring device that measures an interlayer displacement more accurately even when any local deformation occurs on both surfaces of a layer having two planes.SOLUTION: The displacement measuring device 1A has: a standard displacement measuring section 4 that emits standard light LS from a ceiling 2 to a floor 3 to measure the reference displacement; and a reference displacement measuring section 5 that emits reference light LR inclined by a specified angle α to the standard light LS from the ceiling 2 to the floor 3 to detect the reference displacement. A light source is used as an irradiation section 6 to radiate diffused light.

Description

  The present invention relates to a displacement measuring device, and is particularly suitable for application to measuring an inter-layer displacement of a layer having two planes.

  As this type of displacement measuring device, measurement using a laser beam and imaging means is used to measure the displacement between the observation axis of the displacement detection object viewed from the observation point and the vertical plane, or the inclination of the vertical plane. A system is known (for example, refer to Patent Documents 1 and 2). In such a measurement system, the light spot position of the incident portion of the laser beam irradiated toward the displacement detection target is imaged by an imaging means such as a camera, and the obtained image is subjected to predetermined image processing to detect displacement. The displacement of the object in three directions can be measured.

  However, in the invention according to Patent Document 1, when the ceiling or floor on which the laser and the imaging unit are installed is locally deformed, an error occurs in the displacement in the horizontal direction due to this deformation. It is known that such an angle error due to local deformation is caused by an earthquake. Note that the local deformation can be considered as a rotation of the ceiling or the floor, and an error caused by the displacement in the horizontal direction is referred to as an angle error in this specification. Due to the occurrence of this angle error, the conventional measurement system outputs the angle error mixed with the measured interlayer displacement, which makes it difficult to accurately measure the displacement.

  In addition, sensors that can measure x, y, z coordinates and three-axis rotation of a measurement target using a plurality of light receiving elements are disclosed (for example, Patent Document 3 and Non-Patent Document 1). By using these sensors, it is possible to detect the angle of the ceiling or floor.

Japanese Patent No. 2970867 JP 2009-216402 A US Pat. No. 5,883,803

`` Measurement of fine 6-degrees-of-freedom displacement of rigid bodies through splitting a laser beam: experimental investigation '', 2002 Optical Engineering, Opt. Eng. 41 (4), p.860-871

  In any of Patent Document 3 and Non-Patent Document 1, it is assumed that the measuring instrument main body is arranged at a fixed point. Therefore, for example, when a sensor is attached to the ceiling, it is necessary to assume that the ceiling does not rotate. Therefore, even if it is applied to a system in which rotation can occur in the measuring instrument body, the angle error due to rotation of the location where the sensor is attached cannot be eliminated, so in systems where local displacement can occur on both the ceiling and floor There was a problem that the interlayer displacement could not be measured accurately.

  Therefore, an object of the present invention is to provide a displacement measuring apparatus that can measure interlayer displacement more accurately even when local deformation occurs on both surfaces of a layer having two planes.

  The invention which concerns on this invention is the displacement which measures the interlayer displacement between layers provided with the 1st plane and the 2nd plane provided at predetermined intervals with respect to the said 1st plane using the diffused light which propagates radially. A measurement apparatus, wherein a reference displacement is detected by irradiating reference light from the first plane toward the second plane, and the reference is measured from the first plane toward the second plane. A reference displacement measuring unit that detects reference displacement by irradiating reference light inclined at a predetermined angle with respect to the light is provided.

  In the invention according to the present invention, the reference displacement measurement unit includes a reference irradiation unit that emits reference light from the first plane toward the second plane, and the reference displacement measurement unit includes the reference irradiation unit. A first reference irradiating unit that irradiates the first reference light inclined at a predetermined angle with respect to the reference light from the X axis of the XY coordinate as the origin toward the second plane, and the Y reference from the Y axis of the XY coordinate And a second reference irradiating unit configured to irradiate the second reference light inclined at a predetermined angle with respect to the reference light toward the second plane.

  The invention according to the present invention is characterized in that the reference light is irradiated by a reflecting portion that reflects a part of the reference light from the first plane toward the second plane.

  In the invention according to the present invention, a part of the reference light is reflected from the second plane toward the first plane, and the reflected light reflected by the reflection part is transmitted from the first plane to the second plane. A diffusing plate that reflects toward a plane, and the reference light is irradiated by the diffusing plate.

  According to the present invention, the apparatus includes a reference displacement measuring unit that measures the reference displacement by irradiating the reference light, and a reference displacement measuring unit that detects the reference displacement by irradiating the reference light inclined by a predetermined angle with respect to the reference light. Since the light source that emits the diffused light is used as the irradiating unit, the interlayer displacement can be measured more accurately even when local deformation occurs in the first plane and the second plane.

It is a schematic diagram which shows the whole structure of the displacement measuring device which concerns on 1st Embodiment. It is a perspective view which shows typically the arrangement | positioning location of each part of the displacement measuring device which concerns on 1st Embodiment. It is a schematic diagram which shows the use condition of the displacement measuring device which concerns on 1st Embodiment. It is a schematic diagram which shows the whole structure of the displacement measuring device which concerns on 1st Embodiment, and is a figure which shows the state which the inclination produced. It is a schematic diagram which shows the whole structure of the displacement measuring device which concerns on 2nd Embodiment. It is a schematic diagram which shows the whole structure of the displacement measuring device which concerns on 3rd Embodiment.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
(1) First embodiment (overall configuration)
A displacement measuring apparatus 1A shown in FIG. 1 includes a ceiling 2 of a building as a first plane and a floor 3 as a second plane that is opposed to the ceiling 2 and is substantially parallel with a predetermined distance H. It is installed between the layers. The displacement measuring device 1A is installed so as to be able to measure a horizontal displacement (hereinafter referred to as an interlayer displacement) generated in the ceiling 2 due to a disaster such as an earthquake.

  The displacement measuring apparatus 1A includes a reference displacement measuring unit 4 that measures the reference displacement by irradiating the reference light LS vertically between the ceiling 2 and the floor 3, and a predetermined angle with respect to the reference light LS between the ceiling 2 and the floor 3. and a reference displacement measuring unit 5 that detects reference displacement by irradiating α-referenced reference light LR. The reference displacement measurement unit 4 and the reference displacement measurement unit 5 each include an irradiation unit 6, a light receiving unit 7, and a lens 8 that is paired with the light receiving unit 7. The lens 8 is a convex lens.

  The irradiation unit 6 includes a light source that irradiates diffused light that propagates radially. In the case of this embodiment, the irradiation unit 6 uses an LED (Light Emitting Diode) and is installed on the ceiling 2. In the case of a light source that irradiates diffused light, it has been confirmed by experiments that the installation location of the light source, in this case, the rotation of the ceiling 2, does not affect the standard displacement and the reference displacement. Therefore, in the present invention, the light source that emits diffused light is provided on the ceiling as the irradiating unit 6, so that the rotation of the ceiling 2 can be ignored.

  Various light receiving units 7 can be selected. For example, a plate-shaped optical position sensor (PSD) can be preferably used. The light receiving unit 7 is electrically connected to the calculating unit 9. The calculation unit 9 is configured to be able to calculate the interlayer displacement from the detected standard displacement and reference displacement.

The reference displacement measurement unit 4 includes a reference irradiation unit 10 as the irradiation unit 6 and a reference light receiving unit 11 as the light receiving unit 7. The reference irradiation unit 10 is provided so as to be able to irradiate the reference light LS vertically downward from the ceiling 2. The light receiving surface of the reference light receiving unit 11 is arranged in parallel to the floor 3 so that the reference light LS that has passed through the reference lens 12 as the lens 8 can be received vertically. The displacement detected by the reference light receiving unit 11 is referred to as a reference displacement (x ₁ , y ₁ ).

  In the present embodiment, the reference light receiving unit 11 and the reference lens 12 are provided in the displacement detection unit 16. The displacement detection unit 16 is disposed on the floor 3 and includes a housing 17 and a base 18 provided in the housing 17. The reference lens 12 is held on the upper surface of the housing 17 with the optical axis set in the vertical direction. The reference light receiving unit 11 is fixed to the base 18 in a state where the light receiving surface is arranged in parallel to the floor 3 so as to face the reference lens 12. Thereby, the displacement detection unit 16 is configured to be able to focus the reference light LS emitted from the reference irradiation unit 10 on the reference light receiving unit 11 by the reference lens 12.

  The reference displacement measuring unit 5 includes a reference irradiation unit 13 </ b> A as the irradiation unit 6 and a reference light receiving unit 14 as the light receiving unit 7. The reference irradiation unit 13A irradiates the reference light LR with an inclination by a predetermined angle α with respect to the reference light LS. The reference light receiving unit 14 is provided to be inclined by an angle α with respect to the floor 3 so as to vertically receive the reference light LR that has passed through the reference lens 15 as the lens 8.

The configuration of the reference displacement measuring unit 5 will be described in more detail with reference to FIG. In this figure, the XY coordinates of the ceiling surface with the origin O as the installation position of the reference irradiation unit 10 on the ceiling 2 are considered. 13 A of reference irradiation parts consist of the 1st reference irradiation part 20 installed on the X-axis of XY coordinates, and the 2nd reference irradiation part 21 installed on the Y-axis. In the XY coordinates, the position of the first reference irradiation unit 20 is (−d ₀ , 0), and the position of the second reference irradiation unit 21 is (0, −d ₀ ).

Further, consider the xy coordinates of the floor surface that is vertically below the origin O and has the center of the reference light receiving unit 11 on the floor 3 as the origin o. The reference light receiving unit 14 includes a first reference light receiving unit 22 installed on the x axis and a second reference light receiving unit 23 installed on the y axis. In the xy coordinates, the position of the first reference light receiving unit 22 is (l ₀ , 0), and the position of the second reference light receiving unit 23 is (0, l ₀ ). The displacement detected by the first reference light receiving unit 22 is called a first reference displacement (x ₂ , y ₂ ), and the displacement detected by the second reference light receiving unit 23 is called a second reference displacement (x ₃ , y ₃ ). .

  In the case of this embodiment, the first reference light receiving unit 22, the second reference light receiving unit 23, and the reference lens 15 are provided in the displacement detection unit 16 together with the reference light receiving unit 11 and the reference lens 12. The reference lens 15 is held at the upper corner of the housing 17 with the optical axis inclined at an angle α with respect to the vertical direction (FIG. 1). The first reference light receiving unit 22 and the second reference light receiving unit 23 are fixed to the base 18 in a state where the light receiving surface is inclined by an angle α with respect to the vertical direction so as to face the reference lens 15. That is, the first reference light receiving unit 22 is fixed in a state where the light receiving surface is inclined by an angle α with respect to the x axis. The second reference light receiving unit 23 is fixed in a state where the light receiving surface is inclined by an angle α with respect to the y axis.

  The first reference irradiation unit 20 arranged in this way irradiates the first reference light receiving unit 22 on the x axis with the first reference light LR1 inclined by the angle α with respect to the reference light LS. The second reference irradiating unit 21 irradiates the second reference light receiving unit 23 on the y axis with the second reference light LR2 inclined by the angle α with respect to the reference light LS.

  Accordingly, the displacement detection unit 16 is configured to be able to focus the first reference light LR1 emitted from the first reference irradiation unit 20 on the first reference light receiving unit 22 by the reference lens 15. Further, the displacement detection unit 16 is configured so that the second reference light LR <b> 2 emitted from the second reference irradiation unit 21 can be condensed on the second reference light receiving unit 23 by the reference lens 15.

In addition, the relative torsional rotation angle between the first plane and the second plane is expressed as ψ with the Z axis being positive. As for the rotation angle of the floor 3, the rotation angle around the x axis is expressed as θ _x , and the rotation angle around the y axis is expressed as θ _y .

(Function and effect)
The operation and effect of the displacement measuring apparatus 1A according to the present embodiment will be described. The standard irradiation unit 10, the first reference irradiation unit 20, and the second reference irradiation unit 21 are installed on the ceiling 2, and the displacement detection unit 16 is arranged on the floor 3. By turning on a power supply (not shown), the reference irradiation unit 10 emits the reference light LS. Further, the first reference irradiation unit 20 emits the first reference light LR1. Furthermore, the second reference irradiation unit 21 emits the second reference light LR2.

  The reference light LS emitted from the reference irradiation unit 10 is emitted radially downward. The reference light LS passes through the reference lens 12 and is received by the reference light receiving unit 11 and detected as a reference light receiving position 11P.

  Further, the first reference light LR1 emitted from the first reference irradiation unit 20 is irradiated radially in a direction inclined by an angle α with respect to the reference light LS. The first reference light LR1 passes through the corresponding reference lens 15, is received by the first reference light receiving unit 22, and is detected as the first reference light receiving position 22P.

  Further, the second reference light LR2 irradiated from the second reference irradiation unit 21 is irradiated radially in a direction inclined by an angle α with respect to the reference light LS. The second reference light LR2 passes through the corresponding reference lens 15, is received by the second reference light receiving unit 23, and is detected as a second reference light receiving position 23P.

If the ceiling 2 is displaced in the horizontal direction and the rotational direction with respect to the floor 3 in this state, the reference light receiving position 11P, the first reference light receiving position 22P, and the second reference light receiving position 23P are also respectively detected in the displacement detector 16. Moving. Thereby, the displacement detection unit 16 detects the reference displacement (x ₁ , y ₁ ) from the movement amount of the reference light receiving position 11P, and the first reference displacement (x ₂ , y ₂ ) from the movement amount of the first reference light receiving position 22P. ) And the second reference displacement (x ₂ , y ₂ ) is detected from the amount of movement of the second reference light receiving position 23P. As described above, the rotation of the ceiling 2 can be ignored.

From the reference displacement (x ₁ , y ₁ ), the first reference displacement (x ₂ , y ₂ ), and the second reference displacement (x ₃ , y ₃ ) thus detected, the calculation unit 9 calculates the interlayer displacement. And angular error are separated. Thereby, 1 A of displacement measuring apparatuses can measure a more exact interlayer displacement. Note that the interlayer displacement in the x-axis direction is δ _x , and the interlayer displacement in the y-axis direction is δ _y .

In the case of the present embodiment, the reference irradiation unit 10, the first reference irradiation unit 20, and the second reference irradiation unit 21 use a light source that emits diffused light as the irradiation unit 6. The rotation can be ignored. Therefore, the displacement measuring apparatus 1A can more accurately measure the interlayer displacement by erasing only the angle error of the floor 3 from the reference displacement (x ₁ , y ₁ ). The procedure for measuring the interlayer displacements δ _x and δ _y will be specifically described below. The distance between the light receiving surfaces of the reference light receiving unit 11 and the reference light receiving unit 14 and the surface of the floor 3 is very small compared to the distance between the ceiling 2 and the floor 3, so that the light receiving surface and the floor are practically used. 3 is considered to be coincident with the surface.

(Reference displacement)
The reference displacement (x ₁ , y ₁ ) detected by the reference light receiving unit 11 will be described. FIG. 3 is a schematic diagram (xz coordinate) of the floor 3 before the displacement occurs. The reference light receiving position 11P in this case is set as the origin o.

In this state, when the floor 3 rotates about the y-axis by the angle θ _y , it can be considered as in the state where the reference irradiation unit 10 is relatively displaced by Hθ _y as shown in FIG. Then, the reference light receiving position 11P moves by [b / a × (Hθ _y )] in the x direction, where the magnification according to the focal length of the reference lens 12 is b / a.

Accordingly, reference displacement x ₁ of the x-direction is expressed by the following equation.

Similarly, when the floor 3 is rotated about the x axis by an angle θ _x , it can be considered in the same manner as the state in which the reference irradiation unit 10 is relatively displaced by Hθ _x . Then, the reference light receiving position 11P moves by [b / a × (Hθ _x )] in the y direction when the magnification by the focal length of the reference lens 12 is b / a.

Accordingly, reference displacement y ₁ in the y direction is expressed by the following equation.

(Reference displacement)
First, the first reference displacement (x ₂ , y ₂ ) detected by the first reference light receiving unit 22 will be described. The interlayer displacement is δ _x , the rotation angle about the y axis is θ _y , the distance between the reference light receiving unit 11 and the first reference light receiving unit 22 is l ₀ , and the magnification according to the focal length of the reference lens 15 is b ′ / a ′. And

Since the first reference light receiving unit 22 is installed at an angle α with respect to the x axis, the amount of movement of the first reference light receiving position 22P in the x direction is cos α times. Further, the distance between the first reference irradiation unit 20 and the first reference light receiving unit 22 is H / cos α. When the floor 3 rotates about the y axis by an angle θ _y , it can be considered in the same manner as the state in which the first reference irradiation unit 20 is relatively displaced by (Hθ _y / cos α). Then, the first reference light receiving position 22P moves in the x direction by [b ′ / a ′ × (Hθ _y / cos α)].

In this case, the first reference displacement x ₂ in the x direction is obtained by the following equation.

Note that the term (−l ₀ sin α · θ _y ) is a relative displacement caused by the first reference light receiving unit 22 moving up and down by l ₀ θ _y as the floor 3 rotates about the y axis. .

Further, the interlayer displacement is δ _y , the rotation angle about the x axis is θ _x , the rotation angle about the z axis is ψ, and the distance between the reference light receiving unit 11 and the first reference light receiving unit 22 is l ₀ . . When the floor 3 rotates about the x axis by an angle θ _x , it can be considered in the same manner as when the first reference irradiation unit 20 is relatively displaced by Hθ _x . Then, the first reference light receiving position 22P moves in the y direction by [b ′ / a ′ × (Hθ _x )].

In this case, the first reference displacement y ₂ in the y direction is expressed by the following equation.

Next, the second reference displacement (x ₃ , y ₃ ) detected by the second reference light receiving unit 23 will be described. The interlayer displacement is δ _x , the rotation angle about the y axis is θ _y , the rotation angle about the z axis is ψ, the distance between the standard light receiving unit 11 and the second reference light receiving unit 23 is l ₀ , and the reference lens 15 Let b ′ / a ′ be the magnification according to the focal length. When the floor 3 rotates about the y-axis by an angle θ _y , it can be considered in the same manner as when the second reference irradiation unit 21 is relatively displaced by Hθ _x . Then, the second reference light receiving position 23P moves by [b ′ / a ′ × (Hθ _y )] in the x direction.

In this case, the second reference displacement x ₃ in the x direction is expressed by the following equation.

Further, it is assumed that the interlayer displacement is δ _y , the rotation angle about the x axis is θ _x , and the distance between the reference light receiving unit 11 and the second reference light receiving unit 23 is l ₀ . The distance between the second reference irradiation unit 21 and the second reference light receiving unit 23 is H / cos α. Since the second reference light receiving unit 23 is installed at an angle α with respect to the y axis, the amount of movement of the second reference light receiving position 23P in the y direction is cos α times. When the floor 3 rotates about the x axis by an angle θ _x , it can be considered in the same manner as when the second reference irradiation unit 21 is relatively displaced by Hθ _x . Then, the second reference light receiving position 23P moves by [b ′ / a ′ × (Hθ _x / cos α)] in the y direction.

In this case, the second reference displacement y ₃ in the y direction is expressed by the following equation.

Note that the term (−l ₀ sin α · θ _x ) is a relative displacement caused by the second reference light receiving unit 23 moving up and down by l ₀ θ _x as the floor 3 rotates about the x axis. .

By calculating δ _x , δ _y , θ _x , θ _y , and ψ from the above equations, the displacement measuring device 1A separates the interlayer displacements δ _x and δ _y from the reference displacement (x ₁ , y ₁ ). Can do.

  The displacement measuring apparatus 1A according to the present embodiment includes a reference displacement measuring unit 4 that measures the reference displacement by irradiating the reference light LS from the ceiling 2 to the floor 3, and a predetermined angle α with respect to the reference light LS from the ceiling 2 to the floor 3. By providing the reference displacement measuring unit 5 that measures the reference displacement by irradiating the tilted reference light LR, the angle error can be eliminated from the standard displacement, so that local deformation occurs in the ceiling 2 and the floor 3. In this case, the interlayer displacement can be measured more accurately.

  In particular, the displacement measuring apparatus 1 </ b> A is configured such that the rotation of the ceiling 2 can be ignored by using a light source that emits diffused light as the irradiation unit 6. As a result, the displacement measuring apparatus 1A can accurately measure the interlayer displacement by erasing only the angle error of the floor 3 from the reference displacement even when the deformation occurs locally on the ceiling 2 and the floor 3. Therefore, the configuration as a whole can be simplified.

  Further, the displacement measuring apparatus 1A can be reduced in size as a whole by integrally providing the reference light receiving unit 11 and the reference light receiving unit 14 in the displacement detecting unit 16.

Furthermore, the displacement measuring device 1A is configured such that the reference displacement measuring unit 5 can detect the reference displacement by the first reference light LR1 and the second reference light LR2 that are irradiated in different directions with respect to the reference light LS. , Θ _x , θ _y , and ψ can be calculated, respectively, so that the accuracy can be improved more reliably.
(2) Second Embodiment As shown in FIG. 5, the displacement measuring apparatus 1B according to the present embodiment is different from the first embodiment only in the configuration of the reference irradiation unit. That is, the reference irradiation unit 13 </ b> B includes the reflection unit 30 and the diffusion plate 31. The reflection unit 30 is provided on the upper surface of the displacement detection unit 16 and reflects a part of the reference light LS emitted from the reference irradiation unit 10 toward the ceiling 2. The diffusing plate 31 is provided on the ceiling 2 and reflects the reflected light reflected by the reflecting portion 30 from the ceiling 2 toward the floor 3.

  With such a configuration, the reference irradiation unit 13B irradiates the reference light LR in the direction of the angle α with respect to the reference light LS by reflecting a part of the reference light LS with the diffusion plate 31.

  Thereby, the displacement measuring apparatus 1B according to the present embodiment omits two LED light sources compared to the first embodiment in which LED light sources are used for the first reference irradiation unit 20 and the second reference irradiation unit 21. Can do.

In addition, the displacement measuring apparatus 1B according to this embodiment includes a reference displacement measuring unit 4 that measures the reference displacement by irradiating the reference light LS between the ceiling 2 and the floor 3, and the reference light between the ceiling 2 and the floor 3. Since the reference displacement measuring unit 5 that detects the reference displacement by irradiating the reference light LR inclined by the predetermined angle α with respect to the LS is provided, the same effects as those of the first embodiment can be obtained.
(3) Third Embodiment As shown in FIG. 6, the displacement measuring apparatus 1C according to this embodiment is different from the first embodiment only in the configuration of the reference irradiation unit. That is, the reference irradiation unit 13C includes only the reflection unit 35 instead of the LED light source. The reflection unit 35 is provided on the ceiling 2 and reflects part of the reference light LS emitted from the reference irradiation unit 10 from the ceiling 2 toward the floor 3.

  With this configuration, the reference irradiation unit 13C irradiates the reference light LR in the direction of the angle α with respect to the reference light LS by reflecting a part of the reference light LS with the reflection unit 35. In order to apply this embodiment, it is necessary to be able to assume that “the rotation angle of the ceiling 2 is zero”. Incidentally, the mirror image of the reference irradiating unit 10 reflected in the reflecting unit is on an extension of a straight line connecting the reference light receiving unit 14 and the reflecting unit.

  Thereby, 1 C of displacement measuring devices which concern on this embodiment omit two LED light sources compared with the said 1st Embodiment which uses the LED light source for the 1st reference irradiation part 20 and the 2nd reference irradiation part 21. FIG. Can do.

In addition, the displacement measuring apparatus 1 </ b> C according to the present embodiment includes a reference displacement measuring unit 4 that measures the reference displacement by irradiating the reference light LS between the ceiling 2 and the floor 3, and the reference light between the ceiling 2 and the floor 3. Since the reference displacement measuring unit 5 that detects the reference displacement by irradiating the reference light LR inclined by the predetermined angle α with respect to the LS is provided, the same effects as those of the first embodiment can be obtained.
(Modification)
The present invention is not limited to the above-described embodiment, and can be appropriately changed within the scope of the gist of the present invention. For example, in the above embodiment, the case where the irradiation unit 13 is provided on the ceiling 2 and the displacement detection unit 16 is installed on the floor 3 has been described, but the present invention is not limited thereto, and the ceiling 2 displacement detection unit 16 is installed. The irradiation unit 13 may be provided on the floor 3.

  Moreover, although the said embodiment demonstrated the case where it applied between the layers comprised by a ceiling and a floor as two planes, this invention is not restricted to this, What is necessary is just two planes provided facing each other, for example, a side wall It can also be applied to two planes included in other mechanical structures.

  Further, in the above embodiment, the case where both the first reference light LR1 and the second reference light LR2 are inclined by the angle α with respect to the reference light LS has been described, but the present invention is not limited thereto, and the reference light LS is not limited thereto. It is good also as inclining only a mutually different angle with respect to.

  In the above-described embodiment, the case where a convex lens is used as the lens has been described. However, the present invention is not limited to this, and any imaging optical system may be configured. For example, a combination of a concave mirror and a convex mirror such as a reflective telescope is used. An imaging optical system may be used.

  Further, in the above-described embodiment, the case where the lens is configured by the standard lens and the reference lens has been described. However, a system in which light is condensed on three light receiving elements by a single imaging optical system may be used.

1A Displacement measuring device 1B Displacement measuring device 1C Displacement measuring device 2 Ceiling (first plane)
3 floors (second plane)
4 Reference displacement measurement unit 5 Reference displacement measurement unit 10 Reference irradiation unit 11 Reference light receiving unit 13A Reference irradiation unit 13B Reference irradiation unit 13C Reference irradiation unit 14 Reference light receiving unit 16 Displacement detection unit 20 First reference irradiation unit 21 Second reference irradiation unit 22 1st reference light-receiving part 23 2nd reference light-receiving part 30 Reflecting part 31 Diffusing plate 35 Reflecting part H Predetermined interval LR Reference light LR1 1st reference light LR2 2nd reference light LS Reference light x ₁ Standard displacement x ₂ 1st reference displacement x ₃ Second reference displacement y ₁ Standard displacement y ₂ First reference displacement y ₃ Second reference displacement α Predetermined angle δ _x Interlayer displacement δ _y Interlayer displacement

Claims (4)

A displacement measuring device for measuring an interlayer displacement between layers comprising a first plane and a second plane provided at a predetermined interval with respect to the first plane, using diffused light propagating radially,
A reference displacement measuring unit that detects reference displacement by irradiating reference light from the first plane toward the second plane;
A displacement measuring apparatus comprising: a reference displacement measuring unit that detects reference displacement by irradiating reference light inclined at a predetermined angle with respect to the reference light from the first plane toward the second plane. The reference displacement measurement unit includes a reference irradiation unit that emits reference light from the first plane toward the second plane;
The reference displacement measuring unit is
A first reference irradiation unit configured to irradiate a first reference light inclined at a predetermined angle with respect to the reference light from the X axis of an XY coordinate having the reference irradiation unit as an origin toward the second plane;
The second reference irradiating unit configured to irradiate a second reference light inclined at a predetermined angle with respect to the reference light from the Y axis of the XY coordinates toward the second plane. Displacement measuring device.   The displacement measurement apparatus according to claim 1, wherein the reference light is irradiated by a reflection unit that reflects a part of the reference light from the first plane toward the second plane. A reflecting portion that reflects a part of the reference light from the second plane toward the first plane;
A diffuser that reflects the reflected light reflected by the reflecting portion from the first plane toward the second plane;
The displacement measuring apparatus according to claim 1, wherein the reference light is irradiated by the diffusion plate.

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