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JP2011058612A - Vacuum valve - Google Patents

Vacuum valve Download PDF

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Publication number
JP2011058612A
JP2011058612A JP2009212469A JP2009212469A JP2011058612A JP 2011058612 A JP2011058612 A JP 2011058612A JP 2009212469 A JP2009212469 A JP 2009212469A JP 2009212469 A JP2009212469 A JP 2009212469A JP 2011058612 A JP2011058612 A JP 2011058612A
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JP
Japan
Prior art keywords
valve
housing
vacuum valve
valve body
opening surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009212469A
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Japanese (ja)
Inventor
Shinichi Wada
慎一 和田
Morihiro Sakuma
守宏 佐久間
Hidetake Tanaka
秀岳 田中
Yusuke Demura
佑介 出村
Katsuji Nakajima
克次 中嶋
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Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP2009212469A priority Critical patent/JP2011058612A/en
Priority to PCT/JP2010/005582 priority patent/WO2011030565A1/en
Priority to TW99131038A priority patent/TW201131096A/en
Publication of JP2011058612A publication Critical patent/JP2011058612A/en
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Valve Housings (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vacuum valve excelling in maintainability. <P>SOLUTION: The vacuum valve including a plurality of opening faces forming flow passages is configured to allow the valve element of the vacuum valve to be taken out of one of the opening faces. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

本発明は、真空容器を真空ポンプで真空排気する際に、排気系統を切り換える等の目的で使用される真空バルブに関しに関する。   The present invention relates to a vacuum valve used for the purpose of switching an exhaust system when a vacuum vessel is evacuated by a vacuum pump.

従来、真空用バルブとして、例えば、特許文献１に開示がされている。この種のバルブは、通常は、図１に示すように、ピストンロッド１により中空円筒状の筐体２内の長手方向に移動する弁体３を備え、弁体３により開閉する排気口４を筐体２の長手方向の端面に備え、筐体２の側面にフランジ部を備えた中空円筒体５を立設して、その端面に排気口となる開口面６を形成して、内部流路がＬ型の真空用バルブとして構成されたものである。   Conventionally, for example, Patent Document 1 discloses a vacuum valve. As shown in FIG. 1, this type of valve usually includes a valve body 3 that moves in a longitudinal direction inside a hollow cylindrical housing 2 by a piston rod 1, and an exhaust port 4 that is opened and closed by the valve body 3. A hollow cylindrical body 5 provided on the end surface in the longitudinal direction of the housing 2 and provided with a flange portion on the side surface of the housing 2 is erected, and an opening surface 6 serving as an exhaust port is formed on the end surface. Is configured as an L-type vacuum valve.

上記真空用バルブの筐体２の内壁や弁体３のメンテナンスを行う際に、筐体２を分解する必要があった。
しかしながら、高真空用及び／又は高純度ガス用の真空用バルブ等をはじめとして、このような真空用バルブには他の配管や大型の機器等が接続されているので、筐体２の分解の前に、接続された配管等の取り外し作業が必要となるという問題があった。 When performing maintenance of the inner wall of the vacuum valve casing 2 and the valve body 3, the casing 2 has to be disassembled.
However, since a vacuum valve for high vacuum and / or high purity gas, etc., other pipes and large equipment are connected to such a vacuum valve, the casing 2 can be disassembled. Previously, there was a problem that it was necessary to remove connected pipes and the like.

特開２００１−３２４０５１号公報JP 2001-324051 A

そこで、本発明は、メンテナンス性に優れた真空用バルブを提供することを目的とする。   Then, an object of this invention is to provide the valve | bulb for vacuum excellent in maintainability.

本発明の解決手段は、請求項１に記載の通り、流路となる複数の開口面を備えた真空用バルブにおいて、前記開口面のうちの少なくとも１つの開口面から前記真空用バルブの弁体を取り出すことができるように構成したことを特徴とする。
また、請求項２記載の本発明は、請求項１に記載の真空用バルブにおいて、前記開口面の直径を、前記弁体の外径よりも大きくしたことを特徴とする。
また、請求項３記載の本発明は、請求項１又は２に記載の真空用バルブにおいて、前記真空用バルブの筐体を、前記弁体を支持するシリンダロッド用の通孔が設けられた部材と、前記開口面を備えた部材とから構成するとともに一体成型したことを特徴とする。 According to a first aspect of the present invention, there is provided a vacuum valve provided with a plurality of opening surfaces serving as flow paths, and the valve body of the vacuum valve from at least one of the opening surfaces. It is characterized in that it can be taken out.
According to a second aspect of the present invention, in the vacuum valve according to the first aspect, a diameter of the opening surface is made larger than an outer diameter of the valve body.
Further, the present invention according to claim 3 is the vacuum valve according to claim 1 or 2, wherein the vacuum valve housing is provided with a cylinder rod through hole for supporting the valve body. And a member having the opening surface and integrally molded.

本発明によれば、バルブを構成する弁体を流路を構成する開口面から取り出してメンテナンスすることができる。従って、弁体を移動させるピストンロッドとともに取り外す必要がない。   ADVANTAGE OF THE INVENTION According to this invention, the valve body which comprises a valve can be taken out from the opening surface which comprises a flow path, and can be maintained. Therefore, it is not necessary to remove with the piston rod which moves a valve body.

従来の真空用バルブの側断面図Side sectional view of a conventional vacuum valve （ａ）本発明の一実施の形態の真空用バルブの側断面図（ｂ）同底面図（ｃ）同右側面図(A) Side sectional view of the vacuum valve of one embodiment of the present invention (b) Bottom view (c) Right side view 弁体の取り外し状態の説明図Explanatory drawing of the removed state of the disc

本発明の真空用バルブは、筐体内に弁体と弁座とを備えて、弁として機能するものである。
図２に示される本発明の一実施の形態の真空用バルブは、略立方体形状の筐体１０の底面に弁開口面１１が設けらている。弁開口面１１から筐体１０の内部に向かって流路が形成されており、該流路は、横方向に設けられた流路と直交する部位において、流路断面が狭くなっており、この部位に弁座１２が形成される。
弁座１２の上面に着座して弁の開閉を行う弁体１３は、筐体１０の上面から挿通されるピストンロッド１４の先端部に固定される。図示した例では、ピストンロッド１４の先端部の鍔部に弁体１３の上部を嵌合することにより固定される。また、弁体１３の弁座１２と当接する面の外周部には、リング状のシール部材１５が設けられ、弁体１３が着座した際のシール性を高めるようにしている。尚、筐体１０の上壁１０ｈには、ピストンロッド１４が挿通される通孔１６が設けられているが、この通孔１６の内周面にもシール部材１７を設け、ピストンロッド１４と通孔１６とのシール性を高めるようにしている。また、筐体１０の上面を構成する上壁１０ｈと、筐体の側面を構成する側壁（図示したものでは、１０ｄ，１０ｆ）との接合面にも同様の目的でＯリング等のシール部材が介挿されている。
また、筐体１０の内部には、上述した通り、弁開口面１１から筐体１０の上面に向かう流路に対して直交する方向に流路が形成され、この流路は、筐体１０の右側面に形成された第１の開口面１８、左側面に形成された第２の開口面２０を介して、それぞれ、外部流路に接続されるようになっている。尚、筐体１０の底面及び両側面には、図２の（ｂ）及び（ｃ）に示すように、接続配管のフランジ部を固定するためのボルト孔２４，２５が設けられている。
上記真空用バルブは、エアシリンダ等の駆動機構２１によりピストンロッド１４を上下方向に移動させ、その先端部に設けられた弁体１３を弁座１２に当接及び離間させることにより、筐体１０の内部に設けられた流路の開閉を行うことができる。 The vacuum valve of the present invention includes a valve body and a valve seat in a housing and functions as a valve.
In the vacuum valve according to one embodiment of the present invention shown in FIG. 2, a valve opening surface 11 is provided on the bottom surface of a substantially cubic housing 10. A flow path is formed from the valve opening surface 11 toward the inside of the housing 10, and the flow path has a narrow cross section at a portion orthogonal to the flow path provided in the lateral direction. A valve seat 12 is formed at the site.
The valve body 13 that sits on the upper surface of the valve seat 12 and opens and closes the valve is fixed to the tip of the piston rod 14 inserted from the upper surface of the housing 10. In the illustrated example, the piston rod 14 is fixed by fitting the upper portion of the valve body 13 to the flange portion of the tip portion. Further, a ring-shaped seal member 15 is provided on the outer peripheral portion of the surface of the valve body 13 that comes into contact with the valve seat 12 so as to improve the sealing performance when the valve body 13 is seated. The upper wall 10h of the housing 10 is provided with a through hole 16 through which the piston rod 14 is inserted. A seal member 17 is also provided on the inner peripheral surface of the through hole 16 so as to pass through the piston rod 14. The sealability with the hole 16 is enhanced. Further, a sealing member such as an O-ring is also provided on the joint surface between the upper wall 10h constituting the upper surface of the housing 10 and the side walls (10d and 10f in the figure) constituting the side surfaces of the housing 10 for the same purpose. It is inserted.
Further, as described above, a flow path is formed in the housing 10 in a direction orthogonal to the flow path from the valve opening surface 11 toward the upper surface of the housing 10. The first opening surface 18 formed on the right side surface and the second opening surface 20 formed on the left side surface are connected to the external flow path, respectively. Note that, as shown in FIGS. 2B and 2C, bolt holes 24 and 25 for fixing the flange portion of the connection pipe are provided on the bottom surface and both side surfaces of the housing 10.
The vacuum valve moves the piston rod 14 in the vertical direction by a driving mechanism 21 such as an air cylinder, and contacts and separates the valve body 13 provided at the tip of the valve rod 12 from the valve seat 12. It is possible to open and close the flow path provided in the interior.

本実施の形態では、第１の開口面１８は、弁体１３を筐体１０の外部に取り出すことができる大きさに構成されている。これにより、弁開口面１１や第２の開口面２０（第１の開口面１８以外の開口面）に配管を接続した状態であっても、図３に示すように弁体１３を取り外したり、筐体１０の内部の清掃等のメンテナンスが可能となる。しかも、弁体１３を駆動させるピストンロッド１４を筐体１０から取り外す必要がない。   In the present embodiment, the first opening surface 18 is configured to have a size that allows the valve body 13 to be taken out of the housing 10. Thereby, even if it is in the state where piping was connected to valve opening surface 11 and 2nd opening surface 20 (opening surface other than the 1st opening surface 18), as shown in Drawing 3, valve body 13 is removed, Maintenance such as cleaning the inside of the housing 10 becomes possible. Moreover, it is not necessary to remove the piston rod 14 for driving the valve body 13 from the housing 10.

尚、第１の開口面１８を介して、弁体１３を筐体１０の外部に取り出すことができる大きさに構成する方法としては、弁体１３の任意の面への投影形状のうちの最低１つのパターンの投影形状が、第１の開口面１８内に収まるように構成することをいうものとし、例えば、弁体１３が円板状の部材であれば、その直径ａよりも第１の開口面１８の最大内径ｂを長くする方法等を採用することができる。   In addition, as a method of configuring the valve body 13 to a size that allows the valve body 13 to be taken out of the housing 10 through the first opening surface 18, the lowest of the projected shapes on an arbitrary surface of the valve body 13 is used. It is assumed that the projection shape of one pattern is configured to be accommodated in the first opening surface 18. For example, if the valve body 13 is a disk-shaped member, the first shape is larger than the diameter a. A method of increasing the maximum inner diameter b of the opening surface 18 can be employed.

上記のように、弁体１３を第１の開口面１８から取り出すことができる構造は、図１に示されるように、筐体１０の上壁１０ｈを除いた上面開口の箱体、即ち、底壁１０ｃとその周りに立設する４枚の側壁（図示されるものは、２枚の側壁１０ｄ，１０ｆ）を一体として構成した場合、或いは、上記箱体と上壁１０ｈとを一体として構成した場合に特に有効である。従来のバルブ構造のように、弁体１３が第１の開口面１８から抜き取ることができない構造の場合、上壁１０ｈは別部品としないと組立が不可能となるが、第１の開口面１８から抜き取ることが可能な構造にすることで、上壁１０ｈを一体成型しても組立が可能となるからである。このような、一体成型は、アルミニウム又はアルミニウム合金からなるブロックを切削加工して得ることができる。   As described above, the structure in which the valve body 13 can be taken out from the first opening surface 18 is, as shown in FIG. 1, a box body having an upper surface opening excluding the upper wall 10h of the housing 10, that is, the bottom. When the wall 10c and four side walls (the illustrated one are the two side walls 10d and 10f) are integrally formed, or the box and the upper wall 10h are integrally formed. It is especially effective in cases. When the valve body 13 cannot be pulled out from the first opening surface 18 as in the conventional valve structure, the upper wall 10h cannot be assembled unless it is a separate part. This is because the assembly can be performed even if the upper wall 10h is integrally formed by adopting a structure that can be removed from the upper wall 10h. Such integral molding can be obtained by cutting a block made of aluminum or an aluminum alloy.

また、図示した例では、第１の開口面１８は、筐体１０の右側面のみに形成したが、その数を制限するものではない。また、筐体１０の形状に関しても、直方体や立方体等の形状に限定するものでもない。   In the illustrated example, the first opening surface 18 is formed only on the right side surface of the housing 10, but the number is not limited. Further, the shape of the housing 10 is not limited to a shape such as a rectangular parallelepiped or a cube.

１ ピストンロッド
２ 筐体
３ 弁体
４ 排気口
５ 中空円筒体
６ 開口面
１０ 筐体
１０ａ 筐体底面
１０ｂ 筐体右側面
１０ｃ 底壁
１０ｄ 側壁
１０ｆ 側壁
１０ｈ 上壁
１１ 弁開口面
１２ 弁座
１３ 弁体
１４ ピストンロッド
１４ａピストンロッドの鍔部
１５ シール部材
１６ 通孔
１７ シール部材
１８ 第１の開口面
１９ ボルト
２０ 第２の開口面（第１の開口面と対向位置の開口面）
２１ 駆動機構
２４ ボルト孔
２５ ボルト孔 DESCRIPTION OF SYMBOLS 1 Piston rod 2 Housing | casing 3 Valve body 4 Exhaust port 5 Hollow cylindrical body 6 Opening surface 10 Housing 10a Housing bottom surface 10b Housing right side surface 10c Bottom wall 10d Side wall 10f Side wall 10h Upper wall 11 Valve opening surface 12 Valve seat 13 Valve Body 14 Piston rod 14a Piston rod flange 15 Seal member 16 Through hole 17 Seal member 18 First opening surface 19 Bolt 20 Second opening surface (opening surface opposite to the first opening surface)
21 Drive mechanism 24 Bolt hole 25 Bolt hole

Claims (3)

流路となる複数の開口面を備えた真空用バルブにおいて、前記開口面のうちの少なくとも１つの開口面から前記真空用バルブの弁体を取り出すことができるように構成したことを特徴とする真空用バルブ。   A vacuum valve having a plurality of opening surfaces serving as flow paths, wherein a vacuum valve body of the vacuum valve can be taken out from at least one of the opening surfaces. Valve for. 前記開口面の直径を、前記弁体の外径よりも大きくしたことを特徴とする請求項１に記載の真空用バルブ。   The vacuum valve according to claim 1, wherein a diameter of the opening surface is larger than an outer diameter of the valve body. 前記真空用バルブの筐体を、前記弁体を支持するシリンダロッド用の通孔が設けられた部材と、前記開口面を備えた部材とから構成するとともに一体成型したことを特徴とする請求項１又は２に記載の真空用バルブ。   The housing of the vacuum valve is formed of a member provided with a through hole for a cylinder rod that supports the valve body and a member provided with the opening surface, and is integrally molded. The vacuum valve according to 1 or 2.
JP2009212469A 2009-09-14 2009-09-14 Vacuum valve Pending JP2011058612A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009212469A JP2011058612A (en) 2009-09-14 2009-09-14 Vacuum valve
PCT/JP2010/005582 WO2011030565A1 (en) 2009-09-14 2010-09-13 Valve for vacuum application
TW99131038A TW201131096A (en) 2009-09-14 2010-09-14 Vacuum valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009212469A JP2011058612A (en) 2009-09-14 2009-09-14 Vacuum valve

Publications (1)

Publication Number Publication Date
JP2011058612A true JP2011058612A (en) 2011-03-24

Family

ID=43732244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009212469A Pending JP2011058612A (en) 2009-09-14 2009-09-14 Vacuum valve

Country Status (3)

Country Link
JP (1) JP2011058612A (en)
TW (1) TW201131096A (en)
WO (1) WO2011030565A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58111491U (en) * 1982-01-23 1983-07-29 株式会社島津製作所 vacuum valve
JPH0771649A (en) * 1993-08-31 1995-03-17 Kyocera Corp Vacuum valve and vacuum exhaust method using this valve
WO2008018405A1 (en) * 2006-08-11 2008-02-14 Nippon Valqua Industries, Ltd. Valve device
JP2008045640A (en) * 2006-08-11 2008-02-28 Nippon Valqua Ind Ltd Gate valve device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58111491U (en) * 1982-01-23 1983-07-29 株式会社島津製作所 vacuum valve
JPH0771649A (en) * 1993-08-31 1995-03-17 Kyocera Corp Vacuum valve and vacuum exhaust method using this valve
WO2008018405A1 (en) * 2006-08-11 2008-02-14 Nippon Valqua Industries, Ltd. Valve device
JP2008045640A (en) * 2006-08-11 2008-02-28 Nippon Valqua Ind Ltd Gate valve device

Also Published As

Publication number Publication date
WO2011030565A1 (en) 2011-03-17
TW201131096A (en) 2011-09-16

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