JP2009248018A - Wet detoxification method and its apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a wet detoxification apparatus capable of treating waste water, and a wet detoxification method using the waste water effectively. <P>SOLUTION: The wet detoxification apparatus includes a gas suction part 3 into which a toxic gas G is supplied, a wet exhaust gas treating part 6 disposed at the upper part of the gas suction part 3 and having a shower room 7, an exhaust part 9 continuing the shower room, a circulating water vessel 17 disposed at the under part of the gas suction part, and a circulating pump 25 supplying water in the circulating vessel into the shower room wherein a second water treating part for purifying the water in the circulating vessel and a reusing water part 23 are provided while the water in the reusing water part 23 is supplied into the shower room by a reusing water replenishing pump 30. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a detoxification method and apparatus for detoxifying and collecting harmful gases discharged from a semiconductor production apparatus, a liquid crystal production apparatus, etc., and more specifically, can treat waste water used for detoxification. The present invention relates to a wet removal method and an apparatus therefor.

The gas discharged from the semiconductor production line or the liquid crystal production line contains harmful substances such as fine powders such as SiO ₂ and WO ₃ and is very dangerous.
Therefore, conventionally, the gas is released to the atmosphere after it is removed by an abatement means such as a filling method or a filter method. (For example, refer to Patent Document 1).

  The filling method is a method of collecting dust by water film formed on the surface of the filling, gas inertial collision, diffusion of fine particles, and the filter method supplies pressurized water. Thus, the gas cleaning is performed.

JP 2002-172309 A

  Waste water used for detoxification contains harmful substances and cannot be disposed of as it is. Therefore, conventionally, the drainage is collected in a predetermined place (for example, a tank) and collectively drained. However, such a wastewater treatment method is economically disadvantageous because of increased equipment costs and treatment costs. Moreover, since the wastewater-treated water is discarded, there is a problem in reusing resources.

  In view of the above circumstances, an object of the present invention is to provide a wet-type abatement apparatus capable of wastewater treatment. Another purpose is to use waste water effectively.

  The present invention provides an intake section to which harmful gas is supplied, a wet exhaust treatment section having a shower chamber provided above the intake section, an exhaust section continuing to the shower chamber, and a lower section of the intake section. A wet detoxification apparatus comprising a circulating water tank and a circulating water supply means for supplying water from the circulating water tank to the shower chamber, comprising a water treatment means for purifying the water in the circulating water tank. It is characterized by being.

  The water treatment means according to the present invention is an overflow type septic tank connected to the circulating water tank. The water treatment means of the present invention is characterized by including a reuse water section for storing purified water.

  The reuse water part of the present invention is connected to the shower room via a reuse water supply means. The water treatment means of the present invention comprises a first water treatment part disposed between the intake part and the circulating water tank, and a second water treatment part connected to the side of the circulating water tank. It is characterized by.

  The present invention removes harmful gas supplied to the intake section through a wet exhaust treatment section provided with a shower chamber, and supplies water falling from the wet exhaust treatment section to a circulating water tank provided at a lower portion of the intake section. In the wet detoxification method for storing and supplying the water in the circulating water tank to the shower chamber via the circulating water supply means, a water treatment means that is continuous with the circulating water tank is provided, and the reuse treated by the water treatment means Water is supplied to the shower room.

  Since this invention is provided with the water treatment means for purifying the water in the circulating water tank, the waste water is purified and becomes clean. Therefore, unlike the conventional example, it is not necessary to collect the wastewater in a predetermined place (tank) and collect the water.

Since the water treatment means of the present invention includes a reuse water section, the purified water stored here is
It can be supplied to the shower chamber of the wet exhaust treatment section through the reuse water supply means. Therefore, since the circulating water from the circulating water tank and the reused water from the reused water section are supplied to the shower chamber, the water in the circulating water tank 17 is a mixed water in which both the waters are mixed. This mixed water does not use the recycled water, and is clean and has a lower pollution degree and a higher PH value than water in which only the circulating water is used. Therefore, since the water sprayed into the shower room is in a relatively clean state, it can be efficiently removed.
Further, since the concentration of contamination in the circulating water tank does not increase compared to the conventional example, the amount of new water used such as tap water can be reduced.

  Since the water treatment means is composed of the first water treatment part and the second water treatment part, the water falling from the wet exhaust treatment part flows into the circulating water tank after being treated by the first water treatment part. To do. Therefore, the contamination concentration in the circulating water tank can be lowered.

A first embodiment of the present invention will be described with reference to FIG.
A detoxifying apparatus (herein referred to as “wet detoxifying apparatus”) 1 that performs detoxification using water includes an intake portion (also referred to as “intake chamber”) 3 having an intake port 3a. The intake port 3a is connected to an exhaust pipe such as a semiconductor manufacturing apparatus (not shown).

  A wet exhaust treatment unit 6 is provided above the intake unit 3. The wet exhaust treatment unit 6 includes a shower chamber 7 and a filler 5 that partitions the shower chamber 7 and the intake unit 3. The shower chamber 7 includes a plurality of shower units 7 a. Yes. An exhaust chamber 9 is provided on the upper portion of the shower chamber 7 through a draining portion 10. The exhaust chamber 9 communicates with an exhaust fan 13 via an exhaust pipe 11.

  A circulating water tank 17 is provided below the intake chamber 3 via a first water treatment unit 15. The first water treatment unit 15 is provided with a purification material such as charcoal. A second water treatment unit 19, which is a water treatment unit for purifying water, is continuously provided on the side of the circulating water tank 17. The second water treatment unit 19 is, for example, an overflow septic tank, and includes a plurality of purification chambers 21 partitioned by a partition plate. In each purification chamber 21, a purification material such as charcoal is disposed. Good.

  A reuse water unit 23 is connected to the side of the second water treatment unit 19, and clean water that has been purified is accommodated in the reuse water unit 23. The reuse water unit 23 is provided with an overflow 27 for draining when the water level exceeds a predetermined level, and a new water supply unit 29 for supplying new water such as tap water from the outside.

  The circulating water tank 17 communicates with the shower part 7a of the shower chamber 7 via a circulating pump 25, which is a circulating water supply means. The reused water unit 23 communicates with the shower unit 7a of the shower chamber 7 through a reused water supply pump 30 serving as a reused water supply unit.

Next, the operation of the present embodiment will be described.
When a control switch (not shown) of the wet-type abatement apparatus 1 is turned on, the exhaust fan 13 is driven, and harmful gas G is sucked into the intake chamber 3 from the intake port 3a. This harmful gas G rises in the intake section 3, enters the shower chamber 7 through the filler 5, contacts the shower water in the shower section 7a, and then passes through the draining section 10 to remove moisture. The clean gas G1 thus removed is exhausted to the outside through the exhaust chamber 9 and the exhaust pipe 11.

The water in the shower chamber 7 of the wet exhaust treatment unit 6 passes through the filler 5 and falls in contact with the harmful gas G rising in the intake chamber 3, and the first water treatment unit 15 performs the first water. After receiving the treatment, it falls into the circulating water tank 17.
The water treatment in the first water treatment unit 15 is performed relatively easily so as not to take too much time for the drainage to pass through.

  When the water w in the circulating water tank 17 exceeds a predetermined amount, it overflows and enters the second water treatment unit 19, proceeds while being purified, and reaches the reused water unit 23. At this time, the water in the reused water unit 23 is purified to fresh water such as tap water or the like, but the degree of purification is appropriately selected as necessary.

  The water w1 in the circulating water tank 17 is supplied to the shower part 7a of the shower room 7 by the circulation pump 25 and is injected into the shower room 7, and the water w2 in the reused water part 23 is reused by the reused water supply pump 30. Is supplied to the shower section 7 a of the shower chamber 7 and sprayed into the shower chamber 7.

Accordingly, since the shower room 7 is supplied with the circulating water w1 from the circulating water tank 17 and the reused water w2 from the reused water unit 23, the water in the circulating water tank 17 is the waters w1 and w2. Becomes mixed water. The mixed water does not use the reused water w2, and is clean and less contaminated and has a higher PH value than water in the case where only the circulating water w1 is used. Therefore, since the water sprayed to the shower chamber 7 is in a relatively clean state, it can be efficiently removed.
Further, since the concentration of contamination in the circulating water tank 17 does not increase as compared with the conventional example, the amount of new water such as tap water can be reduced.

  During operation, when the water level of the circulating water tank 17 falls below the design value, fresh water such as tap water is injected from the new water supply unit 29 and the water level of the reused water unit 23 is maintained at the design level. This replenishment of fresh water may be performed in the circulating water tank 17.

The embodiment of the present invention is not limited to the above, and may be as follows, for example.
(1) Since the water in the reuse water section 23 is purified water, it can be used for other equipment such as a cleaning device.

(2) Although the overflow type septic tank is used as the second water treatment unit of the water treatment means, other known water treatment means may be used.
(3) Although the first water treatment unit and the second water treatment unit are used as the water treatment means, the first water treatment unit may be omitted.

It is front sectional drawing which shows 1st Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Wet abatement device 3 Intake part 5 Filler 7 Shower room 15 1st water treatment part 17 Circulating water tank 19 2nd water treatment part 23 Reuse water part G Toxic gas G1 Clean gas w1 Circulating water w2 Recycled water

Claims (6)

An intake part to which harmful gas is supplied, a wet exhaust treatment part provided at the upper part of the intake part and having a shower room, an exhaust part continuing to the shower room, and a circulating water tank provided at the lower part of the intake part And a wet-type abatement device comprising circulating water supply means for supplying water from the circulating water tank to the shower chamber,
A wet-type abatement apparatus comprising water treatment means for purifying the water in the circulating water tank.   The wet detoxification apparatus according to claim 1, wherein the water treatment means is an overflow type septic tank connected to the circulating water tank.   The wet detoxification apparatus according to claim 2, wherein the water treatment means includes a reuse water section for storing purified water.   4. The wet abatement apparatus according to claim 3, wherein the reuse water section is connected to the shower chamber via a reuse water supply means.   The water treatment means is composed of a first water treatment part disposed between the intake part and the circulating water tank, and a second water treatment part connected to the side of the circulating water tank. 2. The wet abatement apparatus according to claim 1, wherein The harmful gas supplied to the intake section is detoxified through a wet exhaust treatment section provided with a shower room, and water falling from the wet exhaust treatment section is stored in a circulating water tank provided at a lower portion of the intake section, In the wet detoxification method of supplying water from the circulating water tank to the shower room through the circulating water supply means,
A wet detoxification method comprising: providing a continuous water treatment means in the circulating water tank, and supplying reused water treated by the water treatment means to the shower chamber.

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