JP2008104919A - Wet air cleaner - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a wet air cleaner capable of enhancing an air cleaning capacity without increasing a running cost and capable of reducing its temporary stop number of times. <P>SOLUTION: The wet air cleaner 1 is constituted so as to clean a gas G by dissolving the pollutant component in the gas G in treated water W by passing the gas G through contact materials 2 and 3 impregnated with the treated water W in a flow process of the gas G to be treated containing the pollutant component, the plurality of contact materials 2 and 3 are arranged at a predetermined interval in the flow direction of the gas G and equipped with a water supply means 9 having the plurality of contact materials 2 and 3 arranged in the flow direction of the gas at a predetermined interval and supplying the treated water W allowed to newly flow in from the outside to the contact material 3 on the most downstream side in the gas flow direction, and a circulating means 8 for supplying the treated water W, which flows out from at least one of the other contact materials 2 provided on the upstream side of the contact material 3 provided on the most downstream side, to the contact material 2 to circulate the treated water W. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a wet-type wet air cleaning apparatus.

  For example, in semiconductor production facilities and the like, pollutant gases (organic gas, acid gas, alkaline gas, odor gas, etc.) are generated in the production process, and therefore, an air purifier for cleaning air is often installed in a factory. Conventionally, as this air cleaning device, a wet air cleaning device that cleans gas (wet processing) by bringing gas containing liquids into contact with treated water (liquid) and dissolving the contaminating components in the gas in treated water. There is.

  In a precision environment facility such as a semiconductor production facility, pure water or water having a quality equivalent to that of pure water is often used as treated water. Further, since the amount of the contaminating component dissolved in the treated water depends on the temperature of the treated water, it is preferable to cool pure water or the like to about 10 ° C., thereby improving the efficiency of the removal performance.

  Conventionally, there is an air washer type as a wet air cleaning device. This air washer-type wet air cleaning device sprays treated water toward the flow path of the gas to be treated, thereby bringing the gas to be treated into contact with the treated water in a gas-liquid contact, thereby removing contaminant components in the gas. To do. In this method, treated water may be recycled. That is, the sprayed treated water may be collected and sprayed again toward the gas distribution path. Thereby, the usage-amount of treated water can be reduced (for example, refer patent document 1).

Conventionally, as a wet air cleaning device, there is a wet surface type (wet wall type) wet air cleaning device. This wet surface type wet air cleaning device makes the gas to be treated and the treated water come into gas-liquid contact by passing the gas to be treated through the contact material (filler, filter medium) wetted with the treated water. It removes contaminating components. In the case of this method, there is a problem that mold spores and suspended bacteria in the gas to be treated are captured by the contact material, and microorganisms such as mold propagate on the surface of the contact material by the captured mold spores and the like. In particular, when the treated water is recycled, the propagation of microorganisms is induced or promoted. Therefore, in the case of a wet surface type wet air cleaning device, treated water is often supplied in a flowing manner to the contact material. In other words, the configuration is such that treated water newly introduced from the outside is supplied to the contact material, and the treated water that has flowed out of the contact material is discharged without being recycled (for example, see Patent Document 2).
JP 2004-223477 A JP 2000-33221 A

  In the conventional wet surface type wet air cleaning device described above, it is possible to improve the removal rate by increasing the number of flow-through type contact materials or increasing the amount of treated water used. However, the increase in the contact material not only increases the initial cost as it is, but also increases the initial cost due to an increase in the size of the apparatus. Furthermore, when the contact material is exchanged, the cost increases by the amount of contact material to be exchanged. In addition, there is a problem that the running cost increases due to an increase in treated water. In particular, when cooled pure water or the like used as treated water is used, the unit cost of the treated water W is high, so that the running cost is remarkably increased.

  In addition, in the conventional wet surface type wet air cleaning device described above, if the treated water is circulated and used as in the air washer type wet air cleaning device, the amount of treated water used can be reduced. The proliferation of microorganisms increases and maintenance work (contact material cleaning work) increases. The contact material on which microorganisms have propagated can be cleaned with hydrogen peroxide water, ozone water, or a cleaning agent. However, if the contact material is cleaned with the cleaning agent while using the device, the components such as the cleaning agent are removed from the device. Therefore, when the contact material cleaning operation (maintenance operation) is performed, the operation of the apparatus must be temporarily stopped. That is, if treated water is circulated and used in a conventional wet surface type wet air cleaning device, there is a problem that the number of times the wet air cleaning device is temporarily stopped increases.

  The present invention has been made in consideration of the above-described conventional problems, and provides a wet air cleaning apparatus that can improve the air cleaning capability without increasing the running cost and can reduce the number of pauses. The purpose is to do.

  The present invention is a wet air that purifies a gas by dissolving the contaminating component in the gas into the treated water by passing the gas through the contact material into which the treated water has permeated in the flow of the gas to be treated containing the contaminated component. In the cleaning apparatus, a plurality of the contact materials are arranged at predetermined intervals in the gas flow direction, and the treated water newly introduced from the outside is supplied to the contact material on the most downstream side in the gas flow direction. Water supply means, and circulation means for supplying treated water flowing out from at least one of the other contact materials upstream from the most downstream contact material to circulate the treated water. It is characterized by being equipped.

  Due to such characteristics, the gas to be treated is treated with circulating treated water in the upstream contact material, and then treated with treated water newly introduced from the outside in the most downstream contact material. . In this way, the upstream contact material with which the gas to be treated first comes into contact is supplied with treated water in a circulating manner using the treated water in a circulating manner, so that a high liquid gas ratio (the amount of treated water is large). Can be economically realized with the upstream contact material. In addition, clean treated water is supplied in a flow-through manner to the most downstream contact material that comes into contact with the gas that has passed through the upstream contact material. It is removed by the contact material on the most downstream side.

  Furthermore, mold spores and suspended bacteria contained in the gas to be treated are captured by the upstream contact material. Even if microorganisms propagate on this contact material, this contact material is always wet and is washed away with treated water, so that mold spores or the like are not easily transferred to the next (downstream side) contact material on the airflow. Further, even when the upstream contact material on which the microorganisms are propagated is washed with a cleaning agent or the like during operation of the apparatus, the cleaning gas is not contained in the treated gas exhausted from the apparatus. This is because the cleaning component of the cleaning agent is removed by the contact material on the downstream side even if the cleaning component of the cleaning agent moves into the air from the upstream contact material or liquid surface or occurs as mist. is there.

  In the present invention, it is preferable that the treated water flowing out from the contact material on the most downstream side is added to the treated water circulated by the circulation means and a part of the circulated treated water is discharged.

  Thereby, the treated water flowing out from the contact material on the most downstream side in the gas flow direction is used as the treated water circulating on the upstream side. In this way, since the treated water circulating in the upstream contact material is added with relatively clean treated water flowing out from the most downstream contact material, the contamination of the circulating treated water can be reduced. it can. This makes it difficult for microorganisms to be generated in the upstream contact material.

  According to the wet air cleaning apparatus according to the present invention, since a high removal rate is realized without increasing the amount of treated water used compared with the conventional wet surface type wet air cleaning apparatus, the running cost is not increased. The air cleaning ability can be improved. In addition, since the upstream contact material can be cleaned during operation of the apparatus without temporarily stopping the apparatus, the number of times the apparatus is stopped can be reduced.

  Hereinafter, first and second embodiments of a wet air cleaning apparatus according to the present invention will be described with reference to the drawings.

[First Embodiment]
FIG. 1 is a schematic view of a wet air cleaning apparatus 1 according to a first embodiment of the present invention. In FIG. 1, the gas G flows from right to left, the right side in FIG. 1 is the upstream side in the gas flow direction, and the left side in FIG. 1 is the downstream side in the gas flow direction.

  A wet air purifying apparatus 1 shown in FIG. 1 is a horizontal wet surface type wet air purifying apparatus, and is a contact material 2 into which treated water W has permeated in the process of circulation of a gas G to be treated containing contaminating components. , 3 is a device for purifying the gas G by dissolving the contaminating components in the gas G in the treated water W by passing the gas G through the gas G.

  The wet air cleaning apparatus 1 includes a hollow container 4, a current plate 5, contact materials 2 and 3 into which treated water W has permeated, an eliminator 6, a fan 7 that sends out gas G, and a circulation that circulates treated water W. It is comprised from the means 8 and the water supply means 9 which supplies the new treated water W to the contact material 3 of the downstream. The contact materials 2 and 3 may be anything as long as they hold water and do not elute impurities from the inside, such as polyester cloth, cotton cloth, and unglazed ceramic board.

  The container 4 is a cylindrical member through which the gas G flows, and is disposed sideways. An inlet 4a for allowing the gas G to be processed to flow into the container 4 is provided at one end of the container 4, and the gas G ′ after wet processing is exhausted at the other end of the container 4. An exhaust port 4b is provided. In the container 4, the rectifying plate 5, the contact materials 2, 3 and the eliminator 6 are arranged from the upstream side (left side in FIG. 1), the rectifying plate 5, the upstream contact material 2, the downstream contact material 3, and the eliminator 6. Are arranged side by side in this order. In addition, at the bottom of the container 4, water stop plates 4 c that divide the bottom of the container 4 in which the treated water W is stored into an upstream side and a downstream side are provided upright. Specifically, the water stop plates 4c are arranged at the position of the rectifying plate 5, the position between the adjacent contact members 2 and 3, and the position downstream of the eliminator 6, respectively.

  The rectifying plate 5 is a member for adjusting the flow direction of the gas G flowing into the container 4 in one direction, and a known rectifying plate can be used. The current plate 5 is disposed at a position upstream of the contact material 2 in a direction perpendicular to the gas flow direction, and is disposed opposite the contact material 2.

  The contact materials 2 and 3 are members that allow the gas G flowing through the container 4 to pass therethrough, and known contact materials (also referred to as fillers and filter media) can be used. A plurality of the contact materials 2 and 3 are arranged in the container 4 at a predetermined interval in the gas flow direction. Specifically, the contact material 2 on the upstream side and the contact material 3 on the downstream side are arranged. They are arranged side by side at intervals in the gas flow direction. Each of the contact materials 2 and 3 is in a state in which the treated water W has permeated and is wet with the treated water W. Further, the treated water W in the contact materials 2, 3 flows down inside the contact materials 2, 3 and flows out from the lower ends of the contact materials 2, 3, and the discharged treated water W is stored at the bottom of the container 4. That is, the upstream contact material 2 is disposed between the upstream water stop plates 4c and 4c, and the upstream side where the treated water W flowing out from the upstream contact material 2 is partitioned by the water stop plates 4c. The container 4 is configured to accumulate at the bottom. On the other hand, the downstream contact material 3 is disposed between the downstream water stop plates 4c, 4c, and the downstream side where the treated water W flowing out from the downstream contact material 3 is partitioned by the water stop plates 4c. The container 4 is configured to accumulate at the bottom.

  The eliminator 6 is a water drop removing unit for removing mist, and a known eliminator can be used. The eliminator 6 is disposed on the downstream side of the contact material 3 in a direction perpendicular to the gas flow direction, and is disposed opposite to the contact material 3. Further, the eliminator 6 is disposed between the downstream water stop plates 4c and 4c, and the water droplets removed by the eliminator 6 are accumulated at the bottom of the downstream container 4 partitioned by the water stop plates 4c. ing.

  The circulation means 8 is means for supplying the treated water W flowing out from the contact materials 2 and 3 to the upstream contact material 2 and circulating the treated water W, for example, flowing out from the contact materials 2 and 3, respectively. The treated water W is collected and allowed to flow into the water tank 10, and the treated water W stored in the water tank 10 is sent to the spray nozzle 12 by the pressure pump 11, and the treated water is directed from the spray nozzle 12 toward the upstream contact material 2. It is a system for spraying W. Specifically, in addition to the water tank 10, the pressure pump 11 and the spray nozzle 12, the circulation means 8 communicates the bottom of the upstream container 4 and the water tank 10 and accumulates at the bottom of the upstream container 4. The upstream communication pipe 13 that sends the treated water W to the water tank 10, the downstream container 4 bottom, and the water tank 10 communicate with each other, and the treated water W accumulated on the downstream container 4 bottom is sent to the water tank 10. , The first connection pipe 15 that connects the water tank 10 and the pressure pump 11, the second connection pipe 16 that connects the pressure pump 11 and the spray nozzle 12, and the treated water W in the water tank 10. And a drain pipe 17 for draining the water to the outside.

  The water supply means 9 is means for supplying the treated water W newly introduced from the outside to the contact material 3 on the downstream side. For example, the new treated water W introduced from the outside is supplied to the spray nozzle 19 by the pressure pump 18. This is a system for spraying the treated water W from the spray nozzle 19 toward the contact material 3 on the downstream side. Specifically, the water supply means 9 includes, in addition to the above-described pressure feed pump 18 and spray nozzle 19, a first connection pipe 20 that connects a supply source (not shown) of the treated water W and the pressure feed pump 18, and a pressure feed. A second connection pipe 21 that connects the pump 18 and the spray nozzle 19 is provided.

  The circulating means 8 is a system that can supply a large amount of treated water W to the upstream contact material 2, and the upstream contact material 2 has a high liquid gas ratio. Specifically, the number of spray nozzles 12 and 12 provided in the circulation means 8 (two in the example shown in FIG. 1) is equal to the number of spray nozzles 19 provided in the water supply means 9 (in the example shown in FIG. 1). 1), the supply amount of the treated water W to the upstream contact material 2 by the circulation means 8 is larger than the supply amount of the treated water W to the downstream contact material 3 by the water supply means 9. Yes.

  The fan 7 is a known blower that sucks and sends out the gas G. The fan 7 is attached to the intake port 4a of the container 4. By this fan 7, the gas G having a pollutant component is sent into the container 4 from the intake port 4a, and flows through the container 4 and flows into the container 4. After being wet-treated inside, it is discharged from the exhaust port 4b. The purified gas G ′ sent out from the exhaust port 4b is discharged to the outside, supplied to another processing apparatus or production area, or returned to its original location.

  Next, the usage method of the wet air cleaning apparatus 1 which consists of an above-described structure is demonstrated.

  First, new treated water W made of pure water or the like is supplied from the outside to the downstream contact material 3 by the water supply means 9, and the treated water W is infiltrated into the downstream contact material 3. Specifically, new treated water W is sent to the pressure pump 18 through the first connection pipe 20. Then, the new treated water W is pumped to the spray nozzle 19 through the second connection pipe 21 by the pumping pump 18 and sprayed from the spray nozzle 19 toward the contact material 3 on the downstream side. The treated water W sprayed from the spray nozzle 19 penetrates into the contact material 3 on the downstream side, and the contact material 3 becomes wet with the treated water W. The treated water W that has permeated the downstream contact material 3 flows out from the lower portion of the contact material 3 and accumulates at the bottom of the downstream container 4. The treated water W collected at the bottom of the container 4 flows into the water tank 10 through the communication pipe 14 and is added to the treated water W circulated by the circulation means 8.

  Further, the treated water W flowing out from the contact materials 2 and 3 is circulated and supplied to the upstream contact material 2 by the circulation means 8, and the treated water W is infiltrated into the upstream contact material 2. Specifically, the treated water W stored in the water tank 10 is sent to the pressure feed pump 11 through the first connection pipe 15. Then, the treated water W is pumped to the spray nozzle 12 through the second connection pipe 16 and sprayed from the spray nozzle 12 toward the upstream contact material 2 by the pressure pump 11. The treated water W sprayed from the spray nozzle 12 penetrates into the upstream contact material 2, and the contact material 2 becomes wet with the treated water W. The treated water W that has permeated the upstream contact material 2 flows out from the lower portion of the contact material 2 and accumulates at the bottom of the upstream container 4. The treated water W collected at the bottom of the container 4 flows into the water tank 10 through the communication pipe 13. A part of the treated water W in the water tank 10 is appropriately drained from the drain pipe 17.

  Next, the gas G to be treated is circulated and the gas G is passed through the contact materials 2 and 3 to remove the contaminating components in the gas G and clean the contaminated gas G. Specifically, by operating the fan 7, the contaminated gas G is sent into the container 4 from the intake port 4a. The gas G flowing into the container 4 from the intake port 4a passes through the rectifying plate 5 and flows into the contact material 2 on the upstream side. When the gas G passes through the upstream contact material 2, the gas G passing through the gas G comes into gas-liquid contact with the treated water W that has permeated the contact material 2, and most of the contaminating components in the gas G are treated water. Dissolved in W. Subsequently, the gas G that has passed through the upstream contact material 2 flows into the downstream contact material 3. When the gas G passes through the contact material 3 on the downstream side, the passing gas G comes into gas-liquid contact with the new treated water W that has permeated the contact material 3, and contaminated components remaining in the gas G are treated with the treated water. Dissolved in W. Thereafter, the clean gas G ′ that has passed through the contact material 3 on the downstream side passes through the eliminator 6 and is removed from the mist, and is then exhausted out of the wet air cleaning device 1 through the exhaust port 4 b.

  Further, since the gas G to be treated comes into contact with the upstream contact material 2 first, mold spores, suspended bacteria, etc. contained in the gas G to be treated are captured by the upstream contact material 2. For this reason, mold, microorganisms, etc. may breed on the upstream contact material 2. In particular, since the upstream contact material 2 is supplied with the circulated treated water W, propagation of microorganisms and the like is promoted on the contact material 2. Thus, when microorganisms etc. propagated in the upstream contact material 2, the said contact material 2 was propagated by washing | cleaning with hydrogen peroxide water, ozone water, other cleaning agents, etc. (henceforth a cleaning agent). It is desirable to remove microorganisms and the like. Specifically, the cleaning agent is added to the circulating treated water W by adding an appropriate amount of the cleaning agent into the water tank 10, and then the circulating means 8 is operated in the normal operation described above. The treated water W to which the cleaning agent has been added is circulated. As a result, the treated water W to which the cleaning agent is added is supplied to the upstream contact material 2 on which microorganisms and the like have propagated, and the microorganisms and the like that have propagated on the contact material 2 are cleaned and removed by the cleaning power of the cleaning agent. .

  According to the wet air cleaning apparatus 1 having the above-described configuration, the two contact materials 2 and 3 are disposed at a predetermined interval in the gas G flow direction, and the most downstream contact in the gas flow direction. The water supply means 9 for supplying the treated water W newly introduced from the outside to the material 3 and the treated water W flowing out from the other contact material 2 on the upstream side of the contact material 3 on the most downstream side The gas G to be treated is treated with the circulated treated water W in the upstream contact material 2 by comprising the circulation means 8 for supplying the contact material 2 to circulate the treated water W. After that, the most downstream contact material 3 is treated with the treated water W newly introduced from the outside. Thus, the treated water W is circulated and supplied to the upstream contact material 2 where the gas G to be treated first comes into contact with the upstream side. For this reason, wet processing with a high liquid gas ratio (a large amount of treated water) can be economically realized with the upstream contact material 2, and by wet processing with a high liquid gas ratio, Contaminating components in the gas G are efficiently removed. Further, clean treated water W is supplied in a flowing manner to the most downstream contact material 3 with which the gas G that has passed through the upstream contact material 2 contacts. For this reason, the contaminating component in the gas G that could not be completely removed by the upstream contact material 2 is removed by the most downstream contact material 3. As a result, it is possible to achieve a high removal rate without increasing the amount of the treated water W used compared to the conventional wet surface type wet air purifier, and the air without increasing the running cost of the wet air purifier 1. The cleaning ability can be improved.

  Moreover, according to the wet air purification apparatus 1 which consists of an above-described structure, even if a microorganism propagates in the upstream contact material 2, since this contact material 2 is always in a wet state and is flushed with the treated water W, Mold spores and the like are not easily transferred to the downstream contact material 3 by riding on the airflow (gas G passing through the contact material 2). Further, even when a cleaning agent for cleaning / removing microorganisms or the like is added to the circulating treated water W during operation of the wet air cleaning device 1, the cleaning agent is washed into G ′ exhausted from the wet air cleaning device 1. Contains no ingredients. This is because, for example, the cleaning component of the cleaning agent is removed by the downstream contact material 3 even if the cleaning component of the cleaning agent moves from the upstream contact material 2 or the liquid surface into the air or occurs as mist. It is to be done. Therefore, when the upstream contact material 2 is cleaned, there is no need to temporarily stop the operation of the wet air cleaning device 1, and the number of times the wet air cleaning device 1 is temporarily stopped can be reduced. The apparatus 1 can be continuously operated for a long time.

  Further, according to the wet air cleaning apparatus 1 having the above-described configuration, the treated water W flowing out from the contact material 3 on the most downstream side is added to the treated water W circulated by the circulation means 8 and also circulated treated water W. Therefore, the treated water W flowing out from the contact material 3 on the most downstream side in the gas flow direction is used as the treated water W circulating on the upstream side. Thus, since the relatively clean treated water W that has flowed out from the most downstream contact material 3 is added to the treated water W that circulates in the upstream contact material 2, the treatment that is circulated by the circulation means 8. The contamination of the circulating treated water W can be reduced without adding new treated water W to the water W. This makes it difficult for microorganisms to be generated in the upstream contact material W, so that the cleaning operation of the upstream contact material 2 is unnecessary or the frequency (number of times) can be reduced.

[Second Embodiment]
FIG. 2 is a schematic diagram of a wet air cleaning apparatus 101 according to the second embodiment of the present invention. In FIG. 2, the gas G flows from the bottom to the top, the lower side in FIG. 2 is the upstream side in the gas flow direction, and the upper side in FIG. 2 is the downstream side in the gas flow direction. In the second embodiment described below, the same components as those in the first embodiment described above are denoted by the same reference numerals, and the description thereof is omitted.

  A wet air cleaning apparatus 101 shown in FIG. 2 is a vertical wet surface type wet air cleaning apparatus, and includes a hollow container 104, a rectifying plate 5, contact materials 2 and 3 into which treated water W has penetrated, First and second eliminators 6, 106, a fan 7 that sends out gas G, a circulation means 108 that circulates the treated water W, and a water supply means 9 that supplies new treated water W to the downstream contact material 3; It is composed of

  The container 104 is a cylindrical member in which the gas G circulates, and is arranged vertically. An intake port 104 a for allowing the gas G to be processed to flow into the container 104 is provided in the lower part of the container 104, and an exhaust for exhausting the gas G ′ after wet processing is provided in the upper part of the container 104. A mouth 104b is provided. Further, in the container 104, the rectifying plate 5, the contact materials 2 and 3, and the first and second eliminators 6 and 106 are connected to the rectifying plate 5 and the upstream contact material from the upstream side (lower side in FIG. 2). 2, the second eliminator 106, the contact material 3 on the downstream side, and the first eliminator 6 are arranged vertically in this order. Moreover, the bottom part (lower end part) of the container 104 becomes the water tank part 104c in which the treated water W is stored, and the inlet port 104a is provided above the water tank part 104c.

  The contact materials 2 and 3 are made of the same members as those in the first embodiment, and specifically, the upstream contact material 2 and the downstream contact material 3 are spaced in the gas flow direction. Opened up and down.

The first eliminator 6 is a water droplet removing member similar to the eliminator 6 in the first embodiment described above, is disposed at a position downstream of the contact material 3, and is disposed opposite the contact material 3.
In the present embodiment, since a later-described injection nozzle 112 that supplies treated water W to the upstream contact material 2 is located between the upstream contact material 2 and the downstream contact material 3, the injection is performed from the injection nozzle 112. There is a possibility that the mist-like treated water W that has been put on the gas G stream is collected by the contact material 3 on the downstream side. Therefore, in the present embodiment, the second eliminator 106 is disposed between the injection nozzle 112 and the downstream contact material 3. That is, the second eliminator 106 is disposed on the opposite side of the first eliminator 6 and is disposed opposite to the contact material 3. The second eliminator 106 blocks the splash of the treated water W sprayed from the spray nozzle 112 from going toward the downstream contact material 3, but the treated water W dropped from above is lowered. It can be passed to the side. Therefore, the treated water W dropped from the downstream contact material 3 disposed above passes through the second eliminator 106 and is dropped onto the upstream contact material 2 disposed below.

  The circulation means 108 is a means for supplying the treated water W flowing out from the contact materials 2 and 3 to the upstream contact material 2 and circulating the treated water W. For example, the circulating water 108 flows out from the contact materials 2 and 3 respectively. Then, the treated water W that has fallen and accumulated in the water tank section 104 c is sent to the spray nozzle 112 by the pressure feed pump 111, and the treated water W is sprayed from the spray nozzle 112 toward the upstream contact material 2. Specifically, in addition to the above-described pressure feed pump 111 and spray nozzle 112, the circulation means 108 includes a first connection pipe 115 that connects the water tank portion 104c and the pressure feed pump 111, a pressure feed pump 111, and a spray nozzle. 112 and a drain pipe 117 for draining the treated water W in the water tank section 104c to the outside.

  Next, the usage method of the wet air cleaning apparatus 101 which consists of an above-described structure is demonstrated.

  First, new treated water W made of pure water or the like is supplied from the outside to the downstream contact material 3 by the water supply means 9, and the treated water W is infiltrated into the downstream contact material 3. Specifically, in the same manner as in the first embodiment described above, new treated water W is sprayed from the spray nozzle 19 to infiltrate the treated water W into the downstream contact material 3.

  In addition, when the treated water W is directly dropped from the downstream contact material 3 to the upstream contact material 2, the treated water W flowing out from the downstream contact material 3 is supplied to the upstream contact material 2. The treated water W flowing out from the upstream contact material 2 is circulated and supplied to the upstream contact material 2 by the circulation means 108, so that the upstream contact material 2 is permeated into the treated water W. Specifically, the treated water W that has permeated the downstream contact material 3 flows out from the lower portion of the contact material 3, falls on the upstream contact material 2, and becomes treated water W circulated by the circulation means 108. Added. On the other hand, the treated water W stored in the water tank portion 104 c is sent to the pressure feed pump 111 through the first connection pipe 115. Then, the treated water W is pumped to the spray nozzle 112 through the second connecting pipe 116 and sprayed from the spray nozzle 112 toward the upstream contact material 2 by the pumping pump 111. In this manner, the treated water W is directly dropped from the downstream contact material 3 and the treated water W is sprayed from the spray nozzle 112, so that the treated water W penetrates into the upstream contact material 2, The contact material 2 becomes wet with the treated water W. The treated water W that has permeated the upstream contact material 2 flows down from the lower portion of the contact material 2 and accumulates in the water tank portion 104 c of the container 104. A part of the treated water W in the water tank portion 104c is appropriately drained from the drain pipe 117.

  Next, the gas G to be treated is circulated and the gas G is passed through the contact materials 2 and 3 to remove the contaminating components in the gas G and clean the contaminated gas G. Specifically, by operating the fan 7, the contaminated gas G is sent into the container 104 from the intake port 104a. The gas G flowing into the container 104 from the intake port 104a passes through the rectifying plate 5 and flows into the contact material 2 on the upstream side. When the gas G passes through the upstream contact material 2, the gas G passing through the gas G comes into gas-liquid contact with the treated water W that has permeated the contact material 2, and most of the contaminating components in the gas G are treated water. Dissolved in W. Subsequently, the gas G that has passed through the upstream contact material 2 passes through the second eliminator 106 and flows into the downstream contact material 3. When the gas G passes through the contact material 3 on the downstream side, the passing gas G comes into gas-liquid contact with the new treated water W that has permeated the contact material 3, and contaminated components remaining in the gas G are treated with the treated water. Dissolved in W. Thereafter, the gas G ′ that has been cleaned by passing through the contact material 3 on the downstream side passes through the first eliminator 6 and is removed from the mist, and is then exhausted from the exhaust port 104b to the outside of the wet air cleaning device 1. .

  According to the wet air cleaning apparatus 101 having the above-described configuration, the same operational effects as those of the above-described first embodiment can be obtained. That is, a high removal rate can be realized without increasing the amount of treated water W used, and the air cleaning capability can be improved without increasing the running cost of the wet air cleaning device 101. Further, when the upstream contact member 2 is cleaned, it is not necessary to temporarily stop the operation of the wet air cleaning device 101, and the number of times the wet air cleaning device 101 is temporarily stopped can be reduced. The apparatus 101 can be operated continuously for a long time.

  As mentioned above, although embodiment of the wet air cleaning apparatus which concerns on this invention was described, this invention is not limited to above-described embodiment, In the range which does not deviate from the meaning, it can change suitably. For example, in the first embodiment described above, the horizontal wet air cleaning device 1 that distributes the gas G to be processed horizontally is described, and in the second embodiment, the processing target gas G is processed. Although the vertical-type wet air cleaning apparatus 101 that raises the gas G upward has been described, the present invention may be, for example, a wet air cleaning apparatus that lowers the gas to be processed downward, or It may be a wet air cleaning device that circulates the gas to be treated by bending it into a U shape, a U shape, a U shape, or the like.

  In the first and second embodiments described above, the treated water W that has flowed out of the contact material 3 on the most downstream side is added to the treated water W circulated by the circulation means 8 and 108 on the upstream side, and is circulated. However, the present invention may be configured such that the treated water flowing out from the contact material on the most downstream side is discharged without being added to the treated water circulating on the upstream side. . Further, the present invention may be configured such that new treated water is added from the outside to the treated water circulated by the circulation means and a part of the circulated treated water is discharged. Furthermore, in the first and second embodiments described above, a part of the treated water W circulated by the circulation means 8 and 108 is replaced as described above. A configuration may be adopted in which the treated water is not added to the treated water circulated by the means or a part of the circulated treated water is discharged, and the same treated water is circulated without being replaced.

  In the first embodiment described above, the supply amount of the treated water W to the upstream contact material 2 by the circulation means 8 is more than the supply amount of the treated water W to the downstream contact material 3 by the water supply means 9. In order to increase the number of spray nozzles 12 on the upstream side provided in the circulation means 8, the number of spray nozzles 19 on the downstream side provided in the water supply means 9 is increased. The number of the spray nozzles 12 may not be larger than the number of the spray nozzles 19 on the downstream side. For example, the size of the upstream injection nozzle 12 is made larger than that of the downstream injection nozzle 19 so that the amount of treated water W supplied to the upstream contact material 2 can be reduced without increasing the quantity. The amount of treated water W supplied to 3 can be increased.

  In the first and second embodiments described above, the fan 7 that sucks and sends out the gas G is attached to the intake ports 4a and 104a of the containers 4 and 104, and pushes the gas G into the containers 4 and 104. In the present invention, the fan 7 is not necessarily provided on the intake side (upstream side of the gas G flow) of the apparatus. For example, the fan 7 may be provided on the exhaust side of the apparatus (downstream side of the flow of the gas G). Specifically, the exhaust ports of the containers 4 and 104 for exhausting the gas G ′ after the wet treatment A fan 7 may be attached to 4b and 104b to suck the gas G ′ in the containers 4 and 104.

  In the first embodiment described above, the upstream contact material 2 and the downstream contact material 3 are arranged side by side in the container 4, and in the second embodiment, In the container 104, the upstream contact material 2 and the downstream contact material 3 are arranged up and down. However, in the present invention, a plurality of contact materials may be provided, and three or more contacts may be provided. The material may be disposed in the gas flow direction. Further, when three or more contact materials are disposed, the treated water may be supplied to the plurality of contact materials arranged on the upstream side in a circulating manner (circulation means 8, 108), or downstream. The treated water may be supplied to the plurality of contact members arranged on the side by a flow-through method (water supply means 9). For example, in the case of a configuration in which three contact materials are arranged, treatment water is supplied to the two upstream contact materials in a circulating manner, and a new treatment is carried out in a flowing manner to one downstream contact material. You may make it the structure which supplies water, or it supplies a treated water with a circulation type with respect to one contact material of an upstream side, and a new type of treated water is poured with respect to two downstream contact materials. The structure which supplies may be sufficient.

  In the first and second embodiments described above, the treated water W is sprayed from the spray nozzles 12, 19, and 112, and the mist-like treated water W is sprayed onto the contact materials 2 and 3. However, in the present invention, the treated water sprayed on the contact material may be other than mist, for example, the treated water is dripped from the nozzle, and the treated water is supplied to the contact material with large droplets. Also good.

  In the first embodiment described above, the circulation means 8 including the water tank 10, the pressure feed pump 11, the spray nozzle 12, the communication pipes 13 and 14, the first and second connection pipes 15 and 16, and the drain pipe 17 is used. The treated water W is circulated and the circulated treated water W is supplied to the contact material 2 on the upstream side. In the second embodiment, the pumping pump 111, the spray nozzle 112, the first and second connections are provided. The treated water W is circulated by the circulation means 108 including the pipes 115 and 116 and the drain pipe 117, and the circulated treated water W is supplied to the upstream contact material 2. The present invention is a circulation having the above-described configuration. The treated water may be circulated by circulation means other than the means 8 and 108 and the circulated treated water may be supplied to the upstream contact material, and the configuration of the circulation means can be changed as appropriate.

  In the first and second embodiments described above, the plurality of contact members 2 and 3 are disposed in the containers 4 and 104. However, in the present invention, the contact members are disposed in the containers. For example, the contact material may be disposed in a duct through which gas flows. That is, the wet air cleaning apparatus according to the present invention only needs to be configured such that the gas passes through the contact material during the gas flow process.

  Further, in the first and second embodiments described above, new treated water W is introduced from the outside by the water supply means 9 including the pressure pumps 18 and 19 and the first and second connection pipes 20 and 21, and is downstream. However, the present invention may supply new treated water to the downstream contact material by a water supply means other than the water supply means 9 having the above-described configuration. It can be changed as appropriate.

  In the first and second embodiments described above, the wet air cleaning apparatuses 1 and 101 are provided with the rectifying plate 5, the eliminator 6 (first and second eliminators 6 and 106), and the fan 7. However, the present invention may be a wet air cleaning device that is not provided with a current plate, or may be a wet air cleaning device that is not provided with an eliminator, or is not provided with a fan. It may be a wet air cleaning device.

  In addition, in the range which does not deviate from the main point of this invention, it is possible to replace suitably the component in above-mentioned embodiment with a well-known component, and you may combine the above-mentioned modification suitably.

It is a schematic diagram showing the wet air cleaning apparatus for demonstrating the 1st Embodiment of this invention. It is a schematic diagram showing the wet air cleaning apparatus for demonstrating the 2nd Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,101 Wet air cleaning apparatus 2,3 Contact material 8,108 Circulation means 9 Water supply means G, G 'Gas W Treated water

Claims (2)

In the wet air cleaning device that purifies the gas by dissolving the contaminating components in the gas by passing the gas through the contact material into which the treated water has permeated in the distribution process of the gas to be treated containing the contaminating components,
A plurality of the contact materials are disposed at predetermined intervals in the gas flow direction,
Among the contact materials on the most downstream side in the gas flow direction, water supply means for supplying treated water newly introduced from the outside, and other contact materials on the upstream side of the most downstream contact material Circulating means for supplying treated water flowing out from at least one to the contact material and circulating the treated water is provided. The wet air cleaning apparatus according to claim 1, wherein
The wet air cleaning apparatus is characterized in that the treated water flowing out of the contact material on the most downstream side is added to the treated water circulated by the circulation means, and a part of the circulated treated water is discharged.

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