JP2008232359A - Magnetostrictive gas valve - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a smaller magnetostrictive gas valve for easily controlling a trace flow amount of gas in no contact of gas with a field coil. <P>SOLUTION: The magnetostrictive gas valve 1 comprises a strip shaped magnetostrictive composite alloy 2, a valve element 3 provided on the magnetostrictive composite alloy 2, a housing 4 formed of a non-magnetic material which fixes the magnetostrictive composite alloy 2 to the inner wall thereof, and the field coil 5 arranged on the outer periphery of the housing 4, wherein fluid has no contact with the field coil 5. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

  The present invention relates to a magnetostrictive gas valve in which a valve body is driven by a magnetostrictive composite alloy.

Conventionally, motor type, piezoelectric type, magnetostrictive type and the like have been considered as electric gas valves.
Among them, since the magnetostrictive gas valve can be driven in a non-contact manner, it has recently attracted a great deal of attention in a field that requires a minute flow rate control.

For example, as a magnetostrictive gas valve, as shown in FIG. 9, a fluid powder control valve 22 described in Patent Document 1 can be cited. This is because the fluid that flows in from the inflow port 23 passes through the nozzle portion 24, where the flow rate is controlled and flows out from the outflow port 25. The nozzle part 24 is configured by partly or directly connected to the magnetostrictive magnetic body 26, and the outer periphery thereof is sealed by a sealed container 27. The control of the gap between the nozzles is performed by a control current supplied from the controller 29 to the electromagnetic coil 28 installed outside the sealed container 27. When a current is supplied from the control unit 29 to the electromagnetic coil 28, an electromagnetic field passing through the magnetostrictive magnetic body 26 is generated, whereby the length direction is changed by the magnetostrictive effect and the gap of the nozzle unit 24 is controlled.
Japanese Patent No. 2687213

  However, in the case of a piezoelectric gas valve, the electrodes of the piezoelectric element must be disposed in the gas. For this reason, there existed dangers, such as an explosion, depending on the kind of gas. In order to avoid this, it is conceivable that the piezoelectric element is interposed between a film member and the like so as not to touch the gas, but in that case, the controllability is greatly deteriorated, and it is difficult to control a minute flow rate. It was.

  In addition, since the magnetostrictive gas valve according to Patent Document 1 uses a bulk magnetostrictive material having a volume of a certain level or more, the amount of deformation is small, and when using the deformation in the length direction, the necessary amount of deformation is required. There is a problem that a certain length is required to obtain the image quality and there is a limit to downsizing. Further, when the piston is driven via a compression coil spring or a diaphragm, the piston may not return to the origin, and the controllability deteriorates.

  Therefore, in order to solve the above-mentioned problems in the magnetostrictive gas valve, the present invention is configured such that electrodes and the like are configured in a non-contact manner with a gas or other fluid, and a small flow rate can be controlled with a simple configuration, so that the size can be easily reduced. An object of the present invention is to provide a magnetostrictive gas valve capable of achieving the above.

  According to the first aspect of the present invention, in the magnetostrictive gas valve using a magnetostrictive composite alloy composed of two kinds of alloys whose magnetostrictive signs are opposite to each other, a fluid flow path is formed in a housing formed of a non-magnetic material. In addition, the magnetostrictive gas valve is configured such that the fluid and the field coil are not in contact with each other by disposing the flow path and the field coil across the housing.

The invention according to claim 2 is a strip-shaped magnetostrictive composite alloy, a valve body provided in the magnetostrictive composite alloy, a housing for fixing the magnetostrictive composite alloy to an inner wall thereof, a field coil, the housing, and the housing The magnetostrictive gas valve according to claim 1, wherein the magnetostrictive gas valve is constituted by an exterior case including a field coil.

  Since the magnetostrictive composite alloy is composed of two types of alloys whose signs of magnetostriction are opposite to each other, when a magnetic field is applied, the positive magnetostrictive material expands, the negative magnetostrictive material contracts, and the magnetostrictive composite alloy deforms. Deforms like Due to this deformation, the valve body provided in the magnetostrictive composite alloy can be moved to function as a valve.

  The invention according to claim 3 is the magnetostrictive gas valve according to claim 1 or 2, wherein the magnetostrictive composite alloy is fixed to the inner wall of the housing in a cantilever state.

  When the magnetostrictive composite alloy is in a strip shape and fixed in a cantilever state, it is possible to ensure a large displacement at the tip.

  A fourth aspect of the present invention is the magnetostrictive gas valve according to the first or second aspect, wherein the magnetostrictive composite alloy is fixed to the inner wall of the housing in a both-sided state.

  When the magnetostrictive composite alloy is a strip shape and is fixed in a both-end supported state, the displacement amount is smaller than that in the cantilever state, but the closing force that presses the valve body against the valve seat increases, and it is used at a higher pressure. It is effective when

  The invention according to claim 5 is a disc-shaped magnetostrictive composite alloy, a valve body provided in the magnetostrictive composite alloy, a housing for fixing an outer periphery of the magnetostrictive composite alloy to an inner wall thereof, a field coil, The magnetostrictive gas valve according to claim 1, further comprising an outer case including a housing and the field coil, wherein an outer periphery of the magnetostrictive composite alloy is fixed to an inner wall of the housing.

  When the outer periphery of the magnetostrictive composite alloy is fixed in a disc shape, the closing force for pressing the valve element against the valve seat becomes higher than that in a strip shape and fixed in a both-end supported state. Therefore, it is effective when used at a higher pressure.

  A sixth aspect of the present invention is the magnetostrictive gas valve according to the second to fifth aspects, wherein the housing and the outer case are integrally formed.

  By integrally forming the housing and the outer case, the number of parts can be reduced.

  A seventh aspect of the present invention is the magnetostrictive gas valve according to the first to sixth aspects, wherein the valve body and a valve seat into which a fluid flows are in line contact.

  In the magnetostrictive gas valve of the present invention, a strip-shaped or disc-shaped magnetostrictive composite alloy is fixed in a housing, and a flow path and a field coil are arranged across the housing. Non-contact, the initiation element can be removed and a safe valve can be formed. Further, by using a magnetostrictive material having high responsiveness, a minute flow rate can be controlled. Furthermore, since a strip-shaped or disc-shaped magnetostrictive composite alloy is used, the amount of displacement can be secured and the size can be easily reduced as compared with a conventional bulk magnetostrictive material. Further, this gas valve composed of a magnetostrictive composite alloy, a valve body, a field coil, and a housing has a small number of parts and can be manufactured at low cost. Further, since the valve body and the valve seat are in line contact, the closing force per unit area is higher and the blocking is more excellent. Therefore, highly accurate control is possible.

  Hereinafter, a magnetostrictive gas valve according to the present invention will be described with reference to the accompanying drawings. The magneto-magnetostrictive gas valve in the present invention comprises a magnetostrictive composite alloy, a valve body, a field coil, and a housing.

  A cross-sectional view of the first embodiment is shown in FIG. The magnetostrictive gas valve 1 includes a magnetostrictive composite alloy 2, a valve body 3, a housing 4, a field coil 5, and an outer case 6. The magnetostrictive composite alloy 2 is composed of two types of alloys whose magnetostrictive signs are opposite to each other. At this time, a Fe-Ga alloy is used as the positive magnetostrictive material 2a, and a Ni-based alloy is used as the negative magnetostrictive material 2b. However, it is only necessary to obtain the opposite magnetostrictive characteristics, and the positive magnetostrictive material 2a may be any of Fe—X (X = Pd, Pt, Al) alloy. Further, the plate thickness of the positive and negative magnetostrictive material is formed in a strip shape of 0.01 to 1 mm. An adhesive is used to join the positive magnetostrictive material 2a and the negative magnetostrictive material 2b. However, the positive magnetostrictive material 2a and the negative magnetostrictive material 2b may be joined by a treatment under high temperature and high pressure, such as a discharge sintering method.

  As shown in FIG. 2, the valve body 3 has a shape that makes a line contact with a valve seat 7 provided in the housing 4, and is provided at an end of the magnetostrictive composite alloy 2. At this time, the valve body 3 is formed of a material that is not affected by the fluid used.

  The housing 4 is formed of a non-magnetic material, and an end portion of the magnetostrictive composite alloy 2 on the side not provided with the valve body 3 is fixed to an inner wall thereof to form a cantilever structure of the magnetostrictive composite alloy 2.

  The field coil 5 is disposed on the outer periphery of the housing 4, separated from the flow path by the housing 4, and included in the outer case 6 together with the housing 4. At this time, the housing 4 and the outer case 6 may be integrally molded, and the field coil 5 may be disposed therein.

  Next, FIG. 3 shows an explanatory diagram of the drive mechanism of the magnetostrictive gas valve 1 in the first embodiment. According to this, the positive magnetostrictive material 2a and the negative magnetostrictive material 2b are joined, and the valve body 3 is provided on the positive magnetostrictive material 2a side. FIG. 3A shows the valve body 3 when the valve seat 7 is closed and closed. In FIG. 3 (b), a magnetic field is applied to the magnetostrictive composite alloy 2, the positive magnetostrictive material 2 a expands, the negative magnetostrictive material 2 b contracts, and one end of the magnetostrictive composite alloy 2 is applied to the inner wall of the housing 4. Since it is fixed, the magnetostrictive composite alloy 2 bends upward in the figure, and the valve seat 7 is opened.

  FIG. 4 shows a change in flow rate with respect to the applied magnetic field in this example. This is made by bonding a Fe-29.6 at% Pd alloy (positive magnetostrictive material) having a plate thickness of 100 μm and a Ni-based alloy (negative magnetostrictive material) having a plate thickness of 50 μm to produce a magnetostrictive composite alloy having a length of 20 mm. This is fixed in a cantilever state, and the flow rate change with respect to the applied magnetic field is graphed.

As the measurement conditions, when the applied magnetic field H = ₀ Oe, the pressure difference P between the inlet side and the outlet side of the magnetostrictive gas valve is set to P ₀ = 400 Pa, and the magnetic field H = 0 to 420 Oe is applied to change the flow rate on the outlet side. Was measured.

  According to this, the flow rate Q on the outlet side gradually increases with respect to the applied magnetic field H, and when H = 420 Oe, Q = 16 cc / min, and it is possible to control a minute flow rate with the applied magnetic field. I understand.

  A cross-sectional view of the second embodiment is shown in FIG. The magnetostrictive gas valve 8 includes a magnetostrictive composite alloy 9, a valve body 10, a housing 11, a field coil 12, and an outer case 13. The magnetostrictive composite alloy 9 is composed of two types of alloys whose magnetostrictive signs are opposite to each other. At this time, a Fe-Ga alloy is used as the positive magnetostrictive material 9a, and a Ni-based alloy is used as the negative magnetostrictive material 9b. However, it is only necessary to obtain the opposite magnetostrictive characteristics, and the positive magnetostrictive material 9a may be any of an Fe-X (X = Pd, Pt, Al) alloy. Further, the plate thickness of the positive and negative magnetostrictive material is formed in a strip shape of 0.01 to 1 mm. Then, an adhesive is used for joining the positive magnetostrictive material 9a and the negative magnetostrictive material 9b, but they may be joined by a treatment under high temperature and high pressure by a discharge sintering method or the like.

  As shown in FIG. 6, the valve body 10 has a shape that makes a line contact with a valve seat 14 provided in the housing 11, and is provided at the center of the magnetostrictive composite alloy 9. At this time, the valve body 10 is formed of a material that is not affected by the fluid used.

  The housing 11 is formed of a non-magnetic material, and both ends of the magnetostrictive composite alloy 9 are fixed to the inner wall thereof, thereby providing a double-supported structure of the magnetostrictive composite alloy 9.

  The field coil 12 is disposed on the outer periphery of the housing 11, separated from the flow path by the housing 11, and included in the outer case 13 together with the housing 11. At this time, the housing 11 and the outer case 13 may be integrally molded, and the field coil 12 may be disposed therein.

  According to this embodiment, as in the first embodiment, the magnetostrictive composite alloy 9 is deflected by applying a magnetic field, but both ends thereof are fixed to the inner wall of the housing 11, so that The valve body 10 provided in the valve 10 moves up and down, and the valve seat 14 can be opened and closed. In this embodiment, the amount of displacement is smaller than that in the cantilever state, but the closing force that presses the valve element against the valve seat is increased, which is effective when used at a higher pressure.

  A cross-sectional view of the third embodiment is shown in FIG. The magnetostrictive gas valve 15 includes a magnetostrictive composite alloy 16, a valve body 17, a housing 18, a field coil 19, and an outer case 20. The magnetostrictive composite alloy 16 is composed of two types of alloys whose magnetostrictive signs are opposite to each other. At this time, an Fe-Ga alloy is used as the positive magnetostrictive material 16a, and an Ni-based alloy is used as the negative magnetostrictive material 16b. However, it is only necessary to obtain the opposite magnetostriction characteristics, and the positive magnetostrictive material 16a may be any of Fe-X (X = Pd, Pt, Al) alloy. The plate thickness of the positive and negative magnetostrictive material is formed in a disk shape of 0.01 to 1 mm. An adhesive is used to join the positive magnetostrictive material 16a and the negative magnetostrictive material 16b. However, the positive magnetostrictive material 16a and the negative magnetostrictive material 16b may be joined by a process under high temperature and high pressure, such as a discharge sintering method.

  As shown in FIG. 8, the valve body 17 has a shape that makes a line contact with a valve seat 21 provided in the housing 18, and is provided at the center of the magnetostrictive composite alloy 16. At this time, the valve body 17 is formed of a material that is not affected by the fluid used.

  The housing 18 is made of a non-magnetic material and fixes the outer peripheral portion of the magnetostrictive composite alloy 16 having a disk shape to the inner wall thereof.

  The field coil 19 is disposed on the outer periphery of the housing 18, separated from the flow path by the housing 18, and included in the outer case 20 together with the housing 18. At this time, the housing 18 and the outer case 20 may be integrally molded, and the field coil 17 may be disposed therein.

  In the above three embodiments, the valve is opened when the magnetic field is applied by providing a valve body on the positive magnetostrictive material side. However, the positive magnetostrictive material and the negative magnetostrictive material are arranged in reverse, and the valve is disposed on the negative magnetostrictive material side. By providing a body, the valve can be closed when a magnetic field is applied.

  According to this embodiment, as in the first and second embodiments, the magnetostrictive composite alloy 16 is bent by applying a magnetic field, but its outer periphery is fixed to the inner wall of the housing 18, so that The valve body 20 provided in the central portion moves in the vertical direction, and the valve seat 21 can be opened and closed. Further, in this embodiment, the displacement amount is further smaller than in the cantilever state / both-end support state, but the closing force that presses the valve body against the valve seat is further increased, which is effective when used at a higher pressure. Become.

It is sectional drawing which shows the 1st Example in this invention. It is a perspective view of a magnetostriction compound alloy and a valve element in the 1st example. It is explanatory drawing of the drive mechanism of the magnetostrictive gas valve 1 in a 1st Example. It is a graph which shows the flow volume change with respect to the applied magnetic field in a 1st Example. It is sectional drawing which shows the 2nd Example in this invention. It is a perspective view of a magnetostriction compound alloy and a valve element in the 2nd example. It is sectional drawing which shows the 3rd Example in this invention. It is a perspective view of the magnetostrictive composite alloy and valve body in the 3rd example. It is explanatory drawing which shows the conventional magnetostrictive gas valve.

Explanation of symbols

1, 8, 15 Magnetostrictive gas valve 2, 9, 16 Magnetostrictive composite alloy 3, 10, 17 Valve body 4, 11, 18 Housing 5, 12, 19 Field coil 6, 13, 20 Exterior case 7, 14, 21 Valve Seat 22 Fluid powder control valve 23 Inlet 24 Nozzle part 25 Outlet 26 Magnetostrictive magnetic material 27 Sealed container 28 Electromagnetic coil 29 Control part

Claims (7)

In a magnetostrictive gas valve using a magnetostrictive composite alloy composed of two types of alloys whose magnetostrictive signs are opposite to each other,
A fluid flow path is formed in a housing formed of a non-magnetic material, and the flow path and the field coil are disposed across the housing so that the fluid and the field coil are not in contact with each other. A magnetostrictive gas valve characterized by being configured as described above. A strip-shaped magnetostrictive composite alloy, a valve body provided in the magnetostrictive composite alloy, a housing for fixing the magnetostrictive composite alloy to an inner wall thereof, a field coil, and an exterior including the housing and the field coil The magnetostrictive gas valve according to claim 1, further comprising a case.   3. The magnetostrictive gas valve according to claim 1, wherein the magnetostrictive composite alloy is fixed to the inner wall of the housing in a cantilever state.   3. The magnetostrictive gas valve according to claim 1, wherein the magnetostrictive composite alloy is fixed to the inner wall of the housing in a both-sided state.   A disc-shaped magnetostrictive composite alloy, a valve body provided in the magnetostrictive composite alloy, a housing for fixing an outer periphery of the magnetostrictive composite alloy to an inner wall thereof, a field coil, the housing, and the field coil. The magnetostrictive gas valve according to claim 1, further comprising an outer case including an outer case, wherein an outer periphery of the magnetostrictive composite alloy is fixed to an inner wall of the housing. 6. The magnetostrictive gas valve according to claim 2, wherein the housing and the outer case are integrally formed.   The magnetostrictive gas valve according to claim 1, wherein the valve body and a valve seat into which a fluid flows are in line contact.

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