JP2008298177A - Fluid control device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid control device with improved assembling workability. <P>SOLUTION: Joint members 3, 6a are abutted on and coupled to each other by male screw members 18 from a forward and backward direction. A sealing part 20 is provided at an approximate center of a rectangular abutting face between the adjacent joint members 3 and 6a. The male screw members 18 from the forward and backward direction are arranged at only two corners separated by 180 degrees among four corners of the rectangle. Screw insertion holes 29 and female screws 30 are alternately provided at four corners of one joint member 3, and the screw insertion holes 29 and the female screws 30 are alternately provided at four corners of the other joint member 6a in opposite positions to those of the joint member 3. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a fluid control device used in a semiconductor manufacturing apparatus or the like, and more particularly to a fluid control device formed by integrating a plurality of fluid control devices.

In a fluid control device used in a semiconductor manufacturing apparatus, a plurality of fluid control devices are arranged in series, and a plurality of lines formed by connecting them without using pipes or joints are arranged in parallel on a base member. As such a fluid control device, in Patent Document 1, a plurality of block-like joint members serving as lower layers are attached to a base member by male screw members, and adjacent joint members A plurality of fluid control devices that are upper layers are attached so as to straddle.
Japanese Patent Laid-Open No. 10-227368

  The fluid control device of Patent Document 1 has the advantage that the space occupied by the device and the volume of the passage can be reduced as compared with the conventional one, but the fluid control device spans adjacent joint members. There has been a problem that it takes time to position the fluid control device.

  An object of the present invention is to provide a fluid control device in which assembly work efficiency is improved.

  The fluid control device according to the present invention includes a plurality of fluid control devices arranged side by side in the front-rear direction, a plurality of block-shaped joint members that are integral with or separate from the fluid control device, and a seal at a portion where the joint members are butted together In the fluid control device having the sealing means for ensuring the safety, the joint members are abutted with each other and joined by a male screw member from the front-rear direction. Sealing means is provided in the approximate center of the abutment surface, and the male screw members from the front-rear direction are arranged only at two places 180 ° apart from the four corners of the square, and at the four corners of one joint member The screw insertion holes and the female threads are alternately provided, and the screw insertion holes and the female threads are alternately arranged at the four corners of the other joint member and at positions opposite to those of the one joint member. And it is characterized in that it is.

  The joint members are sequentially coupled by a male screw member from the front-rear direction. The fluid control device is preliminarily integrated with the joint member, or is otherwise coupled to the joint member by a male screw member from above. Therefore, it is not necessary to arrange the fluid control device so as to straddle adjacent joint members, and it is possible to obtain a fluid passage through which a fluid can flow linearly compared to the fluid passage used in this arrangement. . Further, the male screw members from the front and rear direction are arranged only at two places 180 ° apart from the four corners of the square, and screw insertion holes and female screws are alternately provided at the four corners of one joint member. In the four corners of the other joint member, screw insertion holes and female threads are provided alternately and at positions opposite to those of the one joint member, so that a pair of joint members can be connected to each other. It can be connected by two male screw members. As a result, the weight can be reduced, the joint member can be easily increased or decreased, and the assembly work efficiency is improved. In addition, since the sealing means is provided at the approximate center of the rectangular abutting surface of the adjacent joint member, by using two male screw members and coupling, it is possible to use four male screw members without using them. The sealing performance is ensured.

  In this specification, the top and bottom refer to the top and bottom of FIG. 1, but this top and bottom is for convenience. For example, the top and bottom of FIG. It does not match up and down.

  Examples of the fluid control device include an on-off valve, a pressure reducing valve, a pressure indicator, and a flow rate regulator (mass flow controller). Each fluid control device may be composed of a functional part having a built-in configuration for performing an opening / closing function, a flow rate adjusting function, and the like, and a main body part provided integrally with the functional part and provided with a fluid passage. The main body portion is a block-shaped joint portion (included in the “block-shaped joint member”). The fluid control device may be supported by a block-shaped joint member that is separate from the main body portion.

  The sealing means has a gasket interposed between the joint members and an annular gasket pressing protrusion formed on the abutting surface of the joint member, and the gasket is deformed by the annular gasket pressing protrusion to improve the sealing performance. It is supposed to be secured.

  The “substantially the center of the rectangular abutting surface” is just the center in the width direction (left and right direction), and the vertical direction is appropriately changed according to necessity such as matching to the adjacent joint member. Means good.

  The male screw member is preferably made of stainless steel (SUS304, SUS316, etc.), and the joint member is also preferably made of stainless steel (SUS304, SUS316, etc.). The gasket is preferably formed in an annular shape (perforated disc shape) of stainless steel, nickel alloy, or the like.

  According to the fluid control device of the present invention, the block-like joint members arranged in the front-rear direction can be sequentially coupled by the male screw members from the front-rear direction, so that the assembling property can be improved.

  Embodiments of the present invention will be described below with reference to the drawings.

  1 to 3 show a first embodiment of the fluid control apparatus of the present invention.

  The fluid control device (1) is used in a semiconductor manufacturing device or the like, and includes a pressure reducing valve (2) having a connection block (2a) at a lower end, and a first block that supports the pressure reducing valve (2). Pressure joint (3), pressure indicator (4) which is arranged adjacent to the outlet side (right side of the figure) of the pressure reducing valve (2) and has a connecting block part (4a) at the lower end, and pressure display A second block-shaped joint member (5) that supports the vessel (4), and a block shape that is arranged adjacent to the outlet side of the pressure indicator (5) and is at the same level as the joint members (3) and (5) below A first on-off valve (6) integrally formed with a joint portion (6a) and a block-like joint portion (6a of the first on-off valve (6) disposed adjacent to the outlet side of the first on-off valve (6) The second on-off valve (7), which is integrally formed with the block-like joint part (7a) lower than the lower part), and the lower surface is at the same level as the lower surface of the joint member (3) (5) Third block joint member (8) that supports the valve (7) The fourth block-shaped joint member (9) arranged adjacent to the outlet side of the block-shaped joint portion (7a) of the second on-off valve (7) and the predetermined distance on the outlet side of the fourth joint member (9) And a fifth block joint member (10) arranged opposite to each other, and connection block portions (11a) and (11b) on the inlet side (left side in the figure) and outlet side. (11a) is supported by the fourth joint member (9), and the outlet side connection block portion (11b) is supported by the fifth joint member (10), whereby the fourth and fifth joint members (9) and (10) are supported. The flow rate controller (third fluid controller) (11) supported across the base and the outlet side of the fifth joint member (10) are arranged adjacent to each other and are lower than the fifth joint member (10). A third on-off valve (12) in which the block-shaped joint portion (12a) is integrally formed, and the lower surface is at the same level as the lower surfaces of the other joint members (3) (5) (8) (9). Sixth block joint member (13) that supports the on-off valve (12) It is equipped with a.

  A process gas introducing joint (14) for supplying process gas to the pressure reducing valve (2) is connected to the first joint member (3). A purge gas introduction joint (15) for supplying purge gas to the second on-off valve (7) is connected to the third joint member (8). A process gas and purge gas discharge joint (16) for discharging process gas and purge gas from the third on-off valve (12) is connected to the sixth joint member (13).

  When assembling each part (2) (3) (4) (5) (6) (7) (8) (9) (10) (11) (12) (13) 17) (19) as well as male screw members (18) from the front and rear direction are used, and each block joint member (3) (5) (8) (9) (10) (13) Block joints (6a) (7a) (12a) of each on-off valve (6) (7) (12) and connection block parts (2a) (4a) of each fluid controller (2) (4) (11) ) (11a) (11b) are abutted with each other via a seal portion (seal means) (20).

  Pressure reducing valve (2) and pressure indicator (4) and corresponding joint members (3) and (5) are connected to each other at two fluid passages (23) and (24) at a predetermined distance in the front and rear. Correspondingly, two seal portions (2) are provided between the pressure reducing valve (2) and the pressure indicator (4) and the joint members (3) and (5) at a predetermined interval in front and rear. 20) is provided.

  As shown in FIG. 3, female screws (30) are provided at the front and rear ends of the joint members (3) and (5), and the male screw member (17) from above is connected to each seal portion (20). Each one is arranged on the outside in the front-rear direction. Also, there is a rectangular butt between the joint member (5) supporting the pressure indicator (4) and the block joint (6a) of the first on-off valve (6) adjacent thereto. A seal portion (20) is provided at the approximate center of the surface, and the male screw member (18) from the front and rear direction is disposed only at two positions 180 ° apart from the four corners of the square. Screw insertion holes (29) and female screws (30) are alternately provided at the four corners of 5), and screw insertion holes are provided at the four corners of the block joint (6a) of the first on-off valve (6). (29) The female screws (30) are provided alternately and at positions opposite to those of the joint member (5).

  Adjacent joint members (3) (5), block joints (6a) (7a) of adjacent on-off valves (6) (7), block joint parts of on-off valves (7) (12) (7a ) (12a) and the joint members (9) and (10) are also coupled in the same manner as in FIG. Therefore, unlike the prior art, it is not necessary to arrange the fluid control device so as to straddle adjacent joint members, so that the assembly work efficiency is improved. In addition, since the pair of joint members (3) and (5) can be coupled to each other by two male thread members (18), the weight can be reduced and the joint members can be easily increased or decreased. Also in this respect, the assembly work efficiency is improved. Moreover, since the sealing means (20) is provided in the approximate center of the rectangular abutting surface of the adjacent joint members (3) and (5), the two screw members (18) are used for coupling, Even if four male screw members are not used, the sealing performance is ensured.

  FIG. 4 shows a second embodiment of the fluid control apparatus of the present invention. In this second embodiment, only the block-like joint member is different from the first embodiment. In the following, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted. explain.

  In FIG. 4, the convex part (31) which consists of a cylindrical pin is formed in one of the adjacent joint members (3) and (5), and the cylindrical concave part (32) fitted to this is formed in the other. . A total of two of these convex portions (31) and concave portions (32) are provided so as to be arranged in the width direction (left-right direction) via the seal portion (20). When a pair of joint members (3) and (5) are joined together by two screw members (18), the seal part (20) is slightly from the center of the two screw members (18) due to play. However, there is a possibility that the seal part (20) is positioned by fitting the convex part (31) and the concave part before the male screw member (18) is tightened, and the play is large. However, it is possible to prevent the sealing performance from being lowered.

FIG. 1 is a longitudinal sectional view showing a first embodiment of a fluid control apparatus according to the present invention. FIG. 2 is a plan view of the same. FIG. 3 is an enlarged exploded perspective view of the main part. FIG. 4 is an enlarged exploded perspective view of essential parts showing a second embodiment of the fluid control apparatus according to the present invention.

Explanation of symbols

(1) Fluid control device
(2) Pressure reducing valve (fluid control device)
(3) (5) (9) (10) Block joint member
(4) Pressure indicator (fluid control device)
(6) (7) (12) On-off valve (fluid control device)
(6a) (7a) (12a) Block joint (Block joint member)
(11) Flow controller (fluid control device)
(17) Male thread member from above
(18) Male thread member from front to back
(20) Sealing part (sealing means)
(29) Screw insertion hole
(30) Female thread
(31) Convex
(32) Recess

Claims (2)

A plurality of fluid control devices arranged side by side in the front-rear direction, a plurality of block-like joint members that are integral with or separate from the fluid control device, and a sealing means for ensuring sealing performance at a portion where the joint members are butted together A fluid control device comprising:
The joint members are abutted with each other and joined by a male screw member from the front-rear direction. Between adjacent joint members, a sealing means is provided at substantially the center of the rectangular abutting surface. The male screw members are disposed only at two positions 180 ° apart from the four corners of the square. Screw insertion holes and female threads are alternately provided at the four corners of one joint member, and the other joint member is provided. The fluid control device is characterized in that screw insertion holes and female screws are provided alternately at the four corners and at positions opposite to those of one joint member.   A fluid control device, wherein a convex portion is formed on one of adjacent joint members, and a concave portion fitted on the other is formed on the other joint member.

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