JP5277278B2 - Fitting for fluid control device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a lightweight joint for a fluid control device which can greatly improve workability of the arrangement of the fluid control device on a vertical wall surface. <P>SOLUTION: This rectangular parallelepiped-shaped joint (13) for a fluid control device is divided into two, a concave-shaped connecting member (23) and flat rectangular parallelepiped-shaped communication member (24). The connecting member has a recessed groove (18) in the center, and has, on each side of the recessed groove (18), a bolt insertion hole (20) having a step (20a) for receiving the head of a joint mounting bolt (19) so as not to protrude from the joint (13) and an internal thread part (22) into which an external thread member for mounting a device structural member (21) is screwed. The communication member is inserted into the recessed groove (18) of the connecting member (23) and has only a U-shaped communication passage (12). The communication member (24) is made of stainless steel, and the connecting member (23) is made of polyamide 6. A positioning protrusion (36) is provided on the bottom face of the recessed groove (18) of the connecting member (23), a positioning recess (37) is provided on the bottom face of the communication member (24), and both are fitted together. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a joint for a fluid control device used in a semiconductor manufacturing apparatus or the like.

  In the fluid control device, a plurality of device constituent members arranged in a row are arranged on the device installation side, and a fluid passage outlet of one device constituent member and a fluid passage inlet of the other device constituent member of adjacent device constituent members are arranged. Communicating, communicating the external introduction pipe and the fluid passage inlet of the device component at one end of the fluid control device, or communicating the external discharge tube and the fluid passage outlet of the device component at the other end of the fluid control device A stainless steel rectangular parallelepiped joint is disclosed in Patent Document 1 below.

  Conventionally, the fluid control device has been arranged on the horizontal surface of the floor. However, recently, the fluid control device has been arranged on the vertical wall surface of the room for effective use of the floor surface. By the way, since the fluid flowing in the joint passage of the joint is generally highly corrosive, stainless steel having corrosion resistance is mainly used for the rectangular parallelepiped joint. However, because stainless steel is heavy, not only is it inconvenient to carry, but also the workability of placing the fluid control device on the vertical wall by one or two people is poor.

  An object of the present invention is to provide a lightweight joint for a fluid control device that is convenient to carry and that greatly improves the workability even when the fluid control device is arranged on a vertical wall surface.

The fluid control device joint according to the invention of claim 1 is arranged on the device installation side of a plurality of device components arranged in a row, and the fluid passage outlet of one device component of the adjacent device components and the other device The fluid passage inlet of the component member is communicated, the fluid passage outlet of another device or the external introduction pipe piped from the fluid source and the fluid passage inlet of the device component member at one end of the fluid control device are communicated or controlled In a joint for a fluid control device that connects an external discharge pipe piped to a fluid-required device and a fluid passage outlet of a device constituent member at the other end of the fluid control device, a concave groove is provided in the center and the device constituent member mounting a connecting member device constituting member by a screw member is fixed, is constituted by the communicating member present and the communication passage is formed in the groove, the material of the internally threaded part of the material and the communicating member, Sten A scan steel or stainless steel alloy, material of the connecting member is a aluminum, in which the whole is allowed integrally forced cast by melt forging method.

According to a second aspect of the present invention, in the joint for a fluid control device according to the first aspect, a bolt insertion hole with a stepped portion is formed on both sides of the connection member so as to straddle the connection member and the communication member .

The joint for fluid passage communication according to the present invention includes a connecting member in which a concave groove is provided in the center and the apparatus constituent member is fixed by a male screw member for attaching the apparatus constituent member, and the communication path is formed in the concave groove. The material of the female thread part and the material of the communication member are stainless steel or stainless alloy, the material of the connection member is aluminum, and the whole is cast and integrated by the molten metal forging method. since being canceller, the majority of the joint will be occupied by the light material of stainless steel have been used in conventional joints, resulting in significantly lighter this joint is compared with what the whole is made of stainless steel It becomes. Therefore, it is easy to carry the joint for assembling the fluid control device on the vertical wall, whether it is placed on the horizontal surface of the floor or on the vertical wall, and the fluid control device using this joint is placed on the vertical wall. When doing so, the workability is greatly improved. In addition, since the communication member including the communication path through which a highly corrosive fluid passes has corrosion resistance, the corrosion resistance is not different from a conventional joint made entirely of stainless steel.

  Embodiments of the present invention will be described below with reference to the drawings. In the following description, the left side of FIG. 1 is referred to as the front, the right side of FIG.

  FIG. 1 shows that a fluid control device (E) for a semiconductor manufacturing apparatus in which the joint of the present invention is used is placed in a box (B) and placed vertically on a vertical wall surface (W). Indicates the state. Although not shown, a plurality of the same fluid control devices (E) are arranged in parallel with their length directions being vertical. This fluid control device (E) consists of a 2-port on-off valve (2), a 3-port on-off valve (3), a pressure gauge (4), and a pressure regulator in order from the top to the fluid passage inlet under the mass flow controller (1). (5), a filter (6) and a manual valve (7) are provided in a row, and a two-port on-off valve (8) is provided on the outlet side of the fluid passage. ~ (8)). On the fluid passage inlet side and the fluid passage outlet side of the device component (1), a rectangular parallelepiped projecting portion (1a) (1b) is provided at each lower end of the other device components (2) to (8). Square flange portions (2a), (3a), (4a), (5a), (6a), (7a), and (8a) are respectively provided, and these rear surfaces are all flush with each other. Each of the apparatus components (1) to (8) is arranged in the direction from the bottom to the top where the inlet (9) and the outlet (10) are the length direction of the fluid control device (E), that is, the flow direction of the gaseous fluid. A fluid passage.

  A substrate (11) fixed to a bottom wall of a box (B) attached to a vertical wall surface (W), and eight apparatus constituent members (1) to (8) arranged in a row at intervals. In the meantime, a U-shaped communication passage (12), which is formed in the inside (in FIG. 1, it is a horizontal U-shape, but this is changed depending on the orientation of the joint). The two adjacent device components (7) (6), (6) (5), (5) (4), (4) (3), (3) (2) (2) (1) and (1) A fluid passage outlet (10) of one device constituent member of (8) and a fluid passage inlet (9) of the other device constituent member are respectively connected via a stainless steel sealing material (not shown). 1 rectangular parallelepiped joint (13) (14) (15) and an L-shape formed in the inside (in FIG. 1, it is an inverted L-shape, but the L-shape changes depending on the viewing direction of the joint, Simply “L The communication path (16)) connects the external introduction pipe (not shown) and the fluid passage inlet (9) of the device component (7) at the lower end of the fluid control device (E) to the fluid control device (E ) A second rectangular parallelepiped joint (17) for connecting the fluid passage outlet (10) of the apparatus constituent member (8) at the upper end of the gas pipe and the external discharge pipe (not shown) via a stainless steel seal (not shown). However, together with the first rectangular parallelepiped joints (13), (14), and (15), the front surfaces are all flush with each other.

  Details of the first rectangular parallelepiped joint member (13) of the three types of the first rectangular parallelepiped joints (13) (14) (15) according to the present invention used in the fluid control device are shown in FIGS. Show.

The first rectangular parallelepiped joint (13) has a concave groove (18) extending in the fluid flow direction, that is, in a vertical direction, provided in a transverse shape in the center of the length, and the joint (13) is provided on both sides of the concave groove (18). Bolt insertion hole (20) with a stepped portion (20a) for receiving the hexagonal head of the joint mounting bolt (19) to be mounted on the substrate (11) so as not to protrude from the joint (13), and a male screw member for mounting the device component A concave connection member (23) provided with a female thread portion (22) into which (21) is screwed, and a concave groove (18) of the connection member (23), and has only a communication path (12). The flat rectangular parallelepiped communication member (24) is divided into two parts, the communication member (24 ) is made of stainless steel, and the connection member (23 ) is made of polyamide 6, which is a material having a specific gravity lighter than stainless steel. . The male screw member (21) also has a head with a hexagonal hole.

  The bolt insertion hole (20) is located close to the concave groove (18) on both sides thereof through the central portion of the length of the concave groove (18). One pair of female thread portions (22) is connected to the U-shaped communication path (12) via an inlet (25), and the other pair of female thread portions (22) is connected to the U-shaped communication path (12). Each of the latter female screw portions (22) is located at the corner of the connecting member (23), respectively, and exists in the respective outlets (26), whereas each of the former female screw portions (22) is connected to the connecting member (23 ) And away from the corner of the groove (18). Thus, there is a difference between the two because the width of the device component on the inlet (25) side of the communication path (12) attached to the first rectangular parallelepiped joint (13) and the outlet of the communication path (12) ( 26) This is because there is a difference in the width of the apparatus constituent member on the side. Therefore, when the widths of the apparatus constituent members on both sides of the first cuboid joint (13) are opposite to this case, the first cuboid joint (13) is used with its top and bottom reversed.

  Since the connecting member (23) is made of polyamide 6 as described above, no female screw is provided. Therefore, as shown in FIGS. 4 and 5, the female thread portion (22) is formed of a stainless steel female thread component (27) embedded in the connecting member (23). That is, the female screw component (27) is a cylindrical body made of stainless steel provided with a female screw (28), has a head (30) with a groove (29), and is connected to the front and rear of the connecting member (23). It is closely fitted in a through hole (31) with a head receiving step (31a) opened in the direction. The fixing pin (33) is driven into the bottomed hole (32) passing through the head (30) from the upper surface, the left side surface or the right side surface of the connecting member (23), so that the female thread component (27) is It is fixed to the connecting member (23), and co-rotation with the external thread member (21) is prevented. The groove (29) of the head (30) is used to engage the tip of a screwdriver that adjusts the rotation of the female screw part (27) so that the hole of the head (30) and the hole of the connecting member (23) are aligned. Is.

  The communicating member (24) fitted to the connecting member (23) is not displaced in the length direction of the concave groove (18). That is, a convex arcuate shape is formed so that the first positioning convex portion (34) includes a part of the step portion (20a) of the bolt insertion hole (20) on each side surface of the concave groove (18) of the connecting member (23). The first positioning recesses (35) are provided in a concave arc shape on both side surfaces of the communication member (24), and both are fitted. Further, a second positioning convex portion (36) is provided on the bottom surface of the concave groove (18) of the connecting member (23), and a second positioning concave portion (37) is provided on the bottom surface of the communication member (24). Are fitted. The second positioning convex portion (36) and the second positioning concave portion (37) are necessary when the first positioning convex portion (34) and the first positioning concave portion (35) are not provided. If not necessary.

The first rectangular parallelepiped joint (13) differs from the other in that the joint width and the position of the pair of female threads (22) on the inlet (25) side of the U-shaped communication path (12) are different. Details of the first rectangular parallelepiped joint (14) are shown in FIGS. The latter first rectangular parallelepiped joint (14) is wider than the former first rectangular parallelepiped joint (13), and each female thread portion (22) on the inlet (25) side of the U-shaped communication path (12) is provided. It differs from the former first rectangular parallelepiped joint (13) in that the position is at the corner of the connecting member (23) as well as the position of the pair of female thread portions (22) on the outlet (26) side. The latter first rectangular parallelepiped joint (14) includes the width of the device component on the inlet (25) side of the communication passage (12) attached to this and the device component on the outlet (26) side of the communication passage (12). It is used to connect device components having the same width and wider than the width of the device components on both sides attached to the former first rectangular parallelepiped joint (13).
Although the detailed illustration of the other first rectangular parallelepiped joint (15) is omitted, this is only narrower than the first rectangular parallelepiped joint (14), and the others are the first rectangular parallelepiped joint (14). ) Is not different.

  In short, the first rectangular parallelepiped joint that connects the fluid passage outlet of one device constituent member of two adjacent device constituent members and the fluid passage inlet of the other device constituent member by a U-shaped communication passage formed inside. When the width of the two device components is wide, the width of the two device components is determined so as to be able to correspond to the wider one, and the interval between the pair of female screw portions on the fluid passage inlet side of the U-shaped communication path is: Corresponding to the width of one device component connected to this part, the distance between the pair of female threads on the outlet side of the fluid passage corresponds to the width of the other device component connected to this part. It is done.

  The detail of the 2nd rectangular parallelepiped joint member (17) by this invention used for the said fluid control apparatus (E) is shown in FIG. 9 and FIG.

  The second rectangular parallelepiped joint (17) shown in the figure connects the fluid passage inlet (9) of the device constituent member (7) at the lower end of the fluid control device (E) and the external introduction pipe. A projecting short cylindrical inlet (38) for connection to the external introduction pipe is provided on the lower surface of the member (24). The other difference between the second rectangular parallelepiped joint (17) and the first rectangular parallelepiped joint (13) is that the bolt insertion hole (20) is provided on both sides of the concave groove (18) through the lower end portion. Only the points located close to each other and the pair of female thread portions (22) exist via the outlet (39) of the L-shaped communication path (16), and each female thread portion (22) is connected to each other. It is a point at the corner of (23).

  When connecting the external discharge pipe and the fluid passage outlet (10) of the device constituent member (8) at the upper end of the fluid control device (E) by the L-shaped communication passage (16), the illustrated second rectangular parallelepiped joint ( 17) is turned upside down. Then, the bolt insertion hole (20) is positioned close to both sides of the concave groove (18) near the upper end, and the pair of female thread portions (22) is the inlet of the L-shaped communication path (16). (40), and a projecting short cylindrical outlet (41) for connection with an external discharge pipe is provided on the upper surface of the communication member (24) (see FIG. 1).

  The device component member (3), which is a three-port on-off valve, is sandwiched between upper and lower first rectangular parallelepiped joints (13) and (13), and is connected to a fluid control device adjacent to the parallel arrangement and is connected in an L-shape. A rectangular parallelepiped joint (43) having a passage (42) is connected to the flange portion (3a) of the device constituent member (3) by two left and right male screw members (44). Since this rectangular parallelepiped joint (43) is narrow enough to ensure the L-shaped communication path (42), it is entirely made of stainless steel as in the prior art and is not subject to the present invention. . The female screw into which the male screw member (44) is screwed is directly provided in the stainless steel rectangular parallelepiped joint (43) so as not to reach the L-shaped communication path (42).

In the above embodiment, the female screw component (27) is a cylindrical body made of stainless steel provided with a female screw (28) and is closely fitted into the circular through hole. If it is made into a prismatic shape such as, and this is closely fitted in the rectangular through hole, it is possible to prevent co-rotation with the male screw member, and a fixing pin becomes unnecessary.
A first rectangular parallelepiped joint (51) shown in FIG. 11 is a modification of the first rectangular parallelepiped joint (14) shown in FIG. 7 and FIG.

  The first rectangular parallelepiped joint (51) has a female groove portion in which a concave groove (52) is provided in the center of the length, and a male screw member (21) for mounting a device component member is screwed on both sides of the concave groove (52). An aluminum connecting member (54) provided with two corners (53) and a stainless steel connecting member (U) that is present in the entire groove (52) and has a U-shaped communication path (55) ( 56) and two stepped bolt insertion holes (57) are formed on both sides of the concave groove (52) of the connection member (54) across the connection member (54) and the communication member (56). The female thread portion (53) (opened in the chain line portion in FIG. 11) is formed by a stainless steel cylindrical female thread component (58) embedded in the connecting member (54). .

The first rectangular parallelepiped joint (51) is cast as follows by a molten metal forging method. That is, a horizontal oblong bar-like stainless steel having a cross section that is the same as the vertical cross section of the communication member (56) is placed on the flat plate member, and the same horizontal as the female thread component (58) is placed on both sides thereof. Several cylindrical stainless steels that are slightly taller in cross section are arranged in a row at predetermined intervals, and both are fastened to the flat plate member with a machine screw. Next, a rectangular frame-shaped mold is fitted around the flat plate member, and then molten aluminum is poured into the mold using a square bar-shaped stainless steel and a cylindrical stainless steel as a filling metal, and pressure is applied to form a cast ball. Thereafter, the mold is removed, and the mold is cut at a plurality of locations so as to have a size corresponding to the first rectangular parallelepiped joint (51) having one flat rectangular parallelepiped corresponding to the communicating member (56) and four cylindrical bodies. At the same time, the lower part is cut and removed with a lathe or the like from the upper position of the part with the small screw to obtain a plurality of predetermined rectangular parallelepiped ingots. Each rectangular ingot is turned upside down, a U-shaped communication path (55) is formed in the flat rectangular parallelepiped part to form a stainless steel communication member (56), and a female screw (53) is processed in each cylindrical part. This is formed into an aluminum connecting member (54) in which a stainless steel cylindrical female screw part (58) is embedded. Then, two stepped bolt insertion holes (57) are formed on both sides of the center of the connection member (54) so as to straddle the connection member (54) and the communication member (56) which are integrated with each other. (51) is obtained.
The first rectangular parallelepiped joint (51) is a modification of the first rectangular parallelepiped joint (14) shown in FIGS. 7 and 8, but in the same manner, the first rectangular parallelepiped joint (51) shown in FIGS. 13) The first rectangular parallelepiped joint (15), which is only narrower than the first rectangular parallelepiped joint (14), and the second rectangular parallelepiped joint (17) shown in FIGS. Can be obtained.

  In the above embodiment, the communication path (12) (55) is U-shaped, but it may be V-shaped.

  In the above embodiment, the fluid control device for a semiconductor manufacturing apparatus in which the joint of the present invention is used is arranged with its length direction perpendicular to the vertical wall surface. May be placed on a vertical wall surface with its length direction horizontal, and in some cases, it may be placed on the horizontal surface of the floor.

  The fluid control device (E) of the above embodiment is for a semiconductor manufacturing apparatus, but may be used in addition to a semiconductor manufacturing apparatus.

It is the side view which notched a part which shows the state by which the fluid control apparatus for semiconductor manufacturing apparatuses using the coupling of this invention was arrange | positioned on the vertical wall surface with the length direction perpendicular | vertical. It is an expansion detailed front view of the 1st rectangular parallelepiped joint which is one embodiment of the present invention. FIG. 3 is a sectional view taken along line III-III in FIG. 2. It is a rear view of the 1st rectangular parallelepiped joint of FIG. FIG. 5 is a cross-sectional view taken along line VV in FIG. 4. It is an expansion disassembled perspective view of the 1st rectangular parallelepiped joint of FIG. It is an expansion detailed front view of the 1st rectangular parallelepiped joint which is other embodiments of the present invention. FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. It is an expansion detailed front view of the 2nd rectangular parallelepiped joint which is further another embodiment of the present invention. FIG. 10 is a cross-sectional view taken along line XX in FIG. 9. It is a perspective view which shows the modification of the 1st rectangular parallelepiped joint of FIG. 7 and FIG.

(1) to (8) Device components
(9) Fluid passage outlet of equipment components
(10) Fluid passage inlet of apparatus component
(12) (16) (55) Communication path
(13) (14) (15) (17) (51) Fitting
(18) (52) Groove
(19) Fitting mounting bolt
(20) (57) Bolt insertion hole
(20a) Step part of bolt insertion hole
(21) Male thread member for mounting device components
(22) (53) Female thread
(23) (54) Connecting member
(24) (56) Communication member
(27) (58) Female thread parts
(34) (36) Positioning convex part
(35) (37) Positioning recess (E) Fluid control device (W) Vertical wall surface

JP 2003-322127 A

Claims (2)

Arranged on the device installation side of a plurality of device components arranged in a row, the fluid passage outlet of one device component of adjacent device components communicates with the fluid passage inlet of the other device component, or the like An external discharge pipe piped from the fluid passage outlet or fluid source of the device and a fluid passage inlet of a device component at one end of the fluid control device communicate with each other, or an external discharge pipe and fluid control piped to the control fluid required device In a fluid control device joint that communicates with a fluid passage outlet of a device component at the other end of the device, a connecting member that is provided with a concave groove in the center and is fixed by a device component mounting male screw member , is composed of communicating member present and the communication passage is formed in the groove, the connecting member has brought incoming horses internally threaded part to be screwed device component mounting male screw member, Material of threaded fasteners of the material and the communicating member is a stainless steel or a stainless steel alloy, material of the connecting member is a aluminum, entirely fluid control device are brought integrally forced cast by melt forging method Fittings. Furthermore, the joint for fluid control apparatuses of Claim 1 by which the bolt insertion hole with a step part was opened on both sides of the connection member ranging over the connection member and the communication member .

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