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JP2008260646A - Molding die for molding selenium-containing glass and manufacturing method of the same - Google Patents

Molding die for molding selenium-containing glass and manufacturing method of the same Download PDF

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JP2008260646A
JP2008260646A JP2007103178A JP2007103178A JP2008260646A JP 2008260646 A JP2008260646 A JP 2008260646A JP 2007103178 A JP2007103178 A JP 2007103178A JP 2007103178 A JP2007103178 A JP 2007103178A JP 2008260646 A JP2008260646 A JP 2008260646A
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coating layer
selenium
nickel
containing glass
molding die
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Atsushi Masuda
淳 増田
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Shibaura Machine Co Ltd
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Toshiba Machine Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a molding die for molding a selenium-containing glass which is excellent in durability by avoiding corrosion caused by selenium, and a manufacturing method of the same. <P>SOLUTION: The molding die 8 for molding a selenium-containing glass comprises a base material 1 made of steel, a covered layer 2 composed of a nickel-phosphorous alloy formed on the surface of the base material 1, a metal mold-release film 5, formed on the surface of the covered layer 2, containing at least one member selected from the group consisting of platinum, rhenium, iridium, rhodium, ruthenium, palladium, osmium, and gold, wherein a nickel oxide film 7 is formed on the surface of the covered layer corresponding to portions to be formed with pin holes of the metal mold-release film 5. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、セレン含有ガラス成形用金型及びその製造方法に関する。   The present invention relates to a selenium-containing glass molding die and a method for producing the same.

周知の如く、赤外線暗視カメラは、自動車夜間走行時の歩行者検知のために応用されてきている。こうした赤外線暗視カメラにおいて、人体から放射される遠赤外線を検知するためのレンズ材料としては、ゲルマニウム等が挙げられるが、モールドプレス成形による量産化ができず、コストダウンが課題となっている。   As is well known, infrared night vision cameras have been applied to detect pedestrians during night driving of automobiles. In such an infrared night-vision camera, as a lens material for detecting far-infrared rays radiated from a human body, germanium or the like can be mentioned. However, mass production by mold press molding cannot be performed, and cost reduction is an issue.

近年、モールドプレス成形が可能な赤外線レンズが開発されつつある。その多くはゲルマニウムにセレンを含有させた材料である。ところで、赤外線レンズには回折格子が必要であり、そのために成形用金型には回折格子を加工するための加工層としてNi−P合金層が必要となる。通常は、Ni−P合金層にさらに貴金属の離型膜をコーティングして使用する。   In recent years, infrared lenses capable of mold press molding are being developed. Many of them are materials containing selenium in germanium. By the way, a diffraction grating is required for an infrared lens, and therefore, a Ni-P alloy layer is required as a processing layer for processing the diffraction grating in a molding die. Usually, a Ni-P alloy layer is further coated with a noble metal release film.

しかし、表面の離型膜にわずかでもピンホールがあると、レンズ成形に用いるセレン含有ガラス(硝材)に含まれるセレンが下地のNi−P合金層と反応して、腐食が進行し、離型膜が剥離してしまっていた。   However, if there is even a pinhole in the release film on the surface, selenium contained in the selenium-containing glass (glass material) used for lens molding reacts with the underlying Ni-P alloy layer, and corrosion progresses, releasing the mold. The film was peeled off.

なお、従来、ガラス光学素子成形用金型の製造方法として、特許文献1が知られている。特許文献1は、金型の表面に表面被覆層にクラックが発生するのを回避するための技術であり、熱膨張係数は所定の値の基材を選定し、めっき後、400〜500℃で熱処理を行う技術が開示されている。しかし、特許文献1では、熱処理の際、結晶化に伴う体積収縮が表面被覆層だけに生ずるので、表面被覆層に大きな引張応力が作用して、クラックが発生する場合があった。
特開平11−157852号公報
Conventionally, Patent Document 1 is known as a method for manufacturing a glass optical element molding die. Patent Document 1 is a technique for avoiding the occurrence of cracks in the surface coating layer on the surface of a mold, and a thermal expansion coefficient is selected at a predetermined value at 400 to 500 ° C. after selecting a base material. A technique for performing heat treatment is disclosed. However, in Patent Document 1, since volume shrinkage due to crystallization occurs only in the surface coating layer during heat treatment, a large tensile stress may act on the surface coating layer to cause cracks.
JP-A-11-157852

本発明はこうした事情を考慮してなされたもので、セレンによる腐食を回避して耐久性に優れたセレン含有ガラス成形用金型及びその製造方法を提供することを目的とする。   The present invention has been made in view of such circumstances, and an object of the present invention is to provide a selenium-containing glass molding die excellent in durability by avoiding corrosion by selenium and a method for producing the same.

(1)本発明にセレン含有ガラス成形用金型は、鋼製の基材と、この鋼製の基材の表面に形成されたニッケル−リン合金からなる被覆層と、この被覆層の表面に形成された,白金(Pt),イリジウム(Ir),レニウム(Re),ロジウム(Rh),ルテニウム(Ru),パラジウム(Pd),オスミウム(Os),金(Au)のうち少なくともいずれか1つを含む金属離型膜を具備したセレン含有ガラス成形用金型であり、前記金属離型膜のピンホール形成予定部に対応する前記被覆層表面に、ニッケルからなる酸化皮膜が形成されていることを特徴とする。   (1) The selenium-containing glass molding die according to the present invention comprises a steel base material, a coating layer made of a nickel-phosphorus alloy formed on the surface of the steel base material, and a surface of the coating layer. At least one of platinum (Pt), iridium (Ir), rhenium (Re), rhodium (Rh), ruthenium (Ru), palladium (Pd), osmium (Os), and gold (Au) formed. A selenium-containing glass molding die provided with a metal release film containing, and an oxide film made of nickel is formed on the surface of the coating layer corresponding to the pinhole formation planned portion of the metal release film It is characterized by.

(2)本発明に係るセレン含有ガラス成形用金型は、鋼製の基材と、この鋼製の基材の表面に形成されたニッケル−リン合金からなる被覆層と、この被覆層の表面に形成されたニッケルからなる酸化皮膜を具備することを特徴とする。   (2) A selenium-containing glass molding die according to the present invention includes a steel substrate, a coating layer made of a nickel-phosphorus alloy formed on the surface of the steel substrate, and the surface of the coating layer. It is characterized by comprising an oxide film made of nickel and formed on.

(3)本発明に係るセレン含有成形用金型の製造方法は、上記(1)に対応し、鋼製の基材の表面にニッケル−リン合金からなる被覆層を形成する工程と、この被覆層の表面に、白金,イリジウム,レニウム,ロジウム,ルテニウム,パラジウム,オスミウム,金のうち少なくともいずれか1つを含む金属離型膜を形成する工程と、酸化雰囲気で加熱し、前記金属離型膜のピンホール形成予定部に対応する前記被覆層表面にニッケルからなる酸化皮膜を形成する工程を具備することを特徴とする。   (3) The method for producing a selenium-containing molding die according to the present invention corresponds to the above (1), a step of forming a coating layer made of a nickel-phosphorus alloy on the surface of a steel substrate, and this coating Forming a metal release film containing at least one of platinum, iridium, rhenium, rhodium, ruthenium, palladium, osmium, and gold on the surface of the layer, and heating the metal release film in an oxidizing atmosphere, A step of forming an oxide film made of nickel on the surface of the coating layer corresponding to the planned pinhole formation portion.

(4)本発明に係るセレン含有成形用金型の製造方法は、上記(2)に対応し、鋼製の基材の表面にニッケル−リン合金からなる被覆層を形成する工程と、酸化雰囲気で加熱して前記被覆層の表面にニッケルからなる酸化皮膜を形成する工程を具備することを特徴とする。   (4) The method for producing a selenium-containing molding die according to the present invention corresponds to the above (2), a step of forming a coating layer made of a nickel-phosphorus alloy on the surface of a steel substrate, and an oxidizing atmosphere And heating to form an oxide film made of nickel on the surface of the coating layer.

本発明によれば、被覆層表面に形成したニッケルからなる酸化皮膜により、セレンによる腐食を回避し、もって耐久性に優れたセレン含有ガラス成形用金型を得ることができる。   According to the present invention, a selenium-containing glass molding die excellent in durability can be obtained by avoiding corrosion by selenium by the oxide film made of nickel formed on the surface of the coating layer.

以下、本発明について更に詳しく説明する。
本発明者等は、鉄鋼材料の基材に回折格子を加工する為のNi−P合金からなる被覆層と貴金属離型膜を設けた金型において、セレンを含有する赤外線透過材料をモールドプレス成形した結果、離型膜がところどころ剥離することに気が付いた。この原因を調査したところ、硝材からセレンの蒸気が発生し、セレンの蒸気が離型膜に初めから存在していたピンホールを通って下地の被覆層を腐食していることがわかった。そして、下地の被覆層の腐食により離型膜は陥没し、徐々に剥離範囲が広がっていった。ここで、上記腐食は気体による腐食なので、離型膜の成膜工程を見直しピンホールを非常に小さくしても腐食を防ぐことはできなかった。
Hereinafter, the present invention will be described in more detail.
The present inventors are mold press-molding an infrared transmitting material containing selenium in a mold provided with a coating layer made of a Ni-P alloy and a noble metal release film for processing a diffraction grating on a steel material base material. As a result, I noticed that the release film peeled off in some places. As a result of investigating the cause, it was found that selenium vapor was generated from the glass material, and the selenium vapor corroded the underlying coating layer through the pinhole that was originally present in the release film. Then, the release film was depressed due to the corrosion of the underlying coating layer, and the peeling range gradually expanded. Here, since the corrosion is caused by gas, the corrosion could not be prevented even if the film forming process of the release film was reviewed and the pinhole was made very small.

そこで、本発明者等は、Ni−P合金からなる被覆層のセレンに対する耐食性を向上させることを検討した結果、Ni−P合金からなる被覆層を酸化したときに耐食性が著しく向上することを究明するに至った。そして、離型膜をコーティングした後に酸化雰囲気中で加熱すれば、離型膜のピンホール部分だけを選択的に酸化することができることが分かった。   Therefore, the present inventors have studied to improve the corrosion resistance of the coating layer made of Ni-P alloy against selenium, and as a result, found that the corrosion resistance is remarkably improved when the coating layer made of Ni-P alloy is oxidized. It came to do. It was found that if the release film was coated and heated in an oxidizing atmosphere, only the pinhole portion of the release film could be selectively oxidized.

次に、本発明の具体的な実施例について説明する。
(実施例1)
図1を参照する。まず、鉄鋼材料の基材1に無電解Ni−Pめっきを100μmつけて、めっき層をダイヤモンドバイトで加工し、Ni−P合金からなる被覆層2を形成した。次に、ニッケル(Ni)皮膜3と、白金(Pt)とイリジウム(Ir)からなる合金皮膜4をスパッタリングによりコーティングした。ここで、Ni皮膜3と合金皮膜4を総称して金属離型膜(厚さ350nm)5と呼ぶ。この時点で、金属離型膜の表面にはφ1μm程度のピンホール6が観察された。つづいて、酸化雰囲気で400℃,2時間加熱処理を施し、ピンホール6から露出する前記被覆層2表面にNiからなる厚さ10nmの酸化皮膜7を形成し、ガラス成形用金型8を製造した。
Next, specific examples of the present invention will be described.
Example 1
Please refer to FIG. First, 100 μm of electroless Ni—P plating was applied to the base material 1 of the steel material, and the plating layer was processed with a diamond bit to form a coating layer 2 made of a Ni—P alloy. Next, a nickel (Ni) film 3 and an alloy film 4 made of platinum (Pt) and iridium (Ir) were coated by sputtering. Here, the Ni film 3 and the alloy film 4 are collectively referred to as a metal release film (thickness 350 nm) 5. At this time, a pinhole 6 of about φ1 μm was observed on the surface of the metal release film. Subsequently, a heat treatment is performed in an oxidizing atmosphere at 400 ° C. for 2 hours to form a 10 nm thick oxide film 7 made of Ni on the surface of the coating layer 2 exposed from the pinhole 6, thereby manufacturing a glass molding die 8. did.

実施例1によれば、図1に示すように、基材1上に被覆層2及び金属離型膜5を形成し、ピンホール7の下部に位置する被覆層2表面にNiからなる酸化皮膜7を形成した構成となっている。従って、セレンを含有した硝材に対して精密な加工が可能で耐久性に優れた金型を製造できた。その結果、金属離型膜5の剥離を防ぐことができ、赤外線透過材料の量産が可能となった。   According to Example 1, as shown in FIG. 1, a coating layer 2 and a metal release film 5 are formed on a substrate 1, and an oxide film made of Ni is formed on the surface of the coating layer 2 positioned below the pinhole 7. 7 is formed. Therefore, it was possible to manufacture a mold capable of precise processing and excellent durability with respect to a glass material containing selenium. As a result, peeling of the metal release film 5 can be prevented, and mass production of an infrared transmitting material is possible.

下記表1は、上記ガラス成形用金型8で、セレンを含有した赤外線透過材料の成形を行なった結果を示す。なお、比較のため、Ni皮膜と合金皮膜4のコーティング後に加熱しなかった金型(比較例1)と真空中で加熱した金型(比較例2)についても同じ条件で成形を行った。

Figure 2008260646
Table 1 below shows the results of molding an infrared transmitting material containing selenium with the glass mold 8. For comparison, a mold that was not heated after the coating of the Ni film and the alloy film 4 (Comparative Example 1) and a mold that was heated in vacuum (Comparative Example 2) were also molded under the same conditions.
Figure 2008260646

(実施例2)
図2を参照する。まず、鉄鋼材料の基材1に無電解Ni−Pめっきを100μmつけて、めっき層をダイヤモンドバイトで加工し、Ni−P合金からなる被覆層2を形成した。次に、酸化雰囲気で400℃,2時間加熱処理を施し、被覆層2表面にNiからなる酸化皮膜7を形成し、ガラス成形用金型9を製造した。
(Example 2)
Please refer to FIG. First, 100 μm of electroless Ni—P plating was applied to the base material 1 of the steel material, and the plating layer was processed with a diamond bit to form a coating layer 2 made of a Ni—P alloy. Next, heat treatment was performed in an oxidizing atmosphere at 400 ° C. for 2 hours to form an oxide film 7 made of Ni on the surface of the coating layer 2, thereby manufacturing a glass molding die 9.

実施例2によれば、図2に示すように、基材1上に被覆層2及び酸化皮膜7を順次形成した構成となっているので、実施例1と同様な効果を有する。   According to the second embodiment, as shown in FIG. 2, since the coating layer 2 and the oxide film 7 are sequentially formed on the substrate 1, the same effects as the first embodiment are obtained.

なお、この発明は、上記実施例そのままに限定されるものではなく、実施段階ではその要旨を逸脱しない範囲で鋼製要素を変形して具体化できる。また、前記実施例に開示されている複数の構成要素の適宜な組合せにより種々の発明を形成できる。例えば、実施例に示される全構成要素から幾つかの構成要素を削除してもよい。更に、異なる実施例に亘る構成要素を適宜組み合せてもよい。具体的には、各構成部材の材料や厚み等は一例を示すもので、上記実施例に記載したものに限定されない。   In addition, this invention is not limited to the said Example as it is, A steel element can be deform | transformed and embodied in the implementation stage in the range which does not deviate from the summary. In addition, various inventions can be formed by appropriately combining a plurality of components disclosed in the embodiments. For example, some components may be deleted from all the components shown in the embodiments. Furthermore, the constituent elements in different embodiments may be appropriately combined. Specifically, the materials, thicknesses, and the like of the constituent members are merely examples, and are not limited to those described in the above embodiments.

図1は、本発明の実施例1に係るセレン含有ガラス成形用金型の部分断面図を示す。FIG. 1 shows a partial cross-sectional view of a selenium-containing glass molding die according to Example 1 of the present invention. 図2は、本発明の実施例2に係るセレン含有ガラス成形用金型の部分断面図を示す。FIG. 2 shows a partial cross-sectional view of a selenium-containing glass molding die according to Example 2 of the present invention.

符号の説明Explanation of symbols

1…基材、2…Ni−P合金からなる被覆層、3…Ni皮膜、4…合金皮膜、5…金属離型膜、6…ピンホール、7…酸化皮膜、8,9…ガラス成形用金型。   DESCRIPTION OF SYMBOLS 1 ... Base material, 2 ... Coating layer which consists of Ni-P alloy, 3 ... Ni film, 4 ... Alloy film, 5 ... Metal mold release film, 6 ... Pinhole, 7 ... Oxide film, 8, 9 ... For glass molding Mold.

Claims (4)

鋼製の基材と、この鋼製の基材の表面に形成されたニッケル−リン合金からなる被覆層と、この被覆層の表面に形成された,白金,イリジウム,レニウム,ロジウム,ルテニウム,パラジウム,オスミウム,金のうち少なくともいずれか1つを含む金属離型膜を具備したセレン含有ガラス成形用金型であり、
前記金属離型膜のピンホール形成予定部に対応する前記被覆層表面に、ニッケルからなる酸化皮膜が形成されていることを特徴とするセレン含有ガラス成形用金型。
A steel base material, a coating layer made of a nickel-phosphorus alloy formed on the surface of the steel base material, and platinum, iridium, rhenium, rhodium, ruthenium, palladium formed on the surface of the coating layer , A selenium-containing glass molding die provided with a metal release film containing at least one of osmium and gold,
A selenium-containing glass molding die, wherein an oxide film made of nickel is formed on a surface of the coating layer corresponding to a pinhole formation scheduled portion of the metal release film.
鋼製の基材と、この鋼製の基材の表面に形成されたニッケル−リン合金からなる被覆層と、この被覆層の表面に形成されたニッケルからなる酸化皮膜を具備することを特徴とするセレン含有ガラス成形用金型。 A steel base, a coating layer made of a nickel-phosphorus alloy formed on the surface of the steel base, and an oxide film made of nickel formed on the surface of the coating layer Selenium-containing glass mold. 鋼製の基材の表面にニッケル−リン合金からなる被覆層を形成する工程と、この被覆層の表面に、白金,イリジウム,レニウム,ロジウム,ルテニウム,パラジウム,オスミウム,金のうち少なくともいずれか1つを含む金属離型膜を形成する工程と、酸化雰囲気で加熱し、前記金属離型膜のピンホール形成予定部に対応する前記被覆層表面にニッケルからなる酸化皮膜を形成する工程を具備することを特徴とするセレン含有ガラス成形用金型の製造方法。 A step of forming a coating layer made of a nickel-phosphorus alloy on the surface of a steel substrate, and at least one of platinum, iridium, rhenium, rhodium, ruthenium, palladium, osmium, and gold on the surface of the coating layer A step of forming a metal release film including two and a step of heating in an oxidizing atmosphere to form an oxide film made of nickel on the surface of the coating layer corresponding to a pinhole formation scheduled portion of the metal release film A method for producing a selenium-containing glass molding die characterized by the above. 鋼製の基材の表面にニッケル−リン合金からなる被覆層を形成する工程と、酸化雰囲気で加熱して前記被覆層の表面にニッケルからなる酸化皮膜を形成する工程を具備することを特徴とするセレン含有ガラス成形用金型の製造方法。 A step of forming a coating layer made of a nickel-phosphorus alloy on the surface of a steel substrate, and a step of forming an oxide film made of nickel on the surface of the coating layer by heating in an oxidizing atmosphere. A method for producing a selenium-containing glass mold.
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KR100984140B1 (en) 2008-11-11 2010-09-28 (주)에이지광학 Thin film structure of lens mold core with improved adhesive strength and manufacturing method
WO2021020064A1 (en) 2019-07-31 2021-02-04 昭和電工株式会社 Laminate and method for producing same
CN113874549A (en) * 2019-10-10 2021-12-31 昭和电工株式会社 Laminate and method for producing same

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JP2002029772A (en) * 2000-07-10 2002-01-29 Fuji Electric Co Ltd Mold for press-molding glass substrate for magnetic disk, method of manufacturing the same, and glass substrate for magnetic disk
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KR100984140B1 (en) 2008-11-11 2010-09-28 (주)에이지광학 Thin film structure of lens mold core with improved adhesive strength and manufacturing method
WO2021020064A1 (en) 2019-07-31 2021-02-04 昭和電工株式会社 Laminate and method for producing same
KR20210151953A (en) 2019-07-31 2021-12-14 쇼와 덴코 가부시키가이샤 Laminate and its manufacturing method
CN113874551A (en) * 2019-07-31 2021-12-31 昭和电工株式会社 Laminate and method for producing same
CN113874551B (en) * 2019-07-31 2023-10-03 株式会社力森诺科 Laminated body and manufacturing method thereof
US12031213B2 (en) 2019-07-31 2024-07-09 Resonac Corporation Laminate
CN113874549A (en) * 2019-10-10 2021-12-31 昭和电工株式会社 Laminate and method for producing same
US12116671B2 (en) 2019-10-10 2024-10-15 Resonac Corporation Laminate and method for producing same

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