JP2007183194A - Probing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent the surfaces of a probe card and a body to be inspected from tilting with respect to an X-Y plane of an inspection stage, even if the parallelism between the probe card and the body to be inspected is adjusted. <P>SOLUTION: The probing apparatus includes a cradle for receiving a flat-plate-form body to be inspected having a plurality of electrodes; an inspection stage for supporting the cradle and making the body to be inspected that has been received at the cradle move, at least in the three directions of X-direction and Y-direction intersecting each other, in a plane in parallel with the body to be inspected and Z-direction intersecting both the directions; a probe base located at a distance from the inspection stage in the Z-direction; the probe card having a plurality of probes and supported at the probe base, in such a way that probe needle tips are oriented toward the side of the inspection stage; and a displacement mechanism for making the probe card displace with respect to the inspection stage for adjusting the parallelism between the body to be inspected received at the inspection stage and the probe card. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a probing apparatus for inspecting a flat inspection object such as a semiconductor integrated circuit (IC).

  A flat test object such as a semiconductor wafer on which a plurality of integrated circuits are formed is subjected to an energization test (inspection) as to whether or not each integrated circuit has a function according to the specification. This type of energization test is generally performed using a probing apparatus (inspection apparatus) that uses a probe card having a plurality of probes individually corresponding to the electrodes of the object to be inspected. Each probe has a tip or needle tip that is pressed against a corresponding electrode.

  Generally, a probing device is used to mount a probe card and an object to be inspected so that their relative positional relationship is within an allowable range, a positioning member such as a positioning pin or a stopper, and a positioning mechanism such as an inspection stage. It has. The inspection stage is provided with a mounting table (a receiving table) such as a chuck top that receives an object to be inspected. In addition, the inspection table and the object to be inspected received on the mounting table are moved in three directions of XYZ, and in the Z direction. Is rotated angularly about the θ axis extending to

  On the other hand, in the probe card, the height position of the needle tip from the virtual reference plane (that is, the Z coordinate position) is within the allowable range, and the two needle tips in the XY plane parallel to the object to be inspected are used. Samples and design of the object to be inspected when manufacturing the probe card so that the dimensional position (that is, the XY coordinate position) is within the allowable range with respect to the virtual reference two-dimensional position (that is, the two-dimensional position of the corresponding electrode). The position of the needle tip is adjusted using a position reference such as a figure.

  The above-mentioned position reference is based on the substrate surface such as the virtual surface formed by the surface of the inspected object itself and the plurality of electrodes arranged in the probing device and the substrate surface in a state where the probe card is mounted on the probing device. A surface and a two-dimensional position corresponding to the two-dimensional position of the electrode are provided.

  From the above, in the state where the probe card and the object to be inspected are attached to the probing device, the surface of the probe card itself, the probe surface such as a virtual surface formed by the plurality of needle tips, and the surface of the object to be inspected And the surface of the substrate such as the surface formed by the electrodes are parallel to each other, and the probe tips of all the probes can contact the corresponding electrodes.

  However, even in such a probing device and a probe card, the position of the needle tip with respect to the electrode of the object to be inspected arranged in the probing device is the same as the position of the needle tip after position adjustment at the time of manufacture. It is difficult to attach the probe card to the probing device.

  For this reason, conventionally, in a state where the probe card is attached to the probing apparatus, the probe surface on the probe card side is often inclined with respect to the substrate surface on the inspection object side arranged in the probing apparatus.

  When the probe card is attached to the probing device in such an inclined state, the three-dimensional position (Z position (height position) and XY position (two-dimensional) of the needle tip with respect to the electrode of the actual inspection object arranged in the probing device) The position)) is not the same as the position of the needle tip after position adjustment at the time of manufacture. As a result, a probe is generated in which the needle tip does not accurately contact the electrode, and an accurate test is not performed.

  As one of the alignment techniques for solving the above-mentioned problems, after attaching the probe card to the probing device, the three-dimensional positions of the needle tips of any four probes with respect to the probing device, and the test object arranged on the probing device There are some which determine the three-dimensional positions of the four electrodes of the body and displace the object to be inspected with respect to the probe card using the determined three-dimensional positions (Patent Document 1).

Japanese Patent No. 3193958

  The prior art uses a probing apparatus in which a mounting table (a receiving table) such as a chuck top that receives an object to be inspected is attached to an inspection stage that moves the mounting table in three directions of XYZ using a ball joint.

  The above-described conventional technique using such a probing apparatus obtains a probe surface formed by four needle tips and a substrate surface formed by four electrodes corresponding to each of them, and the probe surface and the substrate surface are The object to be inspected and the probe card are relatively displaced along the spherical surface of the ball joint so as to be parallel, and then the object to be inspected and the probe are brought into contact with the corresponding electrodes accurately. Move the card relatively two-dimensionally.

  However, in the above-described conventional technology, a mounting table such as a chuck top that receives an object to be inspected is displaced around a predetermined reference point with respect to the inspection stage and the probe card, and the object to be inspected is placed between the inspection stage and the probe card. , The parallelism between the probe card and the object to be inspected is adjusted.

  For this reason, even if the probe surface and the substrate surface are parallel, the probe surface and the substrate surface are inclined with respect to the XY plane of the inspection stage. Even if the axis perpendicular to the probe surface coincides with the axis perpendicular to the substrate surface, the coincident axes are inclined with respect to the Z axis of the inspection stage.

  From the above, in the above-described prior art, the relative positional relationship between the needle tip and the electrode is shifted each time the mounting table, and thus the object to be inspected, is moved by the inspection stage. For this reason, every time the mounting table and the object to be inspected are moved, an alignment operation for aligning the position of the needle tip with respect to the electrode must be performed, and such an alignment operation becomes complicated.

  In particular, in a probing apparatus using a probe card having 10,000 or more probes such as a probe card for testing a large number of integrated circuits formed on one semiconductor wafer, it is necessary to perform a needle tip alignment operation. It takes a lot of time and effort.

  An object of the present invention is to prevent the surfaces of the probe card and the object to be inspected from being inclined with respect to the XY plane of the inspection stage even if the parallelism between the probe card and the object to be inspected is adjusted.

  The probing apparatus according to the present invention is an inspection stage that receives a flat inspection object having a plurality of electrodes, and the received inspection object intersects with each other in the X and Y directions in a plane parallel to the inspection object, and both directions. An inspection stage that moves in at least three directions in the Z direction intersecting with each other, a card base spaced from the inspection stage in the Z direction, and a probe card having a plurality of probes, the probe tip of the probe being the inspection A probe card supported by the card base so as to face the stage, and the probe card with respect to the inspection stage in order to adjust the parallelism between the inspection object received by the inspection stage and the probe card. And a displacement mechanism for displacing.

  The object to be inspected is arranged on the inspection stage such that the substrate surface thereof is parallel to the XY plane of the inspection stage and the axis perpendicular to the substrate surface is parallel to the Z axis of the inspection stage. Adjustment of the parallelism between the object to be inspected and the probe card is performed by displacing a card base supporting the probe card with respect to the inspection stage by a displacement mechanism.

  As a result, when the card stand and the probe card are pulled to the inspection stage and tilted with respect to the object to be inspected, and the probe surface is made parallel to the substrate surface, the probe surfaces become parallel to the XY plane of the inspection stage. As a result, since the axis perpendicular to the probe surface is perpendicular to the substrate surface, the axis is parallel to the Z axis of the inspection stage for moving the mounting table and the object to be inspected three-dimensionally. For this reason, according to this invention, position adjustment becomes easy.

  The probe apparatus further includes a stage base that supports an inspection stage, and the displacement mechanism is at least three connection mechanisms that connect the stage base and the card base to support the card base on the stage base. A connection mechanism for jointly displacing the card base with respect to the stage base may be included to adjust the parallelism between the object to be inspected received by the inspection stage and the probe card.

  One of the coupling mechanisms is a fixed column that is connected to the stage base in an undisplaceable manner at one end and is movably connected to the card base in the Z direction at the other end. The connecting mechanism includes a movable body that is movably connected to one of the stage base and the card base at one end so as to extend in the Z direction, and a drive mechanism that moves the movable body in the Z direction. And a drive mechanism disposed on the other of the stage base and the card base.

  The probing device is further disposed on the inspection stage so as to photograph the probe tip of the probe and the upper camera disposed on the card base so as to photograph the electrode of the object received by the inspection stage. Can be included.

  The displacement mechanism may include a plurality of screw members that attach the probe card to the card base so that the position in the Z direction can be adjusted.

  [Terminology]

  In the present invention, the substrate surface refers to the surface of the inspection object itself or a virtual surface formed by a plurality of electrodes provided on the inspection object, and the probe surface refers to a wiring substrate or It refers to the surface of the probe substrate or a virtual surface formed by the probe tips of a plurality of probes provided on the probe card.

  In the present invention, in FIG. 1, the left-right direction is referred to as X direction or left-right direction, the direction perpendicular to the paper surface is referred to as front-rear direction or Y direction, and the up-down direction is referred to as Z direction or up-down direction. However, these directions differ depending on the posture in which the object to be inspected is arranged in the probing apparatus.

  Therefore, the above direction is determined according to the actual probing apparatus so that the X direction and the Y direction are in any one of a horizontal plane, an inclined plane inclined with respect to the horizontal plane, and a vertical plane perpendicular to the horizontal plane. Alternatively, it may be determined to be a combination of these surfaces.

  [Example]

  Referring to FIGS. 1 and 2, an inspection device, that is, a probing device 10 is used for an energization test of a flat object 12.

  [Inspection object]

  As shown in FIG. 3, the device under test 12 is a disk-shaped semiconductor wafer having a plurality of rectangular integrated circuit (IC) chip regions (inspected regions) 14 in a matrix, and a plurality of electrodes. 16 are arranged in a row in each IC chip region 14. The electrodes 16 of the IC chip regions 14 adjacent in the Y direction are aligned in a line. The IC chip regions 14 adjacent to each other in the X direction and the Y direction are partitioned by scribe lines 18.

  Hereinafter, in order to simplify the description and facilitate understanding, the probing apparatus 10 will be described for a case where all the IC chip regions 14 of the device under test 12 are tested at the same time at one time. However, the probing apparatus 10 may test all the IC chip regions 14 of the device under test 12 in a plurality of times.

  In the following description, each electrode 16 is a pad electrode having a rectangular planar shape. However, each electrode 16 may have another planar shape such as a circle or an ellipse. Each electrode 16 is not necessarily a plate-like electrode, and may have another convex shape such as a hemispherical bump electrode.

  [Probing device]

  Referring to FIGS. 1 and 2 again, the probing apparatus 10 includes an inspection stage 22 including a cradle 20 such as a chuck top that vacuum-sucks the object 12 to be inspected, and a plate-like shape that supports the inspection stage 22. A stage base 24, a plate-like card base 26 spaced above the stage base, and three connection mechanisms 28a for connecting the stage base 24 and the card base 26 to support the card base 26 on the stage base 24. , 28b, 28c, a probe card (PC) 30 arranged on the card table 26 so as to face the receiving table 20, a lower camera 32 arranged on the inspection stage 22 so as to be movable in the X direction and the Y direction, And an upper camera 34 disposed on the card base 26.

  The cradle 20 has a ring shape or a disk shape, and has a flat circular suction surface (upper surface in the illustrated example) for horizontally receiving the object 12 to be inspected. The adsorption surface has a plurality of adsorption grooves for adsorbing the body 12 releasably. The suction groove is connected to a vacuum device (not shown).

  Although the inspection stage 22 is not shown in the figure, in addition to the cradle 20, a three-dimensional drive mechanism that moves the cradle 20 in three directions X, Y, and Z in three dimensions, and the cradle 20 in the Z direction. A θ drive mechanism that rotates angularly about the extending θ axis. These drive mechanisms are installed on a stage base 24 arranged in a housing (not shown) of the probing apparatus 10.

  The stage base 24 is horizontally disposed in a housing (not shown) of the probing apparatus 10. The inspection stage 22 is arranged on the stage base 24 in either the three-dimensional drive mechanism or the θ drive mechanism in a state where either the three-dimensional drive mechanism or the θ drive mechanism supports the other. The cradle 20 is supported by the other of the three-dimensional drive mechanism and the θ drive mechanism.

  The card base 26 includes a plate-like support member 36 supported by the stage base 24 by the coupling mechanisms 28a, 28b, and 28c, and a ring-shaped card holder 38 supported by the support member 36 so as to penetrate the Z-direction. Including.

  The support member 36 has a circular hole 40 penetrating up and down in the center, and has an upward step 42 extending around the hole 40 around the hole 40 around the hole 40.

  The card holder 38 has a flange-like upper outer peripheral edge extending radially outward and received by the upward step 42 of the support member 36, and an intermediate part extending downward from the upper outer peripheral edge to fit into the hole 40. The flange-shaped lower inner peripheral edge portion is formed in a ring shape with a member having a Z-shaped cross section so that the probe card 30 is received by extending radially inward from the lower end of the intermediate portion.

  The card holder 38 is attached to the card base 26 by a plurality of mounting screws and a plurality of positioning pins (none of which are shown) that penetrate the upper outer peripheral edge of the card holder 38 in the thickness direction and are screwed to the support member 36. It has been.

  In the probe card 30, a plurality of probes 44 individually corresponding to the electrodes 16 of the device under test 12 are attached to the lower surface of the probe substrate 46, and the probe substrate 46 is attached to the lower surface of the wiring substrate 48 having a circular planar shape. .

  Each probe 44 is electrically connected to the wiring provided on the wiring board 48 via the wiring provided on the probe board 46, and further the tester land 50 provided on the wiring board 48 by the wiring of the wiring board 48. Is electrically connected. Each tester land 50 is electrically connected to a tester (see FIG. 8) that transfers electrical signals to the device under test 12.

  The probe card 30 is attached to the card holder 38 by a plurality of mounting screws and positioning pins (none of which are shown) at the outer peripheral portion of the lower surface of the wiring board 48 so that the probe tip of the probe 44 faces the inspection stage 22 side. It has been.

  The probes 44 are arranged on the probe substrate 46 so that their needle tips (ie, tips) are in the same arrangement state as the arrangement state of the corresponding electrodes 16. Therefore, the probe tips of the probes 44 corresponding to the electrodes 16 of the same IC chip region 14 are aligned in a line, and the probe tips of the probes 44 corresponding to the electrodes 16 of the IC chip regions 14 adjacent in the Y direction are aligned. Are also arranged in a row.

  One connecting mechanism 28a is connected to one of the stage base 24 and the card base 26 in a Z-direction and undisplaceably connected to one of the stage base 24 and the card base 26 at one end, and is connected to the stage base 24 by a ball joint 54 at the other end. And a fixed column connected to the other side of the card base 26 so as to be displaceable.

  The remaining connecting mechanisms 28b and 28c are connected to the stage base 24 and the movable body 58 connected to the stage base 24 and the card base 26 so as to extend in the Z direction and displaceably by a ball joint 56 at one end. And a drive mechanism 60 that is disposed to displace the movable body 58 in the Z direction.

  In the illustrated example, all of the coupling mechanisms 28a, 28b, 28c are coupled to the card base 26 by ball joints 54 or 56.

  The movable body 58 is a ball screw, and the drive mechanism 60 is a hollow motor having a female screw portion screwed into the movable body 58 at the rotating shaft portion. For this reason, the coupling mechanisms 28a, 28b, 28c move the movable body 58 in the Z direction by the forward and reverse rotations of the drive mechanism 60, thereby displacing the card base 26 with respect to the stage base 24 and thus the inspection stage 22. It acts as a displacement mechanism for tilting the card base 26 with respect to the stage base 24 and the inspection stage 22.

  The lower upper cameras 32 and 34 are video cameras having a function of automatic focusing.

  The lower camera 32 is installed upward on the inspection stage 22 so as to image the needle tip of the probe 44, and is moved two-dimensionally in the X direction and the Y direction by the inspection stage 22, and the needle tip of the probe 30. Image.

  The upper camera 34 is attached to the lower surface of the card base 26 downward so as to take an image of the electrode 16 of the inspection object 12 disposed on the inspection stage 22. The upper camera 34 images the electrode 16 of the object 12 to be inspected as the cradle 20 is moved two-dimensionally in the X direction and the Y direction by the inspection stage 22. The upper camera 34 may be attached to the probe card 30 or the card holder 24.

  The moving surface of the lower camera 32 by the inspection stage 22 acts as a virtual first reference surface set in the probing apparatus 10 for the needle tip. The virtual (apparent) moving surface of the upper camera 34 as the cradle 20 is moved by the inspection stage 22 acts as a virtual second reference surface set in the probing apparatus 10 for the electrode 16. .

  The output signal of the lower camera 32 obtains the needle tip height position, which is the height position of the needle tip from the first reference plane, in the prober control unit 62 (see FIG. 8) that controls the probing device 10. It is used to obtain the probe surface of the probe card 30 in a state where it is attached to the probing device 10 from these several needle height positions.

  An output signal of the upper camera 34 obtains an electrode height position, which is a height position of the electrode 16 from the second reference plane, in the prober control unit 62, and also determines the probing device from these several electrode height positions. 10 is used to obtain the electrode surface of the object 12 to be inspected as the substrate surface.

  In the probe card 30, as shown in FIGS. 4A and 4B, the probe tips 44a of the probes 44 contact the set positions 16a of the corresponding electrodes 16, and the probe tips 44a contact the electrodes 16 in this state. Further, a predetermined amount of overdrive OD in the Z direction is applied to the probe 44 so that the needle tip 44a slides with respect to the electrode 16 in the X and Y planes by a predetermined amount.

  The setting position 16a is a target position with which the needle tip 44a should come into contact, and is set in consideration of the amount of slip of the needle tip 44a with respect to the electrode 16 when an overdrive is applied to the probe 44.

  However, it is difficult to manufacture the probe card 30 so that each needle tip 44a accurately contacts the set position 16a of the corresponding electrode 16. For this reason, the tolerance | permissible_range 64 is defined about the contact position of each needle | hook tip 44a to the corresponding electrode 16. FIG. Of course, an allowable range is also defined for the above-mentioned overdrive (OD) amount and slip amount.

  From the above, the probe card 30 is like a sample of the inspected object 12 so that the probe surface is parallel to the substrate surface and the probe tips 44a of the probes 44 are within the allowable range 64 at the time of manufacture. The needle tip position is adjusted using the position reference 66 (see FIG. 5). In FIG. 6, in order to facilitate understanding, many electrodes 16 and many needle tips 44a are omitted.

  The probe card 30 whose needle tip position has been adjusted as described above is attached to the probing apparatus 10 and is adjusted so that the position of the needle tip 44a with respect to the corresponding electrode 16 is within the allowable range 64 in that state.

  As described above, the probe card 30 is attached to the card holder 38 with a plurality of screw members and alignment pins, and the card holder 38 is attached to the card base 26 with a plurality of screw members and alignment pins.

  As a result of the above, the probe card 30 has a predetermined direction (for example, the alignment direction of the needle tips 44a) coincides with the direction predetermined for the probing device 10, and the two-dimensional position of each needle tip 44a is The probing apparatus 10 is pre-aligned so as to coincide with a predetermined two-dimensional position.

  However, even if pre-alignment is performed as described above, the probe surface of the probe card 30 is not always parallel to the substrate surface of the object 12 to be inspected disposed in the probing device 10, and the set position 16 a of the electrode 16 The position of each needle tip 44a with respect to the is not necessarily within the allowable range 64.

  For this reason, alignment described later is performed.

  As shown in FIGS. 1, 6, and 7, the probing apparatus 10 also includes a plurality of measuring devices 70 that each measure the distance between the inspection stage 22 and the probe card 30. These measuring devices 70 are arranged on either the inspection stage 22 or the probe card 30 with an interval in the X direction and the Y direction. Each measuring device 70 can be a laser length measuring device using a laser beam 72.

  On the other hand, on the other side of the inspection stage 22 and the probe card 30, a target 74 that receives the laser beam 72 is disposed at a place irradiated by each measuring device 70. Each target 74 can be a reflector.

  In the illustrated example, the three measuring devices 70 located at the apexes of the triangle are placed on the inspection stage 22 at intervals around the mounting table 20 with the laser beam exit and the reflected light entrance facing upward. The target 74 is attached to the lower surface of the probe substrate 46 downward.

  In FIG. 6, a two-dot chain line region 71 indicates an arrangement region of the probe 44. In FIG. 7, a two-dot chain line region 73 indicates a formation region of the IC chip region 14.

  As shown in FIG. 8, the probe card 30 also includes a storage device 76 disposed on the wiring board 48. The storage device 76 stores probe card information including information related to the probe 44.

  In the illustrated example, the storage device 76 is an IC memory including a plurality of terminals for writing and reading information. Therefore, the wiring board 48 has a plurality of wirings 78 connected to the terminals of the storage device 76.

  The card holder 38 has a plurality of first contact pins 80 that are in electrical contact at one end with the wiring 78 of the probe card 30 disposed on the card holder 38 at the lower outer peripheral edge, and the other end of the first contact pin 80. A plurality of second contact pins electrically connected at one end to the upper outer peripheral edge.

  The card holder 38 further includes first and second connection boards 84 and 86 each having a plurality of wirings on the lower surface of the lower outer peripheral edge and the upper surface of the upper outer peripheral edge, respectively, and a plurality of connection pins 88. In the middle part.

  Each wiring of the first connection board 84 is in electrical contact with the other end of the first contact pin 80 and one end of the connection pin 88 in a one-to-one manner. Each wiring of the second connection board 86 is in electrical contact with the other end of the connection pin 88 and one end of the second contact pin 82 in a one-to-one manner.

  The support member 36 further includes a third connection substrate 90 in the upward step portion 42 having a plurality of wirings each electrically connected to the other end of the second contact pin 82. Each wiring of the third connection substrate 90 is electrically connected to the prober control unit 62 by a wiring 94 provided on the support member 36 and a cable 96 electrically connected to the wiring 94.

  [Alignment method]

  Next, an example of an alignment method for aligning the probe tip 44a of the probe 44 and the electrode 16 of the device under test 12 will be described with reference to FIGS. In FIG. 10, the term “probe card” is shown as the symbol “PC”.

  [Determining probe information]

  Before the probe card 30 is attached to the probing device 10, especially during manufacture, the following steps for determining reference data are performed in advance.

  1: The plane coordinates (two-dimensional positions of the needle tips) and height coordinates (the height positions of the needle tips) of all the probes 44 after adjusting the needle tip positions using the position reference 66 (see FIG. 5) as described above. ) And the contact resistance value is measured (step 100 in FIG. 10).

  2: Next, at least three probes located at the setting position 16a are selected as the first reference probes P1, P2, P3 (see FIG. 5) for determining the needle tip two-dimensional position, and the first probes are selected. The needle tip two-dimensional positions of the reference probes P1, P2, P3 are determined as the needle tip two-dimensional reference positions (step 101 in FIG. 10).

  3: Next, select at least three probes having the same height position by selecting second reference probes P4, P5, and P6 (see FIG. 9) for determining the needle tip height reference position. The needle tip height positions of the two reference probes P4, P5, P6 are determined as the needle tip height reference position (step 101 in FIG. 10).

  From the needle tip height reference position, a virtual surface formed by the needle tips 44a of the second reference probes P4, P5, P6 can be obtained as the reference probe surface.

  4: Next, the optimum overdrive amount (allowable range) for the probe card 30 is selected, and the selected overdrive amount is determined as the optimum overdrive amount (OD amount) (step 101 in FIG. 10).

  5: Thereafter, various types of information regarding the probe card 30 are stored in the storage device 76 (step 102 in FIG. 10).

  Such information includes the two-dimensional position of the tip of the first reference probes P1, P2, P3, the height of the tip of the second reference probes P4, P5, P6, the optimum overdrive amount (OD amount) and the probe. Other probe card information including information about.

  The needle tip two-dimensional position and the needle tip height position are written in the storage device 76 for each reference probe together with the reference probe number as the needle tip two-dimensional reference position and the needle tip height reference position, respectively.

  The optimal overdrive amount (OD amount) and other probe card information including information related to the probe are written in the storage device 76. The needle tip two-dimensional reference position, the needle tip height reference position, and the probe number are used later as probe information.

  The needle tip two-dimensional reference position is determined as the X and Y coordinate positions of the needle tip in a virtual XYZ three-dimensional coordinate system preset in the probe card 30. Such a needle tip two-dimensional reference position may be the XY coordinate position of the electrode corresponding to the reference probe P1, P2, P3, or when the XY coordinate position is specified by the probe number, the probe number itself. It may be.

  The needle tip height reference position is determined as a Z coordinate value (for example, a height position from a reference surface such as the surface of the position reference 66) in the three-dimensional coordinate system. The position reference 66 can be a virtual position of the inspection object with respect to the probe card 30 when the inspection object 12 and the probe card 30 are arranged in the probing apparatus 10.

  The needle tip two-dimensional reference position and the needle tip height reference position are determined in place of newly determining the needle tip two-dimensional position and the needle tip of each needle tip 44a when adjusting the needle tip position using the position reference 66. The height position may be determined, and the corresponding values at that time may be used as the needle tip two-dimensional reference position and the needle tip height reference position.

  When the probe card 30 includes a large number of probes 44, a plurality of probes in which the needle tip 44a is located at the setting position 16a of the virtual corresponding electrode 16 of the position reference 66, or the same needle when adjusting the needle tip position. There are often a plurality of probes having a tip height.

  Therefore, the first reference probes P1, P2, and P3 for obtaining the needle tip two-dimensional reference position are arranged such that the needle tip 44a is a virtual reference electrode 16 of the position reference 66 as shown in FIGS. There may be at least three probes positioned at the set position 16a and spaced greatly apart from each other. When such a probe does not exist, it can be set as a probe in which the needle tip 44a is close to the virtual setting position 16a and greatly spaced from each other.

  Further, the second reference probes P4, P5, and P6 for obtaining the needle tip height reference position are the same or substantially the same needle tip height position (for example, the largest or smallest height position as shown in FIG. 9). ) And at least three probes spaced apart from each other. When such a probe does not exist, a plurality of probes whose needle tip height positions are closest to each other and greatly spaced from each other can be obtained.

  From the above, at least one of the first reference probes P1, P2, P3 may be the same as at least one of the second reference probes P4, P5, P6.

  5 and 9 expand the difference in the electrode 16, the probe 44, and their length dimensions so that the process of determining the first and second reference probes P1 to P6 can be easily understood. As shown, many probes 44 are omitted.

  [Installation of probe card and input of probe information]

  When various kinds of information are stored in the storage device 76, the probe card 30 is accurately attached to the probing device 10 using positioning pins, stoppers, etc. as described above (step 103 in FIG. 10), and stored in step 102. The needle tip two-dimensional reference position and the needle tip height reference position are read out by the control unit 62 of the probing apparatus 10 (step 104 in FIG. 10).

  [Origin position (two-dimensional coordinate alignment)]

  After the above steps 103 and 104, the object to be inspected with respect to the probing apparatus 10 using the scribe line 18 and the IC pattern that divide the adjacent IC chip area 14 of the object 12 to be inspected and the upper camera 34 that captures these images. 12 origin positions are obtained (that is, two-dimensional coordinate alignment) is performed (step 105 in FIG. 10).

  The origin position determination is a step of matching the XY coordinates of the inspection object 12 with the virtual XY coordinates set in the probing apparatus 10 and can be executed as follows. The three-dimensional coordinates of the probing device 10 are set as software in the control unit 62 (see FIG. 8).

  First, while photographing the inspection object 12 with the upper camera 34, the cradle 20 and thus the inspection object 12 are moved two-dimensionally within the XY coordinates of the probing apparatus 10 by the inspection stage 22, and the upper camera 34 at that time is moved. Are temporarily stored in the control unit 62 as image signals.

  Next, using the stored image signal, the controller 62 obtains a positional deviation and an angular deviation between the photographed scribe line 18 (see FIG. 3) and the XY coordinates of the probing apparatus 10.

  Next, the driving device of the inspection stage 22 is controlled by the control device of the probing device 10 so as to correct the obtained positional deviation and angular deviation, and the cradle 20 is moved in the XY coordinates of the probing device 10 by the inspection stage 22. While moving in a dimensional manner, it is rotated angularly around the θ axis.

  Instead of the above, the positional deviation and the angular deviation may be corrected by changing the coordinates set in the control unit 62 of the probing apparatus 10 in software.

  By locating the origin, that is, two-dimensional coordinate matching, the XY coordinates of the inspection object 12 are matched with the XY coordinates of the probing apparatus 10.

  [Confirmation of needle tip height position and parallelism adjustment and confirmation and adjustment of needle tip two-dimensional position]

  After the origin position is determined, parallelism adjustment and confirmation and adjustment of the needle tip two-dimensional position are performed (step 106 in FIG. 10).

  The needle tip height position is confirmed in a two-dimensional manner within the XY coordinates of the probing apparatus 10 using the inspection stage 22 while photographing the needle tips 44a of the probes 44 of the probe card 30 with the lower camera 32. The movement is performed by temporarily storing the output signal of the lower camera 32 at that time in the control unit 62 (see FIG. 8).

  The specific value of the needle tip height position can be the focal position of the lower camera 32 when the needle tip 44 a is photographed by the lower camera 32.

  The parallelism adjustment is performed in the control unit 62 by a virtual surface (probe surface) formed by the needle tip height positions of the second reference probes P4, P5, and P6, and the needle tip height reference position previously stored. The probe card 30 and the inspected object 12 are parallel so that the angle θ1 (see FIG. 9) between the obtained probe surface and the reference probe surface is zero. This is done by adjusting the degree.

  The second reference probes P4, P5 and P6 can be identified from the input probe number. By adjusting the parallelism, the probe surface formed by the needle tip height position and the reference probe surface formed by the needle tip height reference position are made parallel.

  In the parallelism adjustment as described above, the control unit 62 obtains the probe surface and the reference probe surface, obtains the obtained probe surface and reference probe surface inclination angle θ1, and then obtains the obtained inclination angle θ1 to be zero. In addition, the probe card 30 can be tilted.

  The probe card 30 can be tilted by tilting the card base 26 with respect to the receiving base 20 by rotating the hollow motor 60 of the displacement mechanisms 28b, 28c in FIG.

  By adjusting the parallelism, the probe surface of the probe card 30 is made parallel to the substrate surface of the device under test 12. This is because the probes 44 having the same or substantially the same needle tip height position are determined as the reference probes P4, P5, and P6 for adjusting the parallelism.

  In order to adjust the parallelism, without obtaining the probe surface and the reference probe surface, the probe is simply set so that the needle tip height positions of the reference probes P4, P5, P6 coincide with the corresponding needle tip height reference position. The card 30 may be tilted.

  The confirmation of the two-dimensional position of the probe tip is performed by photographing the probe tip of each probe 44 of the probe card 30 with the lower camera 32, while moving the cradle 20 and the lower camera 32 by the inspection stage 22 within the XY coordinates of the probing apparatus 10. The coordinate position of the lower camera 32 when the lower camera 32 images the needle points of the first reference probes P1, P2, P3 is temporarily stored in the control unit 62 of the probing apparatus 10 by moving in a dimension. Is done.

  The first reference probes P1, P2, P3 can be specified by their probe numbers. The coordinate position of the lower camera 32 can be obtained, for example, from the coordinate position of the inspection stage 22 when the lower camera 32 images the needle tips of the first reference probes P1, P2, and P3. The confirmation of the needle tip two-dimensional position may be performed in parallel with the needle tip height position confirmation step 106.

  The adjustment of the two-dimensional position is performed by moving the cradle 20 and the inspected object 12 so that the two-dimensional needle tip positions of the stored reference probes P1, P2, and P3 coincide with the previously stored needle tip two-dimensional reference position. This is performed by moving the probe card 30 two-dimensionally within the XY coordinates by the inspection stage 22.

  By adjusting the two-dimensional position, the needle tips 44a of the reference probes P1, P2, and P3 are positioned at the center of the corresponding electrode 16. As a result, the needle tips of the other probes 44 are also positioned within an allowable range with respect to the corresponding electrode 16.

  The reason for this is that the needle tips of all the probes 44 are positioned within the permissible range 64 with respect to the corresponding electrode 16 by adjusting the needle tip position, and that the needle tip 44a (see FIG. 6) corresponds to the electrode 16. This is because the probes located at or substantially at the set position 16a are determined as the reference probes P1, P2, and P3.

  Next, the distance between the cradle 20 and the probe substrate 46 is measured (step 107 in FIG. 10).

  This measurement is performed by directing the laser beam 72 from the measuring instrument 70 toward the corresponding target 74 and receiving the reflected light from the target 74 by the measuring instrument 70. Each measured distance is temporarily stored in the control unit 62.

  Next, an energization test (measurement) of the device under test 12 is performed (step 108 in FIG. 10).

  In the energization test, the test object 12 is energized in a state where the cradle 20 and the test object 12 are raised by the test stage 22 and the electrode 16 of the test object 12 is in contact with the needle tip of the probe 44. The electrical signal output from the test object 12 is received by a tester, and the tester determines whether the test object 12 is correct.

  During the above-described energization test, needle tip height correction (height correction) and parallelism adjustment (parallel correction) may be performed as necessary (step 109 in FIG. 10).

  In the above-described parallelism correction, the distance between the cradle 20 and the probe board 46 is measured by each measuring instrument 70, and the value at that time is compared with the value previously stored in the control unit 62 in the control unit 62. The probe card 30 is tilted with respect to the device under test 12 by the displacement mechanisms 28b and 28c so that they coincide with each other.

  When the energization test ends, the device under test 12 is replaced (step 110 in FIG. 10). The probe may be cleaned when the test object 12 is replaced.

  Next, measurement of the distance between the cradle 20 and the probe substrate 46 by the measuring device 70, correction of the needle tip height (height correction), and adjustment of parallelism (parallel correction) may be performed (FIG. 10). Step 111). This step 111 is performed by the same method as step 109.

  Thereafter, steps 109 to 111 are repeated for each object to be inspected (step 112 in FIG. 10).

  When all the inspections are completed, the data of the blowing device, the number of times of contact, the number of times of cleaning, the data for adjusting the parallelism, etc. are stored in the control unit 62 (step 113 in FIG. 10), and the probe card (PC) 30 is removed ( Step 114 in FIG.

  Through the above steps 100 to 114, the energization test of the plurality of test objects 12 of the same type is completed.

  [Modification]

  Instead of adjusting the parallelism between the probe surface and the reference probe surface using the needle tip height position and the needle tip height reference position of the reference probes P4, P5, and P6, the reference probes P4, P5, and P6 are adjusted. You may carry out using a needle tip height position and the height position of the electrode corresponding to these.

  In this case, for example, the height position of the electrode 16 corresponding to the second reference probe is obtained while imaging the electrode 16 with the upper camera 34 and the needle tip height from the obtained electrode height position. For example, the virtual substrate surface formed by the electrode height position is parallel to the probe surface formed by the needle tip height position of the second reference probe so that the positions are the same. The probe card 30 may be displaced.

  Similarly, instead of performing the adjustment of the two-dimensional position of the needle tip of the first reference probe using the needle tip two-dimensional position and the needle tip two-dimensional reference position of the reference probes P1, P2, P3, the reference probe P1 , P2 and P4, and the two-dimensional positions of the corresponding electrodes.

  In this case, for example, the two-dimensional position of the electrode 16 corresponding to the second reference probe, that is, the two-dimensional position of the electrode 16 is obtained while photographing the electrode 16 of the device under test 12 with the upper camera 34 as in step 105. The inspected object 12 may be displaced by the inspection stage 22 so that the two-dimensional position of the needle tip of the second reference probe matches the obtained two-dimensional position of the electrode.

  As shown in FIG. 11, the measuring device 70 may be attached to the probe card 30 and the target 74 may be attached to the inspection stage 22.

  As shown in FIG. 12, the data stored in the storage device 76 may be performed using the two infrared communication devices 120 and 122.

  One infrared communication device 120 is arranged on the probe card 30 and connected to a terminal of the storage device 76 by a wiring 124. The other infrared communication device 122 is disposed on the support member 36 of the card base 26 and is connected to the control unit 62 by a wiring 126 and a cable 128.

  The card holder 38 has a space 123 that allows infrared rays transmitted from the first infrared communication device 120 to pass therethrough, and the support member 36 receives infrared rays transmitted from one infrared communication device 120 on the other side. It has a space that allows it to enter the infrared device 122.

  Instead of the above, as shown in FIG. 13, the storage device 76 can include a data carrier that can read stored information using electromagnetic waves. In this case, exchange of information in the storage device 76 is performed using the high frequency 130.

  As shown in FIG. 14, the storage device 76 can be a removable memory such as a flexible disk, a magnetic card, a CD, and an IC card. In this case, the arrangement location 132 of the storage device 76 is provided on the wiring board 48 of the probe card 30, and the storage device 76 is manually moved from the probe card 30 to the control unit 62 or vice versa.

  As shown in FIG. 15, the parallelism of the probe card 30, particularly the probe surface, with respect to a reference plane set in advance in the probing apparatus 10 is screwed into the screw hole of the wiring board 48 of the probe card 30, and the lower part of the card holder 38. A plurality of adjustment screws 134 that contact the inner peripheral edge, a plurality of adjustment screws (not shown) that are screwed into the screw holes in the upper outer peripheral edge of the card holder 38 and contact the step 42 of the card base 26, etc. You may adjust with this member.

  The parallelism is adjusted by loosening a mounting screw (not shown) for attaching the probe card 30 (or the card holder 38) to the card holder 38 (or the support member 36), and the card holder 24 (or support). After adjusting the screwing amount of the adjusting screw 134 to the member 36), the mounting screw can be tightened.

  The parallelism adjustment can be performed by operating the mounting screw and the adjusting screw 134 described above. For this reason, at least the card base 26 and the adjustment screw 134 act as a displacement mechanism that adjusts the inclination angle of the probe card 30 with respect to the probing device 10.

  However, the inclination angle of the probe card 30 with respect to the probing device 10 is attached to the card base 26 via an angle adjustment stage to be adjusted, and the probe card 30 is inclined by driving the angle adjustment stage with an electric motor, thereby probing the device. The inclination angle of the probe card 30 with respect to 10 may be adjusted.

  The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.

It is a figure which shows one Example of the probing apparatus which concerns on this invention. It is a top view of the probing apparatus shown in FIG. It is a top view which shows one Example of a to-be-inspected object. FIGS. 4A and 4B are diagrams for explaining the positional relationship of the probe with respect to the electrode of the object to be inspected, in which FIG. 4A is a plan view, and FIG. 4B is a view of FIG. It is a figure which shows the positional relationship of the electrode of a to-be-inspected object, and the needle | hook tip of a probe in order to demonstrate the principle of adjustment of a two-dimensional position. It is a bottom view which shows one Example of a probe card. It is a top view which shows one Example of a receiving stand. It is sectional drawing which shows one Example of the method of taking out the data memorize | stored in the memory | storage device. It is a figure for demonstrating the principle of adjustment of parallelism. It is a flowchart for demonstrating operation | movement of the probing apparatus shown in FIG. It is a figure which shows the other Example of the probing apparatus which concerns on this invention. It is sectional drawing which shows the other Example of the method of taking out the data memorize | stored in the memory | storage device. It is a top view which shows one Example of the probe card using the data carrier as a memory | storage device. It is a top view which shows one Example of the probe card using the removable disk as a memory | storage device. It is sectional drawing which shows the other Example of a displacement mechanism.

Explanation of symbols

10 Probing device 12 Inspected object 14 Chip area (inspected area)
16 electrode 16a electrode setting position 20 cradle 22 inspection stage 24 stage base 26 card base 28a, 28b, 28c displacement mechanism 30 probe card 32 lower camera 34 upper camera 36 support member 38 card holder 40 hole 42 step portion 44 probe 44a needle Tip 46 Probe board 48 Wiring board 50 Tester land 52 Controller 54, 56 Ball joint 58 Ball screw 60 Hollow motor

64 Allowable range 66 Position reference 70 Measuring instrument 74 Target 76 Storage device 78 Wiring 80, 82 Contact pin 84, 86, 90 Connection board 88 Connection pin 94, 124, 126 Wiring 96, 128, Cable 120, 122 Infrared communication device 134 Adjustment screw

Claims (6)

An inspection stage for receiving a flat inspection object having a plurality of electrodes, and at least three of the X and Y directions intersecting each other in a plane parallel to the inspection object, and the Z direction intersecting both the directions. An inspection stage that moves in the direction,
A card stand spaced from the inspection stage in the Z direction;
A probe card having a plurality of probes, and a probe card supported by the card base such that the probe tip is directed toward the inspection stage;
A probing apparatus comprising: a displacement mechanism for displacing the probe card with respect to the inspection stage in order to adjust parallelism between the inspection object received by the inspection stage and the probe card. In addition, a stage base for supporting the inspection stage,
The displacement mechanism is at least three connection mechanisms for connecting the stage base and the card base so that the card base is supported by the stage base, and includes an inspection object received by the inspection stage and the probe card. The probing apparatus according to claim 1, further comprising a coupling mechanism that jointly displaces the card base with respect to the stage base for adjusting parallelism. One of the coupling mechanisms cannot change the interval between the stage base and the card base in the Z direction,
The probing apparatus according to claim 2, wherein the remaining connecting mechanism is capable of changing an interval between the stage base and the card base in the Z direction. One of the coupling mechanisms is a fixed column that is connected to the stage base in an undisplaceable manner at one end and is connected to the card base in the Z direction so as to be displaceable at the other end.
The remaining coupling mechanism includes a movable body that is movably coupled to one of the stage base and the card base at one end so as to extend in the Z direction, and a drive that moves the movable body in the Z direction. The probing device according to claim 2, comprising a mechanism and a drive mechanism disposed on the other of the stage base and the card base.   Furthermore, an upper camera disposed on the card base so as to photograph the electrode of the object received by the inspection stage, and a lower camera disposed on the inspection stage so as to photograph the probe tip of the probe The probing device according to claim 1, comprising:   The probing device according to claim 1, wherein the displacement mechanism includes a plurality of screw members that attach the probe card to the card base so that the position in the Z direction can be adjusted.

Images