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JP2007095956A - Package for housing electronic component - Google Patents

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Publication number
JP2007095956A
JP2007095956A JP2005282626A JP2005282626A JP2007095956A JP 2007095956 A JP2007095956 A JP 2007095956A JP 2005282626 A JP2005282626 A JP 2005282626A JP 2005282626 A JP2005282626 A JP 2005282626A JP 2007095956 A JP2007095956 A JP 2007095956A
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JP
Japan
Prior art keywords
insulating frame
electronic component
insulating
thickness direction
via conductor
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2005282626A
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Japanese (ja)
Inventor
Koji Hidaka
光二 日高
Hiroshi Uehara
浩 上原
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Kyocera Corp
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Kyocera Corp
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Priority to JP2005282626A priority Critical patent/JP2007095956A/en
Publication of JP2007095956A publication Critical patent/JP2007095956A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49171Fan-out arrangements

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a package for housing electronic components that comprises an insulating frame, through which a via conductor penetrates in the thickness direction, while assuring reliability in airtight sealing with a reduced planar area. <P>SOLUTION: In a package 10 for housing electronic components, an insulating frame 2 that encloses a mounting part 1a is provided on the upper surface of an insulating substrate 1, comprising the mounting part 1a on which an electronic part 5 is mounted. An electrode pad 3 that is electrically connected to the electronic component 5 is provided inside the inner surface of the insulating frame 2. A lid 4 is fitted to the insulating frame 2 to cover the mounting part 1a. The insulating frame 2 comprises a wide part 1b, that protrudes toward the mounting part 1a over the entire length in thickness direction, and a via conductor 6 that penetrates in the thickness direction is formed at the wide part 1b. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、圧電振動子や半導体素子等の電子部品を気密に収納するための電子部品収納用パッケージに関するものである。   The present invention relates to an electronic component storage package for hermetically storing electronic components such as piezoelectric vibrators and semiconductor elements.

従来、圧電振動子や半導体素子等の電子部品は、これらの電子部品を収納するための電子部品収納用パッケージに収納されるとともに蓋体で気密封止されて電子装置となり、携帯電話やコンピュータ等の各種電子機器の部品として使用される。   Conventionally, electronic parts such as piezoelectric vibrators and semiconductor elements are housed in an electronic part housing package for housing these electronic parts and are hermetically sealed with a lid to form an electronic device, such as a mobile phone or a computer. Used as a part of various electronic devices.

このような電子部品収納用パッケージとして多用されているものは、上面に電子部品の搭載部を有する四角形状の絶縁基板と、絶縁基板の上面に搭載部を囲繞するようにして設けられた絶縁枠体とを具備した構造である。絶縁基板および絶縁枠体は、一体焼成されたセラミック材料等からなる。   What is widely used as such an electronic component storage package is a rectangular insulating substrate having an electronic component mounting portion on its upper surface, and an insulating frame provided on the upper surface of the insulating substrate so as to surround the mounting portion. It is the structure which comprised the body. The insulating substrate and the insulating frame are made of an integrally fired ceramic material or the like.

絶縁枠体の上面には、通常、メタライズ層が形成されている。このメタライズ層に、例えば金属製の蓋体をろう付け法や溶接法等の接合手段で接合することにより、搭載部に搭載された電子部品が蓋体で覆われて気密封止される。   A metallized layer is usually formed on the upper surface of the insulating frame. For example, a metal lid is joined to the metallized layer by a joining means such as a brazing method or a welding method, so that the electronic component mounted on the mounting portion is covered with the lid and hermetically sealed.

気密封止される電子部品は、例えば、搭載部から外側面や下面等の外面に導出するようにして形成された配線導体を介して搭載部の外側に導出される。配線導体のうち、搭載部に露出した部位が、電子部品の電極を電気的に接続させるための電極パッドとして機能する。   The electronic component to be hermetically sealed is led out to the outside of the mounting portion through a wiring conductor formed so as to be led out from the mounting portion to an outer surface such as an outer surface or a lower surface. Of the wiring conductor, a portion exposed to the mounting portion functions as an electrode pad for electrically connecting the electrodes of the electronic component.

なお、絶縁枠体には厚み方向に貫通するビア導体が形成されている。例えば、ビア導体を介して、絶縁枠体の上面のメタライズ層と、配線導体のうち電子部品の接地用電極と電気的に接続されたものとが電気的に接続される。これにより、電子部品の接地用電極が、面積の広いメタライズ層や金属製の蓋体等と電気的に接続され、電子部品の接地が確実になる。
特開2004−319831号公報 特開2003−218265号公報
A via conductor that penetrates in the thickness direction is formed in the insulating frame. For example, the metallized layer on the upper surface of the insulating frame and the wiring conductor electrically connected to the grounding electrode of the electronic component are electrically connected via the via conductor. As a result, the grounding electrode of the electronic component is electrically connected to a metallized layer having a large area, a metal lid or the like, and the grounding of the electronic component is ensured.
JP 2004-319831 A JP 2003-218265 A

しかしながら、近年の電子部品の小型化に対応して電子部品収納用パッケージの小型化(平面面積の小面積化)が進んでいることから、絶縁枠体の幅が狭くなってきている。そして、この幅の狭い絶縁枠体に、その幅方向に相当な割合を占めるビア導体が形成されることにより、ビア導体の部分は、例えばメタライズ層と同様のメタライズ導体(金属粉末の焼結体)から成り、機械的な強度が低いので、絶縁枠体にクラック等の機械的な破壊を生じるという問題があった。クラック等の誘因となる応力は、例えば、蓋体と絶縁枠体との間の熱膨張率(線膨張係数)の差に起因する熱応力である。   However, since the electronic component storage package has been downsized (planar area is reduced) in response to the recent downsizing of electronic components, the width of the insulating frame has been reduced. The via conductor occupying a considerable proportion in the width direction is formed in the narrow insulating frame, so that the via conductor portion is formed of, for example, a metallized conductor (sintered metal powder) similar to the metallized layer. ), And the mechanical strength is low, there is a problem that mechanical breakdown such as cracks occurs in the insulating frame. The stress that induces cracks or the like is, for example, thermal stress caused by a difference in thermal expansion coefficient (linear expansion coefficient) between the lid and the insulating frame.

本発明は上記欠点に鑑み案出されたもので、その目的は、ビア導体が厚み方向に貫通する絶縁枠体を有する電子部品収納用パッケージにおいて、気密封止の信頼性を確保しながら平面面積の小型化が可能な電子部品収納用パッケージを提供することにある。   The present invention has been devised in view of the above-described drawbacks, and an object thereof is to provide a planar area while ensuring reliability of hermetic sealing in an electronic component storage package having an insulating frame through which a via conductor penetrates in the thickness direction. It is an object of the present invention to provide an electronic component storage package that can be reduced in size.

本発明の電子部品収納用パッケージは、電子部品が搭載される搭載部を有した絶縁基板の上面に、前記搭載部を囲撓する絶縁枠体を設けるとともに、該絶縁枠体の内側面よりも内側に前記電子部品と電気的に接続される電極パッドを設け、前記絶縁枠体に前記搭載部を覆うようにして蓋体が取着される電子部品収納用パッケージであって、前記絶縁枠体は、厚み方向の全長にわたり前記搭載部に向かって突出した幅広部を有し、該幅広部に厚み方向に貫通するビア導体が形成されていることを特徴とするものである。   The electronic component storage package according to the present invention is provided with an insulating frame body surrounding and surrounding the mounting portion on the upper surface of the insulating substrate having the mounting portion on which the electronic component is mounted, and more than the inner side surface of the insulating frame body. An electronic component storage package in which an electrode pad that is electrically connected to the electronic component is provided inside, and a lid is attached to the insulating frame so as to cover the mounting portion, and the insulating frame Has a wide part protruding toward the mounting part over the entire length in the thickness direction, and a via conductor penetrating in the thickness direction is formed in the wide part.

また、本発明の電子部品収納用パッケージは、好ましくは、前記幅広部は、前記電極パッドの非形成部に位置することを特徴とするものである。   In the electronic component storage package of the present invention, it is preferable that the wide portion is located in a non-formed portion of the electrode pad.

本発明の電子部品収納用パッケージによれば、絶縁枠体が、厚み方向の全長にわたり前記搭載部に向かって突出した幅広部を有し、その幅広部に厚み方向に貫通するビア導体が形成されていることから、絶縁枠体の幅方向においてビア導体が占める割合は相対的に低く抑えることができる。そのため、ビア導体が形成されている部位においても、絶縁枠体の機械的な強度の低下を抑えることができる。その結果、絶縁枠体にクラック等の機械的な破壊が生じることは効果的に防止され、気密封止の信頼性を確保しながら平面面積の小型化が可能な電子部品収納用パッケージを提供することができる。   According to the electronic component storage package of the present invention, the insulating frame has a wide portion protruding toward the mounting portion over the entire length in the thickness direction, and a via conductor penetrating in the thickness direction is formed in the wide portion. Therefore, the proportion of the via conductor in the width direction of the insulating frame can be kept relatively low. For this reason, it is possible to suppress a decrease in mechanical strength of the insulating frame body even at a portion where the via conductor is formed. As a result, it is possible to effectively prevent mechanical damage such as cracks from occurring in the insulating frame, and to provide an electronic component storage package capable of reducing the planar area while ensuring the reliability of hermetic sealing. be able to.

また、本発明の電子部品収納用パッケージは、好ましくは、幅広部は、電極パッドの非形成部に位置することから、電極パッドに対する電子部品の電極の、ボンディングワイヤ等の接続材を介した電気的な接続が妨げられることは防止される。そのため、気密封止の信頼性に優れるとともに小型で、かつ電子部品の搭載等の容易な電子部品収納用パッケージとすることができる。   In the electronic component storage package of the present invention, preferably, since the wide portion is located in the non-formed portion of the electrode pad, the electrical component electrode to the electrode pad is electrically connected via a connecting material such as a bonding wire. The general connection is prevented from being hindered. Therefore, it is possible to provide an electronic component storage package that is excellent in the reliability of hermetic sealing and is small in size and easy to mount electronic components.

以下、本発明を添付図面に基づいて詳細に説明する。   Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

図1(a)は本発明の電子部品収納用パッケージの実施の形態の一例を示す平面図であり、図1(b)は、図1(a)のX−X’線における断面図である。図1(a)および(b)において、1は、搭載部1aを有する絶縁基板、2は絶縁枠体、3は電極パッド、4は蓋体である。絶縁基板1、絶縁枠体2、電極パッド3、および蓋体4により主に電子部品収納用パッケージ10が構成される。   FIG. 1A is a plan view showing an example of an embodiment of an electronic component storage package according to the present invention, and FIG. 1B is a cross-sectional view taken along line XX ′ of FIG. . 1A and 1B, 1 is an insulating substrate having a mounting portion 1a, 2 is an insulating frame, 3 is an electrode pad, and 4 is a lid. The insulating substrate 1, the insulating frame 2, the electrode pad 3, and the lid 4 mainly constitute an electronic component storage package 10.

絶縁基板1は、例えば四角板状であり、上面の中央部に電子部品の搭載部1aを有している。絶縁基板1は、酸化アルミニウム質焼結体やガラスセラミックス,窒化アルミニウム質焼結体,ムライト質焼結体等のセラミック焼結体や、有機樹脂、有機樹脂とセラミック焼結体等の無機材料との複合材等の電気絶縁材料により形成される。   The insulating substrate 1 has a square plate shape, for example, and has an electronic component mounting portion 1a at the center of the upper surface. The insulating substrate 1 is made of a ceramic sintered body such as an aluminum oxide sintered body, a glass ceramic, an aluminum nitride sintered body, a mullite sintered body, an inorganic material such as an organic resin, an organic resin, and a ceramic sintered body. It is formed of an electrically insulating material such as a composite material.

絶縁基板1を四角板状等の角部を有する形状に形成する場合、各角部を円弧状や直線状(C面)に面取り加工して欠け等を防ぐようにしてもよい。   When the insulating substrate 1 is formed in a shape having corners such as a square plate shape, each corner may be chamfered into an arc shape or a straight shape (C surface) to prevent chipping or the like.

搭載部1aは、電子部品5を効率よく搭載するのに適した形状であり、例えば、略四角形状の電子部品と相似(辺の長さが長い)の略四角形状である。また、特に相似に限らず、例えば、電極パッドの配置位置等に応じて、電子部品よりも各辺の長さを長くした四角形状でもかまわない。   The mounting portion 1a has a shape suitable for efficiently mounting the electronic component 5, and has, for example, a substantially rectangular shape similar to a substantially rectangular electronic component (having a long side). In addition, the shape is not particularly similar, and for example, a rectangular shape in which the length of each side is longer than that of the electronic component may be used depending on the arrangement position of the electrode pad.

電子部品5は、CCD型やCMOS型の受光素子および発光ダイオード等の発光素子等の光半導体素子を含む半導体素子、水晶振動子や弾性表面波素子等の圧電素子、圧力センサ素子、コンデンサ、抵抗器、インダクタ等である。   The electronic component 5 includes a semiconductor element including an optical semiconductor element such as a light emitting element such as a CCD type or CMOS type light receiving element and a light emitting diode, a piezoelectric element such as a crystal resonator or a surface acoustic wave element, a pressure sensor element, a capacitor, a resistor Devices, inductors and the like.

また、絶縁基板1の上面には、搭載部1aを囲繞するようにして絶縁枠体2が設けられている。絶縁枠体2は、搭載部1aを囲繞し、後述する蓋体4とともに搭載部1aを気密封止する際の側壁部として機能する。   An insulating frame 2 is provided on the upper surface of the insulating substrate 1 so as to surround the mounting portion 1a. The insulating frame 2 surrounds the mounting portion 1a and functions as a side wall portion when the mounting portion 1a is hermetically sealed together with a lid 4 described later.

絶縁枠体2は、酸化アルミニウム質焼結体やガラスセラミックス,窒化アルミニウム質焼結体,ムライト質焼結体等のセラミック焼結体等や、エポキシ樹脂、ポリイミド樹脂等の有機樹脂、有機樹脂とセラミック焼結体等の無機材料との複合材等の電気絶縁材料により形成される。   The insulating frame 2 includes an aluminum oxide sintered body, a glass ceramic, an aluminum nitride sintered body, a ceramic sintered body such as a mullite sintered body, an organic resin such as an epoxy resin and a polyimide resin, and an organic resin. It is formed of an electrically insulating material such as a composite material with an inorganic material such as a ceramic sintered body.

絶縁基板1および絶縁枠体2は、例えば、生産性や両者間の接合の強度、信頼性等を考慮して、同じ材料により一体的に形成される。   The insulating substrate 1 and the insulating frame 2 are integrally formed of the same material in consideration of, for example, productivity, bonding strength between the two, reliability, and the like.

絶縁基板1および絶縁枠体2は、ともに酸化アルミニウム質焼結体から成る場合であれば、酸化アルミニウムや酸化ケイ素、酸化カルシウム等の原料粉末を、適当な有機溶剤、バインダとともにシート状に成形して作成したセラミックグリーンシートを積層し焼成することにより作製される。この場合、絶縁枠体2となる枠状のセラミックグリーンシートは、中央部分、を金型等を用いた打ち抜き加工により打ち抜いて枠状に成形することにより形成される。   If both the insulating substrate 1 and the insulating frame 2 are made of an aluminum oxide sintered body, raw powders such as aluminum oxide, silicon oxide, and calcium oxide are formed into a sheet shape together with an appropriate organic solvent and a binder. It is produced by laminating and firing the ceramic green sheets produced in this way. In this case, the frame-shaped ceramic green sheet to be the insulating frame 2 is formed by punching the center portion by punching using a mold or the like and forming it into a frame shape.

なお、絶縁基板1および絶縁枠体2は、それぞれ個別に形成しておいて、樹脂接着剤やろう材、ガラス等の接合材を介して接合するようにしてもよい。個別の絶縁基板1や絶縁枠体2は、上記セラミックグリーンシートを、絶縁基板1となるものと絶縁枠体2となる枠状のものとに分けて焼成することにより形成することができる。また、エポキシ樹脂等の有機樹脂を射出成型やトランスファー成型等の成型手段で成型すること等でも形成できる。   Note that the insulating substrate 1 and the insulating frame 2 may be formed individually and bonded via a bonding material such as a resin adhesive, a brazing material, or glass. The individual insulating substrate 1 and the insulating frame 2 can be formed by firing the ceramic green sheet separately into one that becomes the insulating substrate 1 and a frame-like one that becomes the insulating frame 2. It can also be formed by molding an organic resin such as an epoxy resin by a molding means such as injection molding or transfer molding.

絶縁枠体2の上面に、蓋体4を取着することにより、絶縁基板1の搭載部1aと絶縁枠体2と蓋体4とで構成される容器の内部に電子部品5が気密封止されて電子装置(符号なし)が形成される。   By attaching the lid 4 to the upper surface of the insulating frame 2, the electronic component 5 is hermetically sealed inside the container constituted by the mounting portion 1 a of the insulating substrate 1, the insulating frame 2, and the lid 4. As a result, an electronic device (unsigned) is formed.

なお、絶縁枠体2の内側面よりも内側には電極パッド3が形成されており、電極パッド3に電子部品5の電極がボンディングワイヤやはんだ等の導電性接続材(図示せず)を介して電気的に接続される。   An electrode pad 3 is formed on the inner side of the inner side surface of the insulating frame 2, and an electrode of the electronic component 5 is placed on the electrode pad 3 through a conductive connecting material (not shown) such as a bonding wire or solder. Are electrically connected.

電極パッド3は、例えば、絶縁基板1や絶縁枠体2の表面や内部に形成されて
いる配線導体(図示せず)を介して電子装置9の外表面(絶縁基板1の下面や側面、絶縁枠体2の側面等)に導出される。つまり、電子部品5の電極は、電極パッド3と電気的に接続され、電極パッド3および配線導体を介して電子装置の外表面に導出される。電極パッド3の外表面への導出は、配線導体以外の手段(ビア導体や、鉄−ニッケル合金等の金属製のリード端子やリードピン等)を介して行なわせるようにしてもよい。
The electrode pad 3 is formed on the outer surface of the electronic device 9 (the lower surface and side surfaces of the insulating substrate 1, the insulation, for example) via wiring conductors (not shown) formed on the surface of the insulating substrate 1 and the insulating frame 2 and inside. To the side surface of the frame 2). That is, the electrode of the electronic component 5 is electrically connected to the electrode pad 3 and led out to the outer surface of the electronic device through the electrode pad 3 and the wiring conductor. The lead-out to the outer surface of the electrode pad 3 may be performed via means other than the wiring conductor (via conductor, lead terminal made of metal such as iron-nickel alloy, lead pin, etc.).

蓋体4は、その下面の外周部が絶縁枠体2の上面に取着されるような形状、寸法で、鉄−ニッケル−コバルト合金や鉄−ニッケル合金、銅等の金属材料により形成されている。   The lid 4 has a shape and dimensions such that the outer peripheral portion of the lower surface thereof is attached to the upper surface of the insulating frame 2 and is formed of a metal material such as iron-nickel-cobalt alloy, iron-nickel alloy, or copper. Yes.

蓋体4は、例えば、鉄−ニッケル−コバルト合金からなる場合であれば、鉄−ニッケル−コバルト合金の板材に、圧延や打ち抜き、エッチング等の適当な金属加工を施して所定の形状および寸法に成形することにより作製される。   If the lid 4 is made of, for example, an iron-nickel-cobalt alloy, the iron-nickel-cobalt alloy plate material is subjected to appropriate metal processing such as rolling, punching, etching, or the like to have a predetermined shape and size. It is produced by molding.

絶縁枠体2の上面に対する蓋体4の取着は、例えば、絶縁枠体2の上面にメタライズ層2aを形成しておき、このメタライズ層2aに蓋体4の下面外周部分を金−錫等のろう材を用いたろう付け法や、抵抗溶接法、電子ビーム溶接法等の溶接法等の接合手段で接合することにより行なわれる。   The lid 4 is attached to the upper surface of the insulating frame 2, for example, a metallized layer 2a is formed on the upper surface of the insulating frame 2, and the outer peripheral portion of the lower surface of the lid 4 is made of gold-tin or the like on the metalized layer 2a This is performed by joining with a joining method such as a brazing method using a brazing material, a resistance welding method, an electron beam welding method or the like.

絶縁枠体2は、厚み方向の全長にわたり搭載部1aに向かって突出した幅広部2bを有し、その幅広部に、厚み方向に貫通するビア導体6が形成されている。   The insulating frame 2 has a wide portion 2b protruding toward the mounting portion 1a over the entire length in the thickness direction, and a via conductor 6 penetrating in the thickness direction is formed in the wide portion.

例えば、ビア導体6を介して、絶縁枠体2の上面のメタライズ層2aと、配線導体のうち電子部品5の接地用電極(図示せず)と電気的に接続されたものとが電気的に接続される。これにより、電子部品5の接地が確実になる。また、電子部品5が外部からのノイズ(電磁波)を受けるのを、効果的に防止できる。例えば、電子部品5が、高周波信号を扱う半導体素子(半導体集積回路素子)である場合、このようなノイズ遮蔽は、電子部品の(誤作動、遅延を抑制するうえで)効果が大きい。   For example, the metallized layer 2a on the upper surface of the insulating frame 2 and the wiring conductor electrically connected to the grounding electrode (not shown) of the electronic component 5 through the via conductor 6 are electrically connected. Connected. Thereby, the grounding of the electronic component 5 is ensured. Moreover, it can prevent effectively that the electronic component 5 receives the noise (electromagnetic wave) from the outside. For example, when the electronic component 5 is a semiconductor element (semiconductor integrated circuit element) that handles high-frequency signals, such noise shielding has a great effect on the electronic component (in order to suppress malfunction and delay).

このように、幅広部2bを設け、その幅広部2bに厚み方向に貫通するビア導体6を形成したことから、絶縁枠体2の幅方向においてビア導体6が占める割合は相対的に低く抑えることができる。そのため、ビア導体6が形成されている部位においても、絶縁枠体2の機械的な強度の低下を抑えることができる。   Thus, since the wide portion 2b is provided and the via conductor 6 penetrating in the thickness direction is formed in the wide portion 2b, the ratio of the via conductor 6 in the width direction of the insulating frame 2 is kept relatively low. Can do. For this reason, it is possible to suppress a decrease in mechanical strength of the insulating frame 2 even in the portion where the via conductor 6 is formed.

その結果、絶縁枠体2にクラック等の機械的な破壊が生じることは効果的に防止され、気密封止の信頼性を確保しながら平面面積の小型化が可能な電子部品収納用パッケージ10を提供することができる。   As a result, it is possible to effectively prevent mechanical damage such as cracks from occurring in the insulating frame 2, and to provide an electronic component storage package 10 that can reduce the planar area while ensuring the reliability of hermetic sealing. Can be provided.

幅広部2bは、少なくとも一部にかかるように、絶縁枠体2の厚み方向の全長にわたるビア導体6が形成されるので、絶縁枠体2の厚み方向の全長にわたり形成される。   Since the via conductor 6 is formed over the entire length in the thickness direction of the insulating frame 2 so as to cover at least part of the wide portion 2b, the wide portion 2b is formed over the entire length in the thickness direction of the insulating frame 2.

このような幅広部2bは、例えば、絶縁枠体2となる枠状のセラミックグリーンシーを形成する際に、打ち抜きパターンを、開口部の内縁に、内側に向かう突出部(非打ち抜き部)が形成されるように打ち抜きの金型のパターンを調整することにより形成される。   Such a wide portion 2b is formed, for example, by forming a punching pattern at the inner edge of the opening and a protruding portion (non-punched portion) inward when forming a frame-shaped ceramic green sea to be the insulating frame 2. It is formed by adjusting the pattern of the punching die as described above.

上記、絶縁枠体のクラックの防止等の効果を得る上で、ビア導体6は、必ずしも、その全体が幅広部2bに入り込んでいる必要はなく、幅広部2bの搭載部1a側の先端部から絶縁枠体2の外辺までを直線で結んだ線のほぼ半分の位置にビア導体6の中心部が位置していればよい。このことにより、ビア導体6の内側と外側での残った幅広部2bと絶縁枠体2の厚みはほぼ同じとなり、機械的に弱い部分が偏ることはない。   The via conductor 6 does not necessarily have to enter the wide portion 2b in order to obtain the above-described effects such as prevention of cracks in the insulating frame, but from the front end portion of the wide portion 2b on the mounting portion 1a side. It is only necessary that the central portion of the via conductor 6 is located at a position substantially half of the line connecting the outer sides of the insulating frame 2 with straight lines. As a result, the remaining wide portion 2b on the inside and outside of the via conductor 6 and the thickness of the insulating frame 2 are substantially the same, and the mechanically weak portion is not biased.

なお、幅広部は、絶縁枠体2の内周辺の基準線(幅広部以外の部分の内周をつなぐ線)から搭載部側に30μm〜200μm程度、絶縁枠体2の幅に対して(10%〜70%)が好ましい。   Note that the wide portion is approximately 30 μm to 200 μm from the reference line (the line connecting the inner periphery of the portion other than the wide portion) to the mounting portion side with respect to the width of the insulating frame 2 (10 % To 70%) is preferred.

また、幅広部2bは、平面視で、円弧状、楕円弧状、四角形状等種々の形状で形成することができるが、ビア導体6が形成の容易な平面視で円形状または楕円形状の形状である場合、それに応じて、円弧状、楕円弧状が好ましい。   In addition, the wide portion 2b can be formed in various shapes such as an arc shape, an elliptical arc shape, and a quadrangular shape in plan view, but the via conductor 6 has a circular shape or an elliptical shape in plan view that is easy to form. In some cases, arc shapes and elliptic arc shapes are preferred accordingly.

また、幅広部2bは、電極パッド3の非形成部に位置することが好ましい。   In addition, the wide portion 2 b is preferably located in a non-formed portion of the electrode pad 3.

この場合、電極パッド3に対する電子部品の電極の、ボンディングワイヤ等の接続材を介した電気的な接続が妨げられることは防止される。そのため、気密封止の信頼性に優れるとともに小型で、かつ電子部品の搭載等の容易な電子部品収納用パッケージとすることができる。   In this case, the electrical connection of the electrode of the electronic component to the electrode pad 3 through the connecting material such as a bonding wire is prevented from being hindered. Therefore, it is possible to provide an electronic component storage package that is excellent in the reliability of hermetic sealing and is small in size and easy to mount electronic components.

なお、本発明は上述の実施の形態に限定されるものではなく、本発明の要旨を逸脱しな
い範囲内であれば種々の変更が可能である。
Note that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention.

例えば、電極パッド3は、搭載部1aの中央部分に、絶縁枠体2と接しないように形成されていてもよい。   For example, the electrode pad 3 may be formed in the central portion of the mounting portion 1a so as not to contact the insulating frame 2.

(a)は本発明の電子部品収納用パッケージの実施の形態の一例を示す断面図であり、(b)は(a)のX−X’線における断面図である。(A) is sectional drawing which shows an example of embodiment of the electronic component storage package of this invention, (b) is sectional drawing in the X-X 'line | wire of (a).

符号の説明Explanation of symbols

1・・・・絶縁基体
1a・・・・搭載部
1b・・・・幅広部
2・・・・絶縁枠体
3・・・・電極パッド
4・・・・蓋体
5・・・・電子部品
6・・・・ビア導体
10・・・電子部品収納用パッケージ
DESCRIPTION OF SYMBOLS 1 ... Insulating substrate 1a ... Mounting part 1b ... Wide part 2 ... Insulating frame 3 ... Electrode pad 4 ... Lid 5 ... Electronic component 6 ... Via conductor 10 ... Package for storing electronic components

Claims (2)

電子部品が搭載される搭載部を有した絶縁基板の上面に、
前記搭載部を囲撓する絶縁枠体を設けるとともに、
該絶縁枠体の内側面よりも内側に前記電子部品と電気的に接続される電極パッドを設け、
前記絶縁枠体に前記搭載部を覆うようにして蓋体が取着される電子部品収納用パッケージであって、
前記絶縁枠体は、
厚み方向の全長にわたり前記搭載部に向かって突出した幅広部を有し、
該幅広部に厚み方向に貫通するビア導体が形成されていることを特徴とする電子部品収納用パッケージ。
On the upper surface of the insulating substrate having a mounting portion on which electronic components are mounted,
While providing an insulating frame surrounding the mounting portion,
An electrode pad that is electrically connected to the electronic component is provided on the inner side of the inner surface of the insulating frame,
An electronic component storage package in which a lid is attached so as to cover the mounting portion on the insulating frame,
The insulating frame is
It has a wide part protruding toward the mounting part over the entire length in the thickness direction,
A package for storing an electronic component, wherein a via conductor penetrating in the thickness direction is formed in the wide portion.
前記幅広部は、前記電極パッドの非形成部に位置することを特徴とする請求項1記載の電子部品収納用パッケージ。 2. The electronic component storage package according to claim 1, wherein the wide portion is located in a non-formed portion of the electrode pad.
JP2005282626A 2005-09-28 2005-09-28 Package for housing electronic component Withdrawn JP2007095956A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005282626A JP2007095956A (en) 2005-09-28 2005-09-28 Package for housing electronic component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005282626A JP2007095956A (en) 2005-09-28 2005-09-28 Package for housing electronic component

Publications (1)

Publication Number Publication Date
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Country Link
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015159243A (en) * 2014-02-25 2015-09-03 京セラ株式会社 wiring board
JP2015164242A (en) * 2014-02-28 2015-09-10 Tdk株式会社 piezoelectric device
JP2016039189A (en) * 2014-08-05 2016-03-22 日本特殊陶業株式会社 Wiring board
JP2019129189A (en) * 2018-01-22 2019-08-01 京セラ株式会社 Wiring board, package, and electronic device
JP2019192825A (en) * 2018-04-26 2019-10-31 京セラ株式会社 Package for storing electronic component, electronic apparatus, and electronic module

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015159243A (en) * 2014-02-25 2015-09-03 京セラ株式会社 wiring board
JP2015164242A (en) * 2014-02-28 2015-09-10 Tdk株式会社 piezoelectric device
JP2016039189A (en) * 2014-08-05 2016-03-22 日本特殊陶業株式会社 Wiring board
JP2019129189A (en) * 2018-01-22 2019-08-01 京セラ株式会社 Wiring board, package, and electronic device
JP2019192825A (en) * 2018-04-26 2019-10-31 京セラ株式会社 Package for storing electronic component, electronic apparatus, and electronic module
JP7075810B2 (en) 2018-04-26 2022-05-26 京セラ株式会社 Electronic component storage packages, electronic devices, and electronic modules

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