JP2006239655A - In-line filter device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an in-line filter device having a filter means contrived so as not to return dust sucked once on either case upon vacuum sucking or upon vacuum breaking. <P>SOLUTION: The in-line filter device is provided with an in-line filter device main body in which two passages communicating an input port side and an output port side are disposed, a first check valve function part which is disposed on one side passage and permits only communication from the input port side, a second check valve function part which is disposed on the other side passage and permits only communication from the output port side and a filter element which is disposed between the second check valve function part and the output port side. The two passages are formed in parallel or concentrically in the in-line filter device main body. A means for visual observation of the filter element is disposed on the in-line filter device main body. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an in-line filter device used in a vacuum suction conveyance field such as a semiconductor manufacturing field.

  For example, in the case of vacuum transfer, the surface of the work is sucked and held by a suction part (chuck) attached to the tip of the vacuum suction passage, transported to a predetermined position, and breaking air is allowed to flow into the vacuum holding part. It is removed. In this case, the air around the work is sucked in at the time of suction, so the dust in the air around the work or the dust falling on the work surface or the surrounding is sucked in, and the dust adheres to the vacuum suction passage. When supplying vacuum breaking air to the suction unit again at the transport positioning location, dust adhering to the vacuum suction passage is sprayed from the suction unit together with the breaking air onto the workpiece to contaminate the workpiece and its surroundings. There is a high risk that

For this reason, it is conceivable to connect an air filter with a tube joint as disclosed in, for example, Patent Document 1 to the vacuum suction portion. In this case, the tube joint side and the tube connection port side are connected to the vacuum suction path, but either may be connected to the vacuum suction side or the air supply side (Patent Document 1 Specification, page 3, left column). 9th to 12th lines).
Japanese Utility Model Publication No. 5-34739 Japanese Utility Model Publication No. 61-87294 Japanese Utility Model Publication No. 63-30694

In the prior art described in Patent Document 1, when it is surely connected from one side, the filter element can prevent dust from entering beyond that position. However, the flow on the opposite side has a problem that dust captured by the filter element is discharged again, thereby causing new contamination.
In addition, although the same technique is described also in patent document 2 and patent document 3, there exists a fault similar to the technique described in patent document 1. FIG.

  Thus, if the conventional device is used as it is attached to the passage connected to the vacuum suction mechanism, for example, dust sucked from the suction cup device at the time of vacuum suction is captured by the filter element and does not flow further. On the other hand, when vacuum breaking air is supplied to the suction cup device to break the vacuum, dust previously captured by the air passing through the filter element again blows out from the suction cup device and may contaminate the surroundings.

Therefore, with the in-line filter system provided along the piping line as described above, the dust that has been sucked in once is used by attaching it to the vacuum suction mechanism as it is and during vacuum suction or vacuum break. It is necessary to devise so as not to return.
The present invention has been made paying attention to this point, and the purpose thereof is in-line having filter means devised so as not to return the dust once sucked in both cases of vacuum suction and vacuum break. It is to provide a filter device.

  The in-line filter device according to the present invention is provided in the in-line filter device main body having two passages for communicating the input port side and the output port side, and is provided in one of the passages, and allows only communication from the input port side. Between the first check valve function part, the second check valve function part provided in the other passage and enabling communication only from the output port side, and between the second check valve function part and the output port side And a filter element provided in the.

In the inline filter device according to the present invention, the two passages are formed in parallel in the inline filter device body.
In the inline filter device according to the present invention, the two passages are formed concentrically within the inline filter device body.
In the inline filter device according to the present invention, the filter element visual observation means is provided in the inline filter device body.

In the present invention, a suction passage that passes through the filter element during vacuum adsorption and a passage that supplies vacuum breaking air are separated, and a check valve function part is interposed in each passage in the opposite direction. This prevents the waste from being returned again by the breaking air and prevents conventional contamination.
Further, in the present invention, the in-line filter device for vacuum can be provided with a simple structure and at low cost by configuring the two passages in parallel or concentrically.

  Furthermore, in the present invention, the in-line filter device main body in which the filter element portion is located is provided with a visual means, so that the dirt state of the filter element can be seen at a glance, the replacement or cleaning time can be judged from the outside, etc. Maintenance becomes easy.

Hereinafter, the present invention will be described based on embodiments shown in the drawings.
(Principle of the present invention)
Before describing an embodiment of the present invention, the principle of the present invention will be described with reference to FIG.
FIG. 1 shows a basic circuit of an inline filter device 10 according to the present invention. The inline filter device 10 according to the present invention has two passages 11 and 12 that connect the input port P and the output port A. One passage 11 is connected to a check valve function unit 13 that allows only communication from the input port P side, and the other passage 12 is connected to a check valve function unit 14 that allows only communication from the output port A side. And the check valve function unit 14 and the output port A communicate with each other via the filter element 15.

For example, when connecting the in-line filter device 10 according to the present invention thus configured in the middle of a pipe connecting a vacuum suction pad and a solenoid valve, the output port A is connected to the vacuum suction pad side, and the input port P is connected to the vacuum suction pad side. Connect to the solenoid valve side.
By connecting in this way, at the time of vacuum suction, air flowing into the output port A from the vacuum suction pad side passes through the filter element 15 and is exhausted from the check valve function unit 14 through the input port P to the solenoid valve side. . On the other hand, the vacuum breaking air from the solenoid valve side is supplied from the input port P through the check valve function unit 13 to the vacuum suction pad side from the output port A, and the vacuum is broken.

In this way, the dust mixed in the air exhausted by the vacuum suction passes through the filter element 15, so that the dust is removed, and when the breaking air is supplied, it passes through another passage 12 and is sucked in. The dust is not blown out again from the vacuum suction pad side, and contamination can be avoided.
(First embodiment)
2 to 4 show an inline filter device 20 according to the first embodiment of the present invention.

In the inline filter device 20 according to the present embodiment, a substantially rectangular parallelepiped inline filter device main body 21 in which the two passages 11 and 12 in FIG. 1 are formed in a parallel state, and a schematic attached to the side surface of the inline filter device main body 21. A rectangular parallelepiped adapter 45 is provided.
The inline filter device main body 21 has an input port 22 that opens to the anti-adapter 45. The input port 22 is divided into a passage 23 and a passage 30 from the middle.

  One passage 23 communicates with the first check valve 25 through the communication port 24, communicates with the passage 47 of the adapter 45 through the check cover 28 disposed in the first check valve 25, and outputs. Connected to port 46. Here, the first check valve 25 includes a check valve body 26 located on the input port 22 side, a spring 27 as an elastic body, a check cover 28, a check cover, in the insertion hole 21a of the inline filter device body 21. It has a seal ring 29 attached to the end of the cover 28, and allows only inflow from the input port 22 to the output port 46 side.

  The other passage 30 communicates with the second check valve 31, further communicates with the filter element 38 through the passage 37, passes through the filter cover 40 from the insertion chamber of the filter element 38, and passes through the passage of the adapter 45. 48 and is connected to the output port 46. Here, the second check valve 31 is disposed opposite to the first check valve 25. The second check valve 31 includes a check valve body 32 positioned on the output port 46 side, a spring 33 as an elastic body, a check cover 34, and a check cover 34 in the insertion hole 21 b of the inline filter device body 21. A seal ring 35 attached to the end portion and a plug member 36 for fixing the second check valve 31 to the inline filter device main body 21 are provided from the output port 46 side to the input port 22 side through the filter element 38 only. Allow inflow. The filter element 38 is made of a porous material having a substantially U-shaped cross section, and is pressed to the bottom side by the filter cover 40 inside the transparent sleeve 39 in the insertion hole 21c of the inline filter device main body 21. It is so fitted. Seal rings 41 and 42 are attached to both ends of the transparent sleeve 39.

Further, in the inline filter device main body 21, a window 44 is opened on the window 43 or other surface at an outer position corresponding to the built-in filter element 38, and the state of the filter element 38 is changed through a transparent sleeve 39. It is configured to be visible.
Further, the adapter 45 communicates the two passages 47 and 48 opened on the inline filter device main body 21 side with the output port 46 opened on the anti-inline filter device main body 21 side.

In the present embodiment, the input port 22 and the output port 46 are equipped with one-touch type joints 49 and 50 called instant joints, but even with normal screw holes or other joints. I do not care.
Next, the operation of the inline filter device 20 according to this embodiment configured as described above will be described.

  In the inline filter device 20 according to the present embodiment, the input port 22 has two passages 23 and 30 that are arranged in parallel from the middle. One passage 23 is a passage through the first check valve 25 having a check valve function that allows only communication from the input port 22, and the other passage 30 is from the output port 46 through the filter element 38 to the output port 46. This is a passage through the second check valve 31 having a check valve function that allows only communication to the side.

  Accordingly, as in the principle configuration described above, dust that has entered due to vacuum suction is removed by the filter element 38, and only air flows out to the input port 22 side through the second check valve 31 and passes through the input port 22. The air is blocked from flowing into the passage 30 on the filter element 38 side by the second check valve 31 and is supplied from one passage 23 to the vacuum suction portion side as vacuum breaking air.

Furthermore, according to this embodiment, since the state of the filter element 38 can be visually observed through the windows 43 and 44 provided in the outer position corresponding to the built-in filter element 38, maintenance can be facilitated. It has become possible.
(Second embodiment)
FIG. 5 shows an inline filter device 60 according to the second embodiment of the present invention.

The inline filter device 60 according to the present embodiment is different from the inline filter device 20 according to the first embodiment in that the two passages 60A and 60B are formed concentrically.
The in-line filter device 60 according to the present embodiment includes a sleeve (outer cylinder) 61 having a substantially cylindrical shape as a whole, and covers 62 and 65 screwed into both ends thereof. An input port 63 is formed through the center, and an output port 66 is similarly formed through the other cover 65.

  Further, in the internal space formed by these three elements, a check body 70 in which a through hole 71 communicating with the input port 63 is formed at the center and an annular groove 72 is formed on the outer periphery, and the check body 70 A cylindrical filter element 74 sandwiched between the end 73 and the inner end surface 64 of the cover 62 and the inner diameter side are held in the annular groove 72 of the check body 70, and the outer peripheral side is in sliding contact with the inner surface of the sleeve 61. The second check valve 75 which is a positive pressure check valve exhibiting a state check function and the inner diameter portion 68 of the cylindrical portion 67 formed on the front end side of the cover 65 are arranged, and the opening portion of the through hole 71 of the check body 70 is provided. A first check valve 76 that is a vacuum check valve including a check valve main body 77 and a spring 78 positioned so as to be closed is disposed. Further, a plurality of through holes 69 are formed in the radial direction around the cylindrical portion 67 where the inner diameter portion 68 of the cover 65 is formed. Note that the outer diameters of the check body 70, the filter element 74, and the cylindrical portion 67 have a predetermined gap with respect to the inner diameter of the sleeve 61. Here, the passage from the input port 63 to the through hole 71 and the passage from the first check valve 76 to the output port 66 are one passage 60A, and the gap between the filter element 74 and the sleeve 61 and the through hole 69 are formed. The passage that reaches the inner diameter portion 68 that is connected to the other passage is the other passage 60B. A second check valve 75 is disposed in the other passage 60B.

Next, the operation of the inline filter device 60 according to this embodiment configured as described above will be described.
In the inline filter device 60 according to the present embodiment, the input port side (cover 62 side) is connected to the electromagnetic valve, and the output port side (cover 65 side) is connected to the vacuum suction portion.
At the time of adsorption, as shown in FIG. 6, when air from the pad side flows in from the output port 66 side, the first check valve 76 closes the through hole 71 of the check body 70 (closes the passage 60A) and outputs. The port 66 passes through the through hole 69, the lip portion of the second check valve 75 is deformed to open the passage 60 </ b> B, flows into the filter element 74, passes through the filter element 74, and is exhausted to the input port 63. . At this time, when dust is sucked in from the suction side, it is captured by the filter element 74, and a large thing, for example, solder dust or the like, enters the space 79 in front of the second check valve 75 as shown in FIG. Can be stored.

  Next, at the time of vacuum break, as shown in FIG. 7, when air from the solenoid valve side is caused to flow in from the input port 63, the first check valve 76 is separated from the through hole 71 of the check body 70, and the center The check valve 76 is opened from the through port 71 and flows out from the output port 66. At this time, air passes through the filter element 74, but the lip portion of the second check valve 75 closes the passage 60B. Therefore, the dust trapped by the filter element 71 during suction is not ejected to the pad side.

  As described above, in the present embodiment, it is possible to obtain the same operational effects as the operational effects according to the principle shown in FIG. 1 by forming the two passages 60A and 60B concentrically.

It is a basic circuit diagram explaining the principle of the in-line filter apparatus which concerns on this invention. It is front sectional drawing of the in-line filter apparatus which concerns on 1st embodiment. It is a front view which shows the external appearance of the in-line filter apparatus of FIG. It is A arrow line view of the in-line filter apparatus of FIG. It is front sectional drawing of the in-line filter apparatus which concerns on 2nd embodiment. It is explanatory drawing which shows the operation | movement at the time of adsorption | suction of the in-line filter apparatus of FIG. It is explanatory drawing which shows the operation | movement at the time of the vacuum break of the in-line filter apparatus of FIG. It is explanatory drawing which shows the state which caught the big refuse of the in-line filter apparatus of FIG. 5 in the space part before a check valve.

Explanation of symbols

10, 20, 60 Inline filter device A, 46, 63 Output port P, 22, 66 Input port 11, 12, 23, 30, 60A, 60B Passage 13, 14 Check valve function unit 15 Filter element 21 Inline filter device body 25 76 First check valve 26, 32, 77 Check valve body 27, 33, 78 Spring 28, 34 Check cover 31, 75 Second check valve 38, 74 Filter element 39 Sleeve 40 Filter cover 43, 44 Window 45 Adapter 61 Sleeve (outer cylinder)
62, 65 Cover 70 Check body 71 Through hole 72 Annular groove

Claims (4)

An in-line filter device main body provided with two passages communicating the input port side and the output port side;
A first check valve function part that is provided in the one passage and allows only communication from the input port side;
A second check valve function unit that is provided in the other passage and allows only communication from the output port side;
An in-line filter device comprising: a filter element provided between the second check valve function unit and the output port side. The in-line filter device according to claim 1,
The two passages are formed in a parallel state in the main body of the inline filter device. The in-line filter device according to claim 1,
The two passages are formed concentrically within the main body of the inline filter device. The inline filter device according to any one of claims 1 to 3,
The inline filter device is characterized in that a means for visually checking the filter element is provided in the main body of the inline filter device.

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