JP2002118436A - Surface mount piezoelectric device - Google Patents
Surface mount piezoelectric deviceInfo
- Publication number
- JP2002118436A JP2002118436A JP2000305432A JP2000305432A JP2002118436A JP 2002118436 A JP2002118436 A JP 2002118436A JP 2000305432 A JP2000305432 A JP 2000305432A JP 2000305432 A JP2000305432 A JP 2000305432A JP 2002118436 A JP2002118436 A JP 2002118436A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- conductive adhesive
- piezoelectric
- pad
- package
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、振動子やフィルタ
等として使用される表面実装型圧電デバイスに関し、特
に圧電振動素子をパッケージ内に接続する手段として導
電性接着剤を用いた場合に発生する種々の不具合を解決
した表面実装型圧電デバイスに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface mount type piezoelectric device used as a vibrator, a filter, and the like, and more particularly to a case where a conductive adhesive is used as a means for connecting a piezoelectric vibrating element in a package. The present invention relates to a surface mount type piezoelectric device that has solved various problems.
【0002】[0002]
【従来の技術】近年、携帯電話機等の移動体通信機器
は、小型化、軽量化が進む一方で、高機能化についても
強く求められており、高機能化に伴う部品点数の増加と
小型化という相反する2つの要求を同時に満たす為に、
電装部を構成するプリント基板の小面積化と、搭載部品
等の高密度化による基板面積の有効利用が重要視される
ようになっている。移動体通信機器や伝送通信機器にお
いて周波数制御デバイスとして用いられる水晶共振子
(振動子、フィルタ)についても小型化等が強く求めら
れており、高密度実装化に対応するためにデバイスのパ
ッケージ構造としては表面実装型が主流となっており、
併せて高周波化の要求が強くなっている。2. Description of the Related Art In recent years, as mobile communication devices such as mobile phones have become smaller and lighter, there has been a strong demand for higher functionality. In order to satisfy the two conflicting requirements at the same time,
It is becoming increasingly important to reduce the area of the printed circuit board that constitutes the electrical component and to effectively use the board area by increasing the density of mounted components and the like. Crystal resonators (vibrators and filters) used as frequency control devices in mobile communication equipment and transmission communication equipment are also strongly required to be miniaturized, and as a package structure of the device to support high-density mounting. Are mainly surface-mount type,
At the same time, demands for higher frequencies are increasing.
【0003】図3(a)及び(b)は従来の表面実装型圧電デ
バイスの一例としての水晶振動子の平面図、及びA−A
縦断面図である。この水晶振動子1は、水晶振動素子2
を、表面実装用パッケージ3内に収容した構成を有す
る。水晶振動素子1は、圧電基板5と、該圧電基板5の
上下両主面に夫々形成された励振電極6、7と、各励振
電極6、7から圧電基板の一端縁に向けて夫々引き出さ
れたリード電極6a、7aと、両リード電極6a、7a
に夫々接続されて圧電基板5の一端縁に沿って配置され
た2つのパッド電極6b、7bと、を備える。上下の励
振電極6、7から夫々引き出された各パッド電極6b、
7bは、図示のように夫々基板上面と下面に配置される
場合と、上側のリード電極6aを基板側面を経て基板下
面に延長することにより基板下面にパッド電極6bを配
置する場合がある。パッケージ3は、例えばセラミック
から構成されたパッケージ本体10と、パッケージ本体
10の上部開口を閉止する金属蓋11と、を有し、パッ
ケージ本体10の内底面には各パッド電極6b、7bと
一対一で対応する導通パッド12、13を有する。各導
通パッド12、13は、パッケージ本体10の外底面に
設けた外部電極14と導通接続されている。水晶振動素
子1をパッケージ本体10の内底面に片持ち状態にて支
持する場合には、各パッド電極6b、7bが導通パッド
12、13と一対一で対応するように水晶振動素子1を
位置決めした状態で導電性接着剤15により電気的機械
的に固定する。なお、金属蓋11は、パッケージ本体の
外枠上面に固定した金属製のシームリングに対して溶接
等により固定される。以上の構成を備えた表面実装型の
水晶振動子においては、小型化の要請に応じて圧電基板
5の寸法が小型化しているため、相対的に励振電極6、
7の面積が大きくなる。その結果、励振電極が全面電極
に近い程度の広い範囲に亙って圧電基板の主面を占有し
ている。このように励振電極の面積が広大化した場合に
は、パッド電極6b、7bと励振電極6、7とが近接す
る為、パッド電極6b、7bに塗布される導電性接着剤
15が励振電極6、7に近接して悪影響を及ぼす。特
に、水晶振動素子をマウントする際に、基板下面と導通
パッド12、13との間で導電性接着剤15は加圧され
るため、加圧された導電性接着剤の一部が下側の励振電
極6bに向けて流出して突出し易い。周知のように水晶
振動素子の振動エネルギーは、圧電基板上の質量の大き
い部分に集中する為、振動エネルギーを励振電極6、7
に集中させる為の配慮がなされているが、導電性接着剤
15が図示のように励振電極6に接近すると、エネルギ
ーを励振電極の範囲内に閉じ込めることが困難となり、
水晶振動素子の特性を悪化させる原因となる。FIGS. 3A and 3B are a plan view of a crystal unit as an example of a conventional surface mount type piezoelectric device, and FIG.
It is a longitudinal cross-sectional view. This crystal resonator 1 includes a crystal resonator element 2
In the package 3 for surface mounting. The crystal vibrating element 1 is pulled out from the piezoelectric substrate 5, excitation electrodes 6 and 7 respectively formed on both upper and lower main surfaces of the piezoelectric substrate 5, and one end edge of the piezoelectric substrate from each of the excitation electrodes 6 and 7. Lead electrodes 6a, 7a and both lead electrodes 6a, 7a
And two pad electrodes 6b and 7b connected along one edge of the piezoelectric substrate 5 respectively. Pad electrodes 6b drawn from the upper and lower excitation electrodes 6 and 7, respectively.
7b may be arranged on the upper surface and the lower surface of the substrate as shown, respectively, or may be arranged on the lower surface of the substrate by extending the upper lead electrode 6a to the lower surface of the substrate via the side surface of the substrate. The package 3 has a package main body 10 made of, for example, ceramic, and a metal lid 11 for closing an upper opening of the package main body 10. The inner bottom surface of the package main body 10 has one-to-one correspondence with the pad electrodes 6b and 7b. And the corresponding conductive pads 12, 13. Each of the conductive pads 12 and 13 is conductively connected to an external electrode 14 provided on the outer bottom surface of the package body 10. When the quartz-crystal vibrating element 1 is supported on the inner bottom surface of the package body 10 in a cantilever state, the quartz-crystal vibrating element 1 is positioned such that the pad electrodes 6b and 7b correspond one-to-one with the conductive pads 12 and 13. In this state, it is fixed electrically and mechanically by the conductive adhesive 15. The metal lid 11 is fixed by welding or the like to a metal seam ring fixed to the upper surface of the outer frame of the package body. In the surface-mount type crystal resonator having the above-described configuration, the size of the piezoelectric substrate 5 is reduced in response to a demand for miniaturization, so that the excitation electrode 6 is relatively small.
7 becomes large. As a result, the excitation electrode occupies the main surface of the piezoelectric substrate over a wide range close to the entire surface electrode. When the area of the excitation electrode is enlarged as described above, since the pad electrodes 6b and 7b and the excitation electrodes 6 and 7 are close to each other, the conductive adhesive 15 applied to the pad electrodes 6b and 7b is applied to the excitation electrode 6b. , 7 in the vicinity. In particular, when the crystal resonator element is mounted, the conductive adhesive 15 is pressed between the lower surface of the substrate and the conductive pads 12 and 13, so that a part of the pressed conductive adhesive is formed on the lower side. It easily flows out and protrudes toward the excitation electrode 6b. As is well known, the vibration energy of the quartz vibrating element is concentrated on a large portion of the piezoelectric substrate, so that the vibration energy is applied to the excitation electrodes 6 and 7.
However, when the conductive adhesive 15 approaches the excitation electrode 6 as shown in the figure, it becomes difficult to confine the energy within the range of the excitation electrode.
This causes deterioration of the characteristics of the crystal resonator element.
【0004】[0004]
【発明が解決しようとする課題】本発明が解消しようと
する課題は、圧電振動素子上の励振電極と、導電性接着
剤を塗布するパッド電極との間が接近している場合であ
っても、導電性接着剤を用いて圧電振動素子をパッケー
ジ内にマウントする際に加圧された導電性接着剤が励振
電極側に流出して励振電極に悪影響を及ぼすことを有効
に防止することができる表面実装型圧電デバイスを提供
することにある。The problem to be solved by the present invention is to solve the problem even when the excitation electrode on the piezoelectric vibrating element is close to the pad electrode to which the conductive adhesive is applied. In addition, when the piezoelectric vibration element is mounted in the package using the conductive adhesive, the conductive adhesive pressed can be effectively prevented from flowing out to the excitation electrode side and adversely affecting the excitation electrode. An object of the present invention is to provide a surface mount type piezoelectric device.
【0005】[0005]
【課題を解決するための手段】前記課題を解決するた
め、請求項1の発明は、圧電基板と、該圧電基板の上下
両主面に夫々形成された励振電極、各励振電極から引き
出されたリード電極、及び両リード電極に夫々接続され
て圧電基板の一端縁に沿って配置された2つのパッド電
極と、を備えた圧電振動素子と、前記圧電振動素子を内
底面に設けた導通パッド上に片持ち状態にて電気的機械
的に接続保持する表面実装型パッケージと、から成る圧
電デバイスであって、前記圧電振動素子上の2つパッド
電極と前記表面実装型パッケージ内底面上の2つの導通
パッドとの一対一の接続を、夫々導電性接着剤を用いて
行ったものにおいて、前記圧電基板の下側主面の前記一
端縁に沿って凹部を形成し、該凹部内に少なくとも下側
主面上に形成した前記リード端子と接続した前記パッド
電極を配置することにより、前記導電性接着剤の付着範
囲を前記凹部内に極限したことを特徴とする。In order to solve the above-mentioned problems, the invention according to claim 1 is directed to a piezoelectric substrate, excitation electrodes formed on both upper and lower main surfaces of the piezoelectric substrate, and the excitation electrodes drawn from the respective excitation electrodes. A piezoelectric vibrating element comprising: a lead electrode; and two pad electrodes respectively connected to the two lead electrodes and arranged along one edge of the piezoelectric substrate; and a conductive pad provided with the piezoelectric vibrating element on an inner bottom surface. A surface mounted package that electrically and mechanically connects and retains the piezoelectric device in a cantilevered state, wherein two pad electrodes on the piezoelectric vibrating element and two pad electrodes on the inner bottom surface of the surface mounted package are provided. In the one-to-one connection with the conductive pad, each using a conductive adhesive, a recess is formed along the one end edge of the lower main surface of the piezoelectric substrate, and at least the lower side is formed in the recess. Before forming on the main surface By disposing the pad electrode connected to the lead terminals, characterized in that the adhesion area of the conductive adhesive was extreme in the recess.
【0006】[0006]
【発明の実施の形態】以下、本発明を図面に示した実施
の形態に基づいて詳細に説明する。図1(a)(b)及び(c)
は本発明の一実施形態に係る表面実装型圧電デバイスの
一例としての水晶振動子の平面図、そのB−B断面図、
及びC−C断面図、図2は水晶振動素子の一例の斜視図
である。この水晶振動子1は、水晶振動素子2を、表面
実装用パッケージ3内に収容した構成を有する。水晶振
動素子2は、圧電基板5と、該圧電基板5の上下両主面
に夫々形成された励振電極6、7と、各励振電極6、7
から圧電基板の一端縁に向けて夫々引き出されたリード
電極6a、7aと、両リード電極6a、7aに夫々接続
されて圧電基板5の一端縁に沿って配置された2つのパ
ッド電極6b、7bと、を備える。上下の励振電極6、
7から圧電基板端縁に夫々引き出された各パッド電極
は、夫々基板上面と下面に配置される場合と、上側のリ
ード電極を基板側面を経て基板下面に延長することによ
り基板下面にパッド電極を配置する場合がある。この実
施形態では、後者、即ち、上側のリード電極6aを基板
側面を経て基板下面に延長することにより基板下面にパ
ッド電極6bを配置した場合を例示する。圧電基板5
は、パッド電極6b、7bを形成した側の一端縁に沿っ
てハーフエッチングにより一定幅及び一定深さの凹部2
0を形成することによって薄肉部21を形成した構成を
備えている。従って、圧電基板下面に位置するパッド電
極6b、7bは凹部20内壁に形成され、各パッド電極
6b、7bと各励振電極6、7を接続する各リード電極
6a、7aも凹部20の内壁に沿って配線される。パッ
ケージ3は、例えばセラミックから構成されたパッケー
ジ本体10と、パッケージ本体10の上部開口を閉止す
る金属蓋11と、を有し、パッケージ本体10の内底面
には各パッド電極6b、7bと一対一で対応する導通パ
ッド12、13を有する。各導通パッド12、13は、
パッケージ本体10の外底面に設けた外部電極14と導
通接続されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail based on an embodiment shown in the drawings. Fig. 1 (a) (b) and (c)
Is a plan view of a crystal resonator as an example of a surface-mount type piezoelectric device according to an embodiment of the present invention, its BB cross-sectional view,
FIG. 2 is a perspective view of an example of the crystal resonator element. This crystal resonator 1 has a configuration in which a crystal resonator element 2 is housed in a surface mounting package 3. The crystal vibrating element 2 includes a piezoelectric substrate 5, excitation electrodes 6 and 7 respectively formed on upper and lower main surfaces of the piezoelectric substrate 5, and excitation electrodes 6 and 7.
Lead electrodes 6a, 7a respectively drawn out toward the one edge of the piezoelectric substrate, and two pad electrodes 6b, 7b connected to the two lead electrodes 6a, 7a and arranged along one edge of the piezoelectric substrate 5, respectively. And. Upper and lower excitation electrodes 6,
The pad electrodes respectively drawn from the edge of the piezoelectric substrate to the edge of the piezoelectric substrate are arranged on the upper surface and the lower surface of the substrate, respectively. May be placed. This embodiment exemplifies the latter case, that is, a case where the pad electrode 6b is arranged on the lower surface of the substrate by extending the upper lead electrode 6a to the lower surface of the substrate via the side surface of the substrate. Piezoelectric substrate 5
Is a recess 2 having a constant width and a constant depth formed by half-etching along one edge on the side where the pad electrodes 6b and 7b are formed.
0 is formed to form the thin portion 21. Accordingly, the pad electrodes 6b, 7b located on the lower surface of the piezoelectric substrate are formed on the inner wall of the recess 20, and the lead electrodes 6a, 7a connecting the respective pad electrodes 6b, 7b and the excitation electrodes 6, 7 also extend along the inner wall of the recess 20. Wired. The package 3 has a package main body 10 made of, for example, ceramic, and a metal lid 11 for closing an upper opening of the package main body 10. The inner bottom surface of the package main body 10 has one-to-one correspondence with the pad electrodes 6b and 7b. And the corresponding conductive pads 12, 13. Each conductive pad 12, 13
It is electrically connected to an external electrode 14 provided on the outer bottom surface of the package body 10.
【0007】水晶振動素子1をパッケージ本体10の内
底面に片持ち状態にて支持する場合には、各パッド電極
6b、7bが導通パッド12、13と一対一で対応する
ように水晶振動素子1を位置決めした状態で導電性接着
剤15により電気的機械的に固定する。各パッド電極6
b、7bは、基板下面一端縁に沿って形成した凹部20
の内壁に沿って形成されている為、導通パッド12、1
3との間を接続する導電性接着剤15は図1(b)(c)に示
した如く凹部20の内側壁20aを越えて励振電極7側
へ流動することができない。仮に、水晶振動素子を加圧
しながら導電性接着剤を導通パッド上に接続したとして
も、凹部20の内側壁20aを越えて流出することが防
止されるため、導電性接着剤の展開する範囲は、励振電
極7に悪影響を及ぼすことのない範囲に極限される。な
お、金属蓋11は、パッケージ本体の外枠上面に固定し
た金属製のシームリングに対して溶接等により固定され
る。以上の構成を備えた表面実装型の水晶振動子におい
ては、小型化の要請に応じて圧電基板5の寸法が小型化
しているため、相対的に励振電極6、7の面積が大きく
なり、励振電極が全面電極に近い程度の広い範囲に亙っ
て圧電基板の主面を占有している。このように励振電極
の占有面積が広大化した場合には、パッド電極6b、7
bと励振電極6、7とが近接する為、パッド電極6b、
7bに塗布される導電性接着剤15が励振電極6、7に
近接して悪影響を及ぼす虞れもある。特に、水晶振動素
子をマウントする際に、基板下面と導通パッド12、1
3との間で導電性接着剤15は加圧されるため、加圧さ
れた導電性接着剤の一部が下側の励振電極6bに向けて
流出して突出し易い。When the crystal vibrating element 1 is supported on the inner bottom surface of the package body 10 in a cantilever state, the crystal vibrating element 1 is arranged such that the pad electrodes 6b, 7b correspond to the conductive pads 12, 13 one-to-one. Is electrically and mechanically fixed by the conductive adhesive 15 in a state where is positioned. Each pad electrode 6
b and 7b are concave portions 20 formed along one edge of the lower surface of the substrate.
Are formed along the inner wall of the conductive pad 12, 1
As shown in FIGS. 1 (b) and 1 (c), the conductive adhesive 15 connecting between the first electrode 3 and the third electrode 3 cannot flow toward the excitation electrode 7 beyond the inner wall 20a of the concave portion 20. Even if the conductive adhesive is connected to the conductive pad while pressing the quartz-crystal vibrating element, the conductive adhesive is prevented from flowing out beyond the inner side wall 20a of the concave portion 20. , In a range that does not adversely affect the excitation electrode 7. The metal lid 11 is fixed by welding or the like to a metal seam ring fixed to the upper surface of the outer frame of the package body. In the surface mount type crystal resonator having the above-described configuration, the dimensions of the piezoelectric substrate 5 are reduced in response to a demand for miniaturization. The electrode occupies the main surface of the piezoelectric substrate over a wide range close to the entire surface electrode. When the area occupied by the excitation electrodes is increased, the pad electrodes 6b, 7
b and the excitation electrodes 6, 7 are close to each other, so that the pad electrodes 6b,
There is a possibility that the conductive adhesive 15 applied to 7b may have an adverse effect in the vicinity of the excitation electrodes 6 and 7. In particular, when mounting the crystal resonator element, the lower surface of the substrate and the conductive pads 12, 1
3, the conductive adhesive 15 is pressurized, so that a part of the pressurized conductive adhesive easily flows out and protrudes toward the lower excitation electrode 6b.
【0008】しかし、本発明では、基板下面に位置する
パッド電極6b、7bを励振電極7と同一面である平坦
面上に配置するのではなく、基板下面端縁にハーフエッ
チングによって形成した凹部20内に配置したので、こ
の段差の存在により、導電性接着剤15が凹部20内に
納まり、励振電極7を形成した基板下面に流出すること
が阻止される。凹部20の内側壁20aの位置は、この
内側壁にて導電性接着剤がせき止められた時に、励振電
極7に対して悪影響を及ぼすことがない位置とする。こ
の結果、水晶振動素子と導通パッドとの間で導電性接着
剤を加圧しつつ接着を行ったとしても、導電性接着剤1
5が励振電極7に接近、干渉を起こして、振動エネルギ
ーが励振電極6、7に集中することを妨げる不具合がな
くなる。なお、上側の励振電極6と接続されたパッド電
極6bを圧電基板5の上面に配置した場合には、導電性
接着剤15は図1(c)中に鎖線で示すように凹部20内
は勿論基板上面にまで塗布されるが、この場合にも凹部
20の内側壁20aは導電性接着剤の展開する範囲を極
限するので、導電性接着剤15が励振電極7に接近、干
渉することが防止される。なお、上記実施形態では、水
晶振動子を例として説明したが、本発明は水晶以外の圧
電材料を使用した圧電振動子、圧電デバイス一般に適用
することができる。また、上記実施形態では、圧電振動
素子をパッケージ内に片持ち支持する場合を説明した
が、本発明は圧電振動素子の対向する両端縁に夫々設け
たパッド電極をパッケージ内の導通パッドと接着する場
合にも適用することが可能である。この場合には、圧電
振動基板の対向する両端縁の下面に夫々凹部を形成し、
凹部内にパッド電極を形成することとなる。However, according to the present invention, the pad electrodes 6b and 7b located on the lower surface of the substrate are not arranged on a flat surface which is the same surface as the excitation electrode 7, but the concave portions 20 formed by half etching on the edge of the lower surface of the substrate. Because of this step, the conductive adhesive 15 is accommodated in the recess 20 and is prevented from flowing out to the lower surface of the substrate on which the excitation electrodes 7 are formed. The position of the inner side wall 20a of the concave portion 20 is set to a position where the conductive adhesive is not blocked on the inner side wall so as not to adversely affect the excitation electrode 7. As a result, even if the bonding is performed while pressing the conductive adhesive between the quartz vibrating element and the conductive pad, the conductive adhesive 1
5 does not approach the excitation electrode 7 and causes interference, thereby preventing the vibration energy from being concentrated on the excitation electrodes 6 and 7. When the pad electrode 6b connected to the upper excitation electrode 6 is arranged on the upper surface of the piezoelectric substrate 5, the conductive adhesive 15 is of course placed in the recess 20 as shown by a dashed line in FIG. The coating is applied to the upper surface of the substrate, but also in this case, the inner wall 20a of the concave portion 20 limits the range in which the conductive adhesive spreads, so that the conductive adhesive 15 is prevented from approaching and interfering with the excitation electrode 7. Is done. In the above embodiment, the crystal resonator is described as an example. However, the present invention can be applied to a piezoelectric resonator and a piezoelectric device using a piezoelectric material other than crystal. In the above embodiment, the case where the piezoelectric vibrating element is supported in a cantilever manner in the package has been described. However, in the present invention, the pad electrodes provided on the opposite end edges of the piezoelectric vibrating element are respectively bonded to the conductive pads in the package. It is also possible to apply to cases. In this case, a recess is formed on the lower surface of each of the opposing edges of the piezoelectric vibration substrate,
A pad electrode will be formed in the recess.
【0009】[0009]
【発明の効果】以上のように本発明によれば、圧電振動
素子をパッケージ内に導電性接着剤により支持する際
に、圧電振動子側に形成するパッド電極を基板端縁下面
に設けた凹部内に配置したので、導電性接着剤が励振電
極に対して必要以上接近することがなくなる。この為、
圧電振動素子上の励振電極と、導電性接着剤を塗布する
パッド電極との間が接近している場合であっても、導電
性接着剤を用いて圧電振動素子をパッケージ内にマウン
トする際に加圧された導電性接着剤が励振電極側に流出
して励振電極に接近し過ぎて悪影響を及ぼすことを有効
に防止することができる。As described above, according to the present invention, when the piezoelectric vibrating element is supported in the package by the conductive adhesive, the pad electrode formed on the piezoelectric vibrator side is provided on the lower surface of the edge of the substrate. The conductive adhesive does not approach the excitation electrode more than necessary. Because of this,
Even when the excitation electrode on the piezoelectric vibration element is close to the pad electrode to which the conductive adhesive is applied, when the piezoelectric vibration element is mounted in the package using the conductive adhesive, It is possible to effectively prevent the pressurized conductive adhesive from flowing out to the excitation electrode side and being too close to the excitation electrode to have an adverse effect.
【図1】(a)(b)及び(c)は本発明の一実施形態に係る圧
電デバイスの一例としての水晶振動子の平面図、B−B
断面図、及びC−C断面図。FIGS. 1A, 1B and 1C are plan views of a quartz oscillator as an example of a piezoelectric device according to an embodiment of the present invention, and FIGS.
Sectional drawing and CC sectional drawing.
【図2】本発明の一例に係る水晶振動素子の斜視図。FIG. 2 is a perspective view of a crystal resonator element according to an example of the present invention.
【図3】(a)及び(b)は従来例に係る圧電デバイスの平面
図、及びA−A断面図。FIGS. 3A and 3B are a plan view and a cross-sectional view taken along line AA of a piezoelectric device according to a conventional example.
1 水晶振動子、2 水晶振動素子、3 表面実装用パ
ッケージ、5 圧電基板、6、7 励振電極、6a、7
a リード電極、6b、7b パッド電極、20 凹
部、21 薄肉部。REFERENCE SIGNS LIST 1 crystal resonator, 2 crystal resonator, 3 surface mounting package, 5 piezoelectric substrate, 6, 7 excitation electrode, 6 a, 7
a Lead electrode, 6b, 7b Pad electrode, 20 recess, 21 thin part.
Claims (1)
夫々形成された励振電極、各励振電極から引き出された
リード電極、及び両リード電極に夫々接続されて圧電基
板の一端縁に沿って配置された2つのパッド電極と、を
備えた圧電振動素子と、 前記圧電振動素子を内底面に設けた導通パッド上に片持
ち状態にて電気的機械的に接続保持する表面実装型パッ
ケージと、 から成る圧電デバイスであって、 前記圧電振動素子上の2つパッド電極と前記表面実装型
パッケージ内底面上の2つの導通パッドとの一対一の接
続を、夫々導電性接着剤を用いて行ったものにおいて、 前記圧電基板の下側主面の前記一端縁に沿って凹部を形
成し、該凹部内に少なくとも下側主面上に形成した前記
リード端子と接続した前記パッド電極を配置することに
より、前記導電性接着剤の付着範囲を前記凹部内に極限
したことを特徴とする表面実装型圧電デバイス。1. A piezoelectric substrate, excitation electrodes formed on both upper and lower main surfaces of the piezoelectric substrate, lead electrodes drawn from the respective excitation electrodes, and one end of the piezoelectric substrate connected to both the lead electrodes. A piezoelectric vibrating element comprising: two pad electrodes disposed along the surface; and a surface-mount package for electrically and mechanically connecting and holding the piezoelectric vibrating element in a cantilever state on a conductive pad provided on an inner bottom surface. And a one-to-one connection between two pad electrodes on the piezoelectric vibrating element and two conductive pads on the inner bottom surface of the surface mount type package using a conductive adhesive. In the performed, a concave portion is formed along the one end edge of the lower main surface of the piezoelectric substrate, and the pad electrode connected to the lead terminal formed on at least the lower main surface is arranged in the concave portion. By The surface mount type piezoelectric device which is characterized in that the adhesion area of the conductive adhesive was extreme in the recess.
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Cited By (8)
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JP2006262443A (en) * | 2005-02-10 | 2006-09-28 | Seiko Instruments Inc | Piezoelectric vibrator, surface-mounting type piezoelectric vibrator, oscillator, electronic apparatus and wave clock |
JP2008109475A (en) * | 2006-10-26 | 2008-05-08 | Kyocera Kinseki Corp | Quartz vibrating plate and its manufacturing method |
JP2008109474A (en) * | 2006-10-26 | 2008-05-08 | Kyocera Kinseki Corp | Crystal vibrating plate and its manufacturing method |
JP2009130543A (en) * | 2007-11-21 | 2009-06-11 | Epson Toyocom Corp | Mesa type oscillation piece, mesa type oscillation device, and manufacturing method of mesa type oscillation device |
JP2010093837A (en) * | 2009-12-03 | 2010-04-22 | Seiko Epson Corp | Piezoelectric vibration piece, method for manufacturing same, piezoelectric vibrator, and piezoelectric oscillator |
JP2010147625A (en) * | 2008-12-17 | 2010-07-01 | Epson Toyocom Corp | Piezoelectric vibrator |
JP2015135998A (en) * | 2014-01-16 | 2015-07-27 | セイコーエプソン株式会社 | Vibration piece, manufacturing method of the same, vibrator, oscillator, electronic apparatus and movable body |
JP2017055454A (en) * | 2016-12-09 | 2017-03-16 | セイコーエプソン株式会社 | Vibration piece, vibrator, oscillator, electronic apparatus and movable body |
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2000
- 2000-10-04 JP JP2000305432A patent/JP4442014B2/en not_active Expired - Fee Related
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006262443A (en) * | 2005-02-10 | 2006-09-28 | Seiko Instruments Inc | Piezoelectric vibrator, surface-mounting type piezoelectric vibrator, oscillator, electronic apparatus and wave clock |
JP2008109475A (en) * | 2006-10-26 | 2008-05-08 | Kyocera Kinseki Corp | Quartz vibrating plate and its manufacturing method |
JP2008109474A (en) * | 2006-10-26 | 2008-05-08 | Kyocera Kinseki Corp | Crystal vibrating plate and its manufacturing method |
JP2009130543A (en) * | 2007-11-21 | 2009-06-11 | Epson Toyocom Corp | Mesa type oscillation piece, mesa type oscillation device, and manufacturing method of mesa type oscillation device |
JP2010147625A (en) * | 2008-12-17 | 2010-07-01 | Epson Toyocom Corp | Piezoelectric vibrator |
JP2010093837A (en) * | 2009-12-03 | 2010-04-22 | Seiko Epson Corp | Piezoelectric vibration piece, method for manufacturing same, piezoelectric vibrator, and piezoelectric oscillator |
JP2015135998A (en) * | 2014-01-16 | 2015-07-27 | セイコーエプソン株式会社 | Vibration piece, manufacturing method of the same, vibrator, oscillator, electronic apparatus and movable body |
JP2017055454A (en) * | 2016-12-09 | 2017-03-16 | セイコーエプソン株式会社 | Vibration piece, vibrator, oscillator, electronic apparatus and movable body |
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