JP2002100039A - Magnetic transfer method, master disk, and magnetic transfer device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic transfer method, a master disk, and a magnetic transfer device which make it possible to precisely align the master disk and a slave disk and hardly produce flaws on these disks when they are aligned, brought into contact, and peeled, and which are tolerant of dust. SOLUTION: This magnetic transfer method has stages for pressing a master disk 20 having a magnetic signal recorded and a magnetic disk 11 having a magnetic layer against each other across a protection layer 16, transferring the magnetic signal of the master disk 20 to the magnetic layer of the magnetic disk 11 by magnetic transfer while the master disk 20 and magnetic disk 11 are pressed against each other, separating the master disk 20 and magnetic disk 11 after the magnetic transfer and removing the protection layer 16.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic transfer method, a master disk, and a magnetic transfer device, and more particularly, to a magnetic transfer method, a master disk, and a magnetic disk capable of transferring a servo signal onto a magnetic disk at high speed. It relates to a transfer device.

[0002]

2. Description of the Related Art Conventionally, a hard disk drive (HD)
D) is a magnetic recording device in which a disk serving as a recording medium is fixed inside the drive and data is recorded / reproduced on / from this disk. The HDD performs control for positioning the magnetic head at a target position (target track) on the disk based on servo information prerecorded on the disk. Generally, servo information is recorded in a servo area (servo sector) arranged at a predetermined interval in a circumferential direction on a disk. The servo area is provided in the radial direction for all tracks on the disk.

[0003] In a manufacturing process of manufacturing such an HDD, usually, after a disk and a head are incorporated in a housing of a drive body, servo information is recorded on the disk by a servo writer called a servo writer. You. Here, the disk is fixedly attached to the spindle mechanism. The head is mounted on a head actuator driven by a voice coil motor.

In a conventional method of writing servo information using a servo writer, the head is controlled to move and servo information is sequentially recorded in each servo area of all tracks set on a disk. This is one of the processes that takes a long time. Therefore, shortening the time required for the servo information writing process is effective for improving the efficiency of the HDD manufacturing process.

As a method for solving this problem, a master disk on which servo information is recorded in advance is prepared, and the servo information is stored on a disk (hereinafter referred to as a slave disk) to be incorporated into a drive using the master disk. A method using a magnetic transfer system for copying has been proposed (for example, see Japanese Patent Application Laid-Open No. 7-78337). In the magnetic transfer method, a master disk and a slave disk are brought into close contact with each other, and a bias magnetic field is externally applied to transfer magnetization information of the master disk to the slave disk.

[0006]

As described above, HDDs
In order to record servo information on the disk in advance,
Although a writing step is required, a method using a magnetic transfer method for shortening the required time has attracted attention as compared with a method using a servo writer. However, the method using the magnetic transfer method has the following problems.

The disk used for the HDD is required to have a mirror surface with a surface roughness of, for example, 20 nm or less (height of the glide) as the recording density increases in recent years. Generally, to achieve high recording density, it is necessary to reduce the spacing (spacing) between the head and the disk surface. For this reason, the surface of the disk is required to have a high degree of specularity.

In the servo writing process by the magnetic transfer method, the master disk and the slave disk are brought into close contact with each other. In that case, it is necessary to align the master disk and the slave disk. In this case, it is necessary to align the center axis in order to normally use the disk by rotating it. The higher the recording density, the higher the alignment accuracy needs to be. Further, in the case of a medium having no rotating mechanism, it is necessary to control XY axes such as vertical and horizontal directions.
The shape of the master disk or the slave disk need not necessarily be a disk. The most accurate positioning is achieved by bringing the master disk and the slave disk into contact with each other, but there is a problem that the master disk and the slave disk are easily damaged.

Further, when the master disk and the slave disk are peeled off after the magnetic transfer processing, there is a problem that the above-mentioned mirror effect makes it difficult for the master disk and the slave disk to peel off, and the surface of one or both disks is easily damaged.

In order to increase the repetition resistance of the master disk, Japanese Patent Application Laid-Open No. H11-273070 discloses that the surface of a flattened master disk is protected by a hard film. This method increases the durability of the master disk, but
The slave medium is easily damaged at the time of alignment, and is weak against dust.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and enables high-precision positioning between a master disk and a slave disk. An object of the present invention is to provide a magnetic transfer method, a master disk, and a magnetic transfer device that are resistant to dust.

[0012]

(Structure) In order to solve the above-mentioned problems, a first aspect of the present invention is to dispose a protective layer between a master disk on which a magnetic signal is recorded and a magnetic disk having a magnetic layer. A step of pressing the master disk and the magnetic disk in contact with each other, and transferring the magnetic signal of the master disk to the magnetic layer of the magnetic disk by magnetic transfer in a state where the master disk and the magnetic disk are pressed. And a step of separating the master disk and the magnetic disk after the magnetic transfer, and a step of removing the protective layer.

[0013] In the first aspect of the present invention, it is preferable to provide the following configuration.

(1) The master disk and the magnetic disk are pressed against each other after the positioning is performed with the protective layer interposed between the master disk and the magnetic disk.

(2) The step of separating the master disk and the magnetic disk is performed at any one of a position between the master disk and the protective layer or a position between the magnetic disk and the protective layer.

(2) The protective layer is formed on the master disk.

(3) The protective layer is formed on the magnetic disk.

Further, a second aspect of the present invention is to provide a non-magnetic substrate,
A ferromagnetic pattern buried on the surface of the nonmagnetic substrate and on which a magnetic signal is recorded; and a protective layer provided over the nonmagnetic substrate and the ferromagnetic pattern and removed by a chemical or physical treatment. And a master disk comprising:

In the second aspect of the present invention, it is preferable to provide the following configuration.

(1) The protective layer is made of a polymer or a metal.

(2) The surface of the protective layer is flat.

(3) The surface of the nonmagnetic substrate and the surface of the ferromagnetic pattern form flat surfaces.

A third aspect of the present invention is a master disk holding means for holding a master disk on which a magnetic signal is recorded, a magnetic disk holding means for holding a magnetic disk having a magnetic layer, the master disk and the magnetic disk. Fixing means for fixing between the master disk and the magnetic disk with a protective layer interposed between the disks, pressure applying means for applying pressure between the master disk and the magnetic disk, and generating a magnetic field to perform magnetic transfer. And a magnetic field generating means for transferring the magnetic signal of the master disk to a magnetic layer of the magnetic disk.

In the third aspect of the present invention, it is preferable to provide the following configuration.

(1) The apparatus further comprises control means for detecting and controlling a relative position between the master disk and the magnetic disk.

(2) The fixing means for fixing between the master disk and the magnetic disk is separated from the pressure applying means and the magnetic field generating means.

(3) The master holding means, the substrate holding means and the fixing means are integrally formed so as to be detachable from the pressure applying means.

(4) A transfer means for transferring the integrated master holding means, the substrate holding means, and the fixing means between the pressure applying means and the outside thereof is provided.

(Function) According to the present invention, the master disk and the magnetic disk (slave disk) are hardly damaged by the interposition of the protective layer even in the case of alignment, pressure contact, and separation (peeling). Become. In addition, since the protective layer can be removed, dust generated during magnetic transfer can be removed at the same time.

The thickness of the protective layer is not generally determined by the size of the magnetic pattern to be transferred, the applied pressure, or the degree of deformation of the protective layer, but is preferably about 5 nm to 1 μm. Generally, it is better for the flexible protective layer to be thicker than the hard protective layer. If the protective layer is thick, scratches are less likely to occur, but transfer accuracy is reduced. When the protective layer is thin, the transfer accuracy is increased, but the transfer layer is easily damaged. Therefore, more preferably, 10 nm
About 0.5 μm.

By interposing the protective layer, it is possible to apply a greater pressure between the master disk and the magnetic disk, and it is possible to eliminate the deflection and distortion of the master disk and the slave, thereby enabling high-precision magnetic transfer. The protective layer is convenient for applying pressure with high precision and uniformity. In addition, a particularly flexible protective layer is convenient for improving horizontality.

The positioning can be performed with high accuracy by performing the positioning while bringing the master disk and the slave disk into contact with each other. This is advantageous for the manufacture of ultra-high density HDDs of several hundred gigabits per square inch or more where track density is narrow. With the protective layer interposed, even if the contact is performed and alignment is performed, scratches are unlikely to occur. This effect is particularly great when a protective layer having a lubricating effect is used.

The magnetic transfer method according to the present invention is further characterized in that after applying a pressure between the master disk and the slave disk, these are separated from one another between the protective layer and the master disk or between the protective layer and the slave disk. It may be.

If one of them can be separated, the subsequent process is simplified. If peeling occurs in both cases or occurs in a single peeling, post-processing needs to be divided into cases, and the process becomes complicated,
This leads to increased manufacturing costs. For this purpose, it is preferable to provide a difference in affinity between the protective layer and the master disk and between the protective layer and the slave disk.

To make a difference, for example, a polymer having a hydrophilic group and a hydrophobic group as a protective layer is applied to a master disk by spin coating or the like in air. In this case, a styrene-maleic acid alternating copolymer or the like can be used as the protective layer. A carboxylic acid or the like can be used for the hydrophilic group, and a benzene ring or the like can be used for the hydrophobic group. The material constituting the surface of the slave disk is
For example, amorphous carbon or the like is used, and a material forming the surface of the master disk is, for example, silicon oxide. The hydrophilic groups move toward the master disk, and the hydrophobic groups move toward the air. In this case, separation between the protective layer and the slave disk becomes easy. It is also possible to increase the hydrophobicity of the master disk surface by coating the surface with fluorine or the like, cover the slave disk surface with silicon oxide or the like, and form the protective film on the silicon oxide or the like. In this case, separation between the protective layer and the master disk can be facilitated.

As means for peeling off either the protective layer and the master disk or the protective layer and the slave disk, the molecular structure of the protective layer is controlled as described above. A concave portion may be provided on a portion of the disk that is not related to magnetic transfer so that gas can be introduced into the concave portion when the disk is peeled off.

[0037] The magnetic transfer method of the present invention may further include a step of forming a protective layer on the slave disk. If a protective layer is previously formed on a large number of slave disks, magnetic transfer can be performed efficiently. It is preferable to use a slave disk in which a hard carbon film is formed on a magnetic medium. Further, it is preferable to form the protective layer of the present invention on a carbon film. After magnetic transfer, it is preferable to remove the protective layer and apply a lubricating layer. As the lubricating layer, for example, perfluoropolyether or the like can be used, and the lubricating layer can reduce friction with the magnetic head.

The material of the protective layer of the present invention is a non-magnetic material,
Its properties are particularly suitable for different master disks. That is, if the master disk surface is flat, the protective layer should be more flexible than the master disk surface. That is, the flatness of the slave disk is required with sub-nanometer accuracy, and in this case, the flatness of the master disk is also required to be as high as possible. In this case, since the pressure is also distributed over the entire surface, the gap between the two disks can be filled by using a flexible protective film, and the lubricating property can be obtained to improve the positional accuracy. A hard protective film cannot absorb the undulations and deflections of the disk and is easily scratched.

On the other hand, if there are irregularities corresponding to the pattern to be transferred to the master disk surface, the protective film is preferably harder than the master disk surface. The size of the unevenness is, for example, 0.5 micron in depth and 1 micron in width. The flexible protective film cannot support the pressure concentrated on the convex portion, and the convex portion of the master disk easily breaks through the protective film and damages the slave disk. Therefore, in this case, it is preferable that the protective film is hard. However, this does not apply even if a flexible protective layer is used, as long as the thickness of the protective layer is increased so that the protrusions of the master disk do not penetrate the protective layer.

As the protective layer of the present invention, polymers, metals, ceramics and the like can be used, but polymers are particularly preferable. The polymer film is flexible, and its chemical properties are very different from the magnetic material and carbon film used for the master disk and slave disk, so it can be easily removed from the master disk or slave disk by solvent or physical treatment without damaging the base. it can.

As the polymer, for example, vinyl alcohols, polyvinyl acetal, polyvinyl butyral, ethylene tetrafluoride resin, ethylene trifluoride resin, ethylene propylene resin, vinylidene fluoride resin, vinyl fluoride resin, Such as ethylene tetrafluoride / perfluoroalkoxyethylene copolymer, ethylene tetrafluoride / perfluoroalkyl vinyl ether copolymer, ethylene tetrafluoride / hexafluoropropylene copolymer, and ethylene tetrafluoride / ethylene copolymer Fluororesins such as tetrafluoroethylene copolymer, fluorine-containing polybenzoxazole, acrylic resins, methacrylic resins, polyacrylonitrile, acrylonitrile copolymers such as acrylonitrile-butadiene-styrene copolymer, polystyrene, styrene-a Polyurethanes such as rilonitrile copolymer, acetal resin, nylon 66, polycarbonates, polyester carbonates, cellulose resins, phenolic resins, urea resins, epoxy resins, unsaturated polyester resins, alkyd resins, melamine resins , Polyurethanes, diarylphthalates, polyphenylene oxides, polyphenylene sulfides, polysulfones, polyphenylsulfones, silicone resins, polyimides, bismaleimide triazine resins, polyimide amides, polyetherimides, polyvinyl Examples thereof include carbazoles and norbornene-based amorphous polyolefins. In addition, copolymers and mixtures thereof can be used.

The polymer preferably has a glass transition temperature of 30 ° C. or less because of its flexibility. In addition, silicone resin and fluorine resin are particularly preferable from the viewpoint of releasability and lubricity.

The master disk of the present invention is a master disk in which a shape pattern corresponding to a digital information signal array is provided by a ferromagnetic material on a nonmagnetic substrate, and the ferromagnetic material is embedded in the nonmagnetic material. And a protective layer that can be removed by chemical and physical treatments that does not damage the underlayer on the outermost surface. Such a protective layer is preferably flat, and can improve the surface protection effect.

The material of the protective layer is preferably made of a non-magnetic polymer film or metal. Since the protective layer is repeatedly deteriorated by the transfer process, if the protective layer can be easily removed by chemical and physical treatments that do not damage the base, the master disk can be repaired and the number of times of use can be increased.

The pattern of the ferromagnetic material is formed by processing a magnetic thin film or forming irregularities on the substrate surface by photolithography, electron beam lithography, X-ray lithography, near-field lithography, nanoprinting lithography, or the like. After processing, a magnetic material is sputtered or plated. Alternatively, it is produced by printing and firing an ink containing magnetic fine particles by printing.

In the magnetic transfer apparatus of the present invention, a master disk on which a magnetic signal is formed and a magnetic disk (slave disk) having a magnetic layer are brought into contact with (fixed to) a magnetic disk. A magnetic transfer device for transferring a magnetic signal to a slave disk, wherein the magnetic transfer is performed via the above-described protective layer.

Preferably, means for detecting and controlling the relative positions of the master disk and the slave disk are provided, and the means for bringing the master disk and the slave disk into contact with each other includes a means for applying a high voltage and a means for applying a magnetic field. Preferably it is separate from the means.

The means for holding the master disk and the means for holding the slave disk are preferably of the vacuum chuck type. Further, in order to hold the master disk and the slave disk, it is preferable to hold them via an elastic body. The pressure is uniformly applied to the disk through the elastic body, which is more preferable for uniform magnetic transfer. Rubber is preferable as the elastic body, and it depends on the applied pressure. However, a transparent silicon rubber film is preferable for alignment or the like. It is also possible for the rubber film to have a function as a suction cup for holding the disk. Alternatively, a minute hole may be appropriately formed in the rubber film, and the disk may be sucked by vacuum.

As means for detecting the relative positions of the master disk and the slave disk, an optical microscope, a capacitance sensor, an optical interference position sensor and the like are preferable. Also, in order to automatically control the relative position of the master disk and slave disk, a concave part is formed on one side, and a convex part that fits on one side is formed on the surface to control the position three-dimensionally, and both surfaces are hydrophilic. It is also preferable to have a means for forming a pattern and controlling the position with affinity energy via a liquid such as water.

As a means for bringing the master disk and the slave disk into contact with each other, it is preferable to use a method of using the external atmospheric pressure by drawing a vacuum between the master disk and the slave disk.

The means for applying a high pressure is most preferably a means using a hydraulic pump. According to the method using the hydraulic pump, it is possible to correct the distortion and the deflection of the planes of the master disk and the slave disk and perform magnetic transfer with high accuracy. The means for applying a magnetic field is preferably capable of applying both a DC magnetic field and an AC magnetic field. The direction of the applied magnetic field differs depending on whether the magnetic signal to be transferred is the longitudinal direction or the vertical direction of the track.

The magnetic transfer apparatus of the present invention further comprises means for holding a master disk, means for holding a slave medium, and means for bringing a master disk and a slave disk into contact with each other. It may be characterized by having means for carrying. Further, means for detecting and controlling the relative positions of the master disk and the slave disk may be integrated.

Thus, after accurately controlling the relative positions of the master disk and the slave disk, it is possible to convey and install the device on a means for applying high pressure, for example, a hydraulic stamp or the like, and pressurize.

[0054]

Embodiments of the present invention will be described below in detail with reference to the drawings.

First, preformat recording using the master disk of the present invention will be briefly described with reference to FIG. FIG. 1 is a schematic diagram for explaining a recording principle using a master disk according to the present invention.

The recording magnetic field generated by the ferromagnetic layer 22, which is patterned in the master disk 20 and magnetized in one direction and flattened, forms a magnetization pattern 15 corresponding to the pattern shape via the protective layer 16 on the slave disk 11. Will be recorded. That is, as shown in FIG. 1, a patterned ferromagnetic layer 22 corresponding to a servo signal for tracking, an address information signal, a reproduction clock signal, and the like is formed on the master disk 20. Arrow 13 indicates the magnetization direction and corresponds to the signal described above.
A magnetization 15 is induced in the ferromagnetic material by the excitation magnetic field 14, and the induced magnetization 15 generates a transfer magnetic field on the slave disk 11 to magnetize the slave disk 11. Then, the residual magnetization corresponding to these remains on the slave disk 11 and is preformat-recorded. FIG.
Shows magnetization in the longitudinal direction, but the same applies to magnetic transfer in the vertical direction.

(First Embodiment) The magnetic transfer according to the first embodiment of the present invention will be described below with reference to FIGS. 2, 3 and 4. FIG. In the present embodiment, an example in which a protective film is formed on the slave disk side will be described. FIG. 2 is a schematic sectional view showing the configuration of the master disk 20 according to the first embodiment of the present invention. FIG. 3 is a schematic diagram showing the configuration of the disk holder unit 30 of the magnetic transfer device according to the first embodiment of the present invention. FIG. 4 is a schematic diagram showing the configuration of the disk pressing unit 40 of the magnetic transfer device according to the first embodiment of the present invention.

As shown in FIG. 2, a substrate 21 made of glass
The pattern of the ferromagnetic material 22 corresponding to the master information pattern is formed flat on the surface of the substrate. A hard film 23 is formed on the surface. A mark (not shown) for positioning is formed at the center of rotation.

The master disk 20 is disclosed in, for example,
It is formed through a process disclosed in Japanese Patent Application Publication No. -273070. Examples of the ferromagnetic material include crystalline materials such as Ni-Fe and Fe-Al-Si, Co-based amorphous materials such as Co-Zr-Nb, Fe-Ta-
Fe-based microcrystalline materials such as N, Fe, Co, Fe-Co, and the like are preferable.
As a method for forming a magnetic thin film, there are a vacuum evaporation method, an ion beam sputtering method, and a facing target sputtering method.

FIG. 3 shows the structure of the cartridge type disk holder 30 of the magnetic transfer apparatus shown in this embodiment. 31 is a holder with silicone rubber for holding the master disk 32 by vacuuming, 33 is a holder with silicon rubber for holding the slave disk 34 by vacuuming, 35 is the master disk 32 and the slave disk A protective layer provided between the layers 34, 36 is a fine actuator for precisely driving the master disk in the X, Y and Z directions, and 37 is a coarse actuator for roughly driving the fine actuator in the X, Y and Z directions. A dynamic actuator 38 is a holder for bringing the master disk and the slave disk into close contact with each other by drawing a vacuum, 39
Is an optical microscope for positioning.

FIG. 4 schematically shows the configuration of the stamp drive system 40 of the magnetic transfer apparatus shown in this embodiment. 41 is a laser optical system for detecting the height position of the substrate, 42 is a hydraulic or pneumatic control system, 43 is a substrate temperature control system, 44 is an electromagnet for applying a bias magnetic field, 45 is a pressure gauge, and 46 is a disk holder transfer. System, 47 is a stamp stand.

A master disk 32 (master disk 20 in FIG. 2) is placed on a holder 31, and a hard carbon coated with a block copolymer of polymethyl methacrylate and polydimethylsiloxane to a thickness of 20 nm as a protective layer 35 using a spin coater. The layered slave disk 34 was set on the holder 33. Hydrophilic polymethyl methacrylate is closer to the slave disk, and polydimethylsiloxane, which is excellent in hydrophobicity, lubricity, flexibility and releasability, is closer to the master disk. The number of magnetic medium layers on the slave disk may be one, or a two-layer medium having a lower magnetic layer for servo signals. In the case of a two-layer medium for a servo signal, the lower layer medium may be any medium having a lower coercive force than the upper layer medium.

While looking at the optical microscope 39, the master disk 32 and the slave disk 34 were brought close to each other, and the coarse movement actuator 37 was moved so that the alignment mark of the master disk was aligned with the rotation center of the slave disk 34. Next, the master disc 3 is moved while the fine actuator 36 is moved while the holder 38 is gradually evacuated.
2 and the slave disk 34 were brought into close contact with each other via a protective layer 35.

Next, the disk holder 30 is transferred to the transfer system 4.
6 was installed in the hydraulic stamp drive system 40. After stamping the magnetic field disk holder 30 at a pressure of 20 kg / cm ² for 2 seconds, air was introduced into the holder 38 to separate the master disk 32 and the slave disk 34. The protection layer 35 was found to adhere to the slave disk and not to the master disk by applying fine water droplets. In other words, the surface of the slave disk repels water and fine water droplets are evenly applied to the entire surface,
Large water droplets were observed because the surface of the master disk could be applied to water.

Next, the protective layer 3 on the slave disk 34
5 was removed using toluene. After drying, the surface was observed with an optical microscope, but no scratch was observed.

Comparative Example 1 A slave disk was pressed against a master disk in the same manner as in Example 1 except that a block copolymer of polymethyl methacrylate and polydimethylsiloxane was not used as the protective layer 35. . After washing the slave disk with toluene and drying,
The surface was observed with an optical microscope. As a result, a flaw of about 20 to 50 μm in length, which was considered to be partly scratches due to minute unevenness or dust, was observed in some places.

(Second Embodiment) In this embodiment, an example in which a protective film is formed on the master disk side will be described. FIG. 5 is a schematic sectional view showing the configuration of the master disk in the present embodiment.

As shown in FIG. 5, a substrate 51 made of glass
A pattern of the ferromagnetic material 52 corresponding to the master information pattern is formed flat on the surface of the ferromagnetic material 52. Further, a carbon film 53 is formed thereon as a hard film. On the uppermost layer, an aluminum protective film 54 having a thickness of 10 nm, which is flattened by aluminum evaporation and electrolytic polishing, is formed. Mark for positioning (not shown) at the center of rotation
Are formed.

The disk holder of the magnetic transfer apparatus shown in FIG.
Master disks 32 (FIG. 5)
Master disk 50) and a hard carbon layer on the surface
The resulting slave disk 34 is installed, and the magnetic disk shown in FIG.
20kg / cm with air transfer device ^TwoStamp for 2 seconds with pressure
After that, the master disk 50 and the slave disk 34
Was peeled off. Observe the surface of the slave disk with an optical microscope
However, no damage was observed. On the other hand master disc
Some scratches and dents were observed on the aluminum protective layer on the surface of the steel
Was done. Using this master disk as it is, 500
Magnetic transfer to the slave disk
No scratches were observed on the surface of the disk. However
Scratches on the aluminum protective layer on the master disk surface
Many dents have been observed. Thread at 700 times
Scratches were observed on the disk and the aluminum protective film was missing.
Drops were observed. So after using 500 times
Then, the protective aluminum film is removed using dilute hydrochloric acid.
Then, it was washed and dried with pure water. Observed with an optical microscope,
No scratch was observed below the star disk. again,
Aluminum is deposited on the top layer and electrolytic polishing is performed.
As a result, the master disk 50 could be reproduced.

As the protective film, besides aluminum, a soft non-magnetic metal such as gold, indium, copper, tin, lead, and zinc, an alloy thereof, or a polymer can be used.

(Third Embodiment) FIG. 6 is a schematic sectional view showing the configuration of a master disk according to this embodiment.

As shown in FIG. 6, a substrate 61 made of glass is used.
Are formed on the surface of the ferroelectric material corresponding to the master information pattern, and the ferromagnetic material 62 is formed on the convex portion. A mark (not shown) for positioning is formed at the center of rotation.

Each of the disk holders 31 and 33 of the magnetic transfer apparatus shown in FIG.
Master disk 60) and a surface having a thickness of 5
The slave disk 34 on which an SiO ₂ film having a thickness of 10 nm was formed was placed, stamped at a pressure of 20 kg / cm ² for 2 seconds with the magnetic transfer device shown in FIG. 4, and then the master disk 60 and the slave disk 34 were peeled off. The surface of the slave disk was observed with an optical microscope, and some scratches and dents were observed on the surface of the SiO ₂ film. The protective SiO ₂ film was removed using hydrofluoric acid, washed with pure water and dried. When observed with an optical microscope, no scratch was observed below the slave disk.

The present invention is not limited to the above embodiment. For example, in the above embodiment, the hard carbon layer is used for the master disk or the slave disk, but it can be omitted as needed.

In addition, various modifications can be made without departing from the spirit of the present invention.

[0076]

As described above, according to the present invention,
Provide a magnetic transfer method, a master disk, and a magnetic transfer device that enable high-accuracy alignment between a master disk and a slave disk, and are resistant to scratches even in alignment, close contact, and peeling, and are resistant to dust. It is possible to

[Brief description of the drawings]

FIG. 1 is a schematic diagram for explaining a recording principle using a master disk of the present invention.

FIG. 2 is a schematic sectional view showing the configuration of a master disk according to the first embodiment of the present invention.

FIG. 3 is a schematic diagram illustrating a configuration of a disk holder unit of the magnetic transfer device according to the first embodiment of the present invention.

FIG. 4 is a schematic diagram illustrating a configuration of a disk pressing unit of the magnetic transfer device according to the first embodiment of the present invention.

FIG. 5 is a schematic sectional view showing a configuration of a master disk according to a second embodiment of the present invention.

FIG. 6 is a schematic sectional view showing a configuration of a master disk according to a third embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 11 ... Slave disk 12 ... Master disk 13 ... Master disk magnetization 14 ... Excitation magnetic field 15 ... Slave disk magnetization 16 ... Protective layer 20 ... Master disk 21 ... Glass substrate 22 ... Ferromagnetic pattern 23 ... Hard film 30 ... Disk Holder part 31 Holder for holding master disk 32 Master disk 33 Holder for holding slave disk 34 Slave disk 35 Protective layer 36 Fine actuator 37 Coarse actuator 38 Master disk and slave Holder for bringing the disks into close contact by drawing a vacuum 39 ... Optical microscope 40 ... Stamp drive system 41 ... Laser optical system for detecting the height position of the substrate 42 ... Hydraulic or pneumatic control system 43 ... Substrate temperature control Tool system 44 ... Electromagnet for applying bias magnetic field 45 ... Pressure gauge 46 ... Disc holder transfer system 47 ... Stamp table 50 ... Master disk 51 ... Glass substrate 52 ... Ferromagnetic pattern 53 ... Hard film 54 ... Aluminum protective film 60 ... master disk 61 ... glass substrate 62 ... ferromagnetic material

Claims (6)

[Claims] A step of press-contacting the master disk and the magnetic disk with a protective layer interposed between a master disk on which a magnetic signal is recorded and a magnetic disk having a magnetic layer; In a state where the magnetic disk is pressed against, the step of transferring the magnetic signal of the master disk to the magnetic layer of the magnetic disk by magnetic transfer, a step of separating the master disk and the magnetic disk after the magnetic transfer, Removing the protective layer. 2. After performing alignment by interposing the protective layer between the master disk and the magnetic disk,
2. The magnetic transfer method according to claim 1, wherein the master disk and the magnetic disk are pressed against each other. 3. The method according to claim 2, wherein the step of separating the master disk and the magnetic disk is performed between the master disk and the protective layer or between the magnetic disk and the protective layer. The magnetic transfer method according to claim 1, wherein: 4. A non-magnetic substrate, a ferromagnetic pattern buried on the surface of the non-magnetic substrate and on which a magnetic signal is recorded, and provided over the non-magnetic substrate and the ferromagnetic pattern. A protective layer which is removed by physical or physical treatment. 5. The master disk according to claim 4, wherein the protective layer is made of a polymer or a metal. 6. A master disk holding means for holding a master disk on which a magnetic signal is recorded, a magnetic disk holding means for holding a magnetic disk having a magnetic layer, and a protective layer interposed between the master disk and the magnetic disk Fixing means for fixing between the master disk and the magnetic disk, pressure applying means for applying pressure between the master disk and the magnetic disk, and generating a magnetic field to generate the magnetic signal of the master disk by magnetic transfer. And a magnetic field generating means for transferring the data to a magnetic layer of the magnetic disk.