JP2001179732A - Scribing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a scribing apparatus for applying good dynamic load and static load to a work from a cutter to generate a deep longitudinal crack in the work without damaging the surface of the work. SOLUTION: A weight 18 for preventing the floatation of a cutter 12 from a work 11 is provided and the load of the weight 18 is transmitted to a scribing main body 17 by magnetic force and the weight 18 is made movable in the vibration direction of a vibration generation member 27. Since the weight 18 floated by magnetic force is also vibrated accompanied by the vibration of the scribing main body 17, the repulsive force of magnetic force is reduced in fluctuations. Therefore, proper dynamic load can be applied to the work 11 from the cutter 12.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a scribe apparatus for cutting a work made of a brittle material such as glass and semiconductor.

[0002]

2. Description of the Related Art A scribing apparatus for cutting a workpiece by vibrating a cutter is known. This scribe device has a vibration generating member that generates vibration in the scribe main body,
Vibrates the cutter provided at the lower end of the scribe body. When the cutter is brought into contact with the surface of the work, the scribe body vibrates while the position of the cutter remains constant. As a result, the pressing force applied from the cutter to the work vibrates, and a vertical crack perpendicular to the work surface is generated.

In the conventional scribing apparatus, when the scribing body is vibrated, the cutter jumps from the work, and as a result, flaws such as horizontal cracks are generated on the work surface, and good vertical cracks may not be formed. . For this reason, as shown in FIG. 7, the present applicant has proposed a scribe device in which the cutter 3 is prevented from floating from the work 5 using the weight 1 and the spring 2 (Japanese Patent Laid-Open No. 11-157).
No. 860). This scribing device has a weight 1 provided above a scribing main body 4 via a spring 2.
The gravity of the weight 1 is applied to the scribe main body 4 to prevent the cutter 3 from floating from the work 5. The gravity of the weight of the weight 1 having the mass W1 and the scribe main body 2 having the mass W2 is applied to the work 5 as a static load.

Further, as shown in FIG. 8, the present applicant has proposed a scribe device in which a cutter 3 is prevented from floating from a work 5 by using a magnet (Japanese Patent Application No. 11-2235).
No. 46). This scribing device includes a first magnet pair 7, which repels each other between the fixed portion 6 and the scribe main body 4,
7 and a second magnet pair 8, 8, the repulsive force of the magnet is applied to the scribe body 4, and the cutter 3
Prevent from rising from.

[0005]

However, in the scribe device disclosed in Japanese Patent Application Laid-Open No. H11-157860, when the vibration frequency of the vibration generating member approaches the natural frequency of the spring / weight system, the weight 1 resonates. However, there is a problem that an undesirable elastic force is applied to the scribe main body 4 from the spring 2 side. In addition, since the weight 1 is provided, the work 5
The static load applied to the workpiece 5 was increased, and the surface of the work 5 was sometimes damaged such as a lateral crack. Furthermore, if the guide of the scribe main body 4 and the weight 1 is insufficient, there is a problem that the scribe main body 4 staggers and it is impossible to apply an appropriate dynamic load to the work 5 from the cutter 3.

In the scribe device described in Japanese Patent Application No. 11-223546, the distance between the magnet pairs 7, 7, 8, 8 changes with the vibration of the scribe main body 4.
There was a problem that the repulsive force of the magnets 7, 7, 8, 8 fluctuated, and it was impossible to apply an appropriate dynamic load to the workpiece 5 from the cutter 3.

Accordingly, an object of the present invention is to provide a scribing apparatus which can apply a proper dynamic load and static load from a cutter to a work and can generate a deep vertical crack without damaging the work surface. And

[0008]

Hereinafter, the present invention will be described. In addition, in order to facilitate understanding of the present invention, reference numerals in the accompanying drawings are added in parentheses, but the present invention is not limited to the illustrated embodiment.

To solve the above problems, the present inventor has proposed:
We have conducted intensive research. As a result, a weight (18) for preventing the cutter (12) from floating from the work (11) is provided, and the load of the weight (18) is transmitted to the scribe main body (17) by using a magnetic force. Vibration generating member (2
The cutter (1) can be moved in the vibration direction of (7).
From 2), it has been found that an appropriate dynamic load is applied to the work (11). That is, the present invention is a scribing device for cutting a work (11) by vibrating a cutter (12), and a scribing body (17) having the cutter (12) and a vibration generating member (27) for generating vibration. And a weight (18) for applying a load to the scribe main body (17) to prevent the cutter (12) from floating from the work (11), and to reduce the load of the weight (18) by magnetic force using the scribe. The object described above is solved by a scribe device comprising a load applying means (19) for transmitting the load to a main body (17), wherein the weight (18) moves in the direction of vibration of the vibration generating member (27). did. here,
The direction of the vibration refers to the direction in which the vibration generating member (27) expands and contracts.

According to the present invention, the scribe body (1)
With the vibration of 7), the weight (1
8) also vibrates, so that the repulsive force of the magnetic force is less likely to fluctuate. Therefore, from the cutter (12) to the work (11)
An appropriate dynamic load can be applied to the vehicle. In addition, weight (1
Since no spring is provided to connect between 8) and the scribe body (17), the weight (18) does not resonate.
Further, even if the cutter (12) is placed on the work (11), the thickness of the work (11) changes, or the work (11) is undulating, the weight (18) follows the cutter (12). ) Moves, so that the repulsive force of the magnetic force does not fluctuate even in such a case. Here, the dynamic load is
The load applied to the work (11) from the cutter (12) by the vibration of the scribe body (17).

The load applying means (19) is provided on each of the weight (18) and the scribe body (17), and can be constituted by a pair of load magnets (19a, 19b) repelling each other.

The present invention also provides a spring (40) between the weight (18) and the load applying means (19) or between the load applying means (19) and the scribe body (17). Intervening.

According to the present invention, since the spring (40) and the load applying means (19) are connected in series, the vibration of the scribe body (17) is compounded and the cutter (12) is moved from the cutter (12) to the work (11). It is possible to apply a dynamic load that vibrates in a complicated manner. Therefore, a deep vertical crack can be formed even in a material such as silicon that is difficult to cut by a sine wave.

A leaf spring (40) is attached to the weight (18),
When the load magnet (19a) is attached to the leaf spring (40), the leaf spring (40) and the load applying means (19) can be connected in series. Instead of these, the leaf spring (40) may be attached to the scribe body (17), and the load magnet (19b) may be attached to this leaf spring (40).

The present invention also relates to the scribe main body (1).
7) and the weight (18) are connected to the vibration generating member (2).
It is characterized in that it is attached to the base (15) via a linear motion device (21, 22) so as to be capable of linear motion in the direction of vibration of (7).

According to the present invention, the scribe body (1)
7) and the weight (18) do not stagger, so that an appropriate dynamic load can be applied from the cutter (12) to the work (11).

Further, the present invention is characterized in that a static load adjusting means (20) for adjusting a static load applied from the cutter (12) to the work (11) by using a magnetic force is provided. Here, the static load refers to a load that is always applied to the work (11) from the cutter (12) even when the scribe body (17) is not vibrated, and the gravity of the scribe body (17) and the weight (18). caused by.

When cutting a work (11) made of a brittle material,
When the dynamic load is increased and the static load is reduced, damage to the work surface (11a) can be reduced and deep vertical cracks can be formed. According to the present invention, since the static load adjusting means (20) for adjusting the static load using the magnetic force is provided, the static load can be reduced while the mass of the scribe main body (17) is increased. Therefore, the static load can be reduced while the dynamic load is increased, and a scribe device suitable for cutting brittle materials can be obtained.

Further, according to the present invention, the static load adjusting means (2)
0) is provided on each of the scribe main body (17) and the base (15), and is constituted by a pair of floating magnets (20a, 20b) repelling each other.

According to the present invention, buoyancy can be applied to the scribe body (17) by the repulsive force of the magnet, and the static load can be reduced.

Further, the present invention is characterized in that a height adjusting mechanism (46) for adjusting the height of the floating magnet (20b) provided on the base (15) is provided. Further, the present invention is characterized in that the floating magnet (20b) provided on the base (15) is made of an electromagnet whose magnetic force can be adjusted.

According to these inventions, the static load can be optimally adjusted according to the work (11).

Further, the present invention is characterized in that it comprises mass changing means for changing the mass of the weight (18) or the scribe main body (17). Here, as the mass changing means, a mass adding weight (36) added by a coupling means such as bolt connection or adhesion can be used.

According to the present invention, since the mass of the weight (18) or the scribe body (17) is changed, the static load and the dynamic load can be optimally adjusted according to the work (11).

Further, the present invention is a scribing device for cutting a work (11) by vibrating a cutter (12),
A scribing body (17) having the cutter (12) and a vibration generating member (27) for generating vibration; and applying a load to the scribing body (17).
Is provided between the elastic member (40) and the scribe main body (17), which prevents the elastic member (40) from floating from the work (11). The above-mentioned problem has been solved by a scribe device comprising a load applying means (19) for transmitting a load to the scribe main body (17). Here, a spring, rubber, or the like can be used for the elastic member (40).

According to the present invention, the scribe body (1)
Since the elastic member (40) is deformed by the vibration of (7), the repulsive force of the magnetic force is less likely to fluctuate. Therefore, an appropriate dynamic load can be applied from the cutter (12) to the work (11).

[0027]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 shows a scribe device according to an embodiment of the present invention. This scribing device cuts a thin plate-like work 11 made of a brittle material such as glass, semiconductor, ceramics, etc. using a cutter 12 such as a chisel with high speed and high accuracy. The cutter 12 comes into contact with the work 11 placed on the table 13 and vibrates the pressing force applied from the cutter 12 to the work 11, and the work surface 11 a
, A vertical crack 14 is generated. This vertical crack 1
4, a vertical crack 14 is grown and the work 11
Disconnect.

The scribing device includes a base plate 15
And a cutter 12 and a vibration generating member 16 for generating vibration
, A weight 18 for applying a load to the scribe body 17, a pair of load magnets 19 as load applying means for transmitting the load of the weight 18 to the scribe body 17 using magnetic force, and a cutter using magnetic force. It comprises a pair of floating magnets 20 as static load adjusting means for adjusting the static load applied to the work. A linear guide device 21 such as a linear guide is provided between the base plate 15 and the scribe main body 17 so that the scribe main body 17 can move linearly in the vertical direction. A linear guide device 22 such as a linear guide is also provided between the base plate 15 and the weight 18 so that the weight 18 can linearly move in a direction perpendicular to the base plate 15. The base plate 15
The scribe main body 17 and the weight 18 are attached to the moving mechanism 23 so as to be movable two-dimensionally in the horizontal direction.

The scribe body 17 has a cutter 12 at its lower end.
And the cutter 12 vibrates. FIG. 2 shows the scribe main body 17. The scribe body 17 includes a body 25
And slidably supported in the body 25, the cutter 1
2 includes a holder 26 for holding the cutter 2, a cutter 12 provided at a lower end of the holder 26, and piezo actuators 27 as a vibration generating member for vibrating the cutter 12. Body 25, holder 26, and piezo actuator 27
Have their center lines L coincident. Then, in the case of this embodiment, the center line L is oriented in the vertical direction. When a high frequency electric field is applied to the piezo actuator 27, the piezo actuator 27 expands and contracts periodically, and the cutter 12 vibrates. The piezo actuators 27, 27 are configured by combining two upper and lower piezo actuators, and are cooled by air.

The body 25 has a vertical box shape, and a holder 26 is housed therein. The holder 26 also has a vertical box shape, and has a piezoelectric actuator 2 therein.
7, 27 are stored. A protrusion 28 is provided at the upper end of the body 25 so as to guide the slide of the holder 26 in the direction of the center line L with respect to the body 25. The protrusion 28 is fitted to the upper end of the holder 26. A hole 29 is formed. A ball 3 for supplying a preload to the piezo actuators 27, 27 is provided at the lower end of the holder 26.
0 is provided. The ball 30 is made of an elastic material such as rubber or resin, and has a receiving plate 3 attached to the lower end of the body 25.
Supported by 1. The body 2 is located above the ball 30.
A leaf spring 32 is disposed between the balls 30, and the ball 30 and the leaf spring 32 urge the piezoelectric actuators 27 and 27 upward by their elastic restoring force. The preload of the piezo actuators 27, 27 is adjusted by turning an adjustment screw 33 provided at the upper end of the body 25. In addition,
Instead of the leaf spring 32 and the ball 30, a preload may be applied to the piezo actuators 27 using a magnet pair. The vibration generating member is not limited to the piezoelectric actuators 27 made of a piezoelectric material, and may be a member that vibrates using air or a member that vibrates by applying a magnetic field.

The holder 26 is arranged so as to straddle the leaf spring 32.
It splits into two legs and extends downward. As shown in FIG. 1, the attachments 34a and 34
The cutter 12 is attached via b to be able to swing.
The angle of the lower attachment 34b is adjustable with respect to the upper attachment 34a. Cutter 12
Are arranged on the center line L, and the lower end thereof has a conical shape and is pointed. At the lower end of the cutter 12, diamond particles having a pyramid shape are fixed. The apex of the diamond grain hits the work surface 11a. Instead of the cutter 12, a chisel that has a disk shape, has an edge over the entire circumference, and is rotatably supported by the holder may be used.

A weight 18 for applying a load to the scribe body 17
Is provided with mass changing means for changing the mass of the weight 18. This mass changing means is a connecting means 37 such as a bolt connection or an adhesive.
And a weight 36 added to the mass.
The mass of the mass adding weight 36 is determined according to the work 11. Although not shown, the scribe body 17
When it is desired to adjust the mass of the scribe body, the mass adding weight is connected to the scribe main body 17 by a connecting means such as a bolt connection or an adhesive. The mass of the mass adding weight coupled to the scribe main body 17 is also determined according to the work 11.

As shown in FIG. 1, at the lower end of the weight 18,
A leaf spring 40 is attached. FIG. 4 shows a leaf spring 40 attached to the weight 18. A recess 41 is formed at the lower end of the weight 18, and the leaf spring 40 is stretched over the edges 42 on both sides of the recess 41 so as to be flexible. At the center of the lower end of the leaf spring 40, a load magnet 19a described later is attached.

The scribe body 17 and the weight 18 are attached to the base via linear guide devices 21 and 22, respectively. FIG. 5 shows the linear guide devices 21 and 22. The linear guide devices 21 and 22 have a guide rail 62 which is elongated in the vertical direction and has a ball rolling groove 61a, and a ball circulation path 64 including a load rolling groove 63a corresponding to the ball rolling groove 61a. And a slide member 65 mounted on the guide rail 61 so as to be relatively movable, and arranged and housed in the ball circulation path 64 so that the slide member 65 moves relative to the guide rail 62 in a linear motion. And a plurality of circulating balls 66. Slide member 6
By providing a plurality of balls 66 between 5 and the guide rail 62, the slide member 65 moves smoothly. The guide rail 62 is attached to the base plate 15 side, and the slide member 65 is attached to the scribe main body 17 or the weight 18 side. The slide member 65 forms a part of the mass of the scribe main body 17 or the weight 18. The directions in which the weight 18 and the scribe main body 17 move linearly coincide with each other.
A roller may be used instead of the ball 66 as a rolling element.

As shown in FIG. 1, a pair of load magnets 19a and 19b are provided between the scribe body 17 and the weight 18 as load applying means for transmitting the load of the weight 18 to the scribe body 17 using a magnetic force. Provided. Each of the pair of load magnets 19a and 19b is made of a permanent magnet,
One 19a is attached to the lower surface of the leaf spring 40, and the other 19b is attached to the upper surface of the scribe main body 17. The pair of load magnets 19a and 19b are arranged in the vertical direction so that the same poles (for example, N poles) face each other, and repel each other. The load of the weight 18 is transmitted to the scribe main body 17 by the repulsive force of the magnetic force.

Below the scribe body 17, a cutter 1 is provided.
A pair of levitation magnets 20a as static load adjusting means for adjusting the static load applied to the workpiece 11 from 2 using a magnetic force.
20b are provided. This pair of floating magnets 20a, 20
Reference numerals 0b each include a permanent magnet, and one of the floating magnets 20a is attached to the lower surface of the scribe main body 17. The other is a horizontal plate 4 projecting from the base plate 15.
5 is attached to the height adjustment mechanism 46 provided in the apparatus 5. The height adjusting mechanism 46 has a structure similar to a well-known micrometer, and includes a sleeve 47 fixed to a horizontal plate 45, an operation cylinder 48 provided on the outer periphery of the sleeve 47, and an operation cylinder 48.
And a spindle 49 protruding from the sleeve 47 in accordance with the turning operation of. The spindle 49 extends upward through the horizontal plate 45 and has a floating magnet 20b at its upper end.
Has been fixed. Turn the operation cylinder 48 to rotate the spindle 49
Is adjusted to adjust the height of the levitating magnet 20b.

The pair of levitation magnets 20a and 20b are arranged in the vertical direction so that the same poles (for example, N poles) face each other and repel each other. The repulsive force of the magnetic force gives the scribe body 17 a floating force, and the cutter 1
The static load applied to the work 11 from 2 is adjusted. Further, instead of the permanent magnet, an electromagnet whose magnetic force can be adjusted may be used as the floating magnet 20b. When an electromagnet is used, the magnetic force is adjusted by adjusting the voltage.

A method of using the scribe device will be described. First, the mass of the weight 18 and the mass of the scribe main body 17 are changed to the work 11 made of gallium arsenide, silicon, glass, or the like.
Is determined according to the material, thickness, and the like. When the mass of the scribe main body 17 is increased, the dynamic load increases, and a deep vertical crack 14 can be formed on the work surface 11a. Also, the combined gravity of the weight 18 and the scribe main body 17 affects the static load, so that it is set to be constant in advance according to the work 11.

Next, the work 11 is placed on the horizontal table 13 and the work 11 is positioned at a predetermined position. Cutter 1
When 2 is placed on the work 11, a static load is applied to the work 11 from the cutter 12. The height of the levitation magnet 20b is adjusted by the height adjustment mechanism 46 so that the static load becomes substantially constant in accordance with the work 11. If the levitating magnets 20a and 20b are not provided, the static load is the sum of the gravity of the weight 18 and the gravity of the scribe main body 17.
By providing the levitating magnets 20a and 20b, the static load is reduced by the amount of the repulsive force due to the magnetic force. If the static load is too high, lateral cracks may occur on the work surface 11a. On the other hand, if the static load is too small, the cutter 1
2 rises from the work 11 and the cutter 12 moves
1 and damages the work surface 11a. Therefore, the static load is carefully determined according to the work 11.

When a predetermined static load is obtained, a high-frequency electric field is applied to the piezo actuators 27, 27, the piezo actuators 27, 27 are periodically expanded and contracted, and the cutter 12 is vibrated to apply a dynamic load to the work 11. Since the cutter 12 is always in contact with the work 11 by a static load, the scribe main body 17 vibrates. FIG. 6 shows a pressing force applied from the cutter 12 to the work 11. The pressing force is
With the static load as an average value, it vibrates in accordance with the vibration of the scribe body 17. The magnitude of the dynamic load, that is, the amplitude of the vibration shown in FIG. 6 is proportional to the mass of the scribe main body 17, more precisely, the mass of the body 25 and the slide member 65. According to the present invention, with the vibration of the scribe main body 17, the floating weight 18 also vibrates due to the repulsive force of the load magnets 19a and 19b, and the pair of load magnets 19a and 19b.
The distance between b does not change much, and the repulsive force of the magnetic force does not change much. Also, since magnets have good damping properties,
Damping force is also applied to the vibration of the scribe body 17. As a result, an appropriate dynamic load can be applied from the cutter 12 to the work 11. Further, since there is no spring for connecting the weight and the scribe main body as in the related art, the weight does not resonate. Further, even if the thickness of the work 11 changes or the work 11 undulates, the work 1
Since the weight 18 moves following 1, the repulsive force of the magnetic force does not change even in such a case.

The leaf spring 40 and the load magnets 19a, 1
Since the 9b is connected in series, the vibration of the scribe main body 17 is compounded, and a dynamic load that vibrates in a complicated manner from the cutter 12 to the work 11 can be applied. Therefore, a material such as silicon that is difficult to cut by a sine wave can be cut with high accuracy.

The base plate 15 is moved in the horizontal direction by the moving mechanism 23. Thereby, the work surface 1
A scribe line composed of a vertical crack 14 is formed in 1a. The work 11 on which the scribe line is formed is removed from the table 13 and is broken along the scribe line by a breaker (not shown). The vertical crack 14 formed by the scribe device of the present invention has a width of, for example, 7 μm.
It has been confirmed that the crack depth is as deep as about 500 μm with respect to m, and that the work surface 11a is not damaged.

[0043]

As described above, according to the present invention,
Provide a weight to prevent the cutter from floating from the work,
Since the load of the weight is transmitted to the scribe main body using the magnetic force and the weight can be moved in the direction of vibration, the floating weight is also vibrated by the magnetic force with the vibration of the scribe main body.
For this reason, the repulsive force of the magnetic force hardly fluctuates, and an appropriate dynamic load can be applied from the cutter to the work.
Further, since no spring is provided between the weight and the scribe body, the weight does not resonate. Furthermore, even if the cutter is mounted on the work, the thickness of the work is changed, or the work is undulating, the weight moves following the cutter, so that even in such a case, the repulsive force of the magnetic force fluctuates. Nothing.

Further, according to the present invention, since the static load applied from the cutter to the work is adjusted by using a magnetic force, the static load can be reduced while keeping the mass of the scribe body heavy. In other words, the static load can be reduced while the dynamic load is increased, and as a result, a scribe device suitable for cutting any material such as a brittle material can be obtained.

[Brief description of the drawings]

FIG. 1 is a side view showing a scribe device according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along line AA of the scribe main body of FIG. 1;

FIG. 3 is a perspective view showing a weight.

FIG. 4 is a view as seen from the arrow B showing the lower portion of the weight of FIG. 1;

FIG. 5 is a perspective view showing a linear guide device.

FIG. 6 is a graph showing a pressure applied to a work from a cutter.

FIG. 7 is a schematic view showing a conventional scribe device.

FIG. 8 is a schematic view showing another conventional scribe device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Work 12 Cutter 15 Base plate (base) 17 Scribe main body 18 Weight 19a, 19b Magnet for load 19 Load applying means 20 Static load adjusting means 20a, 20b Levitating magnet 27 Piezo actuator (vibration generating member) 36 Mass adding weight 40 Plate Spring (spring, elastic member) 46 Height adjustment mechanism

Continued on the front page (72) Akira Shimotoyodome 1-12-15 Kita-Otsuka, Toshima-ku, Tokyo F-term in Beldex Co., Ltd. (reference) 3C069 AA03 BA01 BB03 BB04 BC01 CA05 CA11 EA01 4G015 FA02 FB01 FC02 FC07

Claims (11)

[Claims] 1. A scribing device for cutting a workpiece by vibrating a cutter, comprising: a scribing main body having the cutter and a vibration generating member generating vibration; and applying a load to the scribing main body;
A weight that prevents the cutter from floating from the work; and a load applying unit that transmits a load of the weight to the scribe body using a magnetic force, wherein the weight moves in a direction of vibration of the vibration generating member. Scribe device characterized by the above-mentioned. 2. The scribing apparatus according to claim 1, wherein said load applying means is provided on each of said weight and said scribe main body and comprises a pair of load magnets repelling each other. 3. The scribing device according to claim 1, wherein a spring is interposed between the weight and the load applying means or between the load applying means and the scribe main body. 4. The scribing device according to claim 3, wherein the spring comprises a leaf spring attached to a weight, and the load magnet is attached to the leaf spring. 5. The scribe main body and the weight are attached to a base via a linear guide device so as to be capable of linearly moving in the direction of vibration of the vibration generating member. A scribing device according to item 1. 6. The scribing apparatus according to claim 1, further comprising a static load adjusting unit that adjusts a static load applied to the work from the cutter using a magnetic force. 7. The scribing apparatus according to claim 6, wherein said static load adjusting means is provided on each of said scribing body and said base and comprises a pair of levitating magnets repelling each other. 8. The scribing device according to claim 7, further comprising a height adjusting mechanism for adjusting a height of the levitating magnet provided on the base. 9. The scribing apparatus according to claim 7, wherein the levitating magnet provided on the base is made of an electromagnet whose magnetic force can be adjusted. 10. The scribing apparatus according to claim 1, further comprising mass changing means for changing a mass of said weight or said scribe main body. 11. A scribing device for cutting a workpiece by vibrating a cutter, comprising: a scribing main body having the cutter and a vibration generating member generating vibration; and applying a load to the scribing main body.
An elastic member that prevents the cutter from floating from the work; and a load applying unit that is provided between the elastic member and the scribe main body and that transmits a load of the elastic member to the scribe main body using a magnetic force. A scribe device characterized by the above-mentioned.