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JP2000357755A - Package for high-frequency device - Google Patents

Package for high-frequency device

Info

Publication number
JP2000357755A
JP2000357755A JP16817399A JP16817399A JP2000357755A JP 2000357755 A JP2000357755 A JP 2000357755A JP 16817399 A JP16817399 A JP 16817399A JP 16817399 A JP16817399 A JP 16817399A JP 2000357755 A JP2000357755 A JP 2000357755A
Authority
JP
Japan
Prior art keywords
package
connector
coaxial connector
coaxial
inner core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP16817399A
Other languages
Japanese (ja)
Inventor
Noboru Kubo
昇 久保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Metal SMI Electronics Device Inc
Original Assignee
Sumitomo Metal SMI Electronics Device Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal SMI Electronics Device Inc filed Critical Sumitomo Metal SMI Electronics Device Inc
Priority to JP16817399A priority Critical patent/JP2000357755A/en
Publication of JP2000357755A publication Critical patent/JP2000357755A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/58Structural electrical arrangements for semiconductor devices not otherwise provided for
    • H01L2223/64Impedance arrangements
    • H01L2223/66High-frequency adaptations
    • H01L2223/6605High-frequency electrical connections
    • H01L2223/6616Vertical connections, e.g. vias
    • H01L2223/6622Coaxial feed-throughs in active or passive substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item

Landscapes

  • Coupling Device And Connection With Printed Circuit (AREA)

Abstract

PROBLEM TO BE SOLVED: To eliminate reflection of a signal due to impedance mismatching at a bonding part and thereby improve transmission characteristics, by extending the top end of a coaxial connector close to a semiconductor chip in a package cavity and forming a pad for wire-bonding on the center core and on the outer conductor, respectively. SOLUTION: A coaxial cable 32 is mounted on a package from its outside via a coaxial connector 30. The coaxial connector 30 is extended to the package inside to form a top end member 50 with the center core 34 and the outer conductor 42 of the connector. The top end of the center core 34 of the connector is connected to a semiconductor chip 12 of a high-frequency device by a bonding wire 24. In the output side, the signal is transmitted from the semiconductor chip 12 to an external terminal via a substrate transmission line 52. By such means, reflection of a signal due to impedance mismatching at the bonding is eliminated, thereby improving the transmission characteristics of the overall line.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、光/電気通信分野
において用いられる高周波デバイス用パッケージ、特に
高周波信号の伝送効率を高めた高周波デバイス用パッケ
ージに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a package for a high-frequency device used in the optical / telecommunications field, and more particularly to a package for a high-frequency device with improved transmission efficiency of a high-frequency signal.

【0002】[0002]

【従来の技術】図1は、従来の高周波デバイスを収容し
たパッケージ構造をその断面でもって示す模式的説明図
である。図中、全体を金属製としたパッケージ本体 (以
下、単にパッケージ) 10には半導体チップ12が収容され
ており、この半導体チップ12への外部からの信号入力お
よび外部への信号出力は、伝送線路基板である絶縁体1
4、16にそれぞれ設けられた導体回路を通して外部リー
ド18、20を介して行われる。図示例ではプリント基板(P
WB)22 が一方の外部リード18に接続されている。符号24
はボンディングワイヤを、26は半導体チップ12を載置す
る支持台を示す。
2. Description of the Related Art FIG. 1 is a schematic explanatory view showing a cross section of a conventional package structure accommodating a high-frequency device. In the figure, a semiconductor chip 12 is accommodated in a package body (hereinafter simply referred to as a package) 10 entirely made of metal, and an external signal input to the semiconductor chip 12 and an external signal output are transmitted through a transmission line. Substrate insulator 1
The operation is performed via external leads 18 and 20 through conductor circuits provided in 4 and 16, respectively. In the example shown, the printed circuit board (P
WB) 22 is connected to one external lead 18. Code 24
Denotes a bonding wire, and 26 denotes a support base on which the semiconductor chip 12 is mounted.

【0003】図1に示すような全体を金属製としたパッ
ケージ10においては、例えば2.5GHzのような高周波の信
号が通過する配線 (高速信号線) 用の伝送線路基板とし
て凸型の絶縁体14、16が採用されている。この場合、入
力側では、外部リード18によって、プリント配線基板22
上の配線とパッケージを貫通して設けられた凸型絶縁体
14上の配線とを接続している。そして、この凸型絶縁体
上の配線を通して、パッケージ内部へと信号が伝達する
構造となっている。出力側でも同様である。
In a package 10 made entirely of metal as shown in FIG. 1, a convex insulator 14 is used as a transmission line substrate for a wiring (high-speed signal line) through which a high-frequency signal such as 2.5 GHz passes. , 16 are employed. In this case, on the input side, the printed circuit board 22 is
A convex insulator provided through the above wiring and package
Connected to the wiring on 14. Then, a signal is transmitted to the inside of the package through the wiring on the convex insulator. The same applies to the output side.

【0004】しかし、さらに高周波化が進み、信号の周
波数が例えば10GHz 近くになってくると、特に、外部リ
ードとパッケージの凸型絶縁体上の配線との接続部で、
特性インピーダンス不整合等の影響により信号の反射量
が増えてくるため、図1のような構造では、損失が多く
なって、パッケージ内部あるいは、パッケージ外部へと
信号を高い伝送率で伝達することが困難となってくる。
However, as the frequency further increases and the frequency of the signal approaches, for example, about 10 GHz, especially at the connection between the external lead and the wiring on the convex insulator of the package,
Since the amount of signal reflection increases due to the influence of characteristic impedance mismatch and the like, the structure shown in FIG. 1 causes a large loss, and the signal can be transmitted to the inside or outside of the package at a high transmission rate. It becomes difficult.

【0005】そこで、このような周波数帯域の信号を扱
うパッケージでは、図2、3に示すように同軸コネクタ
をパッケージに予め取り付け、これを介して同軸ケーブ
ルに接続し、高周波数化したときの電界の影響を排除し
た構造が提案されている。
Therefore, in a package for handling signals in such a frequency band, a coaxial connector is attached to the package in advance as shown in FIGS. A structure that eliminates the influence of the above has been proposed.

【0006】図2は、従来の同軸コネクタ付きパッケー
ジにおける同軸ケーブルとパッケージとの接続の形態の
模式的説明図であって、図3(a) はその一部の拡大図で
あり、図3(b) はさらに同軸コネクタだけの拡大した模
式的断面図である。
FIG. 2 is a schematic explanatory view showing a form of connection between a coaxial cable and a package in a conventional package with a coaxial connector, and FIG. 3A is an enlarged view of a part of FIG. b) is an enlarged schematic sectional view of only the coaxial connector.

【0007】なお、かかるパッケージは、同軸コネクタ
30を備えている点を除いて、図1のパッケージ構造に同
じであって、図1ないし3において同一部材は同一符号
でもって示す。図2の信号の出側は図1のような凸型絶
縁体を備えているが、これは信号の入側を同一に構成し
てもよいことはもちろんである。
The package is a coaxial connector.
1. Except for having 30, it is the same as the package structure of FIG. 1, and in FIGS. The output side of the signal shown in FIG. 2 is provided with the convex insulator as shown in FIG. 1, but it goes without saying that the input side of the signal may have the same configuration.

【0008】図2においては、同軸ケーブル32は同軸コ
ネクタ30を介してパッケージ本体10に取付けられ、図3
(a) 、(b) の拡大図によって一層明らかなように、同軸
コネクタ30の先端部を構成するコネクタ内芯34は、その
周囲に設けた絶縁体36とともにパッケージ内部に伸びて
いるが、そのようなコネクタ内芯34はパッケージ内に予
め設けられた伝送線路基板38上の配線に導体ペーストに
よって直接に接続される。図中、この導体ペーストによ
る接合部40は黒く塗りつぶして示す。この伝送線路基板
38上の配線はその他端においてボンディングワイヤ24に
よって半導体チップ12などの高周波デバイスに接続され
る。
In FIG. 2, a coaxial cable 32 is attached to the package body 10 via a coaxial connector 30, and FIG.
As is clear from the enlarged views of (a) and (b), the connector inner core 34 constituting the distal end of the coaxial connector 30 extends inside the package together with the insulator 36 provided therearound. Such a connector inner core 34 is directly connected to a wiring on a transmission line substrate 38 provided in advance in the package by a conductor paste. In the drawing, the joining portion 40 made of the conductor paste is shown in black. This transmission line board
The wiring on 38 is connected to a high-frequency device such as the semiconductor chip 12 by a bonding wire 24 at the other end.

【0009】[0009]

【発明が解決しようとする課題】しかしながら、かかる
構造の同軸コネクタ付きパッケージでも、高周波信号を
低損失に、反射をおさえながら伝達することはむずかし
い。
However, even with a package with a coaxial connector having such a structure, it is difficult to transmit a high-frequency signal with low loss while suppressing reflection.

【0010】すなわち、上述のような従来例では、パッ
ケージ本体10の金属製の側壁に同軸コネクタ30を設置
し、同軸コネクタ30のコネクタ内芯34をパッケージ内部
において伝送線路基板38へ接続した構造となっている
が、同軸ケーブルを受け入れる同軸コネクタのパッケー
ジ内の先端とパッケージ内部の伝送線路基板との接合部
において、特性インピーダンス不整合による信号の反射
が生じるため、十分な特性を得ることは、構造上困難で
ある。
That is, in the conventional example as described above, the coaxial connector 30 is installed on the metal side wall of the package body 10, and the connector inner core 34 of the coaxial connector 30 is connected to the transmission line substrate 38 inside the package. However, at the junction between the end of the coaxial connector that receives the coaxial cable inside the package and the transmission line substrate inside the package, signal reflection occurs due to characteristic impedance mismatch, so it is necessary to obtain sufficient characteristics. It is difficult.

【0011】また、同軸コネクタのコネクタ内芯の先端
と伝送線路基板との接合には、例えばAuSnなどのろう材
が使用されるが、位置精度を維持してそのような接合を
行うことは困難である。
In addition, a brazing material such as AuSn is used for joining the tip of the inner core of the coaxial connector to the transmission line substrate, but it is difficult to perform such joining while maintaining positional accuracy. It is.

【0012】ここに、本発明の課題は、今後ますます高
周波数化する光/電気通信分野において用いられる電子
機器用の高周波デバイス用パッケージを提供することで
ある。本発明のより具体的な課題は、周波数が10GHz 以
上の高周波数信号であっても高い伝送効率でもって信号
伝達が可能となる高周波デバイス用パッケージを提供す
ることである。
It is an object of the present invention to provide a high-frequency device package for electronic equipment used in the field of optical / telecommunications, which will have higher and higher frequencies in the future. A more specific object of the present invention is to provide a high-frequency device package that can transmit a signal with a high transmission efficiency even with a high-frequency signal having a frequency of 10 GHz or more.

【0013】[0013]

【課題を解決するための手段】本発明者は、かかる課題
解決のために種々検討を重ね、下記のごとき発明を完成
した。
Means for Solving the Problems The present inventor has conducted various studies to solve the above problems, and has completed the following invention.

【0014】つまり、本発明は、同軸ケーブル接続用の
同軸コネクタを取付けたパッケージであって、このパッ
ケージ側の同軸コネクタの先端部をコネクタ内芯と外導
体とから構成し、この先端部をパッケージのキャビティ
内にまで延長したことを特徴とする高周波デバイス用パ
ッケージである。
That is, the present invention relates to a package to which a coaxial connector for connecting a coaxial cable is attached, wherein the distal end of the coaxial connector on the package side is composed of a connector inner core and an outer conductor, and this distal end is packaged. A high-frequency device package extending into the cavity.

【0015】本発明の好適態様によれば、パッケージの
キャビティ内にまで延長した同軸コネクタの先端部にお
いて、該先端部を構成するコネクタ内芯と外導体とにそ
れぞれワイヤボンデング用パッドを形成してもよい。
According to a preferred aspect of the present invention, a wire bonding pad is formed on each of a connector inner core and an outer conductor constituting the distal end portion of the coaxial connector extending into the cavity of the package. You may.

【0016】すなわち、本発明によれば、パッケージ内
にまで同軸コネクタを延長させ、その延長部、つまり先
端部をコネクタ内芯とその外周囲に絶縁体を介して同軸
的に設けた外導体とから構成し、そのときコネクタ内芯
の先端部を直接に半導体チップに接続するのである。し
たがって、外部の同軸ケーブルから内部のデバイスに至
るまでに接続部が少なくなり、接続部のインピーダンス
不整合などの問題を予め回避できる。
That is, according to the present invention, the coaxial connector is extended to the inside of the package, and the extended portion, that is, the end portion, is connected to the inner conductor of the connector and the outer conductor coaxially provided around the outer periphery of the connector via an insulator. In this case, the tip of the inner core of the connector is directly connected to the semiconductor chip. Therefore, the number of connection portions from the external coaxial cable to the internal device is reduced, and problems such as impedance mismatch of the connection portion can be avoided in advance.

【0017】また、本発明によれば、上述のようにパッ
ケージのキャビティ内にまで延在させた同軸コネクタの
先端部をそれぞれ構成するコネクタ内芯と外導体にそれ
ぞれワイヤボンデング用パッドを形成すると、高周波デ
バイスとの接続も一層容易となる。
Further, according to the present invention, as described above, a wire bonding pad is formed on each of the connector inner core and the outer conductor constituting the distal end of the coaxial connector extended into the cavity of the package. Connection with a high-frequency device is further facilitated.

【0018】すなわち、コネクタ内芯 (信号線) に設け
たパッドの左右両側または片側の外導体 (接地線) 側
に、好ましくは左右対称位置にそれぞれ接地用のパッド
を設けると、接地用のパッドが片側だけの場合に比べ
て、コネクタ内芯のパッドから接地用のパッドへの電磁
界の分布の変化を低減でき、かかる態様のパッケージは
より高い高周波信号を扱うデバイス用に適する。
That is, when the grounding pads are provided on the left and right sides of the pad provided on the inner core of the connector (signal line) or on the outer conductor (grounding line) side on one side, preferably at symmetrical positions, the grounding pad is provided. In this case, the change in the distribution of the electromagnetic field from the pad in the inner core of the connector to the pad for grounding can be reduced as compared with the case where only one side is used.

【0019】[0019]

【発明の実施の形態】次に、本発明の実施例を示す図面
を参照して本発明の作用効果についてさらに詳述する。
Next, the operation and effect of the present invention will be described in more detail with reference to the drawings showing an embodiment of the present invention.

【0020】図4は、本発明にかかるパッケージの模式
的説明図であり、図4(a) はその平面図、図4(b) は縦
断面図である。なお、図1〜図3と同一部材は同一符号
でもって示す。
FIG. 4 is a schematic explanatory view of a package according to the present invention. FIG. 4 (a) is a plan view and FIG. 4 (b) is a longitudinal sectional view. 1 to 3 are denoted by the same reference numerals.

【0021】図4(a) 、(b) において、同軸ケーブル32
は同軸コネクタ30を介して外側からパッケージに取り付
けられる。本発明の場合には、パッケージ内部にまで同
軸コネクタ30を延設してある。そのため、コネクタ内芯
34と外導体42とがその内部における先端部50を構成して
いる。このときコネクタ内芯34はその先端においボンデ
ィングワイヤ24によって高周波デバイスである半導体チ
ップ12と接続されている。図示例では、信号の出力側に
おいては信号は、半導体チップ12からワイヤボンディン
グによって伝送線路基板52を経て外部端子54に送られて
いるが、出力側においても上述のような本発明にかかる
同軸コネクタを設けてもよい。コネクタ内芯34は電気導
体から構成され、同じく電気導体製の外導体42からは絶
縁されている。外導体42はパッケージ側壁から延設され
ていてもよい。
4 (a) and 4 (b), the coaxial cable 32
Is attached to the package from the outside via the coaxial connector 30. In the case of the present invention, the coaxial connector 30 extends to the inside of the package. Therefore, the inner core of the connector
The outer conductor 42 and the outer conductor 42 constitute a distal end portion 50 therein. At this time, the connector inner core 34 is connected to the semiconductor chip 12 which is a high-frequency device by the bonding wire 24 at the tip. In the illustrated example, on the output side of the signal, the signal is sent from the semiconductor chip 12 to the external terminal 54 via the transmission line substrate 52 by wire bonding, but also on the output side, the coaxial connector according to the present invention as described above. May be provided. The connector inner core 34 is made of an electric conductor, and is insulated from an outer conductor 42 also made of an electric conductor. The outer conductor 42 may extend from the package side wall.

【0022】このように本発明によれば、同軸コネクタ
のコネクタ内芯がそのまま同軸状で半導体チップなどの
ような高周波デバイスに直接に接続されるため、途中の
回路を省略可能で、そのような回路における特性インピ
ーダンス不整合などの問題を最小とすることができ、伝
送率の低下はほどんど見られない。本例では信号の入側
にのみ同軸コネクタを設けた例を示すが、信号出側も同
様に構成してもよい。
As described above, according to the present invention, the inner core of the coaxial connector is directly coaxial and directly connected to a high-frequency device such as a semiconductor chip, so that an intermediate circuit can be omitted. Problems such as characteristic impedance mismatch in the circuit can be minimized, and a decrease in transmission rate is hardly observed. In this example, an example is shown in which a coaxial connector is provided only on the signal input side, but the signal output side may be similarly configured.

【0023】図5は、別の変更例を示すもので、図5
(a) はパッケージの同軸コネクタの接続部の部分縦断面
図であり、図5(b) はその横部分断面図であり、そして
図5(c) は同軸コネクタの先端部の略式斜視図であり、
そして、図5(d) は同じく略式断面図である。
FIG. 5 shows another modification.
5 (a) is a partial longitudinal sectional view of a connection portion of the coaxial connector of the package, FIG. 5 (b) is a transverse partial sectional view thereof, and FIG. 5 (c) is a schematic perspective view of a distal end portion of the coaxial connector. Yes,
FIG. 5D is a schematic sectional view of the same.

【0024】図5の場合には、同軸コネクタの外導体42
についても接地線のためのワイヤボンディング用のパッ
ド部が左右対称に形成されている。すなわち、図5(a)
は、縦断面図を示すが、コネクタ内芯34の先端にワイヤ
ボンディング用パッド58が設けられており、第5(b) か
らも明らかなように、外導体42にも同様にワイヤボンデ
ィング用パッド60が設けられている。
In the case of FIG. 5, the outer conductor 42 of the coaxial connector is used.
Also, the pad portion for wire bonding for the ground line is formed symmetrically. That is, FIG.
Shows a longitudinal sectional view, in which a wire bonding pad 58 is provided at the tip of the connector inner core 34. As is clear from FIG. 5 (b), the outer conductor 42 is similarly provided with a wire bonding pad. There are 60 provided.

【0025】パッド58、60は予めコネクタ内芯34、外導
体42にそれぞれ形成されているが、場合によっては同軸
コネクタをパッケージに取付けてから、例えば、ロウ付
け等により取付けてもよい。
The pads 58 and 60 are formed in advance on the inner core 34 and the outer conductor 42 of the connector. However, in some cases, the coaxial connector may be attached to the package and then attached by, for example, brazing.

【0026】かかる態様によれば、同軸コネクタのコネ
クタ内芯は半導体チップに接続する直前まで同軸状に構
成されることにより、さらなる高周波数化に対しても伝
送効率は改善される。
According to this aspect, the inner core of the coaxial connector is coaxial until immediately before connection to the semiconductor chip, so that the transmission efficiency is improved even with a higher frequency.

【0027】なお、本発明において同軸ケーブルと同軸
コネクタとの接続、同軸コネクタとパッケージとの取付
けの形態等については、例えば従来のものと同様にして
行えばよく、特に制限されない。
In the present invention, the connection between the coaxial cable and the coaxial connector, the form of attachment between the coaxial connector and the package, and the like may be performed, for example, in the same manner as the conventional one, and are not particularly limited.

【0028】[0028]

【発明の効果】以上説明してきたように、本発明によれ
ば、同軸コネクタの先端部をパッケージキャビティ内の
半導体チップの近くまで延長し、この同軸コネクタの先
端部を構成するコネクタ内芯と外導体 (接地用) とにワ
イヤボンディング用のパッドを形成する。これにより、
従来の同軸コネクタ付きパッケージに見られた同軸コネ
クタのコネクタ内芯の先端と伝送線路基板との接合部が
なくなり、この接合部でのインピーダンス不整合による
信号の反射がなくなる。
As described above, according to the present invention, the distal end of the coaxial connector is extended to the vicinity of the semiconductor chip in the package cavity, and the inner and outer cores of the connector constituting the distal end of the coaxial connector are extended. Form a wire bonding pad with the conductor (for grounding). This allows
The joint between the transmission line substrate and the tip of the inner core of the coaxial connector as seen in a conventional package with a coaxial connector is eliminated, and signal reflection due to impedance mismatch at this joint is eliminated.

【0029】その結果、線路全体の伝送特性が改善され
るばかりでなく、次のようなすぐれた利益が得られる。 (i) 本発明によれば、同軸コネクタの先端と伝送線路基
板との接合がなくなり、伝送線路基板それ自体を省略で
き、構造がよりシンプルになる。 (ii) 10GHz以上の周波数の信号の伝送効率を高めること
ができ、今後の光/ 電気通信の分野における高周波数化
に十分対応できるパッケージが得られる。
As a result, not only the transmission characteristics of the entire line are improved, but also the following excellent benefits are obtained. (i) According to the present invention, the connection between the end of the coaxial connector and the transmission line substrate is eliminated, the transmission line substrate itself can be omitted, and the structure becomes simpler. (ii) It is possible to improve the transmission efficiency of signals with a frequency of 10 GHz or more, and obtain a package that can sufficiently cope with higher frequencies in the field of optical / telecommunications in the future.

【0030】したがって、本発明によれば、構造がより
簡単で製造も容易なパッケージが得られ、特に10GHz 以
上の高周波数の信号を扱う高周波デバイス用として有望
であって、光/電気通信の分野における本発明の実際上
の意義は大きい。
Therefore, according to the present invention, it is possible to obtain a package having a simpler structure and easier to manufacture, and is particularly promising for a high-frequency device for handling a signal of a high frequency of 10 GHz or more, and is in the field of optical / telecommunications. The practical significance of the present invention is great.

【図面の簡単な説明】[Brief description of the drawings]

【図1】従来のパッケージ構造の断面を示す模式的説明
図である。
FIG. 1 is a schematic explanatory view showing a cross section of a conventional package structure.

【図2】従来の同軸コネクタ付きパッケージ構造の同じ
く断面を示す模式的説明図である。
FIG. 2 is a schematic explanatory view showing the same cross section of a conventional package structure with a coaxial connector.

【図3】図3(a) 、(b) は、同じく従来の別のパッケー
ジ構造の同軸コネクタ先端部の拡大図である。
FIGS. 3A and 3B are enlarged views of a tip portion of a coaxial connector having another conventional package structure.

【図4】図4(a) 、(b) は、本発明にかかる同軸コネク
タ付きパッケージの構造のそれぞれ平面図および断面図
による模式的説明図である。
FIGS. 4 (a) and 4 (b) are schematic illustrations of a structure of a package with a coaxial connector according to the present invention, which are a plan view and a sectional view, respectively.

【図5】図5(a) 、(b) 、(c) 、(d) は、本発明にかか
る同軸コネクタ付きパッケージにおける同軸コネクタの
先端部の接続部のそれぞれ縦断面図および横断面図なら
びに先端部の斜視図および断面図である。
5 (a), 5 (b), 5 (c) and 5 (d) are a longitudinal sectional view and a transverse sectional view, respectively, of a connection portion at a tip end of a coaxial connector in a package with a coaxial connector according to the present invention. It is the perspective view and sectional drawing of a front-end | tip part.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 同軸ケーブル接続用の同軸コネクタを取
付けたパッケージであって、該パッケージ側の同軸コネ
クタの先端部をコネクタ内芯と絶縁体を介して該コネク
タ内芯を外囲するように設けた外導体とから構成し、該
先端部をパッケージのキャビティ内にまで延長したこと
を特徴とする高周波デバイス用パッケージ。
1. A package to which a coaxial connector for connecting a coaxial cable is attached, wherein a distal end of the coaxial connector on the package side is provided so as to surround the inner core of the connector via an inner core of the connector and an insulator. A high-frequency device package comprising:
【請求項2】 パッケージ内における前記先端部を構成
するコネクタ内芯と外導体にそれぞれワイヤボンデング
用パッドを形成したことを特徴とする請求項1記載の高
周波デバイス用パッケージ。
2. The high-frequency device package according to claim 1, wherein a wire bonding pad is formed on each of an inner core and an outer conductor of the connector constituting the tip portion in the package.
【請求項3】 前記コネクタ内芯とパッケージ内に収容
される半導体チップとを直接にワイヤボンディングによ
り接続する請求項1または2記載の高周波デバイス用パ
ッケージ。
3. The high-frequency device package according to claim 1, wherein the inner core of the connector and the semiconductor chip housed in the package are directly connected by wire bonding.
JP16817399A 1999-06-15 1999-06-15 Package for high-frequency device Withdrawn JP2000357755A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16817399A JP2000357755A (en) 1999-06-15 1999-06-15 Package for high-frequency device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16817399A JP2000357755A (en) 1999-06-15 1999-06-15 Package for high-frequency device

Publications (1)

Publication Number Publication Date
JP2000357755A true JP2000357755A (en) 2000-12-26

Family

ID=15863159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16817399A Withdrawn JP2000357755A (en) 1999-06-15 1999-06-15 Package for high-frequency device

Country Status (1)

Country Link
JP (1) JP2000357755A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003007883A (en) * 2001-06-26 2003-01-10 Kyocera Corp Package for storing semiconductor element and semiconductor device
WO2008032150A2 (en) * 2006-09-15 2008-03-20 Nokia Corporation Simultaneous bidirectional cable interface
EP3297093A1 (en) * 2016-09-16 2018-03-21 Rosenberger Hochfrequenztechnik GmbH & Co. KG Connector for connecting an optical fiber and an electrical conductor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003007883A (en) * 2001-06-26 2003-01-10 Kyocera Corp Package for storing semiconductor element and semiconductor device
WO2008032150A2 (en) * 2006-09-15 2008-03-20 Nokia Corporation Simultaneous bidirectional cable interface
WO2008032150A3 (en) * 2006-09-15 2008-06-26 Nokia Corp Simultaneous bidirectional cable interface
EP3297093A1 (en) * 2016-09-16 2018-03-21 Rosenberger Hochfrequenztechnik GmbH & Co. KG Connector for connecting an optical fiber and an electrical conductor
WO2018050322A1 (en) * 2016-09-16 2018-03-22 Rosenberger Hochfrequenztechnik Gmbh & Co. Kg Plug-in connector for connecting an optical fibre and an electrical conductor
US10826150B2 (en) 2016-09-16 2020-11-03 Rosenberger Hochfrequenztechnik Gmbh & Co. Kg Connector for connecting an optical fiber and an electrical conductor

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