Nothing Special   »   [go: up one dir, main page]

IN2015DN02361A - - Google Patents

Info

Publication number
IN2015DN02361A
IN2015DN02361A IN2361DEN2015A IN2015DN02361A IN 2015DN02361 A IN2015DN02361 A IN 2015DN02361A IN 2361DEN2015 A IN2361DEN2015 A IN 2361DEN2015A IN 2015DN02361 A IN2015DN02361 A IN 2015DN02361A
Authority
IN
India
Prior art keywords
copper
aluminum
intermetallic
bonding
interface
Prior art date
Application number
Other languages
English (en)
Inventor
Nobuyuki Terasaki
Yosliiyuki NAGATOMO
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Publication of IN2015DN02361A publication Critical patent/IN2015DN02361A/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/01Layered products comprising a layer of metal all layers being exclusively metallic
    • B32B15/017Layered products comprising a layer of metal all layers being exclusively metallic one layer being formed of aluminium or an aluminium alloy, another layer being formed of an alloy based on a non ferrous metal other than aluminium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/22Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded
    • B23K20/233Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded without ferrous layer
    • B23K20/2333Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded without ferrous layer one layer being aluminium, magnesium or beryllium
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/36Electric or electronic devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/08Non-ferrous metals or alloys
    • B23K2103/10Aluminium or alloys thereof
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/08Non-ferrous metals or alloys
    • B23K2103/12Copper or alloys thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/433Auxiliary members in containers characterised by their shape, e.g. pistons
    • H01L23/4334Auxiliary members in encapsulations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/1266O, S, or organic compound in metal component
    • Y10T428/12667Oxide of transition metal or Al

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Laminated Bodies (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
IN2361DEN2015 2012-09-21 2013-09-18 IN2015DN02361A (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012208578 2012-09-21
PCT/JP2013/075158 WO2014046130A1 (ja) 2012-09-21 2013-09-18 アルミニウム部材と銅部材との接合構造

Publications (1)

Publication Number Publication Date
IN2015DN02361A true IN2015DN02361A (de) 2015-09-04

Family

ID=50341440

Family Applications (1)

Application Number Title Priority Date Filing Date
IN2361DEN2015 IN2015DN02361A (de) 2012-09-21 2013-09-18

Country Status (8)

Country Link
US (1) US10011093B2 (de)
EP (1) EP2898979B1 (de)
JP (1) JP5549958B2 (de)
KR (1) KR102051697B1 (de)
CN (1) CN104661785B (de)
IN (1) IN2015DN02361A (de)
TW (1) TWI589382B (de)
WO (1) WO2014046130A1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IN2015DN02361A (de) * 2012-09-21 2015-09-04 Mitsubishi Materials Corp
IN2015DN03283A (de) 2012-10-16 2015-10-09 Mitsubishi Materials Corp
JP6428327B2 (ja) * 2015-02-04 2018-11-28 三菱マテリアル株式会社 ヒートシンク付パワーモジュール用基板、パワーモジュール、及び、ヒートシンク付パワーモジュール用基板の製造方法
JP6572810B2 (ja) * 2016-03-15 2019-09-11 三菱マテリアル株式会社 接合体の製造方法、及び、パワーモジュール用基板の製造方法
US9875933B2 (en) 2016-06-24 2018-01-23 Infineon Technologies Ag Substrate and method including forming a via comprising a conductive liner layer and conductive plug having different microstructures
CN106077937B (zh) * 2016-06-24 2018-08-03 西安理工大学 一种铝-铜双金属复合材料的制备方法
US9960229B2 (en) 2016-06-24 2018-05-01 Infineon Technologies Ag Semiconductor device including a LDMOS transistor
US10050139B2 (en) 2016-06-24 2018-08-14 Infineon Technologies Ag Semiconductor device including a LDMOS transistor and method
US10622284B2 (en) * 2016-06-24 2020-04-14 Infineon Technologies Ag LDMOS transistor and method
US10242932B2 (en) 2016-06-24 2019-03-26 Infineon Technologies Ag LDMOS transistor and method
CN106475679B (zh) * 2016-11-30 2018-07-27 山东大学 一种铜与铝合金的无中间层非连续加压真空扩散连接工艺
CN106583914B (zh) * 2016-12-23 2019-03-05 浙江康盛股份有限公司 一种铜铝连接件面-面渗溶接工艺
KR101925119B1 (ko) * 2016-12-23 2019-02-27 저지앙 캉성 컴퍼니 리미티드 구리 알루미늄 연결부재의 면-면 삼투용접 공정 및 제조방법
JP6819385B2 (ja) * 2017-03-17 2021-01-27 三菱マテリアル株式会社 半導体装置の製造方法
WO2018180159A1 (ja) * 2017-03-29 2018-10-04 三菱マテリアル株式会社 ヒートシンク付き絶縁回路基板の製造方法
JP6972627B2 (ja) * 2017-04-05 2021-11-24 株式会社アイシン カーボンナノチューブ複合体の製造方法及び積層体
US11322424B2 (en) * 2018-03-28 2022-05-03 Mitsubishi Materials Corporation Insulation circuit board with heat sink
JP7342371B2 (ja) * 2019-02-14 2023-09-12 三菱マテリアル株式会社 絶縁回路基板、及び、絶縁回路基板の製造方法
JP2022169003A (ja) 2021-04-27 2022-11-09 三菱マテリアル株式会社 ヒートシンク、および、ヒートシンク一体型絶縁回路基板
TWI800244B (zh) * 2022-01-28 2023-04-21 奇鋐科技股份有限公司 具有熱管之散熱器總成

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04315524A (ja) 1991-04-10 1992-11-06 Kobe Steel Ltd 銅材とアルミニウム材との接合用部材及びその製造方法
JP3240211B2 (ja) 1993-04-12 2001-12-17 旭化成株式会社 銅−アルミニウム異種金属継手材
TW252061B (en) 1994-07-20 1995-07-21 Dong-Hann Chang Process of undergoing diffusion bonding under low pressure
JPH08255973A (ja) 1995-03-17 1996-10-01 Toshiba Corp セラミックス回路基板
US6033787A (en) 1996-08-22 2000-03-07 Mitsubishi Materials Corporation Ceramic circuit board with heat sink
US6124635A (en) 1997-03-21 2000-09-26 Honda Giken Kogyo Kabushiki Kaisha Functionally gradient integrated metal-ceramic member and semiconductor circuit substrate application thereof
JPH11156995A (ja) 1997-09-25 1999-06-15 Daido Steel Co Ltd クラッド板とこれを用いた電池用ケース並びにこれらの製造方法
JP3752830B2 (ja) 1998-03-31 2006-03-08 マツダ株式会社 接合金属部材及び該部材の接合方法
JP2001148451A (ja) 1999-03-24 2001-05-29 Mitsubishi Materials Corp パワーモジュール用基板
JP2001252772A (ja) 2000-03-10 2001-09-18 Showa Denko Kk アルミニウム−銅クラッド材およびその製造方法
JP2002064169A (ja) 2000-08-21 2002-02-28 Denki Kagaku Kogyo Kk 放熱構造体
JP2002203942A (ja) 2000-12-28 2002-07-19 Fuji Electric Co Ltd パワー半導体モジュール
JP2002231865A (ja) 2001-02-02 2002-08-16 Toyota Industries Corp ヒートシンク付絶縁基板、接合部材及び接合方法
JP2003078086A (ja) * 2001-09-04 2003-03-14 Kubota Corp 半導体素子モジュール基板の積層構造
JP2003092383A (ja) 2001-09-19 2003-03-28 Hitachi Ltd パワー半導体装置およびそのヒートシンク
JP2003258170A (ja) 2002-02-26 2003-09-12 Akane:Kk ヒートシンク
JP3917503B2 (ja) 2002-04-05 2007-05-23 住友精密工業株式会社 アルミニウム部材と銅部材の接合方法及びその接合構造物
TW540298B (en) 2002-09-04 2003-07-01 Loyalty Founder Entpr Co Ltd Composite board forming method for heat sink
JP3938079B2 (ja) 2003-03-20 2007-06-27 三菱マテリアル株式会社 パワーモジュール用基板の製造方法
WO2005014217A1 (ja) * 2003-08-07 2005-02-17 Sumitomo Precision Products Co., Ltd. Al-Cu接合構造物およびその製造方法
KR101108454B1 (ko) 2004-04-05 2012-01-31 미쓰비시 마테리알 가부시키가이샤 Al/AlN 접합체, 전력 모듈용 기판 및 전력 모듈, 그리고 Al/AlN 접합체의 제조 방법
JP2006100770A (ja) 2004-09-01 2006-04-13 Toyota Industries Corp 回路基板のベース板の製造方法及び回路基板のベース板並びにベース板を用いた回路基板
JP4759384B2 (ja) 2005-12-20 2011-08-31 昭和電工株式会社 半導体モジュール
JP5518339B2 (ja) * 2007-10-25 2014-06-11 三菱レイヨン株式会社 スタンパとその製造方法、成形体の製造方法、およびスタンパ用のアルミニウム原型
JP5067187B2 (ja) 2007-11-06 2012-11-07 三菱マテリアル株式会社 ヒートシンク付パワーモジュール用基板及びヒートシンク付パワーモジュール
JP4747315B2 (ja) 2007-11-19 2011-08-17 三菱マテリアル株式会社 パワーモジュール用基板及びパワーモジュール
JP5163199B2 (ja) 2008-03-17 2013-03-13 三菱マテリアル株式会社 ヒートシンク付パワーモジュール用基板及びヒートシンク付パワーモジュール
JP2010034238A (ja) * 2008-07-28 2010-02-12 Shin Kobe Electric Mach Co Ltd 配線板
JP2010137251A (ja) 2008-12-11 2010-06-24 Mitsubishi Electric Corp 金属接合体およびその製造方法
US8159821B2 (en) 2009-07-28 2012-04-17 Dsem Holdings Sdn. Bhd. Diffusion bonding circuit submount directly to vapor chamber
KR101690820B1 (ko) 2009-09-09 2016-12-28 미쓰비시 마테리알 가부시키가이샤 히트 싱크 부착 파워 모듈용 기판의 제조 방법, 히트 싱크 부착 파워 모듈용 기판 및 파워 모듈
JP4971524B2 (ja) 2009-10-26 2012-07-11 株式会社Neomaxマテリアル アルミニウム接合合金、その合金で形成された接合合金層を有するクラッド材及びアルミニウム接合複合材
CN102742008B (zh) 2010-02-05 2015-07-01 三菱综合材料株式会社 功率模块用基板及功率模块
KR101276496B1 (ko) 2010-06-08 2013-06-18 가부시키가이샤 네오맥스 마테리아르 알루미늄 구리 클래드재
CN101947689B (zh) 2010-09-21 2012-10-03 河南科技大学 铜铝复合板的连续复合成形方法及其复合成形装置
DE102010041714A1 (de) 2010-09-30 2011-08-25 Infineon Technologies AG, 85579 Leistungshalbleitermodul und Verfahren zur Herstellung eines Leistungshalbleitermoduls
JP5736807B2 (ja) 2011-02-02 2015-06-17 三菱マテリアル株式会社 ヒートシンク付パワーモジュール用基板、ヒートシンク付パワーモジュール用基板の製造方法及びパワーモジュール
JP5403129B2 (ja) 2012-03-30 2014-01-29 三菱マテリアル株式会社 パワーモジュール用基板、ヒートシンク付パワーモジュール用基板、パワーモジュール、及びパワーモジュール用基板の製造方法
IN2015DN02361A (de) 2012-09-21 2015-09-04 Mitsubishi Materials Corp

Also Published As

Publication number Publication date
US20150251382A1 (en) 2015-09-10
JP5549958B2 (ja) 2014-07-16
EP2898979B1 (de) 2019-03-06
KR102051697B1 (ko) 2019-12-03
CN104661785B (zh) 2017-05-03
CN104661785A (zh) 2015-05-27
US10011093B2 (en) 2018-07-03
TW201433392A (zh) 2014-09-01
WO2014046130A1 (ja) 2014-03-27
JP2014076486A (ja) 2014-05-01
TWI589382B (zh) 2017-07-01
EP2898979A4 (de) 2016-06-08
EP2898979A1 (de) 2015-07-29
KR20150056534A (ko) 2015-05-26

Similar Documents

Publication Publication Date Title
IN2015DN02361A (de)
IN2015DN03283A (de)
IN2014DN08073A (de)
TW201613755A (en) Bonded body, power module substrate with heat sink, heat sink, method of producing bonded body, method of producing power module substrate with heat sink and method of producing heat sink
WO2014111538A3 (de) Lotlegierungen
EP2998412A4 (de) Aluminiumlegierungsmaterial mit einzelschicht für thermisches bonden, herstellungsverfahren dafür und gebondeter aluminiumkörper mit diesem aluminiumlegierungsmaterial
EP2779237A3 (de) Chipanordnung und Verfahren zur Herstellung einer Chipanordnung
EP4047647A3 (de) Halbleiterbauelement
EP2466632A3 (de) Verfahren zur direkten Bindung von Halbleiterstrukturen und gebundene Halbleiterstrukturen, die mit diesen Verfahren gebildet werden
EP2495067A4 (de) Aluminiumbindende legierung, kaschierungsmaterial mit einer aus der legierung geformten bindelegierungsschicht und verbundmaterial mit gebundenem aluminium
WO2013130274A3 (en) Aluminum alloy with additions of scandium, zirconium and erbium
WO2014121785A9 (de) Al-GUSSLEGIERUNG
EP2733734A3 (de) Mehrfachverbindungsschichtungen zur Handhabung eines Dünnschicht-Wafers
SG10201403790XA (en) Bond Heads For Thermocompression Bonders, Thermocompression Bonders, And Methods Of Operating The Same
MY168617A (en) Bonding wire for semiconductor device
WO2014022619A8 (en) Dual solder layer for fluidic self assembly and electrical component substrate and method employing same
SG2013030143A (en) Aluminum alloy bonding wire
EP2913143A4 (de) Aluminiumlegierungslötverfahren und mit einer strömungskomponente bedecktes aluminiumlegierungselement
PH12015502149A1 (en) Silver alloy bonding wire
SG149725A1 (en) Thin semiconductor die packages and associated systems and methods
EP2786831A4 (de) Verbindung aus einer aluminiumlegierung und einer kupferlegierung sowie verbindungsverfahren dafür
WO2013137710A8 (en) Microelectronic device attachment on a reverse microelectronic package
SG11201507246VA (en) Flip chip bonder and flip chip bonding method
EP2554689A4 (de) Verbundelement auf magnesiumbasis, wärmeableitungselement und halbleitervorrichtung damit
FR2989921B1 (fr) Utilisation, dans la fabrication d'une piece composite, d'une operation de penetration, pour ameliorer la conductivite electrique transverse de la piece composite