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GB1179413A - Apparatus for Use in Vacuum Deposition of Thin Films - Google Patents

Apparatus for Use in Vacuum Deposition of Thin Films

Info

Publication number
GB1179413A
GB1179413A GB6920/66A GB692066A GB1179413A GB 1179413 A GB1179413 A GB 1179413A GB 6920/66 A GB6920/66 A GB 6920/66A GB 692066 A GB692066 A GB 692066A GB 1179413 A GB1179413 A GB 1179413A
Authority
GB
United Kingdom
Prior art keywords
light
monitor
chamber
feb
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB6920/66A
Inventor
John Rupert Davy
John Mckillop Ballantine
William Bell Allan
Herbert Morrison Runciman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales Optronics Ltd
Original Assignee
Thales Optronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Optronics Ltd filed Critical Thales Optronics Ltd
Priority to GB6920/66A priority Critical patent/GB1179413A/en
Priority to FR95133A priority patent/FR1511491A/en
Priority to CH225567A priority patent/CH463233A/en
Priority to NL6702420A priority patent/NL6702420A/xx
Priority to DE1967B0092153 priority patent/DE1623131B1/en
Publication of GB1179413A publication Critical patent/GB1179413A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4248—Feed-through connections for the hermetical passage of fibres through a package wall

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Mathematical Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1,179,413. Photo-electric process monitoring. BARR & STROUD Ltd. Feb.15, 1967 [Feb. 17, 1966] No. 6920/ 66. Heading G1A. In an apparatus for depositing thin films on an optical element in a vacuum chamber and having a process monitor glass within the chamber, fibre light guide means sealed into the chamber convey light to the process monitor, and reflected or transmitted light from it to a detector, and thus enable the changes in optical properties of the monitor, which are indicative of the progress of the process, to be observed. The fibre light guide means may be a single guide with the light traversing it in both directions, and having a beam splitting or chopping arangement, or it may comprise a pair of guides. Light is guided to and from a monitor 10, Fig. 1 by flexible guides 15, 20 the latter being positioned to collect light from the former, passing through or reflected by the monitor 10. Light from a reflector backed lamp 12 is chopped before entry into the guide which includes a heat filter 14 whereat an external photo-cell 26 takes off light to develop a chopped signal proportional to the intensity of the light incident on the monitor for the purpose of gating, and for gain controlling the received signal which may be used to control a shutter across a vapour boat. In an unchopped arrangement the detector signal is compared with the light detected from a reference lamp connected to the same supply as the source of monitoring light. A bridge circuit with coarse and fine adjustment and diode transient protection is described. Reference has been directed by the Comptroller to Specification 1,054,767.
GB6920/66A 1966-02-17 1966-02-17 Apparatus for Use in Vacuum Deposition of Thin Films Expired GB1179413A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB6920/66A GB1179413A (en) 1966-02-17 1966-02-17 Apparatus for Use in Vacuum Deposition of Thin Films
FR95133A FR1511491A (en) 1966-02-17 1967-02-16 Optical system for treatment control
CH225567A CH463233A (en) 1966-02-17 1967-02-16 Device for monitoring a physical and / or chemical process
NL6702420A NL6702420A (en) 1966-02-17 1967-02-17
DE1967B0092153 DE1623131B1 (en) 1966-02-17 1967-02-17 Device for monitoring processes for the surface treatment of optical glasses in closed containers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB6920/66A GB1179413A (en) 1966-02-17 1966-02-17 Apparatus for Use in Vacuum Deposition of Thin Films

Publications (1)

Publication Number Publication Date
GB1179413A true GB1179413A (en) 1970-01-28

Family

ID=9823271

Family Applications (1)

Application Number Title Priority Date Filing Date
GB6920/66A Expired GB1179413A (en) 1966-02-17 1966-02-17 Apparatus for Use in Vacuum Deposition of Thin Films

Country Status (5)

Country Link
CH (1) CH463233A (en)
DE (1) DE1623131B1 (en)
FR (1) FR1511491A (en)
GB (1) GB1179413A (en)
NL (1) NL6702420A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0152301A2 (en) * 1984-02-13 1985-08-21 Mitsubishi Denki Kabushiki Kaisha Apparatus for inspecting the interior of a vacuum vessel
EP0152299A2 (en) * 1984-02-09 1985-08-21 Mitsubishi Denki Kabushiki Kaisha Apparatus for executing maintenance work on the wall of vacuum vessel
FR2560381A1 (en) * 1984-02-24 1985-08-30 Leybold Heraeus Gmbh & Co Kg SPECTROPHOTOMETRY APPARATUS, PARTICULARLY FOR MEASURING THE VARIATION OF OPTICAL PROPERTIES DURING VACUUM FORMATION OF THIN FILMS ON SUBSTRATES
WO2004016820A2 (en) * 2002-08-14 2004-02-26 Oxford Instruments Plasma Technology Limited Thin film deposition apparatus

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0152299A2 (en) * 1984-02-09 1985-08-21 Mitsubishi Denki Kabushiki Kaisha Apparatus for executing maintenance work on the wall of vacuum vessel
EP0152299A3 (en) * 1984-02-09 1986-07-30 Mitsubishi Denki Kabushiki Kaisha Apparatus for executing maintenance work on the wall of vacuum vessel
EP0152301A2 (en) * 1984-02-13 1985-08-21 Mitsubishi Denki Kabushiki Kaisha Apparatus for inspecting the interior of a vacuum vessel
EP0152301A3 (en) * 1984-02-13 1986-07-23 Mitsubishi Denki Kabushiki Kaisha Apparatus for inspecting the interior of a vacuum vessel
FR2560381A1 (en) * 1984-02-24 1985-08-30 Leybold Heraeus Gmbh & Co Kg SPECTROPHOTOMETRY APPARATUS, PARTICULARLY FOR MEASURING THE VARIATION OF OPTICAL PROPERTIES DURING VACUUM FORMATION OF THIN FILMS ON SUBSTRATES
WO2004016820A2 (en) * 2002-08-14 2004-02-26 Oxford Instruments Plasma Technology Limited Thin film deposition apparatus
WO2004016820A3 (en) * 2002-08-14 2004-04-01 Oxford Instr Plasma Technology Thin film deposition apparatus

Also Published As

Publication number Publication date
DE1623131B1 (en) 1970-07-30
FR1511491A (en) 1968-01-26
CH463233A (en) 1968-09-30
NL6702420A (en) 1967-08-18

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