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CH463233A - Device for monitoring a physical and / or chemical process - Google Patents

Device for monitoring a physical and / or chemical process

Info

Publication number
CH463233A
CH463233A CH225567A CH225567A CH463233A CH 463233 A CH463233 A CH 463233A CH 225567 A CH225567 A CH 225567A CH 225567 A CH225567 A CH 225567A CH 463233 A CH463233 A CH 463233A
Authority
CH
Switzerland
Prior art keywords
monitoring
physical
chemical process
chemical
Prior art date
Application number
CH225567A
Other languages
German (de)
Inventor
Rupert Davy John
Bell Allan William
Mckillop Ballantine John
Morrison Runciman Herbert
Original Assignee
Barr & Stroud Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Barr & Stroud Ltd filed Critical Barr & Stroud Ltd
Publication of CH463233A publication Critical patent/CH463233A/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • C23C14/542Controlling the film thickness or evaporation rate
    • C23C14/545Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/8422Investigating thin films, e.g. matrix isolation method
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4248Feed-through connections for the hermetical passage of fibres through a package wall

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Mathematical Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Physical Vapour Deposition (AREA)
CH225567A 1966-02-17 1967-02-16 Device for monitoring a physical and / or chemical process CH463233A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB6920/66A GB1179413A (en) 1966-02-17 1966-02-17 Apparatus for Use in Vacuum Deposition of Thin Films

Publications (1)

Publication Number Publication Date
CH463233A true CH463233A (en) 1968-09-30

Family

ID=9823271

Family Applications (1)

Application Number Title Priority Date Filing Date
CH225567A CH463233A (en) 1966-02-17 1967-02-16 Device for monitoring a physical and / or chemical process

Country Status (5)

Country Link
CH (1) CH463233A (en)
DE (1) DE1623131B1 (en)
FR (1) FR1511491A (en)
GB (1) GB1179413A (en)
NL (1) NL6702420A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3569619D1 (en) * 1984-02-09 1989-05-24 Mitsubishi Electric Corp Apparatus for executing maintenance work on the wall of vacuum vessel
EP0152301B1 (en) * 1984-02-13 1989-04-19 Mitsubishi Denki Kabushiki Kaisha Apparatus for inspecting the interior of a vacuum vessel
DE3406645A1 (en) * 1984-02-24 1985-08-29 Leybold-Heraeus GmbH, 5000 Köln SPECTRAL PHOTOMETER ARRANGEMENT
GB0218998D0 (en) * 2002-08-14 2002-09-25 Oxford Instr Plasma Technology Thin film deposition apparatus

Also Published As

Publication number Publication date
DE1623131B1 (en) 1970-07-30
FR1511491A (en) 1968-01-26
GB1179413A (en) 1970-01-28
NL6702420A (en) 1967-08-18

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