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FR2858877B1 - Transistor bipolaire a heterojonction - Google Patents

Transistor bipolaire a heterojonction

Info

Publication number
FR2858877B1
FR2858877B1 FR0350418A FR0350418A FR2858877B1 FR 2858877 B1 FR2858877 B1 FR 2858877B1 FR 0350418 A FR0350418 A FR 0350418A FR 0350418 A FR0350418 A FR 0350418A FR 2858877 B1 FR2858877 B1 FR 2858877B1
Authority
FR
France
Prior art keywords
heterojunction
bipolar transistor
bipolar
transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0350418A
Other languages
English (en)
Other versions
FR2858877A1 (fr
Inventor
Bertrand Martinet
Michel Marty
Pascal Chevalier
Alain Chantre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR0350418A priority Critical patent/FR2858877B1/fr
Priority to US10/914,482 priority patent/US20050037587A1/en
Publication of FR2858877A1 publication Critical patent/FR2858877A1/fr
Application granted granted Critical
Publication of FR2858877B1 publication Critical patent/FR2858877B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66234—Bipolar junction transistors [BJT]
    • H01L29/66272—Silicon vertical transistors
    • H01L29/66287—Silicon vertical transistors with a single crystalline emitter, collector or base including extrinsic, link or graft base formed on the silicon substrate, e.g. by epitaxy, recrystallisation, after insulating device isolation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/0804—Emitter regions of bipolar transistors
    • H01L29/0817—Emitter regions of bipolar transistors of heterojunction bipolar transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66234—Bipolar junction transistors [BJT]
    • H01L29/66242—Heterojunction transistors [HBT]

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Bipolar Transistors (AREA)
FR0350418A 2003-08-11 2003-08-11 Transistor bipolaire a heterojonction Expired - Fee Related FR2858877B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0350418A FR2858877B1 (fr) 2003-08-11 2003-08-11 Transistor bipolaire a heterojonction
US10/914,482 US20050037587A1 (en) 2003-08-11 2004-08-09 Heterojunction bipolar transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0350418A FR2858877B1 (fr) 2003-08-11 2003-08-11 Transistor bipolaire a heterojonction

Publications (2)

Publication Number Publication Date
FR2858877A1 FR2858877A1 (fr) 2005-02-18
FR2858877B1 true FR2858877B1 (fr) 2005-10-21

Family

ID=34112880

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0350418A Expired - Fee Related FR2858877B1 (fr) 2003-08-11 2003-08-11 Transistor bipolaire a heterojonction

Country Status (2)

Country Link
US (1) US20050037587A1 (fr)
FR (1) FR2858877B1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8927357B2 (en) 2011-11-11 2015-01-06 International Business Machines Corporation Junction field-effect transistor with raised source and drain regions formed by selective epitaxy
US8921194B2 (en) * 2011-11-11 2014-12-30 International Business Machines Corporation PNP bipolar junction transistor fabrication using selective epitaxy
US8916446B2 (en) 2011-11-11 2014-12-23 International Business Machines Corporation Bipolar junction transistor with multiple emitter fingers
US9166067B2 (en) * 2012-06-12 2015-10-20 Taiwan Semiconductor Manufacturing Co., Ltd. Device layout for reference and sensor circuits
US9425269B1 (en) 2015-06-23 2016-08-23 Globalfoundries Inc. Replacement emitter for reduced contact resistance
US20190097022A1 (en) * 2017-09-28 2019-03-28 International Business Machine Corporation Method and structure to form vertical fin bjt with graded sige base doping
CN109817522B (zh) * 2019-01-31 2022-06-21 上海华虹宏力半导体制造有限公司 锗硅异质结双极型三极管器件的制造方法
US11916136B2 (en) 2022-02-25 2024-02-27 Globalfoundries U.S. Inc. Lateral bipolar junction transistors including a graded silicon-germanium intrinsic base

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2924417B2 (ja) * 1992-02-26 1999-07-26 日本電気株式会社 半導体装置
KR100275544B1 (ko) * 1995-12-20 2001-01-15 이계철 선택적 컬렉터 박막 성장을 이용한 초자기정렬 바이폴러 트랜지스터의 제조방법
FR2804247B1 (fr) * 2000-01-21 2002-04-12 St Microelectronics Sa Procede de realisation d'un transistor bipolaire a emetteur et base extrinseque auto-alignes
US6346453B1 (en) * 2000-01-27 2002-02-12 Sige Microsystems Inc. Method of producing a SI-GE base heterojunction bipolar device
US6784467B1 (en) * 2002-08-13 2004-08-31 Newport Fab, Llc Method for fabricating a self-aligned bipolar transistor and related structure
US6534372B1 (en) * 2000-11-22 2003-03-18 Newport Fab, Llc Method for fabricating a self-aligned emitter in a bipolar transistor
US6617220B2 (en) * 2001-03-16 2003-09-09 International Business Machines Corporation Method for fabricating an epitaxial base bipolar transistor with raised extrinsic base
US6927476B2 (en) * 2001-09-25 2005-08-09 Internal Business Machines Corporation Bipolar device having shallow junction raised extrinsic base and method for making the same
US6617619B1 (en) * 2002-02-04 2003-09-09 Newport Fab, Llc Structure for a selective epitaxial HBT emitter
US6586307B1 (en) * 2002-02-14 2003-07-01 Newport Fab, Llc Method for controlling an emitter window opening in an HBT and related structure
US6767798B2 (en) * 2002-04-09 2004-07-27 Maxim Integrated Products, Inc. Method of forming self-aligned NPN transistor with raised extrinsic base
US6683366B1 (en) * 2002-06-04 2004-01-27 Newport Fab, Llc Bipolar transistor and related structure
US6777302B1 (en) * 2003-06-04 2004-08-17 International Business Machines Corporation Nitride pedestal for raised extrinsic base HBT process

Also Published As

Publication number Publication date
US20050037587A1 (en) 2005-02-17
FR2858877A1 (fr) 2005-02-18

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20070430