EP2631488A3 - Vakuumpumpe - Google Patents
Vakuumpumpe Download PDFInfo
- Publication number
- EP2631488A3 EP2631488A3 EP12188584.2A EP12188584A EP2631488A3 EP 2631488 A3 EP2631488 A3 EP 2631488A3 EP 12188584 A EP12188584 A EP 12188584A EP 2631488 A3 EP2631488 A3 EP 2631488A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- pumping stage
- stage
- molecular
- pump
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005086 pumping Methods 0.000 abstract 7
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D3/00—Axial-flow pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013022216A JP6027455B2 (ja) | 2012-02-23 | 2013-02-07 | 真空ポンプ |
US13/766,918 US9422937B2 (en) | 2012-02-23 | 2013-02-14 | Vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102012003680A DE102012003680A1 (de) | 2012-02-23 | 2012-02-23 | Vakuumpumpe |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2631488A2 EP2631488A2 (de) | 2013-08-28 |
EP2631488A3 true EP2631488A3 (de) | 2016-08-17 |
EP2631488B1 EP2631488B1 (de) | 2019-12-11 |
Family
ID=47049045
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP12188584.2A Active EP2631488B1 (de) | 2012-02-23 | 2012-10-15 | Vakuumpumpe |
Country Status (4)
Country | Link |
---|---|
US (1) | US9422937B2 (de) |
EP (1) | EP2631488B1 (de) |
JP (1) | JP6027455B2 (de) |
DE (1) | DE102012003680A1 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202013005458U1 (de) * | 2013-06-15 | 2014-09-16 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
DE202013006436U1 (de) * | 2013-07-17 | 2014-10-22 | Oerlikon Leybold Vacuum Gmbh | Rotorelement für eine Vakuumpumpe |
DE102014105582A1 (de) * | 2014-04-17 | 2015-10-22 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102014118881A1 (de) * | 2014-12-17 | 2016-06-23 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
SG11201708740XA (en) * | 2015-06-08 | 2017-11-29 | Leybold Gmbh | Vacuum-pump rotor |
EP3267040B1 (de) | 2016-07-04 | 2023-12-20 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
JP7108377B2 (ja) * | 2017-02-08 | 2022-07-28 | エドワーズ株式会社 | 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法 |
CN107143506B (zh) * | 2017-07-12 | 2019-05-24 | 东北大学 | 一种多级高真空干泵 |
EP3623634B1 (de) * | 2019-08-13 | 2022-04-06 | Pfeiffer Vacuum Gmbh | Vakuumpumpe umfassend eine holweckpumpstufe und zwei seitenkanalpumpstufen |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02264196A (ja) * | 1989-04-04 | 1990-10-26 | Hitachi Ltd | ターボ真空ポンプ |
JP2002332990A (ja) * | 2001-05-09 | 2002-11-22 | Shimadzu Corp | ターボ形回転機器 |
JP2006090263A (ja) * | 2004-09-27 | 2006-04-06 | Boc Edwards Kk | 真空ポンプ |
WO2006048602A2 (en) * | 2004-11-01 | 2006-05-11 | The Boc Group Plc | Pumping arrangement |
JP2006342791A (ja) * | 2005-05-13 | 2006-12-21 | Boc Edwards Kk | 真空ポンプ |
DE60319585T2 (de) * | 2002-12-17 | 2009-03-26 | Edwards Ltd., Crawley | Vakuumpumpe |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5020969A (en) | 1988-09-28 | 1991-06-04 | Hitachi, Ltd. | Turbo vacuum pump |
GB9609281D0 (en) | 1996-05-03 | 1996-07-10 | Boc Group Plc | Improved vacuum pumps |
DE19632375A1 (de) * | 1996-08-10 | 1998-02-19 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
JPH11131198A (ja) | 1997-10-30 | 1999-05-18 | Daido Steel Co Ltd | 低摩擦焼結部材およびその製造方法 |
JP3252792B2 (ja) * | 1998-04-27 | 2002-02-04 | 株式会社島津製作所 | ターボ形真空排気装置 |
JP4579356B2 (ja) * | 1999-03-24 | 2010-11-10 | 株式会社島津製作所 | 真空排気装置 |
JP3961273B2 (ja) | 2001-12-04 | 2007-08-22 | Bocエドワーズ株式会社 | 真空ポンプ |
GB0229353D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping system and method of operating a vacuum pumping arrangement |
GB0229355D0 (en) | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement |
GB0409139D0 (en) * | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
US20070081893A1 (en) * | 2005-10-06 | 2007-04-12 | The Boc Group, Inc. | Pump apparatus for semiconductor processing |
DE102009021620B4 (de) * | 2009-05-16 | 2021-07-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
FR2980776B1 (fr) | 2011-10-03 | 2014-08-22 | Airbus Operations Sas | Nacelle d'aeronef comportant un panneau pour le traitement acoustique integrant des canaux d'air chaud et au moins un canal annulaire |
DE202013005458U1 (de) | 2013-06-15 | 2014-09-16 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
-
2012
- 2012-02-23 DE DE102012003680A patent/DE102012003680A1/de not_active Ceased
- 2012-10-15 EP EP12188584.2A patent/EP2631488B1/de active Active
-
2013
- 2013-02-07 JP JP2013022216A patent/JP6027455B2/ja active Active
- 2013-02-14 US US13/766,918 patent/US9422937B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02264196A (ja) * | 1989-04-04 | 1990-10-26 | Hitachi Ltd | ターボ真空ポンプ |
JP2002332990A (ja) * | 2001-05-09 | 2002-11-22 | Shimadzu Corp | ターボ形回転機器 |
DE60319585T2 (de) * | 2002-12-17 | 2009-03-26 | Edwards Ltd., Crawley | Vakuumpumpe |
JP2006090263A (ja) * | 2004-09-27 | 2006-04-06 | Boc Edwards Kk | 真空ポンプ |
WO2006048602A2 (en) * | 2004-11-01 | 2006-05-11 | The Boc Group Plc | Pumping arrangement |
JP2006342791A (ja) * | 2005-05-13 | 2006-12-21 | Boc Edwards Kk | 真空ポンプ |
Also Published As
Publication number | Publication date |
---|---|
JP2013174238A (ja) | 2013-09-05 |
US9422937B2 (en) | 2016-08-23 |
US20130224001A1 (en) | 2013-08-29 |
EP2631488A2 (de) | 2013-08-28 |
EP2631488B1 (de) | 2019-12-11 |
DE102012003680A1 (de) | 2013-08-29 |
JP6027455B2 (ja) | 2016-11-16 |
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