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EP2379927A1 - Connecting device for a vacuum unit - Google Patents

Connecting device for a vacuum unit

Info

Publication number
EP2379927A1
EP2379927A1 EP10700693A EP10700693A EP2379927A1 EP 2379927 A1 EP2379927 A1 EP 2379927A1 EP 10700693 A EP10700693 A EP 10700693A EP 10700693 A EP10700693 A EP 10700693A EP 2379927 A1 EP2379927 A1 EP 2379927A1
Authority
EP
European Patent Office
Prior art keywords
pipe socket
pipe
connecting device
flange
end portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10700693A
Other languages
German (de)
French (fr)
Inventor
Philipp Wagner
Gian-Reto Peter Monauni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TEL Solar AG
Original Assignee
Oerlikon Solar IP AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Solar IP AG filed Critical Oerlikon Solar IP AG
Publication of EP2379927A1 publication Critical patent/EP2379927A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L27/00—Adjustable joints, Joints allowing movement
    • F16L27/02—Universal joints, i.e. with mechanical connection allowing angular movement or adjustment of the axes of the parts in any direction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L27/00—Adjustable joints, Joints allowing movement
    • F16L27/02—Universal joints, i.e. with mechanical connection allowing angular movement or adjustment of the axes of the parts in any direction
    • F16L27/026—Universal and axially displaceable joints
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L27/00—Adjustable joints, Joints allowing movement
    • F16L27/10—Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L27/00—Adjustable joints, Joints allowing movement
    • F16L27/10—Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations
    • F16L27/1012—Flanged joints
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L27/00—Adjustable joints, Joints allowing movement
    • F16L27/10—Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations
    • F16L27/1017—Joints with sleeve or socket
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L51/00—Expansion-compensation arrangements for pipe-lines

Definitions

  • the invention relates to a connection device for a vacuum system.
  • Such connecting devices are used in the connection of assemblies such as vacuum chambers, pumps, etc. through lines. They must be vacuum-tight, even if the connected parts have manufacturing tolerances, vibrations are exposed and subjected to different thermal expansions. In addition, they must withstand corrosive gases, such as those used above all for the cleaning of system parts.
  • a known generic connection device which is described in more detail below, comprises a bellows made of metal, e.g. corrosion-resistant spring steel, INCONEL or aluminum, which ensures the required flexibility.
  • metal e.g. corrosion-resistant spring steel, INCONEL or aluminum
  • Such connecting devices have proven themselves, but are very expensive, especially when a bellows from INCONEL is used.
  • the invention is based on the object to provide a generic connection device, which is also releasable and reliable gas-tight and offers sufficient flexibility, but can be made much cheaper.
  • This object is solved by the features in the characterizing part of claim 1.
  • the connecting device according to the invention can be easily produced and adjusted when the system is stationary, but nevertheless provides a reliable gastight seal both under operating conditions and outside the operating times. Under operating conditions, it is stable against corrosive gases. The cost savings over known generic
  • Connecting devices is considerable. It can be 50% or more.
  • FIG. 1 shows a longitudinal section through a known generic connection device
  • Fig. 2 shows a corresponding longitudinal section through an inventive connecting device, which represents only one embodiment.
  • the known generic connection device has a bellows 1 made of metal, eg corrosion-resistant spring steel, INCONEL or aluminum, one end, the opening surrounding the opening, with the flange 2 and the other end is welded to a ring 3, which also by a screw 4 is connected to the flange 2.
  • the ring 3 is also releasably connected by a screw 5 with a piece of pipe 6, but gas-tight.
  • the bellows 1 allows movement of the ring 3 relative to the flange 1 both in the longitudinal direction as well as limited across.
  • the additional mechanical connection through the screw 4 with at least one bolt, which is surrounded by a compression spring and is biased by it, is designed so that it does not affect these possibilities.
  • the connecting device 15 comprises two flanges 10, 11 each having a pipe section or pipe socket 16 arranged thereon; 18, which are arranged one inside the other, that the pipe section 16 and the pipe socket 18 are aligned on at least a partial section substantially coaxially and enclose a circumferential annular gap.
  • a main sealing ring 12 made of plastic, preferably Teflon is arranged in this annular gap (on the said section) between the outer surface of the pipe section 16 and the inner surface of the tube piece 16 surrounding raw pipe 18, a main sealing ring 12 made of plastic, preferably Teflon is arranged. It is dimensioned so that in said portion of an inner sealing surface of the same abuts against the outside of the pipe section 16 and an outer lateral surface on the inside of the pipe socket 18.
  • an auxiliary seal between the pipe section 16 and the pipe socket 18 used, for example a radial shaft seal 13.
  • the pipe piece 16 heats up to an operating temperature which, for example, is reached. 50 ° or more, above the ambient temperature.
  • Plastic, in particular Teflon, the preferred material for the main seal ring 12 is a very good thermal insulator, so that the pipe socket 18 remains substantially at ambient temperature, resulting in a temperature difference between the same and the pipe section 16.
  • the pipe section 16 expands and presses against the inner sealing surface of the main sealing ring 12, the outer surface thereof is thereby pressed against the inside of the pipe socket 18. This causes the connection pipe socket 18 -
  • Main seal ring 12 - pipe section 16 is gas-tight or vacuum-tight and the underlying radial shaft seal 13 against aggressive gases such. Fluorine is protected. The possibility of expansion in the longitudinal direction of the pipe section 16 and the pipe socket 18 is still guaranteed. Experiments even showed a higher tightness of the connecting device according to the present invention as the welded solution according to the prior art.
  • Inconel bellows can achieve cost savings of> 50%.
  • the production of turned and milled parts is less expensive than the known design of the connecting device.
  • a spring-clamped with a spring screw 17 fulfills the same function as the screw 4 in Fig. 1st

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Joints Allowing Movement (AREA)
  • Joints With Pressure Members (AREA)

Abstract

A pipe socket (18) surrounded by a flange (11) receives an end portion of a pipe piece (16). In an annular gap situated between them, a main sealing ring (12) of plastic, preferably Teflon, is arranged and an auxiliary seal having, for example, a radial shaft sealing ring (13) is placed against the end of the pipe socket (18). Outside of operating times when the pipe socket (18) and the pipe piece (16) have approximately the same ambient temperature, the pipe piece (16) is movable, i.e. displaceable and inclinable, to a limited degree with respect to the pipe socket (18), while the sealing function is performed above all by the auxiliary seal. In operation, the pipe piece (16) assumes a higher operating temperature and expands with the result that the main sealing ring (12) is pressed against the inside of the pipe socket (18) and takes over the sealing function such that the radial shaft sealing ring (13) is protected from corrosive gases. The pipe piece (16) is also then displaceable with respect to the pipe socket (18).

Description

B E S C H R E I B U N G DESCRIPTION
VERBINDUNGSEINRICHTUNG FÜR EINE VAKUUMANLAGECONNECTION DEVICE FOR A VACUUM SYSTEM
Technisches GebietTechnical area
Die Erfindung betrifft eine Verbindungseinrichtung für eine Vakuumanlage. Derartige Verbindungseinrichtungen werden bei der Verbindung von Baugruppen wie Vakuumkammern, Pumpen usw. durch Leitungen eingesetzt. Sie müssen vakuumdicht sein, auch wenn die verbundenen Teile Fertigungstoleranzen aufweisen, Schwingungen ausgesetzt und unterschiedlichen Wärmedehnungen unterworfen sind. Ausserdem müssen sie korrosiven Gasen standhalten, wie sie vor allem zur Reinigung von Anlagenteilen eingesetzt werden.The invention relates to a connection device for a vacuum system. Such connecting devices are used in the connection of assemblies such as vacuum chambers, pumps, etc. through lines. They must be vacuum-tight, even if the connected parts have manufacturing tolerances, vibrations are exposed and subjected to different thermal expansions. In addition, they must withstand corrosive gases, such as those used above all for the cleaning of system parts.
Stand der TechnikState of the art
Eine bekannte gattungsgemässe Verbindungseinrichtung, welche weiter unten näher beschrieben ist, weist einen Faltenbalg aus Metall, z.B. korrosionsbeständigem Federstahl, INCONEL oder Aluminium auf, welcher die erforderliche Beweglichkeit gewährleistet . Derartige Verbindungseinrichtungen haben sich bewährt, sind jedoch sehr teuer, besonders wenn ein Faltenbalg aus INCONEL eingesetzt wird.A known generic connection device, which is described in more detail below, comprises a bellows made of metal, e.g. corrosion-resistant spring steel, INCONEL or aluminum, which ensures the required flexibility. Such connecting devices have proven themselves, but are very expensive, especially when a bellows from INCONEL is used.
Darstellung der ErfindungPresentation of the invention
Der Erfindung liegt die Aufgabe zu Grunde, eine gattungsgemässe Verbindungseinrichtung anzugeben, welche ebenfalls lösbar und dabei zuverlässig gasdicht ist und ausreichende Beweglichkeit bietet, aber wesentlich billiger hergestellt werden kann. Diese Aufgabe wird durch die Merkmale im Kennzeichen des Anspruchs 1 gelöst . Die erfindungsgemässe Verbindungseinrichtung ist bei stillstehender Anlage leicht herstellbar und einstellbar, bietet aber dennoch sowohl unter Betriebsbedingungen als auch ausserhalb der Betriebszeiten einen zuverlässig gasdichten Abschluss . Unter Betriebsbedingungen ist sie standfest gegenüber korrosiven Gasen. Die Kostenersparnis gegenüber bekannten gattungsgemässenThe invention is based on the object to provide a generic connection device, which is also releasable and reliable gas-tight and offers sufficient flexibility, but can be made much cheaper. This object is solved by the features in the characterizing part of claim 1. The connecting device according to the invention can be easily produced and adjusted when the system is stationary, but nevertheless provides a reliable gastight seal both under operating conditions and outside the operating times. Under operating conditions, it is stable against corrosive gases. The cost savings over known generic
Verbindungseinrichtungen ist beträchtlich. Sie kann 50% und mehr betragen.Connecting devices is considerable. It can be 50% or more.
Kurze Beschreibung der ZeichnungenBrief description of the drawings
Im folgenden wird die Erfindung anhand von Figuren näher erläutert . Es zeigenIn the following the invention will be explained in more detail with reference to figures. Show it
Fig. 1 einen Längsschnitt durch eine bekannte gattungsgemässe Verbindungseinrichtung und1 shows a longitudinal section through a known generic connection device and
Fig. 2 einen entsprechenden Längsschnitt durch eine erfindungsgemässe Verbindungseinrichtung, welche lediglich ein Ausführungsbeispiel darstellt.Fig. 2 shows a corresponding longitudinal section through an inventive connecting device, which represents only one embodiment.
Wege zur Ausführung der ErfindungWays to carry out the invention
Die bekannte gattungsgemässe Verbindungseinrichtung gemäss Fig. 1 weist einen Faltenbalg 1 aus Metall, z.B. korrosionsbeständigem Federstahl, INCONEL oder Aluminium auf, dessen eines Ende, die Oeffnung umgebend, mit dem Flansch 2 und dessen anderes Ende mit einem Ring 3 verschweisst ist, der ausserdem durch eine Schraubverbindung 4 mit dem Flansch 2 verbunden ist. Der Ring 3 ist ausserdem durch eine Verschraubung 5 mit einem Rohrstück 6 lösbar, aber gasdicht verbunden. Der Faltenbalg 1 erlaubt Bewegung des Rings 3 gegenüber dem Flansch 1 sowohl in Längsrichtung als auch beschränkt quer dazu. Die zusätzliche mechanische Verbindung durch die Schraubverbindung 4 mit mindestens einem Bolzen, welcher von einer Druckfeder umgeben und durch sie gegengespannt ist, ist so ausgebildet, dass sie diese Möglichkeiten nicht beeinträchtigt.The known generic connection device according to FIG. 1 has a bellows 1 made of metal, eg corrosion-resistant spring steel, INCONEL or aluminum, one end, the opening surrounding the opening, with the flange 2 and the other end is welded to a ring 3, which also by a screw 4 is connected to the flange 2. The ring 3 is also releasably connected by a screw 5 with a piece of pipe 6, but gas-tight. The bellows 1 allows movement of the ring 3 relative to the flange 1 both in the longitudinal direction as well as limited across. The additional mechanical connection through the screw 4 with at least one bolt, which is surrounded by a compression spring and is biased by it, is designed so that it does not affect these possibilities.
Die erfindungsgemässe Verbindungseinrichtung 15 gemäss Fig. 2 umfasst zwei Flansche 10, 11 mit je einem daran angeordneten Rohrstück bzw. Rohrstutzen 16; 18, die ineinander so angeordnet sind, dass das Rohrstück 16 und der Rohrstutzen 18 auf wenigstens einem Teilabschnitt im wesentlichen koaxial ausgerichtet sind und einen umlaufenden Ringspalt einschliessen. In diesem Ringspalt (auf dem besagten Teilabschnitt) zwischen der Aussenfläche des Rohrstücks 16 und der Innenfläche des das Rohrstück 16 umgebenden Rohstutzens 18 ist ein Hauptdichtungsring 12 aus Kunststoff, vorzugsweise Teflon angeordnet. Er ist so dimensioniert, dass in besagtem Teilabschnitt eine innere Dichtfläche desselben an der Aussenseite des Rohrstücks 16 anliegt und eine äussere Mantelfläche an der Innenseite des Rohrstutzens 18. Als weitere Abdichtung, die vor allem im kalten Zustand wirksam ist, wird eine Hilfsdichtung zwischen dem Rohrstück 16 und dem Rohrstutzen 18 eingesetzt, z.B. ein Radialwellendichtring 13.The connecting device 15 according to the invention according to FIG. 2 comprises two flanges 10, 11 each having a pipe section or pipe socket 16 arranged thereon; 18, which are arranged one inside the other, that the pipe section 16 and the pipe socket 18 are aligned on at least a partial section substantially coaxially and enclose a circumferential annular gap. In this annular gap (on the said section) between the outer surface of the pipe section 16 and the inner surface of the tube piece 16 surrounding raw pipe 18, a main sealing ring 12 made of plastic, preferably Teflon is arranged. It is dimensioned so that in said portion of an inner sealing surface of the same abuts against the outside of the pipe section 16 and an outer lateral surface on the inside of the pipe socket 18. As a further seal, which is effective especially in the cold state, an auxiliary seal between the pipe section 16 and the pipe socket 18 used, for example a radial shaft seal 13.
Die Wahl der Materialien und der Fertigungstoleranzen des Hauptdichtungsrings 12 sowie des Rohrstücks 16 und des Rohrstutzens 18 wird nun so vorgenommen, dass im Nicht - Betriebszustand, wenn sowohl das Rohrstück 16 als auch der Rohrstutzen 18 ungefähr die gleiche Umgebungstemperatur angenommen haben, dieselben mit ihren Flanschen 10; 11 gegeneinander gut beweglich sind, was die Ausrichtbarkeit des Verbindungsstücks 15 gewährleistet seinen Einbau ermöglicht. Die Abdichtung zwischen dem Rohrstutzen 18 und dem Rohrstück 16 durch den Hauptdichtungsring 12 würde in diesem Zustand die Anforderung „vakuumdicht" jedoch nicht erfüllen. Die Hilfsdichtung mit dem Radialwellendichtring 13, evtl. zusammen mit einem als Druckstufe wirkenden metallischen Kragen 14 des Rohrstutzens 18 sorgt in diesem Zustand im wesentlichen für die Dichtheit.The choice of materials and manufacturing tolerances of the main seal ring 12 and the pipe section 16 and the pipe socket 18 is now made so that in the non-operating state, when both the pipe section 16 and the pipe socket 18 have assumed approximately the same ambient temperature, the same with their flanges 10; 11 are mutually easily movable, which ensures the alignability of the connector 15 allows its installation. The seal between the pipe socket 18 and However, in this state, the requirement "vacuum-tight" would not be met by the pipe section 16 through the main sealing ring 12. The auxiliary seal with the radial shaft sealing ring 13, possibly together with a metal collar 14 of the pipe socket 18 acting as a pressure step, essentially ensures the tightness in this state ,
Strömt nun während des Betriebs heisses Arbeitsgas durch das Verbindungsstück 15, erwärmt sich das Rohrstück 16 auf eine Betriebstemperatur, welche, z.B. um 50° oder mehr, über der Umgebungstemperatur liegt. Kunststoff, inbesondere Teflon, das bevorzugte Material für den Hauptdichtungsring 12, ist ein sehr guter Wärmeisolator, sodass der Rohrstutzen 18 im wesentlichen auf Umgebungstemperatur bleibt, woraus sich eine Temperaturdifferenz zwischen demselben und dem Rohrstück 16 ergibt. Während sich also der Durchmesser des Rohrstutzens 18 nicht wesentlich ändert, dehnt sich das Rohrstück 16 aus und drückt gegen die innere Dichtfläche des Hauptdichtungsrings 12, dessen äussere Mantelfläche dadurch gegen die Innenseite des Rohrstutzens 18 gepresst wird. Das bewirkt, dass die Verbindung Rohrstutzen 18 -If hot working gas now flows through the connecting piece 15 during operation, the pipe piece 16 heats up to an operating temperature which, for example, is reached. 50 ° or more, above the ambient temperature. Plastic, in particular Teflon, the preferred material for the main seal ring 12, is a very good thermal insulator, so that the pipe socket 18 remains substantially at ambient temperature, resulting in a temperature difference between the same and the pipe section 16. Thus, while the diameter of the pipe socket 18 does not change significantly, the pipe section 16 expands and presses against the inner sealing surface of the main sealing ring 12, the outer surface thereof is thereby pressed against the inside of the pipe socket 18. This causes the connection pipe socket 18 -
Hauptdichtungsring 12 - Rohrstück 16 gasdicht oder vakuumdicht wird und der dahinter liegende Radialwellendichtring 13 vor aggressiven Gasen wie z.B. Fluor geschützt ist. Die Möglichkeit der Ausdehnung in Längsrichtung des Rohrstücks 16 und des Rohrstutzens 18 ist nach wie vor gewährleistet . Versuche ergaben sogar eine höhere Dichtheit der Verbindungseinrichtung gemäss der vorliegenden Erfindung als die geschweisste Lösung gemäss Stand der Technik.Main seal ring 12 - pipe section 16 is gas-tight or vacuum-tight and the underlying radial shaft seal 13 against aggressive gases such. Fluorine is protected. The possibility of expansion in the longitudinal direction of the pipe section 16 and the pipe socket 18 is still guaranteed. Experiments even showed a higher tightness of the connecting device according to the present invention as the welded solution according to the prior art.
Durch den Verzicht auf einen angeschweissten biegsamenBy dispensing with a welded flexible
Faltenbalg aus Inconel lassen sich Kostenersparnisse von >50% erzielen. Die Fertigung aus Dreh- und Frästeilen ist weniger aufwändig als die bekannte Ausführung der Verbindungseinrichtung .Inconel bellows can achieve cost savings of> 50%. The production of turned and milled parts is less expensive than the known design of the connecting device.
Um die Dichtheit zu erhöhen, zu steuern oder zu prüfen, insbesondere bevor Rohrstück 16 die Betriebstemperatur erreicht hat, kann dasselbe mit einer Heizung versehen werden, z.B. mit einer elektrischen Widerstandsheizung. Diese kann aussen auf den Flansch 10 aufgewickelt oder in Nuten eingelassen werden. Dadurch lässt sich die oben beschriebene Dichtwirkung auch in Betriebspausen aufrechterhalten. Eine mit einer Feder gegengespannte Schraubverbindung 17 erfüllt dieselbe Funktion wie die Schraubverbindung 4 in Fig. 1.In order to increase, control or test the leaktightness, in particular before pipe section 16 has reached the operating temperature, it may be provided with a heater, e.g. with an electrical resistance heater. This can be wound externally on the flange 10 or embedded in grooves. As a result, the sealing effect described above can be maintained even during breaks. A spring-clamped with a spring screw 17 fulfills the same function as the screw 4 in Fig. 1st
BezugszeichenlisteLIST OF REFERENCE NUMBERS
1 Faltenbalg 2 Flansch1 bellows 2 flange
3 Ring3 ring
4 Schraubverbindung4 screw connection
5 Verschraubung5 screw connection
6 Rohrstück 10 Flansch6 pipe section 10 flange
11 Flansch11 flange
12 Hauptdichtungsring12 main sealing ring
13 Radialwellendichtring13 Radial shaft sealing ring
14 Kragen 15 Verbindungseinrichtung14 collar 15 connection device
16 Rohrstück16 pipe piece
17 Schraubverbindung17 screw connection
18 Rohrstutzen 18 pipe socket

Claims

P A T E N T A N S P R Ü C H E PATENT APPLICATIONS
1. Verbindungseinrichtung (15) für eine Vakuumanlage, mit einem Flansch (11) , welcher eine Oeffnung umgibt sowie einem mit der besagten Oeffnung gasdicht verbundenen Rohrstück (16) , dadurch gekennzeichnet, dass der1. Connection device (15) for a vacuum system, with a flange (11) which surrounds an opening and a gas-tightly connected to said opening pipe section (16), characterized in that the
Flansch (11) Teil eines einstückigen Verbindungsteils ist, welches ausserdem einen die Oeffnung umgebenden, an den Flansch (11) anschliessenden Rohrstutzen (18) umfasst, der einen Endabschnitt des Rohrstücks (16) mit Abstand umgibt, sodass zwischen denselben ein Ringspalt liegt und eine Hauptdichtung mit einem Hauptdichtungsring (12) aus elastischem Material vorgesehen ist, welcher zwischen dem Rohrstutzen (18) und dem besagten Endabschnitt angeordnet ist, derart, dass derFlange (11) is part of a one-piece connecting part, which also surrounds the opening surrounding the opening, to the flange (11) pipe socket (18) which surrounds an end portion of the pipe section (16) at a distance, so that between them an annular gap and a Main seal is provided with a main sealing ring (12) made of elastic material, which is arranged between the pipe socket (18) and the said end portion, such that the
Endabschnitt gegenüber dem Hauptdichtungsring (12) Spiel hat, wenn seine Temperatur wie die des Rohrstutzens einer Umgebungstemperatur entspricht, während der Hauptdichtungsring (12) zwischen dem Endabschnitt und dem Rohrstutzen (18) geklemmt ist, derart, dass er den Ringspalt zwischen dem Rohrstutzen (18) und dem Endabschnitt gasdicht verschliesst , wenn der Endabschnitt eine über der Umgebungstemperatur liegende Betriebstemperatur aufweist, und - eine gegen das dem Flansch (11) abgewendete äussere Ende des Rohrstutzens (18) versetzte Hilfsdichtung vorgesehen ist, welche den Ringspalt zwischen dem Rohrstutzen (18) und dem Endabschnitt gasdicht verschliesst, wenn die Temperatur beider der Umgebungstemperatur entspricht.End portion opposite to the main seal ring (12) has play, when its temperature like that of the pipe socket corresponds to an ambient temperature, while the main seal ring (12) is clamped between the end portion and the pipe socket (18) such that it closes the annular gap between the pipe socket (18 ) and the end portion gastight closes when the end portion has an operating temperature above the ambient temperature, and - an offset against the flange (11) averted the outer end of the pipe socket (18) offset auxiliary seal is provided which the annular gap between the pipe socket (18) and the end portion gas-tight closes when the temperature of both corresponds to the ambient temperature.
2. Verbindungseinrichtung (15) nach Anspruch 1, dadurch gekennzeichnet, dass der Endabschnitt auch dann in Längsrichtung gegenüber dem Hauptdichtungsring (12) verschiebbar ist, wenn seine Temperatur der Betriebstemperatur entspricht .2. Connecting device (15) according to claim 1, characterized in that the end section also in Is longitudinally displaceable relative to the main sealing ring (12) when its temperature corresponds to the operating temperature.
3. Verbindungseinrichtung (15) nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass der Hauptdichtungsring3. Connecting device (15) according to claim 1 or 2, characterized in that the main sealing ring
(12) eine umlaufende Mantelfläche aufweist, mit welcher er an der Innenseite des Rohrstutzens (18) anliegt und eine umlaufende Dichtfläche mit einem zylindrischen Abschnitt zur gasdichten Anlage an der Aussenseite des Endabschnitts.(12) has a circumferential surface, with which it rests against the inside of the pipe socket (18) and a circumferential sealing surface with a cylindrical portion for gas-tight contact with the outside of the end portion.
4. Verbindungseinrichtung (15) nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass der4. Connecting device (15) according to one of claims 1 to 3, characterized in that the
Hauptdichtungsring (12) aus Kunststoff, insbesondere aus Teflon besteht .Main sealing ring (12) made of plastic, in particular made of Teflon.
5. Verbindungseinrichtung (15) nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass die Hilfsdichtung einen Radialwellendichtring (13) umfasst .5. Connecting device (15) according to one of claims 1 to 4, characterized in that the auxiliary seal comprises a radial shaft sealing ring (13).
6. Verbindungseinrichtung (15) nach Anspruch 4 oder 5, dadurch gekennzeichnet, dass die Hilfsdichtung von der Hauptdichtung durch einen einspringenden umlaufenden Kragen (14) am Rohrstutzen (18) getrennt ist.6. Connecting device (15) according to claim 4 or 5, characterized in that the auxiliary seal from the main seal by a re-entrant circumferential collar (14) on the pipe socket (18) is separated.
7. Verbindungseinrichtung (15) nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass der Endabschnitt mit einer Heizung versehen ist.7. Connecting device (15) according to one of claims 1 to 6, characterized in that the end portion is provided with a heater.
8. Verbindungseinrichtung (15) nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, dass das Rohrstück (16) derart ausserhalb des Rohrstutzens (18) mit dem Flansch (11) mechanisch verbunden ist, dass eine beschränkte Aenderung seiner Lage möglich ist.8. Connecting device (15) according to one of claims 1 to 7, characterized in that the pipe section (16) in such a way outside the pipe socket (18) with the flange (11) is mechanically connected, that a limited change of its location is possible.
9. Verbindungseinrichtung (15) nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass die mechanische Verbindung zwischen dem Flansch (11) und dem Rohrstück (16) durch eine Schraubverbindung (17) hergestellt ist.9. Connecting device (15) according to one of claims 1 to 8, characterized in that the mechanical connection between the flange (11) and the pipe section (16) by a screw connection (17) is made.
10. Verbindungseinrichtung (15) nach Anspruch 9, dadurch gekennzeichnet, dass die Schraubverbindung (17) durch mindestens einen Bolzen hergestellt ist, der sowohl mit dem Flansch (11) des Verbindungsteils als auch mit einem Flansch (10) am Rohrstück (16) eingreift, derart, dass er gegenüber mindestens einem davon verschiebbar ist . 10. Connecting device (15) according to claim 9, characterized in that the screw connection (17) is made by at least one bolt which engages both with the flange (11) of the connecting part and with a flange (10) on the pipe section (16) such that it is displaceable relative to at least one of them.
EP10700693A 2009-01-19 2010-01-14 Connecting device for a vacuum unit Withdrawn EP2379927A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14561309P 2009-01-19 2009-01-19
PCT/CH2010/000010 WO2010081246A1 (en) 2009-01-19 2010-01-14 Connecting device for a vacuum unit

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EP2379927A1 true EP2379927A1 (en) 2011-10-26

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EP (1) EP2379927A1 (en)
JP (1) JP5438129B2 (en)
KR (1) KR20110107380A (en)
CN (1) CN102282405B (en)
WO (1) WO2010081246A1 (en)

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Publication number Publication date
CN102282405A (en) 2011-12-14
WO2010081246A8 (en) 2010-10-14
JP5438129B2 (en) 2014-03-12
WO2010081246A1 (en) 2010-07-22
JP2012515306A (en) 2012-07-05
CN102282405B (en) 2013-06-19
KR20110107380A (en) 2011-09-30

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