DE102011017617B3 - Coolant feedthrough for vacuum plants, comprises a flange with mounting holes for a fastener, a transmission hole for transmitting a coolant having a coolant terminal arranged on each side of the flange, and a terminal area - Google Patents

Abstract

The coolant feedthrough comprises a flange (1) with mounting holes (13) for a fastener, a transmission hole for transmitting a coolant having a coolant terminal arranged on each side of the flange, and a terminal area for attaching the flange at a mating surface surrounding a housing, where insulating sleeves are arranged in the mounting holes at the terminal area of a first insulator ring. A second insulator ring is arranged at a screwed surface opposite to the terminal area, extends itself over the mounting holes, and comprises holes corresponding with the mounting holes. The coolant feedthrough comprises a flange (1) with mounting holes (13) for a fastener, a transmission hole for transmitting a coolant having a coolant terminal arranged on each side of the flange, and a terminal area for attaching the flange at a mating surface surrounding a housing, where insulating sleeves are arranged in the mounting holes at the terminal area of a first insulator ring. A second insulator ring is arranged at a screwed surface opposite to the terminal area, extends itself over the mounting holes, and comprises holes corresponding with the mounting holes. A pressure ring (25) is arranged on the second insulator ring arranged at the screwed surface, and comprises the holes corresponding with the mounting holes of the flange. A sealing ring (26) is arranged at the terminal area of the flange or the first insulator ring arranged at the terminal area. The flange, on its side facing the opening of the mating surface, has an extension that protrudes into the opening. The first insulator ring arranged at the terminal area of the flange on its side facing the opening of the mating surface has a groove. The sealing ring is arranged in the groove. A third insulator ring (23) is arranged at the terminal area of the flange, whose outer diameter is smaller than the inner diameter of the first insulator ring. The sealing ring is arranged between the first and third insulator rings. The first and third insulator rings comprise a collar, which protrudes into the opening of the mating surface to center the flange with respect to the opening and to electrically isolate from the opening.

Description

The invention relates to an electrically insulated coolant feedthrough for vacuum systems according to claim 1. Advantageous embodiments and further developments are described in the dependent claims.

An object of the invention is to provide a coolant passage suitable for attachment to a pipe flange or opening of a chamber wall of the vacuum system, which ensures the required vacuum tightness and at the same time electrically isolates the coolant line or coolant lines from the pipe flange or the chamber wall.

For this purpose, a coolant passage for vacuum systems is proposed, comprising a flange with fastening holes for fastening means, at least one passage bore for the passage of coolant, each with a arranged on each side of the flange coolant port and a connection surface for attachment of the flange to an opening surrounding an opposing surface, wherein Insulator sleeves are arranged on the connection surface, a first insulator ring is arranged on the connection surface and a second insulator ring is arranged on the connection surface, extending over the attachment bores and having corresponding bores, a pressure ring being arranged on the second insulator ring arranged on the screw connection surface is, which also has holes corresponding to the mounting holes of the flange and wherein at the connecting surface of the flange or a sealing ring is arranged on the first insulator ring arranged on the connection surface.

The interaction of the two insulator rings with the insulator sleeves ensures that the attachment means for attaching the coolant passage to the mating surface, which may for example be a pipe flange or a chamber wall of the vacuum system, used fastening means, usually screws, have no electrical contact with the flange, through which Passage bore for the coolant is performed.

Since both the mating surface and the flange and the fasteners used are usually made of steel or stainless steel, due to the high strength requirements. H. are made of conductive material, stand by the use of the insulator rings and insulator sleeves, although the fastening means in electrical contact with the counter surface, but not with the passage bore through which the coolant flows, so that a potential separation between the chamber wall and the coolant is achieved.

The pressure ring arranged on the second isolator ring constitutes a solid, wear-resistant screwing surface for the fastening means. It is electrically insulated from the flange by the second isolator ring and can therefore also be made of stainless steel, for example.

In one embodiment, it is provided that the flange has, on its side facing the opening, an extension projecting into the opening of the mating surface. As a result, on the one hand, a greater thickness of the flange can be generated in the region of the opening to be closed, and on the other hand, the flange in the opening can be centered more easily in order to facilitate its assembly.

It can further be provided that the first insulator ring arranged on the connection surface of the flange has a groove on its side facing the counter-surface, and the sealing ring is arranged in the groove. As a result, the sealing ring is pressed by the first insulator ring on the counter surface, whereby a good sealing effect is achieved. In addition, it can be provided that the first insulator ring arranged on the connection surface of the flange has a further groove on its side facing the connection surface, and a further sealing ring is arranged in the further groove. As a result, the sealing ring is pressed by the first insulator ring on the pad, whereby a good sealing effect is achieved.

It can further be provided that the first isolator ring has a collar which projects into the opening of the mating surface in order to center the flange with respect to the opening and to electrically isolate it from the opening. This embodiment is particularly advantageous in cooperation with a flange which has an extension which projects into the opening.

In this case, the inner diameter of the collar and the outer diameter of the extension, for example, be chosen approximately equal, so that the collar rests on the extension. Further, the outer diameter of the collar and the inner diameter of the opening, for example, be chosen approximately equal, so that the collar rests against the opening.

An alternative embodiment provides that on the connection surface of the flange, a third insulator ring is arranged, whose outer diameter is smaller than the inner diameter of the first insulator ring, and the sealing ring between the first insulator ring and the third insulator ring is arranged. In other words, between the Inner diameter of the first insulator ring and the outer diameter of the third insulator ring formed a gap into which the sealing ring is inserted, so that the connecting surface of the flange presses the sealing ring on the counter surface. Compared to the solution described above with one or two sealing rings, which are arranged in grooves, only one sealing ring is required here, which acts sealingly against both the connection surface and against the counter surface.

In the latter case, it may further be provided that the third insulator ring has a collar which projects into the opening of the mating surface in order to center the flange with respect to the opening and to electrically isolate it from the opening. This embodiment is particularly advantageous in cooperation with a flange which has an extension which projects into the opening.

In this case, the inner diameter of the collar and the outer diameter of the extension, for example, be chosen approximately equal, so that the collar rests on the extension. Further, the outer diameter of the collar and the inner diameter of the opening, for example, be chosen approximately equal, so that the collar rests against the opening.

The invention will be explained in more detail with reference to an embodiment and associated drawings. Show

1 a three-dimensional view of the coolant duct according to embodiment, and

2 a sectional view of the embodiment according to 1 in the assembled state.

The coolant passage comprises a flange 1 with mounting holes 13 for fasteners 4 and two feed-through holes 14 for the passage of coolant. Every passage bore 14 points to each side of the flange 1 one coolant connection each 16 on. On the vacuum side, this is a welded-on pipe socket with a Swagelock VCO connection and, on the atmosphere side, a threaded double nipple screwed in, onto which a hose nozzle with a union nut is screwed.

The flange 1 has a connection surface 11 for attaching the flange 1 at one an opening 32 enclosing counterface 31 on. The counter surface 31 is an area of a chamber wall 3 a vacuum treatment plant, which has an opening 32 through which the coolant is passed and through the flange 1 is closed.

In the mounting holes 13 are insulator sleeves 24 arranged, at the connection surface 11 is a first isolator ring 21 and at the pad 11 opposite screwing surface 12 is a second insulator ring 22 arranged. The first insulator ring 21 and the second insulator ring 22 extend on their respective side of the flange 1 over the mounting holes 13 and have holes that with the mounting holes 13 of the flange 1 correspond.

On the at the screwing surface 12 arranged second insulator ring 22 is a pressure ring 25 arranged, which also with the holes of the first insulator ring 21 , the holes of the second insulator ring 22 and the mounting holes 13 of the flange 1 has corresponding holes, so that the fastening means 4 , Which are designed in the embodiment as Allen screws, through the superimposed holes of flange 1 , first insulator ring 21 , second insulator ring 22 and pressure ring 25 can be plugged.

At the connection surface 11 of the flange 1 are still a third insulator ring 23 , whose outer diameter is smaller than the inner diameter of the first insulator ring 21 , and in between the first insulator ring 21 and the third insulator ring 23 formed gap is a sealing ring 26 Arranged by the connection surface 11 of the flange 1 on the opposite surface 31 is pressed.

The flange 1 is on a chamber wall 3 a vacuum system over an opening 32 attached by the flange 1 is closed, and the flange 1 indicates on its counter surface 31 one side facing into the opening 32 the counter surface 31 protruding extension 15 on.

The third isolator ring 23 has a collar K, which in the opening 32 the counter surface 31 protrudes to the flange 1 concerning the opening 32 to center and from the opening 32 electrically isolate. The inner diameter of the collar K and the outer diameter of the extension 15 are approximately the same size, so that the collar K on the extension 15 is applied, and the outer diameter of the collar K and the inner diameter of the opening 32 are also approximately the same size, so that the collar K at the opening 32 is applied.

LIST OF REFERENCE NUMBERS

1

flange

11

terminal area

12

Screw plate

13

mounting hole

14

Passing hole

15

extension

16

Coolant connection

21

first insulator ring

22

second insulator ring

23

third insulator ring

K

collar

24

insulator sleeve

25

pressure ring

26

seal

3

chamber wall

31

counter surface

32

opening

4

fastener

Claims (6)

Coolant feedthrough for vacuum systems, comprising a flange ( 1 ) with mounting holes ( 13 ) for fasteners ( 4 ), at least one passage bore ( 14 ) for the passage of coolant, one on each side of the flange ( 1 ) arranged coolant connection ( 16 ) and a pad ( 11 ) for mounting the flange ( 1 ) at an opening ( 32 ) enclosing counterface ( 31 ), wherein in the mounting holes ( 13 ) Insulator sleeves ( 24 ) are arranged on the connection surface ( 11 ) a first insulator ring ( 21 ) and at the pad ( 11 ) opposite screwing surface ( 12 ) a second insulator ring ( 22 ) are arranged, which extend over the mounting holes ( 13 ) and having with these corresponding holes, wherein on the at the Verschraubungsfläche ( 12 ) arranged second insulator ring ( 22 ) a pressure ring ( 25 ), which also with the mounting holes ( 13 ) of the flange ( 1 ) has corresponding bores and wherein at the connection surface ( 11 ) of the flange ( 1 ) or at the at the interface ( 11 ) arranged first insulator ring ( 21 ) a sealing ring ( 26 ) is arranged. Coolant feedthrough according to claim 1, characterized in that the flange ( 1 ) on its opening ( 32 ) of the counter surface ( 31 ) facing side into the opening ( 32 ) has protruding extension. Coolant feedthrough according to claim 1 or 2, characterized in that at the connection surface ( 11 ) of the flange ( 1 ) arranged first insulator ring ( 21 ) on its counter surface ( 31 ) facing side has a groove and the sealing ring ( 26 ) is arranged in the groove. Coolant feedthrough according to one of claims 1 to 3, characterized in that the first insulator ring ( 21 ) has a collar (K) which in the opening ( 32 ) of the counter surface ( 31 ) protrudes around the flange ( 1 ) with respect to the opening ( 32 ) and from the opening ( 32 ) electrically isolate. Coolant feedthrough according to claim 1 or 2, characterized in that at the connection surface ( 11 ) of the flange ( 1 ) a third insulator ring ( 23 ) is arranged, whose outer diameter is smaller than the inner diameter of the first insulator ring ( 21 ), and the sealing ring ( 26 ) between the first insulator ring ( 21 ) and the third isolator ring ( 23 ) is arranged. Coolant feedthrough according to claim 5, characterized in that the third insulator ring ( 23 ) has a collar (K) which in the opening ( 32 ) of the counter surface ( 31 ) protrudes around the flange ( 1 ) with respect to the opening ( 32 ) and from the opening ( 32 ) electrically isolate.

Images